Tiner; Robin L.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Tiner; Robin L..The latest application filed is for "flat head units for heavy load alignment".
Company Profile
12.72.78
- Tiner; Robin L. - Santa Cruz CA
- Tiner; Robin L - Santa Cruz CA
- Tiner; Robin L. - US
Patent Activity
| Patent | Date |
|---|---|
| Flat Head Units For Heavy Load Alignment App 20220228616 - Yousefi; Hassan ; et al. | 2022-07-21 |
| Method of removal of sharp corners from diffuser plate Grant 11,123,837 - Hong , et al. September 21, 2 | 2021-09-21 |
| Gas diffuser support structure for reduced particle generation Grant 10,927,461 - Lau , et al. February 23, 2 | 2021-02-23 |
| Chamber liner Grant 10,923,327 - Li , et al. February 16, 2 | 2021-02-16 |
| Gas diffuser mounting plate for reduced particle generation Grant 10,883,174 - Lau , et al. January 5, 2 | 2021-01-05 |
| Corner spoiler for improving profile uniformity Grant 10,697,063 - Zhao , et al. | 2020-06-30 |
| Flip edge shadow frame Grant 10,676,817 - Wang , et al. | 2020-06-09 |
| Gas Diffuser Mounting Plate For Reduced Particle Generation App 20200165726 - LAU; Allen K. ; et al. | 2020-05-28 |
| Heat Conductive Spacer For Plasma Processing Chamber App 20200098549 - PARK; Beom Soo ; et al. | 2020-03-26 |
| Gas Diffuser Support Structure For Reduced Particle Generation App 20200071833 - LAU; Allen K. ; et al. | 2020-03-05 |
| Chamber Liner App 20200043706 - LI; Jianheng ; et al. | 2020-02-06 |
| Diffuser temperature control Grant 10,487,401 - Kurita , et al. Nov | 2019-11-26 |
| Shadow frame with sides having a varied profile for improved deposition uniformity Grant 10,468,221 - Furuta , et al. No | 2019-11-05 |
| Grooved backing plate for standing wave compensation Grant 10,373,809 - Kurita , et al. | 2019-08-06 |
| Method Of Removal Of Sharp Corners From Diffuser Plate App 20190193233 - HONG; Ilyoung ; et al. | 2019-06-27 |
| Plasma uniformity control by gas diffuser hole design Grant 10,312,058 - Choi , et al. | 2019-06-04 |
| Substrate support assembly with non-uniform gas flow clearance Grant 10,280,510 - Kurita , et al. | 2019-05-07 |
| Plasma uniformity control by gas diffuser hole design Grant 10,262,837 - Choi , et al. | 2019-04-16 |
| Shadow Frame With Sides Having A Varied Profile For Improved Deposition Uniformity App 20190096624 - FURUTA; Gaku ; et al. | 2019-03-28 |
| Substrate support with quadrants Grant 10,123,379 - Tiner , et al. November 6, 2 | 2018-11-06 |
| Showerhead support structure for improved gas flow Grant 10,087,524 - Tiner , et al. October 2, 2 | 2018-10-02 |
| Plasma Uniformity Control By Gas Diffuser Hole Design App 20180025890 - CHOI; Soo Young ; et al. | 2018-01-25 |
| Rf Return Strap Shielding Cover App 20170365449 - CUI; Yi ; et al. | 2017-12-21 |
| Non-shadow Frame Plasma Processing Chamber App 20170335459 - CHOI; Young-jin ; et al. | 2017-11-23 |
| Showerhead support structures Grant 9,822,449 - Tiner , et al. November 21, 2 | 2017-11-21 |
| Substrate Support Assembly With Non-uniform Gas Flow Clearance App 20170275759 - KURITA; Shinichi ; et al. | 2017-09-28 |
| Heated Substrate Support App 20170263422 - OCHSNER; Timothy Stuart ; et al. | 2017-09-14 |
| Anodized showerhead Grant 9,758,869 - Choi , et al. September 12, 2 | 2017-09-12 |
