U.S. patent application number 12/040284 was filed with the patent office on 2008-11-27 for process chamber and load-lock split frame construction.
Invention is credited to SUHAIL ANWAR, Janusz Jozwiak, Eric Stegall, Robin L. Tiner, Philip Vancas.
Application Number | 20080289284 12/040284 |
Document ID | / |
Family ID | 39721617 |
Filed Date | 2008-11-27 |
United States Patent
Application |
20080289284 |
Kind Code |
A1 |
ANWAR; SUHAIL ; et
al. |
November 27, 2008 |
PROCESS CHAMBER AND LOAD-LOCK SPLIT FRAME CONSTRUCTION
Abstract
The present invention generally relates to a split frame
assembly for supporting a chamber in a processing system. In order
to adequately fit into the body of an airplane for transport, the
frame may be split into two pieces. Once split, each piece may
individually be loaded onto the airplane. The upper piece may
comprise all of the various components necessary to operate the
chamber including gas panels, control panels, or other panels. The
lower piece may support the upper piece.
Inventors: |
ANWAR; SUHAIL; (San Jose,
CA) ; Stegall; Eric; (San Martin, CA) ; Tiner;
Robin L.; (Santa Cruz, CA) ; Jozwiak; Janusz;
(San Ramon, CA) ; Vancas; Philip; (Modesto,
CA) |
Correspondence
Address: |
PATTERSON & SHERIDAN, LLP - - APPM/TX
3040 POST OAK BOULEVARD, SUITE 1500
HOUSTON
TX
77056
US
|
Family ID: |
39721617 |
Appl. No.: |
12/040284 |
Filed: |
February 29, 2008 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
|
60892474 |
Mar 1, 2007 |
|
|
|
Current U.S.
Class: |
52/633 |
Current CPC
Class: |
F16M 3/00 20130101 |
Class at
Publication: |
52/633 |
International
Class: |
E04B 1/19 20060101
E04B001/19 |
Claims
1. A split frame chamber support, comprising: a lower frame having
a plurality of first supporting posts; one or more aligning
mechanisms coupled with one or more first supporting posts; one or
more first flanges protruding from and coupled with one or more of
the first supporting posts; and an upper frame coupled with the
lower frame.
2. The support of claim 1, wherein each first supporting post
comprises a center axis and where each aligning mechanism comprises
two upwardly extending flanges that protrude from each first
supporting post at an angle relative to the center axis.
3. The support of claim 1, wherein the upper frame further
comprises one or more second flanges coupled with the one or more
first flanges.
4. The support of claim 3, further comprising: one or more
fastening mechanisms extending through the one or more first
flanges and the one or more second flanges.
5. The support of claim 4, wherein the one or more second flanges
has threaded openings therethrough for receiving the one or more
fastening mechanisms.
6. The support of claim 1, wherein the upper frame further
comprises a plurality of second supporting posts, and wherein at
least one second support post has at least three connection rails
coupled thereto with each connection rail coupled at a different
elevation.
7. The support of claim 1, wherein each first supporting posts has
a center axis and wherein the one or more first flanges extend from
the first supporting posts perpendicular to the center axis.
8. An apparatus, comprising: a lower frame having a plurality of
first supporting posts; one or more aligning mechanisms coupled
with one or more first supporting posts; one or more first flanges
protruding from and coupled with one or more of the first
supporting posts; an upper frame coupled with the lower frame; and
a chamber coupled with the upper frame.
9. The apparatus of claim 8, wherein the chamber comprises a
processing chamber, a load lock chamber, or a transfer chamber.
10. The apparatus of claim 9, wherein the processing chamber
comprises a plasma enhanced chemical vapor deposition chamber or a
physical vapor deposition chamber.
11. The apparatus of claim 8, wherein each first supporting post
comprises a center axis and where each aligning mechanism comprises
two upwardly extending flanges that protrude from each first
supporting post at an angle relative to the center axis.
12. The apparatus of claim 8, wherein the upper frame further
comprises one or more second flanges coupled with the one or more
first flanges.
13. The apparatus of claim 12, wherein further comprising: one or
more fastening mechanisms extending through the one or more first
flanges and the one or more second flanges.
14. The apparatus of claim 8, wherein each first supporting posts
has a center axis and wherein the one or more first flanges extend
from the first supporting posts perpendicular to the center
axis.
15. The apparatus of claim 8, wherein the upper frame further
comprises a plurality of second supporting posts, and wherein at
least one second support post has at least three connection rails
coupled thereto with each connection rail coupled at a different
elevation.
16. The apparatus of claim 8, further comprising: a gas panel
disposed within the upper frame.
