Ten Kate; Nicolaas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Ten Kate; Nicolaas.The latest application filed is for "lithographic apparatus and method".

Company Profile

38.146.119

Ten Kate; Nicolaas - Almkerk NL
TEN KATE; Nicolaas - Veldhoven NL
Ten Kate; Nicolaas - Almerk NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Fluid handling structure for lithographic apparatus Grant 11,454,892 - Van Den Eijnden , et al. September 27, 2	2022-09-27
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 11,454,895 - Lafarre , et al. September 27, 2	2022-09-27
Lithographic apparatus and device manufacturing method involving a heater Grant 11,378,893 - Cadee , et al. July 5, 2	2022-07-05
Substrate holder and method of manufacturing a substrate holder Grant 11,376,663 - Lafarre , et al. July 5, 2	2022-07-05
Lithographic Apparatus And Method App 20220206400 - TEN KATE; Nicolaas ; et al.	2022-06-30
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20220152703 - Lafarre; Raymond Wilhelmus Louis ; et al.	2022-05-19
Lithographic apparatus and method Grant 11,281,115 - Ten Kate , et al. March 22, 2	2022-03-22
Lithographic Apparatus And A Method Of Operating The Apparatus App 20220082948 - CLOIN; Christian Gerardus Norbertus Hendricus Marie ; et al.	2022-03-17
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 11,235,388 - Lafarre , et al. February 1, 2	2022-02-01
Radioisotope Production App 20210375498 - DE JAGER; Pieter Willem Herman ; et al.	2021-12-02
Lithographic apparatus and a method of operating the apparatus Grant 11,187,991 - Cloin , et al. November 30, 2	2021-11-30
Radioisotope production Grant 11,170,907 - De Jager , et al. November 9, 2	2021-11-09
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20210278772 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2021-09-09
Fluid Handling Structure For Lithographic Apparatus App 20210263424 - VAN DEN EIJNDEN; Pepijn ; et al.	2021-08-26
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method Grant RE48,676 - Roset , et al. August 10, 2	2021-08-10
Fluid handling structure for lithographic apparatus Grant 11,029,607 - Van Den Eijnden , et al. June 8, 2	2021-06-08
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 11,003,094 - Lafarre , et al. May 11, 2	2021-05-11
Lithographic Apparatus And Cooling Method App 20210132514 - DE VRIES; Gosse Charles ; et al.	2021-05-06
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20210114101 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2021-04-22
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20210107061 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2021-04-15
Lithographic Apparatus And Device Manufacturing Method App 20210096476 - MULKENS; Johannes Catharinus Hubertus ; et al.	2021-04-01
Substrate table, a lithographic apparatus and a device manufacturing method Grant 10,955,757 - Ten Kate , et al. March 23, 2	2021-03-23
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20210063898 - CADEE; Theodorus Petrus Maria ; et al.	2021-03-04
Lithographic apparatus Grant 10,935,895 - Koevoets , et al. March 2, 2	2021-03-02
Method and Apparatus for Forming a Patterned Layer of Carbon, Method of Forming a Patterned Layer of Material App 20210032743 - CASTELLANOS ORTEGA; Sonia ; et al.	2021-02-04
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,898,955 - Lafarre , et al. January 26, 2	2021-01-26
Fluid Handling Structure For Lithographic Apparatus App 20200409270 - VAN DEN EIJNDEN; Pepijn ; et al.	2020-12-31
Substrate holder and method of manufacturing a substrate holder Grant 10,875,096 - Lafarre , et al. December 29, 2	2020-12-29
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus Grant 10,871,714 - Roset , et al. December 22, 2	2020-12-22
Lithographic apparatus and device manufacturing method Grant 10,866,530 - Mulkens , et al. December 15, 2	2020-12-15
Lithographic apparatus and device manufacturing method involving a heater Grant 10,838,310 - Cadee , et al. November 17, 2	2020-11-17
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,747,125 - Lafarre , et al. A	2020-08-18
Substrate holder and a method of manufacturing a substrate holder Grant 10,719,019 - Poiesz , et al.	2020-07-21
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al.	2020-07-07
Lithographic Apparatus And Method App 20200142325 - Ten Kate; Nicolaas ; et al.	2020-05-07
Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al.	2020-03-24
