Carducci; James D.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Carducci; James D..The latest application filed is for "symmetric plasma process chamber".

Company Profile

27.77.109

Carducci; James D. - Sunnyvale CA
- Sunnyvale CA US
Carducci; James D - Sunnyvale CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma reactor with electrode filaments extending from ceiling Grant 11,424,104 - Collins , et al. August 23, 2	2022-08-23
Symmetric Plasma Process Chamber App 20220254606 - CARDUCCI; James D. ; et al.	2022-08-11
Continuous Liner For Use In A Processing Chamber App 20220186366 - Carducci; James D. ; et al.	2022-06-16
Plasma reactor with electrode assembly for moving substrate Grant 11,355,321 - Collins , et al. June 7, 2	2022-06-07
Symmetric plasma process chamber Grant 11,315,760 - Carducci , et al. April 26, 2	2022-04-26
Plasma Chamber With A Multiphase Rotating Modulated Cross-flow App 20220084794 - Collins; Kenneth S. ; et al.	2022-03-17
Plasma Chamber With Multiphase Rotating Independent Gas Cross-flow With Reduced Volume And Dual Vhf App 20220084795 - Collins; Kenneth S. ; et al.	2022-03-17
Symmetric Vhf Source For A Plasma Reactor App 20210313147 - Ramaswamy; Kartik ; et al.	2021-10-07
Plasma reactor with electrode array in ceiling Grant 11,114,284 - Collins , et al. September 7, 2	2021-09-07
Ion-ion plasma atomic layer etch process Grant 11,101,113 - Collins , et al. August 24, 2	2021-08-24
Symmetric VHF source for a plasma reactor Grant 11,043,361 - Ramaswamy , et al. June 22, 2	2021-06-22
Gas distribution plate assembly for high power plasma etch processes Grant 11,043,360 - Carducci , et al. June 22, 2	2021-06-22
Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates Grant 10,811,226 - Carducci , et al. October 20, 2	2020-10-20
Apparatus for controlling temperature uniformity of a showerhead Grant 10,780,447 - Fovell , et al. Sept	2020-09-22
Motorcycle Grant D890,033 - Carducci , et al.	2020-07-14
Symmetric Plasma Process Chamber App 20200185192 - CARDUCCI; James D. ; et al.	2020-06-11
Distributed electrode array for plasma processing Grant 10,615,004 - Collins , et al.	2020-04-07
Symmetric plasma process chamber Grant 10,615,006 - Carducci , et al.	2020-04-07
Symmetric plasma process chamber Grant 10,580,620 - Carducci , et al.	2020-03-03
Ion-ion Plasma Atomic Layer Etch Process App 20200035454 - Collins; Kenneth S. ; et al.	2020-01-30
Symmetric plasma process chamber Grant 10,546,728 - Carducci , et al. Ja	2020-01-28
Symmetric plasma process chamber Grant 10,535,502 - Carducci , et al. Ja	2020-01-14
Processing tool with electrically switched electrode assembly Grant 10,510,515 - Collins , et al. Dec	2019-12-17
Ion-ion plasma atomic layer etch process and reactor Grant 10,475,626 - Collins , et al. Nov	2019-11-12
Symmetric plasma process chamber Grant 10,453,656 - Carducci , et al. Oc	2019-10-22
Distributed Electrode Array For Plasma Processing App 20190287765 - COLLINS; Kenneth S. ; et al.	2019-09-19
Distributed electrode array for plasma processing Grant 10,418,225 - Collins , et al. Sept	2019-09-17
Distributed electrode array for plasma processing Grant 10,373,807 - Collins , et al.	2019-08-06
Diamond Like Carbon Layer Formed By An Electron Beam Plasma Process App 20190228970 - YANG; Yang ; et al.	2019-07-25
Distributed electrode array for plasma processing Grant 10,312,056 - Collins , et al.	2019-06-04
Diamond like carbon layer formed by an electron beam plasma process Grant 10,249,495 - Yang , et al.	2019-04-02
Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding Grant 10,249,470 - Kenney , et al.	2019-04-02
Plasma processing apparatus and liner assembly for tuning electrical skews Grant 10,242,847 - Carducci , et al.	2019-03-26
Plasma Reactor Having Radial Struts for Substrate Support App 20190085467 - Nguyen; Andrew ; et al.	2019-03-21
Distributed Electrode Array For Plasma Processing App 20190057840 - COLLINS; Kenneth S. ; et al.	2019-02-21
