Anwar; Suhail
Patent Applications and Registrations
Patent applications and USPTO patent grants for Anwar; Suhail.The latest application filed is for "large-area high-density plasma processing chamber for flat panel displays".
Company Profile
8.67.71
- Anwar; Suhail - Saratoga CA
- Anwar; Suhail - San Jose CA
Patent Activity
| Patent | Date |
|---|---|
| Substrate processing method and apparatus for controlling phase angles of harmonic signals Grant 10,903,048 - Wu , et al. January 26, 2 | 2021-01-26 |
| Large-area High-density Plasma Processing Chamber For Flat Panel Displays App 20200347499 - ANWAR; Suhail ; et al. | 2020-11-05 |
| Shadow frame with sides having a varied profile for improved deposition uniformity Grant 10,468,221 - Furuta , et al. No | 2019-11-05 |
| Slit valve door with moving mating part Grant 10,453,718 - Behdjat , et al. Oc | 2019-10-22 |
| CVD thin film stress control method for display application Grant 10,312,475 - Won , et al. | 2019-06-04 |
| Plasma uniformity control by gas diffuser hole design Grant 10,312,058 - Choi , et al. | 2019-06-04 |
| Plasma uniformity control by gas diffuser hole design Grant 10,262,837 - Choi , et al. | 2019-04-16 |
| Shadow Frame With Sides Having A Varied Profile For Improved Deposition Uniformity App 20190096624 - FURUTA; Gaku ; et al. | 2019-03-28 |
| Substrate Processing Method And Apparatus App 20190043695 - WU; Yui Lun ; et al. | 2019-02-07 |
| Cvd Thin Film Stress Control Method For Display Application App 20180331328 - WON; Tae Kyung ; et al. | 2018-11-15 |
| Compact configurable modular radio frequency matching network assembly for plasma processing systems Grant 10,043,638 - Kudela , et al. August 7, 2 | 2018-08-07 |
| Vertical inline CVD system Grant 9,922,854 - Kurita , et al. March 20, 2 | 2018-03-20 |
| Plasma Uniformity Control By Gas Diffuser Hole Design App 20180025890 - CHOI; Soo Young ; et al. | 2018-01-25 |
| Dodecadon Transfer Chamber And Processing System Having The Same App 20170352562 - KURITA; Shinichi ; et al. | 2017-12-07 |
| Tightly fitted ceramic insulator on large area electrode Grant 9,827,578 - Kudela , et al. November 28, 2 | 2017-11-28 |
| Non-shadow Frame Plasma Processing Chamber App 20170335459 - CHOI; Young-jin ; et al. | 2017-11-23 |
| Transmission line RF applicator for plasma chamber Grant 9,818,580 - Kudela , et al. November 14, 2 | 2017-11-14 |
| Anodized showerhead Grant 9,758,869 - Choi , et al. September 12, 2 | 2017-09-12 |
| Substrate transfer robot with chamber and substrate monitoring capability Grant 9,691,650 - Kurita , et al. June 27, 2 | 2017-06-27 |
| Gas Diffuser Having Grooved Hollow Cathodes App 20170178867 - KUDELA; Jozef ; et al. | 2017-06-22 |
| Ground Return For Plasma Processes App 20160305025 - CHOI; Soo Young ; et al. | 2016-10-20 |
| Method and apparatus for sealing an opening of a processing chamber Grant 9,458,538 - Kurita , et al. October 4, 2 | 2016-10-04 |
| Systems and methods for improved radio frequency matching networks Grant 9,425,026 - Anwar , et al. August 23, 2 | 2016-08-23 |
| Gas Delivery And Distribution For Uniform Process In Linear-type Large-area Plasma Reactor App 20160208380 - WHITE; John M. ; et al. | 2016-07-21 |
| Guided wave applicator with non-gaseous dielectric for plasma chamber Grant 9,397,380 - Kudela , et al. July 19, 2 | 2016-07-19 |
