loadpatents
Patent applications and USPTO patent grants for Kemper; Nicolaas Rudolf.The latest application filed is for "lithographic apparatus and device manufacturing method".
Patent | Date |
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Lithographic Apparatus And Device Manufacturing Method App 20220113641 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2022-04-14 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20220082948 - CLOIN; Christian Gerardus Norbertus Hendricus Marie ;   et al. | 2022-03-17 |
Lithographic apparatus and device manufacturing method Grant 11,209,738 - Leenders , et al. December 28, 2 | 2021-12-28 |
Lithographic apparatus and a method of operating the apparatus Grant 11,187,991 - Cloin , et al. November 30, 2 | 2021-11-30 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 11,143,968 - Direcks , et al. October 12, 2 | 2021-10-12 |
Lithographic Apparatus And Device Manufacturing Method App 20210173294 - KEMPER; Nicolaas Rudolf ;   et al. | 2021-06-10 |
Lithographic Apparatus And Device Manufacturing Method App 20200401057 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2020-12-24 |
Lithographic apparatus and device manufacturing method Grant 10,866,501 - Kemper , et al. December 15, 2 | 2020-12-15 |
Lithographic apparatus and device manufacturing method involving a barrier structure to handle liquid Grant 10,802,410 - Kemper , et al. October 13, 2 | 2020-10-13 |
Lithographic apparatus and device manufacturing method Grant 10,768,536 - Leenders , et al. Sep | 2020-09-08 |
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al. | 2020-07-07 |
Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al. | 2020-03-24 |
Lithographic apparatus and device manufacturing method Grant 10,495,984 - Beckers , et al. De | 2019-12-03 |
Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ;   et al. | 2019-09-26 |
Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al. | 2019-06-25 |
Lithographic Apparatus And Device Manufacturing Method App 20190179232 - BECKERS; Marcel ;   et al. | 2019-06-13 |
Lithographic Apparatus And Device Manufacturing Method App 20190079419 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2019-03-14 |
Lithographic apparatus and device manufacturing method Grant 10,209,629 - Beckers , et al. Feb | 2019-02-19 |
Lithographic apparatus, object positioning system and device manufacturing method Grant 10,191,396 - De Wit , et al. Ja | 2019-01-29 |
Lithographic apparatus and device manufacturing method Grant 10,126,664 - Leenders , et al. November 13, 2 | 2018-11-13 |
Lithographic apparatus Grant 10,114,299 - Nakiboglu , et al. October 30, 2 | 2018-10-30 |
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20180292762 - KEMPER; Nicolaas Rudolf ;   et al. | 2018-10-11 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 10,018,925 - Kemper , et al. July 10, 2 | 2018-07-10 |
Lithographic apparatus and a device manufacturing method Grant 10,018,921 - Rops , et al. July 10, 2 | 2018-07-10 |
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ;   et al. | 2018-07-05 |
Lithographic Apparatus, Object Positioning System And Device Manufacturing Method App 20180149986 - DE WIT; Paul Corne Henri ;   et al. | 2018-05-31 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus Grant 9,964,865 - Grouwstra , et al. May 8, 2 | 2018-05-08 |
System for positioning an object in lithography Grant 9,946,172 - Hempenius , et al. April 17, 2 | 2018-04-17 |
Lithographic Apparatus And Device Manufacturing Method App 20180081285 - BECKERS; Marcel ;   et al. | 2018-03-22 |
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2 | 2018-02-27 |
Lithographic apparatus and device manufacturing method Grant 9,857,695 - Beckers , et al. January 2, 2 | 2018-01-02 |
Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-12-14 |
Lithographic Apparatus And A Device Manufacturing Method App 20170357161 - ROPS; Cornelius Maria ;   et al. | 2017-12-14 |
Lithographic apparatus and device manufacturing method Grant 9,766,556 - Kemper , et al. September 19, 2 | 2017-09-19 |
Lithographic apparatus and a device manufacturing method Grant 9,746,782 - Rops , et al. August 29, 2 | 2017-08-29 |