Lithographic apparatus and method Grant 10,551,752 - Ten Kate , et al. Fe	2020-02-04
Substrate Table, A Lithographic Apparatus And A Device Manufacturing Method App 20200026203 - TEN KATE; Nicolaas ; et al.	2020-01-23
Lithographic Apparatus App 20190369508 - KOEVOETS; Adrianus Hendrik ; et al.	2019-12-05
Lithographic apparatus and device manufacturing method Grant 10,495,984 - Beckers , et al. De	2019-12-03
A Substrate Holder And A Method Of Manufacturing A Substrate Holder App 20190332015 - POIESZ; Thomas ; et al.	2019-10-31
Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ; et al.	2019-09-26
Lithographic Apparatus And Device Manufacturing Method App 20190271920 - Mulkens; Johannes Catharinus Hubertus ; et al.	2019-09-05
Radiation source and lithographic apparatus Grant 10,394,141 - Riepen , et al. A	2019-08-27
Substrate table, a lithographic apparatus and a device manufacturing method Grant 10,372,044 - Ten Kate , et al.	2019-08-06
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20190235395 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2019-08-01
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20190235397 - CADEE; Theodorus Petrus Maria ; et al.	2019-08-01
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20190224755 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2019-07-25
Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al.	2019-06-25
Lithographic Apparatus And Device Manufacturing Method App 20190179232 - BECKERS; Marcel ; et al.	2019-06-13
Lithographic apparatus and device manufacturing method involving a heater Grant 10,254,663 - Cadee , et al.	2019-04-09
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,254,660 - Lafarre , et al.	2019-04-09
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,245,641 - Lafarre , et al.	2019-04-02
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20190072863 - Lafarre; Raymond Wilhelmus Louis ; et al.	2019-03-07
Radioisotope Production App 20190066859 - DE JAGER; Pieter Willem Herman ; et al.	2019-02-28
Lithographic apparatus and device manufacturing method Grant 10,209,629 - Beckers , et al. Feb	2019-02-19
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method Grant RE47,237 - Roset , et al. Feb	2019-02-12
Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating Grant 10,197,927 - Mulkens , et al. Fe	2019-02-05
Substrate Table, A Lithographic Apparatus And A Device Manufacturing Method App 20180348650 - TEN KATE; Nicolaas ; et al.	2018-12-06
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,120,292 - Lafarre , et al. November 6, 2	2018-11-06
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20180292762 - KEMPER; Nicolaas Rudolf ; et al.	2018-10-11
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20180284625 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2018-10-04
Lithographic Apparatus, Cover For Use In A Lithographic Apparatus And Method For Designing A Cover For Use In A Lithographic Apparatus App 20180203365 - ROSET; Niek Jacobus Johannes ; et al.	2018-07-19
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 10,018,925 - Kemper , et al. July 10, 2	2018-07-10
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 10,018,924 - Lafarre , et al. July 10, 2	2018-07-10
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ; et al.	2018-07-05
Lithographic Apparatus App 20180173116 - KOEVOETS; Adrianus Hendrik ; et al.	2018-06-21
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,989,867 - Lafarre , et al. June 5, 2	2018-06-05
Radiation collector, radiation source and lithographic apparatus Grant 9,983,482 - Loopstra , et al. May 29, 2	2018-05-29
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,971,255 - Cortie , et al. May 15, 2	2018-05-15
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus Grant 9,927,715 - Roset , et al. March 27, 2	2018-03-27
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2	2018-02-27
Lithographic apparatus and device manufacturing method Grant 9,857,695 - Beckers , et al. January 2, 2	2018-01-02
Substrate table, a lithographic apparatus and a device manufacturing method Grant 9,857,696 - Ten Kate , et al. January 2, 2	2018-01-02
Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ; et al.	2017-12-14
Radiation Source and Lithographic Apparatus App 20170322499 - RIEPEN; Michel ; et al.	2017-11-09
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20170312826 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2017-11-02
