U.S. patent application number 10/373053 was filed with the patent office on 2003-09-04 for projection exposure apparatus.
This patent application is currently assigned to Nikon Corporation. Invention is credited to Chiba, Hiroshi, Murakami, Seiro, Nishi, Kenji.
Application Number | 20030164933 10/373053 |
Document ID | / |
Family ID | 26458434 |
Filed Date | 2003-09-04 |
United States Patent
Application |
20030164933 |
Kind Code |
A1 |
Nishi, Kenji ; et
al. |
September 4, 2003 |
Projection exposure apparatus
Abstract
A projection exposure apparatus wherein a pattern formed on a
mask is projected onto a substrate through a projection optical
system. The apparatus has an illumination optical system for
illuminating the mask by exposure light, and a first adjusting
member which is disposed in the illumination optical system to
change telecentricity on the substrate. The apparatus further has a
second adjusting member for adjusting at least one of the position
of the substrate in the direction of an optical axis of the
projection optical system and the tilt of the substrate, and a
control system for controlling the first and second adjusting
members. The control system locally corrects the position of a
spatial image formed by the projection optical system.
Inventors: |
Nishi, Kenji; (Kanagawa-ken,
JP) ; Murakami, Seiro; (Chiba-ken, JP) ;
Chiba, Hiroshi; (Kanagawa-ken, JP) |
Correspondence
Address: |
ARMSTRONG,WESTERMAN & HATTORI, LLP
1725 K STREET, NW
SUITE 1000
WASHINGTON
DC
20006
US
|
Assignee: |
Nikon Corporation
Tokyo
JP
|
Family ID: |
26458434 |
Appl. No.: |
10/373053 |
Filed: |
February 26, 2003 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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10373053 |
Feb 26, 2003 |
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09680938 |
Oct 10, 2000 |
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09680938 |
Oct 10, 2000 |
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09234454 |
Jan 21, 1999 |
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09234454 |
Jan 21, 1999 |
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09003503 |
Jan 6, 1998 |
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09003503 |
Jan 6, 1998 |
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08649815 |
May 17, 1996 |
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5739899 |
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Current U.S.
Class: |
355/67 ; 355/53;
355/55 |
Current CPC
Class: |
A61K 38/395 20130101;
G03F 7/701 20130101; G03F 9/7019 20130101; G03F 9/7011 20130101;
G03F 9/7034 20130101; G03F 7/70358 20130101; G03F 9/7026 20130101;
G03F 7/70691 20130101; G03F 7/70258 20130101; G03F 7/70066
20130101; G03F 7/70125 20130101 |
Class at
Publication: |
355/67 ; 355/53;
355/55 |
International
Class: |
G03B 027/54 |
Foreign Application Data
Date |
Code |
Application Number |
May 19, 1995 |
JP |
120950/1995 |
Jul 11, 1995 |
JP |
198181/1995 |
Claims
What is claimed is:
1. A projection exposure apparatus wherein a pattern formed on a
mask is projected onto a substrate through a projection optical
system, said projection exposure apparatus comprising: an
illumination optical system for illuminating said mask by exposure
light; a first adjusting member for changing telecentricity on said
substrate, said first adjusting member being disposed in said
illumination optical system; a second adjusting member for
adjusting at least one of a position of said substrate in a
direction of an optical axis of said projection optical system and
a tilt of said substrate; and a control system for controlling said
first adjusting member and said second adjusting member, said
control system locally correcting a position of a spatial image
formed by said projection optical system.
2. An apparatus according to claim 1, wherein said control system
has a storage unit for storing mask pattern information concerning
the pattern formed on said mask, so that said control system
corrects the position of said spatial image on the basis of said
mask pattern information stored in said storage unit.
3. An apparatus according to claim 1, wherein said control system
has a storage unit for storing distortion information concerning
distortion of said projection optical system, so that said control
system corrects the position of said spatial image on the basis of
said distortion information stored in said storage unit.
4. An apparatus according to claim 1, wherein said control system
controls a rectilinear or curvilinear distortion of the spatial
image formed by said projection optical system.
5. An apparatus according to claim 1, wherein said illumination
optical system has a plurality of optical elements, so that said
first adjusting member adjusts a position of at least one of said
optical elements in said illumination optical system.
6. An apparatus according to claim 1, wherein said first adjusting
member changes said telecentricity symmetrically with respect to a
center of said projection optical system.
7. An apparatus according to claim 1, further comprising: a mask
stage which is movable with said mask mounted thereon; and a
substrate stage which is movable with said substrate mounted
thereon; wherein said control system synchronously scans said mask
stage and said substrate stage.
8. A projection exposure apparatus having a projection optical
system for projecting an image of a part of a pattern formed on a
mask onto a substrate, wherein said mask and said substrate are
synchronously scanned relative to said projection optical system,
thereby projecting the pattern formed on said mask onto said
substrate, said projection exposure apparatus comprising: a field
stop for defining an illumination area on said mask and also
defining an exposure area in an effective exposure field of said
projection optical system; and a control system for controlling
said field stop so as to change either a position of said exposure
area or a configuration of said exposure area.
9. A projection exposure apparatus wherein a pattern formed on a
mask is projected onto a substrate through a projection optical
system, said projection exposure apparatus comprising: an input
system for inputting pattern information concerning a pattern
formed on the mask as an object to be transferred; and a spatial
image correcting system for locally correcting a position of a
spatial image formed by said projection optical system according to
the pattern information input from said input system.
10. An apparatus according to claim 9, wherein said spatial image
correcting system has a first adjusting member for changing
telecentricity of said projection optical system, and a second
adjusting member for controlling not only a position in a direction
of an optical axis of said projection optical system of the
substrate to be exposed but also an inclination angle of said
substrate.
11. An apparatus according to claim 10, wherein said spatial image
correcting system corrects the position of the spatial image formed
by said projection optical system so as to correct a gently
changing component of a pattern writing error obtained on the basis
of the pattern information input from said input system.
12. A projection exposure apparatus having a projection optical
system for projecting an image of a part of a pattern formed on a
mask onto a substrate, wherein said mask and said substrate are
synchronously scanned relative to said projection optical system,
thereby projecting the pattern on said mask onto said substrate,
said projection exposure apparatus comprising: a measuring system
for measuring image-formation characteristics of a projected image
in an effective exposure field of said projection optical system;
and an exposure area changing system for changing an exposure area
in said effective exposure field, in which an image of a part of
the pattern formed on said mask is actually formed, according to a
result of the measurement carried out by said measuring system.
13. A projection exposure method wherein a pattern formed on a mask
is projected onto a substrate through a projection optical system,
said projection exposure method comprising: changing telecentricity
on said substrate; and locally correcting a position of a spatial
image formed by said projection optical system.
14. A method according to claim 13, wherein the correction of the
position of said spatial image is effected by adjusting at least
one of a position of said substrate in a direction of an optical
axis of said projection optical system and an inclination of said
substrate.
15. A projection exposure method wherein an image of a part of a
pattern formed on a mask is projected onto a substrate through a
projection optical system, said projection exposure method
comprising: synchronously scanning said mask and said substrate
relative to said projection optical system; obtaining
image-formation characteristics of a projected image in an
effective exposure field of said projection optical system; and
changing an exposure area in said effective exposure field
according to said image-formation characteristics.
16. An exposure apparatus for transferring a pattern on a mask onto
a substrate, said exposure apparatus comprising: an illumination
optical system for illuminating said mask by illuminating light;
and a correction optical member for correcting a local
telecentricity error on said substrate side, said correction
optical member being disposed in said illumination optical
system.
17. An apparatus according to claim 16, wherein said illumination
optical system has a plurality of lens elements, said correction
optical member being disposed between said mask and one of said
lens elements that is closest to said mask.
18. An apparatus according to claim 17, wherein the lens element
that is closest to said mask is a condenser lens for converging
said illuminating light onto said mask.
19. An apparatus according to claim 16, further comprising: a
switching system for switching said correction optical member.
20. An apparatus according to claim 19, wherein said correction
optical member comprises a plurality of correction optical members,
said switching system being capable of switching said correction
optical members from one to another.
21. An apparatus according to claim 19, further comprising: an
optical system for changing illumination conditions for said mask,
said optical system being disposed between said mask and a light
source which emits said illuminating light; said correction optical
member including correction optical member elements provided for
respective illumination conditions set by said optical system to
correct a local telecentricity error on said substrate side under
the corresponding illumination conditions; and said switching
system switching said correction optical member elements from one
to another in response to a change of illumination conditions made
by said optical system.
22. An apparatus according to claim 21, wherein said illumination
optical system has a plurality of lens elements, and said switching
system sets one of said correction optical member elements
corresponding to a set illumination condition into an area between
said mask and a lens element for converging said illuminating light
onto said mask, said area corresponding to an illumination field on
said mask.
23. An apparatus according to claim 16, further comprising: a mask
stage which is movable with said mask mounted thereon; a substrate
stage which is movable with said substrate mounted thereon; and a
control system for synchronously scanning said mask stage and said
substrate stage.
24. An apparatus according to claim 16, wherein said correction
optical member includes a plane-parallel plate which is varied in
thickness at a part thereof so as to correct a local telecentricity
error on said substrate side.
25. A projection exposure apparatus wherein a mask is illuminated
by illuminating light to transfer a pattern on the mask onto a
photosensitive substrate through a projection optical system, said
projection exposure apparatus comprising: a driven optical member
disposed between an illuminating light source that emits said
illuminating light and said mask, said driven optical member
changing illumination conditions for said mask; correction optical
members provided respectively for illumination conditions set by
said driven optical member to correct a local telecentricity error
on said photosensitive substrate side under the corresponding
illumination conditions; and a switching mechanism which is
actuated in response to a motion of said driven optical member to
set one of said correction optical members corresponding to an
illumination Condition set by said driven optical member into an
area between said mask and a condenser lens for converging said
illuminating light onto said mask, said area corresponding to an
illumination field on said mask.
