U.S. patent application number 12/606659 was filed with the patent office on 2010-02-25 for barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus.
This patent application is currently assigned to CANON ANELVA CORPORATION. Invention is credited to Ryuichi Matsuda, Toshihiko Nishimori, Yoshiyuki Ooba, Hitoshi Sakamoto, Naoki Yahata.
Application Number | 20100047471 12/606659 |
Document ID | / |
Family ID | 27482680 |
Filed Date | 2010-02-25 |
United States Patent
Application |
20100047471 |
Kind Code |
A1 |
Sakamoto; Hitoshi ; et
al. |
February 25, 2010 |
BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM
PRODUCTION METHOD, METAL FILM PRODUCTION METHOD, AND METAL FILM
PRODUCTION APPARATUS
Abstract
A Cl.sub.2 gas plasma is generated at a site within a chamber
between a substrate and a metal member. The metal member is etched
with the Cl.sub.2 gas plasma to form a precursor. A nitrogen gas is
excited in a manner isolated from the chamber accommodating the
substrate. A metal nitride is formed upon reaction between excited
nitrogen and the precursor, and formed as a film on the substrate.
After film formation of the metal nitride, a metal component of the
precursor is formed as a film on the metal nitride on the
substrate. In this manner, a barrier metal film with excellent
burial properties and a very small thickness is produced at a high
speed, with diffusion of metal being suppressed and adhesion to the
metal being improved.
Inventors: |
Sakamoto; Hitoshi;
(Yokohama-shi, JP) ; Yahata; Naoki; (Takasago-shi,
JP) ; Matsuda; Ryuichi; (Takasago-shi, JP) ;
Ooba; Yoshiyuki; (Yokohama-shi, JP) ; Nishimori;
Toshihiko; (Takasago-shi, JP) |
Correspondence
Address: |
FITZPATRICK CELLA HARPER & SCINTO
1290 Avenue of the Americas
NEW YORK
NY
10104-3800
US
|
Assignee: |
CANON ANELVA CORPORATION
Kawasaki-shi
JP
|
Family ID: |
27482680 |
Appl. No.: |
12/606659 |
Filed: |
October 27, 2009 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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11638510 |
Dec 14, 2006 |
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12606659 |
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10277733 |
Oct 23, 2002 |
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11638510 |
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Current U.S.
Class: |
427/562 |
Current CPC
Class: |
H01L 21/7685 20130101;
C23C 16/14 20130101; H01L 21/76856 20130101; C23C 16/34 20130101;
C23C 16/56 20130101; C23F 4/00 20130101; H01L 21/76843 20130101;
C23C 16/4488 20130101; H01L 21/76862 20130101; H01L 21/28556
20130101; C23C 16/452 20130101; H01L 21/76846 20130101; H01L
21/76888 20130101; H01L 21/76876 20130101; C23C 16/40 20130101;
C23C 16/507 20130101; C23C 8/36 20130101; H01L 2221/1078
20130101 |
Class at
Publication: |
427/562 |
International
Class: |
C23C 16/448 20060101
C23C016/448; C23C 16/34 20060101 C23C016/34 |
Foreign Application Data
Date |
Code |
Application Number |
Nov 14, 2001 |
JP |
2001-348325 |
Feb 5, 2002 |
JP |
2002-27738 |
Feb 21, 2002 |
JP |
2002-44289 |
Feb 21, 2002 |
JP |
2002-44296 |
Claims
1. A production method for a barrier film comprising: arranging a
metallic etched member and a substrate within a chamber; forming a
plasma of a source gas in the chamber so that the etched member is
etched with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas;
exciting a nitrogen-containing gas in an excitation chamber
isolated from the chamber and supplying the excited
nitrogen-containing gas into the chamber in which the source gas
plasma is formed, through an opening in the chamber; and
terminating the supply of the excited nitrogen-containing gas to
the chamber with retaining the source gas plasma in the chamber,
thereby permitting a metal film to form on the metal nitride
film.
2. The production method of claim 1, wherein the temperature of the
substrate is controlled to be lower than that of the source gas
plasma during the formations of the metal nitride film and metal
film.
3. The production method of claim 1, wherein the source gas plasma
is generated by an electromagnetic wave from a coiled winding
antenna disposed around the chamber.
4. The production method of claim 1, wherein the source gas is the
source gas containing chlorine.
5. The production method of claim 1, wherein the
nitrogen-containing gas is a gas containing ammonia.
6. The production method of claim 1, wherein the etched member is
made of tantalum, tungsten, titanium or silicon which is a
halide-forming metal.
Description
[0001] This application is a Divisional of co-pending application
Ser. No. 11/638,510, filed Dec. 14, 2006, which is a Divisional
Application of U.S. application Ser. No. 10/277,733, filed Oct. 23,
2002, which is now abandoned, and for which priority is claimed
under 35 U.S.C. .sctn.120; and this application claims priority of
Japanese Patent Application Nos. 2001-348325, 2002-27738,
2002-44289, and 2002-44296, filed on Nov. 14, 2001, Feb. 5, 2002,
Feb. 21, 2002, and Feb. 21, 2002 under 35 U.S.C. .sctn.119. The
contents of all of the aforementioned applications are hereby
incorporated by reference herein in their entireties.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] This invention relates to a production apparatus and a
production method for a barrier metal film to be formed on the
surface of a substrate for eliminating the diffusion of a metal
into the substrate and retaining the adhesion of the metal, when a
metal film is formed on the surface of the substrate.
[0004] The present invention also relates to a metal film
production method and a metal film production apparatus which can
form a film of a metal, with the diffusion of the metal being
eliminated and the adhesion of the metal being retained, by
treating the surface of a barrier metal film produced on a
substrate.
[0005] 2. Description of Related Art
[0006] Semiconductors with electrical wiring have increasingly used
copper as a material for the wiring in order to increase the speed
of switching, decrease transmission loss, and achieve a high
density. In applying the copper wiring, it has been common practice
to perform the vapor phase growth method or plating on a substrate
having a depression for wiring on its surface, thereby forming a
copper film on the surface including the depression.
[0007] In forming the copper film on the surface of the substrate,
a barrier metal film (for example, a nitride of tantalum, tungsten,
titanium or silicon) is prepared beforehand on the surface of the
substrate in order to eliminate the diffusion of copper into the
substrate, and retain the adhesion of copper. When plating is
employed, a copper shielding layer is formed on the barrier metal
film by physical or chemical vapor deposition, and used also as an
electrode. The barrier metal film has been formed by physical vapor
deposition such as sputtering.
[0008] The depression for wiring, formed on the surface of the
substrate, tends to be decreased in size, and a demand is expressed
for a further reduction in the thickness of the barrier metal film.
However, the barrier metal film has been produced by use of
sputtering, and its directionality is not uniform. With a tiny
depression on the surface of the substrate, therefore, the film is
formed at the entrance of the depression before being formed in the
interior of the depression, resulting in insufficient burial of the
depression. Also, the substrate has been badly damaged.
[0009] Additionally, the barrier metal film is prepared for the
purposes of preventing the diffusion of copper into the substrate
and retaining the adhesion of copper. Hence, a nitride of tantalum,
tungsten or titanium is formed as a first layer for prevention of
copper diffusion, and an active metal, such as tantalum, tungsten
or titanium, is formed as a second layer for retention of adhesion
to copper. However, the barrier metal film is so thin that it poses
difficulty at the present time in performing both functions, the
prevention of copper diffusion into the substrate and the retention
of copper adhesion. A demand is growing for the advent of a barrier
metal film which accomplishes these two functions.
[0010] In particular, the wiring depression formed on the surface
of the substrate is showing a tendency toward compactness, and
further thinning of the barrier metal film is demanded. However,
the necessary minimum film thickness has increased, if the barrier
metal film is constructed in a two-layer structure by forming a
nitride of tantalum, tungsten or titanium as a first layer for
prevention of copper diffusion, and forming an active metal, such
as tantalum, tungsten or titanium, as a second layer for retention
of adhesion to copper.
SUMMARY OF THE INVENTION
[0011] The present invention has been accomplished in light of the
circumstances described above. An object of the invention is to
provide a barrier metal film production apparatus and a barrier
metal film production method which can form a barrier metal film
with excellent burial properties and a very small thickness at a
high speed. Another object of the invention is to provide a barrier
metal film production apparatus and a barrier metal film production
method which can form a barrier metal film with excellent adhesion
to a metal formed as a film on the surface of the substrate. Still
another object of the invention is to provide a metal film
production method and a metal film production apparatus capable of
forming a barrier metal film which, although very thin, prevents
diffusion of a metal and retains adhesion to the metal.
[0012] According to the present invention, there is provided a
barrier metal film production apparatus, comprising:
[0013] a chamber accommodating a substrate;
[0014] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0015] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0016] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas;
[0017] excitation means for exciting a nitrogen-containing gas in a
manner isolated from the chamber;
[0018] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the precursor;
and
[0019] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate.
[0020] Thus, a barrier metal film comprising a film of a metal
nitride and suppressing diffusion can be prepared by forming a
metal with the use of a plasma. The barrier metal film can be
formed uniformly to a small thickness. Consequently, the barrier
metal film can be formed highly accurately at a high speed with
excellent burial properties in a very small thickness even to the
interior of a tiny depression, for example several hundred
nanometers wide, which has been provided in the substrate.
[0021] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0022] a chamber accommodating a substrate;
[0023] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0024] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0025] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas;
[0026] excitation means for exciting a nitrogen-containing gas in a
manner isolated from the chamber;
[0027] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the precursor;
and
[0028] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate, and after film formation of the
metal nitride, stops supply of the nitrogen-containing gas, and
makes the temperature of the substrate lower than a temperature of
the etched member to form the metal component of the precursor as a
film on the metal nitride on the substrate.
[0029] Thus, a barrier metal film comprising a film of a metal
nitride and a metal film and with diffusion suppressed and adhesion
improved can be prepared by forming a metal by plasmas. The barrier
metal film can be formed uniformly to a small thickness.
Consequently, the barrier metal film can be formed highly
accurately at a high speed with excellent burial properties in a
very small thickness even to the interior of a tiny depression, for
example several hundred nanometers wide, which has been provided in
the substrate.
[0030] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0031] a chamber accommodating a substrate;
[0032] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0033] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0034] nitrogen-containing gas supply means for supplying a
nitrogen-containing gas to an interior of the chamber between the
substrate and the etched member;
[0035] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma and a
nitrogen-containing gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
that a metal nitride is formed upon reaction between nitrogen and
the precursor; and
[0036] control means which makes a temperature of the substrate
lower than a temperature of the etched member to form the metal
nitride as a film on the substrate.
[0037] Thus, a barrier metal film comprising a film of a metal
nitride and a metal film and with diffusion suppressed can be
prepared by forming a metal by plasmas. The barrier metal film can
be formed uniformly to a small thickness. Also, the supply lines
for gases can be simplified, and the number of plasma sources can
be decreased, so that the product cost can be reduced.
Consequently, the barrier metal film can be formed highly
accurately at a high speed and at a low cost with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate.
[0038] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0039] a chamber accommodating a substrate;
[0040] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0041] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0042] nitrogen-containing gas supply means for supplying a
nitrogen-containing gas to an interior of the chamber between the
substrate and the etched member;
[0043] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma and a
nitrogen-containing gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
that a metal nitride is formed upon reaction between nitrogen and
the precursor; and
[0044] control means which makes a temperature of the substrate
lower than a temperature of the etched member to form the metal
nitride as a film on the substrate, then stops supply of the
nitrogen-containing gas, and makes the temperature of the substrate
lower than the temperature of the etched member to form the metal
component of the precursor as a film on the metal nitride on the
substrate.
[0045] Thus, a barrier metal film comprising a film of a metal
nitride and a metal film and with diffusion suppressed and adhesion
improved can be prepared by forming a metal by plasmas. The barrier
metal film can be formed uniformly to a small thickness. Also, the
supply lines for gases can be simplified, and the number of plasma
sources can be decreased, so that the product cost can be reduced.
Consequently, the barrier metal film can be formed highly
accurately at a high speed and at a low cost with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate.
[0046] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0047] supplying a source gas containing a halogen to an interior
of a chamber between a substrate and a metallic etched member;
[0048] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas;
[0049] exciting a nitrogen-containing gas in a manner isolated from
the chamber accommodating the substrate;
[0050] forming a metal nitride upon reaction between excited
nitrogen and the precursor; and
[0051] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate.
[0052] Thus, a barrier metal film comprising a film of a metal
nitride and suppressing diffusion can be prepared by forming a
metal by plasma. The barrier metal film can be formed uniformly to
a small thickness. Consequently, the barrier metal film can be
formed highly accurately at a high speed with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate.
[0053] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0054] supplying a source gas containing a halogen to an interior
of a chamber between a substrate and a metallic etched member;
[0055] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas;
[0056] exciting a nitrogen-containing gas in a manner isolated from
the chamber accommodating the substrate;
[0057] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0058] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate; and
[0059] after film formation of the metal nitride, stopping supply
of the nitrogen-containing gas, and making the temperature of the
substrate lower than a temperature of the etched member to form the
metal component of the precursor as a film on the metal nitride on
the substrate.
[0060] Thus, a barrier metal film comprising a film of a metal
nitride and a metal film and with diffusion suppressed and adhesion
improved can be prepared by forming a metal by plasmas. The barrier
metal film can be formed uniformly to a small thickness.
Consequently, the barrier metal film can be formed highly
accurately at a high speed with excellent burial properties in a
very small thickness even to the interior of a tiny depression, for
example several hundred nanometers wide, which has been provided in
the substrate.
[0061] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0062] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0063] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma and a nitrogen-containing gas plasma
so that the etched member is etched with the source gas plasma to
form a precursor from a metal component contained in the etched
member and the source gas, and that a metal nitride is formed upon
reaction between nitrogen and the precursor; and
[0064] making a temperature of the substrate lower than a
temperature of the etched member to form the metal nitride as a
film on the substrate.
[0065] Thus, a barrier metal film comprising a film of a metal
nitride and with diffusion suppressed can be prepared by forming a
metal by plasmas. The barrier metal film can be formed uniformly to
a small thickness. Also, the supply line for gases can be
simplified, and the number of plasma sources can be decreased, so
that the product cost can be reduced. Consequently, the barrier
metal film can be formed highly accurately at a high speed and at a
low cost with excellent burial properties in a very small thickness
even to the interior of a tiny depression, for example several
hundred nanometers wide, which has been provided in the
substrate.
[0066] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0067] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0068] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma and a nitrogen-containing gas plasma
so that the etched member is etched with the source gas plasma to
form a precursor from a metal component contained in the etched
member and the source gas, and that a metal nitride is formed upon
reaction between nitrogen and the precursor;
[0069] making a temperature of the substrate lower than a
temperature of the etched member to form the metal nitride as a
film on the substrate; and
[0070] after film formation of the metal nitride, stopping supply
of the nitrogen-containing gas, and making the temperature of the
substrate lower than the temperature of the etched member to form
the metal component of the precursor as a film on the metal nitride
on the substrate.
[0071] Thus, a barrier metal film comprising a film of a metal
nitride and a metal film and with diffusion suppressed and adhesion
improved can be prepared by forming a metal by plasmas. The barrier
metal film can be formed uniformly to a small thickness. Also, the
supply line for gases can be simplified, and the number of plasma
sources can be decreased, so that the product cost can be reduced.
Consequently, the barrier metal film can be formed highly
accurately at a high speed and at a low cost with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate.
[0072] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0073] a chamber accommodating a substrate;
[0074] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0075] source gas supply means for supplying a source gas
containing a halogen into the chamber;
[0076] nitrogen-containing gas supply means for supplying a gas
containing nitrogen into the chamber;
[0077] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas, and which converts the atmosphere within the
chamber into a plasma to generate a nitrogen-containing gas plasma
so that a metal nitride is formed upon reaction between nitrogen
and the precursor;
[0078] control means which makes a temperature of the substrate
lower than a temperature of the plasma generation means to form the
metal nitride as a barrier metal film on a surface of the
substrate;
[0079] diluent gas supply means for supplying a diluent gas to a
site above the surface of the substrate; and
[0080] surface treatment plasma generation means for performing a
surface treatment which converts the atmosphere within the chamber
into a plasma to generate a diluent gas plasma so that nitrogen
atoms in a superficial layer of the barrier metal film are removed
by the diluent gas plasma to decrease a nitrogen content of the
superficial layer relative to an interior of a matrix of the
barrier metal film.
[0081] Thus, a barrier metal film comprising a metal nitride layer
and a metal layer can be prepared without the increase of the film
thickness. Consequently, a barrier metal film production apparatus
can be achieved which is capable of forming a barrier metal film at
a high speed with excellent burial properties in a very small
thickness, and also forming a barrier metal film with excellent
adhesion to a metal formed as a film on the surface of the barrier
metal film.
[0082] The barrier metal film production apparatus may further
comprise oxygen gas supply means for supplying an oxygen gas into
the chamber immediately before formation of the most superficial
layer of the barrier metal film is completed; and oxygen plasma
generation means which converts the atmosphere within the chamber
into a plasma to generate an oxygen gas plasma so that an oxide
layer is formed on the most superficial layer of the barrier metal
film.
[0083] Thus, because of an oxide layer, if a metal is deposited on
the surface of the barrier metal film, wettability by the metal can
be rendered satisfactory, thus increasing adhesion.
[0084] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0085] a chamber accommodating a substrate;
[0086] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0087] source gas supply means for supplying a source gas
containing a halogen into the chamber;
[0088] nitrogen-containing gas supply means for supplying a gas
containing nitrogen into the chamber;
[0089] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas, and which converts the atmosphere within the
chamber into a plasma to generate a nitrogen-containing gas plasma
so that a metal nitride is formed upon reaction between nitrogen
and the precursor;
[0090] control means which makes a temperature of the substrate
lower than a temperature of the plasma generation means to form the
metal nitride as a barrier metal film on a surface of the
substrate;
[0091] oxygen gas supply means for supplying an oxygen gas to a
site above the surface of the substrate; and
[0092] oxygen plasma generation means for performing a surface
treatment which converts the atmosphere within the chamber into a
plasma to generate an oxygen gas plasma so that nitrogen atoms in a
superficial layer of the barrier metal film are removed by the
oxygen gas plasma to decrease a nitrogen content of the superficial
layer relative to an interior of a matrix of the barrier metal
film, and at the same time, forming an oxide layer on the most
superficial layer of the barrier metal film.
[0093] Thus, a barrier metal film comprising a metal nitride layer
and a metal layer can be prepared with a minimum nozzle
construction without the increase of the film thickness, and an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film. Consequently, a barrier
metal film production apparatus can be achieved which is capable of
forming a barrier metal film at a high speed with excellent burial
properties in a very small thickness, and also forming a barrier
metal film with excellent adhesion to a metal formed as a film on
the surface of the barrier metal film.
[0094] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0095] a chamber accommodating a substrate;
[0096] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0097] source gas supply means for supplying a source gas
containing a halogen into the chamber;
[0098] nitrogen-containing gas supply means for supplying a gas
containing nitrogen into the chamber;
[0099] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas, and which converts the atmosphere within the
chamber into a plasma to generate a nitrogen-containing gas plasma
so that a metal nitride is formed upon reaction between nitrogen
and the precursor;
[0100] control means which makes a temperature of the substrate
lower than a temperature of the plasma generation means to form the
metal nitride as a film, for use as a barrier metal film, on a
surface of the substrate;
[0101] oxygen gas supply means for supplying an oxygen gas into the
chamber immediately before formation of the most superficial layer
of the barrier metal film is completed; and
[0102] oxygen plasma generation means which converts the atmosphere
within the chamber into a plasma to generate an oxygen gas plasma
so that an oxide layer is formed on the most superficial layer of
the barrier metal film.
[0103] Thus, a barrier metal film comprising a metal nitride layer
can be prepared without the increase of the film thickness, and an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film. Consequently, a barrier
metal film production apparatus can be achieved which is capable of
forming a barrier metal film at a high speed with excellent burial
properties in a very small thickness, and also forming a barrier
metal film with excellent adhesion to a metal formed as a film on
the surface of the barrier metal film.
[0104] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0105] a chamber accommodating a substrate;
[0106] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0107] source gas supply means for supplying a source gas
containing a halogen into the chamber;
[0108] nitrogen-containing gas supply means for supplying a gas
containing nitrogen into the chamber;
[0109] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas, and which converts the atmosphere within the
chamber into a plasma to generate a nitrogen-containing gas plasma
so that a metal nitride is formed upon reaction between nitrogen
and the precursor;
[0110] control means which makes a temperature of the substrate
lower than a temperature of the plasma generation means to form the
metal nitride as a film on a surface of the substrate, then makes
the temperature of the substrate lower than the temperature of the
plasma generation means and stops supply of the gas containing
nitrogen from the nitrogen-containing gas supply means, thereby
forming the metal component of the precursor as a film on the metal
nitride for use as a barrier metal film;
[0111] oxygen gas supply means for supplying an oxygen gas into the
chamber immediately before formation of the most superficial layer
of the barrier metal film is completed; and
[0112] oxygen plasma generation means which converts the atmosphere
within the chamber into a plasma to generate an oxygen gas plasma
so that an oxide layer is formed on the most superficial layer of
the barrier metal film.
[0113] Thus, a barrier metal film comprising a metal nitride layer
and a metal layer can be prepared without the increase of the film
thickness, and an oxide layer gives satisfactory wettability by a
metal deposited on the surface of the barrier metal film.
Consequently, a barrier metal film production apparatus can be
achieved which is capable of forming a barrier metal film at a high
speed with excellent burial properties, and also forming a barrier
metal film with excellent adhesion to a metal formed as a film on
the surface of the barrier metal film.
[0114] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0115] a chamber accommodating a substrate;
[0116] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0117] source gas supply means for supplying a source gas
containing a halogen into the chamber;
[0118] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas;
[0119] excitation means for exciting a gas containing nitrogen in a
manner isolated from the chamber;
[0120] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the
precursor;
[0121] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate for use as a barrier metal
film;
[0122] oxygen gas supply means for supplying an oxygen gas into the
chamber immediately before formation of the most superficial layer
of the barrier metal film is completed; and
[0123] oxygen plasma generation means which converts the atmosphere
within the chamber into a plasma to generate an oxygen gas plasma
so that an oxide layer is formed on the most superficial layer of
the barrier metal film.
[0124] Thus, a barrier metal film comprising a metal nitride layer
can be prepared without the increase of the film thickness, an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film, and the substrate can be
free from exposure to a nitrogen-containing gas plasma.
Consequently, a barrier metal film production apparatus can be
achieved which is capable of forming a barrier metal film at a high
speed with excellent burial properties in a very small thickness
without exerting the influence of the nitrogen-containing gas
plasma upon the substrate, and also forming a barrier metal film
with excellent adhesion to a metal formed as a film on the surface
of the barrier metal film.
[0125] According to the present invention, there is also provided a
barrier metal film production apparatus, comprising:
[0126] a chamber accommodating a substrate;
[0127] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0128] source gas supply means for supplying a source gas
containing a halogen into the chamber;
[0129] plasma generation means which converts an atmosphere within
the chamber into a plasma to generate a source gas plasma so that
the etched member is etched with the source gas plasma to form a
precursor from a metal component contained in the etched member and
the source gas;
[0130] excitation means for exciting a gas containing nitrogen in a
manner isolated from the chamber;
[0131] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the
precursor;
[0132] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate, and after film formation of the
metal nitride, stops supply of the nitrogen-containing gas and
makes the temperature of the substrate lower than a temperature of
the etched member, thereby forming the metal component of the
precursor as a film on the metal nitride on the substrate for use
as a barrier metal film;
[0133] oxygen gas supply means for supplying an oxygen gas into the
chamber immediately before formation of the most superficial layer
of the barrier metal film is completed; and
[0134] oxygen plasma generation means which converts the atmosphere
within the chamber into a plasma to generate an oxygen gas plasma
so that an oxide layer is formed on the most superficial layer of
the barrier metal film.
[0135] Thus, a barrier metal film comprising a metal nitride layer
can be prepared without the increase of the film thickness, an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film, and the substrate can be
free from exposure to a nitrogen-containing gas plasma.
Consequently, a barrier metal film production apparatus can be
achieved which is capable of forming a barrier metal film at a high
speed with excellent burial properties without exerting the
influence of the nitrogen-containing gas plasma upon the substrate,
and also forming a barrier metal film with excellent adhesion to a
metal formed as a film on the surface of the barrier metal
film.
[0136] The barrier metal film production apparatus may further
comprise hydrogen gas supply means for supplying a hydrogen gas
into the chamber; and hydroxyl group plasma generation means which
converts the atmosphere within the chamber into a plasma to
generate a hydrogen gas plasma so that hydroxyl groups are formed
on the oxide layer.
[0137] Thus, hydroxyl groups are formed, so that hydrophilicity can
be increased, and adhesion of a metal deposited on the surface can
be further increased.
[0138] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0139] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0140] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also converting the atmosphere within the chamber into a plasma to
generate a nitrogen-containing gas plasma so that a metal nitride
is formed upon reaction between nitrogen and the precursor;
[0141] making a temperature of the substrate lower than a
temperature of plasma generation means to form the metal nitride as
a barrier metal film on a surface of the substrate;
[0142] supplying a diluent gas to a site within the chamber above
the surface of the substrate; and
[0143] performing a surface treatment which converts the atmosphere
within the chamber into a plasma to generate a diluent gas plasma
so that nitrogen atoms in a superficial layer of the barrier metal
film are removed by the diluent gas plasma to decrease a nitrogen
content of the superficial layer relative to an interior of a
matrix of the barrier metal film.
