Patent | Date |
---|
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus Grant 7,977,243 - Sakamoto , et al. July 12, 2 | 2011-07-12 |
Method and apparatus for production of metal film or the like Grant 7,923,374 - Sakamoto , et al. April 12, 2 | 2011-04-12 |
Process for producing silicon compound Grant 7,776,751 - Ooba , et al. August 17, 2 | 2010-08-17 |
Barrier Metal Film Production Apparatus, Barrier Metal Film Production Method, Metal Film Production Method, And Metal Film Production Apparatus App 20100124825 - Sakamoto; Hitoshi ;   et al. | 2010-05-20 |
Metal Film Production Apparatus And Metal Film Production Method App 20100062181 - Sakamoto; Hitoshi ;   et al. | 2010-03-11 |
Barrier Metal Film Production Apparatus, Barrier Metal Film Production Method, Metal Film Production Method, And Metal Film Production Apparatus App 20100047471 - Sakamoto; Hitoshi ;   et al. | 2010-02-25 |
Method And Apparatus For Production Of Metal Film Or The Like App 20100040802 - Sakamoto; Hitoshi ;   et al. | 2010-02-18 |
Barrier metal film production method Grant 7,659,209 - Sakamoto , et al. February 9, 2 | 2010-02-09 |
Method And Apparatus For Production Of Metal Film Or The Like App 20090311866 - Sakamoto; Hitoshi ;   et al. | 2009-12-17 |
Method And Apparatus For Production Of Metal Film Or The Like App 20090233442 - Sakamoto; Hitoshi ;   et al. | 2009-09-17 |
Metal Film Production Apparatus And Metal Film Production Method App 20090133623 - SAKAMOTO; HITOSHI ;   et al. | 2009-05-28 |
Process for producing silicon compound App 20090081869 - Ooba; Yoshiyuki ;   et al. | 2009-03-26 |
Barrier metal film production method App 20070272655 - Sakamoto; Hitoshi ;   et al. | 2007-11-29 |
Interconnection structure Grant 7,262,500 - Sakamoto , et al. August 28, 2 | 2007-08-28 |
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus App 20070141274 - Sakamoto; Hitoshi ;   et al. | 2007-06-21 |
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus App 20070117363 - Sakamoto; Hitoshi ;   et al. | 2007-05-24 |
Method and apparatus for production of metal film or the like Grant 7,208,421 - Sakamoto , et al. April 24, 2 | 2007-04-24 |
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus App 20070087577 - Sakamoto; Hitoshi ;   et al. | 2007-04-19 |
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus App 20060054593 - Sakamoto; Hitoshi ;   et al. | 2006-03-16 |
Metal film production apparatus and metal film production method App 20060049136 - Samakoto; Hitoshi ;   et al. | 2006-03-09 |
Method and apparatus for production of metal film or the like App 20050230830 - Sakamoto, Hitoshi ;   et al. | 2005-10-20 |
Low-alloy heat-resistant steel, heat treatment method therefor, and turbine rotor comprising the same Grant 6,755,920 - Kamada , et al. June 29, 2 | 2004-06-29 |
Method and apparatus for production of metal film or the like App 20040029384 - Sakamoto, Hitoshi ;   et al. | 2004-02-12 |
Metal film production apparatus and metal film production method App 20030145790 - Sakamoto, Hitoshi ;   et al. | 2003-08-07 |
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus App 20030091739 - Sakamoto, Hitoshi ;   et al. | 2003-05-15 |
Low-alloy heat-resistant steel, heat treatment method therefor, and turbine rotor comprising the same App 20030034101 - Kamada, Masatomo ;   et al. | 2003-02-20 |