26. An exposure method wherein a mask is illuminated by
illuminating light to transfer a pattern formed on said mask onto a
substrate, said exposure method comprising: changing illumination
conditions for said mask; and selectively setting correction
optical members corresponding to said illumination conditions into
an area corresponding to an illumination field on said mask in
order to correct a local telecentricity error on said substrate
side under the respective illumination conditions.
27. A method of producing a semiconductor device by projecting a
pattern formed on a mask onto a substrate through a projection
optical system, said method comprising: changing telecentricity on
said substrate; and locally correcting a position of a spatial
image formed by said projection optical system.
28. A method of producing a semiconductor device by projecting an
image of a part of a pattern formed on a mask onto a substrate
through a projection optical system, said method comprising:
synchronously scanning said mask and said substrate relative to
said projection optical system,; obtaining image-formation
characteristics of a projected image in an effective exposure field
of said projection optical system; and changing an exposure area in
said effective exposure field according to said image-formation
characteristics.
29. A method of producing a semiconductor device by illuminating a
mask with illuminating light and thus transferring a pattern on
said mask onto a substrate, said method comprising; changing
illumination conditions for said mask; and selectively setting
correction optical members respectively corresponding to said
illumination conditions into an area corresponding to an
illumination field on said mask in order to correct a local
telecentricity error on said substrate side under the respective
illumination conditions.
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a projection exposure
apparatus which may be used to produce, for example, semiconductor
integrated circuits, liquid crystal display devices, etc., by
photolithography processes.
[0003] 2. Related Background Art
[0004] In lithography processes for producing semiconductor
devices, liquid crystal display devices, etc., exposure apparatuses
(e.g., steppers) have heretofore been used in which a pattern on a
reticle as a mask is transferred onto each shot area on a
photoresist-coated wafer (or a glass plate or the like) by a
one-shot exposure method. With a view to allowing a wider reticle
pattern to be lithographically transferred onto a wafer without
increasing the size of the projection optical system, attention has
recently been paid to scanning exposure type exposure apparatuses,
e.g., step-and-scan type exposure apparatus, in which a reticle is
scanned in a direction perpendicular to the optical axis of a
projection optical system, and a wafer is synchronously scanned in
a direction corresponding to the scanning direction of the reticle
with a speed ratio equal to the magnification of the projection
optical system, thereby sequentially transferring the reticle
pattern onto the wafer.
[0005] In this type of projection exposure apparatus, it is
demanded that the required image-formation characteristics of the
projected image on the wafer should be maintained with high
accuracy at all times in order to project a fine pattern image of a
reticle onto a photoresist-coated wafer at high resolution and also
to project a reticle pattern over a pattern already formed on a
wafer with high overlay Accuracy. Under these circumstances, an
image-formation characteristic correcting mechanism as described
below has heretofore been used in a scanning exposure type exposure
apparatus, for example.
[0006] FIG. 7(A) schematically shows the arrangement of one example
of a conventional scanning exposure type projection exposure
apparatus. In FIG. 7(A), a reticle 100 and a wafer 101 are scanned
relative to each other, thereby projecting and transferring a
pattern image of the reticle 100 onto the wafer 101 through a
projection optical system 102. In this case, a plane-parallel plate
103, which comprises a transparent glass plate or the like, is
provided to lie approximately perpendicular to an optical axis AX1
of the projection optical system 102, which is disposed between the
reticle 100 and the wafer 101. By slightly rotating the
plane-parallel plate 103 according to the scanning position, the
projected image on the wafer 101 is transversely shifted, thereby
correcting the degradation of the image-formation characteristics
due to a stage control error during scanning.
[0007] FIG. 7(B) shows a shift effect of a bundle of light rays
produced by rotating the plane-parallel plate 103. That is,
clockwise rotation of the plane-parallel plate 103 causes the
optical path of light rays IL1 to shift leftward by .DELTA.x after
passing through the plane-parallel plate 103. By transversely
shifting the projected image in this way, the conventional
apparatus corrects a stage position control error during scanning.
As shown in FIG. 7(C), the position of a slit-shaped illumination
area 104 on the reticle has heretofore been fixed in the center of
an effective illumination field 105, which is the largest area in
which an image is formed by the projection optical system (see
Japanese Patent Application Unexamined Publication (KOKAI) No.
7-142331).
[0008] In the above-described conventional technique, the drive of
the plane-parallel plate 103 causes the whole exposure field to
shift simultaneously. Accordingly, it is impossible to correct
distortion of the projection optical system which is related to a
part of the projected image in the exposure field, and reticle
pattern writing errors. Further, because the illumination area 104
is fixed in an approximately central portion of the effective
illumination field 105, as shown in FIG. 7(C), the distortion of
the projected image depends largely on manufacturing errors of the
projection optical system.
[0009] In a projection exposure apparatus used to produce
semiconductor devices or other similar devices, an optical system
which is telecentric on the wafer side is generally used as a
projection optical system to transfer a pattern on a reticle as a
mask onto each shot area on a wafer (or a glass plate or the like)
coated with a photoresist. The reason for using such a telecentric
optical system is to prevent transverse shift due to the tilt of a
bundle of principal rays (principal rays) at a defocused portion in
the exposure field caused by unevenness on the wafer surface. The
defocus in this case gives rise to no problem in the range of the
allowable focal depth of the projection optical system. However,
the above-described transverse shift causes distortion and
degradation of the image quality; therefore, the projection optical
system is adjusted so as to minimize the tilt of the principal
rays
[0010] A projection lens which is telecentric on the wafer side may
be designed by using a system which is telecentric on both sides,
that is, on both the wafer and reticle sides, or by using a
single-side telecentric system which has a linear inclination
relative to the pattern surface of the reticle. For both the
systems, illumination systems are designed in conformity to the
system conditions such that the reticle can be illuminated at a
desired angle. However, mechanical and optical errors of each
illumination system cause angular errors in the direction of
magnification (transverse displacement caused when the wafer is
defocused by a predetermined amount relative to an illumination
field 147 on the wafer) such as those shown in FIG. 16(A) and
transverse shift errors such as that shown in FIG. 16(B), and these
errors remain as residual errors.
[0011] In order to eliminate such residual errors, adjustment of an
illumination system for illuminating a reticle is made as shown in
FIG. 17 in the present state of the art. More specifically, the
illumination system comprises a fly-eye optical system 114, a first
relay lens 134, a second relay lens 138, a condenser lens 139, a
deflection mirror 140, and so forth. Residual linear angular errors
are corrected by finely adjusting these Constituent members of the
illumination system. That is, the constituent members may be finely
moved vertically or horizontally, or shifted in the direction of
the optical axis, or the tilt of the deflection mirror 140 may be
adjusted.
[0012] The above-described conventional technique, wherein residual
errors are corrected by finely adjusting the constituent members of
the illumination system, can correct linear errors such as those
shown in FIGS. 16(A) and 16(B), but cannot correct a non-linear
angular error X as shown in FIG. 18(A). That is, if the state of
FIG. 18(A) is corrected by finely adjusting the fly-eye optical
system 114, the first relay lens 134, the second relay lens 138,
the condenser lens 139, the deflection mirror 140, etc., shown in
FIG. 17 (as shown by reference characters A, B, C, D and E in the
figure), the error X' remains uncorrected as shown in FIG. 18(B). A
state reached after the correction is shown in the perspective view
of FIG. 18(C). It will be confirmed from the figure that the
upper-right principal ray is tilted. Recently, there have been
proposed a modified light source method in which the illumination
system is provided with an aperture stop which comprises a
plurality of apertures decentered with respect to the optical axis
[for example, see Japanese Patent Application Unexamined
Publication (KOKAI) No. 4-225358 (U.S. Ser. No. 791,138, Nov. 13,
1991)], and an annular zone illumination method in which an annular
aperture is used in the illumination system, with a view to
improving the resolution and focal depth with respect to fine
periodic patterns, for example. When the aperture configuration of
the illumination system aperture stop variously changes as in these
illumination methods, it is difficult to eliminate a telecentricity
error simply by employing the above-described technique whereby the
constituent members of the illumination system are finely
adjusted.
SUMMARY OF THE INVENTION
[0013] In view of the above-described circumstances, an object of
the present invention is to provide a projection exposure apparatus
capable of obtaining excellent exposed patterns by effectively
correcting distortion of a projection optical system and reticle
pattern writing errors.
[0014] To attain the above-described object, the present invention
provides a projection exposure apparatus in which a pattern formed
on a mask is projected onto a substrate through a projection
optical system. The projection exposure apparatus has an
illumination optical system for illuminating the mask by exposure
light, and a first adjusting member which is disposed in the
illumination optical system to change telecentricity in the
substrate. The projection exposure apparatus further has a second
adjusting member for adjusting at least one of the position of the
substrate in the direction of an optical axis of the projection
optical system and the tilt of the substrate, and a control system
for controlling the first and second adjusting members. The control
system locally corrects the position of a spatial image formed by
the projection optical system.
[0015] According to another aspect of the present invention, there
is provided a projection exposure apparatus having a projection
optical system for projecting an image of a part of a pattern
formed on a mask onto a substrate, in which the mask and the
substrate are synchronously scanned relative to the projection
optical system, thereby projecting the pattern on the mask onto the
substrate. The projection exposure apparatus further has a field
stop for defining an illumination area on the mask and also
defining an exposure area in an effective exposure field of the
projection optical system, and a control system for controlling the
field stop so as to change the position of the exposure area or the
configuration of the exposure area.
[0016] According to another aspect of the present invention, there
is provided a projection exposure apparatus in which a pattern
formed on a mask is projected onto a substrate through a projection
optical system. The projection exposure apparatus has an input
system for inputting information concerning a pattern formed on the
mask as an object to be transferred, and a spatial image correcting
system for locally correcting the position of a spatial image
formed by the projection optical system according to the pattern
information input from the input system.
[0017] According to another aspect of the present invention, there
is provided a projection exposure apparatus having a projection
optical system for projecting an image of a part of a pattern
formed on a mask onto a substrate, in which the mask and the
substrate are synchronously scanned relative to the projection
optical system, thereby projecting the pattern on the mask onto the
substrate. The projection exposure apparatus further has a
measuring system for measuring image-formation characteristics of a
projected image in an effective exposure field of the projection
optical system, and an exposure area changing system for changing
an exposure area in the effective exposure field, in which the
image of a part of the pattern formed on the mask is actually
formed, according to the result of the measurement carried out by
the measuring system.
