Zama; Kazuhiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Zama; Kazuhiro.The latest application filed is for "imaging method".
- Zama; Kazuhiro - Nagoya JP
- ZAMA; Kazuhiro - Nagoya-shi JP
- Zama; Kazuhiro - Mito JP
| Patent | Date |
|---|---|
| Imaging method Grant 11,159,718 - Zama , et al. October 26, 2 | 2021-10-26 |
| Imaging Method App 20200244876 - Kind Code | 2020-07-30 |
| Imaging method Grant 10,674,073 - Zama , et al. | 2020-06-02 |
| Imaging Method App 20190124259 - ZAMA; Kazuhiro ; et al. | 2019-04-25 |
| Object holding apparatus, and inspection apparatus Grant 8,686,383 - Zama , et al. April 1, 2 | 2014-04-01 |
| Inspection apparatus and inspection method Grant 8,537,351 - Ooyama , et al. September 17, 2 | 2013-09-17 |
| Optical defect inspection apparatus Grant 8,472,016 - Iijima , et al. June 25, 2 | 2013-06-25 |
| Inspection Apparatus And Inspection Method App 20120287425 - OOYAMA; Masami ; et al. | 2012-11-15 |
| Wafer surface inspection apparatus and wafer surface inspection method Grant 8,310,667 - Zama , et al. November 13, 2 | 2012-11-13 |
| Substrate Holding Apparatus, And Inspection Or Processing Apparatus App 20120205850 - ZAMA; Kazuhiro ; et al. | 2012-08-16 |
| Optical Defect Inspection Apparatus App 20120182547 - Aizawa; Noriyuki ; et al. | 2012-07-19 |
| Inspection apparatus and inspection method Grant 8,203,705 - Ooyama , et al. June 19, 2 | 2012-06-19 |
| Substrate holding apparatus, and inspection or processing apparatus Grant 8,183,549 - Zama , et al. May 22, 2 | 2012-05-22 |
| Optical defect inspection apparatus Grant 8,184,283 - Iijima , et al. May 22, 2 | 2012-05-22 |
| Substrate Holding Apparatus, And Inspection Or Processing Apparatus App 20110260080 - ZAMA; Kazuhiro ; et al. | 2011-10-27 |
| Substrate holding apparatus, and inspection or processing apparatus Grant 7,999,242 - Zama , et al. August 16, 2 | 2011-08-16 |
| Mini Environment Apparatus, Inspection Apparatus, Manufacturing Apparatus and Cleaning Method of Space App 20110153114 - JINGU; Takahiro ; et al. | 2011-06-23 |
| Optical Defect Inspection Apparatus App 20110102781 - AIZAWA; Noriyuki ; et al. | 2011-05-05 |
| Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space Grant 7,925,390 - Jingu , et al. April 12, 2 | 2011-04-12 |
| Optical defect inspection apparatus Grant 7,894,052 - Aizawa , et al. February 22, 2 | 2011-02-22 |
| Optical Defect Inspection Apparatus App 20100231900 - AIZAWA; Noriyuki ; et al. | 2010-09-16 |
| Substrate Holding Apparatus, And Inspection Or Processing Apparatus App 20100196127 - Zama; Kazuhiro ; et al. | 2010-08-05 |
| Optical defect inspection apparatus Grant 7,746,461 - Aizawa , et al. June 29, 2 | 2010-06-29 |
| Optical Defect Inspection Apparatus App 20100141936 - AIZAWA; Noriyuki ; et al. | 2010-06-10 |
| Substrate holding apparatus, and inspection or processing apparatus Grant 7,723,709 - Zama , et al. May 25, 2 | 2010-05-25 |
| Inspection Apparatus And Inspection Method App 20090187354 - Ooyama; Masami ; et al. | 2009-07-23 |
| Optical Defect Inspection Apparatus App 20090147246 - AIZAWA; Noriyuki ; et al. | 2009-06-11 |
| Wafer Surface Inspection Apparatus And Wafer Surface Inspection Method App 20080297782 - Zama; Kazuhiro ; et al. | 2008-12-04 |
| Wafer Surface Inspection Apparatus And Wafer Surface Inspection Method App 20080297781 - Zama; Kazuhiro ; et al. | 2008-12-04 |
| Wafer surface inspection apparatus and wafer surface inspection method Grant 7,420,668 - Zama , et al. September 2, 2 | 2008-09-02 |
| Substrate holding apparatus, and inspection or processing apparatus App 20080054197 - Zama; Kazuhiro ; et al. | 2008-03-06 |
| Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space App 20080046133 - Jingu; Takahiro ; et al. | 2008-02-21 |
| Surface inspection apparatus and surface inspection method App 20080024773 - Miyazaki; Yusuke ; et al. | 2008-01-31 |
| Optical defect inspection apparatus App 20070211241 - Aizawa; Noriyuki ; et al. | 2007-09-13 |
| Wafer surface inspection apparatus and wafer surface inspection method App 20070182957 - Zama; Kazuhiro ; et al. | 2007-08-09 |
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