[0144] Thus, a barrier metal film comprising a metal nitride layer
and a metal layer can be prepared without the increase of the film
thickness. Consequently, a barrier metal film production method can
be achieved which is capable of forming a barrier metal film at a
high speed with excellent burial properties in a very small
thickness, and also forming a barrier metal film with excellent
adhesion to a metal formed as a film on the surface of the barrier
metal film.
[0145] The barrier metal film production method may further
comprise supplying an oxygen gas into the chamber immediately
before formation of the most superficial layer of the barrier metal
film is completed; and converting the atmosphere within the chamber
into a plasma to generate an oxygen gas plasma so that an oxide
layer is formed on the most superficial layer of the barrier metal
film.
[0146] Thus, the oxide layer gives satisfactory wettability by a
metal deposited on the surface of the barrier metal film, thereby
increasing adhesion to the metal.
[0147] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0148] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0149] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also converting the atmosphere within the chamber into a plasma to
generate a nitrogen-containing gas plasma so that a metal nitride
is formed upon reaction between nitrogen and the precursor;
[0150] making a temperature of the substrate lower than a
temperature of plasma generation means to form the metal nitride as
a barrier metal film on a surface of the substrate;
[0151] supplying an oxygen gas to a site above the surface of the
substrate; and
[0152] performing a surface treatment which converts the atmosphere
within the chamber into a plasma to generate an oxygen gas plasma
so that nitrogen atoms in a superficial layer of the barrier metal
film are removed by the oxygen gas plasma to decrease a nitrogen
content of the superficial layer relative to an interior of a
matrix of the barrier metal film, while forming an oxide layer on
the most superficial layer of the barrier metal film.
[0153] Thus, a barrier metal film comprising a metal nitride layer
and a metal layer can be prepared with a minimum nozzle
construction without the increase of the film thickness, and an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film. Consequently, a barrier
metal film production method can be achieved which is capable of
forming a barrier metal film at a high speed with excellent burial
properties in a very small thickness, and also forming a barrier
metal film with excellent adhesion to a metal formed as a film on
the surface of the barrier metal film.
[0154] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0155] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0156] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also converting the atmosphere within the chamber into a plasma to
generate a nitrogen-containing gas plasma so that a metal nitride
is formed upon reaction between nitrogen and the precursor;
[0157] making a temperature of the substrate lower than a
temperature of plasma generation means to form the metal nitride as
a film on a surface of the substrate for use as a barrier metal
film;
[0158] supplying an oxygen gas into the chamber immediately before
formation of the most superficial layer of the barrier metal film
is completed; and
[0159] converting the atmosphere within the chamber into a plasma
to generate an oxygen gas plasma so that an oxide layer is formed
on the most superficial layer of the barrier metal film.
[0160] Thus, a barrier metal film comprising a metal nitride layer
can be prepared without the increase of the film thickness, and an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film. Consequently, a barrier
metal film production method can be achieved which is capable of
forming a barrier metal film at a high speed with excellent burial
properties in a very small thickness, and also forming a barrier
metal film with excellent adhesion to a metal formed as a film on
the surface of the barrier metal film.
[0161] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0162] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0163] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also converting the atmosphere within the chamber into a plasma to
generate a nitrogen-containing gas plasma so that a metal nitride
is formed upon reaction between nitrogen and the precursor;
[0164] making a temperature of the substrate lower than a
temperature of plasma generation means to form the metal nitride as
a film on a surface of the substrate, then making the temperature
of the substrate lower than the temperature of the plasma
generation means and stopping supply of the gas containing
nitrogen, thereby forming the metal component of the precursor as a
film on the metal nitride for use as a barrier metal film;
[0165] supplying an oxygen gas into the chamber immediately before
formation of the most superficial layer of the barrier metal film
is completed; and
[0166] converting the atmosphere within the chamber into a plasma
to generate an oxygen gas plasma so that an oxide layer is formed
on the most superficial layer of the barrier metal film.
[0167] Thus, a barrier metal film comprising a metal nitride layer
and a metal layer can be prepared without the increase of the film
thickness, and an oxide layer gives satisfactory wettability by a
metal deposited on the surface of the barrier metal film.
Consequently, a barrier metal film production method can be
achieved which is capable of forming a barrier metal film at a high
speed with excellent burial properties, and also forming a barrier
metal film with excellent adhesion to a metal formed as a film on
the surface of the barrier metal film.
[0168] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0169] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0170] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also exciting the gas containing nitrogen in a manner isolated from
the chamber accommodating the substrate;
[0171] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0172] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate for use as a barrier metal
film;
[0173] supplying an oxygen gas at a site above a surface of the
substrate immediately before formation of the most superficial
layer of the barrier metal film is completed; and
[0174] converting the atmosphere within the chamber into a plasma
to generate an oxygen gas plasma so that an oxide layer is formed
on the most superficial layer of the barrier metal film.
[0175] Thus, a barrier metal film comprising a metal nitride layer
can be prepared without the increase of the film thickness, an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film, and the substrate can be
free from exposure to a nitrogen-containing gas plasma.
Consequently, a barrier metal film production method can be
achieved which is capable of forming a barrier metal film at a high
speed with excellent burial properties in a very small thickness
without exerting the influence of the nitrogen-containing gas
plasma upon the substrate, and also forming a barrier metal film
with excellent adhesion to a metal formed as a film on the surface
of the barrier metal film.
[0176] According to the present invention, there is also provided a
barrier metal film production method comprising:
[0177] supplying a source gas containing a halogen and a
nitrogen-containing gas to an interior of a chamber between a
substrate and a metallic etched member;
[0178] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also exciting the gas containing nitrogen in a manner isolated from
the chamber accommodating the substrate;
[0179] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0180] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate, and after film formation
of the metal nitride, stopping supply of the nitrogen-containing
gas and making the temperature of the substrate lower than a
temperature of the etched member, thereby forming the metal
component of the precursor as a film on the metal nitride on the
substrate for use as a barrier metal film;
[0181] supplying an oxygen gas at a site above a surface of the
substrate immediately before formation of the most superficial
layer of the barrier metal film is completed; and
[0182] converting the atmosphere within the chamber into a plasma
to generate an oxygen gas plasma so that an oxide layer is formed
on the most superficial layer of the barrier metal film.
[0183] Thus, a barrier metal film comprising a metal nitride layer
can be prepared without the increase of the film thickness, an
oxide layer gives satisfactory wettability by a metal deposited on
the surface of the barrier metal film, and the substrate can be
free from exposure to a nitrogen-containing gas plasma.
Consequently, a barrier metal film production method can be
achieved which is capable of forming a barrier metal film at a high
speed with excellent burial properties without exerting the
influence of the nitrogen-containing gas plasma upon the substrate,
and also forming a barrier metal film with excellent adhesion to a
metal formed as a film on the surface of the barrier metal
film.
[0184] The barrier metal film production method may further
comprise supplying a hydrogen gas into the chamber; and converting
the atmosphere within the chamber into a plasma to generate a
hydrogen gas plasma so that hydroxyl groups are formed on the oxide
layer.
[0185] Thus, hydrophilicity can be increased, so that adhesion of a
metal deposited on the surface can be further increased.
[0186] According to the present invention, there is also provided a
barrier metal film production method involving treatment of a
surface of a substrate having a barrier metal film of a metal
nitride formed thereon, comprising:
[0187] performing a surface treatment which removes nitrogen atoms
in a superficial layer of the barrier metal film to decrease a
nitrogen content of the superficial layer relative to an interior
of a matrix of the barrier metal film, thereby substantially
forming a metal layer on the superficial layer.
[0188] Thus, the substantial metal layer and the metal nitride
layer can be formed with a single-layer thickness, and a barrier
metal film with a very small thickness can be produced, with
diffusion of metal being prevented and adhesion to the metal being
retained. Consequently, a metal wiring process can be
stabilized.
[0189] According to the present invention, there is also provided a
metal film comprising a metal layer substantially formed on a
superficial layer of a barrier metal film of a metal nitride formed
on a surface of a substrate, said metal layer being formed by
performing a surface treatment which removes nitrogen atoms in the
superficial layer of the barrier metal film to decrease a nitrogen
content of the superficial layer relative to an interior of a
matrix of the barrier metal film.
[0190] Thus, there is obtained a metal film which has a barrier
metal film comprising the substantial metal layer and the metal
nitride layer formed with a single-layer thickness, and produced
with a very small thickness, with diffusion of metal being
prevented and adhesion to the metal being retained, and which can
stabilize a metal wiring process.
[0191] According to the present invention, there is also provided a
barrier metal film production method involving treatment of a
surface of a substrate having a barrier metal film of a metal
nitride formed thereon, comprising:
[0192] performing a surface treatment which etches the barrier
metal film on the surface of the substrate with a diluent gas
plasma to flatten the barrier metal film.
[0193] Thus, a barrier metal film can be produced, with diffusion
of metal being prevented and adhesion to the metal being retained.
Consequently, a metal wiring process can be stabilized.
[0194] According to the present invention, there is also provided a
barrier metal film production method involving treatment of a
surface of a substrate having a barrier metal film of a metal
nitride formed thereon, comprising:
[0195] performing a surface treatment which etches the barrier
metal film on the surface of the substrate with a diluent gas
plasma to flatten the barrier metal film, and removes nitrogen
atoms in a superficial layer of the barrier metal film by the
diluent gas plasma to decrease a nitrogen content of the
superficial layer relative to an interior of a matrix of the
barrier metal film.
[0196] Thus, the substantial metal layer and the metal nitride
layer can be formed with a single-layer thickness, and a barrier
metal film with a very small thickness can be produced, with
diffusion of metal being prevented and adhesion to the metal being
retained. Consequently, a metal wiring process can be
stabilized.
[0197] According to the present invention, there is also provided a
metal film production method comprising:
[0198] supplying a source gas containing a halogen to an interior
of a chamber between a substrate and a metallic etched member;
[0199] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also exciting a gas containing nitrogen in a manner isolated from
the chamber accommodating the substrate;
[0200] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0201] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate for use as a barrier metal
film; and
[0202] performing a surface treatment which etches the barrier
metal film on a surface of the substrate with a diluent gas plasma
to flatten the barrier metal film.
[0203] Thus, a barrier metal film can be produced such that the
barrier metal film is prepared, and then subjected to a treatment
for preventing diffusion of metal and retaining adhesion to the
metal. Consequently, a metal wiring process can be stabilized.
[0204] According to the present invention, there is also provided a
metal film production method comprising:
[0205] supplying a source gas containing a halogen to an interior
of a chamber between a substrate and a metallic etched member;
[0206] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also exciting a gas containing nitrogen in a manner isolated from
the chamber accommodating the substrate;
[0207] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0208] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate for use as a barrier metal
film; and
[0209] performing a surface treatment which etches the barrier
metal film on a surface of the substrate with a diluent gas plasma
to flatten the barrier metal film, and removes nitrogen atoms in a
superficial layer of the barrier metal film by the diluent gas
plasma to decrease a nitrogen content of the superficial layer
relative to an interior of a matrix of the barrier metal film.
[0210] Thus, after a barrier metal film is prepared, the
substantial metal layer and the metal nitride layer can be formed
with a single-layer thickness. Hence, a barrier metal film having a
very small thickness can be produced, with diffusion of metal being
prevented and adhesion to the metal being retained. Consequently, a
metal wiring process can be stabilized.
[0211] According to the present invention, there is also provided a
metal film production method comprising:
[0212] performing a surface treatment which generates a diluent gas
plasma within a chamber accommodating a substrate having a barrier
metal film of a metal nitride formed thereon, to etch the barrier
metal film on a surface of the substrate with the diluent gas
plasma, thereby flattening the barrier metal film;
[0213] then supplying a source gas containing a halogen into the
chamber;
[0214] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that an etched member made of a
metal is etched with the source gas plasma to form a precursor
within the chamber from a metal component contained in the etched
member and the source gas; and
[0215] making a temperature of the substrate lower than a
temperature of the etched member to form the metal component of the
precursor as a film on the substrate having the barrier metal film
flattened.
[0216] Thus, a metal can be formed as a film through the production
of a barrier metal film subjected to a treatment for preventing
diffusion of metal and retaining adhesion to the metal.
Consequently, a metal wiring process can be stabilized.
[0217] According to the present invention, there is also provided a
metal film production method comprising:
[0218] performing a surface treatment which generates a diluent gas
plasma within a chamber accommodating a substrate having a barrier
metal film of a metal nitride formed thereon, to etch the barrier
metal film on a surface of the substrate with the diluent gas
plasma, thereby flattening the barrier metal film, and removes
nitrogen atoms in a superficial layer of the barrier metal film by
the diluent gas plasma to decrease a nitrogen content of the
superficial layer relative to an interior of a matrix of the
barrier metal film;
[0219] then supplying a source gas containing a halogen into the
chamber;
[0220] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that an etched member made of a
metal is etched with the source gas plasma to form a precursor
within the chamber from a metal component contained in the etched
member and the source gas; and
[0221] making a temperature of the substrate lower than a
temperature of the etched member to form the metal component of the
precursor as a film on the substrate having the barrier metal film
flattened and having the nitrogen content of the superficial layer
relatively decreased.
[0222] Thus, the substantial metal layer and the metal nitride
layer can be formed with a single-layer thickness. Hence, a metal
can be formed as a film through the production of a barrier metal
film having a very small thickness while preventing diffusion of
metal and retaining adhesion to the metal. Consequently, a metal
wiring process can be stabilized.
[0223] The metal film production method may further comprise
applying a densification treatment for densifying metal atoms in a
superficial layer of the barrier metal film after flattening the
barrier metal film and also relatively decreasing the nitrogen
content of the superficial layer.
[0224] Thus, diffusion of the component of the metal film can be
prevented reliably.
[0225] In the metal film production method, the diluent gas plasma
may be an argon gas plasma. Thus, the treatment can be performed
reliably with the use of an inexpensive gas.
[0226] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0227] a chamber accommodating a substrate;
[0228] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0229] halogen gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0230] barrier plasma generation means which converts an atmosphere
within the chamber into a plasma to generate a source gas plasma so
that the etched member is etched with the source gas plasma to form
a precursor from a metal component contained in the etched member
and the source gas;
[0231] excitation means for exciting a gas containing nitrogen in a
manner isolated from the chamber;
[0232] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the
precursor;
[0233] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate for use as a barrier metal
film;
[0234] diluent gas supply means for supplying a diluent gas to a
site above a surface of the substrate; and
[0235] surface treatment plasma generation means which converts the
atmosphere within the chamber into a plasma to generate a diluent
gas plasma so that the barrier metal film on the surface of the
substrate is etched with the diluent gas plasma to flatten the
barrier metal film.
[0236] Thus, there can be produced a barrier metal film subjected
to treatment for preventing diffusion of metal and retaining
adhesion to the metal. Consequently, a metal wiring process can be
stabilized.
[0237] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0238] a chamber accommodating a substrate;
[0239] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0240] halogen gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0241] barrier plasma generation means which converts an atmosphere
within the chamber into a plasma to generate a source gas plasma so
that the etched member is etched with the source gas plasma to form
a precursor from a metal component contained in the etched member
and the source gas;
[0242] excitation means for exciting a gas containing nitrogen in a
manner isolated from the chamber;
[0243] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the
precursor;
[0244] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate for use as a barrier metal
film;
[0245] diluent gas supply means for supplying a diluent gas to a
site above a surface of the substrate; and
[0246] surface treatment plasma generation means for performing a
surface treatment which converts the atmosphere within the chamber
into a plasma to generate a diluent gas plasma so that the barrier
metal film on the surface of the substrate is etched with the
diluent gas plasma to flatten the barrier metal film, and removes
nitrogen atoms in a superficial layer of the barrier metal film to
decrease a nitrogen content of the superficial layer relative to an
interior of a matrix of the barrier metal film.
[0247] Thus, the substantial metal layer and the metal nitride
layer can be formed with a single-layer thickness. Hence, a barrier
metal film having a very small thickness can be produced, with
diffusion of metal being prevented and adhesion to the metal being
retained. Consequently, a metal wiring process can be
stabilized.
[0248] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0249] a chamber accommodating a substrate having a barrier metal
film of a metal nitride formed thereon;
[0250] diluent gas supply means for supplying a diluent gas to an
interior of the chamber above a surface of the substrate;
[0251] surface treatment plasma generation means which converts an
atmosphere within the chamber into a plasma to generate a diluent
gas plasma so that the barrier metal film on the surface of the
substrate is etched with the diluent gas plasma to flatten the
barrier metal film;
[0252] a metallic etched member provided in the chamber;
[0253] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0254] plasma generation means which converts the source gas
containing the halogen into a plasma to generate a source gas
plasma so that the etched member is etched with the source gas
plasma to form a precursor from a metal component contained in the
etched member and the source gas; and
[0255] control means which makes a temperature of the substrate
lower than a temperature of the etched member to form the metal
component of the precursor as a film on the flattened barrier metal
film.
[0256] Thus, a metal film can be formed through the production of a
barrier metal film subjected to a treatment for preventing
diffusion of metal and retaining adhesion to the metal.
Consequently, a metal wiring process can be stabilized.
[0257] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0258] a chamber accommodating a substrate having a barrier metal
film of a metal nitride formed thereon;
[0259] diluent gas supply means for supplying a diluent gas to an
interior of the chamber above a surface of the substrate;
[0260] surface treatment plasma generation means which converts an
atmosphere within the chamber into a plasma to generate a diluent
gas plasma so that the barrier metal film on the surface of the
substrate is etched with the diluent gas plasma to flatten the
barrier metal film, and also removes nitrogen atoms in a
superficial layer of the barrier metal film by the diluent gas
plasma to decrease a nitrogen content of the superficial layer
relative to an interior of a matrix of the barrier metal film;
[0261] a metallic etched member provided in the chamber;
[0262] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0263] plasma generation means which converts the source gas
containing the halogen into a plasma to generate a source gas
plasma so that the etched member is etched with the source gas
plasma to form a precursor from a metal component contained in the
etched member and the source gas; and
[0264] control means which makes a temperature of the substrate
lower than a temperature of the etched member to form the metal
component of the precursor as a film on the barrier metal film
flattened and having the nitrogen content of the superficial layer
relatively decreased.
[0265] Thus, the substantial metal layer and the metal nitride
layer can be formed with a single-layer thickness. Hence, a metal
film can be formed through the production of a barrier metal film
having a very small thickness while preventing diffusion of metal
and retaining adhesion to the metal. Consequently, a metal wiring
process can be stabilized.
[0266] The metal film production apparatus may further comprise
densification treatment means for densifying metal atoms in the
superficial layer after flattening the barrier metal film and also
relatively decreasing the nitrogen content of the superficial
layer. Thus, diffusion of the component of the metal film can be
prevented reliably.
[0267] In the metal film production apparatus, the diluent gas
plasma may be an argon gas plasma. Thus, the treatment can be
performed reliably with the use of an inexpensive gas.
[0268] According to the present invention, there is also provided a
metal film formed by flattening a barrier metal film of a metal
nitride on a surface of a substrate by etching with a diluent gas
plasma.
[0269] Thus, the resulting metal film has a barrier metal film
retaining adhesion, and can stabilize a metal wiring process.
[0270] According to the present invention, there is also provided a
metal film formed by a surface treatment which flattens a barrier
metal film of a metal nitride on a surface of a substrate by
etching with a diluent gas plasma, and removes nitrogen atoms in a
superficial layer of the barrier metal film by the diluent gas
plasma to decrease a nitrogen content of the superficial layer
relative to an interior of a matrix of the barrier metal film.
[0271] Thus, there is obtained a metal film which has a barrier
metal film comprising the substantial metal layer and the metal
nitride layer formed with a single-layer thickness, and produced
with a very small thickness, with diffusion of metal being
prevented and adhesion to the metal being retained, and which can
stabilize a metal wiring process.
[0272] According to the present invention, there is also provided a
metal film production method involving treatment of a surface of a
substrate having a barrier metal film of a metal nitride formed
thereon, comprising:
[0273] performing a surface treatment which reacts the barrier
metal film on the surface of the substrate in a reducing gas
atmosphere to remove nitrogen atoms in a superficial layer of the
barrier metal film, thereby decreasing a nitrogen content of the
superficial layer relative to an interior of a matrix of the
barrier metal film.
[0274] Thus, a barrier metal film with a very small thickness and
comprising the substantial metal layer and the metal nitride layer
formed with a single-layer thickness can be produced, with
diffusion of metal being prevented and adhesion to the metal being
retained. Consequently, a metal wiring process can be
stabilized.
[0275] According to the present invention, there is also provided a
metal film production method comprising:
[0276] supplying a source gas containing a halogen to an interior
of a chamber between a substrate and a metallic etched member;
[0277] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also exciting a gas containing nitrogen in a manner isolated from
the chamber accommodating the substrate;
[0278] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0279] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate for use as a barrier metal
film; and
[0280] performing a surface treatment which reacts the barrier
metal film on a surface of the substrate in a reducing gas
atmosphere to remove nitrogen atoms in a superficial layer of the
barrier metal film, thereby decreasing a nitrogen content of the
superficial layer relative to an interior of a matrix of the
barrier metal film.
[0281] Thus, a barrier metal film with a very small thickness and
comprising the substantial metal layer and the metal nitride layer
formed with a single-layer thickness can be produced, with
diffusion of metal being prevented and adhesion to the metal being
retained. Consequently, a metal wiring process can be
stabilized.
[0282] According to the present invention, there is also provided a
metal film production method comprising:
[0283] performing a surface treatment in a chamber accommodating a
substrate having a barrier metal film of a metal nitride formed
thereon, said surface treatment comprising reacting the barrier
metal film on a surface of the substrate in a reducing gas
atmosphere to remove nitrogen atoms in a superficial layer of the
barrier metal film, thereby decreasing a nitrogen content of the
superficial layer relative to an interior of a matrix of the
barrier metal film;
[0284] then supplying a source gas containing a halogen into the
chamber;
[0285] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that a metallic etched member is
etched with the source gas plasma to form a precursor within the
chamber from a metal component contained in the etched member and
the source gas; and
[0286] making a temperature of the substrate lower than a
temperature of the etched member to form the metal component of the
precursor as a film on the substrate having the barrier metal film
flattened thereon.
[0287] Thus, a metal film can be formed through the production of a
barrier metal film having a very small thickness and comprising the
substantial metal layer and the metal nitride layer formed with a
single-layer thickness, while preventing diffusion of metal and
retaining adhesion to the metal. Consequently, a metal wiring
process can be stabilized.
[0288] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0289] a chamber accommodating a substrate;
[0290] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0291] halogen gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0292] barrier plasma generation means which converts an atmosphere
within the chamber into a plasma to generate a source gas plasma so
that the etched member is etched with the source gas plasma to form
a precursor from a metal component contained in the etched member
and the source gas;
[0293] excitation means for exciting a gas containing nitrogen in a
manner isolated from the chamber;
[0294] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the
precursor;
[0295] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate for use as a barrier metal
film;
[0296] reducing gas supply means for supplying a reducing gas to a
site above a surface of the substrate; and
[0297] surface treatment means which reacts the barrier metal film
on the surface of the substrate in a reducing gas atmosphere to
remove nitrogen atoms in a superficial layer of the barrier metal
film, thereby decreasing a nitrogen content of the superficial
layer relative to an interior of a matrix of the barrier metal
film.
[0298] Thus, a barrier metal film with a very small thickness and
comprising the substantial metal layer and the metal nitride layer
formed with a single-layer thickness can be produced, with
diffusion of metal being prevented and adhesion to the metal being
retained. Consequently, a metal wiring process can be
stabilized.
[0299] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0300] a chamber accommodating a substrate having a barrier metal
film of a metal nitride formed thereon;
[0301] reducing gas supply means for supplying a reducing gas to a
site above a surface of the substrate;
[0302] surface treatment means which reacts the barrier metal film
on the surface of the substrate in a reducing gas atmosphere to
remove nitrogen atoms in a superficial layer of the barrier metal
film, thereby decreasing a nitrogen content of the superficial
layer relative to an interior of a matrix of the barrier metal
film;
[0303] a metallic etched member provided in the chamber;
[0304] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0305] plasma generation means which converts the source gas
containing the halogen into a plasma to generate a source gas
plasma so that the etched member is etched with the source gas
plasma to form a precursor from a metal component contained in the
etched member and the source gas; and
[0306] control means which makes a temperature of the substrate
lower than a temperature of the etched member to form the metal
component of the precursor as a film on the barrier metal film
having the nitrogen content of the superficial layer relatively
decreased.
[0307] Thus, a metal film can be formed through the production of a
barrier metal film having a very small thickness and comprising the
substantial metal layer and the metal nitride layer formed with a
single-layer thickness, while preventing diffusion of metal and
retaining adhesion to the metal. Consequently, a metal wiring
process can be stabilized.
[0308] According to the present invention, there is also provided a
metal film formed by a surface treatment which reacts a barrier
metal film of a metal nitride on a surface of a substrate in a
reducing gas atmosphere to remove nitrogen atoms in a superficial
layer of the barrier metal film, thereby decreasing a nitrogen
content of the superficial layer relative to an interior of a
matrix of the barrier metal film.
[0309] Thus, there is obtained a metal film which has a barrier
metal film comprising the substantial metal layer and the metal
nitride layer formed with a single-layer thickness, and produced
with a very small thickness, with diffusion of metal being
prevented and adhesion to the metal being retained, and which can
stabilize a metal wiring process.
[0310] According to the present invention, there is also provided a
metal film production method involving treatment of a surface of a
substrate having a barrier metal film of a metal nitride formed
thereon, comprising:
[0311] performing a surface treatment which forms nuclei of silicon
atoms on a surface of the barrier metal film on the surface of the
substrate by a gas plasma containing silicon.
[0312] Thus, a barrier metal film with a very small thickness can
be produced, with adhesion to metal being retained. Consequently, a
metal wiring process can be stabilized.
