U.S. patent application number 12/985006 was filed with the patent office on 2011-05-05 for optical defect inspection apparatus.
This patent application is currently assigned to Hitachi High-Technologies, Corp.. Invention is credited to Noriyuki AIZAWA, Hiroyuki Kawakami, Yusuke Miyazaki, Kazuo Takahashi, Shingo Tanaka, Kazuhiro Zama.
Application Number | 20110102781 12/985006 |
Document ID | / |
Family ID | 38478570 |
Filed Date | 2011-05-05 |
United States Patent
Application |
20110102781 |
Kind Code |
A1 |
AIZAWA; Noriyuki ; et
al. |
May 5, 2011 |
OPTICAL DEFECT INSPECTION APPARATUS
Abstract
A laser beam oscillated from a laser source is folded in its
path by first and second plane mirrors and enters a beam expander.
The surface of each plane mirror is deteriorated with illumination
by the laser beam and the reflectance is reduced. To avoid a light
quantity of the laser beam entering the beam expander from being
reduced below a reference value, when the laser beam is illuminated
over a certain time, a position on each of the first and second
plane mirrors at which the laser beam is illuminated is changed by
a structure for rotating and/or translating a reflecting surface of
each plane mirror on a plane, which includes the plane mirror,
while an optical axis is kept same. Thus, the useful life of each
plane mirror can be prolonged without displacing the optical
axis.
Inventors: |
AIZAWA; Noriyuki;
(Hitachinaka, JP) ; Kawakami; Hiroyuki; (Hitachi,
JP) ; Zama; Kazuhiro; (Mito, JP) ; Takahashi;
Kazuo; (Ninomiya, JP) ; Miyazaki; Yusuke;
(Hitachinaka, JP) ; Tanaka; Shingo; (Hitachinaka,
JP) |
Assignee: |
Hitachi High-Technologies,
Corp.
Tokyo
JP
|
Family ID: |
38478570 |
Appl. No.: |
12/985006 |
Filed: |
January 5, 2011 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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12705031 |
Feb 12, 2010 |
7894052 |
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12985006 |
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12275746 |
Nov 21, 2008 |
7746461 |
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12705031 |
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11709873 |
Feb 23, 2007 |
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12275746 |
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Current U.S.
Class: |
356/237.2 |
Current CPC
Class: |
G01N 2021/9513 20130101;
G01N 2021/95676 20130101; G01N 21/9501 20130101; G01N 21/94
20130101; H01L 22/12 20130101 |
Class at
Publication: |
356/237.2 |
International
Class: |
G01N 21/00 20060101
G01N021/00 |
Foreign Application Data
Date |
Code |
Application Number |
Feb 24, 2006 |
JP |
2006-048124 |
Feb 24, 2006 |
JP |
2006-048130 |
Mar 14, 2006 |
JP |
2006-068476 |
Claims
1. An optical defect inspection apparatus including a beam
deflection mechanism comprising: a laser source; a first reflecting
mirror for reflecting a laser beam emitted from said laser source
at a predetermined angle; and a second reflecting mirror for
reflecting again the laser beam reflected by said first reflecting
mirror and producing a laser beam which advances in a predetermined
direction with respect to the laser beam emitted from said laser
source, wherein said optical defect inspection apparatus further
includes a reflecting mirror moving mechanism for moving at least
one of said first reflecting mirror and said second reflecting
mirror relative to an optical axis of the beam incident thereto
while an angle of incidence and an angle of reflection of the laser
beam with respect to the moved reflecting mirror are maintained and
without displacing an optical axis of the reflected beam.
2. The optical defect inspection apparatus according to claim 1,
wherein at least one of the predetermined angle at which the laser
beam is reflected by said first reflecting mirror and the
predetermined angle at which the laser beam is reflected by said
second reflecting mirror is substantially 90 degrees, and said
reflecting mirror moving mechanism moves at least one of said first
reflecting mirror and said second reflecting mirror in the
direction substantially parallel to a reflecting surface of the
moved reflecting mirror without displacing an optical axis of the
reflected beam.
3. The optical defect inspection apparatus according to claim 1,
wherein at least one of the predetermined angle at which the laser
beam is reflected by said first reflecting mirror and the
predetermined angle at which the laser beam is reflected by said
second reflecting mirror is substantially 90 degrees, and said
reflecting mirror moving mechanism rotates at least one of said
first reflecting mirror and said second reflecting mirror while the
moved reflecting mirror is kept in a substantially parallel
condition with respect to a reflecting surface thereof and without
displacing an optical axis of the reflected beam.
4. The optical defect inspection apparatus according to claim 3,
wherein said reflecting mirror moving mechanism includes a
mechanism for linearly moving at least one of said first reflecting
mirror and said second reflecting mirror while the moved reflecting
mirror is kept in a substantially parallel condition with respect
to the reflecting surface thereof and without displacing an optical
axis of the reflected beam.
5. The optical defect inspection apparatus according to claim 1,
wherein said optical defect inspection apparatus further includes a
light quantity measuring mechanism for measuring a light quantity
of the laser beam reflected by at least one of said first
reflecting mirror and said second reflecting mirror.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to an apparatus and a method
for inspecting an object to be inspected (i.e., an inspection
target). More particularly, the present invention is adapted for an
optical defect inspection apparatus and method for inspecting
foreign matters, defects, etc. on inspected objects in
manufacturing processes of, e.g., semiconductor devices, flat panel
displays, magnetic disks, and masks.
[0003] 2. Description of the Related Art
[0004] The capability of detecting finer defects is demanded in an
optical defect inspection apparatus for illuminating a light to an
object to be inspected, such as a semiconductor device and a flat
panel display, and measuring the light reflected or scattered from
the object. To meet such a demand, using a light source with higher
luminance is required and a laser beam is mainly used as the light
source. One known inspection apparatus using the laser beam is
disclosed in Patent Document 1 (JP,A 2005-156537). On the other
hand, with an increase of needs for unified management of
inspection conditions, stability and reproducibility of the
inspection apparatus are also demanded in addition to higher
detection sensitivity.
[0005] When a laser beam is employed as the light source, a thin
beam with a high illumination density has to be used until reaching
an ND (Neutral Density) filter, which is used to adjust the light
quantity (intensity), due to the necessity of avoiding an increase
in size of an ND filer mechanism. Also, from the viewpoint of
ensuring flexibility in apparatus layout, the inspection apparatus
is usually constructed such that a thin beam with a high
illumination density is reflected several times within an apparatus
housing by reflecting mirrors (plane mirrors). In such a case, when
the laser beam is illuminated to the same position of the plane
mirror for a long time, there occurs a problem in stability that
the mirror surface in an illuminated area is deteriorated, the
reflection is reduced, and the illumination intensity cannot be
held at a required level.
[0006] If the reflectance is reduced, the plane mirror has to be
replaced. After the replacement, a slight deviation of an optical
axis is unavoidable. To compensate for such a deviation of the
optical axis, Patent Document 2 (JP,A 2004-45111) discloses the
provision of a mechanism for changing an angle of a plane
mirror.
[0007] Further, in addition to the above-mentioned change of the
illumination intensity due to deterioration of the plane mirror,
dust generated from an actuator and a variation of the focal length
caused by flexing of the inspected object become factors acting to
reduce stability and reproducibility of the inspection apparatus.
One example of actuators having a structure to cope with generation
of dust is disclosed in Patent Document 3 (JP,A 7-235579).
SUMMARY OF THE INVENTION
[0008] For the purpose of avoiding intricate adjustment of the
optical axis, the known apparatus is constructed such that the
laser beam is illuminated to the same point on the plane mirror
(reflecting mirror). However, replacing the plane mirror whenever
its reflection is reduced causes a problem in point of cost
efficiency. Also, changing the laser illuminated point on the plane
mirror to avoid frequent replacement is not easy to practice in the
known apparatus.
[0009] An object of the present invention is to prolong the useful
life of a plane mirror (each of first and second plane mirrors)
without displacing an optical axis itself, taking into account the
above-described problem that when a laser beam is employed as the
light source and a thin beam with a high illumination density is
illuminated to the same position on each of the first and second
plane mirrors for a long time, the surface of the plane mirror is
deteriorated, the reflectance is reduced, and the light quantity
cannot be held at a required level.
[0010] With a progress toward finer patterns of semiconductor
devices, the presence of dust in manufacturing and inspection steps
of the semiconductor devices, particularly, in steps of processing
an object (wafer) to be inspected, gives a significant influence
upon a yield of products. In a processing apparatus and an
inspection apparatus used in the wafer processing steps, therefore,
it is desired that no dust is generated from the apparatuses. The
generation of dust causes deposition of foreign matters on the
inspected object during transport and inspection thereof, and
deteriorates reproducibility of the inspection apparatus. Among
various dust sources, in particular, actuators used in various
mechanisms and tending to easily generate powdery dust with sliding
give rise to serious influences, and therefore they are desired to
be kept from generating dust.
