U.S. patent application number 12/345821 was filed with the patent office on 2009-07-16 for showerhead insulator and etch chamber liner.
This patent application is currently assigned to APPLIED MATERIALS, INC.. Invention is credited to James D. Carducci, Olga Regelman.
Application Number | 20090178763 12/345821 |
Document ID | / |
Family ID | 40849648 |
Filed Date | 2009-07-16 |
United States Patent
Application |
20090178763 |
Kind Code |
A1 |
Carducci; James D. ; et
al. |
July 16, 2009 |
SHOWERHEAD INSULATOR AND ETCH CHAMBER LINER
Abstract
The present invention generally comprises a showerhead insulator
for electrically isolating a showerhead assembly from a processing
chamber wall, a chamber liner assembly for lining a processing
chamber, a lower chamber liner for lining an evacuation area of a
processing chamber, and a flow equalizer for ensuring a uniform
evacuation of a processing chamber. When processing a substrate
within an etching chamber, the showerhead needs to be electrically
isolated from ground. A showerhead insulator may insulate the
showerhead from ground while also preventing plasma from entering
the volume that it occupies. A chamber liner may protect the
chamber walls from contamination and reduce chamber cleaning. A
flow equalizer will permit processing gases to be evenly pulled
into the evacuation channel rather than a disproportionate flow
into the evacuation channel. A lower liner can aid in uniformly
drawing the vacuum and protecting the chamber walls from
contamination.
Inventors: |
Carducci; James D.;
(Sunnyvale, CA) ; Regelman; Olga; (Daly City,
CA) |
Correspondence
Address: |
PATTERSON & SHERIDAN, LLP - - APPM/TX
3040 POST OAK BOULEVARD, SUITE 1500
HOUSTON
TX
77056
US
|
Assignee: |
APPLIED MATERIALS, INC.
Santa Clara
CA
|
Family ID: |
40849648 |
Appl. No.: |
12/345821 |
Filed: |
December 30, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
61020229 |
Jan 10, 2008 |
|
|
|
Current U.S.
Class: |
156/345.34 ;
156/345.1 |
Current CPC
Class: |
H01J 37/32633 20130101;
H01J 37/3244 20130101; H01J 37/32449 20130101; H01J 37/32477
20130101 |
Class at
Publication: |
156/345.34 ;
156/345.1 |
International
Class: |
H01L 21/306 20060101
H01L021/306 |
Claims
1. A chamber liner, comprising: a body having a flange portion, a
slit valve portion, and a ledge portion, the flange portion
comprising: a first top surface, a first outside surface, a first
inside surface, and a first bottom surface, wherein the first
inside surface is substantially parallel to the first outside
surface, the first bottom surface is substantially parallel to the
first top surface, and the first top surface is coupled with the
first inside surface by a first slanted surface that is slanted
relative to the first top surface, the first inside surface, the
first outside surface, and the first bottom surface; the ledge
portion comprising: a second top surface coupled to the first
inside surface of the flange portion, a second outside surface
parallel to the first outside surface of the flange portion, a
second bottom surface, a second inside surface, a third inside
surface, and a third bottom surface, wherein the second inside
surface is disposed radially inward of the third inside surface;
and the slit valve portion comprises: a third outside surface, a
fourth inside surface, and a fourth bottom surface, wherein the
fourth inside surface is coupled to the fourth bottom surface by a
second slanted surface, wherein the second slanted surface is
slanted relative to the third outside surface, the fourth inside
surface, and the fourth bottom surface.
2. The liner of claim 1, wherein the body comprises a metal.
3. The liner of claim 2, wherein the metal comprises aluminum.
4. The liner of claim 1, wherein the slit valve portion has a slit
valve opening carved therethrough.
5. The liner of claim 1, wherein the third outside surface has a
diameter between about 21.5 inches and 22.5 inches.
6. The liner of claim 1, wherein the body has a height between
about 5 inches and about 5.5 inches.
7. A liner assembly, comprising: a liner body having a flange
portion, a slit valve portion, and a ledge portion, wherein the
slit valve portion is coupled to the ledge portion and the ledge
portion is coupled to the flange portion, wherein the ledge portion
comprises: a first top surface coupled to the flange portion, a
first outside surface, a first bottom surface, a first inside
surface, a second inside surface, and a second bottom surface,
wherein the first inside surface is disposed radially inward of the
second inside surface; and a ring body coupled with the liner body,
the ring body comprising a second top surface, a second outside
surface, a third bottom surface, and a third top surface, wherein
the second top surface is coupled to the third top surface by a
first slanted surface that is slanted relative to the second top
surface, the second outside surface, the third bottom surface, and
the third top surface, wherein the second outer surface is coupled
with the second inside surface and the second top surface is
coupled with the first bottom surface.