[0313] According to the present invention, there is also provided a
metal film production method comprising:
[0314] supplying a source gas containing a halogen to an interior
of a chamber between a substrate and a metallic etched member;
[0315] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that the etched member is etched
with the source gas plasma to form a precursor from a metal
component contained in the etched member and the source gas, and
also exciting a gas containing nitrogen in a manner isolated from
the chamber accommodating the substrate;
[0316] forming a metal nitride upon reaction between excited
nitrogen and the precursor;
[0317] making a temperature of the substrate lower than a
temperature of means for formation of the metal nitride to form the
metal nitride as a film on the substrate for use as a barrier metal
film; and
[0318] performing a surface treatment which forms nuclei of silicon
atoms on a surface of the barrier metal film on a surface of the
substrate by a gas plasma containing silicon.
[0319] Thus, a barrier metal film with a very small thickness can
be produced, with adhesion to metal being retained. Consequently, a
metal wiring process can be stabilized.
[0320] According to the present invention, there is also provided a
metal film production method comprising:
[0321] performing a surface treatment in a chamber accommodating a
substrate having a barrier metal film of a metal nitride formed
thereon, said surface treatment comprising forming nuclei of
silicon atoms on a surface of the barrier metal film on a surface
of the substrate by a gas plasma containing silicon;
[0322] then supplying a source gas containing a halogen into the
chamber;
[0323] converting an atmosphere within the chamber into a plasma to
generate a source gas plasma so that a metallic etched member is
etched with the source gas plasma to form a precursor within the
chamber from a metal component contained in the etched member and
the source gas; and
[0324] making a temperature of the substrate lower than a
temperature of the etched member to form the metal component of the
precursor as a film on the substrate having the nuclei of silicon
atoms formed on the surface of the barrier metal film.
[0325] Thus, a metal film can be formed through the production of a
barrier metal film having a very small thickness and retaining
adhesion to metal. Consequently, a metal wiring process can be
stabilized.
[0326] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0327] a chamber accommodating a substrate;
[0328] a metallic etched member provided in the chamber at a
position opposed to the substrate;
[0329] halogen gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0330] barrier plasma generation means which converts an atmosphere
within the chamber into a plasma to generate a source gas plasma so
that the etched member is etched with the source gas plasma to form
a precursor from a metal component contained in the etched member
and the source gas;
[0331] excitation means for exciting a gas containing nitrogen in a
manner isolated from the chamber;
[0332] formation means for forming a metal nitride upon reaction
between nitrogen excited by the excitation means and the
precursor;
[0333] control means which makes a temperature of the substrate
lower than a temperature of the formation means to form the metal
nitride as a film on the substrate for use as a barrier metal
film;
[0334] silicon-containing gas supply means for supplying a gas
containing silicon to a site above a surface of the substrate;
and
[0335] surface treatment plasma generation means which generates a
gas plasma containing silicon to form nuclei of silicon atoms on a
surface of the barrier metal film on the surface of the
substrate.
[0336] Thus, a barrier metal film with a very small thickness can
be produced, with adhesion to metal being retained. Consequently, a
metal wiring process can be stabilized.
[0337] According to the present invention, there is also provided a
metal film production apparatus, comprising:
[0338] a chamber accommodating a substrate having a barrier metal
film of a metal nitride formed thereon;
[0339] silicon-containing gas supply means for supplying a gas
containing silicon to a site above a surface of the substrate;
[0340] surface treatment plasma generation means which generates a
gas plasma containing silicon to form nuclei of silicon atoms on a
surface of the barrier metal film on the surface of the
substrate;
[0341] a metallic etched member provided in the chamber;
[0342] source gas supply means for supplying a source gas
containing a halogen to an interior of the chamber between the
substrate and the etched member;
[0343] plasma generation means which converts the source gas
containing the halogen into a plasma to generate a source gas
plasma so that the etched member is etched with the source gas
plasma to form a precursor from a metal component contained in the
etched member and the source gas; and
[0344] control means which makes a temperature of the substrate
lower than a temperature of the etched member to form the metal
component of the precursor as a film on the barrier metal film
having the nuclei of silicon atoms formed on the surface
thereof.
[0345] Thus, a metal film can be formed through the production of a
barrier metal film having a very small thickness and retaining
adhesion to metal. Consequently, a metal wiring process can be
stabilized.
[0346] According to the present invention, there is also provided a
metal film formed by applying a surface treatment to a barrier
metal film of a metal nitride on a surface of a substrate such that
nuclei of silicon atoms are formed on a surface of the barrier
metal film on the surface of the substrate by a gas plasma
containing silicon.
[0347] Thus, there is obtained a metal film which has a barrier
metal film having a very small thickness and retaining adhesion to
metal, and which can stabilize a metal wiring process.
BRIEF DESCRIPTION OF THE DRAWINGS
[0348] The present invention will become more fully understood from
the detailed description given hereinbelow and the accompanying
drawings which are given by way of illustration only, and thus are
not limitative of the present invention, and wherein:
[0349] FIG. 1 is a schematic side view of a barrier metal film
production apparatus according to a first embodiment of the present
invention;
[0350] FIG. 2 is a detail view of a substrate on which a barrier
metal film has been produced;
[0351] FIG. 3 is a schematic side view of a barrier metal film
production apparatus according to a second embodiment of the
present invention;
[0352] FIG. 4 is a view taken along the arrowed line IV-IV of FIG.
3;
[0353] FIG. 5 is a view taken along the arrowed line V-V of FIG.
4;
[0354] FIG. 6 is a schematic side view of a barrier metal film
production apparatus according to a third embodiment of the present
invention;
[0355] FIG. 7 is a schematic side view of a barrier metal film
production apparatus according to a fourth embodiment of the
present invention;
[0356] FIG. 8 is a schematic side view of a barrier metal film
production apparatus according to a fifth embodiment of the present
invention;
[0357] FIG. 9 is a schematic side view of a barrier metal film
production apparatus according to a sixth embodiment of the present
invention;
[0358] FIG. 10 is a schematic side view of a barrier metal film
production apparatus according to a seventh embodiment of the
present invention;
[0359] FIG. 11 is a schematic side view of a barrier metal film
production apparatus according to an eighth embodiment of the
present invention;
[0360] FIG. 12 is a schematic side view of a barrier metal film
production apparatus according to a ninth embodiment of the present
invention;
[0361] FIG. 13 is a sectional view of a substrate illustrating a
barrier metal film;
[0362] FIG. 14 is a concept view of a barrier metal film in a
treatment for denitrification;
[0363] FIG. 15 is a concept view of the barrier metal film in the
treatment for denitrification;
[0364] FIG. 16 is a concept view of a barrier metal film in a
treatment for oxide layer formation;
[0365] FIG. 17 is a graph representing the relationship between the
contact angle of copper particles and the oxygen concentration of
the substrate;
[0366] FIG. 18 is a concept view of a barrier metal film in a
treatment for hydroxyl group formation;
[0367] FIG. 19 is a schematic construction drawing showing another
example of diluent gas supply means;
[0368] FIG. 20 is a schematic construction drawing of a barrier
metal film production apparatus according to a tenth embodiment of
the present invention;
[0369] FIG. 21 is a concept view of an example of production of a
barrier metal film by the barrier metal film production apparatus
according to the tenth embodiment of the present invention;
[0370] FIG. 22 is a schematic side view of a barrier metal film
production apparatus according to an eleventh embodiment of the
present invention;
[0371] FIG. 23 is a schematic side view of a barrier metal film
production apparatus according to a twelfth embodiment of the
present invention;
[0372] FIG. 24 is a view taken along the arrowed line XIII-XIII of
FIG. 23;
[0373] FIG. 25 is a view taken along the arrowed line XIV-XIV of
FIG. 24;
[0374] FIG. 26 is a schematic side view of a barrier metal film
production apparatus according to a thirteenth embodiment of the
present invention;
[0375] FIG. 27 is a schematic side view of a barrier metal film
production apparatus according to a fourteenth embodiment of the
present invention;
[0376] FIG. 28 is an outline drawing of an apparatus for a film
formation process;
[0377] FIG. 29 is a schematic side view of a metal film production
apparatus according to a fifteenth embodiment of the present
invention;
[0378] FIG. 30 is a schematic construction drawing showing another
example of diluent gas supply means;
[0379] FIG. 31 is a sectional view of a substrate illustrating a
barrier metal film;
[0380] FIG. 32 is a concept view of a barrier metal film in a
treatment for denitrification;
[0381] FIG. 33 is a concept view of the barrier metal film in the
treatment for denitrification;
[0382] FIG. 34 is a schematic side view of a metal film production
apparatus according to a sixteenth embodiment of the present
invention;
[0383] FIG. 35 is a view taken along the arrowed line VIII-VIII of
FIG. 34;
[0384] FIG. 36 is a view taken along the arrowed line IX-IX of FIG.
35;
[0385] FIG. 37 is a schematic side view of a metal film production
apparatus according to a seventeenth embodiment of the present
invention;
[0386] FIG. 38 is a schematic side view of a metal film production
apparatus according to an eighteenth embodiment of the present
invention;
[0387] FIG. 39 is a schematic side view of a metal film production
apparatus according to a nineteenth embodiment of the present
invention;
[0388] FIG. 40 is a conceptual construction drawing of a metal film
production apparatus according to a twentieth embodiment of the
present invention;
[0389] FIG. 41 is a concept view of a barrier metal film in a
treatment for denitrification;
[0390] FIG. 42 is a schematic construction drawing of a metal film
production apparatus according to a twenty-first embodiment of the
present invention; and
[0391] FIG. 43 is a concept view of a barrier metal film in
formation of nuclei of Si.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0392] The first embodiment of the barrier metal film production
apparatus and barrier metal film production method of the present
invention will be described with reference to FIGS. 1 and 2. FIG. 1
is a schematic side view of the barrier metal film production
apparatus according to the first embodiment of the present
invention. FIG. 2 shows details of a substrate on which a barrier
metal film has been prepared.
[0393] As shown in the drawings, a support platform 2 is provided
near the bottom of a cylindrical chamber 1 made of, say, a ceramic
(an insulating material), and a substrate 3 is placed on the
support platform 2. Temperature control means 6 equipped with a
heater 4 and refrigerant flow-through means 5 is provided in the
support platform 2 so that the support platform 2 is controlled to
a predetermined temperature (for example, a temperature at which
the substrate 3 is maintained at 100 to 200.degree. C.) by the
temperature control means 6.
[0394] An upper surface of the chamber 1 is an opening, which is
closed with a metal member 7, as an etched member, made of a metal
(e.g., W, Ti, Ta, or TiSi). The interior of the chamber 1 closed
with the metal member 7 is maintained at a predetermined pressure
by a vacuum device 8. A plasma antenna 9, as a coiled winding
antenna 9 of plasma generation means, is provided around a
cylindrical portion of the chamber 1. A matching instrument 10 and
a power source 11 are connected to the plasma antenna 9 to supply
power.
[0395] Nozzles 12 for supplying a source gas (a Cl.sub.2 gas
diluted with He or Ar to a chlorine concentration of .ltoreq.50%,
preferably about 10%), containing chlorine as a halogen, to the
interior of the chamber 1 are connected to the cylindrical portion
of the chamber 1 below the metal member 7. The nozzle 12 is open
toward the horizontal, and is fed with the source gas via a flow
controller 13. Fluorine (F), bromine (Br) or iodine (I) can also be
applied as the halogen to be incorporated into the source gas.
[0396] Slit-shaped opening portions 14 are formed at a plurality of
locations (for example, four locations) in the periphery of a lower
part of the cylindrical portion of the chamber 1, and one end of a
tubular passage 15 is fixed to each of the opening portions 14. A
tubular excitation chamber 16 made of an insulator is provided
halfway through the passage 15, and a coiled plasma antenna 17 is
provided around the excitation chamber 16. The plasma antenna 17 is
connected to a matching instrument 18 and a power source 19 to
receive power. The plasma antenna 17, the matching instrument 18
and the power source 19 constitute excitation means. A flow
controller 20 is connected to the other end of the passage 15, and
an ammonia gas (NH.sub.3 gas) as a nitrogen-containing gas is
supplied into the passage 15 via the flow controller 20.
[0397] With the above-described barrier metal film production
apparatus, the source gas is supplied through the nozzles 12 to the
interior of the chamber 1, and electromagnetic waves are shot from
the plasma antenna 9 into the chamber 1. As a result, the Cl.sub.2
gas is ionized to generate a Cl.sub.2 gas plasma (source gas
plasma) 21. The Cl.sub.2 gas plasma 21 causes an etching reaction
to the metal member 7, forming a precursor (M.sub.xCl.sub.y: M is a
metal such as W, Ti, Ta or TiSi) 22.
[0398] Separately, the NH.sub.3 gas is supplied into the passage 15
via the flow controller 20 and fed into the excitation chamber 16.
By shooting electromagnetic waves from the plasma antenna 17 into
the excitation chamber 16, the NH.sub.3 gas is ionized to generate
an NH.sub.3 gas plasma 23. Since a predetermined differential
pressure has been established between the pressure inside the
chamber 1 and the pressure inside the excitation chamber 16 by the
vacuum device 8, the excited ammonia of the NH.sub.3 gas plasma 23
in the excitation chamber 16 is fed to the precursor
(M.sub.xCl.sub.y) 22 inside the chamber 1 through the opening
portion 14.
[0399] That is, excitation means for exciting the
nitrogen-containing gas in the excitation chamber 16 isolated from
the chamber 1 is constructed. Because of this construction, the
metal component of the precursor (M.sub.xCl.sub.y) 22 and ammonia
react to form a metal nitride (MN) (i.e., formation means). At this
time, the metal member 7 and the excitation chamber 16 are
maintained by the plasmas at predetermined temperatures (e.g., 200
to 400.degree. C.) which are higher than the temperature of the
substrate 3.
[0400] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the NH.sub.3
gas and the supply of power to the power source 19 are cut off.
Thus, the precursor (M.sub.xCl.sub.y) 22 is transported toward the
substrate 3 controlled to a lower temperature than the temperature
of the metal member 7. The precursor (M.sub.xCl.sub.y) 22
transported toward the substrate 3 is converted into only metal (M)
ions by a reduction reaction, and directed at the substrate 3 to
form a thin M film 25 on the thin MN film 24 on the substrate 3. A
barrier metal film 26 is composed of the thin MN film 24 and the
thin M film 25 (see FIG. 2).
[0401] The reaction for formation of the thin MN film 24 can be
expressed by:
2MCl+2NH.sub.3.fwdarw.2MN.dwnarw.+HCl.uparw.+2H.sub.2.uparw.
[0402] The reaction for formation of the thin M film 25 can be
expressed by:
2MCl.fwdarw.2M.dwnarw.+Cl.sub.2.uparw.
[0403] The gases and the etching products that have not been
involved in the reactions are exhausted through an exhaust port
27.
[0404] The source gas has been described, with the Cl.sub.2 gas
diluted with, say, He or Ar taken as an example. However, the
Cl.sub.2 gas can be used alone, or an HCl gas can also be applied.
If the HCl gas is applied, an HCl gas plasma is generated as the
source gas plasma. Thus, the source gas may be any gas containing
chlorine, and a gas mixture of an HCl gas and a Cl.sub.2 gas is
also usable. As the material for the metal member 7, it is possible
to use an industrially applicable metal such as Ag, Au, Pt or
Si.
[0405] The substrate 3, on which the barrier metal film 26 has been
formed, is subjected to a film forming device, which forms a thin
copper (Cu) film or a thin aluminum (Al) film on the barrier metal
film 26. Because of the presence of the barrier metal film 26,
there arise advantages, for example, such that the thin MN film 24
eliminates diffusion of Cu into the substrate 3, and the thin M
film 25 ensures adhesion of Cu.
[0406] If the material to be formed as a film is a material
unproblematic in terms of adhesion (e.g., Al), or if it is a metal
to which the nitride can retain adhesion, the thin M film 25 can be
omitted from the barrier metal film 26. Furthermore, the reduction
reaction is caused by the temperature difference. However, a
reducing gas plasma can be generated separately to produce a
reduction reaction.
[0407] With the above-described barrier metal film production
apparatus, the metal is formed by plasmas to produce the barrier
metal film 26. Thus, the barrier metal film 26 can be formed
uniformly to a small thickness. Consequently, the barrier metal
film 26 can be formed highly accurately at a high speed with
excellent burial properties in a very small thickness even to the
interior of a tiny depression, for example several hundred
nanometers wide, which has been provided in the substrate 3.
[0408] A barrier metal film production apparatus and a barrier
metal film production method according to the second embodiment of
the present invention will be described with reference to FIGS. 3
to 5. FIG. 3 is a schematic side view of the barrier metal film
production apparatus according to the second embodiment of the
present invention. FIG. 4 is a view taken along the arrowed line
IV-IV of FIG. 3. FIG. 5 is a view taken along the arrowed line V-V
of FIG. 4. The same members as the members illustrated in FIG. 1
are assigned the same numerals, and duplicate explanations are
omitted.
[0409] An upper surface of the chamber 1 is an opening, which is
closed with a disk-shaped ceiling board 30 made of an insulating
material (for example, a ceramic). An etched member 31 made of a
metal (e.g., W, Ti, Ta or TiSi) is interposed between the opening
at the upper surface of the chamber 1 and the ceiling board 30. The
etched member 31 is provided with a ring portion 32 fitted into the
opening at the upper surface of the chamber 1. A plurality of (12
in the illustrated embodiment) protrusions 33, which extend close
to the center in the diametrical direction of the chamber 1 and
have the same width, are provided in the circumferential direction
on the inner periphery of the ring portion 32.
[0410] The protrusions 33 are integrally or removably attached to
the ring portion 32. Notches (spaces) 35 formed between the
protrusions 33 are present between the ceiling board 30 and the
interior of the chamber 1. The ring portion 32 is earthed, and the
plural protrusions 33 are electrically connected together and
maintained at the same potential. Temperature control means (not
shown), such as a heater, is provided in the etched member 31 to
control the temperature of the etched member 31 to 200 to
400.degree. C., for example.
[0411] Second protrusions shorter in the diametrical direction than
the protrusions 33 can be arranged between the protrusions 33.
Moreover, short protrusions can be arranged between the protrusion
33 and the second protrusion. By so doing, the area of copper, an
object to be etched, can be secured, with an induced current being
suppressed.
[0412] A planar winding-shaped plasma antenna 34, for converting
the atmosphere inside the chamber 1 into a plasma, is provided
above the ceiling board 30. The plasma antenna 34 is formed in a
planar ring shape parallel to the surface of the ceiling board 30.
A matching instrument 10 and a power source 11 are connected to the
plasma antenna 34 to supply power. The etched member 31 has the
plurality of protrusions 33 provided in the circumferential
direction on the inner periphery of the ring portion 32, and
includes the notches (spaces) 35 formed between the protrusions 33.
Thus, the protrusions 33 are arranged between the substrate 3 and
the ceiling board 30 in a discontinuous state relative to the
flowing direction of electricity in the plasma antenna 34.
[0413] With the above-described barrier metal film production
apparatus, the source gas is supplied through the nozzles 12 to the
interior of the chamber 1, and electromagnetic waves are shot from
the plasma antenna 34 into the chamber 1. As a result, the Cl.sub.2
gas is ionized to generate a Cl.sub.2 gas plasma (source gas
plasma) 21. The etched member 31, an electric conductor, is present
below the plasma antenna 34. However, the Cl.sub.2 gas plasma 21
occurs stably between the etched member 31 and the substrate 3,
namely, below the etched member 31, under the following action:
[0414] The action by which the Cl.sub.2 gas plasma 21 is generated
below the etched member 31 will be described. As shown in FIG. 5, a
flow A of electricity in the plasma antenna 34 of the planar ring
shape crosses the protrusions 33. At this time, an induced current
B occurs on the surface of the protrusion 33 opposed to the plasma
antenna 34. Since the notches (spaces) 35 are present in the etched
member 31, the induced current B flows onto the lower surface of
each protrusion 33, forming a flow a in the same direction as the
flow A of electricity in the plasma antenna 34 (Faraday
shield).
[0415] When the etched member 31 is viewed from the substrate 3,
therefore, there is no flow in a direction in which the flow A of
electricity in the plasma antenna 34 is canceled out. Furthermore,
the ring portion 32 is earthed, and the protrusions 33 are
maintained at the same potential. Thus, even though the etched
member 31, an electric conductor, exists, the electromagnetic wave
is reliably thrown from the plasma antenna 34 into the chamber 1.
Consequently, the Cl.sub.2 gas plasma 21 is stably generated below
the etched member 31.
[0416] Furthermore, plasma generation means composed of a passage
15, an excitation chamber 16 and a plasma antenna 17 is provided
above the support platform 2.
[0417] The Cl.sub.2 gas plasma 21 causes an etching reaction to the
etched member 31, forming a precursor (M.sub.xCl.sub.y: M is a
metal such as W, Ti, Ta or TiSi) 22. In the excitation chamber 16,
the NH.sub.3 gas is ionized to generate an NH.sub.3 gas plasma 23.
The excited ammonia of the NH.sub.3 gas plasma 23 in the excitation
chamber 16 is fed to the precursor (M.sub.xCl.sub.y) 22 inside the
chamber 1 through the opening portion 14. Because of this
construction, the metal component of the precursor
(M.sub.xCl.sub.y) 22 and ammonia react to form a metal nitride (MN)
(formation means). At this time, the etched member 31 and the
excitation chamber 16 are maintained by the plasmas at
predetermined temperatures (e.g., 200 to 400.degree. C.) which are
higher than the temperature of the substrate 3.
[0418] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the NH.sub.3
gas and the supply of power to the power source 19 are cut off.
Thus, the precursor (M.sub.xCl.sub.y) 22 is transported toward the
substrate 3 controlled to a lower temperature than the temperature
of the etched member 31. The precursor (M.sub.xCl.sub.y) 22
transported toward the substrate 3 is converted into only metal (M)
ions by a reduction reaction, and directed at the substrate 3 to
form a thin M film 25 on the thin MN film 24 on the substrate 3. A
barrier metal film 26 is composed of the thin MN film 24 and the
thin M film 25 (see FIG. 2). The gases and the etching products,
which have not been involved in the reactions, are exhausted
through an exhaust port 27.
[0419] With the above-described barrier metal film production
apparatus, similar to the first embodiment, the metal is formed by
plasmas to produce the barrier metal film 26. Thus, the barrier
metal film 26 can be formed uniformly to a small thickness.
Consequently, the barrier metal film 26 can be formed highly
accurately at a high speed with excellent burial properties in a
very small thickness even to the interior of a tiny depression, for
example several hundred nanometers wide, which has been provided in
the substrate 3.
[0420] In addition, the etched member 31 has the plurality of
protrusions 33 provided in the circumferential direction on the
inner periphery of the ring portion 32, and includes the notches
(spaces) 35 formed between the protrusions 33. Thus, the induced
currents generated in the etched member 31 flow in the same
direction as the flowing direction of electricity in the plasma
antenna 34, when viewed from the substrate 3. Therefore, even
though the etched member 31, an electric conductor, exists below
the plasma antenna 34, the electromagnetic waves are reliably
thrown from the plasma antenna 34 into the chamber 1. Consequently,
the Cl.sub.2 gas plasma 21 can be stably generated below the etched
member 31.
[0421] A barrier metal film production apparatus and a barrier
metal film production method according to the third embodiment of
the present invention will be described with reference to FIG. 6.
FIG. 6 is a schematic side view of the barrier metal film
production apparatus according to the third embodiment of the
present invention. The same members as the members illustrated in
FIGS. 1 and 3 are assigned the same numerals, and duplicate
explanations are omitted.
[0422] The opening of an upper portion of the chamber 1 is closed
with a ceiling board 30, for example, made of a ceramic (an
insulating material). An etched member 41 made of a metal (e.g., W,
Ti, Ta or TiSi) is provided on a lower surface of the ceiling board
30, and the etched member 41 is of a quadrangular pyramidal shape.
Slit-shaped second opening portions 42 are formed at a plurality of
locations (for example, four locations) in the periphery of an
upper part of the cylindrical portion of the chamber 1, and one end
of a tubular second passage 43 is fixed to the second opening
portion 42.
[0423] A tubular second excitation chamber 44 made of an insulator
is provided halfway through the second passage 43, and a coiled
second plasma antenna 45 is provided around the second excitation
chamber 44. The plasma antenna 45 is connected to a matching
instrument 48 and a power source 49 to receive power. The second
plasma antenna 45, the matching instrument 48 and the power source
49 constitute plasma generation means.
[0424] A flow controller 46 is connected to the other end of the
second passage 43, and a chlorine-containing source gas (a Cl.sub.2
gas diluted with He or Ar to a chlorine concentration of
.ltoreq.50%, preferably about 10%) is supplied into the passage 43
via the flow controller 46. By shooting electromagnetic waves from
the second plasma antenna 45 into the second excitation chamber 44,
the Cl.sub.2 gas is ionized to generate a Cl.sub.2 gas plasma
(source gas plasma) 47. Because of the generation of the Cl.sub.2
gas plasma 47, excited chlorine is fed into the chamber 1 through
the second opening portion 42, whereupon the etched member 41 is
etched with excited chlorine.
[0425] With the above-described barrier metal film production
apparatus, the source gas is supplied into the second passage 43
via the flow controller 46 and fed into the second excitation
chamber 44. By shooting electromagnetic waves from the second
plasma antenna 45 into the second excitation chamber 44, the
Cl.sub.2 gas is ionized to generate a Cl.sub.2 gas plasma (source
gas plasma) 47. Since a predetermined differential pressure has
been established between the pressure inside the chamber 1 and the
pressure inside the second excitation chamber 44 by the vacuum
device 8, the excited chlorine of the Cl.sub.2 gas plasma 47 in the
second excitation chamber 44 is fed to the etched member 41 inside
the chamber 1 through the second opening portion 42. The excited
chlorine causes an etching reaction to the etched member 41,
forming a precursor (M.sub.xCl.sub.y) 22 inside the chamber 1. At
this time, the etched member 41 is maintained at a predetermined
temperature (e.g., 200 to 400.degree. C.), which is higher than the
temperature of the substrate 3, by a heater 50 provided in the
ceiling board 30.