Distributed Electrode Array For Plasma Processing App 20190057841 - COLLINS; Kenneth S. ; et al.	2019-02-21
Distributed Electrode Array For Plasma Processing App 20190051496 - COLLINS; Kenneth S. ; et al.	2019-02-14
Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding Grant 10,170,279 - Kenney , et al. J	2019-01-01
Plasma Reactor With Electrode Array In Ceiling App 20180374685 - Collins; Kenneth S. ; et al.	2018-12-27
Plasma Reactor With Electrode Assembly For Moving Substrate App 20180374686 - Collins; Kenneth S. ; et al.	2018-12-27
Processing Tool With Electrically Switched Electrode Assembly App 20180374684 - Collins; Kenneth S. ; et al.	2018-12-27
Inductively coupled plasma source with top coil over a ceiling and an independent side coil and independent air flow Grant 10,131,994 - Nguyen , et al. November 20, 2	2018-11-20
Plasma Reactor With Electrode Filaments Extending From Ceiling App 20180308666 - Collins; Kenneth S. ; et al.	2018-10-25
Plasma Reactor With Electrode Filaments App 20180308661 - Collins; Kenneth S. ; et al.	2018-10-25
Plasma Reactor With Filaments And Rf Power Applied At Multiple Frequencies App 20180308664 - Collins; Kenneth S. ; et al.	2018-10-25
Plasma Reactor With Groups Of Electrodes App 20180308667 - Collins; Kenneth S. ; et al.	2018-10-25
Plasma Reactor With Phase Shift Applied Across Electrode Array App 20180308663 - Collins; Kenneth S. ; et al.	2018-10-25
Ion-ion Plasma Atomic Layer Etch Process And Reactor App 20180261429 - Collins; Kenneth S. ; et al.	2018-09-13
Inductively Coupled Plasma Source With Symmetrical Rf Feed And Reactance Elements App 20180218873 - Kenney; Jason A. ; et al.	2018-08-02
Plasma Source With Symmetrical Rf Feed App 20180211811 - Kenney; Jason A. ; et al.	2018-07-26
Symmetrical Plural-Coil Plasma Source with Side Rf Feeds and Rf Distribution Plates App 20180138014 - Carducci; James D. ; et al.	2018-05-17
Inductively coupled plasma source with symmetrical RF feed Grant 9,928,987 - Kenney , et al. March 27, 2	2018-03-27
Symmetric VHF Source for a Plasma Reactor App 20180053630 - Ramaswamy; Kartik ; et al.	2018-02-22
Low Electron Temperature Etch Chamber with Independent Control Over Plasma Density, Radical Composition Ion Energy for Atomic Precision Etching App 20180053631 - Dorf; Leonid ; et al.	2018-02-22
Inductively coupled plasma source with multiple dielectric windows and window-supporting structure Grant 9,896,769 - Nguyen , et al. February 20, 2	2018-02-20
Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates Grant 9,870,897 - Carducci , et al. January 16, 2	2018-01-16
Diamond Like Carbon Layer Formed By An Electron Beam Plasma Process App 20170372899 - YANG; Yang ; et al.	2017-12-28
Gas Distribution Plate Assembly For High Power Plasma Etch Processes App 20170365443 - CARDUCCI; James D. ; et al.	2017-12-21
Symmetrical Inductively Coupled Plasma Source with Symmetrical Flow Chamber App 20170350017 - Nguyen; Andrew ; et al.	2017-12-07
Inductively Coupled Plasma Source with Multiple Dielectric Windows and Window Supporting Structure App 20170350018 - Nguyen; Andrew ; et al.	2017-12-07
Symmetric VHF source for a plasma reactor Grant 9,824,862 - Ramaswamy , et al. November 21, 2	2017-11-21
Apparatus For Controlling Temperature Uniformity Of A Showerhead App 20170304849 - Fovell; Richard ; et al.	2017-10-26
Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching Grant 9,799,491 - Dorf , et al. October 24, 2	2017-10-24
Symmetric Plasma Process Chamber App 20170271129 - CARDUCCI; James D. ; et al.	2017-09-21
Symmetrical inductively coupled plasma source with symmetrical flow chamber Grant 9,745,663 - Nguyen , et al. August 29, 2	2017-08-29
Symmetric plasma process chamber Grant 9,741,546 - Carducci , et al. August 22, 2	2017-08-22
Electron beam plasma source with reduced metal contamination Grant 9,721,760 - Dorf , et al. August 1, 2	2017-08-01
Temperature controlled chamber liner Grant 9,653,267 - Carducci , et al. May 16, 2	2017-05-16