8. The assembly of claim 7, wherein the liner body and the ring
body comprise different material.
9. The assembly of claim 7, wherein the ring body comprises silicon
carbide.
10. The assembly of claim 7, wherein the flange portion comprises a
fourth top surface, a third outside surface, a third inside
surface, and a fourth bottom surface, wherein the third inside
surface is substantially parallel to the third outside surface, the
fourth bottom surface is substantially parallel to the fourth top
surface, and the fourth top surface is coupled with the third
inside surface by a second slanted surface that is slanted relative
to the fourth top surface, the third inside surface, the third
outside surface, and the fourth bottom surface.
11. The assembly of claim 7, wherein the slit valve portion
comprises a fourth outside surface, a fourth inside surface, and a
fifth bottom surface, wherein the fourth inside surface is coupled
to the fifth bottom surface by a third slanted surface, wherein the
third slanted surface is slanted relative to the fourth outside
surface, the fourth inside surface, and the fifth bottom
surface.
12. The assembly of claim 7, wherein the slit valve portion has a
slit valve opening carved therethrough.
13. A showerhead insulating ring, comprising: a ring body having a
first surface and a second surface parallel to the first surface
and spaced from the first surface by a third surface and a fourth
surface, the third surface arranged at a first angle relative to
the first and second surfaces between about 75 degrees and about 80
degrees, the fourth surface having at least one stepped portion and
arranged at a second angle relative to the first surface and a
third angle relative to the second surface.
14. The ring of claim 13, wherein a coupling between the third
surface and the first surface with a substantially curved
surface.
15. The ring of claim 13, wherein the first angle is between about
72 degrees and about 76 degrees.
16. The ring of claim 13, wherein the second angle is between about
75 degrees and about 85 degrees.
17. The ring of claim 13, wherein the third angle is between about
70 degrees and about 80 degrees.
18. The ring of claim 13, wherein the ring body comprises a top
ring bonded to a bottom ring such that an inner surface of both the
top ring and the bottom ring collectively comprise the third
surface.
19. The ring of claim 13, wherein the ring body comprises
quartz.
20. The ring of claim 13, wherein the ring body comprises a
plurality of rounded corners.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims benefit of U.S. provisional patent
application Ser. No. 61/020,229 (APPM/12607L), filed Jan. 10, 2008,
which is herein incorporated by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] Embodiments of the present invention generally relate to
maintaining uniform process conditions in semiconductor processing
chambers such as an etching chamber.
[0004] 2. Description of the Related Art
[0005] Integrated circuits have evolved into complex devices that
can include millions of components (e.g., transistors, capacitors,
resistors, and the like) on a single chip. The evolution of chip
designs continually requires faster circuitry and greater circuit
density. The demands for greater circuit density necessitate a
reduction in the dimensions of the integrated circuit components.
The minimal dimensions of features of such devices are commonly
referred to in the art as critical dimensions. The critical
dimensions generally include the minimal widths of the features,
such as lines, columns, openings, spaces between the lines, and the
like.
[0006] As these critical dimensions shrink, process uniformity
across the substrate becomes paramount to maintain high yields. One
problem associated with a conventional plasma etch process used in
the manufacture of integrated circuits is the non-uniformity of the
etch rate across the substrate, which may be due, in part, to a
vacuum pump drawing the etching gas toward the exhaust port and
away from the substrate. As gases are more easily pumped from areas
of the chamber that are closest to the exhaust port (i.e., the
periphery of the substrate), the etching gas is pulled toward the
exhaust port and away from the substrate, thereby creating a
non-uniform etch on the substrate positioned therein. This
non-uniformity may significantly affect performance and increase
the cost of fabricating integrated circuits.
[0007] Therefore, there is a need in the art for an apparatus for
uniformly etching material layers during the manufacture of
integrated circuits.
SUMMARY OF THE INVENTION
[0008] The present invention generally comprises a showerhead
insulator for electrically isolating a showerhead assembly from a
processing chamber wall, a chamber liner assembly for lining a
processing chamber, a lower chamber liner for lining an evacuation
area of a processing chamber, and a flow equalizer for ensuring a
uniform evacuation of a processing chamber.