[0426] In the excitation chamber 16, the NH.sub.3 gas is ionized to
generate an NH.sub.3 gas plasma 23. The excited ammonia of the
NH.sub.3 gas plasma 23 in the excitation chamber 16 is fed to the
precursor (M.sub.xCl.sub.y) 22 inside the chamber 1 through the
opening portion 14. As a result, the metal component of the
precursor (M.sub.xCl.sub.y) 22 and ammonia react to form a metal
nitride (MN). At this time, the excitation chamber 16 is maintained
by the plasma at a predetermined temperature (e.g., 200 to
400.degree. C.) which is higher than the temperature of the
substrate 3.
[0427] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the NH.sub.3
gas and the supply of power to the power source 19 are cut off.
Thus, the precursor (M.sub.xCl.sub.y) 22 is transported toward the
substrate 3 controlled to a lower temperature than the temperature
of the etched member 41. The precursor (M.sub.xCl.sub.y) 22
transported toward the substrate 3 is converted into only metal (M)
ions by a reduction reaction, and directed at the substrate 3 to
form a thin M film 25 on the thin MN film 24 placed on the
substrate 3. A barrier metal film 26 is composed of the thin MN
film 24 and the thin M film 25 (see FIG. 2). The gases and the
etching products that have not been involved in the reactions are
exhausted through an exhaust port 27.
[0428] With the above-described barrier metal film production
apparatus, similar to the first embodiment and the second
embodiment, the metal is formed by plasmas to produce the barrier
metal film 26. Thus, the barrier metal film 26 can be formed
uniformly to a small thickness. Consequently, the barrier metal
film 26 can be formed highly accurately at a high speed with
excellent burial properties in a very small thickness even to the
interior of a tiny depression, for example several hundred
nanometers wide, which has been provided in the substrate 3.
[0429] Furthermore, the Cl.sub.2 gas plasma 47 is generated in the
second excitation chamber 44 isolated from the chamber 1. Thus, the
substrate 3 is not exposed to the plasma any more, and the
substrate 3 becomes free from damage from the plasma.
[0430] As the means for generating the Cl.sub.2 gas plasma 47 in
the second excitation chamber 44, namely, the means for exciting
the source gas to convert it into an excited source gas, it is
possible to use microwaves, laser, electron rays, or synchrotron
radiation. It is also permissible to form the precursor by heating
the metal filament to a high temperature. The construction for
isolating the Cl.sub.2 gas plasma 47 from the substrate 3 may be
the provision of the second excitation chamber 44 in the passage
43, as stated above, or may be other construction, for example, the
isolation of the chamber 1.
[0431] A barrier metal film production apparatus and a barrier
metal film production method according to the fourth embodiment of
the present invention will be described with reference to FIG. 7.
FIG. 7 is a schematic side view of a barrier metal film production
apparatus according to the fourth embodiment of the present
invention. The same members as the members illustrated in FIG. 1
are assigned the same numerals, and duplicate explanations are
omitted.
[0432] Compared with the barrier metal film production apparatus of
the first embodiment shown in FIG. 1, the plasma antenna 9 is not
provided around the cylindrical portion of the chamber 1, and the
matching instrument 10 and power source 11 are connected to the
metal member 7 for supply of power to the metal member 7.
[0433] With the above-described barrier metal film production
apparatus, the source gas is supplied from the nozzle 12 into the
chamber 1, and electromagnetic waves are shot from the metal member
7 into the chamber 1, whereby the Cl.sub.2 gas is ionized to
generate a Cl.sub.2 gas plasma (source gas plasma) 21. The Cl.sub.2
gas plasma 21 causes an etching reaction to the metal member 7,
forming a precursor (M.sub.xCl.sub.y) 22. At this time, the metal
member 7 is maintained at a temperature (e.g., 200 to 400.degree.
C.), which is higher than the temperature of the substrate 3, by
temperature control means (not shown).
[0434] In the excitation chamber 16, the NH.sub.3 gas is ionized to
generate an NH.sub.3 gas plasma 23. The excited ammonia of the
NH.sub.3 gas plasma 23 in the excitation chamber 16 is fed to the
precursor (M.sub.xCl.sub.y) 22 inside the chamber 1 through the
opening portion 14. As a result, the metal component of the
precursor (M.sub.xCl.sub.y) 22 and ammonia react to form a metal
nitride (MN). At this time, the excitation chamber 16 is maintained
by the plasma at a predetermined temperature (e.g., 200 to
400.degree. C.) which is higher than the temperature of the
substrate 3.
[0435] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the NH.sub.3
gas and the supply of power to the power source 19 are cut off.
Thus, the precursor (M.sub.xCl.sub.y) 22 is transported toward the
substrate 3 controlled to a lower temperature than the temperature
of the metal member 7. The precursor (M.sub.xCl.sub.y) 22
transported toward the substrate 3 is converted into only metal (M)
ions by a reduction reaction, and directed at the substrate 3 to
form a thin M film 25 on the thin MN film 24 placed on the
substrate 3. A barrier metal film 26 is composed of the thin MN
film 24 and the thin M film 25 (see FIG. 2). The gases and the
etching products that have not been involved in the reactions are
exhausted through an exhaust port 27.
[0436] With the above-described barrier metal film production
apparatus, similar to the first embodiment to the third embodiment,
the metal is formed by plasmas to produce the barrier metal film
26. Thus, the barrier metal film 26 can be formed uniformly to a
small thickness. Consequently, the barrier metal film 26 can be
formed highly accurately at a high speed with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate 3.
[0437] Furthermore, the metal member 7 itself is applied as an
electrode for plasma generation. Thus, the plasma antenna 9 need
not be provided around the cylindrical portion of the chamber 1,
and the degree of freedom of the construction in the surroundings
can be increased.
[0438] A barrier metal film production apparatus and a barrier
metal film production method according to the fifth embodiment of
the present invention will be described with reference to FIG. 8.
FIG. 8 is a schematic side view of the barrier metal film
production apparatus according to the fifth embodiment of the
present invention. The same members as the members illustrated in
FIG. 1 are assigned the same numerals, and duplicate explanations
are omitted.
[0439] Compared with the first embodiment shown in FIG. 1, the
barrier metal film production apparatus shown in FIG. 8 lacks the
opening portion 14, passage 15, excitation chamber 16, plasma
antenna 17, matching instrument 18, power source 19 and flow
controller 20. Nozzles 12 for supplying a gas mixture of a source
gas (Cl.sub.2 gas) and a nitrogen gas (N.sub.2 gas) as a
nitrogen-containing gas to the interior of the chamber 1 are
connected to the cylindrical portion of the chamber 1. The Cl.sub.2
gas and the N.sub.2 gas are mixed in a mixed gas flow controller
81, and the gas mixture of the Cl.sub.2 gas and the N.sub.2 gas is
supplied to the nozzle 12 via the mixed gas flow controller 81.
Other constructions are the same as in the first embodiment.
[0440] With the above-described barrier metal film production
apparatus, the mixed gas comprising the Cl.sub.2 gas and the
N.sub.2 gas is supplied through the nozzles 12 to the interior of
the chamber 1, and electromagnetic waves are shot from the plasma
antenna 9 into the chamber 1. As a result, the Cl.sub.2 gas and the
N.sub.2 gas are ionized to generate a Cl.sub.2 gas/N.sub.2 gas
plasma 82. The Cl.sub.2 gas/N.sub.2 gas plasma 82 causes an etching
reaction to the metal member 7, forming a precursor
(M.sub.xCl.sub.y: M is a metal such as W, Ti, Ta or TiSi) 22. Also,
the precursor 22 and N.sub.2 react to form a metal nitride (MN). At
this time, the metal member 7 is maintained by the plasma (or
temperature control means (not shown)) at a predetermined
temperature (e.g., 200 to 400.degree. C.) which is higher than the
temperature of the substrate 3.
[0441] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the N.sub.2
gas to the mixed gas flow controller 81 is cut off. Thus, the
precursor (M.sub.xCl.sub.y) 22 is transported toward the substrate
3 controlled to a lower temperature than the temperature of the
metal member 7. The precursor (M.sub.xCl.sub.y) 22 transported
toward the substrate 3 is converted into only metal (M) ions by a
reduction reaction, and directed at the substrate 3 to form a thin
M film 25 on the surface of the substrate 3. A barrier metal film
26 is composed of the thin MN film 24 and the thin M film 25 (see
FIG. 2).
[0442] The substrate 3, on which the barrier metal film 26 has been
formed, is to have a thin copper (Cu) film or a thin aluminum (Al)
film formed on the barrier metal film 26 by a film forming device.
Because of the presence of the barrier metal film 26, there arise
advantages, for example, such that the thin MN film 24 eliminates
diffusion of Cu into the substrate 3, and the thin M film 25
ensures adhesion of Cu.
[0443] If the material to be formed as a film is a material
unproblematic in terms of adhesion (e.g., Al), or if it is a metal
to which the nitride can retain adhesion, the thin M film 25 can be
omitted from the barrier metal film 26.
[0444] With the above-described barrier metal film production
apparatus, the same effects as in the first embodiment are
obtained. In addition, the supply line for the gases can be
simplified, and the number of the plasma sources can be decreased.
Thus, the cost of the product can be reduced.
[0445] The sixth embodiment of a barrier metal film production
apparatus and a barrier metal film production method according to
the present invention will be described with reference to FIG. 9.
FIG. 9 is a schematic side view of the barrier metal film
production apparatus according to the sixth embodiment of the
present invention. The same members as in the second and fifth
embodiments illustrated in FIGS. 3 to 5 and 8 are assigned the same
numerals, and duplicate explanations are omitted.
[0446] Compared with the second embodiment shown in FIG. 3, the
barrier metal film production apparatus shown in FIG. 9 lacks the
opening portion 14, passage 15, excitation chamber 16, plasma
antenna 17, matching instrument 18, power source 19 and flow
controller 20. Nozzles 12 for supplying a gas mixture of a source
gas (Cl.sub.2 gas) and a nitrogen gas (N.sub.2 gas) as a
nitrogen-containing gas to the interior of the chamber 1 are
connected to the cylindrical portion of the chamber 1. The Cl.sub.2
gas and the N.sub.2 gas are mixed in a mixed gas flow controller
81, and the gas mixture of the Cl.sub.2 gas and the N.sub.2 gas is
supplied to the nozzle 12 via the mixed gas flow controller 81.
Other constructions are the same as in the second embodiment.
[0447] With the above-described barrier metal film production
apparatus, the mixed gas comprising the Cl.sub.2 gas and the
N.sub.2 gas is supplied through the nozzles 12 to the interior of
the chamber 1, and electromagnetic waves are shot from the plasma
antenna 34 into the chamber 1. As a result, the Cl.sub.2 gas and
the N.sub.2 gas are ionized to generate a Cl.sub.2 gas/N.sub.2 gas
plasma 82. The etched member 31, an electric conductor, is present
below the plasma antenna 34. As stated earlier, however, the
Cl.sub.2 gas/N.sub.2 gas plasma 82 occurs stably between the etched
member 31 and the substrate 3, namely, below the etched member
31.
[0448] The Cl.sub.2 gas/N.sub.2 gas plasma 82 causes an etching
reaction to the etched member 31, forming a precursor
(M.sub.xCl.sub.y: M is a metal such as W, Ti, Ta or TiSi) 22. Also,
the precursor 22 and N.sub.2 react to form a metal nitride (MN). At
this time, the etched member 31 is maintained by the plasma (or
temperature control means (not shown)) at a predetermined
temperature (e.g., 200 to 400.degree. C.) which is higher than the
temperature of the substrate 3.
[0449] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the N.sub.2
gas to the mixed gas flow controller 81 is cut off. Thus, the
precursor (M.sub.xCl.sub.y) 22 is transported toward the substrate
3 controlled to a lower temperature than the temperature of the
etched member 31. The precursor (M.sub.xCl.sub.y) 22 transported
toward the substrate 3 is converted into only metal (M) ions by a
reduction reaction, and directed at the substrate 3 to form a thin
M film 25 on the thin MN film 24 on the substrate 3. A barrier
metal film 26 is composed of the thin MN film 24 and the thin M
film 25 (see FIG. 2).
[0450] The substrate 3, on which the barrier metal film 26 has been
formed, is to have a thin copper (Cu) film or a thin aluminum (Al)
film formed on the barrier metal film 26 by a film forming device.
Because of the presence of the barrier metal film 26, there arise
advantages, for example, such that the thin MN film 24 eliminates
diffusion of Cu into the substrate 3, and the thin M film 25
ensures adhesion of Cu.
[0451] If the material to be formed as a film is a material
unproblematic in terms of adhesion (e.g., Al), or if it is a metal
to which the nitride can retain adhesion, the thin M film 25 can be
omitted from the barrier metal film 26.
[0452] With the above-described barrier metal film production
apparatus, the same effects as in the second embodiment are
obtained. In addition, the supply line for the gases can be
simplified, and the number of the plasma sources can be decreased.
Thus, the cost of the product can be reduced.
[0453] The seventh embodiment of a barrier metal film production
apparatus and a barrier metal film production method according to
the present invention will be described with reference to FIG. 10.
FIG. 10 is a schematic side view of the barrier metal film
production apparatus according to the seventh embodiment of the
present invention. The same members as in the third and fifth
embodiments illustrated in FIGS. 6 and 8 are assigned the same
numerals, and duplicate explanations are omitted.
[0454] Compared with the third embodiment shown in FIG. 6, the
barrier metal film production apparatus shown in FIG. 10 lacks the
opening portion 14, passage 15, excitation chamber 16, plasma
antenna 17, matching instrument 18, power source 19 and flow
controller 20. A gas mixture of a source gas (Cl.sub.2 gas) and a
nitrogen gas (N.sub.2 gas) as a nitrogen-containing gas is supplied
from a mixed gas flow controller 81 to a second excitation chamber
44. Other constructions are the same as in the third
embodiment.
[0455] With the above-described barrier metal film production
apparatus, the mixed gas comprising the Cl.sub.2 gas and the
N.sub.2 gas is supplied into a second passage 43 via the mixed gas
flow controller 81, and fed into the second excitation chamber 44.
Electromagnetic waves are shot from a second plasma antenna 45 into
the second excitation chamber 44. As a result, the Cl.sub.2 gas and
the N.sub.2 gas are ionized to generate a Cl.sub.2 gas/N.sub.2 gas
plasma 82. Since a predetermined differential pressure has been
established between the pressure inside the chamber 1 and the
pressure inside the second excitation chamber 44 by the vacuum
device 8, the excited chlorine and excited nitrogen of the Cl.sub.2
gas/N.sub.2 gas plasma 82 in the second excitation chamber 44 are
fed to the etched member 41 inside the chamber 1 through the second
opening portion 42. The excited chlorine causes an etching reaction
to the etched member 41, forming a precursor (M.sub.xCl.sub.y) 22
inside the chamber 1. Also, the precursor 22 and the excited
nitrogen react to form a metal nitride (MN). At this time, the
etched member 41 is maintained at a predetermined temperature
(e.g., 200 to 400.degree. C.), which is higher than the temperature
of the substrate 3, by a heater 50 provided in a ceiling board
30.
[0456] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the N.sub.2
gas to the mixed gas flow controller 81 is cut off. Thus, the
precursor (M.sub.xCl.sub.y) 22 is transported toward the substrate
3 controlled to a lower temperature than the temperature of the
etched member 41. The precursor (M.sub.xCl.sub.y) 22 transported
toward the substrate 3 is converted into only metal (M) ions by a
reduction reaction, and directed at the substrate 3 to form a thin
M film 25 on the thin MN film 24 on the substrate 3. A barrier
metal film 26 is composed of the thin MN film 24 and the thin M
film 25 (see FIG. 2).
[0457] The substrate 3, on which the barrier metal film 26 has been
formed, is to have a thin copper (Cu) film or a thin aluminum (Al)
film formed on the barrier metal film 26 by a film forming device.
Because of the presence of the barrier metal film 26, there arise
advantages, for example, such that the thin MN film 24 eliminates
diffusion of Cu into the substrate 3, and the thin M film 25
ensures adhesion of Cu.
[0458] If the material to be formed as a film is a material
unproblematic in terms of adhesion (e.g., Al), or if it is a metal
to which the nitride can retain adhesion, the thin M film 25 can be
omitted from the barrier metal film 26.
[0459] With the above-described barrier metal film production
apparatus, the same effects as in the third embodiment are
obtained. In addition, the supply line for the gases can be
simplified, and the number of the plasma sources can be decreased.
Thus, the cost of the product can be reduced.
[0460] The eighth embodiment of a barrier metal film production
apparatus and a barrier metal film production method according to
the present invention will be described with reference to FIG. 11.
FIG. 11 is a schematic side view of the barrier metal film
production apparatus according to the eighth embodiment of the
present invention. The same members as in the fourth embodiment and
the fifth embodiment illustrated in FIGS. 7 and 8 are assigned the
same numerals, and duplicate explanations are omitted.
[0461] Compared with the fourth embodiment shown in FIG. 7, the
barrier metal film production apparatus shown in FIG. 11 lacks the
opening portion 14, passage 15, excitation chamber 16, plasma
antenna 17, matching instrument 18, power source 19 and flow
controller 20. Nozzles 12 for supplying a gas mixture of a source
gas (Cl.sub.2 gas) and a nitrogen gas (N.sub.2 gas) as a
nitrogen-containing gas to the interior of the chamber 1 are
connected to the cylindrical portion of the chamber 1. The Cl.sub.2
gas and the N.sub.2 gas are mixed in a mixed gas flow controller
81, and the gas mixture of the Cl.sub.2 gas and the N.sub.2 gas is
supplied to the nozzle 12 via the mixed gas flow controller 81.
Other constructions are the same as in the fourth embodiment.
[0462] With the above-described barrier metal film production
apparatus, the mixed gas comprising the Cl.sub.2 gas and the
N.sub.2 gas is supplied through the nozzles 12 to the interior of
the chamber 1, and electromagnetic waves are shot from the metal
member 7 into the chamber 1. As a result, the Cl.sub.2 gas and the
N.sub.2 gas are ionized to generate a Cl.sub.2 gas/N.sub.2 gas
plasma 82. The Cl.sub.2 gas/N.sub.2 gas plasma 82 causes an etching
reaction to the metal member 7, forming a precursor
(M.sub.xCl.sub.y: M is a metal such as W, Ti, Ta or TiSi) 22. Also,
the precursor 22 and N.sub.2 react to form a metal nitride (MN). At
this time, the metal member 7 is maintained by the plasma (or
temperature control means (not shown)) at a predetermined
temperature (e.g., 200 to 400.degree. C.) which is higher than the
temperature of the substrate 3.
[0463] The metal nitride (MN) formed within the chamber 1 is
transported toward the substrate 3 controlled to a low temperature,
whereby a thin MN film 24 is formed on the surface of the substrate
3. After the thin MN film 24 is formed, the supply of the N.sub.2
gas to the mixed gas flow controller 81 is cut off. Thus, the
precursor (M.sub.xCl.sub.y) 22 is transported toward the substrate
3 controlled to a lower temperature than the temperature of the
metal member 7. The precursor (M.sub.xCl.sub.y) 22 transported
toward the substrate 3 is converted into only metal (M) ions by a
reduction reaction, and directed at the substrate 3 to form a thin
M film 25 on the thin MN film 24 on the substrate 3. A barrier
metal film 26 is composed of the thin MN film 24 and the thin M
film 25 (see FIG. 2).
[0464] The substrate 3, on which the barrier metal film 26 has been
formed, is to have a thin copper (Cu) film or a thin aluminum (Al)
film formed on the barrier metal film 26 by a film forming device.
Because of the presence of the barrier metal film 26, there arise
advantages, for example, such that the thin MN film 24 eliminates
diffusion of Cu into the substrate 3, and the thin M film 25
ensures adhesion of Cu.
[0465] If the material to be formed as a film is a material
unproblematic in terms of adhesion (e.g., Al), or if it is a metal
to which the nitride can retain adhesion, the thin M film 25 can be
omitted from the barrier metal film 26.
[0466] With the above-described barrier metal film production
apparatus, the same effects as in the fourth embodiment are
obtained. In addition, the supply line for the gases can be
simplified, and the number of the plasma sources can be decreased.
Thus, the cost of the product can be reduced.
[0467] In the foregoing fifth to eighth embodiments, the N.sub.2
gas is mixed with the Cl.sub.2 gas in the mixed gas flow controller
81, and the gas mixture is supplied into the chamber 1. However,
the N.sub.2 gas and the Cl.sub.2 gas can be supplied through
separate nozzles. Also, ammonia can be applied as the
nitrogen-containing gas.
[0468] The ninth embodiment of the barrier metal film production
apparatus and barrier metal film production method of the present
invention will be described with reference to FIGS. 12 and 18. FIG.
12 is a schematic side view of the barrier metal film production
apparatus according to the ninth embodiment of the present
invention. FIG. 13 shows the sectional status of a substrate
illustrating a barrier metal film. FIGS. 14 and 15 show the concept
status of a barrier metal film in denitrification. FIG. 16 shows
the concept status of a barrier metal film in oxide layer
formation. FIG. 17 represents the relationship between the contact
angle of copper particles and the oxygen concentration of the
substrate. FIG. 18 shows the concept status of a barrier metal film
in hydroxyl group formation. FIG. 19 schematically shows a
construction illustrating another example of diluent gas supply
means.
[0469] As shown in FIG. 12, a support platform 102 is provided near
the bottom of a cylindrical chamber 101 made of, say, a ceramic (an
insulating material), and a substrate 103 is placed on the support
platform 102. Temperature control means 106, as control means,
equipped with a heater 104 and refrigerant flow-through means 105
is provided in the support platform 102 so that the support
platform 102 is controlled to a predetermined temperature (for
example, a temperature at which the substrate 103 is maintained at
100 to 200.degree. C.) by the temperature control means 106.
[0470] An upper surface of the chamber 101 is an opening, which is
closed with a metal member 107, as an etched member, made of a
metal (e.g., W, Ti, Ta, or TiSi). The interior of the chamber 101
closed with the metal member 107 is maintained at a predetermined
pressure by a vacuum device 108. A plasma antenna 109, as a coiled
winding antenna of plasma generation means, is provided around a
cylindrical portion of the chamber 101. A matching instrument 110
and a power source 111 are connected to the plasma antenna 109 to
supply power.
[0471] A nozzle 112, as source gas supply means, for supplying a
source gas (a Cl.sub.2 gas diluted with He or Ar to a chlorine
concentration of .ltoreq.50%, preferably about 10%), containing
chlorine as a halogen, to the interior of the chamber 101 is
connected to the cylindrical portion of the chamber 101 below the
metal member 107. The nozzle 112 is fed with the source gas via a
flow controller 113. The source gas is supplied from the nozzle
112, and electromagnetic waves are shot from the plasma antenna 109
into the chamber 101, whereby the Cl.sub.2 gas is ionized to
generate a Cl.sub.2 gas plasma (plasma generation means). Fluorine
(F), bromine (Br) or iodine (I) can also be applied as the halogen
to be incorporated into the source gas.
[0472] A nozzle 114, as nitrogen-containing gas supply means, for
supplying an ammonia gas (NH.sub.3 gas) as a nitrogen-containing
gas, to the interior of the chamber 101 is connected to the
cylindrical portion of the chamber 101 below the metal member 107.
The NH.sub.3 gas is supplied from the nozzle 114, and
electromagnetic waves are shot from the plasma antenna 109 into the
chamber 101, whereby the NH.sub.3 gas is ionized to generate an
NH.sub.3 gas plasma (plasma generation means).
[0473] A diluent gas nozzle 121 is provided, as diluent gas supply
means, for supplying an Ar gas as a diluent gas, to the interior of
the chamber 101 above the surface of the substrate 103. The Ar gas
is supplied from the diluent gas nozzle 121, and electromagnetic
waves are shot from the plasma antenna 109 into the chamber 101,
whereby the Ar gas is ionized to generate an Ar gas plasma (surface
treatment plasma generation means).
[0474] As described above, the diluent gas supply means applies the
Ar gas as the diluent gas for the Cl.sub.2 gas. In this case, as
shown in FIG. 19, a control valve 122 may be provided at the site
of merger between the source gas (Cl.sub.2 gas) and the diluent gas
(Ar gas) so that the Cl.sub.2 gas is stopped during generation of
the Ar gas plasma, and only the Ar gas is supplied through the
nozzle 112. According to this construction, there is no need for
the provision of the diluent gas nozzle 121, presenting advantage
in space.
[0475] An oxygen gas nozzle 115 is provided, as oxygen gas supply
means, for supplying an oxygen gas (O.sub.2 gas) to the interior of
the chamber 101 above the surface of the substrate 103. The O.sub.2
gas is supplied from the oxygen gas nozzle 115, and electromagnetic
waves are shot from the plasma antenna 109 into the chamber 101,
whereby the O.sub.2 gas is ionized to generate an O.sub.2 gas
plasma (oxygen plasma generation means).
[0476] Furthermore, a hydrogen gas nozzle 116 is provided, as
hydrogen gas supply means, for supplying a hydrogen gas (H.sub.2
gas) to the interior of the chamber 101 above the surface of the
substrate 103. The H.sub.2 gas is supplied from the hydrogen gas
nozzle 116, and electromagnetic waves are shot from the plasma
antenna 109 into the chamber 101, whereby the H.sub.2 gas is
ionized to generate an H.sub.2 gas plasma (hydroxyl group plasma
generation means).