Lithographic apparatus and device manufacturing method Grant 9,746,788 - Kemper , et al. August 29, 2 | 2017-08-29 |
Lithographic Apparatus And Device Manufacturing Method App 20170212432 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-07-27 |
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20170192365 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-07-06 |
Lithographic apparatus and device manufacturing method Grant 9,618,853 - Leenders , et al. April 11, 2 | 2017-04-11 |
Lithographic Apparatus App 20170090296 - NAKIBOGLU; Gunes ;   et al. | 2017-03-30 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 9,606,429 - Kemper , et al. March 28, 2 | 2017-03-28 |
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-02-16 |
Lithographic Apparatus And Device Manufacturing Method App 20170038695 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-02-09 |
Lithographic Apparatus And Device Manufacturing Method App 20170031250 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-02-02 |
Lithographic Apparatus And Device Manufacturing Method App 20170003605 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-01-05 |
System For Positioning An Object In Lithography App 20160377996 - HEMPENIUS; Peter Paul ;   et al. | 2016-12-29 |
Lithographic Apparatus And Device Manufacturing Method App 20160370713 - BECKERS; Marcel ;   et al. | 2016-12-22 |
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2 | 2016-11-29 |
Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2 | 2016-11-08 |
Method Of Adjusting Speed And/or Routing Of A Table Movement Plan And A Lithographic Apparatus App 20160320714 - GROUWSTRA; Cedric Desire ;   et al. | 2016-11-03 |
Lithographic apparatus and device manufacturing method Grant 9,477,158 - Kemper , et al. October 25, 2 | 2016-10-25 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20160306283 - DIRECKS; Daniel Jozef Maria ;   et al. | 2016-10-20 |
Lithographic apparatus and device manufacturing method Grant 9,448,494 - Kemper , et al. September 20, 2 | 2016-09-20 |
Lithographic apparatus and device manufacturing method Grant 9,429,853 - Beckers , et al. August 30, 2 | 2016-08-30 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 9,383,654 - Direcks , et al. July 5, 2 | 2016-07-05 |
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus Grant 9,329,491 - Grouwstra , et al. May 3, 2 | 2016-05-03 |
Lithographic Apparatus And A Device Manufacturing Method App 20160116850 - ROPS; Cornelius Maria ;   et al. | 2016-04-28 |
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder Grant 9,268,236 - Jacobs , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20160011522 - CLOIN; Christian Gerardus Norbertus Hendricus Marie ;   et al. | 2016-01-14 |
Lithographic apparatus and device manufacturing method Grant 9,235,113 - Kemper , et al. January 12, 2 | 2016-01-12 |
Lithographic apparatus and a device manufacturing method Grant 9,229,334 - Rops , et al. January 5, 2 | 2016-01-05 |
Fluid extraction system, lithographic apparatus and device manufacturing method Grant 9,213,246 - Kemper , et al. December 15, 2 | 2015-12-15 |
Lithographic Apparatus And Device Manufacturing Method App 20150355556 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2015-12-10 |
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ;   et al. | 2015-11-12 |
Lithographic apparatus and a method of operating the apparatus Grant 9,176,393 - Cloin , et al. November 3, 2 | 2015-11-03 |
Lithographic Apparatus And Device Manufacturing Method App 20150309422 - KEMPER; Nicolaas Rudolf ;   et al. | 2015-10-29 |
Lithographic Apparatus And Device Manufacturing Method App 20150309420 - BECKERS; Marcel ;   et al. | 2015-10-29 |
Lithographic apparatus and device manufacturing method Grant 9,140,996 - Leenders , et al. September 22, 2 | 2015-09-22 |
Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2 | 2015-08-04 |
Lithographic apparatus and device manufacturing method Grant 9,099,501 - Kemper , et al. August 4, 2 | 2015-08-04 |
Lithographic apparatus and device manufacturing method Grant 8,988,651 - Beckers , et al. March 24, 2 | 2015-03-24 |