[0009] In one embodiment, a showerhead insulating ring comprises a
ring body having a first surface and a second surface parallel to
the first surface and spaced from the first surface by a third
surface and a fourth surface, the third surface arranged at a first
angle relative to the first and second surfaces, the fourth surface
having at least one stepped portion and arranged at a second angle
relative to the first surface and a third angle relative to the
second surface.
[0010] In another embodiment, a chamber liner comprises a body
having a flange portion, a slit valve portion, and a ledge portion.
The flange portion comprises a first top surface, a first outside
surface, a first inside surface, and a first bottom surface,
wherein the first inside surface is substantially parallel to the
first outside surface, the first bottom surface is substantially
parallel to the first top surface, and the first top surface is
coupled with the first inside surface by a first slanted surface
that is slanted relative to the first top surface, the first inside
surface, the first outside surface, and the first bottom surface.
The ledge portion comprises a second top surface coupled to the
first inside surface of the flange portion, a second outside
surface parallel to the first outside surface of the flange
portion, a second bottom surface, a second inside surface, a third
inside surface, and a third bottom surface, wherein the second
inside surface is disposed radially inward of the third inside
surface. The slit valve portion comprises a third outside surface,
a fourth inside surface, and a fourth bottom surface, wherein the
fourth inside surface is coupled to the fourth bottom surface by a
second slanted surface, wherein the second slanted surface is
slanted relative to the third outside surface, the fourth inside
surface, and the fourth bottom surface.
[0011] In another embodiment, a liner assembly, comprises a liner
body having a flange portion, a slit valve portion, and a ledge
portion, wherein the slit valve portion is coupled to the ledge
portion and the ledge portion is coupled to the flange portion,
wherein the ledge portion comprises: a first top surface coupled to
the flange portion, a first outside surface, a first bottom
surface, a first inside surface, a second inside surface, and a
second bottom surface, wherein the first inside surface is disposed
radially inward of the second inside surface; and a ring body
coupled with the liner body, the ring body comprising a second top
surface, a second outside surface, a third bottom surface, and a
third top surface, wherein the second top surface is coupled to the
third top surface by a first slanted surface that is slanted
relative to the second top surface, the second outside surface, the
third bottom surface, and the third top surface, wherein the second
outer surface is coupled with the second inside surface and the
second top surface is coupled with the first bottom surface.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] So that the manner in which the above recited features of
the present invention can be understood in detail, a more
particular description of the invention, briefly summarized above,
may be had by reference to embodiments, some of which are
illustrated in the appended drawings. It is to be noted, however,
that the appended drawings illustrate only typical embodiments of
this invention and are therefore not to be considered limiting of
its scope, for the invention may admit to other equally effective
embodiments.
[0013] FIG. 1A is a schematic cross sectional view of an etching
apparatus according to one embodiment of the invention.
[0014] FIG. 1B is a schematic cross sectional view of the etching
apparatus of FIG. 1A in which a smaller showerhead assembly is
utilized.
[0015] FIG. 2A is a schematic cross sectional view of a showerhead
insulating ring according to one embodiment of the invention.
[0016] FIG. 2B is a schematic cross sectional view of a showerhead
insulating ring according to another embodiment of the
invention.
[0017] FIG. 3A is a schematic cross sectional view of a showerhead
insulating ring according to another embodiment of the
invention.
[0018] FIG. 3B is a schematic cross sectional view of a showerhead
insulating ring according to another embodiment of the
invention.
[0019] FIG. 4A is a cross sectional view of a chamber liner
assembly according to one embodiment of the invention.
[0020] FIG. 4B is a close-up view of a portion of FIG. 4A.
[0021] To facilitate understanding, identical reference numerals
have been used, where possible, to designate identical elements
that are common to the figures. It is contemplated that elements
disclosed in one embodiment may be beneficially utilized on other
embodiments without specific recitation.
DETAILED DESCRIPTION
[0022] Embodiments of the present invention generally comprise a
showerhead insulator for electrically isolating a showerhead
assembly from a processing chamber wall, a chamber liner assembly
for lining a processing chamber, a lower chamber liner for lining
an evacuation area of a processing chamber, and a flow equalizer
for ensuring a uniform evacuation of a processing chamber. When
processing a substrate within an etching chamber, the showerhead
needs to be electrically isolated from ground. A showerhead
insulator may insulate the showerhead from ground while also
preventing plasma from entering the volume that it occupies. A
chamber liner may protect the chamber walls from contamination and
reduce chamber cleaning. A flow equalizer will permit processing
gases to be evenly pulled into the evacuation channel rather than a
disproportionate flow into the evacuation channel. A lower liner
can aid in uniformly drawing the vacuum and protecting the chamber
walls from contamination.