[0477] With the above-described barrier metal film production
apparatus, the source gas is supplied through the nozzle 112 to the
interior of the chamber 101, and electromagnetic waves are shot
from the plasma antenna 109 into the chamber 101. As a result, the
Cl.sub.2 gas is ionized to generate a Cl.sub.2 gas plasma (source
gas plasma). The Cl.sub.2 gas plasma causes an etching reaction to
the metal member 107, forming a precursor (M.sub.xCl.sub.y: M is a
metal such as W, Ti, Ta or TiSi) 120. The metal member 107 is
maintained by the plasma at a predetermined temperature (e.g., 200
to 400.degree. C.) which is higher than the temperature of the
substrate 103.
[0478] Also, the NH.sub.3 gas is supplied into the chamber 101
through the nozzle 114, and electromagnetic waves are shot from the
plasma antenna 109 into the chamber 101. Thus, the NH.sub.3 gas is
ionized to generate an NH.sub.3 gas plasma, which causes a
reduction reaction with the precursor 120, forming a metal nitride
(MN). The metal nitride (MN) formed within the chamber 101 is
transported toward the substrate 103 controlled to a low
temperature, whereupon MN is formed into a film on the surface of
the substrate 103 to produce a barrier metal film 123 (see FIG.
13).
[0479] The reaction for formation of the barrier metal film 123 can
be expressed by:
2MCl+2NH.sub.3.fwdarw.2MN.dwnarw.+HCl.uparw.+2H.sub.2.uparw.
[0480] The gases and the etching products that have not been
involved in the reaction are exhausted through an exhaust port
117.
[0481] After the barrier metal film 1123 has been formed, the Ar
gas is supplied from the diluent gas nozzle 121, and
electromagnetic waves are shot from the plasma antenna 109 into the
chamber 101, thereby generating an Ar gas plasma. On the surface of
the substrate 103, the barrier metal film 123 of MN has been
formed, as shown in FIG. 14. Thus, upon generation of the Ar gas
plasma, Ar.sup.+ etches the barrier metal film 123 on the surface
of the substrate 103, thereby performing a treatment for removing
the nitrogen atoms (N) of the MN in the superficial layer to
decrease the nitrogen content of the superficial layer relative to
the interior of the matrix of the barrier metal film 123
(denitrification).
[0482] As shown in FIG. 14, the barrier metal film 123 comprises M
and N in an amorphous state. In this state, N of a lower mass is
preferentially removed by Ar.sup.+, so that the superficial layer
of the barrier metal film 123 (for example, up to a half,
preferably about a third, of the entire film thickness) is
denitrified. As a result, there emerges the barrier metal film 123
of a two-layer structure, a metal layer 123a substantially composed
of M, and an MN layer 123b, as shown in FIG. 15. On this occasion,
the entire film thickness of the barrier metal film 123 remains the
film thickness having the single layer.
[0483] Immediately before formation of the most superficial layer
of the barrier metal film 123 is completed, a trace amount of
O.sub.2 gas is supplied through the oxygen gas nozzle 115 into the
chamber 101. At the same time, electromagnetic waves are shot from
the plasma antenna 109 into the chamber 101 to generate an O.sub.2
gas plasma. As a result, an oxide layer 124 is formed on the
surface of the metal layer 123a composed substantially of M, as
shown in FIG. 16. Since the oxide layer 124 has been formed, if a
metal (e.g., copper) is deposited (formed as a film) on the surface
of the barrier metal film 123, wetting with the metal is
satisfactory, thus increasing adhesion.
[0484] In detail, it has been confirmed, as shown in FIG. 17, that
the higher the oxygen concentration of the substrate 103, the
smaller the contact angle .theta. of a copper particle (the angle
that takes minimal surface energy in the presence of a balanced
surface tension when the substrate is considered to be a solid and
copper is deemed to be a liquid). That is, as the oxygen
concentration of the substrate 103 increases, the copper particle
adheres in a collapsed state (a state of high wetting) to the
surface of the substrate 103. Hence, the O.sub.2 gas plasma is
generated to form the oxide layer 124 on the surface of the metal
layer 123a. By so doing, the oxygen concentration of the substrate
103 can be increased, leading to satisfactory wetting with the
metal (copper) to be formed as a film.
[0485] After formation of the oxide layer 124 on the surface of the
metal layer 123a, the H.sub.2 gas is supplied from the hydrogen gas
nozzle 116 into the chamber 101, and electromagnetic waves are shot
from the plasma antenna 109 into the chamber 101, thereby
generating an H.sub.2 gas plasma. As a result, hydroxyl groups (OH
groups) are formed on the surface of the oxide layer 124, as shown
in FIG. 18. These hydroxyl groups increase hydrophilicity, and can
further enhance the adhesion of the metal (copper) to be formed as
a film.
[0486] With the above-described barrier metal film production
apparatus, the metal is formed by the plasma to produce the barrier
metal film 123. Thus, the barrier metal film 123 can be formed
uniformly to a small thickness. Consequently, the barrier metal
film 123 can be formed highly accurately at a high speed with
excellent burial properties in a very small thickness even to the
interior of a tiny depression, for example several hundred
nanometers wide, which has been provided in the substrate 103.
[0487] Moreover, denitrification of the barrier metal film 123 is
carried out by removing the nitrogen atoms with the Ar gas plasma.
Thus, the barrier metal film 123 can be granted the two-layer
structure, the metal layer 123a substantially composed of M, and
the MN layer 123b. In addition, the entire film thickness can
remain the film thickness constructed from the single layer. Thus,
the barrier metal film 123 can be formed in a two-layer structure
without being thickened. Of the two layers, the metal layer 123a
can retain adhesion to a metal to be formed as a film on the
surface thereof, while the MN layer (123b) can prevent diffusion of
the metal. Hence, it becomes possible to produce the barrier metal
film which can be formed with good adhesion to the metal to be
formed as a film, with diffusion of the metal being eliminated.
[0488] Besides, the O.sub.2 gas plasma is generated to form the
oxide layer 124 on the surface of the metal layer 123a. Thus, when
a metal is formed as a film on the surface of the barrier metal
film 123, wetting with the metal is satisfactory, and adhesion of
the metal can be increased. Additionally, the H.sub.2 gas plasma is
generated to form hydroxyl groups (OH groups) on the surface of the
oxide layer 124. Thus, the hydrophilicity improves, and can further
increase the adhesion of the metal to be formed as a film.
[0489] It is permissible to omit the step of generating the H.sub.2
gas plasma to form hydroxyl groups (OH groups) on the surface of
the oxide layer 124. It is also allowable to omit the step of
generating the O.sub.2 gas plasma to form the oxide layer 124 on
the surface of the metal layer 123a.
[0490] The barrier metal film production apparatus and barrier
metal film production method according to the tenth embodiment of
the present invention will be described with reference to FIG. 20.
FIG. 20 schematically shows the construction of the barrier metal
film production apparatus according to the tenth embodiment of the
present invention. The same members as the members shown in FIG. 12
are assigned the same numerals, and duplicate explanations are
omitted. FIG. 21 shows the concept status of an example of
production of a barrier metal film by the barrier metal film
production apparatus according to the tenth embodiment of the
present invention.
[0491] Compared with the barrier metal film production apparatus of
the ninth embodiment shown in FIG. 12, the barrier metal film
production apparatus of the tenth embodiment shown in FIG. 20 lacks
the diluent gas nozzle 121. In the ninth embodiment, the Ar gas is
supplied from the diluent gas nozzle 121 to generate an Ar gas
plasma. Using the Ar gas plasma, Ar.sup.+ etches the barrier metal
film 123 on the surface of the substrate 103, thereby performing a
treatment for removing the nitrogen atoms (N) of the MN in the
superficial layer to decrease the nitrogen content of the
superficial layer relative to the interior of the matrix of the
barrier metal film 123 (denitrification). In the present tenth
embodiment, on the other hand, when denitrification is to be
performed, the O.sub.2 gas is supplied from the oxygen gas nozzle
115 to generate an O.sub.2 gas plasma. O.sub.2.sup.+ etches the
barrier metal film 123 on the surface of the substrate 103,
performing denitrification. After denitrification, the amount of
the O.sub.2 gas is decreased to form the oxide layer 124 (see FIG.
16). Other constructions and actions are the same as in the ninth
embodiment.
[0492] The tenth embodiment can decrease the number of the nozzles
for supplying the gases, thus bringing advantage in space.
[0493] In the barrier metal film production apparatus of the tenth
embodiment, the O.sub.2 gas plasma can be used only for the
formation of the oxide layer 124 (see FIG. 16) without being used
for etching. In this case, the barrier metal film 123 is only the
single layer, MN layer 123b. If the metal to be formed as a film
over the substrate 103 is a metal unproblematic in terms of
adhesion (such as Al), for example, the treatment for forming the
metal layer 123a by etching can be omitted.
[0494] In the barrier metal film production apparatus of the tenth
embodiment, moreover, the O.sub.2 gas plasma can be used similarly
only for the formation of the oxide layer 124 (see FIG. 16) without
being used for etching. In this case, however, after the MN layer
123b is formed, the supply of the NH.sub.3 gas from the nozzle 114
is cut off to terminate the reaction of the precursor 120 with an
NH.sub.3 gas plasma. Then, as shown in FIG. 21, the metal component
of the precursor 120 is superposed on the MN layer 123b, whereby
the metal layer 123a can be formed.
[0495] The reaction for formation of the metal layer 123a from the
metal component of the precursor 120 can be expressed by:
2MCl.fwdarw.2M.dwnarw.+Cl.sub.2.uparw.
[0496] The barrier metal film production apparatus and barrier
metal film production method according to the eleventh embodiment
of the present invention will be described with reference to FIG.
22. FIG. 22 schematically shows the construction of the barrier
metal film production apparatus according to the eleventh
embodiment of the present invention. The same members as in the
barrier metal film production apparatus shown in FIG. 12 are
assigned the same numerals, and duplicate explanations are
omitted.
[0497] As shown in FIG. 22, a support platform 102 is provided near
the bottom of a chamber 101, and a substrate 103 is placed on the
support platform 102. Temperature control means 106, as control
means, equipped with a heater 104 and refrigerant flow-through
means 105 is provided in the support platform 102 so that the
support platform 102 is controlled to a predetermined temperature
(for example, a temperature at which the substrate 103 is
maintained at 100 to 200.degree. C.) by the temperature control
means 106. An upper surface of the chamber 101 is an opening, which
is closed with a metal member 107 (e.g., W, Ti, Ta, or TiSi). The
interior of the chamber 101 closed with the metal member 107 is
maintained at a predetermined pressure by a vacuum device 108. A
plasma antenna 109 is provided around a cylindrical portion of the
chamber 101. A matching instrument 110 and a power source 111 are
connected to the plasma antenna 109 to supply power.
[0498] A nozzle 112 for supplying a source gas is connected to the
cylindrical portion of the chamber 101 below the metal member 107.
The source gas is supplied from the nozzle 112, and electromagnetic
waves are shot from the plasma antenna 109 into the chamber 101,
whereby the Cl.sub.2 gas is ionized to generate a Cl.sub.2 gas
plasma (plasma generation means).
[0499] A diluent gas nozzle 121 is provided for supplying an Ar gas
to the interior of the chamber 101. Also, electromagnetic waves are
shot from the plasma antenna 109 into the chamber 101. Thus, the Ar
gas is ionized to generate an Ar gas plasma (surface treatment
plasma generation means). If an Ar gas is applied as the diluent
gas for the Cl.sub.2 gas, diluent gas supply means may be
constructed, similar to the ninth embodiment, such that only the Ar
gas is supplied from the nozzle 112.
[0500] An oxygen gas nozzle 115 is provided for supplying an oxygen
gas (O.sub.2 gas) to the interior of the chamber 101. Also,
electromagnetic waves are shot from the plasma antenna 109 into the
chamber 101. Thus, the O.sub.2 gas is ionized to generate an
O.sub.2 gas plasma (oxygen plasma generation means). Moreover, a
hydrogen gas nozzle 116 is provided for supplying a hydrogen gas
(H.sub.2 gas) to the interior of the chamber 101. Also,
electromagnetic waves are shot from the plasma antenna 109 into the
chamber 101. Thus, the H.sub.2 gas is ionized to generate an
H.sub.2 gas plasma (hydroxyl group plasma generation means).
[0501] Slit-shaped opening portions 131 are formed at a plurality
of locations (for example, four locations; only one of the
locations is shown in the drawing) in the periphery of a lower part
of the cylindrical portion of the chamber 101, and one end of a
tubular passage 132 is fixed to the opening portion 131. A tubular
excitation chamber 33 made of an insulator is provided halfway
through the passage 132, and a coiled plasma antenna 134 is
provided around the excitation chamber 133. The plasma antenna 134
is connected to a matching instrument 135 and a power source 136 to
receive power. The plasma antenna 134, the matching instrument 135
and the power source 136 constitute excitation means. A flow
controller 137 is connected to the other end of the passage 132,
and an ammonia gas (NH.sub.3 gas) as a nitrogen-containing gas is
supplied into the passage 132 via the flow controller 137.
[0502] Separately, the NH.sub.3 gas is supplied into the passage
132 via the flow controller 137 and fed into the excitation chamber
133. By shooting electromagnetic waves from the plasma antenna 134
into the excitation chamber 133, the NH.sub.3 gas is ionized to
generate an NH.sub.3 gas plasma 138. Since a predetermined
differential pressure has been established between the pressure
inside the chamber 101 and the pressure inside the excitation
chamber 133 by the vacuum device 108, the excited ammonia of the
NH.sub.3 gas plasma 138 in the excitation chamber 133 is fed to the
precursor (M.sub.xCl.sub.y) 120 inside the chamber 101 through the
opening portion 131.
[0503] That is, excitation means for exciting the
nitrogen-containing gas in the excitation chamber 133 isolated from
the chamber 101 is constructed. Because of this construction, the
metal component of the precursor (M.sub.xCl.sub.y) 120 and ammonia
react to form a metal nitride (MN) (formation means). At this time,
the metal member 107 and the excitation chamber 133 are maintained
by the plasmas at predetermined temperatures (e.g., 200 to
400.degree. C.) which are higher than the temperature of the
substrate 103.
[0504] With the above-described barrier metal film production
apparatus, the source gas is supplied through the nozzle 112 to the
interior of the chamber 101, and electromagnetic waves are shot
from the plasma antenna 109 into the chamber 101. As a result, a
Cl.sub.2 gas plasma (source gas plasma) occurs. The Cl.sub.2 gas
plasma causes an etching reaction to the metal member 107, forming
a precursor (M.sub.xCl.sub.y) 120. The metal member 107 is
maintained by the plasma at a predetermined temperature (e.g., 200
to 400.degree. C.) which is higher than the temperature of the
substrate 103.
[0505] The excited ammonia of the NH.sub.3 gas plasma 138 in the
excitation chamber 133 is fed to the precursor (M.sub.xCl.sub.y)
120 inside the chamber 101 through the opening portion 131. Thus, a
metal nitride (MN) is formed inside the chamber 101. The resulting
metal nitride (MN) is transported toward the substrate 103
controlled to a low temperature, whereby a barrier metal film 23 is
formed on the surface of the substrate 103. The gases and the
etching products, which have not been involved in the reaction, are
exhausted through an exhaust port 117.
[0506] After the barrier metal film 123 is formed, the Ar gas is
supplied from the diluent gas nozzle 121, and electromagnetic waves
are shot from the plasma antenna 109 into the chamber 101 to
generate an Ar gas plasma. Using the Ar gas plasma, Ar.sup.+ etches
the barrier metal film 123 on the surface of the substrate 103,
thereby performing a treatment for removing the nitrogen atoms (N)
of the MN in the superficial layer to decrease the nitrogen content
of the superficial layer relative to the interior of the matrix of
the barrier metal film 123 (denitrification). As a result, there
emerges the barrier metal film 123 of a two-layer structure, a
metal layer 123a substantially composed of M, and an MN layer 123b
(see FIG. 15).
[0507] Immediately before formation of the most superficial layer
of the barrier metal film 123 is completed, a trace amount of
O.sub.2 gas is supplied through the oxygen gas nozzle 115 into the
chamber 101. At the same time, electromagnetic waves are shot from
the plasma antenna 109 into the chamber 101 to generate an O.sub.2
gas plasma. As a result, an oxide layer 124 is formed on the
surface of the metal layer 123a composed substantially of M (see
FIG. 16). Since the oxide layer 124 has been formed, if a metal
(e.g., copper) is deposited (formed as a film) on the surface of
the barrier metal film 123, wetting with the metal is satisfactory,
thus increasing adhesion.
[0508] After formation of the oxide layer 124 on the surface of the
metal layer 123a, the H.sub.2 gas is supplied from the hydrogen gas
nozzle 116 into the chamber 101, and electromagnetic waves are shot
from the plasma antenna 109 into the chamber 101, thereby
generating an H.sub.2 gas plasma. As a result, hydroxyl groups (OH
groups) are formed on the surface of the oxide layer 124 (see FIG.
18). These hydroxyl groups increase hydrophilicity, and can further
enhance the adhesion of the metal (copper) to be formed as a
film.
[0509] With the above-described barrier metal film production
apparatus, the barrier metal film 123 can be formed at a high speed
with excellent burial properties in a very small thickness, as in
the ninth embodiment. In addition, the entire film thickness can
remain the film thickness constructed from the single layer. In
this state, it becomes possible to produce the barrier metal film
which can be formed with good adhesion to the metal to be formed as
a film, with diffusion of the metal being eliminated.
[0510] Besides, when a metal is formed as a film on the surface of
the barrier metal film 123, wetting with the metal is satisfactory,
and adhesion of the metal can be increased. Additionally, the
hydrophilicity improves, and can further increase the adhesion of
the metal to be formed as a film.
[0511] Further, the NH.sub.3 gas plasma 138 is generated in the
excitation chamber 133 isolated from the chamber 101. Thus, the
influence of the NH.sub.3 gas plasma 138 is not exerted on the
surface of the substrate 103.
[0512] It is permissible to omit the step of generating the H.sub.2
gas plasma to form hydroxyl groups (OH groups) on the surface of
the oxide layer 124. It is also allowable to omit the step of
generating the O.sub.2 gas plasma to form the oxide layer 124 on
the surface of the metal layer 123a.
[0513] The barrier metal film production apparatus according to the
eleventh embodiment shown in FIG. 22 may have a construction in
which the diluent gas nozzle 121 is not provided. In the eleventh
embodiment, the Ar gas is supplied from the diluent gas nozzle 121
to generate an Ar gas plasma. Ar.sup.+ etches the barrier metal
film 123 on the surface of the substrate 103, thereby removing the
nitrogen atoms (N) of the MN in the superficial layer to decrease
the nitrogen content of the superficial layer relative to the
interior of the matrix of the barrier metal film 123
(denitrification). When denitrification is to be performed, the
O.sub.2 gas is supplied from the oxygen gas nozzle 115 to generate
an O.sub.2 gas plasma, and O.sub.2.sup.+ etches the barrier metal
film 123 on the surface of the substrate 103, thereby carrying out
denitrification. After denitrification, the amount of the O.sub.2
gas is decreased to form the oxide layer 124 (see FIG. 16).
[0514] In this case, the number of the nozzles for supplying the
gases can be decreased, thus bringing advantage in space.
[0515] The O.sub.2 gas plasma can be used only for the formation of
the oxide layer 124 (see FIG. 16) without being used for etching.
In this case, the barrier metal film 123 is only the single layer,
MN layer 123b. If the metal to be formed as a film over the
substrate 103 is a metal unproblematic in terms of adhesion (such
as Al), for example, the treatment for forming the metal layer 123a
by etching can be omitted.
[0516] Moreover, the O.sub.2 gas plasma can be used similarly only
for the formation of the oxide layer 124 (see FIG. 16) without
being used for etching. After the MN layer 123b is formed, the
supply of the NH.sub.3 gas and the supply of power to the power
source 136 may be cut off. As a result, the precursor
(M.sub.xCl.sub.y) 120 is transported toward the substrate 103
controlled to a lower temperature than the temperature of the metal
member 107. The precursor (M.sub.xCl.sub.y) 120 transported toward
the substrate 103 is converted into only metal (M) ions by a
reduction reaction, and directed at the substrate 3. Thus, the
metal layer 123a is superposed on the MN layer 123b of the
substrate 103. In this manner, the metal layer 123a can be formed
(see FIG. 21).
[0517] A barrier metal film production apparatus and a barrier
metal film production method according to a twelfth embodiment of
the present invention will be described with reference to FIGS. 23
to 25. FIG. 23 is a schematic side view of the barrier metal film
production apparatus according to the twelfth embodiment of the
present invention. FIG. 24 is a view taken along the arrowed line
XIII-XIII of FIG. 23. FIG. 25 is a view taken along the arrowed
line XIV-XIV of FIG. 24. The same members as the members
illustrated in FIGS. 12 to 22 are assigned the same numerals, and
duplicate explanations are omitted.
[0518] An upper surface of the chamber 101 is an opening, which is
closed with a disk-shaped ceiling board 141 made of an insulating
material (for example, a ceramic). An etched member 142 made of a
metal (e.g., W, Ti, Ta or TiSi) is interposed between the opening
at the upper surface of the chamber 101 and the ceiling board 141.
The etched member 142 is provided with a ring portion 143 fitted to
the opening at the upper surface of the chamber 101. A plurality of
(12 in the illustrated embodiment) protrusions 144, which extend
close to the center in the diametrical direction of the chamber 101
and have the same width, are provided in the circumferential
direction on the inner periphery of the ring portion 143.
[0519] The protrusions 144 are integrally or removably attached to
the ring portion 143. Notches (spaces) 145 formed between the
protrusions 144 are present between the ceiling board 141 and the
interior of the chamber 101. The ring portion 143 is earthed, and
the plural protrusions 144 are electrically connected together and
maintained at the same potential. Temperature control means (not
shown), such as a heater, is provided in the etched member 142 to
control the temperature of the etched member 142 to 200 to
400.degree. C., for example.
[0520] Second protrusions shorter in the diametrical direction than
the protrusions 144 can be arranged between the protrusions 144.
Moreover, short protrusions can be arranged between the protrusion
144 and the second protrusion. By so doing, the area of the etched
member, an object to be etched, can be secured, with an induced
current being suppressed.
[0521] A planar winding-shaped plasma antenna 146, for converting
the atmosphere inside the chamber 101 into a plasma, is provided
above the ceiling board 141. The plasma antenna 146 is formed in a
planar ring shape parallel to the surface of the ceiling board 141.
A matching instrument 110 and a power source 111 are connected to
the plasma antenna 146 to supply power. The etched member 142 has
the plurality of protrusions 144 provided in the circumferential
direction on the inner periphery of the ring portion 143, and
includes the notches (spaces) 145 formed between the protrusions
144. Thus, the protrusions 144 are arranged between the substrate
103 and the ceiling board 141 in a discontinuous state relative to
the flowing direction of electricity in the plasma antenna 146.
[0522] At a cylindrical portion of the chamber 101, there are
provided a nozzle 112 for supplying a source gas into the chamber
101, a nozzle 114 for supplying an NH.sub.3 gas into the chamber
101, a diluent gas nozzle 121 for supplying an Ar gas into the
chamber 101, an oxygen gas nozzle 115 for supplying an O.sub.2 gas
into the chamber 101, and a hydrogen gas nozzle 116 for supplying
an H.sub.2 gas into the chamber 101.
[0523] With the above-described barrier metal film production
apparatus, the source gas is supplied through the nozzles 112 to
the interior of the chamber 101, and electromagnetic waves are shot
from the plasma antenna 146 into the chamber 101. As a result, the
Cl.sub.2 gas is ionized to generate a Cl.sub.2 gas plasma (source
gas plasma). The etched member 142, an electric conductor, is
present below the plasma antenna 146. However, the Cl.sub.2 gas
plasma occurs stably between the etched member 142 and the
substrate 103, namely, below the etched member 142, under the
following action:
[0524] The action by which the Cl.sub.2 gas plasma is generated
below the etched member 142 will be described. As shown in FIG. 25,
a flow A of electricity in the plasma antenna 146 of the planar
ring shape crosses the protrusions 144. At this time, an induced
current B occurs on the surface of the protrusion 144 opposed to
the plasma antenna 146. Since the notches (spaces) 145 are present
in the etched member 142, the induced current B flows onto the
lower surface of each protrusion 144, forming a flow a in the same
direction as the flow A of electricity in the plasma antenna 146
(Faraday shield).
[0525] When the etched member 142 is viewed from the substrate 103,
therefore, there is no flow in a direction in which the flow A of
electricity in the plasma antenna 146 is canceled out. Furthermore,
the ring portion 143 is earthed, and the protrusions 144 are
maintained at the same potential. Thus, even though the etched
member 142, an electric conductor, exists, the electromagnetic wave
is reliably thrown from the plasma antenna 146 into the chamber
101. Consequently, the Cl.sub.2 gas plasma is stably generated
below the etched member 142.
[0526] The Cl.sub.2 gas plasma causes an etching reaction to the
etched member 142, forming a precursor (M.sub.xCl.sub.y: M is a
metal such as W, Ti, Ta or TiSi) 120.
[0527] Separately, the NH.sub.3 gas is supplied into the chamber
101 through the nozzle 114, and electromagnetic waves are shot from
the plasma antenna 146 into the chamber 110. Thus, the NH.sub.3 gas
is ionized to generate an NH.sub.3 gas plasma, which causes a
reduction reaction with the precursor 120, forming a metal nitride
(MN). The metal nitride (MN) formed within the chamber 101 is
transported toward the substrate 103 controlled to a low
temperature, whereupon MN is formed into a film on the surface of
the substrate 103 to produce a barrier metal film 123 (see FIG.