| Ground return for plasma processes Grant 9,382,621 - Choi , et al. July 5, 2 | 2016-07-05 |
| Vertical inline CVD system Grant 9,324,597 - Kurita , et al. April 26, 2 | 2016-04-26 |
| Plasma Uniformity Control By Gas Diffuser Hole Design App 20160056019 - CHOI; Soo Young ; et al. | 2016-02-25 |
| Systems And Methods For Improved Radio Frequency Matching Networks App 20160049917 - Anwar; Suhail ; et al. | 2016-02-18 |
| Compact Configurable Modular Radio Frequency Matching Network Assembly For Plasma Processing Systems App 20160049280 - Kudela; Jozef ; et al. | 2016-02-18 |
| Remote Plasma Clean Source Feed Between Backing Plate And Diffuser App 20160032451 - KURITA; Shinichi ; et al. | 2016-02-04 |
| Apparatus and method of forming an indium gallium zinc oxide layer Grant 9,214,340 - Kurita , et al. December 15, 2 | 2015-12-15 |
| Plasma uniformity control by gas diffuser hole design Grant 9,200,368 - Choi , et al. December 1, 2 | 2015-12-01 |
| Transmission Line RF Applicator for Plasma Chamber App 20150340204 - Kudela; Jozef ; et al. | 2015-11-26 |
| Substrate support with ceramic insulation Grant 9,187,827 - Furuta , et al. November 17, 2 | 2015-11-17 |
| Tightly Fitted Ceramic Insulator On Large Area Electrode App 20150273490 - KUDELA; Jozef ; et al. | 2015-10-01 |
| Apparatus And Method Of Forming An Indium Gallium Zinc Oxide Layer App 20150221508 - KURITA; Shinichi ; et al. | 2015-08-06 |
| Tightly fitted ceramic insulator on large area electrode Grant 9,068,262 - Kudela , et al. June 30, 2 | 2015-06-30 |
| Transmission line RF applicator for plasma chamber Grant 9,048,518 - Kudela , et al. June 2, 2 | 2015-06-02 |
| RF bus and RF return bus for plasma chamber electrode Grant 8,992,723 - Sorensen , et al. March 31, 2 | 2015-03-31 |
| Thin film deposition using microwave plasma Grant 8,883,269 - Won , et al. November 11, 2 | 2014-11-11 |
| Susceptor with heater Grant D717,113 - Furuta , et al. November 11, 2 | 2014-11-11 |
| Susceptor with heater Grant D716,098 - Furuta , et al. October 28, 2 | 2014-10-28 |
| Plasma source with vertical gradient Grant 8,872,428 - Kudela , et al. October 28, 2 | 2014-10-28 |
| Susceptor with heater Grant D713,200 - Furuta , et al. September 16, 2 | 2014-09-16 |
| Detecting plasma chamber malfunction Grant 8,674,844 - Park , et al. March 18, 2 | 2014-03-18 |
| Slit Valve Door With Moving Mating Part App 20140023460 - BEHDJAT; Mehran ; et al. | 2014-01-23 |
| Slit valve door able to compensate for chamber deflection Grant 8,567,756 - Behdjat , et al. October 29, 2 | 2013-10-29 |
| Substrate Support With Ceramic Insulation App 20130228124 - FURUTA; Gaku ; et al. | 2013-09-05 |
| Transmission line RF applicator for plasma chamber App 20130221833 - Kudela; Jozef ; et al. | 2013-08-29 |
| Linear Pecvd Apparatus App 20130206068 - KUDELA; Jozef ; et al. | 2013-08-15 |
| Guided Wave Applicator with Non-Gaseous Dielectric for Plasma Chamber App 20130126331 - Kudela; Jozef ; et al. | 2013-05-23 |
| Gas flow diffuser faceplate Grant D680,946 - Anwar , et al. April 30, 2 | 2013-04-30 |
| Gas Delivery And Distribution For Uniform Process In Linear-type Large-area Plasma Reactor App 20130068161 - White; John M. ; et al. | 2013-03-21 |
| Transmission Line RF Applicator for Plasma Chamber App 20120326592 - Kudela; Jozef ; et al. | 2012-12-27 |