[0023] The invention will be described below in relation to an
etching chamber. However, a variety of plasma deposition and
etching chambers may benefit from the teachings disclosed herein,
and in particular, dielectric etching chambers such as the
ENABLER.RTM. etch chamber, which may be part of a semiconductor
wafer processing system such as the CENTURA.RTM. system, the
PRODUCER.RTM. etch chamber, the eMax.RTM. etch chamber, among
others, all of which are available from Applied Materials, Inc. of
Santa Clara, Calif. It is contemplated that other plasma reactors,
including those from other manufacturers, may be adapted to benefit
from the invention.
[0024] FIG. 1A is a schematic cross sectional view of an etching
apparatus according to one embodiment of the invention. FIG. 1B is
a schematic cross sectional view of the etching apparatus of FIG.
1A in which a smaller showerhead assembly is utilized. The
apparatus comprises a chamber 100 having a plurality of walls 102
extending upwards from a chamber bottom 104. Within the chamber
100, a susceptor 106 is present upon which a substrate 108 may be
supported for processing. The substrate 108 may be introduced into
the chamber 100 through a slit valve opening 120.
[0025] The chamber 100 may be evacuated by a vacuum pump 112
coupled to the chamber wall 102 through a vacuum port 156. The
chamber 100 may be evacuated by drawing the processing gas around
and through a baffle 110 that circumscribes the susceptor 106 and
substrate 110. The further away from the vacuum pump 112, the less
the draw of the vacuum may be detected. Conversely, the closer to
the vacuum pump 112, the greater the draw of the vacuum that may be
detected. Thus, to compensate for an uneven vacuum draw, a flow
equalizer 116 may be disposed within the chamber 100. The flow
equalizer 116 may circumscribe the susceptor 106. The width of the
flow equalizer 116 may be smaller at the location further away from
the vacuum port 156 as shown by arrows "B" compared to the width of
the flow equalizer 116 at a location closest to the vacuum port 156
as shown by arrows "C". The gas being evacuated may flow around the
flow equalizer and then through a lower liner 114. The lower liner
114 may have one or more holes therethrough to permit the
processing gas to be evacuated therethrough. A space 118 is present
between the lower liner 114 and the walls 102 of the chamber 100 to
permit the gas to flow behind the lower liner 114 to the vacuum
port 156. The vacuum port 156 may be blocked by a flow blocker 154
to prevent processing gas from being drawn directly into the vacuum
pump 112 from an area close to the substrate 108. The evacuated gas
may flow along a path shown by arrows "A".
[0026] Processing gas may be introduced into the processing chamber
100 through a showerhead 122A, 122B. The showerhead 122A, 122B may
be biased by an RF current from an RF power source 152, and the
showerhead 122A, 122B may comprise a first diffuser plate 126A,
126B and a second diffuser plate 124A, 124B. In one embodiment, the
first diffuser plate 126A, 126B may comprise aluminum. In another
embodiment, the second diffuser plate 124A, 124B may comprise
silicon carbide. The first diffuser plate 126A, 126B and the second
diffuser plate 124A, 124B may be bonded together. In one
embodiment, the first diffuser plate 126A, 126B and the second
diffuser plate 124A, 124B may be welded together. In another
embodiment, the first diffuser plate 126A, 126B and the second
diffuser plate 124A, 124B may be bonded together utilizing an
elastomer adhesive. The showerhead 122A, 122B may be divided into
an inner zone 158 and an outer zone 160. The inner zone 158 may
have a heating element 128. In one embodiment, the heating element
128 may have an annular shape. The heating element 128 may be
coupled with a heating source 148. The outer zone 160 may also
comprise a heating element 130 coupled with a heating source 150.
In one embodiment, the heating elements 128, 130 may comprise
annular conduits that are filled with a heating fluid from the
heating sources 148, 150. In another embodiment, the heating
elements 128, 130 may comprise heating coils powered by the heating
sources 148, 150. While not shown, thermocouples may provide real
time temperature feedback to a controller that controls the amount
of heat supplied to the inner zone 158 and the outer zone 160.
[0027] The inner zone 158 may be coupled with a gas source 138 by a
conduit 146. Gas from the gas source 138 may flow through the
conduit 146 to a plenum 132 disposed behind the first diffuser
plate 126A, 126B of the showerhead 122A, 122B. A valve 142 may be
disposed along the conduit 146 to control the amount of gas that
flows from the gas source 138 to the plenum 132. Once the gas
enters the plenum 132, the gas may then pass through the diffuser
plates 124A, 124B, 126A, 126B. Similarly, the outer zone 160 may be
coupled with a gas source 138 by a conduit 144. A valve 140 may be
disposed along the conduit 144 to control the amount of gas that
flows from the gas source 136 to the plenum 134.