[0011] Besides the actuator disclosed in Patent Document 3, another
known actuator for a linearly reciprocating device is shown in FIG.
14. The known actuator for the linearly reciprocating device of
FIG. 14 has the problem that dust generated inside a cylinder 803
is discharged together with pressurized air leaking through a
clearance between a piston rod 805 and a seal ring 807.
[0012] In order to avoid the above problem, a dust collection
chamber 803C for collecting the pressurized air including generated
dust is required to be disposed around the piston rod 805 and the
seal ring 807. The provision of the dust collection chamber 803C
significantly limits layout of a vacuum source 821 and a line 819,
which are also arranged nearby for evacuation. There is hence a
demand for a linearly reciprocating device which can suppress the
generation of dust without needing the vacuum source and the line
for evacuation.
[0013] Further, in a manufacturing process of a 300-mm wafer, the
rear surface of the wafer is also finished to a mirror-smooth
surface. However, deposited foreign matters and protrusive defects
on the rear surface deteriorate flatness of the front surface and
cause abnormal focusing of exposed light in the lithography step.
Also, the foreign matters deposited on the rear surface may shift
to the front surface and reduce a yield in some cases. For that
reason, the function of detecting defects on the rear surface is
demanded.
[0014] For inspecting the rear surface of an inspected object, it
is required to hold the inspected object at the edge thereof and
inspect the rear surface in a non-contact manner. However, because
there are no contact portions to support the rear surface of the
inspected object, a reduction may occur in flatness of the
inspected object, or flexing of the inspected object itself may
occur. Accordingly, the height of the front surface of the
inspected object is deviated from the focal length of an optical
system, thus deteriorating stability and reproducibility of the
inspection apparatus, such as a reduction of sensitivity, a larger
variation of sensitivity, and degradation in accuracy of
coordinates set on the inspected object. Improvement of the
flatness and compensation of the flexing have been practiced by a
method of spraying gas with high cleanness to the rear surface of
the inspected object and compensating for the flexing of the
inspected object by the action of gas pressure. At a level of
sensitivity having been required so far, such a method can hold a
variation in the height of the front surface of the inspected
object within the focal range of the optical system and can realize
a measurement that satisfies the required levels of the sensitivity
variation and the coordinate accuracy. With a trend toward higher
sensitivity of the defect inspection apparatus, however, higher
flatness of the inspected object is demanded.
[0015] Generally, the higher sensitivity, the shallower is the
focal depth of the optical system. This means that, at the level of
flatness which has been used so far, a local deviation of the focal
position is caused on the front surface of the inspected object,
thus resulting in a variation and reduction of sensitivity on the
front surface of the inspected object, as well as degradation of
the coordinate accuracy for the detected foreign matters. Further,
the method of spraying gas to the rear surface of the inspected
object and compensating for the flexing thereof has a limitation on
flatness that can be realized. In addition, that method requires
complicated control for spraying gas so as to be adapted for a
variety of inspected objects which differ in film type, thickness,
crystal azimuth, extent of warp, etc. To overcome those problems, a
system capable of always compensating for the deviation of the
focal position on the front surface of the inspected object is
demanded.
[0016] To overcome the above problems and to achieve the above
object, the present invention is featured in providing one or more
mechanisms capable of moving a beam illuminated position on each of
a first reflecting mirror and a second reflecting mirror, which
reflect an illuminated laser beam, and changing a position of
reflection on the reflecting mirror with one or both of rotation
and translation of the reflecting mirror on a reflecting including
the reflecting mirror while an optical axis itself is kept same,
thereby allowing the use of a position on the reflecting mirror
where the reflectance is not reduced. Also, those mechanisms can be
realized with a manual, automatic or programmed way based on the
illumination intensity measured before and behind the reflecting
mirror.
[0017] One feature of the present invention resides in an optical
defect inspection apparatus including a beam deflection mechanism
comprising a laser source, a first reflecting mirror for reflecting
a laser beam emitted from the laser source at a predetermined
angle, and a second reflecting mirror for reflecting again the
laser beam reflected by the first reflecting mirror and producing a
laser beam which advances in a predetermined direction with respect
to the laser beam emitted from the laser source, wherein the
optical defect inspection apparatus further includes a reflecting
mirror moving mechanism for moving at least one of the first
reflecting mirror and the second reflecting mirror while an angle
of incidence and an angle of reflection of the laser beam are
maintained same.
[0018] Another feature of the present invention resides in that at
least one of the predetermined angle at which the laser beam is
reflected by the first reflecting mirror and the predetermined
angle at which the laser beam is reflected by the second reflecting
mirror is substantially 90 degrees, and the reflecting mirror
moving mechanism moves at least one of the first reflecting mirror
and the second reflecting mirror such that a reflecting surface of
the moved reflecting mirror is kept in a substantially parallel
condition.
[0019] Still another feature of the present invention resides in
that at least one of the predetermined angle at which the laser
beam is reflected by the first reflecting mirror and the
predetermined angle at which the laser beam is reflected by the
second reflecting mirror is substantially 90 degrees, and the
reflecting mirror moving mechanism rotates at least one of the
first reflecting mirror and the second reflecting mirror such that
a reflecting surface of the moved reflecting mirror is rotated
substantially parallel.
[0020] Still another feature of the present invention resides in
that the reflecting mirror moving mechanism includes a mechanism
for linearly moving at least one of the first reflecting mirror and
the second reflecting mirror such that the reflecting surface of
the moved reflecting mirror is kept in a substantially parallel
condition.
[0021] Still another feature of the present invention resides in
that the optical defect inspection apparatus further includes a
light quantity measuring mechanism for measuring a light quantity
of the laser beam reflected by at least one of the first reflecting
mirror and the second reflecting mirror.
[0022] Still another feature of the present invention resides in a
defect inspection apparatus including a linearly moving device
which comprises a cylinder having a piston chamber and a dust
collection chamber which are formed therein adjacent to each other,
a piston disposed in the piston chamber to be able to slide and
reciprocate therein, a piston rod fixed to the piston and extended
to the outside of the cylinder after penetrating through an
adjacent wall and the cylinder, and a biasing spring disposed in
the piston chamber and acting to press the piston in a direction
toward the dust collection chamber, wherein the piston is operated
such that the piston is moved against the biasing spring by
pressurized air supplied to one side of the piston chamber divided
by the piston and is pushed back by a resilient force of the
biasing spring, and gas in the dust collection chamber is moved
toward the other side of the piston chamber in which pressure is
lowered with an increase of a space volume corresponding to the
pushed-back movement of the piston.
[0023] Still another feature of the present invention resides in
that the linearly moving device employs, as the biasing spring, a
compression-type biasing spring and the compression-type biasing
spring is built in the other side of the piston chamber.
[0024] Still another feature of the present invention resides in a
defect inspection apparatus including a linearly moving device
which comprises a cylinder having a piston chamber and a dust
collection chamber which are formed therein adjacent to each other,
a piston disposed in the piston chamber to be able to slide and
reciprocate therein, a piston rod fixed to the piston and extended
to the outside of the cylinder after penetrating through an
adjacent wall within the cylinder and an outer wall of the dust
collection chamber, a biasing spring disposed in one side of the
piston chamber divided by the piston and acting to press the piston
in a direction toward the dust collection chamber, a pressurized
air pump for supplying pressurized air to the other side of the
piston chamber in which the biasing spring is not disposed (i.e., a
biasing spring not-built-in chamber), a pressurized air tube
allowing passage of the pressurized air therethrough, a flow
switching solenoid valve disposed in the pressurized air tube, a
discharge tube communicating with the one side of the piston
chamber in which the biasing spring is disposed (i.e., a biasing
spring built-in chamber), a filter disposed in the discharge tube
and filtering out dust in discharged gas, and a
dust-collection-chamber discharge tube for communicating the dust
collection chamber with the aforesaid discharge tube or the biasing
spring built-in chamber, wherein a check valve for the
dust-collection-chamber discharge tube is disposed in the
dust-collection-chamber discharge tube to check a gas flow
directing from the biasing spring built-in chamber toward the dust
collection chamber, and a check valve for the discharge tube is
disposed in the discharge tube to check a gas flow directing from
the filter toward the biasing spring built-in chamber.
[0025] Still another feature of the present invention resides in
that, in any of the above-described defect inspection apparatuses
each including the linearly moving device, the piston operates a
wafer clamping mechanism or a wafer handling/carrying
mechanism.
[0026] Still another feature of the present invention resides in
that, in any of the above-described defect inspection apparatuses
each including the linearly moving device, the pressurized air pump
and the flow switching solenoid valve are disposed in a down flow
area which is not subjected to dust cleaning, while other
components than the pressurized air pump and the flow switching
solenoid valve are disposed in a clean flow area which is subjected
to dust cleaning.