17. The apparatus of claim 8, further comprising: a control panel
disposed within the upper frame.
18. A split frame support, comprising: a lower frame, the lower
frame comprising: a plurality of first supporting posts extending
along parallel center axis; one or more first connection rails
extending between adjacent first supporting posts, the one or more
of the first connection rails detachably coupled with two of the
first supporting posts; a coupling flange coupled with each first
supporting post, the coupling flange extending perpendicular to the
center axis; and one or more alignment mechanisms, the alignment
mechanisms coupled to a first supporting post and extending from
the first supporting post at an angle relative to the center axis;
and an upper frame coupled to the lower frame, the upper frame
comprising: a plurality of second supporting posts each extending
along separate second center axis equal to a center axis of a
corresponding center axis of a first supporting post, at least one
second support post has at least three second connection rails
coupled thereto with each second connection rail coupled at a
different elevation.
19. The support of claim 18, wherein the upper frame further
comprises one or more second flanges coupled with the one or more
first flanges.
20. The support of claim 19, wherein the one or more second flanges
has threaded openings therethrough for receiving the one or more
fastening mechanisms.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims benefit of U.S. Provisional Patent
Application Ser. No. 60/892,474 (APPM/011877L), entitled "Process
Chamber and Load-Lock Split Frame Construction", filed Mar. 1,
2007, which is herein incorporated by reference.
BACKGROUND OF THE INVENTION
[0002] 1. Field of the Invention
[0003] Embodiments of the present invention generally relate to a
split frame assembly that may be used to support a chamber.
[0004] 2. Description of the Related Art
[0005] To fabricate larger flat panel displays out of a single
substrate, a larger processing chamber may be necessary to
fabricate the flat panel displays. Numerous consecutive processes
may be performed on the substrates from which the flat panel
displays are made. When multiple processes are performed
consecutively upon a substrate, it may be beneficial to couple
multiple processing chambers onto a common transfer chamber. The
transfer chamber may receive the substrates from a load lock
chamber and then transfer the substrates to one or more processing
chambers. The various chambers, including process chambers, load
lock chambers, and transfer chambers, may be coupled together in a
factory to create an organized processing system. Therefore, there
is a need in the art for a support for the various chambers in a
processing system.
SUMMARY OF THE INVENTION
[0006] The present invention generally relates to a split frame
assembly for supporting a chamber in a processing system. In order
to adequately fit into the body of an airplane for transport, the
frame may be split into two pieces. Once split, each piece may
individually be loaded onto the airplane. The upper piece may
comprise all of the various components necessary to operate the
chamber including gas panels, control panels, or other panels. The
lower piece may support the upper piece.
[0007] In one embodiment, a split frame chamber support is
disclosed. The support comprises a lower frame having a plurality
of first supporting posts, one or more aligning mechanisms coupled
with one or more first supporting posts, one or more first flanges
protruding from and coupled with one or more of the first
supporting posts, and an upper frame coupled with the lower
frame.
[0008] In another embodiment, an apparatus is disclosed. The
apparatus comprises a lower frame having a plurality of first
supporting posts, one or more aligning mechanisms coupled with one
or more first supporting posts, one or more first flanges
protruding from and coupled with one or more of the first
supporting posts, an upper frame coupled with the lower frame, and
a chamber coupled with the upper frame.
[0009] In still another embodiment, a split frame support is
disclosed. The support comprises a lower frame and an upper frame
coupled to the lower frame. The lower frame comprises a plurality
of first supporting posts extending along a parallel center axis,
one or more first connection rails extending between adjacent first
supporting posts, one or more of the first connection rails
detachably coupled with two of the first supporting posts, a
coupling flange coupled with each first supporting post, the
coupling flange extending perpendicular to the center axis, and one
or more alignment mechanisms, the alignment mechanisms coupled to a
first supporting post and extending from the first supporting post
at an angle relative to the center axis. The upper frame comprises
a plurality of second supporting posts each extending along
separate second center axis equal to a center axis of a
corresponding center axis of a first supporting post, wherein at
least one second support post has at least three second connection
rails coupled thereto with each second connection rail coupled at a
different elevation.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] So that the manner in which the above recited features of
the present invention can be understood in detail, a more
particular description of the invention, briefly summarized above,
may be had by reference to embodiments, some of which are
illustrated in the appended drawings. It is to be noted, however,
that the appended drawings illustrate only typical embodiments of
this invention and are therefore not to be considered limiting of
its scope, for the invention may admit to other equally effective
embodiments.
[0011] FIG. 1 is a prospective view of a split frame support
assembly exploded according to one embodiment of the invention.
