U.S. patent application number 12/942237 was filed with the patent office on 2011-03-03 for lithographic apparatus and device manufacturing method.
This patent application is currently assigned to ASML NETHERLANDS B.V.. Invention is credited to Stefan Philip Christiaan BELFROID, Rene Breeuwer, Nicolaas Rudolf Kemper, Johannes Petrus Maria Smeulers, Nicolaas Ten Kate, Arno Willem Frederik Volker.
Application Number | 20110051107 12/942237 |
Document ID | / |
Family ID | 36385898 |
Filed Date | 2011-03-03 |
United States Patent
Application |
20110051107 |
Kind Code |
A1 |
BELFROID; Stefan Philip Christiaan
; et al. |
March 3, 2011 |
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Abstract
In an immersion lithography apparatus, ultrasonic waves are used
to atomize liquid on a surface of the substrate.
Inventors: |
BELFROID; Stefan Philip
Christiaan; (Delft, NL) ; Ten Kate; Nicolaas;
(Almkerk, NL) ; Kemper; Nicolaas Rudolf;
(Eindhoven, NL) ; Smeulers; Johannes Petrus Maria;
(Zwijndrecht, NL) ; Volker; Arno Willem Frederik;
(Delft, NL) ; Breeuwer; Rene; (Delft, NL) |
Assignee: |
ASML NETHERLANDS B.V.
Veldhoven
NL
|
Family ID: |
36385898 |
Appl. No.: |
12/942237 |
Filed: |
November 9, 2010 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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12213589 |
Jun 20, 2008 |
7852457 |
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12942237 |
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10986186 |
Nov 12, 2004 |
7414699 |
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12213589 |
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Current U.S.
Class: |
355/30 |
Current CPC
Class: |
G03F 7/70341 20130101;
G03F 7/70925 20130101 |
Class at
Publication: |
355/30 |
International
Class: |
G03B 27/52 20060101
G03B027/52 |
Claims
1.-25. (canceled)
26. A lithographic projection apparatus, comprising: a movable
table; a projection system configured to project a patterned
radiation beam onto a target portion of a substrate; a liquid
supply system comprising an inlet to provide liquid in a space
between the projection system and the table and an outlet to remove
liquid from the space; and an ultrasonic waves generator having an
ultrasonic wave emitting surface located outward of the outlet
relative to a path of the patterned radiation beam through the
space, to impart ultrasonic waves to liquid on a surface located
outward of the outlet relative to the path.
27. The apparatus according to claim 26, wherein the liquid supply
system comprises a liquid confinement structure, located above the
table, to at least partly confine liquid in the space, the liquid
confinement structure having the inlet and the outlet.
28. The apparatus according to claim 26, further comprising a gas
inlet located outward of the outlet relative to the path to supply
a flow of gas to the surface.
29. The apparatus according to claim 26, further comprising a
sensor configured to detect material on the surface.
30. The apparatus according to claim 26, further comprising a
control system configured to control the ultrasonic waves generator
depending on whether the sensor detects material on the
surface.
31. The apparatus according to claim 26, wherein the ultrasonic
waves generator is configured to emit ultrasonic waves having a
frequency in the range of 1 to 50 MHz.
32. The apparatus according to claim 26, wherein the ultrasonic
waves generator is configured to emit the ultrasonic beam into a
gaseous medium.
33. A device manufacturing method, comprising: providing liquid to
a space between a projection system and a movable table; removing
liquid from the space using an outlet; projecting a patterned beam
of radiation using the projection system through liquid onto a
substrate; and imparting ultrasonic waves to liquid located outward
of the outlet relative to the path of the patterned radiation beam
through the space using an ultrasonic wave emitting surface located
outward of the outlet relative to the path.
34. The method according to claim 33, comprising at least partly
confining liquid in the space using a liquid confinement structure
located above the substrate and comprising providing and removing
liquid using the liquid confinement structure.
35. The method according to claim 33, further comprising supplying
a flow of gas to the surface using a gas inlet located outward of
the outlet relative to the path.
36. The method according to claim 33, further comprising detecting
material on the surface using a sensor.
37. The method according to claim 33, further comprising
controlling the imparting of the ultrasonic waves depending on
whether material is detected on the surface.
