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Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus App 20040058199 - Sakamoto, Hitoshi ;   et al. | 2004-03-25 |
Method and apparatus for production of metal film or the like App 20040029384 - Sakamoto, Hitoshi ;   et al. | 2004-02-12 |
Method for forming metallic film and apparatus for forming the same Grant 6,656,540 - Sakamoto , et al. December 2, 2 | 2003-12-02 |
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus App 20030091739 - Sakamoto, Hitoshi ;   et al. | 2003-05-15 |
Method for forming metallic film and apparatus for forming the same App 20020142572 - Sakamoto, Hitoshi ;   et al. | 2002-10-03 |
Hexagonal boron nitride film with low dielectric constant, layer dielectric film and method of production thereof, and plasma CVD apparatus App 20020000556 - Sakamoto, Hitoshi ;   et al. | 2002-01-03 |