[0027] Still another feature of the present invention resides in a
defect inspection apparatus comprising a light illuminating unit
for illuminating a light to an object to be inspected, a first
light detecting unit of an optical system for detecting a light
scattered from the inspected object, an inspected object moving
unit for moving the inspected object such that a position on the
inspected object illuminated by the light from the light
illuminating unit is changed, an inspected object holding unit for
holding the inspected object, and a focal position aligning unit
for detecting the light illuminated from the light illuminating
unit and reflected by the inspected object, obtaining height
information of a surface of the inspected object, and aligning a
focal position of the first light detecting unit of the optical
system based on the obtained information.
[0028] Still another feature of the present invention resides in
that, in any of the above-described defect inspection apparatuses,
the focal position aligning unit includes a second light detecting
unit for detecting the light illuminated from the light
illuminating unit and reflected by the inspected object, and a
control system for executing control based on height information,
which is detected by the second light detecting unit and is fed
back, such that the focal position and the surface of the inspected
object are held at the same height.
[0029] Still another feature of the present invention resides in,
in any of the above-described defect inspection apparatuses,
further comprising a light quantity optimizing unit for optimizing
a quantity of the reflected light from the inspected object by an
optical element, etc.
[0030] Still another feature of the present invention resides in
that, in any of the above-described defect inspection apparatuses,
the inspected object is supported at an outer peripheral edge
thereof by the inspected object holding unit, thereby enabling the
inspected object to be inspected while a rear surface of the
inspected object is kept in a non-contact state.
[0031] Still another feature of the present invention resides in
that, in any of the above-described defect inspection apparatuses,
the focal position is aligned by combined control of an operation
of vertically moving the inspected object holding unit and an
operation of spraying the gas toward the rear surface thereof.
[0032] Still another feature of the present invention resides in
that, in any of the above-described defect inspection apparatuses,
the inspected object is two-dimensionally moved by moving the
inspected object in one direction while the inspected object is
rotated.
[0033] According to the one feature of the present invention, since
the reflecting mirror is provided with the translation mechanism
and the rotation mechanism both causing no displacements of the
optical axis, frequency of part replacement can be reduced and
alignment of the optical axis of the reflecting mirror can be
dispensed with.
BRIEF DESCRIPTION OF THE DRAWINGS
[0034] FIG. 1 is a diagram showing the construction of an
illumination optical system according to a first embodiment of the
present invention;
[0035] FIG. 2 is a schematic view showing the construction of a
plane mirror moving mechanism according to the first embodiment of
the present invention;
[0036] FIG. 3 is a diagram for explaining one practical operation
of the plane mirror moving mechanism and a control unit according
to the first embodiment of the present invention;
[0037] FIG. 4 illustrates a setting screen which is used to set
deterioration diagnosis conditions for a plane mirror in the first
embodiment of the present invention;
[0038] FIG. 5 illustrates a setting screen which displays a history
record in the first embodiment of the present invention;
[0039] FIG. 6 is a schematic plan view showing the construction of
a surface inspection apparatus according to a second embodiment of
the present invention;
[0040] FIG. 7 is a schematic view for explaining a mechanism for
gripping an object to be inspected according to the second
embodiment of the present invention;
[0041] FIG. 8 is a schematic view showing the construction of a
linearly reciprocating device according to the second embodiment of
the present invention;
[0042] FIGS. 9A and 9B are schematic views for explaining the
operation of the linearly reciprocating device according to the
second embodiment of the present invention;
[0043] FIG. 10 is a schematic view showing the construction of a
wafer surface inspection apparatus according to the second
embodiment of the present invention;
[0044] FIG. 11 is a schematic view showing a chuck of an
inspected-object holding unit according to the second embodiment of
the present invention;
[0045] FIG. 12 is a circuit diagram for explaining control of the
height of the inspected object surface, which is performed by
feed-backing information about the height of the inspected object
surface to a control system;
[0046] FIGS. 13A and 13B are schematic views showing light quantity
adjusting unit according to the second embodiment of the present
invention; and
[0047] FIG. 14 is a schematic view of a known linearly
reciprocating device.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
First Embodiment
[0048] A first embodiment of the present invention will be first
described in detail below with reference to the drawings. A defect
inspection apparatus of the first embodiment is intended to
suppress variations of conditions, such as a reduction of light
quantity (intensity) caused by deterioration of a plane mirror
(reflecting mirror), with the provision of a translation mechanism
and/or a rotation mechanism, which does not displace an optical
axis of the plane mirror, in an optical system.
[0049] FIG. 1 schematically shows the construction of an
illumination optical system according to the first embodiment of
the present invention. The illumination optical system primarily
comprises a laser source 3 for emitting an illumination light,
e.g., a visible or ultraviolet laser beam, a beam deflection
mechanism 4 made up of a plurality of pane mirrors, such as a first
plane mirror (reflecting mirror) 4a and a second plane mirror
(reflecting mirror) 4b, for deflecting the direction of advance of
an oscillated later beam L1, an ND filter 6 for adjusting a light
quantity, an expander 5 for adjusting a beam diameter, a beam
splitter 30 for splitting the laser beam L1, an object lens 11 for
shaping the beam shape of the laser beam L1 advancing along one of
split paths and illuminating it to the surface of an object 2 to be
inspected, a beam profile observation camera 31 for picking up an
image of the laser beam L1 advancing along the other split path,
and a host computer 71 for controlling the entirety of the
inspection apparatus.
[0050] The first plane mirror 4a is arranged to reflect the laser
beam L1 at a predetermined angle. The second plane mirror 4b is
arranged to reflect again the laser beam L1, which has been
reflected by the first plane mirror 4a, at a predetermined angle so
that the laser beam L1 advances in a predetermined direction with
respect to the direction in which the laser beam L1 was emitted
from the laser source 3. In this first embodiment, the laser beam
L1 is reflected at an angle of substantially 90.degree. two times.
Such an uneven parallel arrangement of the laser source 3 and the
optical elements is advantageous in improving maintainability,
e.g., adjustment of the optical system and replacement of the laser
source 3 after expiration of its life.
[0051] Those two angles of reflection of the laser beam L1 are not
limited to 90.degree. or thereabout. It is just enough that at
least one of the two angles of reflection of the laser beam L1 is
substantially 90.degree.. When the angle of reflection of the laser
beam L1 is other than 90.degree., a plurality of plane mirrors may
be arranged such that the illuminated laser beam L1 and the
reflected laser beam L1 are alternately reflected by and
illuminated to the plane mirrors. The angles of the plane mirrors
may be set equal to each other for parallel arrangement, or the
angle of one or more intermediate plane mirrors may be changed so
long as the laser beam L1 can be bent to advance in the
predetermined direction.
[0052] The laser beam L1 oscillated from the laser source 3 is
reflected by the first plane mirror 4a substantially at 90.degree.
to advance downward. Then, the laser beam L1 is reflected again by
the second plane mirror 4b substantially at 90.degree. to advance
horizontally. The laser beam L1 thus folded in its path enters the
ND filter 6 in which the light quantity is adjusted, and then
enters the beam expander 5 in which the beam diameter is
adjusted.
[0053] The first plane mirror 4a and the second plane mirror 4b are
controlled by a control unit 41 of plane mirror moving mechanisms
such that illuminated positions on those mirrors can be moved while
the angles of incidence and the angles of reflection are kept same
by plane mirror moving mechanisms 40a and 40b corresponding to the
first and second plane mirror 4a, 4b, respectively. In other words,
the positions on the first plane mirror 4a and the second plane
mirror 4b where the laser beam L1 is illuminated can be changed
without displacing an optical axis. The adjustment of the light
quantity in the ND filter 6 is controlled through an ND filter
moving mechanism 61 by a control unit 60 of the ND filter moving
mechanism, and the adjustment of the beam diameter in the beam
expander 5 is controlled through a beam expander adjusting
mechanism 50 by a control unit 51 of the beam expander adjusting
mechanism.
[0054] After passing through various optical elements for control
of the beam status such as the state of polarization and the beam
diameter, the laser beam L1 is split into two paths by the beam
splitter 30. The laser beam L1 advancing along one of the split
paths passes through several optical elements for adjustment of the
beam shape and status, and is illuminated to the surface of the
inspected object 2 through the object lens 11. An image of the
laser beam L1 advancing along the other split path is picked up by
the beam profile observation camera 31, whereby the position of the
laser beam L1 and the illuminance distribution within the laser
beam L1 are displayed on a monitor 70. The host computer 71
transmits and receives data among the control unit 41 of the plane
mirror moving mechanisms, the control unit 60 of the ND filter
moving mechanism, and the control unit 51 of the beam expander
adjusting mechanism in accordance with instructions entered from an
input device (not shown), such as a keyboard or a mouse, and it
drives the plane mirror moving mechanisms 40a and 40b, the ND
filter moving mechanism 61, and the beam expander adjusting
mechanism 50 which correspond to the those control units, thereby
controlling the beam status of the laser beam L1. Further, the host
computer 71 executes overall control of the defect inspection
apparatus including, e.g., not only display of various setting
conditions, the inspection results, the operating state of the
inspection apparatus, etc. on the monitor 70, but also outputting
of such information to an output device (not shown).