[0012] FIG. 2 is a prospective view of the split frame support
assembly of FIG. 1 assembled.
[0013] FIG. 3 is a cross sectional view of a coupling between an
upper frame and a lower frame according to one embodiment of the
invention.
[0014] FIG. 4 is a cross sectional view of a coupling between an
upper frame and a lower frame according to another embodiment of
the invention.
[0015] To facilitate understanding, identical reference numerals
have been used, where possible, to designate identical elements
that are common to the figures. It is contemplated that elements
disclosed in one embodiment may be beneficially utilized on other
embodiments without specific recitation.
DETAILED DESCRIPTION
[0016] The present invention generally relates to a split frame
assembly for supporting a chamber in a processing system. In order
to adequately fit into the body of an airplane for transport, the
frame may be split into two pieces. Once split, each piece may
individually be loaded onto the airplane. The upper piece may
comprise all of the various components necessary to operate the
chamber including gas panels, control panels, or other panels. The
lower piece may support the upper piece.
[0017] The present invention will be described below with reference
to processing chambers such as a plasma enhanced chemical vapor
deposition (PECVD) chamber or a physical vapor deposition (PVD)
chamber, and with reference to load lock chambers. Processing
chambers, load lock chambers, and transfer chambers which may be
supported on the split frame support described herein are available
from AKT, a subsidiary of Applied Materials, Inc., Santa Clara,
Calif. It is contemplated that the split frame support described
herein may be used to support other processing chambers, other load
lock chambers, and other transfer chambers including those supplied
by other manufacturers.
[0018] FIG. 1 is a prospective view of a split frame support
assembly 100 exploded according to one embodiment of the invention.
FIG. 2 is a prospective view of the split frame support assembly
100 of FIG. 1 assembled. The assembly 100 may comprise an upper
frame portion 102 and a lower frame portion 104. Coupled to the
upper frame portion 102 may be a chamber 106 (shown in phantom). In
one embodiment, the chamber 106 may be a processing chamber. In
another embodiment, the chamber may be a load lock assembly. In
another embodiment, the chamber may be a transfer chamber. In yet
another embodiment, the chamber 106 may be a PECVD chamber. In
still another embodiment, the chamber 106 may be a PVD chamber.
[0019] The lower frame assembly 104 may comprise a plurality of
support posts 108 that may rest on the ground and extend
vertically. Each of the support posts 108 has a center axis that is
parallel to the center axis of the other support posts 108. In one
embodiment, the support posts 108 may be coupled together by
connection rails 114 that may extend between the support posts 108.
In one embodiment, the connection rails 114 and the support posts
108 may comprise steel. In another embodiment, the connection rails
114 and the support posts 108 may comprise hollow tubes.
[0020] One or more of the connection rails 114 may be removable
from the lower frame assembly 104. The removable connection rail
114 may be disposed on a side of the assembly 100 opposite a slit
valve (not shown) coupled with the chamber 106. The connection
rails 114 may be coupled to the support posts 108 by any well known
coupling mechanism such as welding, soldering, nut and bolt
assembly, etc. One or more flanges 112 may extend from the support
post 108. The flanges 112 may couple the upper frame portion 102 to
the lower frame portion 104.
[0021] At the top of each of the support posts 108, an alignment
mechanism 110 may be present. The alignment mechanisms 110 may be
angled relative to the center axis of the support posts 108. The
alignment mechanisms 110 may comprise two flanges that are each
angled outward from the support post 108. The angled alignment
members 110 permit the upper frame portion 102 to slide into place
when the upper frame portion 102 is lowered onto the lower frame
assembly 104. When assembling the upper frame portion 102 to the
lower frame portion 104, the upper frame portion 102 may be
significantly large and thus necessitate the use of a crane to
dispose the upper frame portion 102 onto the lower frame portion
104. The alignment mechanisms 110 may provide precise placement of
the upper frame portion 102 on the lower frame portion 104. The
alignment mechanisms 110 may permit the upper frame portion 102 to
slide into place during placement onto the lower frame portion 104
even when the upper frame portion 102 is misaligned as it is
lowered onto the lower frame portion 104.
[0022] The upper frame portion 102 may comprise a plurality of
support posts 116. The support posts 116 may each comprise a
central axis that is parallel to the other support posts 116. When
the upper frame portion 102 is coupled with the lower frame portion
104, the center axis of each support post 116 may align with the
central axis of a corresponding support post 108 of the lower frame
portion 104.