38. The method according to claim 33, wherein the ultrasonic waves
have a frequency in the range of 1 to 50 MHz.
39. The method according to claim 33, wherein imparting ultrasonic
waves comprises emitting the ultrasonic waves into a gaseous
medium.
40. A device manufacturing method, comprising: projecting a
patterned beam of radiation onto a substrate through a liquid in a
space adjacent the substrate; at least partly confining the liquid
in the space using a liquid confinement structure; and imparting
ultrasonic waves to remove material from a surface using an
ultrasonic transducer located in or on the liquid confinement
structure, wherein the ultrasonic waves emitting surface of the
ultrasonic transducer is non-perpendicular to a top surface of the
substrate.
41. The method according to claim 40, further comprising supplying
a flow of gas to the surface.
42. The method according to claim 40, further comprising detecting
material on the surface using a sensor.
43. The method according to claim 42, further comprising
controlling the imparting of the ultrasonic waves depending on
whether material is detected on the surface.
44. The method according to claim 40, wherein imparting ultrasonic
waves comprises emitting the ultrasonic waves into a gaseous
medium.
45. The method according to claim 40, wherein the ultrasonic waves
have a frequency in the range of 1 to 50 MHz.
Description
[0001] This application is a continuation of U.S. patent
application Ser. No. 12/213,589, filed Jun. 20, 2008, now allowed,
which is a continuation of U.S. patent application Ser. No.
10/986,186, filed Nov. 12, 2004, now U.S. Pat. No. 7,414,699, each
of the foregoing applications is incorporated herein in its
entirety by reference.
FIELD
[0002] The present invention relates to a lithographic apparatus
and a method for manufacturing a device.
BACKGROUND
[0003] A lithographic apparatus is a machine that applies a desired
pattern onto a substrate, usually onto a target portion of the
substrate. A lithographic apparatus can be used, for example, in
the manufacture of integrated circuits (ICs). In that instance, a
patterning device, which is alternatively referred to as a mask or
a reticle, may be used to generate a circuit pattern to be formed
on an individual layer of the IC. This pattern can be transferred
onto a target portion (e.g. comprising part of, one, or several
dies) on a substrate (e.g. a silicon wafer). Transfer of the
pattern is typically via imaging onto a layer of
radiation-sensitive material (resist) provided on the substrate. In
general, a single substrate will contain a network of adjacent
target portions that are successively patterned. Known lithographic
apparatus include so-called steppers, in which each target portion
is irradiated by exposing an entire pattern onto the target portion
at one time, and so-called scanners, in which each target portion
is irradiated by scanning the pattern through a radiation beam in a
given direction (the "scanning"-direction) while synchronously
scanning the substrate parallel or anti-parallel to this direction.
It is also possible to transfer the pattern from the patterning
device to the substrate by imprinting the pattern onto the
substrate.
[0004] It has been proposed to immerse the substrate in the
lithographic projection apparatus in a liquid having a relatively
high refractive index, e.g. water, so as to fill a space between
the final element of the projection system and the substrate. The
point of this is to enable imaging of smaller features since the
exposure radiation will have a shorter wavelength in the liquid.
(The effect of the liquid may also be regarded as increasing the
effective NA of the system and also increasing the depth of focus.)
Other immersion liquids have been proposed, including water with
solid particles (e.g. quartz) suspended therein.
[0005] However, submersing the substrate or substrate and substrate
table in a bath of liquid (see, for example, U.S. Pat. No.
4,509,852, hereby incorporated in its entirety by reference) means
that there is a large body of liquid that must be accelerated
during a scanning exposure. This requires additional or more
powerful motors and turbulence in the liquid may lead to
undesirable and unpredictable effects.
[0006] One of the solutions proposed is for a liquid supply system
to provide liquid on only a localized area of the substrate and in
between the final element of the projection system and the
substrate using a liquid confinement system (the substrate
generally has a larger surface area than the final element of the
projection system). One way which has been proposed to arrange for
this is disclosed in PCT patent application WO 99/49504, hereby
incorporated in its entirety by reference. As illustrated in FIGS.