[0055] FIG. 2 schematically shows the construction of the plane
mirror moving mechanism 40a. Since the plane mirror moving
mechanism 40b also has the same construction, the plane mirror
moving mechanism 40a is described here as a typical example.
[0056] The plane mirror moving mechanism 40a comprises a stage 45a
for supporting the plane mirror 4a in a fixed state, an
extension/retraction driving mechanism (linear driving mechanism)
42a for moving the plane mirror 4a while keeping the reflecting
surface of the plane mirror 4a in a substantially parallel
condition, a rotation driving mechanism 43a for rotating the plane
mirror 4a while keeping the reflecting surface of the plane mirror
4a in a substantially parallel condition, an angle correcting
mechanism 46a for correcting the angle of the reflecting surface,
and a distance correcting mechanism 47a for correcting the distance
between the laser source 3 and the plane mirror 4a or the distance
between the plane mirrors 4a and 4b.
[0057] Position sensors (not shown) are disposed respectively in
association with the extension/retraction driving mechanism 42a,
the rotation driving mechanism 43a, the angle correcting mechanism
46a, and the distance correcting mechanism 47a.
[0058] The control unit 41 of the plane mirror moving mechanisms
calculates coordinate values of the position of the plane mirror 4a
based on a signal from the associated position sensor (not shown),
and controls the plane mirror 4a to be moved to the position
coordinates, which are instructed from the host computer 71,
through the extension/retraction driving mechanism 42a and the
rotation driving mechanism 43a. The calculation of the position
coordinates may be executed by the host computer 71.
[0059] The position coordinates of the plane mirror 4a fixed on the
stage 45a are changed with rotation by the rotation driving
mechanism 43a and with movement in the direction of one axis by the
extension/retraction driving mechanism 42a, for example, on
condition that a point for start of the illumination by the laser
beam L1 is set to substantially the center of the plane mirror 4a.
Accordingly, the position illuminated by the laser beam L1 is
relatively moved on the reflecting surface of the plane mirror 4a
along a spiral, volute or circular locus while maintaining the
state of the optical axis, whereby a usable area of the reflecting
surface is enlarged. The enlargement of the usable area is
controlled by the pitch at which the plane mirror 4a is moved by
the extension/retraction driving mechanism 42a, and the useful life
of the plane mirror 4a is drastically prolonged. Also, with the
provision of the position sensor, the coordinates of the
illuminated position can be correctly measured. It is therefore
possible to restore the past inspection state and to search for and
select a satisfactory position within the reflecting surface of the
plane mirror 4a. With the provision of the angle correcting
mechanism 46a and the distance correcting mechanism 47a, it is
further possible to absorb variations in mounting accuracy,
thickness, parallelism, and surface flexure depending on individual
plane mirrors 4a, to facilitate (automate) the correction of the
optical axis at the time of part replacement, and to keep the
optical axis in a stable state.
[0060] While this first embodiment uses the plane mirror moving
mechanism 40a capable of ensuring high efficiency in use of the
plane mirror 4a and holding the optical axis with high accuracy,
only a moving mechanism for moving the plane mirror 4a while
keeping the reflecting surface of the plane mirror 4a in a
substantially parallel condition may also be used instead.
Alternatively, only a moving mechanism for rotating the plane
mirror 4a while keeping the reflecting surface of the plane mirror
4a in a substantially parallel condition may be used instead. Those
modifications are inferior in efficiency of use to the first
embodiment, but they are advantageous in that the size and the
production cost of the plane mirror moving mechanism 40a can be
reduced. Further, although the position sensors associated with the
extension/retraction driving mechanism 42a and the rotation driving
mechanism 43a are necessary to restore the past inspection
conditions and to select a satisfactory position on the reflecting
surface of the plane mirror 4a, they are not essential from the
viewpoint of enlarging the usable area of the reflecting surface.
In other words, a simple moving mechanism known to those skilled in
the art and made of gears, a belt, etc. may also be used to move
the illuminated position in units of a predetermined distance.
[0061] The surface of each of the first plane mirror 4a and the
second plane mirror 4b is deteriorated and its reflectance is
reduced when the mirror surface is exposed to the laser beam L1 for
a long time. In order to prevent the light quantity of the laser
beam entering the beam expander 5 from being reduced to a reference
value or below due to the reduction of the mirror reflectance, the
position on each of the first plane mirror 4a and the second plane
mirror 4b where the laser beam L1 emitted from the laser source 3
is illuminated is changed by driving the plane mirror moving
mechanism 40a and the plane mirror moving mechanism 40b without
changing the optical axis itself, when the irradiation time of the
laser beam L1 exceeds a certain period, for example. As an
alternative, the host computer 71 may control the control unit 41
of the plane mirror moving mechanisms to change the illuminated
position, while monitoring change of the light quantity reflected
by the plane mirror, at the time when the monitored light quantity
is reduced to a preset threshold or below.
[0062] Thus, by employing the structure capable of rotating the
specular surface of each of the plane mirrors in the beam
deflection mechanism 4, or the structure capable of translating the
specular surface, or both of those structures, replacement
frequency of the plane mirror can be drastically reduced and the
adjustment of the optical axis can be dispensed with. Further, it
is possible to suppress mixing of dust into the optical system,
which may be caused by the part replacement, and to hold down an
increase in amount of foreign matters generated from the optical
system.
[0063] FIG. 3 shows one practical example of a process for
controlling the plane mirror moving mechanism. A first light
quantity monitor 13 (i.e., first light quantity measuring means)
capable of measuring a light quantity is arranged between the laser
source 3 and the first plane mirror 4a which can be rotated and/or
translated without changing the optical axis. Also, a second light
quantity monitor 14 (i.e., second light quantity measuring means)
capable of measuring a quantity of the reflected light is arranged
downstream of the second plane mirror 4b which can be rotated
and/or translated without changing the optical axis. While this
first embodiment is designed to measure a rate of deterioration
resulting from both the surfaces of the first plane mirror 4a and
the second plane mirror 4b, the quality of the reflected light may
be measured for at least one of the two plane mirrors because the
deterioration of the mirror surface is progressed substantially at
the same rate. A similar function can also be obtained with another
example in which the second light quantity measuring means is
arranged between the first plane mirror 4a and the second plane
mirror 4b. Further, if the light quantity is not changed with the
movement of the illuminated position, this can be determined as
indicating deterioration of the laser beam 3. Therefore, the light
quantity measuring means may be constituted only by the second
light quantity monitor 14 to measure the sum of deterioration of
the laser source 3 and deteriorations of the first plane mirror 4a
and the second plane mirror 4b. The plurality of light quantity
measuring mechanisms, i.e., the first light quantity monitor 13 and
the second light quantity monitor 14, are movable by a driving
mechanism (not shown) corresponding to the first light quantity
monitor and a driving mechanism (not shown) corresponding to the
second light quantity monitor, respectively, such that both the
monitors are moved to come into the optical axis only when the
light quantity is measured, and that they are moved away from the
optical axis when defects of the inspected object 2 are
inspected.
[0064] The initial light quantity of the laser beam L1 oscillated
from the laser source 3 is measured by the first light quantity
monitor 13, and an electric signal (analog signal) from the monitor
13 is inputted to a first A/D converter 22a. The light quantity of
the laser beam L1 having attenuated through the reflections by the
first plane mirror 4a and the second plane mirror 4b is measured by
the second light quantity monitor 14, and an electric signal
(analog signal) from the monitor 14 is inputted to a second A/D
converter 22b. The respective light quantities of the laser beam L1
measured by the first light quantity monitor 13 and the second
light quantity monitor 14 are displayed on the monitor 70. Thus, it
is possible to confirm not only the attenuation of the light
quantity caused by the beam deflection mechanism 4, but also the
deteriorated state of the laser source 3.
[0065] The analog signals inputted to the first A/D converter 22a
and the second A/D converter 22b are both converted to digital
signals which are inputted to a comparator 23. Based on the signal
from the first A/D converter 22a, which represents the initial
light quantity of the laser beam L1, and the signal from the second
A/D converter 22b, which represents the light quantity of the laser
beam L1 having attenuated through the beam deflection mechanism 4,
the comparator 23 calculates the deterioration rate of both the
first plane mirror 4a and the second plane mirror 4b and then
transmits the calculated data to a CPU 24. The transmitted
deterioration rate is displayed on the monitor 70 via the CPU
24.
[0066] A storage device 25 previously stores a threshold which is
used as a reference for comparison of the deterioration rate and is
entered through the input device (not shown). The CPU 24 compares
the threshold with the deterioration rate which has been calculated
by the comparator 23. At the time when the deterioration rate
exceeds the threshold, an alarm for prompting the operator to move
the illuminated position on each of the first plane mirror 4a and
the second plane mirror 4b is displayed on the monitor 70 (i.e.,
plane-mirror alarm display means). Also, when the deterioration
rate of the laser source 3 exceeds a predetermined value, an alarm
for prompting the operator to replace the laser source 3 is
likewise displayed on the monitor 70 (i.e., laser-source alarm
display means).