[0018] According to another aspect of the present invention, there
is provided a projection exposure method wherein a pattern formed
on a mask is projected onto a substrate through a projection
optical system. In the projection exposure method, telecentricity
on the substrate is changed, and the position of a spatial image
formed by the projection optical system is locally corrected.
[0019] According to another aspect of the present invention, there
is provided a projection exposure method wherein an image of a part
of a pattern formed on a mask is projected onto a substrate through
a projection optical system. In the projection exposure method, the
mask and the substrate are synchronously scanned relative to the
projection optical system, and image-formation characteristics of a
projected image in an effective exposure field of the projection
optical system are obtained. Then, an exposure area in the
effective exposure field is changed according to the
image-formation characteristics.
[0020] According to another aspect of the present invention, there
is provided a method of producing a semiconductor device by
projecting an image of a pattern formed on a mask onto a substrate
through a projection optical system. In the semiconductor device
producing method, telecentricity on the substrate is changed, and
the position of a spatial image formed by the projection optical
system is locally corrected.
[0021] According to another aspect of the present invention, there
is provided a method of producing a semiconductor device by
projecting an image of a part of a pattern formed on a mask onto a
substrate through a projection optical system. In the semiconductor
device producing method, the mask and the substrate are
synchronously scanned relative to the projection optical system to
obtain image-formation characteristics of a projected image in an
effective exposure field of the projection optical system, and an
exposure area in the effective exposure field is changed according
to the image-formation characteristics.
[0022] Another object of the present invention is to provide a
projection optical apparatus capable of ensuring the telecentricity
on the photosensitive substrate side independently of illumination
conditions.
[0023] To attain the above-described object, the present invention
provides an exposure apparatus for transferring a pattern on a mask
onto a substrate. The exposure apparatus has an illumination
optical system for illuminating the mask by illuminating light, and
a correction optical system which is disposed in the illumination
optical system to correct a local telecentricity error on the
substrate side .
[0024] According to another aspect of the present invention, there
is provided a projection exposure apparatus wherein a mask is
illuminated by illuminating light to transfer a pattern on the mask
onto a photosensitive substrate through a projection optical
system. The projection exposure apparatus has a driven optical
member which is disposed between an illuminating light source that
emits the illuminating light and the mask such that the driven
optical member changes illumination conditions for the mask, and
correction optical members provided respectively for illumination
conditions set by the driven optical member to correct a local
telecentricity error on the photosensitive substrate side under the
corresponding illumination conditions. The projection exposure
apparatus further has a switching mechanism which is actuated in
response to the motion of the driven optical member to set a
correction optical member corresponding to the illumination
condition set by the driven optical member into an area between the
mask and a condenser lens for converging the illuminating light
onto the mask, the area corresponding to an illumination field on
the mask.
[0025] According to another aspect of the present invention, there
is provided a method of producing a semiconductor device by
illuminating a mask with illuminating light and thus transferring a
pattern on the mask onto a substrate. In the semiconductor device
producing method, illumination conditions for the mask are changed,
and correction optical members respectively corresponding to the
illumination conditions are selectively set into an area
corresponding to an illumination field on the mask in order to
correct a local telecentricity error on the substrate side under
the respective illumination conditions.
BRIEF DESCRIPTION OF THE DRAWINGS
[0026] FIG. 1 schematically shows the arrangement of one embodiment
of the projection exposure apparatus according to the present
invention.
[0027] FIGS. 2(A) to 2(E) show various examples of tilt of the
telecentricity of illuminating light in an exposure field on a
wafer when the telecentricity of an illumination optical system in
FIG. 1 is changed.
[0028] FIGS. 3(A), 3(B), 3(C) and 3(D) illustrate the way in which
a projected image in one shot area on a wafer in FIG. 1 shifts.
[0029] FIGS. 4(A), 4(B) and 4(C) illustrate the way of changing the
position and configuration of an exposure field in an effective
exposure field of a projection optical system in FIG. 1.
[0030] FIG. 5(A) shows low-frequency components of reticle pattern
writing errors.
[0031] FIG. 5(B) shows one example of the result of measurement of
a pattern position by a photoelectric sensor.
[0032] FIGS. 6(A) to 6(H) show changes of transverse shift of a
projected image on a wafer caused by focusing and tilting a wafer
stage when the telecentricity of illuminating light is changed.
[0033] FIGS. 7(A), 7(B) and 7(C) illustrate a conventional
technique of correcting the position of a projected image.
[0034] FIG. 8 shows the arrangement of a scanning exposure type
projection exposure apparatus according to one embodiment of the
present invention.
[0035] FIGS. 9(A) and 9(8) show one example of a light quantity
stop used in the apparatus shown in FIG. 8.
[0036] FIG. 10(A) is an enlarged side view showing a mosaic type
fly-eye lens (second fly-eye lens) in FIG. 8.
[0037] FIG. 10(B) is a front view of a first lens bundle as seen
from the arrow B-B in FIG. 10(A).
[0038] FIG. 10(C) is a front view of a second lens bundle as seen
from the arrow C-C in FIG. 10(A).
[0039] FIG. 11 shows one example of an illumination system aperture
stop plate in FIG. 8.
[0040] FIG. 12(A) shows an essential part of a mechanism for
effecting focus calibration.
[0041] FIG. 12(8) is a waveform chart showing a detection signal
obtained by the mechanism shown in FIG. 12(A).
[0042] FIGS. 13(A), 13(B) and 13(C) illustrate operations of
movable blinds during scanning exposure carried out in the
apparatus shown in FIG. 8.
[0043] FIG. 14(A) is a schematic plan view of a telecentricity
correcting mechanism.
[0044] FIG. 14(B) is a schematic side view of a plane-parallel
plate shown in FIG. 14(A).
[0045] FIGS. 15(A), 15(B) and 15(C) show one example of a change in
telecentricity on a wafer which occurs when ordinary illumination
is switched to modified illumination in the apparatus shown in FIG.
8.
[0046] FIGS. 16(A) and 16(B) show one example of linear errors of
telecentricity on a wafer.
[0047] FIG. 17 illustrates a conventional mechanism for correcting
telecentricity errors in an illumination system.
[0048] FIGS. 18(A), 18(B) and 18(C) illustrate a problem which the
present invention is to solve.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0049] One embodiment of the projection exposure apparatus
according to the present invention will be described below with
reference to FIGS. 1 to 6(H). In this embodiment, the present
invention is applied to a step-and-scan type projection exposure
apparatus in which a reticle and a wafer are synchronously scanned,
thereby sequentially projecting a pattern formed on the reticle
onto each shot area on the wafer.
[0050] FIG. 1 schematically shows the arrangement of a projection
exposure apparatus according to this embodiment. Referring to FIG.
1, a light source system 22 comprises a light source for
illumination, a light quantity adjusting member, a beam expander,
etc. Illuminating light IL emitted from the light source system 22
passes through an input lens 21 and is bent at approximately right
angles by a mirror 20 so as to enter a fly-eye integrator 19
horizontally, whereby the illuminance distribution is uniformized.
Illuminating light IL emanating from the fly-eye integrator 19
passes through a first relay lens 18 and is restricted by a reticle
blind (field stop) 17 so as to define an illumination area on a
reticle 1. Thereafter, the illuminating light IL passes through a
second relay lens 16 to become a bundle of approximately parallel
rays and is incident on a mirror 15. The illuminating light IL is
bent by the mirror 15 so as to travel approximately vertically
downward, and then passes through a condenser lens 14 to illuminate
a pattern formed on the reticle 1. Illuminating light IL passing
through the reticle 1 is projected through a projection optical
system 4 onto a wafer 2. Thus, an image of a pattern on the reticle
1 is transferred onto the wafer 2. In FIG. 1, a Z-axis is taken in
a direction parallel to an optical axis AX of the projection
optical system 4, and a Y-axis is taken in a direction
perpendicular to the plane of FIG. 1 in a plane perpendicular to
the Z-axis. An X-axis is taken in a direction parallel to the plane
of FIG. 1.
[0051] As the illumination light source in the light source system
22, an excimer laser light source, e.g., a KrF excimer laser
(wavelength: 248 nm) or an ArF excimer laser (wavelength: 193 nm),
is used. During exposure, pulsed laser emission of the excimer
laser light source is controlled by an exposure control unit 29.
The reticle blind 17 is controlled by a central control system 31
through a reticle blind drive unit 27 such that the configuration
of the field (i.e., the illumination area on the reticle 1) can be
changed according to each particular purpose. Further, optical
members such as the relay lenses 16 and 18 and the condenser lens
14, which are disposed between the fly-eye integrator 19 and the
reticle 1, can be independently driven by an optical member drive
unit 28 so as to be decentered with respect to the center of the
optical axis or to move in the optical axis direction. The central
control system 31 controls the above-mentioned optical members
through the optical member drive unit 28, thereby enabling the
telecentricity of the illumination optical system on the reticle 1
to be deflected in any desired direction.
[0052] The reticle 1 having a circuit pattern written thereon is
held by vacuum on a reticle stage 11 which is mounted on a reticle
support plate 12. The reticle stage 11 positions the reticle 1 in
the directions X and Y and also in the rotation direction (.theta.
direction) in a two-dimensional plane (XY-plane) perpendicular to
the optical axis AX of the projection optical system 4. Coordinates
of the position of the reticle stage 11 in the two-dimensional
plane are constantly detected at a resolution of the order of 0.01
.mu.m, for example, by combinations of moving mirrors (not shown)
on the reticle stage 11 and laser interferometers (not shown)
disposed at the periphery of the reticle stage 11. It should be
noted that in the following description, reticle peripheral
mechanisms, i.e., the reticle 1, the reticle stage 11, the reticle
support plate 12, the drive unit (not shown) for the reticle stage
11, etc., will be generally referred to as "reticle stage
system".