| Substrate Support With Quadrants App 20170231033 - TINER; Robin L. ; et al. | 2017-08-10 |
| Gas Diffuser Having Grooved Hollow Cathodes App 20170178867 - KUDELA; Jozef ; et al. | 2017-06-22 |
| Substrate support with quadrants Grant 9,677,177 - Tiner , et al. June 13, 2 | 2017-06-13 |
| Susceptor assembly Grant D784,276 - Tiner , et al. April 18, 2 | 2017-04-18 |
| Diffuser Temperature Control App 20170096738 - KURITA; Shinichi ; et al. | 2017-04-06 |
| Grooved Backing Plate For Standing Wave Compensation App 20170092469 - KURITA; Shinichi ; et al. | 2017-03-30 |
| Large Area Dual Substrate Processing System App 20170084880 - KURITA; Shinichi ; et al. | 2017-03-23 |
| Showerhead Support Structures App 20170081763 - TINER; Robin L. ; et al. | 2017-03-23 |
| Shadow Frame With Non-uniform Gas Flow Clearance For Improved Cleaning App 20170081757 - KURITA; Shinichi ; et al. | 2017-03-23 |
| Diffuser support Grant 9,580,804 - White , et al. February 28, 2 | 2017-02-28 |
| Ground Return For Plasma Processes App 20160305025 - CHOI; Soo Young ; et al. | 2016-10-20 |
| Method and apparatus for sealing an opening of a processing chamber Grant 9,458,538 - Kurita , et al. October 4, 2 | 2016-10-04 |
| Ground return for plasma processes Grant 9,382,621 - Choi , et al. July 5, 2 | 2016-07-05 |
| Plasma Uniformity Control By Gas Diffuser Hole Design App 20160056019 - CHOI; Soo Young ; et al. | 2016-02-25 |
| Remote Plasma Clean Source Feed Between Backing Plate And Diffuser App 20160032451 - KURITA; Shinichi ; et al. | 2016-02-04 |
| Heating And Cooling Of Substrate Support App 20150364350 - WHITE; John M. ; et al. | 2015-12-17 |
| Plasma uniformity control by gas diffuser hole design Grant 9,200,368 - Choi , et al. December 1, 2 | 2015-12-01 |
| Substrate support with ceramic insulation Grant 9,187,827 - Furuta , et al. November 17, 2 | 2015-11-17 |
| Corner Spoiler For Improving Profile Uniformity App 20150211120 - ZHAO; Lai ; et al. | 2015-07-30 |
| Gas Confiner Assembly For Eliminating Shadow Frame App 20150211121 - ZHAO; Lai ; et al. | 2015-07-30 |
| Substrate Support With Quadrants App 20150114948 - TINER; Robin L. ; et al. | 2015-04-30 |
| RF bus and RF return bus for plasma chamber electrode Grant 8,992,723 - Sorensen , et al. March 31, 2 | 2015-03-31 |
| Susceptor with heater Grant D717,113 - Furuta , et al. November 11, 2 | 2014-11-11 |
| Susceptor with heater Grant D716,098 - Furuta , et al. October 28, 2 | 2014-10-28 |
| Substrate support with gas introduction openings Grant 8,853,098 - Kim , et al. October 7, 2 | 2014-10-07 |
| Susceptor with heater Grant D713,200 - Furuta , et al. September 16, 2 | 2014-09-16 |
| Flip Edge Shadow Frame App 20140251216 - WANG; Qunhua ; et al. | 2014-09-11 |
| Showerhead Support Structure For Improved Gas Flow App 20140246521 - TINER; Robin L. ; et al. | 2014-09-04 |
| Heated Backing Plate App 20140174361 - CHEN; Jrjyan Jerry ; et al. | 2014-06-26 |
| PECVD process chamber backing plate reinforcement Grant 8,733,279 - White , et al. May 27, 2 | 2014-05-27 |
| Showerhead support structure for improved gas flow Grant 8,721,791 - Tiner , et al. May 13, 2 | 2014-05-13 |
| Substrate support Grant D701,329 - Tiner , et al. March 18, 2 | 2014-03-18 |
| Flip Edge Shadow Frame App 20130263782 - WANG; QUNHUA ; et al. | 2013-10-10 |
| Substrate Support With Ceramic Insulation App 20130228124 - FURUTA; Gaku ; et al. | 2013-09-05 |