[0067] For the measurement of the first light quantity monitor 13
and the second light quantity monitor 14 arranged as described
above, a select function box is displayed on a display screen so
that the operator can selectively start the measurement before the
start of alignment or at the start of alignment.
[0068] The measurement of the first light quantity monitor 13 and
the second light quantity monitor 14 arranged as described above
can be started by clicking a button or an icon displayed on a
maintenance screen.
[0069] The above-described alarm is displayed on the monitor 70 in
the form of a dialog after the measurement, or is continuously
displayed on a part of the screen until the plane mirror is moved,
thus prompting the operator to move the relevant plane mirror.
[0070] In addition, an expiration date is also displayed as a guide
for the remaining useful life.
[0071] When the plane mirror 4a or 4b is moved, the operator
optionally sets the distance through which the plane mirror is to
be moved.
[0072] When the plane mirror 4a or 4b is moved, the moving
mechanism is operated to move the plane mirror at intervals of a
pitch set as one of the parameters.
[0073] When the plane mirror 4a or 4b is moved, it is moved so as
to provide an optimum light quantity in an automatic manner.
[0074] FIG. 4 shows one example of a setting screen used in this
first embodiment. A diagnosis condition setting means (function) 80
is incorporated in the setting screen displayed for maintenance on
the monitor 70. A screen indicating the diagnosis condition setting
means 80 can be displayed, though not limited to particular one, by
clicking a button or an icon prepared on a main screen. The
diagnosis condition setting means 80 includes the functions
executed by a measurement timing setting means 81 for setting the
timing at which the light quantity is to be measured, a
deterioration diagnosis condition setting means 82 for setting
whether diagnosis is to be made or not and a reference for the
deterioration determination, a movement condition setting means 83
for setting conditions for moving the first plane mirror 4a and the
second plane mirror 4b, and a light-quantity adjustment condition
setting means 112 for setting whether the light quantity of the
laser beam L1 is to be adjusted or not when the plane mirror is
moved.
[0075] The measurement timing setting means 81 includes the
functions executed by an at-alignment measurement instructing means
84 for instructing the measurement to be executed at the time of
alignment of the inspected object 2, an at-carrying measurement
instructing means 85 for instructing the measurement to be executed
at the time of carrying the inspected object 2 (wafer), and a
fixed-time measurement instructing means 86 for instructing the
measurement to be executed at the fixed time. The at-alignment
measurement instructing means 84 includes the functions executed by
an alignment step selecting means 87 for selecting in which one of
steps the measurement is to be started, i.e., before the start, or
at the start, or after the end of the alignment. The at-carrying
measurement instructing means 85 includes the functions executed by
a carrying step selecting means 88 for selecting in which one of
steps the measurement is to be executed, i.e., at the time of
searching the inspected object 2 in a cassette or a hoop, or at the
time of carrying in the inspected object 2, or at the time of
carrying out it. The fixed-time measurement instructing means 86
includes the functions executed by a time selecting means 90 having
one or more time entry spaces 89 in each of which the time of
starting the measurement is entered, and enabling one or more
measurement start times to be selectively set. The measurement time
can be entered into the space 89 through an input device (not
shown), such as a keyboard or a mouse. Thus, the timing of
executing the measurement can be selected as one or more from among
the at-alignment measurement, the at-carrying measurement, and the
fixed-time measurement.
[0076] The deterioration diagnosis condition setting means 82
includes the functions executed by a first light quantity monitor
setting means 91, a second light quantity monitor setting means 92,
and a deterioration (diagnosis) reference setting means 93. The
first light quantity monitor setting means 91 includes the
functions executed by a first light quantity measurement
instructing means 115 for instructing whether the light quantity
measurement by the first light quantity monitor 13 is to be made or
not, and it has a first threshold entry space 94 in which a first
threshold for the liquid quantity is entered. When the light
quantity of the laser beam L1 does not satisfy the first threshold,
an alarm indicating the deterioration of the laser source 3 and a
message for prompting replacement thereof are displayed on the
monitor 70. Similarly, the second light quantity monitor setting
means 92 includes the functions executed by a second light quantity
measurement instructing means 95 and has a second threshold entry
space 96. When the deterioration reference setting means 93 is not
used, the deterioration diagnosis of the first plane mirror 4a and
the second plane mirror 4b may be performed based on a value of the
light quantity measured by the second light quantity monitor 14 and
the second threshold. The deterioration reference setting means 93
includes the functions executed by a deterioration diagnosis
instructing means 97 for instructing whether the deterioration
diagnosis of the first plane mirror 4a and the second plane mirror
4b is to be performed or not, and it has a third threshold entry
space 98 in which a reference value for the deterioration
determination is entered. When the deterioration rate calculated by
the comparator 23 does not satisfy the third threshold, an alarm
indicating the deterioration of the first plane mirror 4a and the
second plane mirror 4b and a message for prompting change of the
illustrated position are displayed on the monitor 70.
[0077] The movement condition setting means 83 includes the
functions executed by a distance-of-movement setting means 99 for
setting the distances through which the first plane mirror 4a and
the second plane mirror 4b are to be moved, and a determination
reference setting means 100 for setting a reference for the
determination on the mirror movement. The distance-of-movement
setting means 99 includes the functions executed by a moving mode
instructing means 101 for instructing a moving mode of the first
plane mirror 4a, and an angle-of-movement instructing means 102 and
a distance-of-movement instructing means 103 for instructing
pitches of the movement in the rotating direction and the linear
direction, respectively. The moving mode can be selected from three
modes, i.e., rotation, translation, and combination of rotation and
translation (spiral movement). The first plane mirror 4a is driven
to move in accordance with the pitches instructed by the
angle-of-movement instructing means 102 and the
distance-of-movement instructing means 103. Movement conditions for
the second plane mirror 4b are also set in a similar manner. The
determination reference setting means 100 includes the functions
executed by a manual operation instructing means 104 and an
automatic operation instructing means 105. The manual operation
instructing means 104 enables the operator to select one of two
modes provided by a setting condition selecting means 106 for
moving the first plane mirror 4a and the second plane mirror 4b in
accordance with the conditions instructed by the
distance-of-movement setting means 99, and by an optional condition
selecting means 107 for moving the first plane mirror 4a and the
second plane mirror 4b in accordance with an instruction from the
operator. When the setting condition selecting means 106 is
selected, a movement request/cancel screen is displayed upon the
alarm prompting the change of the illuminated position being
displayed on the monitor 70. Then, the first plane mirror 4a and
the second plane mirror 4b are moved by clicking a request (OK)
button on the confirmation screen. When the optional condition
selecting means 107 is selected, a setting screen similar to that
for the distance-of-movement setting means 99 is displayed and the
first plane mirror 4a and the second plane mirror 4b are moved by
entering data of the pitch for each movement and clicking a button
which is prepared on the displayed screen and which serves as a
movement instruction means. The automatic operation instructing
means 105 enables selection of one of two modes provided by a
periodic movement instructing means 108 for automatically moving
the first plane mirror 4a and the second plane mirror 4b in
accordance with an instructed period, and by a deterioration
diagnosis result instructing means 109 for moving the first plane
mirror 4a and the second plane mirror 4b in accordance with the
result of the deterioration diagnosis. In any of the two automatic
operation modes, the first plane mirror 4a and the second plane
mirror 4b are moved in accordance with the conditions set by the
distance-of-movement setting means 99. The periodic movement
instructing means 108 includes the function executed by a period
instructing means 110 for instructing a period after the lapse of
which the first plane mirror 4a and the second plane mirror 4b are
to be moved. In this first embodiment, such a period is defined as
an actual irradiation time of the laser beam L1 accumulated from
the preceding mirror movement. That period is not limited to a
particular one, and it may be given as the lapsed time from the
preceding mirror movement or set based on a calendar or a schedule,
such as the date of periodical diagnosis of the inspection
apparatus, the maintenance date, or the time several hours before
the start of the inspection. When the actual irradiation time
accumulated per inspection exceeds the period instructed by the
period instructing means 110, the first plane mirror 4a and the
second plane mirror 4b are moved. The accumulated actual
irradiation time (lapsed time) and the remaining time until the
next movement are always displayed by the function of a period
display means 111 disposed on a part of the monitor 70. When the
mode for moving the plane mirrors based on the diagnosis result is
selected by the deterioration diagnosis result instructing means
109, whether to move the plane mirrors or not is determined by the
CPU 24 based on the setting conditions set by the measurement
timing setting means 81 and the deterioration diagnosis condition
setting means 82, and the plane mirrors are moved in accordance
with the conditions set by the distance-of-movement setting means
99.