| Flow blocking shadow frame support Grant D669,032 - Anwar , et al. October 16, 2 | 2012-10-16 |
| Scissor lift transfer robot Grant 8,272,830 - Kurita , et al. September 25, 2 | 2012-09-25 |
| Insulation Coverage Of Cvd Electrode App 20120231181 - Anwar; Suhail ; et al. | 2012-09-13 |
| Plasma Source with Vertical Gradient App 20120217874 - Kudela; Jozef ; et al. | 2012-08-30 |
| Substrate support bushing Grant 8,216,422 - Kurita , et al. July 10, 2 | 2012-07-10 |
| Thin Film Deposition Using Microwave Plasma App 20120171391 - WON; Tae Kyung ; et al. | 2012-07-05 |
| Method And Apparatus For Sealing An Opening Of A Processing Chamber App 20120103989 - Kurita; Shinichi ; et al. | 2012-05-03 |
| Load lock chamber with decoupled slit valve door seal compartment Grant 8,124,907 - Lee , et al. February 28, 2 | 2012-02-28 |
| Vertical Inline Cvd System App 20120031333 - Kurita; Shinichi ; et al. | 2012-02-09 |
| Vertical Inline Cvd System App 20120031335 - Kurita; Shinichi ; et al. | 2012-02-09 |
| Plasma uniformity control by gas diffuser hole design Grant 8,083,853 - Choi , et al. December 27, 2 | 2011-12-27 |
| Load lock chamber for large area substrate processing system Grant 8,070,408 - Behdjat , et al. December 6, 2 | 2011-12-06 |
| Plasma Uniformity Control By Gas Diffuser Hole Design App 20110290183 - Choi; Soo Young ; et al. | 2011-12-01 |
| Tightly Fitted Ceramic Insulator On Large Area Electrode App 20110284100 - KUDELA; JOZEF ; et al. | 2011-11-24 |
| Multiple slot load lock chamber and method of operation Grant 8,061,949 - Kurita , et al. November 22, 2 | 2011-11-22 |
| Substrate support bushing Grant 8,033,245 - Kurita , et al. October 11, 2 | 2011-10-11 |
| Showerhead With Insulated Corner Regions App 20110146577 - ANWAR; SUHAIL ; et al. | 2011-06-23 |
| Substrate Transfer Robot With Chamber And Substrate Monitoring Capability App 20110076118 - Kurita; Shinichi ; et al. | 2011-03-31 |
| Decoupled chamber body Grant 7,845,891 - Lee , et al. December 7, 2 | 2010-12-07 |
| Shadow frame support Grant D627,625 - Anwar , et al. November 23, 2 | 2010-11-23 |
| Anodized Showerhead App 20100288197 - Choi; Soo Young ; et al. | 2010-11-18 |
| Load lock chamber with heater in tube Grant 7,822,324 - Anwar , et al. October 26, 2 | 2010-10-26 |
| Detecting plasma chamber malfunction App 20100245084 - Park; Beom Soo ; et al. | 2010-09-30 |
| RF Bus and RF Return Bus for Plasma Chamber Electrode App 20100206483 - Sorensen; Carl A. ; et al. | 2010-08-19 |
| Ground Return For Plasma Processes App 20100196626 - Choi; Soo Young ; et al. | 2010-08-05 |
| Substrate support Grant 7,735,710 - Kurita , et al. June 15, 2 | 2010-06-15 |
| Multiple Slot Load Lock Chamber and Method of Operation App 20100139889 - Kurita; Shinichi ; et al. | 2010-06-10 |
| Scissor Lift Transfer Robot App 20100086380 - Kurita; Shinichi ; et al. | 2010-04-08 |
| System Architecture And Method For Solar Panel Formation App 20100075453 - Kurita; Shinichi ; et al. | 2010-03-25 |
| Load Lock Chamber For Large Area Substrate Processing System App 20100054905 - BEHDJAT; MEHRAN ; et al. | 2010-03-04 |
| Slotted Tssl Door To Couple O-ring With Moving Mating Part App 20100050534 - Behdjat; Mehran ; et al. | 2010-03-04 |
| Multiple slot load lock chamber and method of operation Grant 7,665,951 - Kurita , et al. February 23, 2 | 2010-02-23 |