[0053] As shown by the dotted line in FIG. 1, the illumination
optical system and reticle stage system (hereinafter referred to as
"illumination mechanism 13" in combination), including optical
members from the light source system 22 to the condenser lens 14,
are integrally fixed on a single frame (not shown). The
illumination mechanism 13 is arranged as a system which is movable
in the direction of the arrow ID relative to the projection optical
system 4 by the operation of an illumination mechanism drive unit
30.
[0054] The reticle stage 11 is adapted to be movable independently
in the illumination mechanism 13. Assuming that the projection
magnification of the projection optical system 4 is .beta. (.beta.
is, for example, 1/4 or 1/5), the pattern of the reticle 1 is
transferred onto the surface of the wafer 2 by the scanning
exposure method in such a manner that the reticle 1 is scanned
through the reticle stage 11 in the direction -X (or +X) at a speed
V.sub.R relative to a slit-shaped illumination area formed by
illuminating light IL, and the wafer 2 is synchronously scanned in
the direction +X (or -X) at a speed V.sub.W (=.beta.V.sub.R).
[0055] The wafer 2 is held by vacuum on a wafer holder 3. The wafer
holder 3 is placed on an XY-stage 6, which, in turn, is mounted on
a Z-tilt stage 5. The Z-tilt stage 5 can be tilted in any desired
direction with respect to the image-formation plane of the
projection optical system 4 and also finely moved in the direction
of the optical axis AX (direction Z) by a drive unit (not shown).
The Z-tilt stage 5 is also rotatable about the optical axis AX. The
XY-stage 6 is arranged so as to be not only movable in the scanning
direction (direction X) but also movable in a direction (direction
Y) perpendicular to the scanning direction by a drive system (not
shown)., thereby performing a step-and-scan operation in which the
system repeats scanning to effect scanning exposure for each shot
area on the wafer 2 and an operation of moving to an exposure start
position of the subsequent shot area.
[0056] A moving mirror 8 is fixed on an end portion of the upper
side of the Z-tilt stage 5 to reflect a laser beam emitted from a
laser interferometer 25 which is provided outside the Z-tilt stage
5. The position of the Z-tilt stage 5 in the XY-plane is constantly
detected by the laser interferometer 25 at a resolution of the
order of 0.01 .mu.m, for example. Information concerning the
position in the XY-plane of the Z-tilt stage 5 (or information
concerning the speed of the Z-tilt stage 5) is sent to a stage
control system 24. The stage control system 24 controls the wafer
stage drive system on the basis of the position information (or the
speed information). The position information (or speed information)
on the Z-tilt stage 5 is also supplied to the central control
system 31. The central control system 31 controls the stage control
system 24 on the basis of the supplied information.
[0057] As has been described above, the wafer 2 is subjected to
synchronous control such that the wafer 2 is scanned relative to
the reticle 1 through the projection optical system 4. In this
case, the reticle 1 and the wafer 2 are scanned at the
above-mentioned relative velocity (V.sub.R/V.sub.W) by obtaining a
difference between a value determined by correcting the output of
the laser interferometer, which monitors the position of the
reticle stage 11, by the projection magnification .beta. and the
output of the laser interferometer 25, which monitors the position
of the Z-tilt stage 5 in the scanning direction, and controlling
the drive systems for the reticle stage 11 and the XY-stage 6 such
that the output difference becomes equal to a predetermined
value.
[0058] Further, the projection exposure apparatus is provided with
an oblique incidence type focus position detecting system. The
position detecting system comprises an irradiation optical system 9
which projects an image of a pinhole or slit pattern onto the
exposure surface of the wafer 2 in the vicinity of the
image-formation plane of the projection optical system 4 obliquely
to the optical axis AX, and a light-receiving optical system 10
which reforms the projected pinhole or slit pattern image from a
bundle of reflected rays from the projected image. The position in
the direction Z of the surface of the wafer 2 is detected by the
focus position detecting system (9 and 10), and information
concerning the detected position is sent to a Z-tilt control system
26. The Z-tilt control system 26 controls a drive system (not
shown) for the Z-tilt stage 5 on the basis of the position
information. The information from the focus position detecting
system (9 and 10) is also supplied to the central control system 31
through the Z-tilt control system 26. The central control system 31
controls the Z-tilt control system-26 on the basis of the position
information.
[0059] In addition, a photoelectric sensor 7 is disposed on the
Z-tilt stage 5 to measure the position of the projected image. One
example of the photoelectric sensor 7 comprises a slit plate having
a straight line-shaped slit, and a photoelectric transducer for
receiving a bundle of light rays passing through the slit. Thus,
the position of the projected image is detected from a peak
position of the output signal from the photoelectric sensor 7. It
is also possible to use an imaging device, e.g., a two-dimensional
CCD, as a photoelectric sensor and to detect the position of the
projected image by image processing. When measurement is to be
carried out, the photoelectric sensor 7 is moved near the position
of the projected image of the reticle pattern to be detected, which
is formed through the projection optical system 4. Then, the
photoelectric sensor 7, for example, is scanned by a predetermined
amount, and a peak position of the output of the photoelectric
sensor 7 is detected by an alignment processing unit 23.
Coordinates of the position of the Z-tilt stage 5 when the peak
position is detected are measured by the laser interferometer 25,
and the measured coordinate information is supplied to the central
control system 31. The central control system 31 has previously
been stored with information concerning the design position of the
reticle pattern. The central control system 31 detects a deviation
of the position of the projected image from the design position on
the basis of the information, thereby measuring reticle pattern
writing errors and an amount of distortion of the projection
optical system 4. The central control system 31 stores the measured
data in memory.
[0060] Next, the operation of the projection exposure apparatus
according to this embodiment will be explained. First, the exposure
field will be explained.
[0061] In this embodiment, as shown in FIG. 1, the whole
illumination mechanism 13, which comprises the illumination optical
system and the reticle stage system, is movable by the illumination
mechanism drive unit 30 in the scanning direction (direction X)
relative to the projection optical system 4, and the reticle blind
17 is arranged such that its aperture configuration can be changed
to any desired configuration by the reticle blind drive unit 27. In
this case, the aperture configuration of the reticle blind 17
defines the configuration of a slit-shaped illumination area on the
reticle 1, and the positional relationship between the illumination
mechanism 13 and the projection optical system 4 determines the
relative position in the effective exposure field of the projection
optical system 4 of a slit-shaped exposure field obtained by
projecting the slit-shaped illumination area through the projection
optical system 4. Accordingly, moving the illumination mechanism 13
makes it possible to select an exposure field in which distortion
is minimized in the effective exposure field of the projection
optical system 4.
[0062] FIGS. 4(A), 4(B) and 4(C) illustrate a slit-shaped exposure
field in this embodiment. FIG. 4(A) shows a state where a
rectangular exposure field 113 lies in an approximately central
portion of the effective exposure field 116 of the projection
optical system 4. FIG. 4(B) shows a state where the exposure field
113 has shifted the most in the scanning direction from the central
portion of the effective exposure field 116 of the projection
optical system 4. FIG. 4(C) shows an exposure field 113A which has
changed into a circular segment shape. In FIG. 4(A), the
rectangular exposure field 113, which is elongated in the
non-scanning direction, lies in an approximately central portion of
the effective exposure field 116 of the projection optical system 4
as is the case with the conventional system. FIG. 4(B) shows a
state where the exposure field 113 has been shifted to the
extremity in the direction +X within the effective exposure field
116 of the projection optical system 4 by driving the illumination
mechanism 13 in the direction -X through the illumination mechanism
drive unit 30. FIG. 4(C) shows a circular segment-shaped exposure
field 113A formed such as to surround an approximately central
portion of the effective exposure field 116 of the projection
optical system 4 by changing the aperture configuration of the
reticle blind 17 into a circular segment shape through the reticle
blind drive unit 27.
[0063] In this embodiment, an amount of distortion in every area of
the effective exposure field 116 of the projection optical system 4
is measured by changing the position and. configuration of the
exposure field 113 in the effective exposure field 116 of the
projection optical system 4 as described above, thereby detecting
an optimum exposure field in which the projected image has a
minimal distortion as a whole after the scanning exposure. During
real exposure, exposure is carried out by using the optimum
exposure field. A specific example of a method of detecting an
exposure field in which the projected image after scanning exposure
has a minimal distortion may be such that a test reticle having
minimal pattern writing errors (or whose pattern writing errors
have been accurately measured by another measuring device) is used.
Then, positions of mark images in the exposure field as an object
to be inspected are detected by the photoelectric sensor 7.
Distortion is obtained from the result of the detection, and the
obtained distortion is integrated (averaged) in the scanning
direction.
[0064] Next, an operation of changing the telecentricity of the
illumination optical system will be explained. In this embodiment,
as shown in FIG. 1, optical members, such as the relay lenses 16
and 18, the condenser lens 14 and so forth, can be independently
decentered with respect to the optical axis center and moved in the
optical axis direction by the optical member drive unit 28. Thus,
the telecentricity of the illumination system with respect to the
reticle 1 can be deflected to any desired direction by controlling
the optical members with the central control system 31 through the
optical member drive unit 28. The telecentricity can also be
changed during the movement of the illumination mechanism 13. That
is, when the optical members and the whole illumination mechanism
13 are driven through the optical member drive unit 28 and the
illumination mechanism drive unit 30, the telecentricity of the
illumination optical system can be changed so as to match the
telecentric characteristics of the projection optical system 4. In
the following description, a state where principal rays are tilted
with respect to the optical axis AX on the reticle 1 (or the wafer
2) because of the destruction of telecentricity will be expressed
as "tilt of telecentricity".
[0065] FIGS. 2(A) to 2(E) are views used to explain the tilt of
telecentricity of the slit-shaped exposure field on the wafer 2 in
an example in which the telecentricity of the illumination optical
system is changed. In these figures, arrows shown by the continuous
lines indicate, respectively, the tilts of telecentricity averaged
in the scanning direction of the exposure field at reference points
P.sub.1 to P.sub.8 arrayed in the non-scanning direction on the
wafer 2. The direction and magnitude of each arrow respectively
indicate a direction and amount of tilt of telecentricity. The
reference points P.sub.1 to P.sub.8 are arranged at equal intervals
on a straight line perpendicular to a straight line 112 parallel to
the scanning direction (direction X). Because image-formation
characteristics in the scanning exposure method are common to each
position in the scanning direction by virtue of the integration
effect, the tilt of averaged telecentricity can also be regarded as
constant independently of the position in the scanning direction
(direction X) within the exposure field.