[0078] The light-quantity adjustment condition setting means 112
includes the functions executed by an adjustment request/cancel
instructing means 113 for instructing whether the light quantity of
the laser beam L1 is to be adjusted or not, and by an adjusted
light-quantity instructing means 114 for instructing a value of the
light quantity to be adjusted. The adjustment request/cancel
instructing means 113 enables the operator to select one of two
options, i.e., whether the light quantity of the laser beam L1 is
to be adjusted or not after moving the first plane mirror 4a and
the second plane mirror 4b. The adjusted light-quantity instructing
means 114 is constituted as an entry space in which a target value
of the light quantity to be adjusted can be set through the input
device.
[0079] For example, when the adjustment of the light quantity is
selected, the output of the laser source 3 is controlled so as to
provide the setting value of the adjusted light-quantity
instructing means 114 while measuring the light quantity of the
laser beam L1 by the second light quantity monitor 14. At the time
when the CPU 24 determines that the light quantity of the laser
beam L1 is substantially equal to the setting value, the light
quantity adjustment process is brought to an end and the output
value of the laser source 3 is held fixed.
[0080] FIG. 5 shows a history record representing the past state of
the light quantity and the driven state of each plane mirror moving
mechanism 40a (40b). The history record regarding the values of the
light quantity measured by the first light quantity monitor 13 and
the second light quantity monitor 14, the deterioration rate
calculated by the comparator 23, the dates when the first plane
mirror 4a and the second plane mirror 4b were moved, the
coordinates of the illuminated positions on the plane mirrors, etc.
are stored in the storage device 25 via the CPU 24. A history
record management chart 116 is displayed by clicking a button
representing the function of a history record display means 119,
which is prepared in the screen displayed on the monitor 70,
through the input device. The history record of the measured
results of the light quantity and the driven state of each plane
mirror moving mechanism 40a (40b) is displayed in a comment column
118 by selecting a plotted mark with a pointer 117. By clicking the
comment column 118, the state of the optical system is restored to
the state at the time corresponding to the selected mark. Changes
of the optical system can be more accurately confirmed by
performing the periodical measurement in accordance with an
instruction from the periodical measurement instructing means
86.
[0081] While the entry means and the display means for the setting
values are constituted, by way of example, in the form of spaces
and buttons in the first embodiment, other suitable signal
input/transmission means and display means are also usable, e.g.,
icons and a keyboard, so long as they can enter, transmit and
display signals.
Second Embodiment
[0082] A second embodiment of the present invention will be
described in detail below with reference to the drawings. This
second embodiment represents the case where the present invention
is applied to a surface inspection apparatus. The surface
inspection apparatus has the functions of inspecting not only the
front surface of an object to be inspected, but also the rear
surface thereof. The surface inspection apparatus includes the
plane mirror moving mechanisms, the light quantity measuring means,
the control means for them, and the diagnosis condition setting
means, which are all described above in connection with the first
embodiment, but an optical system in the second embodiment differs
from that in the first embodiment to some extent.
[0083] FIG. 6 schematically shows the construction of the surface
inspection apparatus of the second embodiment. The surface
inspection apparatus comprises one or more load ports 150 which
also serve to support an inspected object (wafer) 2, a carrying
section 200, a pre-alignment section 300, an inspection section
400, an optical section 450, an object reversing section (not
shown), and a data processing section 500. The optical section 450
including the plane mirror moving mechanisms and the light quantity
measuring means, both shown in FIGS. 1 and 3, are disposed above
the inspection section 400.
[0084] The data processing section 500 comprises a host computer
71, a signal processing section 510, an input device 520 such as a
keyboard, a mouse or a touch panel, a monitor (display) 70 such as
a CRT or a flat panel display, an output device 530 such as a
printer, and an external storage device 540 for controlling
external media. The host computer 71 includes a processing unit
511, a storage device 512 such as an HDD, a control unit 513, etc.
The plane mirror moving mechanisms and the light quantity measuring
means are controlled by the data processing section 500. The
diagnosis condition setting means is displayed on the monitor 70,
thus enabling the operator to make setting through the input device
520. Thus, the data processing section 500 executes overall control
of the surface inspection apparatus in accordance with instructions
entered through the input device 520. Further, the data processing
section 500 displays the setting conditions, the inspection
results, the operating state of the surface inspection apparatus,
etc. on the monitor (display) 70, and it also outputs those items
to the output device 530.
[0085] A pod (cassette) 160 containing a plurality of inspected
objects 2 is loaded in each of the load ports 150. The presence or
absence of the inspected object 2 on each shelf stage is detected
by a position sensor (not shown) disposed near the pod 160, and the
loaded position of each inspected object 2 is stored in the storage
device 512.
[0086] The carrying section 200 drives a carrying apparatus 210 in
accordance with an instruction from the data processing section
500. A handling arm 220 disposed on the carrying apparatus 210
grips the inspected object 2 at its edge (beveled edge) and handles
it among the pod 160, the pre-alignment section 300, and the
inspection section 140.
[0087] The pre-alignment section 300 rotates the inspected object 2
while supporting it at an edge thereof by claws 310. An outer
peripheral portion of the inspected object 2 is sensed by a sensor
320 for the so-called pre-alignment, i.e., correction of a position
deviation of the inspected object 2 and adjustment of a notch
position thereon.
[0088] The object reversing section (not shown) is disposed near
the pre-alignment section 300. When the rear surface of the
inspected object 2 is inspected, the inspected object 2 is reversed
by the object reversing section such that the rear surface is
positioned on the front side.
[0089] The inspection section 400 includes an edge-gripping
inspection stage 401 which grips the inspected object 2 at its
edge. The inspection stage 401 includes a rotation mechanism
(.theta.-direction), an extension/retraction driving mechanism
(linear driving mechanism), and lifting/lowering mechanism
(Z-direction). Defects on the surface of the inspected object 2 are
inspected by scanning the laser beam L1 in a spiral locus while
adjusting the focal position with respect to the inspected object
2. Thus, in the surface inspection apparatus of this second
embodiment, the inspected object 2 is carried and subjected to the
inspection in such a manner that the object surface not inspected
(i.e., the rear surface of the inspected object 2) is kept from
contacting with the inner surface of a carrying mechanism element.
With such a construction, the surface inspection apparatus enables
each of the front surface and the rear surface of the inspected
object 2 to be inspected.
[0090] FIG. 7 schematically shows the construction of the handling
arm 220. The handling arm 220 has a plurality of slopes 221
projected thereon so as to hold the inspected object 2 at its edge.
A side wall surface 222 is formed on the front slope 221 of the
handling arm 220 such that the edge of the inspected object 2 is
stopped while being pressed against the front slope 221. A pressing
mechanism 223 for pressing the edge of the inspected object 2 is
disposed on the rear side. The inspected object 2 is placed
substantially the center among the slopes 221 and is gripped by the
handling arm 220 when the object edge is pressed by the pressing
mechanism 223. With the provision of such a gripping mechanism, the
object surface not inspected (i.e., the rear surface of the
inspected object 2) can be carried while being kept from contacting
with the inner surface of the handling arm 220.
[0091] The pressing mechanism 223 is driven by an actuator for a
linearly reciprocating device 840. The linearly reciprocating
device 840 is installed in a clean flow area 801. A pressure source
(pressurized air pump) 816 and a flow switching solenoid valve 815
are installed in a down flow area 817. The clean flow area 801
means an area with high cleanness in which the surface inspection
apparatus is installed and fine dust is very few. The down flow
area 817 means environment in which ordinary air conditioning is
performed.
[0092] The linearly reciprocating device 840 includes a cylinder
803. The cylinder 803 has a piston chamber 830 and a dust
collection chamber 803C. A piston 894 is disposed in the piston
chamber 830 to be able to slide and reciprocate therein. The piston
chamber 830 is divided into two chambers (803A on one side and 803B
on the other side) by the piston 804.
[0093] Since a biasing spring 806 is built in the chamber 803B, the
chamber 803B is called here a biasing spring built-in chamber.
Also, the adjacent chamber 803A in which no biasing spring is built
is called here a biasing spring not-built-in chamber.
[0094] The piston chamber 830 and the dust collection chamber 803C
are separated by an adjacent wall (partition) 831. A piston rod 805
fixed to the piston 804 is extended to the outside of the cylinder
803 while penetrating through the adjacent wall 831 and an outer
wall 832 of the dust collection chamber 803C.
[0095] Seal rings 807 are disposed to seal a gap between an outer
peripheral surface of the piston 804 and an inner peripheral
surface of the piston chamber 830 and to seal gaps between an outer
peripheral surface of the piston rod 805 and inner surfaces of
through-holes formed in the adjacent wall 831 and the outer wall
832.
[0096] The pressing mechanism 223, shown in FIG. 7, is coupled to
the fore end of the piston rod 805, which is extended to the
outside of the cylinder 803. With the reciprocating motion of the
piston 804, the pressing mechanism 223 is operated through the
piston rod 805 such that the inspected object 2 is gripped by or
released from the handling arm 220.