2 and 3, liquid is supplied by at least one inlet IN onto the
substrate, preferably along the direction of movement of the
substrate relative to the final element, and is removed by at least
one outlet OUT after having passed under the projection system.
That is, as the substrate is scanned beneath the element in a -X
direction, liquid is supplied at the +X side of the element and
taken up at the -X side. FIG. 2 shows the arrangement schematically
in which liquid is supplied via inlet IN and is taken up on the
other side of the element by outlet OUT which is connected to a low
pressure source. In the illustration of FIG. 2 the liquid is
supplied along the direction of movement of the substrate relative
to the final element, though this does not need to be the case.
Various orientations and numbers of in- and out-lets positioned
around the final element are possible, one example is illustrated
in FIG. 3 in which four sets of an inlet with an outlet on either
side are provided in a regular pattern around the final
element.
[0007] In a lithographic apparatus that confines immersion liquid,
such as water, to only a localized area between the projection
system and the substrate, problems may be caused by any liquid left
behind on the substrate after the projection system and liquid
supply system have passed (from the point of view of the
substrate). For example, liquid left on the substrate surface may
evaporate causing localized cooling of the substrate which can lead
to thermal distortion of the substrate. Humid gas resulting from
such evaporation may affect the results of interferometric
displacement measuring systems commonly used to monitor the
position of the substrate table.
SUMMARY
[0008] Accordingly, it would be advantageous, for example, to
provide an approach to removal of residual liquid from the
substrate in an immersion lithography apparatus.
[0009] According to an aspect of the invention, there is provided a
lithographic projection apparatus arranged to project a pattern
from a patterning device onto a substrate through a liquid provided
in a space adjacent the substrate, the apparatus comprising an
ultrasonic transducer configured to emit an ultrasonic beam toward
the substrate to atomize liquid thereon.
[0010] According to an aspect of the invention, there is provided a
lithographic projection apparatus, comprising:
[0011] an illuminator configured to condition a radiation beam;
[0012] a support constructed to hold a patterning device, the
patterning device configured to impart the radiation beam with a
pattern in its cross-section to form a patterned radiation
beam;
[0013] a substrate table constructed to hold a substrate;
[0014] a projection system configured to project the patterned
radiation beam onto a target portion of the substrate;
[0015] a liquid supply system configured to at least partly fill a
space between the projection system and the substrate with a
liquid, the liquid supply system providing the liquid onto the
substrate; and
[0016] an ultrasonic transducer configured to emit an ultrasonic
beam toward the substrate to atomize liquid thereon.
[0017] According to an aspect of the invention, there is provided a
device manufacturing method, comprising:
[0018] projecting a patterned beam of radiation onto a substrate
through a liquid provided in a space adjacent the substrate; and
projecting an ultrasonic beam toward the substrate to atomize
liquid thereon.
BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Embodiments of the invention will now be described, by way
of example only, with reference to the accompanying schematic
drawings in which corresponding reference symbols indicate
corresponding parts, and in which:
[0020] FIG. 1 depicts a lithographic apparatus according to an
embodiment of the invention;
[0021] FIGS. 2 and 3 depict a liquid supply system for use in a
lithographic projection apparatus;
[0022] FIG. 4 depicts another liquid supply system for use in a
lithographic projection apparatus;
[0023] FIG. 5 depicts a further liquid supply system for use in a
lithographic projection apparatus; and
[0024] FIG. 6 depicts a liquid supply system according to an
embodiment of the invention.
DETAILED DESCRIPTION
[0025] FIG. 1 schematically depicts a lithographic apparatus
according to one embodiment of the invention. The apparatus
comprises:
[0026] an illumination system (illuminator) IL configured to
condition a radiation beam PB (e.g. UV radiation or DUV
radiation).
[0027] a support structure (e.g. a mask table) MT constructed to
support a patterning device (e.g. a mask) MA and connected to a
first positioner PM configured to accurately position the
patterning device in accordance with certain parameters;
[0028] a substrate table (e.g. a wafer table) WT constructed to
hold a substrate (e.g. a resist-coated wafer) W and connected to a
second positioner PW configured to accurately position the
substrate in accordance with certain parameters; and
[0029] a projection system (e.g. a refractive projection lens
system) PL configured to project a pattern imparted to the
radiation beam PB by patterning device MA onto a target portion C
(e.g. comprising one or more dies) of the substrate W.