Lithographic apparatus and device manufacturing method Grant 9,766,556 - Kemper , et al. September 19, 2	2017-09-19
Radiation source and lithographic apparatus Grant 9,753,383 - Riepen , et al. September 5, 2	2017-09-05
Substrate holder and method of manufacturing a substrate holder Grant 9,737,934 - Lafarre , et al. August 22, 2	2017-08-22
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20170235235 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2017-08-17
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20170192365 - KEMPER; Nicolaas Rudolf ; et al.	2017-07-06
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20170176875 - CORTIE; Rogier Hendrikus Magdalena ; et al.	2017-06-22
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,678,445 - Lafarre , et al. June 13, 2	2017-06-13
Lithographic apparatus and method Grant 9,632,435 - Ten Kate , et al. April 25, 2	2017-04-25
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 9,625,828 - Riepen , et al. April 18, 2	2017-04-18
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170090304 - Lafarre; Raymond Wilhelmus Louis ; et al.	2017-03-30
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 9,606,429 - Kemper , et al. March 28, 2	2017-03-28
Substrate Table, A Lithographic Apparatus And A Device Manufacturing Method App 20170075232 - TEN KATE; Nicolaas ; et al.	2017-03-16
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,588,437 - Cortie , et al. March 7, 2	2017-03-07
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-16
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20170036272 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2017-02-09
Lithographic Apparatus And Device Manufacturing Method App 20170031250 - KEMPER; Nicolaas Rudolf ; et al.	2017-02-02
Lithographic Apparatus And Device Manufacturing Method App 20170003605 - KEMPER; Nicolaas Rudolf ; et al.	2017-01-05
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20160377994 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2016-12-29
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20160349632 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2016-12-01
Substrate holder and method of manufacturing a substrate holder Grant 9,507,274 - Lafarre , et al. November 29, 2	2016-11-29
Support apparatus, lithographic apparatus and device manufacturing method Grant 9,507,275 - Lafarre , et al. November 29, 2	2016-11-29
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2	2016-11-29
Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2	2016-11-08
Substrate table, a lithographic apparatus and a device manufacturing method Grant 9,454,089 - Ten Kate , et al. September 27, 2	2016-09-27
Lithographic apparatus and device manufacturing method Grant 9,448,494 - Kemper , et al. September 20, 2	2016-09-20
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,442,395 - Lafarre , et al. September 13, 2	2016-09-13
Lithographic apparatus and device manufacturing method Grant 9,429,853 - Beckers , et al. August 30, 2	2016-08-30
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,423,699 - Lafarre , et al. August 23, 2	2016-08-23
Lithographic Apparatus, Cover For Use In A Lithographic Apparatus And Method For Designing A Cover For Use In A Lithographic Apparatus App 20160179014 - ROSET; Niek Jacobus Johannes ; et al.	2016-06-23
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20160170314 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2016-06-16
Substrate Table, A Lithographic Apparatus And A Device Manufacturing Method App 20160170310 - TEN KATE; Nicolaas ; et al.	2016-06-16
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,354,528 - Bex , et al. May 31, 2	2016-05-31
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20160103398 - CORTIE; Rogier Hendrikus Magdalena ; et al.	2016-04-14
Substrate holder, lithographic apparatus, and device manufacturing method Grant 9,298,104 - Tromp , et al. March 29, 2	2016-03-29
Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder Grant 9,268,236 - Jacobs , et al. February 23, 2	2016-02-23
Substrate table, a lithographic apparatus and a device manufacturing method Grant 9,268,238 - Ten Kate , et al. February 23, 2	2016-02-23
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20160048085 - CADEE; Theodorus Petrus Maria ; et al.	2016-02-18
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder Grant 9,256,139 - Lafarre , et al. February 9, 2	2016-02-09