Lithographic apparatus and device manufacturing method Grant 8,976,334 - Beckers , et al. March 10, 2 | 2015-03-10 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 8,953,142 - Kemper , et al. February 10, 2 | 2015-02-10 |
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20150015857 - KEMPER; Nicolaas Rudolf ;   et al. | 2015-01-15 |
Lithographic Apparatus And Device Manufacturing Method App 20140327893 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2014-11-06 |
Fluid Extraction System, Lithographic Apparatus And Device Manufacturing Method App 20140300879 - KEMPER; Nicolaas Rudolf ;   et al. | 2014-10-09 |
Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ;   et al. | 2014-10-09 |
Lithographic apparatus and a device manufacturing method Grant 8,804,094 - Riepen , et al. August 12, 2 | 2014-08-12 |
Lithographic apparatus and device manufacturing method Grant 8,786,823 - Leenders , et al. July 22, 2 | 2014-07-22 |
Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2 | 2014-06-17 |
Fluid extraction system, lithographic apparatus and device manufacturing method Grant 8,654,309 - Kemper , et al. February 18, 2 | 2014-02-18 |
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply Grant 8,614,784 - Riepen , et al. December 24, 2 | 2013-12-24 |
Lithographic apparatus, device manufacturing method and a control system Grant 8,564,760 - Leenders , et al. October 22, 2 | 2013-10-22 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,547,523 - Riepen , et al. October 1, 2 | 2013-10-01 |
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2 | 2013-05-21 |
Lithographic apparatus and device manufacturing method Grant 8,427,629 - Luijten , et al. April 23, 2 | 2013-04-23 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method Grant 8,405,817 - Stavenga , et al. March 26, 2 | 2013-03-26 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless Grant 8,368,868 - Vermeulen , et al. February 5, 2 | 2013-02-05 |
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method Grant 8,345,218 - Riepen , et al. January 1, 2 | 2013-01-01 |
Lithographic apparatus and device manufacturing method Grant 8,259,287 - Beckers , et al. September 4, 2 | 2012-09-04 |
Immersion lithographic apparatus and device manufacturing method Grant 8,259,283 - Direcks , et al. September 4, 2 | 2012-09-04 |
Lithographic apparatus and substrate edge seal Grant 8,232,540 - Ottens , et al. July 31, 2 | 2012-07-31 |
Lithographic Apparatus And Device Manufacturing Method App 20120008118 - BECKERS; Marcel ;   et al. | 2012-01-12 |
Lithographic Apparatus And Device Manufacturing Method App 20120008116 - Beckers; Marcel ;   et al. | 2012-01-12 |
Method Of Adjusting Speed And/or Routing Of A Table Movement Plan And A Lithographic Apparatus App 20120003381 - GROUWSTRA; Cedric Desire ;   et al. | 2012-01-05 |
Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ;   et al. | 2011-12-22 |
Lithographic Apparatus And Device Manufacturing Method App 20110273678 - KEMPER; Nicolaas Rudolf ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ;   et al. | 2011-11-10 |
Lithographic Apparatus And Substrate Edge Seal App 20110267592 - OTTENS; Joost Jeroen ;   et al. | 2011-11-03 |
Lithographic Apparatus And Device Manufacturing Method App 20110242512 - KEMPER; Nicolaas Rudolf ;   et al. | 2011-10-06 |
Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2 | 2011-10-04 |
Lithographic apparatus and device manufacturing method Grant 8,027,019 - Kemper , et al. September 27, 2 | 2011-09-27 |
Lithographic apparatus and substrate edge seal Grant 8,003,968 - Ottens , et al. August 23, 2 | 2011-08-23 |
Lithographic Apparatus And A Device Manufacturing Method App 20110199593 - Riepen; Michel ;   et al. | 2011-08-18 |
Lithographic Apparatus And A Device Manufacturing Method App 20110134401 - ROPS; Cornelius Maria ;   et al. | 2011-06-09 |
Lithographic Apparatus And Device Manufacturing Method App 20110096307 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2011-04-28 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110090472 - RIEPEN; Michel ;   et al. | 2011-04-21 |
Lithographic Apparatus And Device Manufacturing Method App 20110051107 - BELFROID; Stefan Philip Christiaan ;   et al. | 2011-03-03 |