[0028] It is to be understood that while separate gas sources 136,
138 have been shown in FIGS. 1A and 1B, a single, common gas source
may be utilized. When a single common gas source is utilized,
separate conduits 144, 146 may be coupled to the gas source and the
valves 140, 142 may control the amount of processing gas that
reaches the plenums 132, 134.
[0029] FIG. 2A is a schematic cross sectional view of a showerhead
insulating ring 200 according to one embodiment of the invention.
The insulating ring 200 performs the function of ensuring the
showerhead assembly in the etching apparatus is electrically
isolated from ground. Additionally, the insulating ring 200
occupies a space and hence, prevents plasma from occupying the
space during the etching operation. The insulating ring 200
comprises a ring body 202 having a top surface 204. In one
embodiment, the ring body 202 may comprise quartz. In another
embodiment, the ring body 202 may comprise an insulating
material.
[0030] In one embodiment, the top surface 204 may have a width
between about 1 inch and about 2 inches. In another embodiment, the
top surface 204 may have a width between about 1.25 inches and
about 1.75 inches. In another embodiment, the top surface 204 may
have a width between about 1.25 inches and about 1.50 inches. The
top surface 204 may have an outer diameter as shown by arrows "E".
In one embodiment, the diameter "E" may be between about 18 inches
and about 19 inches. In another embodiment, the diameter "E" may be
between about 18.25 inches and about 18.75 inches. In another
embodiment, the diameter "E" may be between about 18.50 inches and
about 18.65 inches.
[0031] The top surface 204 may be substantially parallel to a
bottom surface 206. In one embodiment, the bottom surface 206 has a
width between about 1 inch and about 2 inches. In another
embodiment, the bottom surface 206 has a width between about 1 inch
and about 1.50 inches. In another embodiment, the bottom surface
206 has a width between about 1 inch and about 1.25 inches. In one
embodiment, the top surface 204 has a longer width than the bottom
surface 206.
[0032] The top surface 204 is coupled with the bottom surface 206
by a slanted inside surface 208. In one embodiment, the slanted
inside surface 208 has a length as shown by arrows "J" between
about 1 inch and about 2 inches. In another embodiment, the slanted
inside surface 208 has a length "J" between about 1.25 inches and
about 1.50 inches. In another embodiment, the slanted inside
surface 208 has a length "J" between about 1.35 inches and about
1.45 inches.
[0033] The slanted inside surface 208, at the end that is coupled
to the top surface 204, may have a greater diameter than the end
that is coupled to the bottom surface 206. In one embodiment, the
diameter of the ring body 202 at the top of the slanted inside
surface 208 is between about 17 inches and about 18 inches as shown
by arrows "F". In another embodiment, the diameter "F" may be
between about 17.25 inches and about 17.75 inches. In another
embodiment, the diameter "F" may be between about 17.25 inches and
about 17.50 inches. In one embodiment, the slanted inside surface
208 is coupled to the top surface 204 as a rounded corner 214.
[0034] The diameter of the slanted inside surface 208 and the end
coupled to the bottom surface 206, on the other hand, may have a
smaller diameter as shown by arrows "G". In one embodiment, the
diameter "G" may be between about 16 inches and about 17 inches. In
another embodiment, the diameter "G" may be between about 16.25
inches and about 16.75 inches. In another embodiment, the diameter
"G" may be between about 16.50 inches and about 16.60 inches.
[0035] The slanted inside surface 208 may be slanted at an angle
relative to the top surface 204 as shown by angle ".beta.". In one
embodiment, the angle ".beta." may be between about 75 degrees and
about 80 degrees. In another embodiment, the angle ".beta." may be
between about 72 degrees and about 76 degrees. In another
embodiment, the angle ".beta." may be between about 73 degrees and
about 76 degrees.
[0036] The top surface 204 is also coupled to the bottom surface
206 by a stepped, outer surface 210. The outer surface 210 may have
a top portion 216 and a bottom portion 218. The bottom portion 218
may be coupled to the bottom surface 206. The bottom portion 218
may be slanted relative to the bottom surface 206 at an angle
".alpha.". In one embodiment, the angle ".alpha." may be between
about 100 degrees and about 110 degrees. In another embodiment, the
angle ".alpha." may be between about 103 degrees and about 107
degrees. In another embodiment, the angle ".alpha." may be between
about 104 degrees and about 105 degrees. The diameter of the ring
body 202 at the location where the bottom portion 218 is coupled to
the bottom surface 206 may have a diameter as shown by arrows "H".