[0030] The illumination system may include various types of optical
components, such as refractive, reflective, magnetic,
electromagnetic, electrostatic or other types of optical
components, or any combination thereof, for directing, shaping, or
controlling radiation.
[0031] The support structure supports, i.e. bears the weight of,
the patterning device. It holds the patterning device in a manner
that depends on the orientation of the patterning device, the
design of the lithographic apparatus, and other conditions, such as
for example whether or not the patterning device is held in a
vacuum environment. The support structure can use mechanical,
vacuum, electrostatic or other clamping techniques to hold the
patterning device. The support structure may be a frame or a table,
for example, which may be fixed or movable as required. The support
structure may ensure that the patterning device is at a desired
position, for example with respect to the projection system. Any
use of the terms "reticle" or "mask" herein may be considered
synonymous with the more general term "patterning device."
[0032] The term "patterning device" used herein should be broadly
interpreted as referring to any device that can be used to impart a
radiation beam with a pattern in its cross-section such as to
create a pattern in a target portion of the substrate. It should be
noted that the pattern imparted to the radiation beam may not
exactly correspond to the desired pattern in the target portion of
the substrate, for example if the pattern includes phase-shifting
features or so called assist features. Generally, the pattern
imparted to the radiation beam will correspond to a particular
functional layer in a device being created in the target portion,
such as an integrated circuit.
[0033] The patterning device may be transmissive or reflective.
Examples of patterning devices include masks, programmable mirror
arrays, and programmable LCD panels. Masks are well known in
lithography, and include mask types such as binary, alternating
phase-shift, and attenuated phase-shift, as well as various hybrid
mask types. An example of a programmable mirror array employs a
matrix arrangement of small mirrors, each of which can be
individually tilted so as to reflect an incoming radiation beam in
different directions. The tilted mirrors impart a pattern in a
radiation beam which is reflected by the mirror matrix.
[0034] The term "projection system" used herein should be broadly
interpreted as encompassing any type of projection system,
including refractive, reflective, catadioptric, magnetic,
electromagnetic and electrostatic optical systems, or any
combination thereof, as appropriate for the exposure radiation
being used, or for other factors such as the use of an immersion
liquid or the use of a vacuum. Any use of the term "projection
lens" herein may be considered as synonymous with the more general
term "projection system".
[0035] As here depicted, the apparatus is of a transmissive type
(e.g. employing a transmissive mask). Alternatively, the apparatus
may be of a reflective type (e.g. employing a programmable mirror
array of a type as referred to above, or employing a reflective
mask).
[0036] The lithographic apparatus may be of a type having two (dual
stage) or more substrate tables (and/or two or more mask tables).
In such "multiple stage" machines the additional tables may be used
in parallel, or preparatory steps may be carried out on one or more
tables while one or more other tables are being used for
exposure.
[0037] Referring to FIG. 1, the illuminator IL receives a radiation
beam from a radiation source SO. The source and the lithographic
apparatus may be separate entities, for example when the source is
an excimer laser. In such cases, the source is not considered to
form part of the lithographic apparatus and the radiation beam is
passed from the source SO to the illuminator IL with the aid of a
beam delivery system BD comprising, for example, suitable directing
mirrors and/or a beam expander. In other cases the source may be an
integral part of the lithographic apparatus, for example when the
source is a mercury lamp. The source SO and the illuminator IL,
together with the beam delivery system BD if required, may be
referred to as a radiation system.
[0038] The illuminator IL may comprise an adjuster AD for adjusting
the angular intensity distribution of the radiation beam.
Generally, at least the outer and/or inner radial extent (commonly
referred to as .sigma.-outer and .sigma.-inner, respectively) of
the intensity distribution in a pupil plane of the illuminator can
be adjusted. In addition, the illuminator IL may comprise various
other components, such as an integrator IN and a condenser CO. The
illuminator may be used to condition the radiation beam, to have a
desired uniformity and intensity distribution in its
cross-section.