[0023] The bottom of the support posts 116 may be coupled together
by a plurality of lower connection rails 118. The top of the
support posts 116 may be coupled together by a plurality of top
connection rails 120. One additional connection rail 122 may be at
a lower elevation than the top connection rails 120 and at a higher
elevation than the lower connection rails 118 to accommodate a slit
valve assembly (not shown) if necessary. Thus, two of the support
posts 116 have three connection rails 118, 120, 122 coupled to the
support post 116 at different elevations. The connection rails 118,
120, 122 may be coupled to the support posts 116 by any well known
coupling mechanism such as welding, soldering, nut and bolt
assembly, etc. In one embodiment, the connection rails 118, 120,
122 and the support posts 116 may comprise steel. In another
embodiment, the connection rails 118, 120, 122 and the support
posts 116 may comprise hollow tubes.
[0024] A power box and/or control panel 124 (hereinafter referred
to as a control panel 124) and a gas panel 126 may be disposed
within the upper frame portion 102. The control panel 124 may be
supported within the upper frame portion 102 by a control panel
support 128 that may be coupled to the lower connection rails 118.
A flange 130 may be disposed proximate the bottom of the support
posts 116 for coupling to the flange 112 disposed on the lower
frame portion 104.
[0025] The split frame assembly 100 permits the lower frame portion
104, the upper frame portion 102, and the chamber 106 to be
separately shipped and then assembled on site. The lower frame
portion 104 may, if desired, be disassembled into its individual
components and then assembled on site. In one embodiment, all of
the control features such as a gas panel 126 and any control panels
124 may be disposed entirely within the upper frame portion 104. In
a second embodiment, control features may be disposed in both the
lower frame portion 104 and the upper frame portion 102. In the
second embodiment, the control features in the lower frame portion
104 and the upper frame portion 102 may be easily connected upon
assembly of the upper frame portion 102 to the lower frame portion
104.
[0026] FIG. 3 is a cross sectional view of a coupling between an
upper frame and a lower frame according to one embodiment of the
invention. The lower frame may comprise one or more support posts
308 coupled to adjacent support posts 308 by a connection rail 314.
The upper frame may comprise a plurality of support posts 316
coupled to adjacent support posts 316 by a connection rail 318. The
upper frame may be disposed onto the lower frame in substantially
perfect alignment by permitting the upper frame to slide down the
angled alignment mechanisms 310 coupled with the lower frame.
[0027] The upper frame and the lower frame may be coupled together
by a flange 312 coupled to the lower frame and a flange 330 coupled
to the upper frame. The flange 312 coupled to the lower frame may
extend perpendicularly from the center axis of the support post
308. Similarly, the flange 330 may extend perpendicularly from the
support post 316. One or more fastening mechanisms 332 may be used
to couple flange 312 to flange 330. In one embodiment, the
fastening mechanisms 332 may comprise a bolt. When a bolt is used
as the fastening mechanism 332, the flange 330 may have a threaded
through hole to receive the threaded portion of the bolt.
Additionally, for added fastening strength, a lower portion of
connection rail 318 may have a threaded hole therethrough for
receiving the bolt.
[0028] FIG. 4 is a cross sectional view of a coupling between an
upper frame and a lower frame according to another embodiment of
the invention. The lower frame may comprise one or more support
posts 408 coupled to adjacent support posts 408 by a connection
rail 414. The upper frame may comprise a plurality of support posts
416 coupled to adjacent support posts 416 by a connection rail 418.
The upper frame may be disposed onto the lower frame in
substantially perfect alignment by permitting the upper frame to
slide down the angled alignment mechanisms 410 coupled with the
lower frame.
[0029] The upper frame and the lower frame may be coupled together
by a flange 412 coupled to the lower frame and a flange 430 coupled
to the upper frame. The flange 412 coupled to the lower frame may
extend perpendicularly from the center axis of the support post
408. Similarly, the flange 430 may extend perpendicularly from the
support post 416. One or more coupling mechanisms 432 may be used
to couple flange 412 to flange 430. In one embodiment, the coupling
mechanisms 432 may comprise pins that extend from a bottom surface
of the connection rail 418 and through receiving holes in both
flanges 430, 412. In another embodiment, the coupling mechanisms
432 may comprise pins that extend from a bottom surface of flange
430 and through receiving holes in flange 412.
[0030] A split frame assembly may be useful for supporting
processing chambers, load lock chambers, or transfer chambers. The
split frame assembly may permit large, preassembled sections of a
processing apparatus to be shipped together on an airplane. Once
on-site, the sections may be easily assembled.
[0031] While the foregoing is directed to embodiments of the
present invention, other and further embodiments of the invention
may be devised without departing from the basic scope thereof, and
the scope thereof is determined by the claims that follow.
* * * * *