[0066] FIG. 2(A) shows a standard state. Referring to FIG. 2(A),
the tilt of telecentricity at each of the reference points P.sub.1
to P.sub.8 is zero. FIG. 2(B) shows a state where the bundle of
light rays is made slightly divergent by driving the
above-described optical members to move in a direction parallel to
the optical axis AX through the optical member drive unit 28. In
FIG. 2(B), the telecentricity at each of the reference points
P.sub.1 to P.sub.8 in the exposure field is tilted in the
non-scanning direction outwardly from the straight line 112 as
shown by the arrows Q.sub.1 to Q.sub.8. In this case, the principal
rays in the peripheral portions of the exposure field in the
directions +X and -X are also tilted in the scanning direction.
However, the tilts in the scanning directions are canceled by the
averaging effect. The amount of tilt enlarges as the distance
(image height) from the straight line 112 increases. Thus, the tilt
of telecentricity increases according to the image height in the
non-scanning direction. In this case, the tilt of telecentricity
bisymmetrically changes with respect to the straight line 112.
[0067] FIG. 2(C) shows the tilt of telecentricity when the
illumination mechanism 13 is shifted in the scanning direction from
the position as shown in FIG. 2(B). In FIG. 2(C), the
telecentricity at each of the reference points P.sub.1 to P.sub.8
is tilted not only in the non-scanning direction but also in the
scanning direction as shown by the arrows Q.sub.11 to Q.sub.18, and
the amount of tilt increases as the distance (image height) from
the straight line 112 increases. In this case also, the tilt of
telecentricity bisymmetrically changes with respect to the straight
line 112 in the same way as in the case of FIG. 2(B).
[0068] FIG. 2(D) shows the tilt of telecentricity when the optical
members are decentered by the optical member drive unit 28. In FIG.
2(D), the telecentricity at each of the reference points P.sub.1 to
P.sub.8 changes in the same way as in the case of FIG. 2(C), as
shown by the arrows Q.sub.21 to Q.sub.28. However, the amount of
tilt at the reference points P.sub.5 to P.sub.8 on the right-hand
side of the straight line 112 is larger than the amount of tilt at
the reference points P.sub.1 to P.sub.4 on the left-hand side of
the straight line 112. Thus, the tilt of telecentricity
asymmetrically changes with respect to the straight line 112.
[0069] Changes similar to those shown in FIGS. 2(B) to 2(D) can be
achieved by changing the set values of the focus position (position
in the direction Z) and tilt (angle of inclination) of the wafer
stage, as described later. However, the change of telecentricity
achieved by changing the focus position and tilt of the wafer stage
is limited by the depth of focus. Therefore, it is easier to
control the telecentricity by increasing the amount of decentration
of the above-described optical members and thus increasing the
inclination angle.
[0070] FIG. 2(E) shows the tilt of telecentricity in a case where
the telecentricity of the illumination optical system is changed by
combining together the above-described methods, shown in FIGS. 2(A)
to 2(D), or switching a part of lenses constituting the
illumination optical system to an spherical lens or the like. In
FIG. 2(E), the telecentricity at the reference points P.sub.1 to
P.sub.8 changes not linearly but quadratically or cubically
relative to the distance (image height) from the straight line 112
as shown by the arrows Q.sub.31 to Q.sub.38. Thus, the method
according to this embodiment makes it possible to change the
telecentricity with characteristics shown by a quadratic or cubic
curve relative to the image height. In this case, the change of
telecentricity achieved by methods as shown in FIGS. 2(A) to 2(E)
causes no image shift on the wafer 2 as long as the focus position
and tilt on the wafer 2 satisfy the focus conditions. In other
words, even under the same telecentricity conditions, the condition
of image shift on the wafer 2 can be changed by changing the
conditions for the focus position and tilt on the wafer 2.
Accordingly, with the upper surface of the photoelectric sensor 7
focused on the image plane of the projection optical system 4,
reticle pattern writing errors and distortion of the projection
optical system 4 are measured with the photoelectric sensor 7.
Thereafter, the central control system 31 decides under which of
the conditions shown in FIGS. 2(A) to 2(E) the telecentricity
should be adjusted, and sets the decided conditions for the
telecentricity through either the optical member drive unit 28 or
the illumination mechanism drive unit 30. Thereafter, the focus and
tilt of the wafer 2 are controlled through the Z-tilt control
system 26.
[0071] FIGS. 3(A), 3(B), 3(C) and 3(D) are views used to explain an
example of an operation of correcting a projected image on the
wafer 2 by controlling the focus position and tilt after conditions
for telecentricity have been set. In this example, a telecentricity
condition as shown in FIG. 2(C) is used. It should be noted that
FIG. 3(A) shows the condition of telecentricity, and FIG. 3(D)
shows a deformed condition of a projected image in one shot area on
the wafer 2 after scanning exposure. FIGS. 3(B) and 3(C)
respectively show displacements in the focus direction at both ends
of the shot area in the non-scanning direction (direction Y). In
FIGS. 3(B) to 3(D), coordinates in the scanning direction
(direction X) are identical with each other. It should be noted
that in FIGS. 3(B) and 3(C) the ordinate axis represents the
position X in the scanning direction, and the abscissa axis
represents the displacement T(X) in the focus direction (direction
Z) at the position X.
[0072] A shot area 117 shown by the dotted lines in FIG. 3(D) is
scanned in the direction X relative to the exposure field having
telecentricity tilted not only in the scanning direction but also
in the non-scanning direction as shown in FIG. 3(A). In this case,
the left and right ends of the shot area 117 in the non-scanning
direction are driven in the focus direction (direction Z), as shown
by the curve 119R in FIG. 3(B) and the curve 119L in FIG. 3(C), by
controlling the focus position and tilt of the wafer stage. By
driving the right and left ends of the shot area 117 in this way,
the shot area 117 is displaced in both the focus and tilt
directions. Because the telecentricity of illuminating light is
tilted, an image projected in the shot area 117 shifts
corresponding to the displacement of the shot area 117 in the focus
and tilt directions.
[0073] FIG. 3(D) shows an array in the shot area 117 by a lattice
coordinate system, in which the X coordinate value of the upper end
of the shot area 117 is assumed to be zero. It is further assumed
that the lattice pattern shown by the dotted lines is a pattern to
be transferred in a state where the whole shot area 117 is focused
on the image-formation plane of the projection optical system 4.
Further, conditions of shift at the points of intersection in the
lattice coordinate system, shown by the dotted lines, are indicated
by arrows. The direction and magnitude of each arrow indicate a
direction and amount of shift of the projected image. The lattice
coordinates variously shift corresponding to the displacement in
the focus and tilt directions at the position X in the scanning
direction, shown by the curves 119R and 119L in FIGS. 3(B) and
3(C).
[0074] For example, the displacement in the focus direction at the
left-end position P.sub.11 in the lattice coordinate system at the
point of X coordinate value 0 correspond to the value Z.sub.1 of
T(X) at the X coordinate value 0 in FIG. 3(B). Similarly, the
displacement in the focus direction at the right end position P12
corresponds to the value ZZ of T(X) at the X coordinate value 0 in
FIG. 3(C). Because of the displacements in the focus direction at
the two end positions P.sub.11 and P.sub.12, the projected image
shifts from the positions P.sub.11 and P.sub.12 to the positions
P.sub.15 and P.sub.16 as shown by the respective arrows. In this
case, the displacement quantities Z.sub.1 and Z.sub.2 in the focus
direction at the positions P.sub.11 and P.sub.12 are approximately
equal to each other, and there is almost no displacement in the
tilt direction. Accordingly, the shift of the projected image at
the X coordinate value 0 takes place in directions similar to the
directions of tilt of the telecentricity shown in FIG. 3(a).
[0075] For example, the displacement in the focus direction at the
left end position P.sub.13 in the lattice coordinate system at the
point of X coordinate value X.sub.1 corresponds to the value
Z.sub.3 of T(X) at the X coordinate value X.sub.1 in FIG. 3(B).
Similarly, the displacement in the focus direction at the right end
position P.sub.14 corresponds to the value Z.sub.4 of T(X) at the X
coordinate value X.sub.1 in FIG. 3(C). Because of the displacements
in the focus direction at the two end positions P.sub.13 and
P.sub.14, the projected image shifts from the positions P.sub.13
and P.sub.14 to the positions P.sub.17 and P.sub.18 as shown by the
respective arrows. In this case, unlike the case of the X
coordinate value 0, the displacement Z.sub.3 in the focus direction
at the position P.sub.13 is plus, whereas the displacement Z.sub.4
at the position P.sub.14 is minus. That is, the projected image is
displaced in the tilt direction with the left end shifted upward
and the right end shifted downward. Accordingly, at the
intersections in the lattice coordinate system at the X coordinate
value X.sub.1, the projected image is shifted in various
directions.
[0076] As described above, the shot area 117 on the wafer 2 is
scanned relative to the exposure field and continuously displaced
in the focus and tilt directions, thereby shifting the projected
image. In this case, if the shifted points of the projected image
at the intersections of the lattice coordinates of the shot area
117 are approximated by curves, a distorted projected image 118 is
obtained as shown by the continuous lines. Therefore, it becomes
possible to realize further complicated control by using the focus
and tilt control in combination with the above-described method of
controlling telecentricity by the illumination optical system.
[0077] Next, an operation of correcting reticle pattern writing
errors will be explained. In this embodiment, reticle pattern
writing errors are automatically measured after a reticle has been
mounted, and the writing errors are corrected by a correcting
device on the basis of the result of the measurement. In this case,
the writing errors are approximated by curves so that the
correcting device can readily respond (follow up), and correction
is made on the basis of the approximation. Consequently, it becomes
possible to completely eliminate low-frequency errors, which are
recognized as gentle curves appearing in the whole reticle, among
the reticle pattern writing errors.