In one embodiment, the diameter "H" may be between about 17.50
inches and about 18.50 inches. In another embodiment, the diameter
"H" may be between about 17.50 inches and about 18 inches. In
another embodiment, the diameter "H" may be between about 17.55
inches and about 17.75 inches. The top of the bottom portion 218
may also have a diameter as shown by arrows "I". In one embodiment,
the diameter "I" may be between about 17.50 inches and about 18.50
inches. In another embodiment, the diameter "I" may be between
about 17.75 inches and about 18.25 inches. In another embodiment,
the diameter "I" may be between about 18.0 inches and about 18.10
inches.
[0037] The bottom portion 218 may be coupled to the top portion 216
by a step 212. In one embodiment, the step 212 may have a width
between about 0.25 inches and about 1 inch. In another embodiment,
the step 212 may have a width between about 0.25 inches and about
0.75 inches. In another embodiment, the step 212 may have a width
between about 0.50 inches and about 0.60 inches. The step 212 may
be parallel to both the top surface 204 and the bottom surface
206.
[0038] The top portion 216, on the other hand, may be coupled to
the top surface 204 at a corner 214. The top portion 216 may
slanted relative to the top surface 204 at an angle ".gamma.". In
one embodiment, the angle ".gamma." may be between about 65 degrees
and about 85 degrees. In another embodiment, the angle ".gamma."
may be between about 75 degrees and about 85 degrees. In another
embodiment, the angle ".gamma." may be between about 76 degrees and
about 81 degrees. The angle ".gamma." of the top portion 216 may be
different than the angle ".alpha." of the bottom portion 218.
[0039] FIG. 2B is a schematic cross sectional view of a showerhead
insulating ring 250 according to another embodiment of the
invention. The ring 250, instead of being a unitary piece of
material, may comprise two separate pieces of material. The ring
250 may comprise a top body 252 as well as a bottom body 254. The
top body 252 is coupled to the bottom body 254 at the step.
[0040] For smaller showerhead assemblies, the insulating ring needs
to be shaped to accommodate the smaller showerhead assemblies
within the same apparatus as the larger showerhead assemblies. FIG.
3A is a schematic cross sectional view of a showerhead insulating
ring 300 according to another embodiment of the invention. The ring
300 may comprise a ring body 302. The ring body 302 has a top
surface 304 coupled to a ledge 306 by a first slanted inside
surface 308. The top surface 304 may have a width between about 1
inch and about 2 inches. In another embodiment, the top surface 304
may have a width between about 1.25 inches and about 1.75 inches.
In another embodiment, the top surface 304 may have a width between
about 1.25 inches and about 1.50 inches. The top surface 304 may
have an outer diameter as shown by arrows "K". In one embodiment,
the diameter "K" may be between about 18 inches and about 19
inches. In another embodiment, the diameter "K" may be between
about 18.25 inches and about 18.75 inches. In another embodiment,
the diameter "K" may be between about 18.50 inches and about 18.65
inches.
[0041] The top surface 304 is coupled with the ledge 306 by a first
slanted inside surface 308. In one embodiment, the first slanted
inside surface 308 has a length as shown by arrows "L" between
about 0.50 inches and about 1 inch. In another embodiment, the
first slanted inside surface 308 has a length between about 0.60
inches and about 0.90 inches. In another embodiment, the first
slanted inside surface 308 has a length "L" between about 0.75
inches and about 0.90 inches. The first slanted surface 308 may be
slanted at an angle ".delta." relative to the top surface 304. In
one embodiment, the angle ".delta." may be between about 75 degrees
and about 80 degrees. In another embodiment, the angle ".delta."
may be between about 72 degrees and about 76 degrees. In another
embodiment, the angle ".delta." may be between about 73 degrees and
about 76 degrees.
[0042] The ledge 306 may have a width a shown by arrows "M". One of
the diffuser plates of the showerhead assembly may rest on the
ledge 306 within the apparatus. In one embodiment, the width "M"
may be between about 2 inches and about 3 inches. In another
embodiment, the width "M" may be between about 2.25 inches and
about 2.75 inches. In another embodiment, the width "M" may be
between about 2.50 inches and about 2.70 inches.
[0043] The ledge 306 may be coupled to the bottom surface 310 a
second slanted inside surface 312. In one embodiment, the second
slanted surface 312 may have a height between about 0.50 inches and
about 0.70 inches. In another embodiment, the second slanted
surface 312 may have a height between about 0.55 inches and about
0.65 inches. In another embodiment, the second slanted surface 312
may have a height between about 0.55 inches and about 0.60 inches.