Radiation Collector, Radiation Source and Lithographic Apparatus App 20160026091 - LOOPSTRA; Erik Roelof ; et al.	2016-01-28
Lithographic Apparatus And A Method Of Operating The Apparatus App 20160011522 - CLOIN; Christian Gerardus Norbertus Hendricus Marie ; et al.	2016-01-14
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,235,138 - Cortie , et al. January 12, 2	2016-01-12
Radiation Source and Lithographic Apparatus App 20150338753 - RIEPEN; Michel ; et al.	2015-11-26
Substrate Support for a Lithographic Apparatus and Lithographic Apparatus App 20150331338 - ARLEMARK; Erik Johan ; et al.	2015-11-19
Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2	2015-11-17
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ; et al.	2015-11-12
Lithographic apparatus and a method of operating the apparatus Grant 9,176,393 - Cloin , et al. November 3, 2	2015-11-03
Lithographic Apparatus And Device Manufacturing Method App 20150309422 - KEMPER; Nicolaas Rudolf ; et al.	2015-10-29
Lithographic Apparatus And Device Manufacturing Method App 20150309420 - BECKERS; Marcel ; et al.	2015-10-29
Substrate Table, A Lithographic Apparatus And A Device Manufacturing Method App 20150220003 - TEN KATE; Nicolaas ; et al.	2015-08-06
Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2	2015-08-04
Lithographic apparatus and device manufacturing method Grant 9,099,501 - Kemper , et al. August 4, 2	2015-08-04
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20150109599 - Koevoets; Adrianus Hendrik ; et al.	2015-04-23
Substrate table, a lithographic apparatus and a device manufacturing method Grant 9,013,683 - Ten Kate , et al. April 21, 2	2015-04-21
Substrate Holder, Lithographic Apparatus, And Device Manufacturing Method App 20150092168 - Tromp; Siegfried Alexander ; et al.	2015-04-02
Lithographic apparatus and device manufacturing method Grant 8,976,334 - Beckers , et al. March 10, 2	2015-03-10
Lithographic apparatus and device manufacturing method Grant 8,958,054 - Beckers , et al. February 17, 2	2015-02-17
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method Grant 8,953,142 - Kemper , et al. February 10, 2	2015-02-10
Substrate Holder And Method Of Manufacturing A Substrate Holder App 20150029485 - Lafarre; Raymond Wilhelmus Louis ; et al.	2015-01-29
Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method Grant 8,941,815 - Lafarre , et al. January 27, 2	2015-01-27
Lithographic Apparatus, Drying Device, Metrology Apparatus And Device Manufacturing Method App 20150015857 - KEMPER; Nicolaas Rudolf ; et al.	2015-01-15
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20140368804 - Lafarre; Raymond Wilhelmus Louis ; et al.	2014-12-18
Substrate holder, lithographic apparatus, and device manufacturing method involving a heater and/or temperature sensor Grant 8,908,143 - Tromp , et al. December 9, 2	2014-12-09
Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method Grant 8,891,053 - Dziomkina , et al. November 18, 2	2014-11-18
Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ; et al.	2014-10-09
Fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method Grant 8,848,164 - Van Bokhoven , et al. September 30, 2	2014-09-30
Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method Grant 8,767,169 - Roset , et al. July 1, 2	2014-07-01
Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2	2014-06-17
Lithographic apparatus and a device manufacturing method Grant 8,755,026 - Gosen , et al. June 17, 2	2014-06-17
Lithographic apparatus and device manufacturing method Grant 8,730,448 - Nienhuys , et al. May 20, 2	2014-05-20
Heat pipe, lithographic apparatus and device manufacturing method Grant 8,705,009 - Jacobs , et al. April 22, 2	2014-04-22
Lithographic apparatus and device manufacturing method Grant 8,681,311 - Leenders , et al. March 25, 2	2014-03-25
Lithographic apparatus and a device manufacturing method Grant 8,659,742 - Roset , et al. February 25, 2	2014-02-25
Lithographic apparatus, coverplate and device manufacturing method Grant 8,553,206 - Lafarre , et al. October 8, 2	2013-10-08
Substrate Holder, Lithographic Apparatus, And Device Manufacturing Method App 20130189802 - TROMP; Siegfried Alexander ; et al.	2013-07-25
Immersion lithographic apparatus and device manufacturing method Grant 8,405,819 - Van Bokhoven , et al. March 26, 2	2013-03-26
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20120274920 - BEX; Jan ; et al.	2012-11-01
