Regelman; Olga

Patent Applications and Registrations

Patent applications and USPTO patent grants for Regelman; Olga.The latest application filed is for "distributed electrode array for plasma processing".

Company Profile

4.11.13

Regelman; Olga - Daly City CA
Regelman, Olga - Dale City CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Distributed electrode array for plasma processing Grant 10,615,004 - Collins , et al.	2020-04-07
Distributed Electrode Array For Plasma Processing App 20190287765 - COLLINS; Kenneth S. ; et al.	2019-09-19
Distributed electrode array for plasma processing Grant 10,418,225 - Collins , et al. Sept	2019-09-17
Distributed electrode array for plasma processing Grant 10,373,807 - Collins , et al.	2019-08-06
Distributed electrode array for plasma processing Grant 10,312,056 - Collins , et al.	2019-06-04
Distributed Electrode Array For Plasma Processing App 20190057841 - COLLINS; Kenneth S. ; et al.	2019-02-21
Distributed Electrode Array For Plasma Processing App 20190057840 - COLLINS; Kenneth S. ; et al.	2019-02-21
Distributed Electrode Array For Plasma Processing App 20190051496 - COLLINS; Kenneth S. ; et al.	2019-02-14
Low Electron Temperature Etch Chamber with Independent Control Over Plasma Density, Radical Composition Ion Energy for Atomic Precision Etching App 20180053631 - Dorf; Leonid ; et al.	2018-02-22
Low electron temperature etch chamber with independent control over plasma density, radical composition and ion energy for atomic precision etching Grant 9,799,491 - Dorf , et al. October 24, 2	2017-10-24
Low Electron Temperature Etch Chamber With Independent Control Over Plasma Density, Radical Composition And Ion Energy For Atomic Precision Etching App 20170125217 - Dorf; Leonid ; et al.	2017-05-04
Heated showerhead assembly Grant 9,570,275 - Carducci , et al. February 14, 2	2017-02-14
Showerhead insulator and etch chamber liner Grant 9,196,462 - Carducci , et al. November 24, 2	2015-11-24
Heated Showerhead Assembly App 20150053794 - CARDUCCI; James D. ; et al.	2015-02-26
Heated showerhead assembly Grant 8,876,024 - Carducci , et al. November 4, 2	2014-11-04
Showerhead Insulator And Etch Chamber Liner App 20130327480 - Carducci; James D. ; et al.	2013-12-12
Methods and apparatus for controlling characteristics of a plasma Grant 7,777,599 - Shannon , et al. August 17, 2	2010-08-17
Showerhead Insulator And Etch Chamber Liner App 20090178763 - Carducci; James D. ; et al.	2009-07-16
Heated Showerhead Assembly App 20090179085 - CARDUCCI; JAMES D. ; et al.	2009-07-16
Methods And Apparatus For Controlling Characteristics Of A Plasma App 20090140828 - Shannon; Steven C. ; et al.	2009-06-04
Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface Grant 7,196,283 - Buchberger, Jr. , et al. March 27, 2	2007-03-27
Plasma reactor overhead source power electrode with low arcing tendency, cylindrical gas outlets and shaped surface App 20050178748 - Buchberger, Douglas A. JR. ; et al.	2005-08-18
Top gas feed lid for semiconductor processing chamber App 20030037879 - Askarinam, Farahmand E. ; et al.	2003-02-27

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