[0039] The radiation beam PB is incident on the patterning device
(e.g., mask MA), which is held on the support structure (e.g., mask
table MT), and is patterned by the patterning device. Having
traversed the mask MA, the radiation beam PB passes through the
projection system PL, which focuses the beam onto a target portion
C of the substrate W. With the aid of the second positioner PW and
position sensor IF (e.g. an interferometric device, linear encoder
or capacitive sensor), the substrate table WT can be moved
accurately, e.g. so as to position different target portions C in
the path of the radiation beam PB. Similarly, the first positioner
PM and another position sensor (which is not explicitly depicted in
FIG. 1) can be used to accurately position the mask MA with respect
to the path of the radiation beam PB, e.g. after mechanical
retrieval from a mask library, or during a scan. In general,
movement of the mask table MT may be realized with the aid of a
long-stroke module (coarse positioning) and a short-stroke module
(fine positioning), which form part of the first positioner PM.
Similarly, movement of the substrate table WT may be realized using
a long-stroke module and a short-stroke module, which form part of
the second positioner PW. In the case of a stepper (as opposed to a
scanner) the mask table MT may be connected to a short-stroke
actuator only, or may be fixed. Mask MA and substrate W may be
aligned using mask alignment marks M1, M2 and substrate alignment
marks P1, P2. Although the substrate alignment marks as illustrated
occupy dedicated target portions, they may be located in spaces
between target portions (these are known as scribe-lane alignment
marks). Similarly, in situations in which more than one die is
provided on the mask MA, the mask alignment marks may be located
between the dies.
[0040] The depicted apparatus could be used in at least one of the
following modes:
[0041] 1. In step mode, the mask table MT and the substrate table
WT are kept essentially stationary, while an entire pattern
imparted to the radiation beam is projected onto a target portion C
at one time (i.e. a single static exposure). The substrate table WT
is then shifted in the X and/or Y direction so that a different
target portion C can be exposed. In step mode, the maximum size of
the exposure field limits the size of the target portion C imaged
in a single static exposure.
[0042] 2. In scan mode, the mask table MT and the substrate table
WT are scanned synchronously while a pattern imparted to the
radiation beam is projected onto a target portion C (i.e. a single
dynamic exposure). The velocity and direction of the substrate
table WT relative to the mask table MT may be determined by the
(de-)magnification and image reversal characteristics of the
projection system PL. In scan mode, the maximum size of the
exposure field limits the width (in the non-scanning direction) of
the target portion in a single dynamic exposure, whereas the length
of the scanning motion determines the height (in the scanning
direction) of the target portion.
[0043] 3. In another mode, the mask table MT is kept essentially
stationary holding a programmable patterning device, and the
substrate table WT is moved or scanned while a pattern imparted to
the radiation beam is projected onto a target portion C. In this
mode, generally a pulsed radiation source is employed and the
programmable patterning device is updated as required after each
movement of the substrate table WT or in between successive
radiation pulses during a scan. This mode of operation can be
readily applied to maskless lithography that utilizes programmable
patterning device, such as a programmable mirror array of a type as
referred to above.
[0044] Combinations and/or variations on the above described modes
of use or entirely different modes of use may also be employed.
[0045] A further immersion lithography solution with a localized
liquid supply system is shown in FIG. 4. Liquid is supplied by two
groove inlets IN on either side of the projection system PL and is
removed by a plurality of discrete outlets OUT arranged radially
outwardly of the inlets IN. The inlets IN and OUT can be arranged
in a plate with a hole in its center and through which the
projection beam is projected. Liquid is supplied by one groove
inlet IN on one side of the projection system PL and removed by a
plurality of discrete outlets OUT on the other side of the
projection system PL, causing a flow of a thin film of liquid
between the projection system PL and the substrate W. The choice of
which combination of inlet IN and outlets OUT to use can depend on
the direction of movement of the substrate W (the other combination
of inlet IN and outlets OUT being inactive).
[0046] Another immersion lithography solution with a localized
liquid supply system solution which has been proposed is to provide
the liquid supply system with a liquid confinement structure which
extends along at least a part of a boundary of the space between
the final element of the projection system and the substrate table.