Lithographic apparatus and device manufacturing method Grant 8,279,396 - Ten Kate , et al. October 2, 2	2012-10-02
Substrate table, lithographic apparatus and device manufacturing method Grant 8,274,641 - Mondt , et al. September 25, 2	2012-09-25
Lithographic Apparatus And Device Manufacturing Method App 20120229783 - Nienhuys; Han-Kwang ; et al.	2012-09-13
Lithographic apparatus and device manufacturing method Grant 8,259,287 - Beckers , et al. September 4, 2	2012-09-04
Substrate Table, A Lithographic Apparatus And A Device Manufacturing Method App 20120154781 - TEN KATE; Nicolaas ; et al.	2012-06-21
Liquid immersion lithography system comprising a tilted showerhead relative to a substrate Grant 8,203,693 - Khmelichek , et al. June 19, 2	2012-06-19
Substrate Holder, Lithographic Apparatus, Device Manufacturing Method, And Method Of Manufacturing A Substrate Holder App 20120147353 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2012-06-14
Lithographic Apparatus And Device Manufacturing Method App 20120113402 - CADEE; Theodorus Petrus Maria ; et al.	2012-05-10
Lithographic apparatus and device manufacturing method Grant 8,149,379 - Donders , et al. April 3, 2	2012-04-03
Lithographic apparatus and device manufacturing method Grant 8,144,305 - Leenders , et al. March 27, 2	2012-03-27
Fluid Handling Structure, Module For An Immersion Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20120069309 - WILLEMS; Paul ; et al.	2012-03-22
Lithographic Apparatus And Device Manufacturing Method App 20120008116 - Beckers; Marcel ; et al.	2012-01-12
Lithographic Apparatus And Device Manufacturing Method App 20120008118 - BECKERS; Marcel ; et al.	2012-01-12
Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ; et al.	2011-12-22
Fluid Supply System, A Lithographic Apparatus, A Method Of Varying Fluid Flow Rate And A Device Manufacturing Method App 20110299051 - Van Bokhoven; Laurentius Johannes Adrianus ; et al.	2011-12-08
Lithographic Apparatus, Fluid Handling Structure For Use In A Lithographic Apparatus And Device Manufacturing Method App 20110285976 - ROSET; Niek Jacobus Johannes ; et al.	2011-11-24
Lithographic Apparatus And Device Manufacturing Method App 20110273695 - BECKERS; Marcel ; et al.	2011-11-10
Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2	2011-10-04
Heat Pipe, Lithographic Apparatus And Device Manufacturing Method App 20110232878 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2011-09-29
Lithographic Apparatus And Device Manufacturing Method App 20110235008 - Leenders; Martinus Hendrikus Antonius ; et al.	2011-09-29
Lithographic Apparatus, Cover For Use In A Lithographic Apparatus And Method For Designing A Cover For Use In A Lithographic Apparatus App 20110228238 - ROSET; Niek Jacobus Johannes ; et al.	2011-09-22
Lithographic apparatus and device manufacturing method Grant 8,023,101 - Leenders , et al. September 20, 2	2011-09-20
Lithographic Apparatus And Method App 20110222032 - TEN KATE; Nicolaas ; et al.	2011-09-15
Lithographic Apparatus And Method App 20110222033 - Ten Kate; Nicolaas ; et al.	2011-09-15
Lithographic apparatus and device manufacturing method Grant 8,004,654 - Beckers , et al. August 23, 2	2011-08-23
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110194084 - RIEPEN; Michel ; et al.	2011-08-11
Lithographic Apparatus And A Device Manufacturing Method App 20110149258 - Gosen; Jeroen Gerard ; et al.	2011-06-23
Lithographic Apparatus And A Device Manufacturing Method App 20110149257 - ROSET; Niek Jacobus Johannes ; et al.	2011-06-23
Heat Pipe, Lithographic Apparatus And Device Manufacturing Method App 20110075118 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2011-03-31
Lithographic Apparatus, Coverplate And Device Manufacturing Method App 20110069297 - Lafarre; Raymond Wilhelmus Louis ; et al.	2011-03-24
Lithographic Apparatus, Coverplate And Device Manufacturing Method App 20110069289 - LAFARRE; Raymond Wilhelmus Louis ; et al.	2011-03-24
Lithographic Apparatus And Device Manufacturing Method App 20110051107 - BELFROID; Stefan Philip Christiaan ; et al.	2011-03-03
Lithographic Apparatus And Device Manufacturing Method App 20110025994 - KEMPER; Nicolaas Rudolf ; et al.	2011-02-03
Substrate Table For A Lithographic Apparatus, Lithographic Apparatus, Method Of Using A Substrate Table And Device Manufacturing Method App 20110013169 - Lafarre; Raymond Wilhelmus Louis ; et al.	2011-01-20