Lithographic Apparatus, Device Manufacturing Method And A Control System App 20110025995 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2011-02-03 |
Lithographic Apparatus And Device Manufacturing Method App 20110025994 - KEMPER; Nicolaas Rudolf ;   et al. | 2011-02-03 |
Lithographic Apparatus, A Method Of Controlling The Apparatus And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20110007286 - DIRECKS; Daniel Jozef Maria ;   et al. | 2011-01-13 |
Lithographic apparatus and device manufacturing method Grant 7,864,292 - Leenders , et al. January 4, 2 | 2011-01-04 |
Lithographic Apparatus And Device Manufacturing Method App 20100321651 - LUIJTEN; Carlo Cornelis Maria ;   et al. | 2010-12-23 |
Lithographic Apparatus App 20100321653 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2010-12-23 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20100313974 - RIEPEN; Michel ;   et al. | 2010-12-16 |
Lithographic apparatus and device manufacturing method Grant 7,852,457 - Belfroid , et al. December 14, 2 | 2010-12-14 |
Lithographic apparatus, device manufacturing method and a control system Grant 7,839,483 - Leenders , et al. November 23, 2 | 2010-11-23 |
Lithographic apparatus and device manufacturing method Grant 7,834,974 - Kemper , et al. November 16, 2 | 2010-11-16 |
Lithographic apparatus and device manufacturing method Grant 7,808,614 - Luijten , et al. October 5, 2 | 2010-10-05 |
Lithographic Apparatus And Device Manufacturing Method App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ;   et al. | 2010-09-30 |
Lithographic apparatus Grant 7,804,577 - Leenders , et al. September 28, 2 | 2010-09-28 |
Lithographic Apparatus, A Method Of Controlling The Apparatus And A Device Manufacturing Method App 20100214543 - Stavenga; Marco Koert ;   et al. | 2010-08-26 |
Lithographic apparatus and device manufacturing method Grant 7,760,324 - Benschop , et al. July 20, 2 | 2010-07-20 |
Lithographic apparatus and device manufacturing method Grant 7,751,027 - Jacobs , et al. July 6, 2 | 2010-07-06 |
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ;   et al. | 2010-07-01 |
Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ;   et al. | 2010-06-24 |
Lithographic Apparatus And Device Manufacturing Method App 20100157277 - KEMPER; Nicolaas Rudolf ;   et al. | 2010-06-24 |
Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ;   et al. | 2010-06-17 |
Fluid Extraction System, Lithographic Apparatus And Device Manufacturing Method App 20100149501 - KEMPER; Nicolaas Rudolf ;   et al. | 2010-06-17 |
Lithographic apparatus and device manufacturing method Grant 7,705,962 - Kemper , et al. April 27, 2 | 2010-04-27 |
Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2 | 2010-04-20 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20100085545 - DIRECKS; Daniel Jozef Maria ;   et al. | 2010-04-08 |
Apparatus configured to position a workpiece Grant 7,679,720 - Dansberg , et al. March 16, 2 | 2010-03-16 |
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20100045950 - Kemper; Nicolaas Rudolf ;   et al. | 2010-02-25 |
Lithographic apparatus and device manufacturing method Grant 7,656,502 - Van Der Schoot , et al. February 2, 2 | 2010-02-02 |
Lithographic apparatus Grant 7,656,501 - Ten Kate , et al. February 2, 2 | 2010-02-02 |
Lithographic Apparatus And Device Manufacturing Method App 20090303455 - Kemper; Nicolaas Rudolf ;   et al. | 2009-12-10 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20090296065 - CLOIN; Christian Gerardus Norbertus Hendricus Marie ;   et al. | 2009-12-03 |
Immersion Lithographic Apparatus, Drying Device, Immersion Metrology Apparatus And Device Manufacturing Method App 20090279063 - Riepen; Michel ;   et al. | 2009-11-12 |
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2 | 2009-10-13 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20090237632 - Direcks; Daniel Jozef Maria ;   et al. | 2009-09-24 |
Lithographic Apparatus And Device Manufacturing Method App 20090153823 - LUIJTEN; Carlo Cornelis Maria ;   et al. | 2009-06-18 |
Lithographic apparatus and device manufacturing method Grant 7,522,261 - Luijten , et al. April 21, 2 | 2009-04-21 |
Lithographic apparatus and device manufacturing method App 20090009734 - Belfroid; Stefan Philip Christiaan ;   et al. | 2009-01-08 |