13).
[0528] After the barrier metal film 123 has been formed, the Ar gas
is supplied from the diluent gas nozzle 121, and electromagnetic
waves are shot from the plasma antenna 146 into the chamber 101,
thereby generating an Ar gas plasma. Generation of the Ar gas
plasma results in the etching of the barrier metal film 123 on the
surface of the substrate 103, thereby performing denitrification, a
treatment for removing the nitrogen atoms (N) of the MN in the
superficial layer of the barrier metal film 123 to decrease the
nitrogen content of the superficial layer relative to the interior
of the matrix of the barrier metal film 123.
[0529] Immediately before formation of the most superficial layer
of the barrier metal film 123 is completed, a trace amount of
O.sub.2 gas is supplied through the oxygen gas nozzle 115 into the
chamber 101. At the same time, electromagnetic waves are shot from
the plasma antenna 146 into the chamber 101 to generate an O.sub.2
gas plasma. As a result, an oxide layer 124 (see FIG. 16) is formed
on the surface of the metal layer 123a composed substantially of M
(see FIG. 16). Since the oxide layer 124 has been formed, if a
metal (e.g., copper) is deposited (formed as a film) on the surface
of the barrier metal film 123, wetting with the metal is
satisfactory, thus increasing adhesion.
[0530] After formation of the oxide layer 124 (see FIG. 16) on the
surface of the metal layer 123a (FIG. 16), the H.sub.2 gas is
supplied from the hydrogen gas nozzle 116 into the chamber 101, and
electromagnetic waves are shot from the plasma antenna 146 into the
chamber 101, thereby generating an H.sub.2 gas plasma. As a result,
hydroxyl groups (OH groups) are formed on the surface of the oxide
layer 124 (see FIG. 18). These hydroxyl groups increase
hydrophilicity, and can further enhance the adhesion of the metal
(copper) to be formed as a film.
[0531] It is permissible to omit the step of generating the H.sub.2
gas plasma to form hydroxyl groups (OH groups) on the surface of
the oxide layer 124 (see FIG. 18). It is also allowable to omit the
step of generating the O.sub.2 gas plasma to form the oxide layer
124 (FIG. 16) on the surface of the metal layer 123a (FIG. 16).
Furthermore, it is possible to superpose the metal layer 123a,
forming the barrier metal film 123. It is also possible to form the
barrier metal film 123 free from the metal layer 123a.
[0532] Beside, the same nozzle construction as in the tenth
embodiment (see FIG. 20) omitting the diluent gas nozzle 121 may be
adopted in a configuration for formation of the precursor 120 with
the exception of the etched member 142 and the plasma antenna 146.
Moreover, the same construction as in the eleventh embodiment (see
FIG. 22) having the excitation chamber 133, etc. instead of the
nozzle 114 may be adopted in a configuration excepting the etched
member 142 and the plasma-antenna 146.
[0533] With the above-described barrier metal film production
apparatus, the barrier metal film 123 can be formed uniformly to a
small thickness. Consequently, the barrier metal film 123 can be
formed highly accurately at a high speed with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate 103.
[0534] In addition, the etched member 142 has the plurality of
protrusions 144 provided in the circumferential direction on the
inner periphery of the ring portion 143, and includes the notches
(spaces) 145 formed between the protrusions 144. Thus, the induced
currents generated in the etched member 142 flow in the same
direction as the flowing direction of electricity in the plasma
antenna 146, when viewed from the substrate 103. Therefore, even
though the etched member 142, an electric conductor, exists below
the plasma antenna 146, the electromagnetic waves are reliably
thrown from the plasma antenna 146 into the chamber 101.
Consequently, the Cl.sub.2 gas plasma can be stably generated below
the etched member 142.
[0535] A barrier metal film production apparatus and a barrier
metal film production method according to the thirteenth embodiment
of the present invention will be described with reference to FIG.
26. FIG. 26 is a schematic side view of a barrier metal film
production apparatus according to the third embodiment of the
present invention. The same members as the members illustrated in
FIGS. 12 to 25 are assigned the same numerals, and duplicate
explanations are omitted.
[0536] The opening of an upper portion of a chamber 101 is closed
with a ceiling board 141. An etched member 148 made of a metal
(e.g., W, Ti, Ta or TiSi) is provided on a lower surface of the
ceiling board 141, and the etched member 148 is of a quadrangular
pyramidal shape. Slit-shaped opening portions 151 are formed at a
plurality of locations (for example, four locations; one of the
locations is shown in the drawing) in the periphery of an upper
part of the cylindrical portion of the chamber 101, and one end of
a tubular passage 152 is fixed to the opening portion 151. A
tubular excitation chamber 153 made of an insulator is provided
halfway through the passage 152, and a coiled plasma antenna 154 is
provided around the excitation chamber 153. The plasma antenna 154
is connected to a matching instrument 157 and a power source 158 to
receive power.
[0537] A flow controller 155 is connected to the other end of the
passage 152, and a chlorine-containing source gas (a Cl.sub.2 gas
diluted with He or Ar to a chlorine concentration of .ltoreq.50%,
preferably about 10%) is supplied into the passage 152 via the flow
controller 155. By shooting electromagnetic waves from the plasma
antenna 154 into the excitation chamber 153, the Cl.sub.2 gas is
ionized to generate a Cl.sub.2 gas plasma (source gas plasma) 156.
Because of the generation of the Cl.sub.2 gas plasma 156, excited
chlorine is fed into the chamber 101 through the opening portion
151, whereupon the etched member 148 is etched with excited
chlorine.
[0538] At a cylindrical portion of the chamber 101, there are
provided a nozzle 114 for supplying an NH.sub.3 gas into the
chamber 101, a diluent gas nozzle 121 for supplying an Ar gas into
the chamber 101, an oxygen gas nozzle 115 for supplying an O.sub.2
gas into the chamber 101, and a hydrogen gas nozzle 116 for
supplying an H.sub.2 gas into the chamber 101. Around the chamber
101, a plasma antenna 109, a matching instrument 110 and a power
source 111 are provided to generate an NH.sub.3 gas plasma, an Ar
gas plasma, an O.sub.2 gas plasma, and an H.sub.2 gas plasma.
[0539] With the above-described barrier metal film production
apparatus, the source gas is supplied into the passage 152 via the
flow controller 155 and fed into the excitation chamber 153. By
shooting electromagnetic waves from the plasma antenna 154 into the
excitation chamber 153, the Cl.sub.2 gas is ionized to generate a
Cl.sub.2 gas plasma (source gas plasma) 156. Since a predetermined
differential pressure has been established between the pressure
inside the chamber 101 and the pressure inside the excitation
chamber 153 by the vacuum device 108, the excited chlorine of the
Cl.sub.2 gas plasma 156 in the excitation chamber 153 is fed to the
etched member 148 inside the chamber 101 through the opening
portion 151. The excited chlorine causes an etching reaction to the
etched member 148, forming a precursor 120 inside the chamber 101.
At this time, the etched member 148 is maintained at a
predetermined temperature (e.g., 200 to 400.degree. C.), which is
higher than the temperature of the substrate 103, by a heater 150
provided in the ceiling board 141.
[0540] Separately, the NH.sub.3 gas is supplied into the chamber
101 through the nozzle 114, and electromagnetic waves were shot
from the plasma antenna 109 in to the chamber 110. Thus, the
NH.sub.3 gas is ionized to generate an NH.sub.3 gas plasma, which
causes a reduction reaction with the precursor 120, forming a metal
nitride (MN). The metal nitride (MN) formed within the chamber 101
is transported toward the substrate 103 controlled to a low
temperature, whereupon MN is formed into a film on the surface of
the substrate 103 to produce a barrier metal film 123 (see FIG.
13).
[0541] After the barrier metal film 123 has been formed, the Ar gas
is supplied from the diluent gas nozzle 121, and electromagnetic
waves are shot from the plasma antenna 109 into the chamber 101,
thereby generating an Ar gas plasma. Generation of the Ar gas
plasma results in the etching of the barrier metal film 123 on the
surface of the substrate 103, thereby performing denitrification, a
treatment for removing the nitrogen atoms (N) of the MN in the
superficial layer of the barrier metal film 123 to decrease the
nitrogen content of the superficial layer relative to the interior
of the matrix of the barrier metal film 123.
[0542] Immediately before formation of the most superficial layer
of the barrier metal film 123 is completed, a trace amount of
O.sub.2 gas is supplied through the oxygen gas nozzle 115 into the
chamber 101. At the same time, electromagnetic waves are shot from
the plasma antenna 109 into the chamber 101 to generate an O.sub.2
gas plasma. As a result, an oxide layer 124 (see FIG. 16) is formed
on the surface of the metal layer 123a composed substantially of M
(see FIG. 16). Since the oxide layer 124 has been formed, if a
metal (e.g., copper) is deposited (formed as a film) on the surface
of the barrier metal film 123, wetting with the metal is
satisfactory, thus increasing adhesion.
[0543] After formation of the oxide layer 124 (see FIG. 16) on the
surface of the metal layer 123a (FIG. 16), the H.sub.2 gas is
supplied from the hydrogen gas nozzle 116 into the chamber 101, and
electromagnetic waves are shot from the plasma antenna 109 into the
chamber 101, thereby generating an H.sub.2 gas plasma. As a result,
hydroxyl groups (OH groups) are formed on the surface of the oxide
layer 124 (see FIG. 18). These hydroxyl groups increase
hydrophilicity, and can further enhance the adhesion of the metal
(copper) to be formed as a film.
[0544] It is permissible to omit the step of generating the H.sub.2
gas plasma to form hydroxyl groups (OH groups) on the surface of
the oxide layer 124 (see FIG. 18). It is also allowable to omit the
step of generating the O.sub.2 gas plasma to form the oxide layer
124 (FIG. 16) on the surface of the metal layer 123a (FIG. 16).
Furthermore, it is possible to superpose the metal layer 123a,
forming the barrier metal film 123. It is also possible to form the
barrier metal film 123 free from the metal layer 123a.
[0545] Beside, the same nozzle construction as in the tenth
embodiment (see FIG. 20) omitting the diluent gas nozzle 121 may be
adopted in a configuration for formation of the precursor 120 with
the exception of the etched member 148, opening portion 151,
passage 152, excitation chamber 153, plasma antenna 154, flow
controller 155, matching instrument 157, and power source 158.
Moreover, the same construction as in the eleventh embodiment (see
FIG. 22) having the excitation chamber 133, etc. instead of the
nozzle 114 may be adopted in other configuration for formation of
the precursor 120.
[0546] With the above-described barrier metal film production
apparatus, the barrier metal film 123 can be formed uniformly to a
small thickness. Consequently, the barrier metal film 123 can be
formed highly accurately at a high speed with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate 103.
[0547] Furthermore, the Cl.sub.2 gas plasma 156 is generated in the
excitation chamber 153 isolated from the chamber 101. Thus, the
substrate 103 is not exposed to the Cl.sub.2 gas plasma 156 any
more, and the substrate 103 becomes free from damage from the
Cl.sub.2 gas plasma 156.
[0548] As the means for generating the Cl.sub.2 gas plasma 156 in
the excitation chamber 153, namely, the means for exciting the
source gas to convert it into an excited source gas, it is possible
to use microwaves, laser, electron rays, or synchrotron radiation.
It is also permissible to form the precursor by heating the metal
filament to a high temperature. The construction for isolating the
Cl.sub.2 gas plasma 156 from the substrate 103 may be the provision
of the excitation chamber 153 in the passage 152, or may be other
construction, for example, the isolation of the chamber 101.
[0549] A barrier metal film production apparatus and a barrier
metal film production method according to the fourteenth embodiment
of the present invention will be described with reference to FIG.
27. FIG. 27 is a schematic side view of the barrier metal film
production apparatus according to the fourteenth embodiment of the
present invention. The same members as the members illustrated in
FIGS. 12 to 26 are assigned the same numerals, and duplicate
explanations are omitted.
[0550] In the barrier metal film production apparatus according to
the fourteenth embodiment, unlike the barrier metal film production
apparatus according to the ninth embodiment shown in FIG. 12, the
plasma antenna 9 is not provided around the cylindrical portion of
the chamber 101, but a metal member 107 is connected to a matching
instrument 110 and a power source 111 to receive power.
[0551] At the cylindrical portion of the chamber 101, there are
provided a nozzle 114 for supplying an NH.sub.3 gas into the
chamber 101, a diluent gas nozzle 121 for supplying an Ar gas into
the chamber 101, an oxygen gas nozzle 115 for supplying an O.sub.2
gas into the chamber 101, and a hydrogen gas nozzle 116 for
supplying an H.sub.2 gas into the chamber 101. By supplying power
to the metal member 107, an NH.sub.3 gas plasma, an Ar gas plasma,
an O.sub.2 gas plasma, and an H.sub.2 gas plasma are generated. To
generate the NH.sub.3 gas plasma, Ar gas plasma, O.sub.2 gas
plasma, and H.sub.2 gas plasma, a coiled plasma antenna may be
provided separately on the cylindrical portion of the chamber 101,
and the plasma antenna may be connected to a power source via a
matching instrument.
[0552] With the above-described barrier metal film production
apparatus, the source gas is supplied from the nozzle 112 into the
chamber 101, and electromagnetic waves are shot from the metal
member 107 into the chamber 101, whereby the Cl.sub.2 gas is
ionized to generate a Cl.sub.2 gas plasma (source gas plasma). The
Cl.sub.2 gas plasma causes an etching reaction to the metal member
107, producing a precursor (M.sub.xCl.sub.y) 120. At this time, the
metal member 107 is maintained at a predetermined temperature
(e.g., 200 to 400.degree. C.), which is higher than the temperature
of the substrate 103, by temperature control means (not shown).
[0553] Separately, the NH.sub.3 gas is supplied into the chamber
101 through the nozzle 114, and electromagnetic waves are shot from
the metal member 107 into the chamber 101. Thus, the NH.sub.3 gas
is ionized to generate an NH.sub.3 gas plasma, which causes a
reduction reaction with the precursor 120, forming a metal nitride
(MN). The metal nitride (MN) formed within the chamber 101 is
transported toward the substrate 103 controlled to a low
temperature, whereupon MN is formed into a film on the surface of
the substrate 103 to produce a barrier metal film 123 (see FIG.
13).
[0554] After the barrier metal film 123 has been formed, the Ar gas
is supplied from the diluent gas nozzle 121, and electromagnetic
waves are shot from the metal member 107 into the chamber 101,
thereby generating an Ar gas plasma. Generation of the Ar gas
plasma results in the etching of the barrier metal film 123 on the
surface of the substrate 103, thereby performing denitrification, a
treatment for removing the nitrogen atoms (N) of the MN in the
superficial layer of the barrier metal film 123 to decrease the
nitrogen content of the superficial layer relative to the interior
of the matrix of the barrier metal film 123.
[0555] Immediately before formation of the most superficial layer
of the barrier metal film 123 is completed, a trace amount of
O.sub.2 gas is supplied through the oxygen gas nozzle 115 into the
chamber 101. At the same time, electromagnetic waves are shot from
the metal member 107 into the chamber 101 to generate an O.sub.2
gas plasma. As a result, an oxide layer 124 (see FIG. 16) is formed
on the surface of a metal layer 123a composed substantially of M
(see FIG. 16). Since the oxide layer 124 has been formed, if a
metal (e.g., copper) is deposited (formed as a film) on the surface
of the barrier metal film 123, wetting with the metal is
satisfactory, thus increasing adhesion.
[0556] After formation of the oxide layer 124 (see FIG. 16) on the
surface of the metal layer 123a (FIG. 16), the H.sub.2 gas is
supplied from the hydrogen gas nozzle 116 into the chamber 101, and
electromagnetic waves are shot from the metal member 107 into the
chamber 101, thereby generating an H.sub.2 gas plasma. As a result,
hydroxyl groups (OH groups) are formed on the surface of the oxide
layer 124 (see FIG. 18). These hydroxyl groups increase
hydrophilicity, and can further enhance the adhesion of the metal
(copper) to be formed as a film.
[0557] It is permissible to omit the step of generating the H.sub.2
gas plasma to form hydroxyl groups (OH groups) on the surface of
the oxide layer 124 (see FIG. 18). It is also allowable to omit the
step of generating the O.sub.2 gas plasma to form the oxide layer
124 (FIG. 16) on the surface of the metal layer 123a (FIG. 16).
Furthermore, it is possible to superpose the metal layer 123a,
forming the barrier metal film 123. It is also possible to form the
barrier metal film 123 free from the metal layer 123a.
[0558] Beside, the same nozzle construction as in the tenth
embodiment (see FIG. 20) omitting the diluent gas nozzle 121 may be
adopted in the configuration for formation of the precursor 120
with the exception of the metal member 107, matching instrument
110, and power source 111. Moreover, the same construction as in
the eleventh embodiment (see FIG. 22) having the excitation chamber
133, etc. instead of the nozzle 114 may be adopted in other
configuration for formation of the precursor 120.
[0559] With the above-described barrier metal film production
apparatus, the barrier metal film 123 can be formed uniformly to a
small thickness. Consequently, the barrier metal film 123 can be
formed highly accurately at a high speed with excellent burial
properties in a very small thickness even to the interior of a tiny
depression, for example several hundred nanometers wide, which has
been provided in the substrate 103.
[0560] Furthermore, the metal member 107 itself is applied as an
electrode for plasma generation. Thus, there is no need for a
plasma antenna around the cylindrical portion of the chamber 101,
and the degree of freedom of the surrounding construction can be
increased.
[0561] A metal film production method and a metal film production
apparatus according to the present invention will be described with
reference to the accompanying drawings. The metal film production
method of the present invention involves a treatment for enhancing
adhesion to a barrier metal layer of, for example, tantalum nitride
(TaN) formed on the surface of a substrate in order to prevent
diffusion into the substrate.
[0562] According to a first aspect of the present invention, the
barrier metal film of TaN is flattened by etching its surface with
a diluent gas (e.g., argon: Ar) plasma. Further, the nitrogen atoms
in the superficial layer of the barrier metal film are removed
using Ar.sup.+, thereby decreasing the nitrogen content of the
superficial layer relative to the interior of the matrix of the
barrier metal film (this surface treatment will be referred to
hereinafter as denitrification). The denitrification brings a state
in which a film of a metal (Ta) is substantially formed in the
superficial layer of the single-layer barrier metal film. In this
manner, a barrier metal film is produced highly efficiently and
reliably in a thin film condition, by use of an inexpensive gas
having a high mass number, with the diffusion of the metal being
prevented and the adhesion to the metal being maintained.
[0563] Depending on the material for the barrier metal film, it is
possible to perform only the treatment for flattening the surface
by etching it with the diluent gas (e.g., argon: Ar) plasma while
controlling the power of the plasma and the energization time. By
so doing, adhesion can be improved. As the barrier metal film, not
only TaN, but tungsten nitride or titanium nitride can be applied.
As the diluent gas, not only Ar, but helium, krypton, or neon can
be applied.
[0564] The concrete construction of the apparatus according to the
first aspect may be as follows: A source gas containing a halogen
(e.g., a chlorine-containing gas) is supplied to the interior of a
chamber between a substrate and an etched member made of Ta, and an
atmosphere within the chamber is converted into a plasma to
generate a chlorine gas plasma. The etched member is etched with
the chlorine gas plasma to form a precursor comprising the Ta
component contained in the etched member and the chlorine gas.
Also, a nitrogen-containing gas is excited, and TaN, a metal
nitride, is formed upon reaction between the excited nitrogen and
the precursor. The resulting TaN is formed as a film on the
substrate kept at a low temperature to form a barrier metal film.
This process is performed using a barrier metal film production
apparatus. After the barrier metal film is produced in this manner,
an Ar gas plasma is generated within the chamber to carry out
etching and denitrification.
[0565] Alternatively, the concrete apparatus construction of the
first aspect may be as follows: A chlorine gas is supplied into a
chamber, and an atmosphere within the chamber is converted into a
plasma to generate a chlorine gas plasma. An etched member made of
copper (Cu) is etched with the chlorine gas plasma to form a
precursor comprising the Cu component contained in the etched
member and chlorine inside the chamber. The temperature of the
substrate is rendered lower than the temperature of the etched
member to form a film of the Cu component of the precursor on the
substrate. This process is performed by use of a metal film
production apparatus. Before the substrate having the barrier metal
film of TaN formed thereon is housed in the chamber and the Cu
component is formed as a film thereon, the Ar gas plasma is
generated to carry out etching and denitrification.
[0566] FIG. 28 shows an outline of an apparatus for a film
formation process for forming a Cu film. As shown, for example, in
FIG. 28, a handling robot 401 for transporting a substrate is
installed at a central site. Around the robot 401, there are
provided an accommodation device 402 for accommodating the
substrate, a barrier metal CVD 403 for forming a barrier metal film
on the substrate, and a Cu-CVD 404 for forming a Cu film. The robot
401 transports the substrate from the accommodation device 402 to
the barrier metal CVD 403, from the barrier metal CVD 403 to the
Cu-CVD 404, and from the Cu-CVD 404 to the accommodation device
402. With such an apparatus for the film formation process, the
metal film production apparatus according to the first aspect is
provided in the Cu-CVD 404.
[0567] The metal film production apparatus in the first aspect may
be provided in the barrier metal CVD 403, or a dedicated metal film
production apparatus according to the first aspect may be provided
around the robot 401.
[0568] Embodiments of the metal film production method and metal
film production apparatus according to the first aspect will be
described with reference to the accompanying drawings, with the
provision of the apparatus in the Cu-CVD 404 being taken as an
example.
[0569] FIG. 29 is a schematic side view of a metal film production
apparatus according to the fifteenth embodiment of the present
invention. FIG. 30 is a schematic construction drawing showing
another example of diluent gas supply means. FIG. 31 shows the
sectional status of a substrate illustrating a barrier metal film.
FIGS. 32 and 33 show the concept status of a barrier metal film in
denitrification. The illustrated metal film production apparatus
corresponds to the Cu-CVD 404 shown in FIG. 1.
[0570] As shown in FIG. 29, a support platform 202 is provided near
the bottom of a cylindrical chamber 201 made of, say, a ceramic (an
insulating material), and a substrate 203 is placed on the support
platform 202. Temperature control means 206, as control means,
equipped with a heater 204 and refrigerant flow-through means 205
is provided in the support platform 202 so that the support
platform 202 is controlled to a predetermined temperature (for
example, a temperature at which the substrate 203 is maintained at
100 to 200.degree. C.) by the temperature control means 206.
[0571] An upper surface of the chamber 201 is an opening, which is
closed with a copper plate member 207, as an etched member, made of
a metal. The interior of the chamber 201 closed with the copper
plate member 207 is maintained at a predetermined pressure by a
vacuum device 208. A coiled plasma antenna 209 is provided around a
cylindrical portion of the chamber 201. A matching instrument 210
and a power source 211 are connected to the plasma antenna 209 to
supply power. Plasma generation means is constituted by the plasma
antenna 209, matching instrument 210 and power source 211.
[0572] Nozzles 212 for supplying a source gas (a Cl.sub.2 gas
diluted with He or Ar to a chlorine concentration of .ltoreq.50%,
preferably about 10%), containing chlorine as a halogen, to the
interior of the chamber 201 are connected to the cylindrical
portion of the chamber 201 above the support platform 202. The
nozzle 212 is fed with the source gas via a flow controller 213.
Within the chamber 201, the source gas is fed toward the copper
plate member 207 (source gas supply means). Fluorine (F), bromine
(Br) or iodine (I) can also be applied as the halogen to be
incorporated into the source gas.
[0573] With the above-described metal film production apparatus,
the source gas is supplied from the nozzles 212 into the chamber
201, and electromagnetic waves are shot from the plasma antenna 209
into the chamber 201, whereby the Cl.sub.2 gas is ionized to
generate a Cl.sub.2 gas plasma (source gas plasma) 214. The
pressure inside the chamber 201, set by the vacuum device 208, is
such a high pressure that the plasma density of the Cl.sub.2 gas
plasma 214 will be higher toward the wall surface within the
chamber 201. As means for increasing the plasma density of the
Cl.sub.2 gas plasma 214 on the wall surface side, the frequency of
the power source 211 may be increased.
[0574] The Cl.sub.2 gas plasma 214 causes an etching reaction to
the copper plate member 207, forming a precursor (Cu.sub.xCl.sub.y)
215. At this time, the copper plate member 207 is maintained by the
Cl.sub.2 gas plasma 214 at a predetermined temperature (e.g., 200
to 400.degree. C.) which is higher than the temperature of the
substrate 203.
[0575] The precursor (Cu.sub.xCl.sub.y) 215 formed within the
chamber 201 is transported toward the substrate 203 controlled to a
lower temperature than the temperature of the copper plate member
207. The precursor (Cu.sub.xCl.sub.y) 215 transported toward the
substrate 203 is converted into only Cu ions by a reduction
reaction, and directed at the substrate 203 to form a thin Cu film
216 on the surface of the substrate 203.
[0576] The reactions involved can be expressed by:
2Cu+Cl.sub.2.fwdarw.2CuCl.fwdarw.2Cu.dwnarw.+Cl.sub.2.uparw.
[0577] The gases and the etching products that have not been
involved in the reaction are exhausted through an exhaust port
217.
[0578] The source gas has been described, with the Cl.sub.2 gas
diluted with, say, He or Ar taken as an example. However, the
Cl.sub.2 gas can be used alone, or an HCl gas can also be applied.