Such a system is shown in FIG. 5. The liquid confinement structure
is substantially stationary relative to the projection system in
the XY plane though there may be some relative movement in the Z
direction (in the direction of the optical axis). A seal is formed
between the liquid confinement structure and the surface of the
substrate. In an embodiment, the seal is a contactless seal such as
a gas seal. Such a system with a gas seal is disclosed in U.S.
patent application Ser. No. 10/705,783, hereby incorporated in its
entirety by reference.
[0047] FIG. 5 depicts an arrangement of a reservoir 10, which forms
a contactless seal to the substrate around the image field of the
projection system so that liquid is confined to fill a space
between the substrate surface and the final element of the
projection system. A liquid confinement structure 12 positioned
below and surrounding the final element of the projection system PL
forms the reservoir. Liquid is brought into the space below the
projection system and within the liquid confinement structure 12.
The liquid confinement structure 12 extends a little above the
final element of the projection system and the liquid level rises
above the final element so that a buffer of liquid is provided. The
liquid confinement structure 12 has an inner periphery that at the
upper end preferably closely conforms to the shape of the
projection system or the final element thereof and may, e.g., be
round. At the bottom, the inner periphery closely conforms to the
shape of the image field, e.g., rectangular though this need not be
the case.
[0048] The liquid is confined in the reservoir by a gas seal 16
between the bottom of the liquid confinement structure 12 and the
surface of the substrate W. The gas seal is formed by gas, e.g.
air, synthetic air, N.sub.2 or an inert gas, provided under
pressure via inlet 15 to the gap between liquid confinement
structure 12 and substrate and extracted via first outlet 14. The
overpressure on the gas inlet 15, vacuum level on the first outlet
14 and geometry of the gap are arranged so that there is a
high-velocity gas flow inwards that confines the liquid. It will be
understood by the person skilled in the art that other types of
seal could be used to contain the liquid.
[0049] FIG. 6 shows a liquid supply system IH according to an
embodiment of the invention. The liquid supply system comprises a
liquid confinement structure 22 which confines liquid 11 to a space
between the final element of the projection system PL and the
substrate W. The liquid confinement structure 22 is borne a small
distance, e.g. 50 to 300 .mu.m, above the substrate and has a seal
device 23 to restrict outflow of the liquid 11. This may be a gas
or liquid seal, using a flow of gas or liquid to confine the liquid
11, and may also act as a bearing for the liquid confinement
structure which alternatively may be separately supported and/or
actuated. The seal device may simply be a low pressure extraction
port to suck away liquid flowing under the liquid confinement
structure 22.
[0050] Since it is typically difficult to make the seal device
perfectly effective, it is likely that a thin film of liquid 11a,
perhaps of the order of 10 .mu.m thick, will be left behind as the
substrate moves (e.g., scans) in the direction of the arrow S. (The
relative height of this film is exaggerated in FIG. 6 for clarity).
To remove this film, an ultrasonic transducer 24 is provided on the
lower surface of the liquid confinement structure 22.
[0051] The ultrasonic transducer 24 emits an ultrasonic beam 25
with a frequency, in an embodiment, in excess of 1 MHz and
potentially as high as 50 MHz through the gas (e.g., air) present
under the liquid confinement structure 22 and onto the substrate.
The ultrasonic beam 25 atomizes the liquid layer 11a and frees the
liquid from the surface of the substrate. The liquid is removed
substantially without cooling of the substrate, by atomization and
transportation of the atomized liquid. Evaporation, as does occur,
will likely not directly affect the substrate. A flow of gas (e.g.
air) 27 may be provided by gas supply 26 to carry the atomized
liquid toward the seal device 23 and prevent it from escaping to
parts of the apparatus where it may be undesirable. An extractive
part of the seal device 23 may set up sufficient gas flow to
perform this function in one or more embodiments of the
invention.
[0052] In an embodiment, the ultrasonic transducer 24 is formed by
two separately driven parts 24a, 24b. The relative phases of these
parts may be controlled to focus the ultrasonic beam at the surface
of the liquid layer 11a. A sensor 28, e.g. a an acoustic or optical
sensor, may be provided to detect the presence of liquid layer 11a
and/or the position of its top surface. Additionally or
alternatively, the sensor 28 may be used to control the amplitude,
frequency and/or phase of the two parts 24a, 24b of the ultrasonic
transducer to ensure efficient and effective removal of the liquid
layer without excessive heat generation and to control the size of
the liquid droplets generated, which may be a function of frequency
of the ultrasonic beam. Interference effects between beams emitted
by the two parts of the transducer may be exploited to enhance
atomization. Harmonics of the principal frequency may be used to
enhance the removal effect. Although several tens of Watts of power
may be input to the transducer per cm.sup.2 of substrate where
liquid is to be removed, the frequency of the ultrasonic beam(s) is
sufficiently high not to disturb the lithographic apparatus.