Lithographic apparatus and substrate edge seal App 20080284995 - Ottens; Joost Jeroen ;   et al. | 2008-11-20 |
Lithographic apparatus and device manufacturing method App 20080212051 - Beckers; Marcel ;   et al. | 2008-09-04 |
Lithographic apparatus and substrate edge seal Grant 7,420,194 - Ottens , et al. September 2, 2 | 2008-09-02 |
Lithographic apparatus and device manufacturing method Grant 7,414,699 - Belfroid , et al. August 19, 2 | 2008-08-19 |
Lithographic apparatus and device manufacturing method Grant 7,411,654 - Beckers , et al. August 12, 2 | 2008-08-12 |
Apparatus configured to position a workpiece App 20080174750 - Dansberg; Michel Pieter ;   et al. | 2008-07-24 |
Lithographic apparatus and device manufacturing method Grant 7,359,032 - Dansberg , et al. April 15, 2 | 2008-04-15 |
Lithographic apparatus and device manufacturing method App 20070242243 - Kemper; Nicolaas Rudolf ;   et al. | 2007-10-18 |
Lithographic apparatus and device manufacturing method App 20070229786 - Kemper; Nicolaas Rudolf ;   et al. | 2007-10-04 |
Lithographic apparatus and device manufacturing method App 20070216882 - Benschop; Jozef Petrus Henricus ;   et al. | 2007-09-20 |
Lithographic apparatus, device manufacturing method and a control system App 20070146666 - Antonius Leenders; Martinus Hendrikus ;   et al. | 2007-06-28 |
Lithographic apparatus and substrate edge seal App 20070146665 - Ottens; Joost Jeroen ;   et al. | 2007-06-28 |
Lithographic apparatus and device manufacturing method App 20070109513 - Antonius Leenders; Martinus Hendrikus ;   et al. | 2007-05-17 |
Lithographic apparatus App 20070109512 - Kate; Nicolaas Ten ;   et al. | 2007-05-17 |
Lithographic apparatus App 20070110213 - Leenders; Martinus Hendrikus Antonius ;   et al. | 2007-05-17 |
Lithographic apparatus and device manufacturing method App 20070070315 - Jacobs; Johannes Henricus Wilhelmus ;   et al. | 2007-03-29 |
Lithographic apparatus and device manufacturing method App 20070030464 - Kemper; Nicolaas Rudolf ;   et al. | 2007-02-08 |
Lithographic apparatus having a gas flushing device Grant 7,136,142 - Beckers , et al. November 14, 2 | 2006-11-14 |
Lithographic apparatus and device manufacturing method Grant 7,126,671 - Cox , et al. October 24, 2 | 2006-10-24 |
Lithographic apparatus and device manufacturing method App 20060221315 - Beckers; Marcel ;   et al. | 2006-10-05 |
Lithographic apparatus and device manufacturing method App 20060158627 - Kemper; Nicolaas Rudolf ;   et al. | 2006-07-20 |
Lithographic apparatus and device manufacturing method App 20060103816 - Belfroid; Stefan Philip Christiaan ;   et al. | 2006-05-18 |
Lithographic apparatus and device manufacturing method App 20060087630 - Kemper; Nicolaas Rudolf ;   et al. | 2006-04-27 |
Lithographic apparatus and device manufacturing method App 20060066826 - Maria Luijten; Carlo Cornelis ;   et al. | 2006-03-30 |
Lithographic apparatus and device manufacturing method App 20060038968 - Kemper; Nicolaas Rudolf ;   et al. | 2006-02-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,995,379 - Vosters , et al. February 7, 2 | 2006-02-07 |
Lithographic apparatus having a gas flushing device App 20050264773 - Beckers, Marcel ;   et al. | 2005-12-01 |
Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 6,937,316 - Kemper , et al. August 30, 2 | 2005-08-30 |
Gas flushing system for use in lithographic apparatus Grant 6,933,513 - Van Empel , et al. August 23, 2 | 2005-08-23 |
Lithographic apparatus and device manufacturing method App 20050083496 - Dansberg, Michel Pieter ;   et al. | 2005-04-21 |
Lithographic apparatus and device manufacturing method App 20040227107 - Cox, Henrikus Herman Marie ;   et al. | 2004-11-18 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20040031932 - Vosters, Petrus Matthijs Henricus ;   et al. | 2004-02-19 |
Lithographic apparatus, device manufacturing method and device manufactured thereby App 20030048428 - Kemper, Nicolaas Rudolf ;   et al. | 2003-03-13 |
Gas flushing system for use in lithographic apparatus App 20030006380 - Van Empel, Tjarko Adriaan Rudolf ;   et al. | 2003-01-09 |
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