| Substrate support Grant D685,335 - Tiner July 2, 2 | 2013-07-02 |
| Robust Outlet Plumbing For High Power Flow Remote Plasma Source App 20130140009 - White; John M. ; et al. | 2013-06-06 |
| Gas flow diffuser faceplate Grant D680,946 - Anwar , et al. April 30, 2 | 2013-04-30 |
| Source gas flow path control in PECVD system to control a by-product film deposition on inside chamber Grant 8,430,961 - Park , et al. April 30, 2 | 2013-04-30 |
| Prevention of film deposition on PECVD process chamber wall Grant 8,381,677 - Park , et al. February 26, 2 | 2013-02-26 |
| Methods and apparatus for supporting substrates Grant 8,365,682 - Blonigan , et al. February 5, 2 | 2013-02-05 |
| Substrate support Grant D675,172 - Tiner January 29, 2 | 2013-01-29 |
| Mini Blocker Plate With Standoff Spacers App 20130004681 - Tso; Alan ; et al. | 2013-01-03 |
| Flow blocking shadow frame support Grant D669,032 - Anwar , et al. October 16, 2 | 2012-10-16 |
| RF shutter Grant 8,281,739 - Tiner , et al. October 9, 2 | 2012-10-09 |
| Insulation Coverage Of Cvd Electrode App 20120231181 - Anwar; Suhail ; et al. | 2012-09-13 |
| Flow blocker plate Grant D664,249 - Wang , et al. July 24, 2 | 2012-07-24 |
| Substrate Support with Gas Introduction Openings App 20120149194 - KIM; SAM H. ; et al. | 2012-06-14 |
| Method And Apparatus For Sealing An Opening Of A Processing Chamber App 20120103989 - Kurita; Shinichi ; et al. | 2012-05-03 |
| Showerhead Support Structure For Improved Gas Flow App 20120027918 - Tiner; Robin L. ; et al. | 2012-02-02 |
| Heating And Cooling Of Substrate Support App 20120006493 - WHITE; John M. ; et al. | 2012-01-12 |
| Plasma uniformity control by gas diffuser hole design Grant 8,083,853 - Choi , et al. December 27, 2 | 2011-12-27 |
| Inner lift pin Grant D650,818 - Tiner December 20, 2 | 2011-12-20 |
| Plasma uniformity control by gas diffuser curvature Grant 8,074,599 - Choi , et al. December 13, 2 | 2011-12-13 |
| Diffuser gravity support Grant 8,075,690 - Keller , et al. December 13, 2 | 2011-12-13 |
| Plasma Uniformity Control By Gas Diffuser Hole Design App 20110290183 - Choi; Soo Young ; et al. | 2011-12-01 |
| Lift pin assembly Grant D640,715 - Tiner June 28, 2 | 2011-06-28 |
| Showerhead With Insulated Corner Regions App 20110146577 - ANWAR; SUHAIL ; et al. | 2011-06-23 |
| Lift pin Grant D635,597 - Tiner April 5, 2 | 2011-04-05 |
| Shadow frame support Grant D627,625 - Anwar , et al. November 23, 2 | 2010-11-23 |
| Anodized Showerhead App 20100288197 - Choi; Soo Young ; et al. | 2010-11-18 |
| RF Bus and RF Return Bus for Plasma Chamber Electrode App 20100206483 - Sorensen; Carl A. ; et al. | 2010-08-19 |
| Ground Return For Plasma Processes App 20100196626 - Choi; Soo Young ; et al. | 2010-08-05 |
| Substrate Support With Gas Introduction Openings App 20100184290 - Kim; Sam H. ; et al. | 2010-07-22 |
| Diffuser Support App 20100181024 - White; John M. ; et al. | 2010-07-22 |
| Ball Supported Shadow Frame App 20100122655 - Tiner; Robin L. ; et al. | 2010-05-20 |
| Rf Return Path For Large Plasma Processing Chamber App 20100089319 - Sorensen; Carl A. ; et al. | 2010-04-15 |
| Shadow frame Grant D608,743 - Tiner January 26, 2 | 2010-01-26 |
| Shadow frame Grant D608,742 - Tiner January 26, 2 | 2010-01-26 |