If the HCl gas is applied, an HCl gas plasma is generated as the
source gas plasma. However, the precursor formed by etching of the
copper plate member 207 is Cu.sub.xCl.sub.y. Thus, the source gas
may be any gas containing chlorine, and a gas mixture of an HCl gas
and a Cl.sub.2 gas is also usable. The material for the copper
plate member 207 is not limited to copper (Cu), but it is possible
to use a halide forming metal, preferably a chloride forming metal,
such as Ag, Au, Pt, Ta, Ti or W. In this case, the resulting
precursor is a halide (chloride) of Ag, Au, Pt, Ta, Ti or W, and
the thin film formed on the surface of the substrate 203 is that of
Ag, Au, Pt, Ta, Ti or W.
[0579] Since the metal film production apparatus constructed as
above uses the Cl.sub.2 gas plasma (source gas plasma) 214, the
reaction efficiency is markedly increased, and the speed of film
formation is fast. Since the Cl.sub.2 gas is used as the source
gas, moreover, the cost can be markedly decreased. Furthermore, the
substrate 203 is controlled to a lower temperature than the
temperature of the copper plate member 207 by use of the
temperature control means 206. Thus, the amounts of impurities,
such as chlorine, remaining in the thin Cu film 216 can be
decreased, so that a high quality thin Cu film 216 can be
produced.
[0580] Furthermore, the plasma density of the Cl.sub.2 gas plasma
214 is higher on the wall surface side. Thus, a high density
Cl.sub.2 gas plasma 214 can be generated, thus making the film
formation speed remarkably high. Even when a large chamber 201 is
used, namely, even for a large substrate 203, a thin Cu film 216
can be formed.
[0581] Diluent gas nozzles 221 are provided, as diluent gas supply
means, for supplying an Ar gas, as a diluent gas, to the interior
of the chamber 201 above the surface of the substrate 203. The Ar
gas is supplied from the diluent gas nozzle 221, and
electromagnetic waves are shot from the plasma antenna 209 into the
chamber 201, whereby the Ar gas is ionized to generate an Ar gas
plasma (surface treatment plasma generation means). A bias power
source 220 is connected to the support platform 202, and a bias
voltage is applied thereto for supporting the substrate 203 on the
support platform 202.
[0582] In connection with the diluent gas supply means, when the Ar
gas is applied as a diluent gas for the Cl.sub.2 gas, a control
valve 222 may be provided at the site of merger between the source
gas (Cl.sub.2 gas) and the diluent gas (Ar gas), as shown in FIG.
30. By so doing, the Cl.sub.2 gas may be stopped during generation
of the Ar gas plasma, and only the Ar gas may be supplied through
the nozzle 212. According to this construction, there is no need
for the provision of the diluent gas nozzle 221, presenting
advantage in space.
[0583] On the surface of the substrate 203 carried into the
above-described metal film production apparatus, the barrier metal
film 223 of TaN has been formed, as shown in FIG. 31. By generating
the Ar gas plasma, the barrier metal film 223 on the surface of the
substrate 203 is etched with Ar.sup.+ to flatten the barrier metal
film 223. Also, denitrification is performed in which the nitrogen
atoms (N) of the TaN in the superficial layer of the barrier metal
film 223 are removed to decrease the nitrogen content of the
superficial layer relative to the interior of the matrix of the
barrier metal film 223. As the barrier metal film 223, WN or TiN
can also be applied.
[0584] The flattening of the barrier metal film 223 and its
denitrification upon generation of the Ar gas plasma are carried
out before formation of the aforementioned thin Cu film 216. That
is, when the substrate 203 having the barrier metal film 223 of TaN
formed thereon is received onto the support platform 202, the Ar
gas is supplied from the diluent gas nozzles 221 prior to the
formation of the thin Cu film 216. At the same time,
electromagnetic waves are shot from the plasma antenna 209 into the
chamber 201 to generate an Ar gas plasma.
[0585] Upon generation of the Ar gas plasma, the surface of the
barrier metal film 223 is etched with Ar.sup.+ for flattening. As
shown in FIG. 32, the barrier metal film 223 comprises Ta and N in
an amorphous state. In this state, N of a lower mass is
preferentially removed by Ar.sup.+, so that the superficial layer
of the barrier metal film 223 (for example, up to a half,
preferably about a third, of the entire film thickness) is
denitrified. As a result, there emerges the barrier metal film 223
of a two-layer structure, a metal layer 223a substantially composed
of Ta, and a TaN layer 223b, as shown in FIG. 33. On this occasion,
the entire film thickness of the barrier metal film 223 remains the
film thickness having the single layer.
[0586] To increase the amount of Ar.sup.+ generated, control is
exercised for increasing the voltage applied to the plasma antenna
209, or for increasing the flow rate of the Ar gas. To draw in
Ar.sup.+ toward the substrate 203, the bias power source 220 is
controlled to lower the potential of the substrate 203 to the
negative side. For this purpose, schedule control is easy to effect
according to a preset schedule. While denitrification is taking
place, the depth distribution of the metal layer 223a is measured.
Control over the voltage of the plasma antenna 209 or the flow rate
of the Ar gas, or control of the bias power source 220 can be
exercised based on the results of the measurement.
[0587] After denitrification is performed, the sites of N removed
become voids, creating irregularities on the atomic level. Thus, it
is preferred to densify the remaining Ta atoms. To make the Ta
atoms dense, the present embodiment uses a heater 204 to heat the
substrate 203 for heat treatment, thereby densifying the Ta atoms
(densification means). The heat treatment is performed to such a
degree that the atoms do not take a crystal structure (the atoms
maintain an amorphous state). The densification means may be plasma
heating for heating the substrate 203.
[0588] With the foregoing metal film production apparatus, the Ar
gas plasma is generated within the chamber 201 accommodating the
substrate 203 having the barrier metal film 223 formed thereon. The
Ar gas plasma etches the barrier metal film 223 to flatten it. The
Ar gas plasma also removes the nitrogen atoms to denitrify the
barrier metal film 223. Thus, there appears the barrier metal film
223 with a two-layer structure, i.e., the metal layer 223a composed
substantially of Ta and the TaN layer 223b. Moreover, the entire
film thickness can remain the single-layer film thickness. Hence,
the barrier metal film 223 can be in a two-layer structure state
without becoming thick, and yet the metal layer 223a can retain
adhesion to the thin Cu film 216, while the TaN layer 223b can
prevent diffusion of Cu. Consequently, the thin Cu film 216 can be
formed, with satisfactory adhesion, without diffusion into the
substrate 203, so that the Cu wiring process can be stabilized.
[0589] A barrier metal film production method and a barrier metal
film production apparatus according to the sixteenth embodiment of
the present invention will be described with reference to FIGS. 34
to 36. FIG. 34 is a schematic side view of the metal film
production apparatus according to the sixteenth embodiment of the
present invention. FIG. 35 is a view taken along the arrowed line
VIII-VIII of FIG. 34. FIG. 36 is a view taken along the arrowed
line IX-IX of FIG. 35. The same members as the members illustrated
in FIG. 29 are assigned the same numerals, and duplicate
explanations are omitted.
[0590] An upper surface of the chamber 201 is an opening, which is
closed with a disk-shaped ceiling board 230 made of an insulating
material (for example, a ceramic). An etched member 231 made of a
metal (copper, Cu) is interposed between the opening at the upper
surface of the chamber 201 and the ceiling board 230. The etched
member 231 is provided with a ring portion 232 fitted to the
opening at the upper surface of the chamber 201. A plurality of (12
in the illustrated embodiment) protrusions 233, which extend close
to the center in the diametrical direction of the chamber 201 and
have the same width, are provided in the circumferential direction
on the inner periphery of the ring portion 232.
[0591] The protrusions 233 are integrally or removably attached to
the ring portion 232. Notches (spaces) 235 formed between the
protrusions 233 are present between the ceiling board 230 and the
interior of the chamber 201. The ring portion 232 is earthed, and
the plural protrusions 233 are electrically connected together and
maintained at the same potential. Temperature control means (not
shown), such as a heater, is provided in the etched member 231 to
control the temperature of the etched member 231 to 200 to
400.degree. C., for example.
[0592] Second protrusions shorter in the diametrical direction than
the protrusions 233 can be arranged between the protrusions 233.
Moreover, short protrusions can be arranged between the protrusion
233 and the second protrusion. By so doing, the area of copper, an
object to be etched, can be secured, with an induced current being
suppressed.
[0593] A planar winding-shaped plasma antenna 234, for converting
the atmosphere inside the chamber 201 into a plasma, is provided
above the ceiling board 230. The plasma antenna 234 is formed in a
planar ring shape parallel to the surface of the ceiling board 230.
A matching instrument 210 and a power source 211 are connected to
the plasma antenna 234 to supply power. The etched member 231 has
the plurality of protrusions 233 provided in the circumferential
direction on the inner periphery of the ring portion 232, and
includes the notches (spaces) 235 formed between the protrusions
233. Thus, the protrusions 233 are arranged between the substrate
203 and the ceiling board 230 in a discontinuous state relative to
the flowing direction of electricity in the plasma antenna 234.
[0594] With the above-described metal film production apparatus,
the source gas is supplied through the nozzles 212 to the interior
of the chamber 201, and electromagnetic waves are shot from the
plasma antenna 234 into the chamber 201. As a result, the Cl.sub.2
gas is ionized to generate a Cl.sub.2 gas plasma (source gas
plasma) 214. The etched member 231, an electric conductor, is
present below the plasma antenna 234. However, the Cl.sub.2 gas
plasma 214 occurs stably between the etched member 231 and the
substrate 203, namely, below the etched member 231, under the
following action:
[0595] The action by which the Cl.sub.2 gas plasma 214 is generated
below the etched member 231 will be described. As shown in FIG. 36,
a flow A of electricity in the plasma antenna 234 of the planar
ring shape crosses the protrusions 233. At this time, an induced
current B occurs on the surface of the protrusion 233 opposed to
the plasma antenna 234. Since the notches (spaces) 235 are present
in the etched member 231, the induced current B flows onto the
lower surface of each protrusion 233, forming a flow a in the same
direction as the flow A of electricity in the plasma antenna 234
(Faraday shield).
[0596] When the etched member 231 is viewed from the substrate 203,
therefore, there is no flow in a direction in which the flow A of
electricity in the plasma antenna 234 is canceled out. Furthermore,
the ring portion 232 is earthed, and the protrusions 233 are
maintained at the same potential. Thus, even though the etched
member 231, an electric conductor, exists, the electromagnetic wave
is reliably thrown from the plasma antenna 234 into the chamber
201. Consequently, the Cl.sub.2 gas plasma 214 is stably generated
below the etched member 231.
[0597] The Cl.sub.2 gas plasma 214 causes an etching reaction to
the etched member 231 made of copper, forming a precursor
(Cu.sub.xCl.sub.y) 215. At this time, the etched member 231 is
maintained by the Cl.sub.2 gas plasma 214 at a predetermined
temperature (e.g., 200 to 400.degree. C.) which is higher than the
temperature of the substrate 203. The precursor (Cu.sub.xCl.sub.y)
215 formed within the chamber 201 is transported toward the
substrate 203 controlled to a lower temperature than the
temperature of the etched member 231. The precursor
(Cu.sub.xCl.sub.y) 215 transported toward the substrate 203 is
converted into only Cu ions by a reduction reaction, and directed
at the substrate 203 to form a thin Cu film 216 on the surface of
the substrate 203.
[0598] The reactions involved are the same as in the aforementioned
fifteenth embodiment. The gases and the etching products, which
have not been involved in the reactions, are exhausted through an
exhaust port 217.
[0599] Since the metal film production apparatus constructed as
above uses the Cl.sub.2 gas plasma (source gas plasma) 214, the
reaction efficiency is markedly increased, and the speed of film
formation is fast. Since the Cl.sub.2 gas is used as the source
gas, moreover, the cost can be markedly decreased. Furthermore, the
substrate 203 is controlled to a lower temperature than the
temperature of the etched member 231 by use of the temperature
control means 206. Thus, the amounts of impurities, such as
chlorine, remaining in the thin Cu film 216 can be decreased, so
that a high quality thin Cu film 216 can be produced.
[0600] In addition, the etched member 231 has the plurality of
protrusions 233 provided in the circumferential direction on the
inner periphery of the ring portion 232, and includes the notches
(spaces) 235 formed between the protrusions 233. Thus, the induced
currents generated in the etched member 231 flow in the same
direction as the flowing direction of electricity in the plasma
antenna 234, when viewed from the substrate 203. Therefore, even
though the etched member 231, an electric conductor, exists below
the plasma antenna 234, the electromagnetic waves are reliably
thrown from the plasma antenna 234 into the chamber 201.
Consequently, the Cl.sub.2 gas plasma 214 can be stably generated
below the etched member 231.
[0601] Diluent gas nozzles 221 are provided, as diluent gas supply
means, for supplying an Ar gas, as a diluent gas, to the interior
of the chamber 201 above the surface of the substrate 203. The Ar
gas is supplied from the diluent gas nozzle 221, and
electromagnetic waves are shot from the plasma antenna 234 into the
chamber 201, whereby the Ar gas is ionized to generate an Ar gas
plasma (surface treatment plasma generation means). A bias power
source 220 is connected to the support platform 202, and a bias
voltage is applied thereto for supporting the substrate 203 on the
support platform 202.
[0602] On the surface of the substrate 203 admitted into the
above-described metal film production apparatus, the barrier metal
film 223 of TaN has been formed, as shown in FIG. 31. By generating
the Ar gas plasma, the barrier metal film 223 on the surface of the
substrate 203 is etched with Ar.sup.+ to flatten the barrier metal
film 223. Also, denitrification is performed in which the nitrogen
atoms (N) of the TaN in the superficial layer of the barrier metal
film 223 are removed to decrease the nitrogen content of the
superficial layer relative to the interior of the matrix of the
barrier metal film 223. As the barrier metal film 223, WN or TiN
can also be applied.
[0603] The flattening of the barrier metal film 223 and its
denitrification upon generation of the Ar gas plasma are carried
out before formation of the aforementioned thin Cu film 216. The
details of the flattening of the barrier metal film 223, and the
details of the denitrification of this film are the same as in the
fifteenth embodiment, and relevant explanations are omitted.
[0604] With the foregoing metal film production apparatus, as in
the fifteenth embodiment, the barrier metal film 223 can be in a
two-layer structure state without becoming thick, and yet the metal
layer 223a can retain adhesion to the thin Cu film 216, while the
TaN layer 223b can prevent diffusion of Cu. Consequently, the thin
Cu film 216 can be formed, with satisfactory adhesion, without
diffusion into the substrate 203, so that the Cu wiring process can
be stabilized.
[0605] A metal film production method and a metal film production
apparatus according to the seventeenth embodiment of the present
invention will be described with reference to FIG. 37. FIG. 37 is a
schematic side view of the metal film production apparatus
according to the seventeenth embodiment of the present invention.
The same members as the members illustrated in FIGS. 2 and 7 are
assigned the same numerals, and duplicate explanations are
omitted.
[0606] The opening of an upper portion of a chamber 201 is closed
with a ceiling board 230, for example, made of a ceramic (an
insulating material). An etched member 241 made of a metal (copper,
Cu) is provided on a lower surface of the ceiling board 230, and
the etched member 241 is of a quadrangular pyramidal shape.
Slit-shaped opening portions 242 are formed at a plurality of
locations (for example, four locations) in the periphery of an
upper part of the cylindrical portion of the chamber 201, and one
end of a tubular passage 243 is fixed to each of the opening
portions 242. A tubular excitation chamber 244 made of an insulator
is provided halfway through the passage 243, and a coiled plasma
antenna 245 is provided around the excitation chamber 244. The
plasma antenna 245 is connected to a matching instrument 248 and a
power source 249 to receive power. The plasma antenna 245, the
matching instrument 248 and the power source 249 constitute plasma
generation means.
[0607] A flow controller 246 is connected to the other end of the
passage 243, and a chlorine-containing source gas (a Cl.sub.2 gas
diluted with He or Ar to a chlorine concentration of .ltoreq.50%,
preferably about 10%) is supplied into the passage 243 via the flow
controller 246. By shooting electromagnetic waves from the plasma
antenna 245 into the excitation chamber 244, the Cl.sub.2 gas is
ionized to generate a Cl.sub.2 gas plasma (source gas plasma) 247.
Because of the generation of the Cl.sub.2 gas plasma 247, excited
chlorine is fed into the chamber 201 through the opening portion
42, whereupon the etched member 241 is etched with excited
chlorine.
[0608] With the above-described metal film production apparatus,
the source gas is supplied into the passage 243 via the flow
controller 246 and fed into the excitation chamber 244. By shooting
electromagnetic waves from the plasma antenna 245 into the
excitation chamber 244, the Cl.sub.2 gas is ionized to generate a
Cl.sub.2 gas plasma (source gas plasma) 247. Since a predetermined
differential pressure has been established between the pressure
inside the chamber 201 and the pressure inside the excitation
chamber 244 by the vacuum device 208, the excited chlorine of the
Cl.sub.2 gas plasma 247 in the excitation chamber 244 is fed to the
etched member 241 inside the chamber 201 through the opening
portion 242. The excited chlorine causes an etching reaction to the
etched member 241, forming a precursor (M.sub.xCl.sub.y) 215 inside
the chamber 201.
[0609] At this time, the etched member 241 is maintained at a
predetermined temperature (e.g., 200 to 400.degree. C.), which is
higher than the temperature of the substrate 203, by a heater 250.
The precursor (Cu.sub.xCl.sub.y) 215 formed inside the chamber 201
is transported toward the substrate 203 controlled to a lower
temperature than the temperature of the etched member 241. The
precursor (Cu.sub.xCl.sub.y) 215 transported toward the substrate
203 is converted into only Cu ions by a reduction reaction, and
directed at the substrate 203 to form a thin Cu film 216 on the
surface of the substrate 203.
[0610] The reactions on this occasion are the same as in the
aforementioned fifteenth embodiment, and the gases and etching
products that have not been involved in the reactions are exhausted
through an exhaust port 217.
[0611] With the above-described metal film production apparatus,
the Cl.sub.2 gas plasma 247 is generated in the excitation chamber
244 isolated from the chamber 201. Thus, the substrate 203 is not
exposed to the plasma any more, and the substrate 203 becomes free
from damage from the plasma. As the means for generating the
Cl.sub.2 gas plasma 247 in the excitation chamber 244, it is
possible to use microwaves, laser, electron rays, or synchrotron
radiation. It is also permissible to form the precursor by heating
a metal filament to a high temperature. The construction for
isolating the Cl.sub.2 gas plasma 247 from the substrate 203 may be
the provision of the excitation chamber 244 in the passage 243, or
may be other construction, for example, the isolation of the
chamber 201.
[0612] The above-described metal film production apparatus is
provided with diluent gas nozzles 221, as diluent gas supply means,
for supplying an Ar gas, as a diluent gas, to the interior of the
chamber 201 above the surface of the substrate 203. A coil-shaped
surface treatment plasma antenna 236 is provided on a trunk portion
of the chamber 201. A matching instrument 237 and a power source
238 are connected to the surface treatment plasma antenna 236 to
supply power. The Ar gas is supplied from the diluent gas nozzles
221, and electromagnetic waves are shot from the plasma antenna 236
into the chamber 201, whereby the Ar gas is ionized to generate an
Ar gas plasma (surface treatment plasma generation means). A bias
power source 220 is connected to the support platform 202, and a
bias voltage is applied thereto for supporting the substrate 203 on
the support platform 202.
[0613] On the surface of the substrate 203 admitted into the
above-described metal film production apparatus, a barrier metal
film 223 of TaN has been formed, as shown in FIG. 31. By generating
the Ar gas plasma, the barrier metal film 223 on the surface of the
substrate 203 is etched with Ar.sup.+ to flatten the barrier metal
film 223. Also, denitrification is performed in which the nitrogen
atoms (N) of the TaN in the superficial layer of the barrier metal
film 223 are removed to decrease the nitrogen content of the
superficial layer relative to the interior of the matrix of the
barrier metal film 223. As the barrier metal film 223, WN or TiN
can also be applied.
[0614] The flattening of the barrier metal film 223 and its
denitrification upon generation of the Ar gas plasma are carried
out before formation of the aforementioned thin Cu film 216. The
details of the flattening of the barrier metal film 223 and the
denitrification of this film are the same as in the fifteenth
embodiment, and relevant explanations are omitted.
[0615] With the foregoing metal film production apparatus, the
barrier metal film 223 can be in a two-layer structure state
without becoming thick, and yet the metal layer 223a (see FIG. 33)
can retain adhesion to the thin Cu film 216, while the TaN layer
223b (see FIG. 33) can prevent diffusion of Cu. Consequently, the
thin Cu film 216 can be formed, with satisfactory adhesion, without
diffusion into the substrate 203, so that the Cu wiring process can
be stabilized.
[0616] A barrier metal film production method and a barrier metal
film production apparatus according to the eighteenth embodiment of
the present invention will be described with reference to FIG. 38.
FIG. 38 is a schematic side view of the metal film production
apparatus according to the eighteenth embodiment of the present
invention. The same members as the members illustrated in FIGS. 29,
34 and 37 are assigned the same numerals, and duplicate
explanations are omitted.
[0617] Compared with the metal film production apparatus of the
fifteenth embodiment shown in FIG. 29, the plasma antenna 209 is
not provided around the cylindrical portion of the chamber 201, and
the matching instrument 210 and power source 211 are connected to
the copper plate member 207 for supply of power to the copper plate
member 207. With the above-described metal film production
apparatus, the source gas is supplied from the nozzles 212 into the
chamber 201, and electromagnetic waves are shot from the copper
plate member 207 into the chamber 201, the Cl.sub.2 gas is ionized
to generate a Cl.sub.2 gas plasma (source gas plasma) 214. The
Cl.sub.2 gas plasma 214 causes an etching reaction to the copper
plate member 207, forming a precursor (Cu.sub.xCl.sub.y) 215. At
this time, the copper plate member 207 is maintained at a
predetermined temperature (e.g., 200 to 400.degree. C.), which is
higher than the temperature of the substrate 203, by the Cl.sub.2
gas plasma 214.
[0618] The precursor (Cu.sub.xCl.sub.y) 215 formed inside the
chamber 201 is transported toward the substrate 203 controlled to a
lower temperature than the temperature of the copper plate member
207. The precursor (Cu.sub.xCl.sub.y) 215 transported toward the
substrate 203 is converted into only Cu ions by a reduction
reaction, and directed at the substrate 203 to form a thin Cu film
216 on the surface of the substrate 203. The reactions on this
occasion are the same as in the aforementioned fifteenth
embodiment, and the gases and etching products that have not been
involved in the reactions are exhausted through an exhaust port
217.
[0619] With the above-described metal film production apparatus,
the copper plate member 207 itself is applied as an electrode for
plasma generation. Thus, the plasma antenna 209 intended to prepare
the thin Cu film 216 need not be provided around the cylindrical
portion of the chamber 201.
[0620] The above-described metal film production apparatus is
provided with diluent gas nozzles 221, as diluent gas supply means,
for supplying an Ar gas, as a diluent gas, to the interior of the
chamber 201 above the surface of the substrate 203. Supply of the
source gas through the nozzles 212 is cut off, the Ar gas is
supplied from the diluent gas nozzles 221, and electromagnetic
waves are shot from the copper plate member 207 into the chamber
201. By so doing, the Ar gas is ionized to generate an Ar gas
plasma (surface treatment plasma generation means). A bias power
source 220 is connected to the support platform 202, and a bias
voltage is applied thereto for supporting the substrate 203 on the
support platform 202.
[0621] On the surface of the substrate 203 admitted into the
above-described metal film production apparatus, a barrier metal
film 223 of TaN has been formed, as shown in FIG. 31. By generating
the Ar gas plasma, the barrier metal film 223 on the surface of the
substrate 203 is etched with Ar.sup.+ to flatten the barrier metal
film 223. Also, denitrification is performed in which the nitrogen
atoms (N) of the TaN in the superficial layer of the barrier metal
film 223 are removed to decrease the nitrogen content of the
superficial layer relative to the interior of the matrix of the
barrier metal film 223. As the barrier metal film 223, WN or TiN
can also be applied. As the surface treatment plasma generation
means, it is permissible to provide a coiled surface treatment
plasma antenna on the trunk portion of the chamber 201, and supply
power via a matching instrument and a power source, thereby
generating an Ar gas plasma.
[0622] The flattening of the barrier metal film 223 and its
denitrification upon generation of the Ar gas plasma are carried
out before formation of the aforementioned thin Cu film 216. The
details of the flattening of the barrier metal film 223 and the
denitrification of this film are the same as in the fifteenth
embodiment, and relevant explanations are omitted.
[0623] With the foregoing metal film production apparatus, as in
the fifteenth embodiment, the barrier metal film 223 can be in a
two-layer structure state without becoming thick, and the metal
layer 223a (see FIG. 33) can retain adhesion to the thin Cu film
216, while the TaN layer 223b (see FIG. 33) can prevent diffusion
of Cu. Consequently, the thin Cu film 216 can be formed, with
satisfactory adhesion, without diffusion into the substrate 203, so
that the Cu wiring process can be stabilized.
[0624] Next, an example in which embodiments of the metal film
production method and metal film production apparatus according to
the first aspect are provided in the barrier metal CVD 403 will be
described with reference to FIG. 39. FIG. 39 schematically shows a
side view of the metal film production apparatus according to the
nineteenth embodiment of the present invention.
[0625] As shown in the drawing, a support platform 252 is provided
near the bottom of a cylindrical chamber 251 made of, say, a
ceramic (an insulating material), and a substrate 253 is placed on
the support platform 252. Temperature control means 256 equipped
with a heater 254 and refrigerant flow-through means 255 is
provided in the support platform 252 so that the support platform
252 is controlled to a predetermined temperature (for example, a
temperature at which the substrate 253 is maintained at 100 to
200.degree. C.) by the temperature control means 256.