[0078] FIG. 5(A) shows reticle pattern writing errors approximated
by curves. FIG. 5(B) shows results of measurement of writing errors
which are deviations of the actual pattern positions, obtained by
measuring the coordinates of projected images of patterns on the
reticle 1, from previously stored design data. In FIG. 5(B), the
reticle 1 has an outer lattice pattern 110A set thereon and an
inner lattice pattern 110B set inside the lattice pattern 110A. A
plurality of arrows shown by continuous lines indicate results of
measurement of deviations of predetermined points on the lattice
patterns 110A and 110B from the respective design values. The
direction and magnitude of each arrow indicate a direction and
amount of deviation from the corresponding design point.
[0079] For example, the design coordinate values (x.sub.1,y.sub.1),
(x.sub.1,y.sub.2), (x.sub.2,y.sub.1) and (x.sub.2,y.sub.2) at the
four corners of the outer lattice pattern 110A have been displaced
to the respective measured coordinate values (x.sub.3,y.sub.3),
(x.sub.4,y.sub.4), (x.sub.5,y.sub.5) and (x.sub.6,y.sub.6). The
design coordinate values (x.sub.7,y.sub.7), (x.sub.7,y.sub.8)),
(x.sub.8,y.sub.7) and (x.sub.8,y.sub.8) at the four corners of the
inner lattice pattern 110B have also been displaced to the
respective measured coordinate values (x.sub.9,y.sub.9),
(x.sub.10,y.sub.10), (x.sub.11,y.sub.11) and (x.sub.12,y.sub.12).
Similarly, the other measured points on the lattice patterns 110A
and 110B have been displaced in the respective directions as shown
by the associated arrows.
[0080] Under these circumstances, the measured coordinate values
(x.sub.3,y.sub.3), (x.sub.4,y.sub.4), (x.sub.5,y.sub.5) and
(x.sub.6,y.sub.6) and other measured coordinate values concerning
the outer lattice pattern 110A are connected together by curve
approximation to obtain an outer curve 111A as shown in FIG. 5(A).
Similarly, the measured coordinate values (x.sub.9,y.sub.9),
(X.sub.10,y.sub.10), (x.sub.11,y.sub.11) and (x.sub.12,y.sub.12)
and other measured coordinate values concerning the inner lattice
pattern 110B are connected together by curve approximate to obtain
an inner curve 111B as shown in FIG. 5(A). Accordingly, when an
illumination area 113R is scanned in the direction of the arrow
relative to the reticle 1 as shown in FIG. 5(A) (actually, the
reticle 1 is scanned in the reverse direction), portions of the
projected exposure image in the exposure field corresponding to the
illumination area 113R are sequentially corrected by the correcting
device, thereby enabling each lattice pattern to be transferred in
a form close to an ideal lattice.
[0081] Next, an operation of correcting reticle pattern writing
errors will be explained. Reticle pattern writing errors are
corrected by tilting telecentricity on the wafer 2 at a small angle
by controlling the optical member drive unit 28 through the central
control system 31, shown in FIG. 1, such that the telecentricity of
the illumination optical system is properly adjusted, and also by
controlling the focus position and tilt of the wafer 2.
[0082] In this case, it is possible to cause the projected exposure
image to shift variously in the directions X and Y (transverse
direction) as shown in FIGS. 6(A) to 6(H) by giving a quadratic or
cubic curve distribution to the image height as writing errors and
giving a focus offset and tilt during exposure within the depth of
focus by driving the Z-tilt stage 5 in conformity to the quadratic
or cubic curve distribution.
[0083] FIGS. 6(A) to 6(H) are views used to explain one example of
an operation of causing the projected image to shift in the
directions X and Y by the focus and tilt control. In this example,
an explanation is given of a case where the telecentricity on the
wafer 2 is tilted in the scanning direction (direction X). In this
case, it is assumed that the exposure field 113 on the wafer 2 has
a width 2L in the non-scanning direction (direction Y) and a width
D in the scanning, as shown in FIG. 4(A). It is further assumed
that the image height from a straight line, which passes through
the center of the circular effective exposure field 116 of the
projection optical system 4 in parallel to the scanning direction,
toward the outer periphery of the projection optical system 4 is
denoted by R(Y), and the tilt angle of telecentricity in the
scanning direction (direction X) depending on each particular image
height R(Y) is denoted by .DELTA..theta..
[0084] FIG. 6(A) shows a case where the tilt of telecentricity has
a constant linear error (offset in this case) relative to the image
height R(Y), and FIG. 6(B) shows a case where the tilt of
telecentricity has a curvilinear error (error expressed by a
quadratic or higher-order expression) relative to the image height
R(Y). In these figures, the abscissa axis represents the tilt angle
.DELTA..theta., and the ordinate axis represents the image height
R(Y). FIG. 6(C) shows the relationship between the image height
R(Y) and the amount of shift (transverse shift) of the projected
image in the scanning direction in a case where the wafer 2 is
moved in the focus direction +Z when the telecentricity is related
to the image height R(Y) as shown in FIG. 6(A). FIG. 6(D) shows the
above-described relationship when the wafer 2 is moved in the focus
direction -Z. FIG. 6(E) shows the relationship when the wafer 2 is
moved in the tilt direction. Similarly, FIGS. 6(F) to 6(H) show the
above-described relationship when the telecentricity is related to
the image height R(Y) as shown in FIG. 6(B), corresponding to FIGS.
6(C) to 6(E), respectively. In FIGS. 6(C) to 6(H), the abscissa
axis represents the image height R(Y), and the ordinate axis
represents the amount of shift W(X) in the scanning direction
(direction X).
[0085] In FIG. 6(A), the straight line 121 which represents the
relationship between the image height R(Y) and the tilt angle
.DELTA..theta. has a tilt angle .DELTA..theta..sub.a which is
constant over the image height R(Y) range of from 0 to +L (the same
is the case with the range of from 0 to -L). If the wafer 2 is
moved in the focus direction by +.DELTA.Z in a case where the tilt
of telecentricity has a constant linear error relative to the image
height R(Y), as shown by the straight line 123 in FIG. 6(C), the
projected image shifts in the scanning direction by a constant
amount -W.sub.a over the entire image height range of from +L to
-L. If the wafer 2 is moved in the focus direction by -.DELTA.Z, as
shown by the straight line 124 in FIG. 6(D), the projected image
shifts in the scanning direction by a constant amount W.sub.a over
the entire image height range of from +L to -L. If the wafer 2 is
moved in the tilt direction (i.e., inclined), as shown by the
straight line 125 in FIG. 6(E), the projected image shifts by an
amount W.sub.b at the image height -L and by an amount -W.sub.b at
the image height +L. Thus, the projected image antisymmetrically
shifts in reverse directions about the image height 0.
[0086] As has been described above, when the tilt of telecentricity
has a constant linear error relative to the image height R(Y), the
amount of shift W (X) is caused to change in linear relation to the
image height R(Y) by driving the wafer 2 in the focus and tilt
directions. In contrast, when the tilt of telecentricity has a
curvilinear error relative to the image height R(Y), the amount of
shift W(X) is caused to change in non-linear relation to the image
height R(Y) by driving the wafer 2 in the focus and tilt
directions.
[0087] FIG. 6(F) shows a case where the wafer 2 is moved in the
focus direction by +.DELTA.Z when the telecentricity is related to
the image height R(Y) as shown in FIG. 6(B). As shown in FIG. 6(F),
the projected image non-linearly shifts in the direction -X
relative to the image height R(Y) as shown by the curve 126, in
which the amount of shift W(X) is -W.sub.c at the image heights +L
and -L, and zero at the image height 0. In contrast, when the wafer
2 is moved in the focus direction by -.DELTA.Z, as shown in FIG.
6(G), the projected image shifts in the direction +X in symmetric
relation to FIG. 6(F) as shown by the curve 127, in which the
amount of shift W(X) is W.sub.c at the image heights +L and -L, and
zero at the image height 0. When the wafer 2 is moved in the tilt
direction, as shown by the cubic curve 128 in FIG. 6(H), the
projected image shifts by an amount W.sub.d at the image height -L
and by an amount -W.sub.d at the image height +L. Thus, the
projected image antisymmetrically shifts in reverse directions
about the image height 0.
[0088] As has been described above, it is possible to generate a
plurality of rectilinear and curvilinear distortions in the
scanning direction by driving the wafer 2 in the focus and tilt
directions through the Z-tilt stage 5. Accordingly, if the drive of
the wafer 2 in the focus and tilt directions is controlled so as to
cancel the reticle pattern writing errors and distortion of the
projection optical system 4, which have previously been measured,
those errors can be corrected at high speed. Although in the
foregoing description the tilt of telecentricity is assumed to be
in the scanning direction, it should be noted that the direction of
the tilt of telecentricity is not necessarily limited to the
scanning direction, and that the same results as those stated above
can be obtained also in the non-scanning direction.
[0089] Thus, this embodiment makes it possible to correct reticle
pattern writing errors and distortion of the projection optical
system and hence possible to form a shot pattern close to an ideal
lattice and to improve the total overlay accuracy (i.e., overlay
accuracy between process steps). Recently, there has been a
tendency for the tilt of telecentricity of the illumination optical
system to have stringent tolerance requirements because the depth
of focus shallows as the wavelength of exposure light becomes
shorter. In this regard, the method according to this embodiment
goes against the tendency. On the other hand, however, there has
recently been a tendency for the depth of focus to have some margin
by virtue of the positive correction of the flatness of the wafer
surface achieved by the planarization technique for the wafer and
the improvement of the wafer holder. Moreover, there has been no
scheme for improving reticle pattern writing errors. Accordingly,
the method of this embodiment is considerably effective in
correcting reticle pattern writing errors.
[0090] In a case where reticle pattern writing errors include only
linear errors, the errors may be corrected by using a conventional
technique such as that shown in FIGS. 7(A), 7(B) and 7(C). In this
case also, advantageous effects similar to those stated above can
be obtained. Further, there has heretofore been a demand for an
appropriate measure to correct distortion due to influences such as
atmospheric pressure change, thermal deformation of the projection
optical system, etc. The distortion is a second- or third-order
magnification error. The method according to this embodiment can be
effectively used as a method of properly correcting such
distortion.