[0053] Suitable types of transducers include piezo-electric,
piezo-strictive, magneto-strictive and capacitive transducers.
Multiple transducers may be spaced around the liquid confinement
structure 22 according to its geometry and the expected directions
of movement of the substrate. Interdigitated transducers may be
used and several concentric rings of transducers may be used if
required.
[0054] In place of a sensor to detect the liquid layer 11a, the
impedance of the transducer(s) may be monitored as proper coupling
of the ultrasonic beam 25 into the liquid layer 11a will cause a
change of impedance in the transducer 24.
[0055] In an embodiment, there is provided a lithographic
projection apparatus arranged to project a pattern from a
patterning device onto a substrate through a liquid provided in a
space adjacent the substrate, the apparatus comprising an
ultrasonic transducer configured to emit an ultrasonic beam toward
the substrate to atomize liquid thereon. In an embodiment, the
ultrasonic transducer is configured to emit the ultrasonic beam
into a gaseous medium. In an embodiment, the ultrasonic transducer
comprises two independently driven parts. In an embodiment, the two
parts of the transducer are configured to emit beams that interfere
at or near the surface of the substrate. In an embodiment, the
apparatus comprises two ultrasonic transducers spaced apart in a
direction substantially parallel to a periphery of the space. In an
embodiment, the apparatus comprises two ultrasonic transducers
spaced apart in a direction substantially radial to the space. In
an embodiment, the ultrasonic transducer is configured to emit an
ultrasonic beam having a frequency in the range of 1 to 50 MHz. In
an embodiment, the ultrasonic transducer is of a type selected from
the group comprising piezo-electric, piezo-strictive,
magneto-strictive and capacitive transducers. In an embodiment, the
apparatus further comprises a sensor configured to detect the
liquid on a surface of the substrate, and a control system
configured to control the amplitude, frequency, phase, or any
combination of the foregoing, of the ultrasonic beam in response to
an output of the sensor. In an embodiment, the apparatus further
comprises a sensor configured to detect an impedance of the
transducer, and a control system configured to control the
amplitude, frequency, phase, or any combination of the foregoing,
of the ultrasonic beam in response to an output of the sensor.
[0056] In an embodiment, there is provided a lithographic
projection apparatus, comprising: an illuminator configured to
condition a radiation beam; a support constructed to hold a
patterning device, the patterning device configured to impart the
radiation beam with a pattern in its cross-section to form a
patterned radiation beam; a substrate table constructed to hold a
substrate; a projection system configured to project the patterned
radiation beam onto a target portion of the substrate; a liquid
supply system configured to at least partly fill a space between
the projection system and the substrate with a liquid, the liquid
supply system providing the liquid onto the substrate; and an
ultrasonic transducer configured to emit an ultrasonic beam toward
the substrate to atomize liquid thereon.
[0057] In an embodiment, the ultrasonic transducer is configured to
emit the ultrasonic beam into a gaseous medium. In an embodiment,
the ultrasonic transducer forms part of the liquid confinement
structure and comprises two independently driven parts. In an
embodiment, the ultrasonic transducer is configured to emit beams
that interfere at or near the surface of the substrate. In an
embodiment, the ultrasonic transducer is configured to emit an
ultrasonic beam having a frequency in the range of 1 to 50 MHz. In
an embodiment, the apparatus further comprises a sensor configured
to detect the liquid on a surface of the substrate, and a control
system configured to control the amplitude, frequency, phase, or
any combination of the foregoing, of the ultrasonic beam in
response to an output of the sensor. In an embodiment, the
apparatus further comprises a sensor configured to detect an
impedance of the transducer, and a control system configured to
control the amplitude, frequency, phase, or any combination of the
foregoing, of the ultrasonic beam in response to an output of the
sensor.