[0626] An upper surface of the chamber 251 is an opening, which is
closed with a metal member 257, as an etched member, made of a
metal (e.g., W, Ti, Ta, or TiSi). The interior of the chamber 251
closed with the metal member 257 is maintained at a predetermined
pressure by a vacuum device 258. A plasma antenna 259, as a coiled
winding antenna of plasma generation means, is provided around a
cylindrical portion of the chamber 251. A matching instrument 260
and a power source 261 are connected to the plasma antenna 259 to
supply power.
[0627] Nozzles 262 for supplying a source gas (a Cl.sub.2 gas
diluted with He or Ar to a chlorine concentration of .ltoreq.50%,
preferably about 10%), containing chlorine as a halogen, to the
interior of the chamber 251 are connected to the cylindrical
portion of the chamber 251 below the metal member 257. The nozzle
262 is open toward the horizontal, and is fed with the source gas
via a flow controller 263 (halogen gas supply means). Fluorine (F),
bromine (Br) or iodine (I) can also be applied as the halogen to be
incorporated into the source gas.
[0628] Slit-shaped opening portions 264 are formed at a plurality
of locations (for example, four locations) in the periphery of a
lower part of the cylindrical portion of the chamber 251, and one
end of a tubular passage 265 is fixed to each of the opening
portions 264. A tubular excitation chamber 266 made of an insulator
is provided halfway through the passage 265, and a coiled plasma
antenna 267 is provided around the excitation chamber 266. The
plasma antenna 267 is connected to a matching instrument 268 and a
power source 269 to receive power. The plasma antenna 267, the
matching instrument 268 and the power source 269 constitute
excitation means. A flow controller 270 is connected to the other
end of the passage 265, and an ammonia gas (NH.sub.3 gas) as a
nitrogen-containing gas is supplied into the passage 265 via the
flow controller 270.
[0629] With the above-described metal film production apparatus,
the source gas is supplied through the nozzles 262 to the interior
of the chamber 251, and electromagnetic waves are shot from the
plasma antenna 259 into the chamber 251. As a result, the Cl.sub.2
gas is ionized to generate a Cl.sub.2 gas plasma (source gas
plasma) 271. The Cl.sub.2 gas plasma 271 causes an etching reaction
to the metal member 257, forming a precursor (M.sub.xCl.sub.y: M is
a metal such as W, Ti, Ta or TiSi) 272.
[0630] Separately, the NH.sub.3 gas is supplied into the passage
265 via the flow controller 270 and fed into the excitation chamber
266. By shooting electromagnetic waves from the plasma antenna 267
into the excitation chamber 266, the NH.sub.3 gas is ionized to
generate an NH.sub.3 gas plasma 263. Since a predetermined
differential pressure has been established between the pressure
inside the chamber 251 and the pressure inside the excitation
chamber 266 by the vacuum device 258, the excited ammonia of the
NH.sub.3 gas plasma 273 in the excitation chamber 266 is fed to the
precursor (M.sub.xCl.sub.y) 272 inside the chamber 251 through the
opening portion 264.
[0631] That is, excitation means for exciting the
nitrogen-containing gas in the excitation chamber 266 isolated from
the chamber 251 is constructed. Because of this construction, the
metal component of the precursor (M.sub.xCl.sub.y) 272 and ammonia
react to form a metal nitride (MN) (formation means). At this time,
the metal member 257 and the excitation chamber 266 are maintained
by the plasmas at predetermined temperatures (e.g., 200 to
400.degree. C.) which are higher than the temperature of the
substrate 253.
[0632] The metal nitride (MN) formed within the chamber 251 is
transported toward the substrate 253 controlled to a low
temperature, whereby a thin MN film 274 (a TaN film if the metal
member 257 of Ta is applied) is formed on the surface of the
substrate 253.
[0633] The reaction for formation of the thin MN film 274 can be
expressed by:
2MCl+2NH.sub.3.fwdarw.2MN.dwnarw.+HCl.uparw.+2H.sub.2.uparw.
[0634] The gases and the etching products that have not been
involved in the reactions are exhausted through an exhaust port
277.
[0635] The source gas has been described, with the Cl.sub.2 gas
diluted with, say, He or Ar taken as an example. However, the
Cl.sub.2 gas can be used alone, or an HCl gas can also be applied.
When the HCl gas is applied, an HCl gas plasma is generated as the
source gas plasma. Thus, the source gas may be any gas containing
chlorine, and a gas mixture of an HCl gas and a Cl.sub.2 gas is
also usable. As the material for the metal member 257, it is
possible to use an industrially applicable metal such as Ag, Au, Pt
or Si. Further, the NH.sub.3 gas is supplied into the passage 265
and fed into the excitation chamber 266. At the same time,
electromagnetic waves are shot from the plasma antenna 267 into the
excitation chamber 266 to generate the NH.sub.3 gas plasma 263.
However, an NH.sub.3 gas plasma can be generated within the chamber
251 by supplying an NH.sub.3 gas into the chamber 251 and supplying
power to the plasma antenna 259. In this case, the chamber 265,
excitation chamber 266, plasma antenna 267, matching instrument 268
and power source 269 can be omitted.
[0636] With the above-described metal film production apparatus,
the metal is formed by plasmas to produce the thin MN film 274 as
the barrier metal film. Thus, the barrier metal film can be formed
uniformly to a small thickness. Consequently, the barrier metal
film can be formed highly accurately at a high speed with excellent
burial properties in a very small thickness even to the interior of
a tiny depression, for example, several hundred nanometers wide,
which has been provided in the substrate 253.
[0637] The above-described metal film production apparatus is
provided with diluent gas nozzles 276, as diluent gas supply means,
for supplying an Ar gas, as a diluent gas, to the interior of the
chamber 251 above the surface of the substrate 253. The Ar gas is
supplied from the diluent gas nozzles 276, and electromagnetic
waves are shot from the plasma antenna 259 into the chamber 251,
whereby the Ar gas is ionized to generate an Ar gas plasma (surface
treatment plasma generation means). A bias power source 277 is
connected to the support platform 252, and a bias voltage is
applied thereto for supporting the substrate 253 on the support
platform 252.
[0638] With the above-described metal film production apparatus,
the thin MN film 274 as a barrier metal film is formed, whereafter
an Ar gas plasma is generated. By generating the Ar gas plasma, the
barrier metal film on the surface of the substrate 253 is etched
with Ar.sup.+ to flatten the barrier metal film. Also,
denitrification is performed in which the nitrogen atoms (N) of the
TaN in the superficial layer of the barrier metal film are removed.
After flattening of the barrier metal film and the removal of the
nitrogen atoms (N) of the TaN in the superficial layer for
denitrification, a thin copper (Cu) film or a thin aluminum (Al)
film is formed on the barrier metal film by a film forming device.
The details of the flattening of the barrier metal film and the
denitrification of this film upon generation of the Ar gas plasma
are the same as in the fifteenth embodiment. Thus, relevant
explanations are omitted.
[0639] With the foregoing metal film production apparatus, as in
the fifteenth embodiment, the barrier metal film can be in a
two-layer structure state without becoming thick, and the resulting
metal layer can retain adhesion to a thin metal film formed by film
formation in the subsequent step. Whereas the TaN layer can prevent
diffusion of metal during film formation in the subsequent step.
Consequently, the thin metal film (thin Cu film) during film
formation in the subsequent step can be formed, with satisfactory
adhesion, without diffusion into the substrate 253, so that the Cu
wiring process can be stabilized.
[0640] The construction of the metal film production apparatus for
producing the barrier metal film may employ a device of the type
generating a capacitive coupling plasma, or a device of the remote
type which generates a plasma in a manner isolated from a film
formation chamber.
[0641] Next, the second aspect of the present invention will be
described. According to the second aspect, the barrier metal film
of TaN is subjected to a surface treatment in which this film is
reacted in a reducing gas (e.g. hydrogen gas) atmosphere (a
hydrogen gas plasma) to remove the nitrogen atoms in the
superficial layer of the barrier metal film, thereby decreasing the
nitrogen content of the superficial layer relative to the interior
of the matrix of the barrier metal film (this treatment will be
referred to hereinafter as denitrification). The denitrification
brings a state in which a film of the metal (Ta) is substantially
formed in the superficial layer of the single-layer barrier metal
film. In this manner, a barrier metal film is produced highly
efficiently and reliably in a thin film condition, with the
diffusion of the metal being prevented and the adhesion to the
metal being maintained.
[0642] As the reducing gas, a nitrogen gas as well as the hydrogen
gas can be applied, or a carbon monoxide gas can also be applied.
If the carbon monoxide gas is used, denitrification can be carried
out in a carbon monoxide gas atmosphere, without generation of
plasma.
[0643] The concrete construction of the apparatus according to the
second aspect of the invention may be as follows: A source gas
containing a halogen (e.g., a chlorine-containing gas) is supplied
to the interior of a chamber between a substrate and an etched
member of Ta, and an atmosphere within the chamber is converted
into a plasma to generate a chlorine gas plasma. The etched member
is etched with the chlorine gas plasma to form a precursor
comprising the Ta component contained in the etched member and the
chlorine gas. Also, a nitrogen-containing gas is excited, and TaN,
a metal nitride, is formed upon reaction between the excited
nitrogen and the precursor. The resulting TaN is formed as a film
on the substrate kept at a low temperature to form a barrier metal
film. This process is performed using a barrier metal film
production apparatus. After the barrier metal film is produced in
this manner, a hydrogen gas plasma (or a nitrogen gas plasma) is
generated within the chamber to react radical hydrogen with
nitrogen, performing denitrification. That is, the barrier metal
film production apparatus shown in FIG. 39 can be applied.
[0644] Alternatively, the concrete construction of the apparatus of
the second aspect may be as follows: A chlorine gas is supplied
into the chamber, and an atmosphere within the chamber is converted
into a plasma to generate a chlorine gas plasma. An etched member
made of copper (Cu) is etched with the chlorine gas plasma to form
a precursor comprising the Cu component contained in the etched
member and chlorine inside the chamber. The temperature of the
substrate is rendered lower than the temperature of the etched
member to form a film of the Cu component of the precursor on the
substrate. This process is performed using a metal film forming
device. Before the substrate having a barrier metal film of TaN
formed thereon is housed in the chamber and the Cu component is
formed as a film thereon, a hydrogen gas plasma (or a nitrogen gas
plasma) is generated within the chamber to react radical hydrogen
with nitrogen, performing denitrification. That is, the metal film
production apparatus shown, for example, in FIGS. 29, 34, 37 and 38
can be applied.
[0645] Embodiments of the metal film production method and metal
film production apparatus according to the second aspect will be
described, with the provision of the apparatus in the Cu-CVD 404
(see FIG. 28) being taken as an example.
[0646] FIG. 40 shows the conceptual construction of a metal film
production apparatus according to the twentieth embodiment of the
present invention. FIG. 41 shows the concept status of the barrier
metal film in denitrification. The illustrated metal film
production apparatus has the conceptual construction of the metal
film production apparatus according to the fifteenth embodiment
shown in FIG. 29, in which the gas supplied through the nozzle 21
is different. Thus, the formation of the thin Cu film in the metal
film production apparatus is the same, and its explanation is
omitted hereinbelow.
[0647] As shown in FIG. 40, reducing gas nozzles 225 are provided,
as reducing gas supply means, for supplying a hydrogen gas (H.sub.2
gas) as a reducing gas, to the interior of a chamber 201 above the
surface of a substrate 203. The H.sub.2 gas is supplied from the
reducing gas nozzles 225, and electromagnetic waves are shot from a
plasma antenna 209 into the chamber 201, whereby the H.sub.2 gas is
ionized to generate an H.sub.2 gas plasma (surface treatment
means). On the surface of the substrate 203 admitted into the
illustrated metal film production apparatus, a barrier metal film
223 of TaN (see FIG. 31) has been formed. Upon generation of the
H.sub.2 gas plasma, hydrogen radicals H* react with the nitrogen
atoms (N) of the TaN in the superficial layer of the substrate 203,
forming ammonia NH.sub.3, which is exhausted. Thus, the nitrogen
atoms (N) in the superficial layer are removed to decrease the
nitrogen content of the superficial layer relative to the interior
of the matrix of the barrier metal film 223 (denitrification).
[0648] The denitrification of the barrier metal film 223 (see FIG.
31) caused by generation of the H.sub.2 gas plasma is performed
before formation of the thin Cu film 216 explained in the fifteenth
embodiment of FIG. 29. That is, when the substrate 203 having the
barrier metal film 223 of TaN (see FIG. 31) formed thereon is
admitted onto a support platform 202, the H.sub.2 gas is supplied
from the reducing gas nozzles 225 prior to the formation of the
thin Cu film 216 (see FIG. 29). At the same time, electromagnetic
waves are shot from the plasma antenna 209 into the chamber 201,
whereby the H.sub.2 gas plasma is generated.
[0649] Upon generation of the H.sub.2 gas plasma, hydrogen radicals
H* react with the nitrogen atoms (N) of the TaN in the superficial
layer of the substrate 203, forming ammonia NH.sub.3, which is
exhausted. The hydrogen radicals H* do not affect the metal, but
react with only the nitrogen atoms (N), thereby forming ammonia
NH.sub.3.
[0650] That is, the reaction
N+3H*.fwdarw.NH.sub.3
forms ammonia NH.sub.3, which is exhausted.
[0651] As shown in FIG. 41, the barrier metal film 223 comprises Ta
and N in an amorphous state. In this state, hydrogen radicals H*
react with N, forming ammonia NH.sub.3, which is exhausted. In this
manner, the superficial layer of the barrier metal film 223 (for
example, up to a half, preferably about a third, of the entire film
thickness) is denitrified. As a result, there emerges the barrier
metal film 223 of a two-layer structure, a metal layer 223a
substantially composed of Ta, and a TaN layer 223b, as shown in
FIG. 33. On this occasion, the entire film thickness of the barrier
metal film 223 remains the film thickness constructed by the single
layer.
[0652] Hydrogen radicals H* have a short life and penetrate narrow
sites. Thus, the pressure inside the chamber 201 is lowered to
decrease the density, or the temperature of the substrate 203 is
controlled, thereby making it possible to increase hydrogen
radicals H* (prevent them from colliding with each other), or to
control the depth of the metal layer 223a composed substantially of
Ta (see FIG. 33). Setting of the pressure can be performed by
increasing the mean free path (MFP) which is the value of the
distance traveled by a hydrogen radical H* before collision.
Normally, the distance from the center of the plasma to the
substrate 203 depends on the apparatus. To increase the mean free
path, control is exercised, with the pressure inside the chamber
201 being lowered. If the apparatus has the support platform 202
movable upward and downward, the support platform 202 is raised,
without a fall in the pressure, to bring the substrate 203 close to
the center of the plasma, whereby the mean free path can be
increased relatively.
[0653] With the foregoing metal film production apparatus, the
hydrogen gas plasma is generated within the chamber 201
accommodating the substrate 203 having the barrier metal film 223
formed thereon. The hydrogen radicals H* take part in
denitrification in which they react with the nitrogen atoms (N),
forming ammonia NH.sub.3, which is exhausted. Thus, there can
appear the barrier metal film 223 with a two-layer structure, i.e.,
the metal layer 223a composed substantially of Ta (see FIG. 33) and
the TaN layer 223b (see FIG. 33). Moreover, the entire film
thickness can remain the single-layer film thickness. Hence, the
barrier metal film 223 can be in a two-layer structure state
without becoming thick, and yet the metal layer 223a (see FIG. 33)
can retain adhesion to the thin Cu film 216 (see FIG. 29), while
the TaN layer 223b (see FIG. 33) can prevent diffusion of Cu.
Consequently, the thin Cu film 216 (see FIG. 29) can be formed,
with satisfactory adhesion, without diffusion into the substrate
203, so that the Cu wiring process can be stabilized. In addition,
denitrification can be carried out with high efficiency.
[0654] The hydrogen gas has been taken as an example of the
reducing gas for the purpose of explanation. In the case of the
metal film production apparatus in which a hydrogen atmosphere is
not usable, a nitrogen gas can be used as the reducing gas. In this
case, a nitrogen gas plasma is generated, whereupon N* reacts with
the nitrogen atoms (N) of the barrier metal film 223. As a result,
N+N*.fwdarw.N.sub.2, which is exhausted. The use of the nitrogen
gas enables denitrification to take place easily, even if a
limitation is imposed on the use of the reducing gas.
[0655] Alternatively, a carbon monoxide gas can be used as the
reducing gas. In this case, no plasma is generated, and in the
unchanged atmosphere, CO reacts with the nitrogen atoms (N) of the
barrier metal film 223, as in 2N+2CO.fwdarw.2CN+O.sub.2, which are
exhausted. The use of the carbon monoxide gas enables
denitrification to take place, simply by temperature control of the
substrate 203 without generation of a plasma. Thus, consumption of
power can be decreased.
[0656] The twentieth embodiment described above can be applied to
the metal film production apparatuses of the sixteenth to
eighteenth embodiments shown in FIGS. 34, 37 and 38. It is also
applicable to the barrier metal film production apparatus of the
nineteenth embodiment shown in FIG. 39. It is also possible to
combine the flattening of the surface with Ar.sup.+ upon generation
of the Ar gas plasma in the fifteenth to nineteenth embodiments
with denitrification using the reducing gas plasma. In this case,
an Ar gas and a reducing gas may be mixed and supplied into the
chamber 1, or an Ar gas and a reducing gas may be supplied
sequentially.
[0657] Next, the third aspect of the present invention will be
described. According to the third aspect, a barrier metal film of
TaN is subjected to a treatment for etching the surface and forming
nuclei of silicon atoms by use of a plasma of a silicon-containing
gas (for example, silane, SiH.sub.4, a hydride of silicon).
Silicon, which is not a foreign matter, has good adhesion to a
metal, and the formation of nuclei of silicon atoms on the surface
can increase adhesion between the metal of a barrier metal film and
a metal to be formed as a film thereon. By this method, a barrier
metal film preventing diffusion of a metal and retaining adhesion
to the metal is produced with good efficiency and without
deterioration of performance.
[0658] As the silicon-containing gas, a disilane (Si.sub.2H.sub.6)
gas or a trisilane (Si.sub.3H.sub.8) can be used in addition to the
SiH.sub.4 gas. If hydrogen cannot be used, an SiCl.sub.4 gas, an
SiH.sub.2Cl.sub.2 gas or an SiHCl.sub.3 gas can be applied. Any
such gas may be diluted with a diluent gas and supplied. By
controlling the dilution ratio or the flow rate of the gas, or
controlling the power of its plasma, it becomes possible to control
the depth of etching on the surface or the sizes of the nuclei of
silicon atoms.
[0659] A concrete apparatus construction according to the third
aspect of the invention may be as follows: Using a barrier metal
film production apparatus, a source gas containing a halogen (e.g.,
a chlorine-containing gas) is supplied to the interior of a chamber
between a substrate and an etched member of Ta, and an atmosphere
within the chamber is converted into a plasma to generate a
chlorine gas plasma. The etched member is etched with the chlorine
gas plasma to form a precursor comprising the Ta component
contained in the etched member and the chlorine gas. Also, a
nitrogen-containing gas is excited, and TaN, a metal nitride, is
formed upon reaction between the excited nitrogen and the
precursor. The resulting TaN is formed as a film on the substrate
kept at a low temperature to form a barrier metal film. After the
barrier metal film is produced in this manner, an SiH.sub.4 gas
plasma, a gas containing silicon, is generated within the chamber
to form crystal grains of Si. That is, a barrier metal film
production apparatus shown, for example, in FIG. 39 can be
applied.
[0660] Alternatively, a concrete apparatus construction according
to the third aspect of the invention may be as follows: A chlorine
gas is supplied into the chamber, and an atmosphere within the
chamber is converted into a plasma to generate a chlorine gas
plasma. An etched member made of copper (Cu) is etched with the
chlorine gas plasma to form a precursor comprising the Cu component
contained in the etched member and chlorine inside the chamber. The
temperature of the substrate is rendered lower than the temperature
of the etched member to form a film of the Cu component of the
precursor on the substrate. This process is performed using a metal
film forming device. The substrate having a barrier metal film of
TaN formed thereon is housed in the chamber. Before the Cu
component is formed as a film thereon, an SiH.sub.4 gas plasma, a
plasma of a silicon-containing gas, is generated within the chamber
to form crystal grains of Si. That is, the metal film production
apparatus shown, for example, in FIG. 29, 34, 37 or 38 can be
applied.
[0661] An embodiment of the metal film production method and metal
film production apparatus according to the third aspect will be
described, with the provision of the apparatus in the Cu-CVD 404
(see FIG. 28) being taken as an example.
[0662] FIG. 42 shows the conceptual construction of a metal film
production apparatus according to the twenty-first embodiment of
the present invention. FIG. 43 shows the concept status of a
barrier metal film in the formation of nuclei of Si. The
illustrated metal film production apparatus has the conceptual
construction of the metal film production apparatus according to
the fifteenth embodiment shown in FIG. 29, in which the gas
supplied through the nozzles 21 is made different. Thus, the
formation of the thin Cu film in the metal film production
apparatus is the same, and its explanation is omitted
hereinbelow.
[0663] As shown in FIG. 42, silicon-containing gas nozzles 228 are
provided, as silicon-containing gas supply means, for supplying a
silane gas (SiH.sub.4 gas), as a gas containing silicon, to the
interior of a chamber 201 above the surface of a substrate 203. An
SiH.sub.4 gas diluted with hydrogen is supplied through the
silicon-containing gas nozzles 228, and electromagnetic waves are
shot from a plasma antenna 209 into the chamber 201, whereby the
hydrogen-diluted SiH.sub.4 gas is ionized to generate an SiH.sub.4
gas plasma (surface treatment plasma means). On the surface of the
substrate 203 admitted into the illustrated metal film production
apparatus, a barrier metal film 223 of TaN (see FIG. 31) has been
formed. Generation of the SiH.sub.4 gas plasma results in the
growth of crystal grains of Si and the appearance of H.sub.2. While
film formation is proceeding, crystal grains of Si are formed as
nuclei on the superficial layer of the substrate 203 by the etching
action of H.sub.2.
[0664] The formation of the nuclei of Si upon generation of the
SiH.sub.4 gas plasma is performed before formation of the thin Cu
film 216 explained in the fifteenth embodiment of FIG. 29. That is,
when the substrate 203 having the barrier metal film 223 of TaN
(see FIG. 31) formed there on is admitted onto the support platform
202, a hydrogen-diluted SiH.sub.4 gas is supplied through the
silicon-containing gas nozzles 228 prior to the formation of the
thin Cu film 216 (see FIG. 29). Also, electromagnetic waves are
shot from the plasma antenna 209 into the chamber 201 to generate
an SiH.sub.4 gas plasma. The ratio of SiH.sub.4 to hydrogen in the
hydrogen-diluted SiH.sub.4 gas is set, for example, as follows:
SiH.sub.4/hydrogen.ltoreq.5/100. As the diluent gas, argon, helium,
neon or other diluent gas can be applied in addition to
hydrogen.
[0665] When the SiH.sub.4 gas plasma is generated, the reaction
SiH.sub.4.fwdarw.Si+H.sub.2
proceeds. As a result, while film formation is proceeding, crystal
grains of Si are formed as nuclei on the superficial layer of the
barrier metal film 223 by the etching action of H.sub.2, as shown
in FIG. 43. The sizes of the nuclei of Si can be controlled
appropriately by controlling the conditions for the plasma, the
ratio of hydrogen dilution, the flow rate of the gas, etc. The
etching action of H.sub.2 removes the nitrogen atoms (N) of the
barrier metal film 223, and can bring the state of the barrier
metal film 223 having a two-layer structure, a metal layer 223a
substantially composed of Ta (see FIG. 33), and a TaN layer 223b
(see FIG. 33).
[0666] Since the SiH.sub.4 gas is diluted with hydrogen, the
crystallinity of Si can be improved, and its nuclei are easy to
form. Silicon, which is not a foreign matter, has good adhesion to
Ta and Cu, and the formation of nuclei of Si on the surface of the
barrier metal film 223 can increase adhesion between Ta of the
barrier metal film 223 and Cu to be formed as a film thereon. By
this method, a barrier metal film 223 preventing diffusion of the
metal and retaining adhesion to the metal is produced with good
efficiency and without deterioration of performance.
[0667] With the above-described metal film production apparatus,
the SiH.sub.4 gas plasma is generated within the chamber 201
accommodating the substrate 203 having the barrier metal film 223
formed thereon, whereby crystal grains of Si are formed as nuclei
on the superficial layer of the barrier metal film 223. Thus,
adhesion to Ta and Cu can be improved. Consequently, the barrier
metal film 223 can be formed with satisfactory adhesion and
anti-diffusion properties without becoming thick, so that the Cu
wiring process can be stabilized.
[0668] The twenty-first embodiment described above can be applied
to the metal film production apparatuses of the sixteenth to
eighteenth embodiments shown in FIGS. 34, 37 and 38. It is also
applicable to the barrier metal film production apparatus of the
nineteenth embodiment shown in FIG. 39. It is also possible to
combine the flattening of the surface with Ar.sup.+ upon generation
of the Ar gas plasma in the fifteenth to nineteenth embodiments
with the formation of crystal grains of Si as nuclei on the
superficial layer of the barrier metal film 223. In this case, a
common nozzle can be used by diluting an SiH.sub.4 gas with an Ar
gas, and the flattening of the surface and the formation of Si
nuclei can be easily switched by controlling the flow rate of the
Ar gas.
[0669] While the present invention has been described by the
foregoing embodiments, it is to be understood that the invention is
not limited thereby, but may be varied in many other ways. Such
variations are not to be regarded as a departure from the spirit
and scope of the invention, and all such modifications as would be
obvious to one skilled in the art are intended to be included
within the scope of the appended claims.
* * * * *