[0097] The biasing spring 806 is formed of a compression coil
spring. With the provision of the compression-type biasing spring
806, the piston 804 is always subjected to a pressing force acting
in a direction toward the dust collection chamber 803C. Because the
piston 804 is pushed back to move toward the dust collection
chamber 803C by the biasing force of the biasing spring 806, the
volume of a space in the biasing spring built-in chamber 803B is
increased to cause a drop of air pressure therein.
[0098] The pressure source (pressurized air pump) 816 for supplying
the pressurized air to the biasing spring not-built-in chamber 803A
is communicated with the biasing spring not-built-in chamber 803A
through a pneumatic tube 811. The flow switching solenoid valve 815
is disposed in the pneumatic tube 811.
[0099] A filter 814 for filtering out dust in discharged air is
communicated with the biasing spring built-in chamber 803B through
a discharge tube 810. The discharged air from which fine dust has
been filtered out by the filter 814 is introduced to the clean flow
area 801. Since fine dust is filtered out from the discharged air,
clean environment in the clean flow area 801 can be held.
[0100] A discharge tube 809 for the dust collection chamber 803C
communicates the dust collection chamber 803C with the discharge
tube 810 or the biasing spring built-in chamber 803B. A check valve
812 for the dust-collection-chamber discharge tube 809 is disposed
in the dust-collection-chamber discharge tube 809.
[0101] The check valve 812 disposed in the dust-collection-chamber
discharge tube 809 checks an air flow directing from the biasing
spring built-in chamber 803B toward the dust collection chamber
803C while allowing an air flow to stream in the reversed
direction.
[0102] A check valve 813 for the discharge tube 810 is disposed in
the discharge tube 810. The discharge-tube check valve 813 checks
an air flow directing from the filter 814 toward the biasing spring
built-in chamber 803B. The discharge-tube check valve 813 is
disposed between the filter 814 and a junction at which the
dust-collection-chamber discharge tube 809 is connected to the
discharge tube 810.
[0103] As shown in FIG. 9A, when the flow switching solenoid valve
815 is set to a shift position for supplying the pressurized air
and the pressurized air is supplied to the biasing spring
not-built-in chamber 803A from the pressure source (pressurized air
pump) 816 through the pneumatic tube 811, the piston 804 is moved
toward the biasing spring built-in chamber 803B against the biasing
force of the biasing spring 806.
[0104] With the movement of the piston 804, the volume of the space
in the biasing spring built-in chamber 803B is reduced, whereby the
gas (air) in the biasing spring built-in chamber 803B is
pressurized and discharged to the clean flow area 801 after passing
through the discharge tube 810 and the filter 814. Since fine dust
in the gas discharged to the clean flow area 801 is filtered out by
the filter 814, the clean flow area 801 is not contaminated.
[0105] In the state of FIG. 9A, the flow of the discharged air
directing from the biasing spring built-in chamber 803B toward the
dust collection chamber 803C is checked by the check valve 812
disposed in the dust-collection-chamber discharge tube 809.
[0106] As shown in FIG. 9B, when the flow switching solenoid valve
815 is set to a shift position for discharging the pressurized air,
the piston 804 is pushed back toward the dust collection chamber
803C by the biasing force of the biasing spring 806 in the
compressed state. Therefore, the gas in the biasing spring
not-built-in chamber 803A is discharged into the down flow area 817
after passing through the pneumatic tube 811 and the flow switching
solenoid valve 815.
[0107] With the movement of the piston 804 toward the dust
collection chamber 803C, the volume of the space in the biasing
spring built-in chamber 803B is increased, whereby the gas pressure
in the biasing spring built-in chamber 803B is lowered. Therefore,
the gas in the dust collection chamber 803C is sucked into the
biasing spring built-in chamber 803B.
[0108] Thus, the gas (containing fine dust) having leaked through
the seal ring 807 and flown into the dust collection chamber 803C
from the biasing spring not-built-in chamber 803A with the supply
of the pressurized air is sucked into the biasing spring built-in
chamber 803B. As a result, the gas containing fine dust is avoided
from leaking into the clean flow area 801 from the cylinder 803,
whereby the environment in the clean flow area 801 can be
maintained in a satisfactory clean state.
[0109] In the state of FIG. 9B, the gas flow directing toward the
biasing spring built-in chamber 803B through the filter 814 and the
discharge tube 810 is blocked by the discharge-tube check valve
813. Accordingly, a suction force generated in the biasing spring
built-in chamber 803B acts only to suck the gas in the dust
collection chamber 803C, thus ensuring satisfactory suction of the
gas in the dust collection chamber 803C. In other words, an
inexpensive apparatus can be realized because of no need of the
vacuum source 821 and the line 819 for evacuation, which are
required in the related art described above. Further, with the
omission of the vacuum source 821 and the line 819 for evacuation,
the apparatus can be made more compact. While the illustrated
embodiment uses the compression-type biasing spring, a tension
spring may be used instead. In the case using a tension spring, it
is built in the biasing spring not-built-in chamber 803A.
[0110] FIG. 10 is a schematic sectional view showing the
construction of the edge-gripping inspection stage 401 disposed in
the inspection section 400. The inspected object 2 gripped by the
handing arm 220 is placed substantially the center of an inspection
table 901 (inspected object holding means). The inspection table
901 has a chuck 920 for holding an outer peripheral edge of the
inspected object 2.
[0111] As shown in FIG. 11, the chuck 920 has holding claws 921
which can slide back-and-forth away from and toward the inspection
table 901. The holding claws 921 engage with the outer peripheral
edge of the inspected object 2, to thereby hold the inspected
object 2. By moving back the holding claws 921 outward in the
radial direction, the inspected object 2 is released from the held
state.
[0112] On the inspection table 901, though not shown, there is
disposed a flexure adjusting means for controlling the pressure
(flow rate) of gas sprayed toward the rear surface of the inspected
object 2 (inspection target) and adjusting a flexure of the
inspected object 2. The flexure adjusting means may include a
regulator or a needle valve for adjusting the pressure or the flow
rate of the gas through an orifice, and a mass flow controller for
automatically controlling the gas flow rate.
[0113] The laser beam L1 (illumination light) having the proper
beam status such as the state of polarization and the beam
diameter, which has been controlled in the optical section 450, is
emitted from a light illumination unit 906 (light illumination
means) shown in FIG. 10. When the laser beam L1 is illuminated to
the surface of the inspected object 2, a scattered light 908 is
generated from a foreign mater 904 on the inspected object 2 upon
the illumination of the laser beam L1, and the scattered light 908
is detected by a detector 909 (first light detecting means in the
optical system) adapted for the scattered light.
[0114] Assuming that the focal position of the optical system is
set to the same height (level) as the surface of the inspected
object 2, in the case of an inspected object 903 having a flexure
as indicated by two-dot-chain lines, a foreign matter 905 on the
inspected object 903 comes into a state deviated from the focal
position, whereby the detection sensitivity and the accuracy of
position coordinates are degraded. To overcome that problem, the
surface inspection apparatus of this second embodiment includes a
focal position aligning means comprising a vertically driven stage
(lifting/lowering mechanism) 914, a reflected-light detector 912
(second light detecting means), the light illumination unit 906
(light illumination means), a focal position alignment control
means, a flexure adjusting means, etc., which will be described
below.
[0115] The focal position aligning means is featured in that it
also serves as the light illumination unit 906 (defect detecting
means) for detecting foreign matters and defects, and that a
regularly reflected light is used in the focal position aligning
means, while a scattered light is used in the defect detecting
means.
[0116] Because the inspected object 2 and the inspected object 903
having a flexure differ from each other in height at their
surfaces, reflected lights from both the inspected objects advance
along different paths as indicated by a reflected light 910 from
the inspected object 2 and a reflected light 911 from the inspected
object 903. By detecting such a change in the path between the
reflected light 910 and the reflected light 911 with the
reflected-light detector 912 (second light detecting means),
information about the surface heights of the inspected object 2 and
the inspected object 903 having a flexure differ can be obtained.
The reflected-light detector 912 may be any type of sensor, e.g., a
2-division sensor, a position sensor, or a sensor using the knife
edge method, so long as it is able to provide necessary height
information of the object surfaces.
[0117] In the inspected object 903 having a flexure, the surface
height of the inspected object 903 in the light illuminated
position is changed with the movement of a horizontally driven
stage 913. Based on such a change, the height information of the
surface of the inspected object 903 is detected by the
reflected-light detector 912 and the vertically driven stage 914 is
moved following the height change of the surface of the inspected
object 903. A reduction in both the detection sensitivity and the
accuracy of position coordinates can be suppressed by thus
correcting the surface height of the inspected object 903 so that
the surface of the inspected object 903 in the light illuminated
position is always matched with the focal position in the vertical
direction.