| Robust Outlet Plumbing For High Power Flow Remote Plasma Source App 20090283039 - WHITE; JOHN M. ; et al. | 2009-11-19 |
| Plasma Processing Apparatus And Method App 20090258162 - FURUTA; GAKU ; et al. | 2009-10-15 |
| Method To Prevent Parasitic Plasma Generation In Gas Feedthru Of Large Size Pecvd Chamber App 20090255798 - Furuta; Gaku ; et al. | 2009-10-15 |
| Rf Grounding Of Cathode In Process Chamber App 20090178617 - White; John M. ; et al. | 2009-07-16 |
| RF grounding of cathode in process chamber Grant 7,534,301 - White , et al. May 19, 2 | 2009-05-19 |
| Method And Apparatus For Sealing An Opening Of A Processing Chamber App 20090114153 - Kurita; Shinichi ; et al. | 2009-05-07 |
| Offset Liner For Chamber Evacuation App 20090107955 - TINER; ROBIN L. ; et al. | 2009-04-30 |
| Rf Return Plates For Backing Plate Support App 20090101069 - ANWAR; SUHAIL ; et al. | 2009-04-23 |
| Cooled Backing Plate App 20090071406 - CHOI; SOO YOUNG ; et al. | 2009-03-19 |
| Pecvd Process Chamber With Cooled Backing Plate App 20090071403 - Choi; Soo Young ; et al. | 2009-03-19 |
| Source Gas Flow Path Control In Pecvd System To Control A By-product Film Deposition On Inside Chamber App 20090064934 - PARK; BEOM SOO ; et al. | 2009-03-12 |
| Diffuser Gravity Support App 20090007846 - KELLER; ERNST ; et al. | 2009-01-08 |
| Diffuser Support App 20080317973 - White; John M. ; et al. | 2008-12-25 |
| Process Chamber And Load-lock Split Frame Construction App 20080289284 - ANWAR; SUHAIL ; et al. | 2008-11-27 |
| Rf Shutter App 20080286463 - TINER; ROBIN L. ; et al. | 2008-11-20 |
| Pecvd Process Chamber Backing Plate Reinforcement App 20080268173 - White; John M. ; et al. | 2008-10-30 |
| Diffuser gravity support Grant 7,429,410 - Keller , et al. September 30, 2 | 2008-09-30 |
| Prevention Of Film Deposition On Pecvd Process Chamber Wall App 20080187682 - Park; Beom Soo ; et al. | 2008-08-07 |
| Heating And Cooling Of Substrate Support App 20080035306 - WHITE; JOHN M. ; et al. | 2008-02-14 |
| Plasma uniformity control by gas diffuser hole design App 20060236934 - Choi; Soo Young ; et al. | 2006-10-26 |
| Plasma uniformity control by gas diffuser curvature App 20060228496 - Choi; Soo Young ; et al. | 2006-10-12 |
| RF grounding of cathode in process chamber App 20060060302 - White; John M. ; et al. | 2006-03-23 |
| Diffuser gravity support App 20060060138 - Keller; Ernst ; et al. | 2006-03-23 |
| Apparatus and method of shaping profiles of large-area PECVD electrodes App 20060005771 - White; John M. ; et al. | 2006-01-12 |
| Methods and apparatus for supporting substrates App 20050265818 - Blonigan, Wendell T. ; et al. | 2005-12-01 |
| Plasma uniformity control by gas diffuser hole design App 20050251990 - Choi, Soo Young ; et al. | 2005-11-17 |
| Substrate transfer shuttle Grant 6,746,198 - White , et al. June 8, 2 | 2004-06-08 |
| Substrate transfer shuttle App 20030190220 - White, John M. ; et al. | 2003-10-09 |
| Substrate transfer shuttle Grant 6,517,303 - White , et al. February 11, 2 | 2003-02-11 |
| Method and apparatus for substrate transfer and processing App 20010024609 - White, John M. ; et al. | 2001-09-27 |
| Method and apparatus for substrate transfer and processing Grant 6,213,704 - White , et al. April 10, 2 | 2001-04-10 |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.
| 