| Plasma Processing Apparatus And Method App 20090258162 - FURUTA; GAKU ; et al. | 2009-10-15 |
| Method To Prevent Parasitic Plasma Generation In Gas Feedthru Of Large Size Pecvd Chamber App 20090255798 - Furuta; Gaku ; et al. | 2009-10-15 |
| Electronic device manufacturing component with an embedded chip and methods of using the same Grant 7,587,812 - Bagley , et al. September 15, 2 | 2009-09-15 |
| Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films Grant 7,589,031 - Anwar , et al. September 15, 2 | 2009-09-15 |
| Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber Grant 7,570,130 - Sorensen , et al. August 4, 2 | 2009-08-04 |
| Method And Apparatus For Sealing An Opening Of A Processing Chamber App 20090114153 - Kurita; Shinichi ; et al. | 2009-05-07 |
| Offset Liner For Chamber Evacuation App 20090107955 - TINER; ROBIN L. ; et al. | 2009-04-30 |
| Rf Return Plates For Backing Plate Support App 20090101069 - ANWAR; SUHAIL ; et al. | 2009-04-23 |
| Detection and suppression of electrical arcing Grant 7,514,936 - Anwar , et al. April 7, 2 | 2009-04-07 |
| Process Chamber And Load-lock Split Frame Construction App 20080289284 - ANWAR; SUHAIL ; et al. | 2008-11-27 |
| Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films App 20080132080 - Anwar; Suhail ; et al. | 2008-06-05 |
| Load Lock Chamber With Heater In Tube App 20080118236 - Anwar; Suhail ; et al. | 2008-05-22 |
| Load Lock Chamber With Decoupled Slit Valve Door Seal Compartment App 20080087214 - Lee; Jae-Chull ; et al. | 2008-04-17 |
| Detection and Suppression of Electrical Arcing App 20080061793 - Anwar; Suhail ; et al. | 2008-03-13 |
| System Architecture And Method For Solar Panel Formation App 20070281090 - Kurita; Shinichi ; et al. | 2007-12-06 |
| Multiple Slot Load Lock Chamber And Method Of Operation App 20070280816 - Kurita; Shinichi ; et al. | 2007-12-06 |
| Detection and suppression of electrical arcing Grant 7,292,045 - Anwar , et al. November 6, 2 | 2007-11-06 |
| Electronic Device Manufacturing Component With An Embedded Chip And Methods Of Using The Same App 20070197062 - Bagley; William Allan ; et al. | 2007-08-23 |
| Decoupled chamber body App 20070166133 - Lee; Jae-Chull ; et al. | 2007-07-19 |
| Plasma uniformity control by gas diffuser hole design App 20060236934 - Choi; Soo Young ; et al. | 2006-10-26 |
| Detection and suppression of electrical arcing App 20060049831 - Anwar; Suhail ; et al. | 2006-03-09 |
| Apparatus and methods for a low inductance plasma chamber App 20060027327 - Sorensen; Carl A. ; et al. | 2006-02-09 |
| Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber App 20060017386 - Sorensen; Carl A. ; et al. | 2006-01-26 |
| Plasma uniformity control by gas diffuser hole design App 20050251990 - Choi, Soo Young ; et al. | 2005-11-17 |
| Substrate support bushing App 20050220604 - Kurita, Shinichi ; et al. | 2005-10-06 |
| Substrate support bushing App 20050180737 - Kurita, Shinichi ; et al. | 2005-08-18 |
| Substrate support App 20050063800 - Kurita, Shinichi ; et al. | 2005-03-24 |
| Substrate support Grant 6,824,343 - Kurita , et al. November 30, 2 | 2004-11-30 |
| Substrate support App 20030161706 - Kurita, Shinichi ; et al. | 2003-08-28 |
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