Low Electron Temperature Etch Chamber With Independent Control Over Plasma Density, Radical Composition And Ion Energy For Atomic Precision Etching App 20170125217 - Dorf; Leonid ; et al.	2017-05-04
Heated showerhead assembly Grant 9,570,275 - Carducci , et al. February 14, 2	2017-02-14
Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads Grant 9,540,731 - Noorbakhsh , et al. January 10, 2	2017-01-10
Symmetric Plasma Process Chamber App 20160314936 - CARDUCCI; James D. ; et al.	2016-10-27
Symmetric Plasma Process Chamber App 20160314942 - CARDUCCI; James D. ; et al.	2016-10-27
Symmetric Plasma Process Chamber App 20160314940 - CARDUCCI; James D. ; et al.	2016-10-27
Symmetric Plasma Process Chamber App 20160314937 - CARDUCCI; James D. ; et al.	2016-10-27
Ion-ion Plasma Atomic Layer Etch Process And Reactor App 20160276134 - Collins; Kenneth S. ; et al.	2016-09-22
Electron beam plasma source with segmented suppression electrode for uniform plasma generation Grant 9,443,700 - Dorf , et al. September 13, 2	2016-09-13
Electron Beam Plasma Source With Rotating Cathode, Backside Heliumcooling And Liquid Cooled Pedestal For Uniform Plasma Generation App 20160042961 - Dorf; Leonid ; et al.	2016-02-11
Showerhead insulator and etch chamber liner Grant 9,196,462 - Carducci , et al. November 24, 2	2015-11-24
Plasma Processing Apparatus And Liner Assembly For Tuning Electrical Skews App 20150279633 - CARDUCCI; James D. ; et al.	2015-10-01
Electron beam plasma source with arrayed plasma sources for uniform plasma generation Grant 9,129,777 - Dorf , et al. September 8, 2	2015-09-08
Symmetrical inductively coupled plasma source with side RF feeds and RF distribution plates Grant 9,082,590 - Carducci , et al. July 14, 2	2015-07-14
Symmetric Vhf Source For A Plasma Reactor App 20150075719 - Ramaswamy; Kartik ; et al.	2015-03-19
Heated Showerhead Assembly App 20150053794 - CARDUCCI; James D. ; et al.	2015-02-26
Electron beam plasma source with segmented beam dump for uniform plasma generation Grant 8,951,384 - Dorf , et al. February 10, 2	2015-02-10
Symmetric VHF source for a plasma reactor Grant 8,920,597 - Ramaswamy , et al. December 30, 2	2014-12-30
Symmetric VHF source for a plasma reactor Grant 08920597 -	2014-12-30
Electron Beam Plasma Source With Reduced Metal Contamination App 20140338835 - Dorf; Leonid ; et al.	2014-11-20
Heated showerhead assembly Grant 8,876,024 - Carducci , et al. November 4, 2	2014-11-04
Symmetrical Plural-coil Plasma Source With Side Rf Feeds And Rf Distribution Plates App 20140312766 - Carducci; James D. ; et al.	2014-10-23
Multiple Coil Inductively Coupled Plasma Source With Offset Frequencies And Double-walled Shielding App 20140265832 - Kenney; Jason A. ; et al.	2014-09-18
Electron Beam Plasma Source With Segmented Suppression Electrode For Uniform Plasma Generation App 20140265855 - Dorf; Leonid ; et al.	2014-09-18
Symmetric VHF plasma power coupler with active uniformity steering Grant 8,652,297 - Collins , et al. February 18, 2	2014-02-18
Symmetrical Inductively Coupled Plasma Source With Symmetrical Flow Chamber App 20140020835 - Nguyen; Andrew ; et al.	2014-01-23
Symmetrical Inductively Coupled Plasma Source With Side Rf Feeds And Rf Distribution Plates App 20140021861 - Carducci; James D. ; et al.	2014-01-23
Inductively Coupled Plasma Source With Multiple Dielectric Windows And Window-supporting Structure App 20140020837 - NGUYEN; ANDREW ; et al.	2014-01-23
Inductively Coupled Plasma Source With Symmetrical Rf Feed App 20140020839 - Kenney; Jason A. ; et al.	2014-01-23
Inductively Coupled Plasma Source With Plural Top Coils Over A Ceiling And An Independent Side Coil App 20140020836 - NGUYEN; ANDREW ; et al.	2014-01-23
Symmetrical Inductively Coupled Plasma Source With Coaxial Rf Feed And Coaxial Shielding App 20140020838 - Kenney; Jason A. ; et al.	2014-01-23
Showerhead Insulator And Etch Chamber Liner App 20130327480 - Carducci; James D. ; et al.	2013-12-12