[0058] In an embodiment, there is provided a device manufacturing
method, comprising: projecting a patterned beam of radiation onto a
substrate through a liquid provided in a space adjacent the
substrate; and projecting an ultrasonic beam toward the substrate
to atomize liquid thereon.
[0059] In an embodiment, the method comprises projecting the
ultrasonic beam into a gaseous medium. In an embodiment, the method
comprises projecting two ultrasonic beams that interfere at or near
the surface of the substrate. In an embodiment, the method
comprises projecting ultrasonic beams from two ultrasonic
transducers spaced apart in a direction substantially parallel to a
periphery of the space. In an embodiment, the method comprises
projecting ultrasonic beams from two ultrasonic transducers spaced
apart in a direction substantially radial to the space. In an
embodiment, the ultrasonic beam has a frequency in the range of 1
to 50 MHz. In an embodiment, the method further comprises detecting
the liquid on a surface of the substrate, and controlling the
amplitude, frequency, phase, or any combination of the foregoing,
of the ultrasonic beam in response to detection of the liquid. In
an embodiment, the method further comprises detecting an impedance
of a transducer used to create the ultrasonic beam, and controlling
the amplitude, frequency, phase, or any combination of the
foregoing, of the ultrasonic beam in response to detection of the
impedance.
[0060] In European Patent Application No. 03257072.3, the idea of a
twin or dual stage immersion lithography apparatus is disclosed.
Such an apparatus is provided with two tables for supporting a
substrate. Leveling measurements are carried out with a table at a
first position, without immersion liquid, and exposure is carried
out with a table at a second position, where immersion liquid is
present. Alternatively, the apparatus has only one table.
[0061] Although specific reference may be made in this text to the
use of lithographic apparatus in the manufacture of ICs, it should
be understood that the lithographic apparatus described herein may
have other applications, such as the manufacture of integrated
optical systems, guidance and detection patterns for magnetic
domain memories, flat-panel displays, liquid-crystal displays
(LCDs), thin-film magnetic heads, etc. The skilled artisan will
appreciate that, in the context of such alternative applications,
any use of the terms "wafer" or "die" herein may be considered as
synonymous with the more general terms "substrate" or "target
portion", respectively. The substrate referred to herein may be
processed, before or after exposure, in for example a track (a tool
that typically applies a layer of resist to a substrate and
develops the exposed resist), a metrology tool and/or an inspection
tool. Where applicable, the disclosure herein may be applied to
such and other substrate processing tools. Further, the substrate
may be processed more than once, for example in order to create a
multi-layer IC, so that the term substrate used herein may also
refer to a substrate that already contains multiple processed
layers.
[0062] The terms "radiation" and "beam" used herein encompass all
types of electromagnetic radiation, including ultraviolet (UV)
radiation (e.g. having a wavelength of or about 365, 248, 193, 157
or 126 nm).
[0063] The term "lens", where the context allows, may refer to any
one or combination of various types of optical components,
including refractive and reflective optical components.
[0064] While specific embodiments of the invention have been
described above, it will be appreciated that the invention may be
practiced otherwise than as described. For example, the invention
may take the form of a computer program containing one or more
sequences of machine-readable instructions describing a method as
disclosed above, or a data storage medium (e.g. semiconductor
memory, magnetic or optical disk) having such a computer program
stored therein.
[0065] One or more embodiments of the present invention may be
applied to any immersion lithography apparatus, in particular, but
not exclusively, to those types mentioned above. A liquid supply
system is any mechanism that provides a liquid to a space between
the projection system and the substrate and/or substrate table. It
may comprise any combination of one or more structures, one or more
liquid inlets, one or more gas inlets, one or more gas outlets,
and/or one or more liquid outlets, the combination providing and
confining the liquid to the space. In an embodiment, a surface of
the space may be limited to a portion of the substrate and/or
substrate table, a surface of the space may completely cover a
surface of the substrate and/or substrate table, or the space may
envelop the substrate and/or substrate table.
[0066] The descriptions above are intended to be illustrative, not
limiting. Thus, it will be apparent to one skilled in the art that
modifications may be made to the invention as described without
departing from the scope of the claims set out below.
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