[0118] Herein, the horizontally driven stage (back-and-forth moving
mechanism) 913 and the vertically driven stage (lifting/lowering
mechanism) 914 are called together an inspected object moving
means. The horizontally driven stage 913 provides the inspected
object moving means with the function of carrying the inspected
object in the horizontal direction, and the vertically driven stage
914 provides the inspected object moving means with the function of
moving the inspected object in the vertical direction.
[0119] The entire surface of the inspected object 2 can be
inspected along a spiral or circular locus by moving the inspected
object 2 in one direction with the horizontally driven stage 913 of
the inspected object moving means while the inspected object 2 is
rotated (by the rotation driving mechanism). Also, the focal
position can be correctly aligned by vertically moving the
inspected object with the vertically driven stage 914 of the
inspected object moving means.
[0120] A method of correctly aligning the focal position will be
described in more detail below with reference to FIG. 12. The focal
position aligning means includes a focal position alignment control
means comprising a motor 931, a driving controller (driver) 932,
the host computer 71, and an amplifier 930.
[0121] A signal representing the height information of the surface
of the inspected object 2, which is detected by the detector 912
serving as the second light detecting means, is amplified by the
amplifier 930 and is fed back to the host computer 71. The host
computer 71 calculates a correction value based on the received
signal, and the motor 931 for driving the vertically driven stage
914 is controlled by the driver 932 in accordance with the
calculated correction value. As a result, the vertical position of
the surface of the inspected object 2 is adjusted to be kept in
match with the focal position of the first light detecting means in
the optical system. Since the focal position of the first light
detecting means in the optical system is always correctly aligned,
the foreign matter and the defect on the inspected object 2 can be
inspected with high accuracy regardless of whether the inspected
object 2 has a flexure or not.
[0122] Further, since the light illumination unit 906 (light
illumination means) for detecting foreign matters and defects are
used to serve also as the focal position aligning means, it is
possible to simplify the apparatus configuration and to reduce the
production cost.
[0123] The alignment of the focal position can also be performed in
combination of the vertical movement of the inspection table 901
(inspected object holding means) and the adjustment made by the
above-mentioned flexure adjusting means. Thus, since foreign
matters and defects are inspected under the proper alignment of the
focal position at all times without contacting the rear surface of
the inspected object 2 with the inspected object 2, the front and
rear surfaces of the inspected object can be inspected with high
sensitivity and satisfactory coordinate accuracy without suffering
from a variation of sensitivity.
[0124] Optimization of the light quantity of the reflected light
received by the second light detecting means will be described
below with reference to FIG. 13.
[0125] As shown in FIG. 13A, the reflected lights 910 and 911 from
the surfaces of the inspected object 2 and the inspected object 903
having a flexure pass through an ND filter 940 (light quantity
adjusting means) and is received by the detector 912 (second light
detecting means). As shown in FIG. 13B, the ND filter 940 includes
one or more optical elements (light quantity adjusting elements)
941.
[0126] The light quantities of the reflected lights 910 and 911
differ depending on the type and thickness of a film formed on the
inspected object, and such a variation of the light quantities
makes unstable the detection performed by the detector 912 (second
light detecting means). To avoid that problem, the ND filter 940 is
constructed such that it is rotatable to allow selection of proper
one of the optical elements 941, which optimizes the detection
performed by the detector 912. By using the ND filter 940 of that
rotatable structure, inspected objects having various film types
and thicknesses can also be inspected with performance comparable
to that obtained when the inspected object having no films is
inspected. In addition, by correctly aligning the focal position
with the aid of the ND filter 940, even inspected objects differing
in thicknesses, crystal azimuth, warp, etc. can be inspected with
performance comparable to that obtained when a standard inspected
object (wafer) is inspected. The ND filter 940 (light quantity
adjusting means) includes a mechanism (not shown) for driving the
light quantity adjusting means. In accordance with a signal
detected by the detector 912, the host computer 71 controls the
mechanism for driving the light quantity adjusting means so that
the light quantity is adjusted to an optimum value (with the
function of the light quantity control means).
[0127] A processing flow in the surface inspection apparatus of the
second embodiment will be described below. The inspected object 2
carried out from the pod 160 is carried into the pre-alignment
section 300 by the carrying apparatus 210 and gripped by the claws
310.
[0128] When the inspection mode is set to a mode of inspecting the
rear surface of the inspected object 2, the inspected object 2 is
carried to the object reversing section in the course of carrying
toward the pre-alignment section 300 and is gripped by the claws
310 after the inspected object 2 has been reversed such that the
rear surface is positioned on the front side.
[0129] On the other hand, the host computer 71 controls the plane
mirror moving mechanisms 40a and 40b and the light quantity
measuring means of the optical section 450 in accordance with an
instruction from the diagnosis condition setting means 80, shown in
FIG. 4, whereby the plane mirrors 4a and 4b are moved and the light
quantity of the laser source 3 is adjusted so as to stabilize the
illumination intensity of the laser beam L1.
[0130] In the pre-alignment section 300, the inspected object 2 is
subjected to the so-called pre-alignment, i.e., correction of its
position deviation and adjustment of a notch position thereon.
After the pre-alignment, the inspected object 2 is handled again by
the carrying apparatus 210 and is carried to the inspection stage
401 in the inspection section 400. On that occasion, the linearly
reciprocating device 840 disposed in the carrying apparatus
minimizes the amount of dust generated due to sliding motion of the
linearly reciprocating device 840 and suppresses an increase of
foreign matters generated in the carrying step.
[0131] The inspected object 2 placed on the inspection table 901 of
the inspection stage 401 is fixedly supported on the inspection
stage 401 with the outer peripheral edge of the inspected object 2
gripped by the holding claws 921.
[0132] The inspection stage 401 including the inspected object 2
set thereon is moved to an inspection start position while its
rotational speed is gradually increased by the rotation driving
mechanism. At the time when the rotational speed of the inspection
stage 401 reaches a predetermined speed, the surface inspection of
the inspected object 2 is started.
[0133] The laser beam L1 having the proper beam status controlled
by the optical section 450 is emitted through the light
illumination unit 906. The laser beam L1 having been illuminated to
and regularly reflected by the inspected object 2 is received by
the reflected-light detector 912, and height information (electric
signal) of the surface of the inspected object 2 is amplified by
the amplifier 930 and transmitted to the host computer 71.
[0134] The host computer 71 calculates a correction value for the
object position in the vertical direction based on the received
signal, and then drives the vertically driven stage 914 through the
driver 932 and the motor 931, thereby controlling the height
(vertical position) of the surface of the inspected object 2 to be
always kept in match with the focal position of the laser beam L1
(with the function of the focal position aligning means).
[0135] The scattered light generated by a foreign matter or a
defect on the surface of the inspected object 2 is received by the
scattered-light detector 909. A signal from the detector 909 is
processed by the data processing section 500 in correlation to
position information obtained from the rotation driving mechanism
and the horizontally driven mechanism 913, and the size and
position coordinates of the foreign matter or the defect are
calculated. The calculated size and position coordinates of the
foreign matter or the defect are stored in the storage device 512
and are outputted to the monitor 70 and/or the output device during
or after the surface inspection of the inspected object 2.
[0136] With both the rotation given by the rotation driving
mechanism and the linear motion given by the horizontally driven
mechanism 913 in the direction of one axis, the laser beam L1 is
scanned over the surface of the inspected object 2 along a spiral
or circular locus. The focal position aligning means always adjusts
the surface of the inspected object 2 to be matched with the focal
position of the laser beam L1 while tracking height change of the
surface of the inspected object 2, which is caused with the scan of
the laser beam L1, in order to stabilize the detection sensitivity
and the accuracy of position coordinates of foreign matters and
defects. After completion of the inspection, the inspected object 2
is handled by the carrying apparatus 210 and is returned to the
same shelf stage of the pod 160 as that from which the inspected
object 2 was carried out, through procedures reversal to the
above-described ones.
[0137] While the embodiments have been described in connection with
the defect inspection apparatus and the surface inspection
apparatus for detecting defects (such as foreign matters,
contaminations, cracks, crystal defects, COP (crystal originated
particle), and pattern defects) of inspected objects by using the
laser beam, the present invention is not limited to those
apparatuses. The present invention can also be applied to a
foreign-matter inspection apparatus, a disk inspection apparatus,
and so on.
[0138] Further, the optical system embodying the present invention
is not limited to one using the laser beam, and the present
invention is similarly applied to a variety of other optical
systems using a halogen lamp, a mercury lamp, a Xe lamp, and so on.
In other words, the present invention can be applied to any type of
inspection apparatuses using light, such as an appearance
inspection apparatus, a mask inspection apparatus, and a bevel
inspection apparatus. The linearly reciprocating device used in the
embodiments can be widely applied to processing apparatuses and
manufacturing apparatuses in addition to inspection
apparatuses.
[0139] Further, a reflecting mirror is used as the plane mirror 4a
or 4b in the described embodiments, but the present invention is
not limited thereto, and, another type of mirror such as a convex
mirror or a concave mirror may be similarly used instead of the
plane mirror.
* * * * *