Plasma Processing Using Rf Return Path Variable Impedance Controller With Two-dimensional Tuning Space App 20130277333 - Misra; Nipun ; et al.	2013-10-24
Apparatus for efficient removal of halogen residues from etched substrates Grant 8,486,194 - Bhang , et al. July 16, 2	2013-07-16
Temperature Controlled Chamber Liner App 20130118686 - Carducci; James D. ; et al.	2013-05-16
Lower liner with integrated flow equalizer and improved conductance Grant 8,440,019 - Carducci , et al. May 14, 2	2013-05-14
Electron Beam Plasma Source With Segmented Beam Dump For Uniform Plasma Generation App 20130098882 - Dorf; Leonid ; et al.	2013-04-25
Electron Beam Plasma Source With Arrayed Plasma Sources For Uniform Plasma Generation App 20130098551 - Dorf; Leonid ; et al.	2013-04-25
E-beam Plasma Source With Profiled E-beam Extraction Grid For Uniform Plasma Generation App 20130098552 - Dorf; Leonid ; et al.	2013-04-25
Switched Electron Beam Plasma Source Array For Uniform Plasma Production App 20130098872 - Dorf; Leonid ; et al.	2013-04-25
Symmetric Plasma Process Chamber App 20130087286 - Carducci; James D. ; et al.	2013-04-11
Apparatus For Efficient Removal Of Halogen Residues From Etched Substrates App 20130040080 - Bhang; Kenneth J. ; et al.	2013-02-14
Method And Apparatus For Enhancing Flow Uniformity In A Process Chamber App 20130008604 - BERA; KALLOL ; et al.	2013-01-10
Lower Liner With Integrated Flow Equalizer And Improved Conductance App 20120325406 - CARDUCCI; James D. ; et al.	2012-12-27
Etching chamber having flow equalizer and lower liner Grant 8,313,578 - Carducci , et al. November 20, 2	2012-11-20
Apparatus for efficient removal of halogen residues from etched substrates Grant 8,293,016 - Bahng , et al. October 23, 2	2012-10-23
Lower liner with integrated flow equalizer and improved conductance Grant 8,282,736 - Carducci , et al. October 9, 2	2012-10-09
Lower Liner With Integrated Flow Equalizer And Improved Conductance App 20120145326 - CARDUCCI; James D. ; et al.	2012-06-14
Gas flow diffuser Grant 8,123,902 - Brillhart , et al. February 28, 2	2012-02-28
Symmetric Vhf Source For A Plasma Reactor App 20120043023 - Ramaswamy; Kartik ; et al.	2012-02-23
Lower liner with integrated flow equalizer and improved conductance Grant 8,118,938 - Carducci , et al. February 21, 2	2012-02-21
Symmetric Vhf Plasma Power Coupler With Active Uniformity Steering App 20120034136 - Collins; Kenneth S. ; et al.	2012-02-09
Plasma Processing Apparatus And Liner Assembly For Tuning Electrical Skews App 20120018402 - Carducci; James D. ; et al.	2012-01-26
Lower Liner With Integrated Flow Equalizer And Improved Conductance App 20110284166 - CARDUCCI; JAMES D. ; et al.	2011-11-24
Lower liner with integrated flow equalizer and improved conductance Grant 7,987,814 - Carducci , et al. August 2, 2	2011-08-02
Apparatus For Controlling Temperature Uniformity Of A Showerhead App 20110180233 - BERA; KALLOL ; et al.	2011-07-28
Reconfigurable Multi-zone Gas Delivery Hardware For Substrate Processing Showerheads App 20110162800 - Noorbakhsh; Hamid ; et al.	2011-07-07
Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor Grant 7,972,467 - Bera , et al. July 5, 2	2011-07-05
Apparatus And Method For Low-k Dielectric Repair App 20110151590 - Carducci; James D. ; et al.	2011-06-23
Apparatus and method to confine plasma and reduce flow resistance in a plasma Grant 7,754,997 - Bera , et al. July 13, 2	2010-07-13
Apparatus For Efficient Removal Of Halogen Residues From Etched Substrates App 20100133255 - Bahng; Kenneth J. ; et al.	2010-06-03
Methods And Apparatus For Improving Flow Uniformity In A Process Chamber App 20100081284 - BALAKRISHNA; AJIT ; et al.	2010-04-01
Etching Chamber Having Flow Equalizer And Lower Liner App 20100065213 - Carducci; James D. ; et al.	2010-03-18
Lower Liner With Integrated Flow Equalizer And Improved Conductance App 20090250169 - Carducci; James D. ; et al.	2009-10-08
Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor Grant 7,585,384 - Bera , et al. September 8, 2	2009-09-08
Method And Apparatus For Enhancing Flow Uniformity In A Process Chamber App 20090188624 - BERA; KALLOL ; et al.	2009-07-30
Etching Chamber Having Flow Equalizer And Lower Liner App 20090188625 - CARDUCCI; JAMES D. ; et al.	2009-07-30
Heated Showerhead Assembly App 20090179085 - CARDUCCI; JAMES D. ; et al.	2009-07-16
Showerhead Insulator And Etch Chamber Liner App 20090178763 - Carducci; James D. ; et al.	2009-07-16
Apparatus And Method To Confine Plasma And Reduce Flow Resistance In A Plasma Reactor App 20080314522 - Bera; Kallol ; et al.	2008-12-25
Gas Flow Diffuser App 20080230518 - Brillhart; Paul ; et al.	2008-09-25
Apparatus And Method To Confine Plasma And Reduce Flow Resistance In A Plasma Reactor App 20080105660 - Bera; Kallol ; et al.	2008-05-08
Temperature Controlled Semiconductor Processing Chamber Liner App 20070091535 - Noorbakhsh; Hamid ; et al.	2007-04-26
Double slit-valve doors for plasma processing Grant 7,147,719 - Welch , et al. December 12, 2	2006-12-12
Gas distribution showerhead for semiconductor processing Grant 6,983,892 - Noorbakhsh , et al. January 10, 2	2006-01-10
Gas distribution showerhead for semiconductor processing App 20050173569 - Noorbakhsh, Hamid ; et al.	2005-08-11
Configurable single substrate wet-dry integrated cluster cleaner Grant 6,899,111 - Luscher , et al. May 31, 2	2005-05-31
Capacitively coupled plasma reactor with uniform radial distribution of plasma Grant 6,900,596 - Yang , et al. May 31, 2	2005-05-31
Magnetic barrier for plasma in chamber exhaust Grant 6,863,835 - Carducci , et al. March 8, 2	2005-03-08
Dielectric etch chamber with expanded process window App 20050003675 - Carducci, James D. ; et al.	2005-01-06
Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor App 20040206309 - Bera, Kallol ; et al.	2004-10-21
Dielectric etch chamber with expanded process window Grant 6,797,639 - Carducci , et al. September 28, 2	2004-09-28
Magnetic barrier for plasma in chamber exhaust Grant 6,773,544 - Carducci , et al. August 10, 2	2004-08-10
Double slit-valve doors for plasma processing App 20040083978 - Welch, Michael D. ; et al.	2004-05-06
Dielectric etch chamber with expanded process window Grant 6,716,302 - Carducci , et al. April 6, 2	2004-04-06
Capacitively coupled plasma reactor with uniform radial distribution of plasma App 20040056602 - Yang, Jang Gyoo ; et al.	2004-03-25
Double slit-valve doors for plasma processing Grant 6,647,918 - Welch , et al. November 18, 2	2003-11-18
Plasma reactor with a tri-magnet plasma confinement apparatus Grant 6,562,189 - Quiles , et al. May 13, 2	2003-05-13
Dielectric etch chamber with expanded process window App 20030037880 - Carducci, James D. ; et al.	2003-02-27
Dielectric etch chamber with expanded process window App 20030038111 - Carducci, James D. ; et al.	2003-02-27
Configurable single substrate wet-dry integrated cluster cleaner App 20020189638 - Luscher, Paul E. ; et al.	2002-12-19
Series chamber for substrate processing App 20020096114 - Carducci, James D. ; et al.	2002-07-25
Temperature controlled semiconductor processing chamber liner App 20020069970 - Noorbakhsh, Hamid ; et al.	2002-06-13
Configurable single substrate wet-dry integrated cluster cleaner App 20020062848 - Luscher, Paul E. ; et al.	2002-05-30
Magnetic barrier for plasma in chamber exhaust App 20010032590 - Carducci, James D. ; et al.	2001-10-25
Magnetic barrier for plasma in chamber exhaust App 20010032591 - Carducci, James D. ; et al.	2001-10-25
Adjusting DC bias voltage in plasma chamber App 20010014540 - Shan, Hongching ; et al.	2001-08-16
Adjusting DC bias voltage in plasma chamber Grant 6,221,782 - Shan , et al. April 24, 2	2001-04-24
Double slit-valve doors for plasma processing Grant 6,192,827 - Welch , et al. February 27, 2	2001-02-27

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