Lithographic apparatus, immersion projection apparatus and device manufacturing method Grant 7,859,644 - Van Der Toorn , et al. December 28, 2	2010-12-28
Lithographic Apparatus App 20100321653 - Leenders; Martinus Hendrikus Antonius ; et al.	2010-12-23
Lithographic Apparatus And Device Manufacturing Method App 20100321650 - CADEE; THEODORUS PETRUS MARIA ; et al.	2010-12-23
Lithographic apparatus and device manufacturing method Grant 7,852,457 - Belfroid , et al. December 14, 2	2010-12-14
Lithographic Apparatus App 20100302518 - VAN EIJK; Jan ; et al.	2010-12-02
Lithographic apparatus and device manufacturing method Grant 7,834,974 - Kemper , et al. November 16, 2	2010-11-16
Immersion Lithographic Apparatus And Device Manufacturing Method App 20100283981 - Van Bokhoven; Laurentius Johannes Adrianus ; et al.	2010-11-11
Lithographic Apparatus And Device Manufacturing Method App 20100245791 - JACOBS; Johannes Henricus Wilhelmus ; et al.	2010-09-30
Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2	2010-09-28
Lithographic apparatus Grant 7,804,577 - Leenders , et al. September 28, 2	2010-09-28
Lithographic Apparatus and Device Manufacturing Method App 20100231875 - TEN KATE; Nicolaas ; et al.	2010-09-16
Lithographic apparatus and device manufacturing method Grant 7,751,027 - Jacobs , et al. July 6, 2	2010-07-06
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ; et al.	2010-07-01
Lithographic Apparatus And Device Manufacturing Method App 20100157277 - KEMPER; Nicolaas Rudolf ; et al.	2010-06-24
Fluid Handling Structure, Table, Lithographic Apparatus, Immersion Lithographic Apparatus, And Device Manufacturing Methods App 20100157265 - TEN KATE; Nicolaas	2010-06-24
Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ; et al.	2010-06-17
Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2	2010-04-20
Lithographic Apparatus, Method Of Manufacturing An Article For A Lithographic Apparatus And Device Manufacturing Method App 20100060870 - DZIOMKINA; Nina Vladimirovna ; et al.	2010-03-11
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Lithographic apparatus and device manufacturing method Grant 7,656,502 - Van Der Schoot , et al. February 2, 2	2010-02-02
Lithographic apparatus Grant 7,656,501 - Ten Kate , et al. February 2, 2	2010-02-02
Lithographic apparatus and device manufacturing method Grant 7,652,746 - Jacobs , et al. January 26, 2	2010-01-26
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Substrate Table, Lithographic Apparatus And Device Manufacturing Method App 20090296056 - Mondt; Eva ; et al.	2009-12-03
Method and system for active purging of pellicle volumes Grant 7,619,718 - Luo , et al. November 17, 2	2009-11-17
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2	2009-10-13
Lithographic Apparatus And Methods App 20090225289 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al.	2009-09-10
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Lithographic apparatus and device manufacturing method App 20080273182 - Beckers; Marcel ; et al.	2008-11-06
Lithographic apparatus and device manufacturing method Grant 7,414,699 - Belfroid , et al. August 19, 2	2008-08-19
Lithographic apparatus and device manufacturing method Grant 7,411,654 - Beckers , et al. August 12, 2	2008-08-12
Lithographic apparatus and device manufacturing method Grant 7,411,658 - Beckers , et al. August 12, 2	2008-08-12
Lithographic apparatus, immersion projection apparatus and device manufacturing method App 20080123071 - Van Der Toorn; Jan-Gerard Cornelis ; et al.	2008-05-29
Lithographic apparatus, immersion projection apparatus and device manufacturing method Grant 7,330,238 - Van Der Toorn , et al. February 12, 2	2008-02-12
Lithographic apparatus and device manufacturing method Grant 7,251,013 - Ten Kate , et al. July 31, 2	2007-07-31
Lithographic apparatus, reticle exchange unit and device manufacturing method Grant 7,230,673 - Ten Kate June 12, 2	2007-06-12
Lithographic apparatus and device manufacturing method App 20060285096 - Jacobs; Johannes Henricus Wilhelmus ; et al.	2006-12-21
Lithographic apparatus having a gas flushing device Grant 7,136,142 - Beckers , et al. November 14, 2	2006-11-14
Lithographic apparatus and device manufacturing method Grant 7,133,114 - Hoogendam , et al. November 7, 2	2006-11-07
Lithographic apparatus, immersion projection apparatus and device manufacturing method App 20060215131 - Van Der Toorn; Jan-Gerard Cornelis ; et al.	2006-09-28
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