[0091] Although in this embodiment the telecentricity is changed by
driving the relay lenses 16 and 18 and the condenser lens 14 in the
illumination optical system, it should be noted that a mechanism
for varying the angle of the mirror 15 may be additionally provided
so that the telecentricity is changed by varying the rotation angle
of the mirror 15 through the mechanism. It is also possible to vary
the inclination angle of the whole wafer stage-side part, including
the projection optical system 4.
[0092] It should be noted that the above-described embodiment is
applicable not only to scanning-type projection exposure
apparatuses but also to stepper type projection exposure
apparatuses adapted to carry out one-shot exposure for each shot
area on a wafer.
[0093] According to the above-described projection exposure
apparatus, it is possible to carry out favorable pattern exposure
without distortion or other defect in a one-shot exposure type or
scanning exposure type projection exposure apparatus by correcting
a projected image on a substrate (wafer) according to displacement
or distortion of a pattern on a mask (reticle) using the
above-described method. For example, since it is possible to
correct reticle pattern writing errors and distortion of the
projection optical system, a shot pattern close to an ideal lattice
can be formed, and the total overlay accuracy (i.e., overlay
accuracy between process steps) can be improved.
[0094] When the technique of correcting the projected image
includes a first technique of changing the telecentricity of the
projection optical system, and a second technique of controlling
the position of a substrate to be exposed in the direction of the
optical axis of the projection optical system, together with the
inclination angle of the substrate, the position of the spatial
image can be locally shifted to a proper position by causing a
transverse shift of the projected image using the two techniques.
Particularly, if the correcting technique is applied to the
scanning exposure system, and the amount of correction made by the
second technique, for example, is controlled according to the
scanning position, rather complicated writing errors can also be
corrected.
[0095] In a case where the technique of correcting the projected
image is adapted to correct the position of a spatial image formed
by the projection optical system so as to correct gently varying
components of writing errors which are obtained on the basis of
input pattern information, the response speed of a device (e.g.,
the above-described stage) for realizing the correcting technique
can be slowed down; this is practical when it is applied to a
scanning exposure system, for example. Further, there has
heretofore been a demand for an appropriate measure to correct
distortion due to influences such as atmospheric pressure change
and illumination in the projection optical system. The distortion
is a second- or third-order magnification error. The
above-described technique can be effectively used as a method of
properly correcting such distortion.
[0096] Further, according to the above-described embodiment,
exposure of high accuracy can be effected in a scanning exposure
type projection exposure apparatus by selecting an exposure area
which is most suitable for the image-formation characteristics of
the apparatus from among those in the effective exposure field of
the projection optical system Next, a second embodiment of the
present invention will be described with reference to FIGS. 8 to
15(C).
[0097] FIG. 8 shows a step-and-scan type projection exposure
apparatus 310 according to the second embodiment of the present
invention.
[0098] Referring to FIG. 8, illuminating light IL from a mercury
lamp 201 as an illuminating light source is converged by an
elliptical mirror 202. A shutter 204 is disposed in the vicinity of
a point where the illuminating light IL is converged. The shutter
204 is selectively opened and closed by a shutter control mechanism
205. When the shutter 204 is open, the illuminating light IL is
reflected by a mirror 203 and converted through an input lens 206
into a bundle of approximately parallel rays before reaching a
field stop 207. A light-reducing plate 223 is disposed immediately
behind the field stop 207 such that the light-reducing plate 223
can be inserted into and withdrawn from the optical path of the
illuminating light IL. Thus, the quantity of illuminating light IL
passing through the field stop 207 can be stepwisely or
continuously varied within a predetermined range by the
light-reducing plate 223. The reason why the system is arranged to
allow the quantity of illuminating light IL to be controlled by the
light-reducing plate 223 is to enable the required throughput to be
maintained by controlling the quantity of illuminating light IL in
conformity to the sensitivity of a resist coated on the surface of
a wafer W as a photosensitive substrate.
[0099] The light-reducing plate 223 comprises a plurality of
reflection type half-mirrors, for example, which are changeably
disposed. The tilt of each half-mirror with respect to the optical
axis is set such that the overall transmittance becomes a
predetermined one. The quantity of illuminating light IL is
controlled by stepwisely moving the light-reducing plate 223
through a light-reducing plate driving mechanism 224 including a
driving motor. In this embodiment, an exposure control system 220
controls the amount of exposure applied to the wafer W. The
exposure control system 220 controls the operation of the
light-reducing plate driving mechanism 224 and also controls the
operation of the shutter control mechanism 205. Further, the
exposure control system 220 controls the electric current supplied
to the mercury lamp 201 through a power supply system 222 for the
mercury lamp 201.
[0100] Thus, after passing through the aperture of the field stop
207, the illuminating light IL is subjected to the control of light
quantity by the light-reducing plate 223. Then, the illuminating
light IL passes through a first relay lens 208 and enters a first
fly-eye lens 209 in a two-stage fly-eye lens group. Illuminating
light from a plurality of light source images formed by the first
fly-eye lens 209 is led to a second fly-eye lens 214 through a
second relay lens 212A. A light quantity stop 210 is disposed in
the vicinity of the exit surface of the first fly-eye lens 209,
that is, the light source image formation plane thereof. The light
quantity stop 210 is arranged such that the aperture size of the
stop 210 can be adjusted to any desired size by a light quantity
stop driving mechanism 211. The operation of the light quantity
stop driving mechanism 211 is also controlled by the exposure
control system 220. In this embodiment, the quantity of
illuminating light IL traveling from the first fly-eye lens 209
toward the second fly-eye lens 214 can be continuously controlled
by controlling the aperture size of the light quantity stop
210.
[0101] FIG. 9(A) shows one example of the light quantity stop 210.
In FIG. 9(A), the light quantity stop 210 comprises an iris stop.
In this case, the size of an approximately circular aperture of the
iris stop can be continuously controlled as shown in FIG. 9(B), for
example, by moving a lever provided at the periphery of the iris
stop.
[0102] Referring to FIG. 8, there has recently been developed a
technique whereby the depth of focus with respect to a
predetermined pattern is improved by reducing the numerical
aperture (N.A.) of the illumination optical system, i.e., the
coherence factor (.sigma. value), which is the value of a ratio of
the numerical aperture of the illumination optical system to that
of the projection optical system. Reducing the .sigma. value causes
a reduction in the illuminance of illuminating light IL
illuminating a reticle R as a mask. In this embodiment, a mechanism
for adjusting the size of the illumination area on the entrance
surface of the second fly-eye lens 214 is provided as a device for
preventing reduction in illuminance of the illuminating light
IL.
[0103] The adjusting mechanism comprises the second relay lens
212A, another second relay lens 212B having a larger refracting
power than the second relay lens 212A, and a switching mechanism
213 for switching the two second relay lenses 212A and 212B from
one to the other. The operation of the switching mechanism 213 is
controlled by a main control system 219 which generally controls
operations of the whole projection exposure apparatus 310. When
illumination is effected with an ordinary a value, the switching
mechanism 213 is actuated to dispose the second relay lens 212A
between the first and second fly-eye lenses 209 and 214.
Consequently, approximately the entire entrance surface of the
second fly-eye lens 214 is illuminated by illuminating light IL. On
the other hand, when illumination is effected with the a value
reduced (i.e., with the numerical aperture of the illumination
optical system reduced), the switching mechanism 213 is actuated to
dispose the second relay lens 212B in between the first and second
fly-eye lenses 209 and 214, thereby allowing the central portion of
the entrance surface of the second fly-eye lens 214 to be locally
illuminated by illuminating light IL. Accordingly, when the a value
is reduced, the illuminance of illuminating light at the stage of
the second fly-eye lens 214 is increased. Therefore, illuminating
light of high illuminance can be obtained on both the reticle R and
the wafer W irrespective of the .sigma. value.
[0104] Although the adjusting mechanism in this embodiment is a
switching type mechanism, it should be noted that the adjusting
mechanism may comprise a zoom lens system disposed between the
first and second fly-eye lenses 209 and 214, and a zooming
mechanism which varies the magnification of the zoom lens system.
Use of such a zoom lens system makes it possible to continuously
change the size of the illumination field at the entrance surface
of the second fly-eye lens 214. Accordingly, the illuminance on
both the reticle R and the wafer W can be maintained at high level
at all times even when the a value is continuously changed.
[0105] The second fly-eye lens 214 comprises two lens bundles 214a
and 214b each having lens elements disposed in close contact with
each other in a mosaic shape. One end of each lens bundle forms a
flat surface. The two lens bundles 214a and 214b are disposed in
close proximity to each other such that the respective flat end
portions face each other. Accordingly, the second fly-eye lens 214
will be hereinafter referred to as "mosaic type fly-eye lens
214".
[0106] FIG. 10(A) is a side view of the mosaic fly-eye lens 214. In
FIG. 10(A), the mosaic fly-eye lens 214 comprises two lens bundles
214a and 214b which are disposed such that the respective flat end
portions FB and FC face each other at a distance 6 along the
optical axis AX1 of the illumination optical system. In this case,
lens elements constituting the first lens bundle 214a, which is on
the light source side, each has refracting power at the entrance
surface FA side, whereas lens elements constituting the second lens
bundle 214b, which is on the reticle side, each has refracting
power at the exit surface FD side.
[0107] The refracting power of each lens element is set such that a
bundle of parallel rays entering the first lens bundle 214a from
the light source side is converged on the exit surface FD of the
second lens bundle 214b, whereas a bundle of parallel rays entering
the second lens bundle 214b from the reticle side is converged on
the entrance surface FA of the first lens bundle 214a. That is, the
exit surface FD of the second lens bundle 214b forms a focus plane
of the mosaic type fly-eye lens 214, so that a multiplicity of
light source images are formed on the exit surface FD. Accordingly,
the lens bundles 214a and 214b function as a fly-eye lens only when
they are combined together. It should be noted that the number of
lens elements constituting the two lens bundles 214a and 214b of
the mosaic type fly-eye lens 214, shown in FIGS. 10(A) to 10(C), is
merely an example. In actual practice, the number of elements is
determined according to tolerances for the required illuminance
distribution uniformity.