The second slanted surface 312 may be slanted at an angle
".di-elect cons." relative to the ledge 306. In one embodiment, the
angle ".di-elect cons." may be between about 75 degrees and about
80 degrees. In another embodiment, the angle ".di-elect cons." may
be between about 72 degrees and about 76 degrees. In another
embodiment, the angle ".di-elect cons." may be between about 73
degrees and about 76 degrees.
[0044] The bottom surface 310 may be parallel to both the ledge 306
as well as the top surface 304. In one embodiment, the bottom
surface 310 may have a length between about 0.50 inches and about
1.50 inches. In another embodiment, the length may be between about
0.75 inches and about 1.25 inches. In another embodiment, the
length may be between about 0.90 inches and about 1.10 inches.
[0045] The top surface 304 may be coupled to the bottom surface 310
by an outside surface 314. The outside surface 314 may comprise a
first slanted outside portion 316, coupled to a second slanted
outside portion 318, which is coupled to a third slanted outside
portion 320. The first slanted outside portion 316 may be coupled
with the top surface 304. In one embodiment, the first slanted
outside portion 316 has a height between about 0.50 inches to about
1.00 inches. In another embodiment, the height may be between about
0.60 inches and about 0.75 inches. In another embodiment, the
height may be between about 060 inches and about 0.70 inches. The
first slanted outside portion 316 may be angled relative to the top
surface 304. In one embodiment, the angle ".zeta." may be between
about 60 degrees and about 85 degrees. In another embodiment, the
angle ".zeta." may be between about 70 degrees and about 85
degrees. In another embodiment, the angle ".zeta." may be between
about 75 degrees and 80 degrees.
[0046] The first slanted outside portion 316 may be coupled to the
second slanted outside portion 318 by a first outside step 322. The
first outside step 322 may be parallel to the top surface 304, the
bottom surface 310, and the ledge 306. The second slanted portion
318 may be slanted relative to the first outside step 322. In one
embodiment, the angle ".eta." may be between about 85 degrees to
about 120 degrees. In another embodiment, the angle ".eta." may be
between about 95 degrees and about 110 degrees. In another
embodiment, the angle ".eta." may be between about 100 degrees and
about 105 degrees. In one embodiment, the height of the second
slanted outside portion 320 may be between about 0.25 inches and
about 0.75 inches. In another embodiment, the height may be between
about 0.30 inches and about 0.60 inches. In another embodiment, the
height may be between about 0.40 inches and about 0.55 inches.
[0047] The second slanted outside portion 320 may be coupled to the
third slanted outside portion 320 by a second outside step 324. The
second outside step 324 may be parallel to the first outside step
322, the bottom surface 310, the top surface 304, and the ledge
306. In one embodiment, the second outside step 324 has a length
between about 2 inches and about 3 inches. In another embodiment,
the length may be between about 2.25 inches and about 2.75 inches.
In another embodiment, the length may be between about 2.40 inches
to about 2.60 inches.
[0048] The third slanted outside portion 324 is coupled to the
bottom surface 310. The third slanted outside portion 324 may be
slanted relative to the bottom surface 310. In one embodiment, the
angle ".theta." of the slant may be between about 50 degrees and
about 80 degrees. In another embodiment, the angle ".theta." may be
between about 60 degrees and about 75 degrees. In another
embodiment, the angle may be between about 65 degrees and about 75
degrees.
[0049] FIG. 3B is a schematic cross sectional view of a showerhead
insulating ring 350 according to another embodiment of the
invention. The showerhead ring 350 may comprise four different
showerhead bodies 352, 354, 356, 358 all coupled together to form
the showerhead ring 350.
[0050] The processing chamber may be lined to protect the chamber
walls from undesired deposition or etching which could lead to
substrate contamination. By lining the chamber walls, the chamber
walls may be protected from unwanted deposition or etching. The
liner may then simply be replaced or cleaned as needed rather than
replacing the chamber and/or cleaning the chamber. By replacing the
liner, the chamber downtime may be decreased.
[0051] FIG. 4A is a cross sectional view of a chamber liner
assembly according to one embodiment of the invention. FIG. 4B is a
close-up view of a portion of FIG. 4A. The chamber liner assembly
400 comprises a liner portion 402 and a ring portion 404. A slit
valve opening 406 may be bored through the lower portion of the
liner portion 402. In one embodiment, the assembly 400 may have a
width between about 21 inches and about 23 inches. In another
embodiment, the width may be between about 21.5 inches and about
22.5 inches. In another embodiment, the width may be between about
21.75 inches and about 22.25 inches. In one embodiment, the
assembly may have a height between about 4.5 inches and about 6
inches. In another embodiment, the height may be between about 5.0
inches and about 5.75 inches. In another embodiment, the height may
be between about 5.25 inches and about 5.50 inches. In one
embodiment, the liner portion 402 may comprise one or more metals.
In another embodiment, the liner portion 402 may comprise
aluminum.
[0052] The liner portion 402 comprises flange portion 470, a ledge
portion 480, and a slit valve portion 490. The flange portion 470
comprises a top surface 408 coupled to a first outside surface 410.
The top surface 408 may be substantially perpendicular to the first
outside surface 410. The first outside surface 410 may be coupled
to a first bottom surface 414. The first bottom surface 414 may be
substantially parallel to the first top surface 408 and
perpendicular to the first outside surface 410. The top surface 408
may also be coupled to a first inside surface 412 by a first
slanted inside surface 416. The flange portion 470 may be coupled
to the chamber walls when the chamber is assembled.
[0053] The ledge portion 480 comprises ledge 418 having a second
top surface 420 coupled to the first inside surface of the flange
portion 470. The second top surface 420 may be substantially
parallel to the top surface 408. The ledge portion 480 may also
comprise a second inside surface 426 and a second outside surface
422. The second outside surface 422 may be substantially parallel
to the first outside surface 410. The ledge portion 480 may also
comprise a second bottom surface 424 coupled to a third bottom
surface 430 by a third inside surface 428. The third inside surface
428 may be substantially perpendicular to the second outside
surface 422.
[0054] The slit valve portion 490 may comprise a third outer
surface 432 coupled to a fourth bottom surface 436. The fourth
bottom surface 436 may be coupled to a fourth inside surface 434 by
a second slanted surface 438. The fourth bottom surface 436 may be
substantially parallel to the top surface 408, the first bottom
surface 414, and the second bottom surface 424. The third outer
surface 432 may be substantially perpendicular to the fourth bottom
surface 436.
[0055] The liner assembly may also comprise a ring portion 404. In
one embodiment, the ring portion 404 may comprise an insulating
material. In another embodiment, the ring portion 404 may comprise
quartz. In another embodiment, the ring portion 404 may comprise
silicon carbide. The ring portion 404 may be coupled to the
showerhead insulating assembly when the chamber is assembled. The
ring portion 404 may comprise a top surface 450 coupled to an
outside surface 452. The top surface 454 may be parallel to the
second bottom surface 424 of the liner portion 402 and
substantially perpendicular to the outside surface 452. The top
surface 454, when the ring portion 404 and the liner portion 402
are coupled together, may be coupled together by a bonding
material. Additionally, the outside surface 452 may be
substantially parallel to the third inside surface 428 of the ledge
portion 480 of the liner portion 402. The outside surface 452, when
the assembly 400 is assembled, may be coupled to the third inside
surface 428 by a bonding material.
[0056] The top surface 450 may be coupled to a bottom surface 454
by the outside surface 452. The bottom surface 454 may be
substantially parallel to the top surface 450 and substantially
perpendicular to the outside surface 452. A first slanted inside
surface 458 may couple to the top surface 450 to a ledge surface
456 of the ring portion 404. The ledge surface 456 may be coupled
with the showerhead insulating ring when the chamber is
assembled.
[0057] The liner portion 402 and the ring portion 404 may comprise
separate materials. The ring portion is closer to the processing
area of the chamber and thus, has a greater likelihood of being
exposed to a plasma. Therefore, the ring portion 404 may be made of
an insulating material such as silicon carbide. The liner portion
402, however, is further area from the plasma field and in some
embodiments, is not exposed to the plasma field at all. Therefore,
the liner portion 402 may be made of a cheaper, easier to
manufacture material such as aluminum. However, it should be noted,
that liner portion 402 and the ring portion 404 may comprise the
same material. In embodiments where the ring portion 404 and the
liner portion 402 comprise the same material, the material
comprises an insulating material such as silicon carbide.
[0058] By properly insulating the showerhead from the chamber body
and by lining the chamber body, a uniform plasma may be formed and
thus, etching uniformity may be increased.
[0059] While the foregoing is directed to embodiments of the
present invention, other and further embodiments of the invention
may be devised without departing from the basic scope thereof, and
the scope thereof is determined by the claims that follow.
* * * * *