[0108] FIG. 10(B) is a front view of the first lens bundle 214a as
seen from the arrow B-B in FIG. 10(A). FIG. 10(C) is a front view
of the second lens bundle 214b as seen from the arrow C-C in FIG.
10(A). In FIGS. 10(B) and 10(C), a direction corresponding to the
reticle scanning direction during scanning exposure carried out by
the projection exposure apparatus 310 is defined as a direction X1,
and a direction corresponding to a non-scanning direction
perpendicular to the scanning direction is defined as a direction
Y1.
[0109] As shown in FIG. 10(B), the first lens bundle 214a comprises
lens elements 261 each having an elongated rectangular
cross-sectional configuration in which the width in the direction
X1 is dx, and the width in the direction Y1 is dy (dy>dx). The
lens elements 261 are arrayed in the direction Y1 in close contact
with each other, thereby forming lens groups in rows: a first row
262A, a second row 262B, a third row 262C, . . . In this case, the
lens elements 261 are arranged such that the lens groups in the
odd-numbered rows, i.e., the first row 262A, the third row 262C, .
. . , are displaced relative to the lens groups in the
even-numbered rows, i.e., the second row 262B, the fourth row 262D,
. . . , in the direction Y1 by a half of the width dy of one lens
element.
[0110] In this embodiment, the entrance surface of the mosaic type
fly-eye lens 214, shown in FIG. 10(A), that is, the entrance
surface FA of the first lens bundle 214a, is conjugate with the
reticle pattern surface, and when the cross-sectional configuration
of the lens elements 261, which constitute the first lens bundle
214a, is similar to the slit-shaped illumination area on the
reticle R, the highest illumination efficiency is obtained.
Therefore, the ratio of the width dx in the direction X1 of the
cross-sectional configuration of each lens element to the width dy
in the direction Y1 is set approximately equal to the ratio of the
width in the scanning direction of the slit-shaped illumination
area on the reticle R to the width thereof in the non-scanning
direction. Accordingly, each lens element 261 has a rectangular
cross-section which is elongated in the direction Y1, which
corresponds to the non-scanning direction. For example, the ratio
of dx to dy is set on the order of dx:dy=1:3.
[0111] As shown in FIG. 10(C), the second lens bundle 214b
comprises lens elements 265 each having an approximately square
cross-sectional configuration in which the width in the direction
X1 is ex (=2.multidot.dx) and the width in the direction Y1 is ey
(=dy/2). The lens elements 265 are arrayed in the direction X1 in
close contact with each other, thereby forming lens groups in
columns: a first column 266A, a second column 266B, a third column
266C, . . . In this case, the lens elements 265 are arranged such
that the lens groups in the odd-numbered columns, i.e., the first
column 266A, the third column 266C, . . . are displaced relative to
the lens groups in the even-numbered columns, i.e., the second
column 266B, the fourth column 266D, . . . in the direction X1 by a
half of the width ex of one lens element 265. Incidentally, when
the width ratio concerning the cross-sectional configuration of the
lens elements 261 of the first lens bundle 214a is of the order of
dx:dy=1:3, the width ratio concerning the cross-sectional
configuration of the lens elements 265 of the second lens bundle
214b is of the order of ex:ey=2:1.5=4:3. Thus, each lens element
265 has an approximately square cross-sectional configuration.
[0112] In the above-described arrangement, the center of a certain
lens element in the first lens bundle 214a and the center of a
certain lens element in the second lens bundle 214b are previously
aligned in both the directions X1 and Y1. Thus, the centers 263 of
all the lens elements 261 constituting the first lens bundle 214a
and the centers 267 of all the lens elements 265 constituting the
second lens bundle 214b are disposed at the same positions in both
the directions X1 and Y1.
[0113] The operation of the mosaic type fly-eye lens 214, which
comprises the two lens bundles 214a and 214b, will be explained
below. The mosaic type fly-eye lens 214 is the second-stage fly-eye
lens. Each individual light source image formed on the exit surface
of the second-stage fly-eye lens is an image of a multiplicity of
light source images formed on the exit surface of the first-stage
first fly-eye lens 209 and in the aperture of the light quantity
stop 210, which are shown in FIG. 8. That is, each light source
image formed on the exit surface of the mosaic type fly-eye lens
214 comprises a multiplicity of small light source images which are
uniformly distributed in an area, for example, a circular area.
[0114] Accordingly, when the light source images formed on the exit
surface of the mosaic type fly-eye lens 214 are projected onto the
end surface of the first lens bundle 214a, as shown in FIG. 10(B),
small light source images are distributed in circular areas 264
centered at the respective centers 263 of the lens elements 261.
Each circular area 264 is similar in shape to the aperture of the
light quantity stop 210, shown in FIGS. 9(A) and 9(B). However,
because each lens element 261 of the first lens bundle 214a has an
elongated rectangular cross-sectional configuration, if the light
quantity stop 210 is set to provide a large aperture, the circular
area 264 extends over beyond the edges of the end surface of each
lens element 261. Therefore, if a fly-eye lens which comprises a
bundle of lens elements having the same cross-sectional
configuration as that of the lens element 261 is used in place of
the mosaic type fly-eye lens 214, the light source image is
eclipsed at the exit surface, causing a reduction in the
illumination efficiency.
[0115] In this embodiment, the second lens bundle 214b comprising
the lens elements 265 each having an approximately square
cross-sectional configuration, as shown in FIG. 10(C), is disposed
immediately behind the first lens bundle 214a, thus forming light
source images which are distributed in circular areas 264 centered
at the respective centers 267 of the lens elements 265. In this
case, the lens elements 265 each has an approximately square
cross-sectional configuration. Therefore, even when the light
quantity stop 210, shown in FIGS. 9(A) and 9(B), is set to provide
a large aperture, the circular area 264 substantially fits in the
cross-section of each lens element 265. Accordingly, the eclipse of
a multiplicity of light source images formed on the exit surface of
the mosaic type fly-eye lens 214 is minimized, and thus the
illumination efficiency is improved. In addition, uniformity of the
illuminance distribution over the reticle R and the wafer F is
markedly improved by performing superposition illumination with
illuminating light from a multiplicity of light source images
formed on the exit surface of the mosaic type fly-eye lens 214.
[0116] Referring to FIG. 8, the second lens bundle 214b, which is a
reticle-side lens bundle of the mosaic type fly-eye lens 214, is
provided with an adjusting mechanism 215 for shifting the lens
bundle 214b in a direction perpendicular to the optical axis AX1
and for adjusting the tilt angle (inclination angle) of the lens
bundle 214b within a predetermined range. In this embodiment,
displacement (i.e., the above-described linear error) of the
telecentricity in the illumination optical system is corrected by
adjusting the amount of shift and tilt angle of the lens bundle
214b through the adjusting mechanism 215. For example, when the
light quantity stop 210 is replaced, or when the illumination
conditions are changed (e.g., switching of the ordinary
illumination to the modified light source illumination or vice
versa), the telecentricity is automatically corrected by
controlling the operation of the adjusting mechanism 215 through
the main control System 219.
[0117] In FIG. 8, an illumination system aperture stop plate 216 is
installed in the vicinity of the exit surface of the mosaic type
fly-eye lens 214. The illumination system aperture stop plate 216
serves as a driven optical-member which is provided with a
plurality of different kinds of illumination system aperture
stop.
[0118] FIG. 11 shows one example of the illumination system
aperture stop plate 216. In FIG. 11, the illumination system
aperture stop plate 216 has four aperture stops 218A, 218B, 218C
and 218D circumferentially spaced at approximately equal angles.
The aperture stop 218A comprises an ordinary circular aperture. The
aperture stop 218B comprises a small circular aperture for reducing
the a value as a coherence factor. The aperture stop 218C is an
annular aperture stop for annular zone illumination. The aperture
stop 218D is a modified aperture atop comprising a plurality of
decentered apertures for the modified light source method. By
rotating the illumination system aperture stop plate 216, a desired
aperture stop can be selected from among the four aperture
stops.
[0119] Referring to FIG. 8, the main control system 219 controls
the rotation angle of the illumination system aperture stop plate
216 through an illumination system stop driving mechanism 217 which
comprises a driving motor. Illuminating light IL emanating from the
mosaic type fly-eye lens 214 and passing through a selected
aperture stop on the illumination system aperture stop plate 216
enters a beam splitter 231 having a transmittance of the order of
98%. Illuminating light IL passing through the beam splitter 231
passes through a first relay lens 234 and reaches a movable blind
(variable field stop) having two movable blades 235A and 235B. The
movable blind will be hereinafter referred to as "movable blind
(235A and 235B)". The movable blind (235A and 235B) is placed at a
Fourier transform plane with respect to the exit surface of the
mosaic type fly-eye lens 214. That is, the plane where the movable
blind (235A and 235B) is placed is conjugate with the pattern
formation surface of the reticle R (described alter). A fixed blind
237 having a fixed aperture configuration is disposed in the
vicinity of the movable blind (235A and 235B).
[0120] The fixed blind 237 is a mechanical field stop having a
rectangular aperture defined by four knife edges, for example. The
rectangular aperture defines the configuration of a slit-shaped
illumination area on the reticle R. That is, illuminating light IL
which is restricted by the movable blind (235A and 235B) and the
fixed blind 237 passes through a second relay lens 238 and a
condenser lens 239 and is reflected by a mirror 240 to illuminate a
slit-shaped illumination area 241 as an illumination field on the
reticle R with a uniform illuminance distribution.
[0121] In this case, a plane where the fixed blind 237 is placed is
slightly defocused from a plane conjugate with the pattern
formation surface of the reticle R in either the forward or
backward direction. Therefore, the illuminance distribution at the
border portion of the slit-shaped illumination area 241 changes
with a predetermined gradient. Further, the movable blind (235A and
235B) serves to prevent the slit-shaped illumination area 241 from
extending over an area on the reticle R which should not be exposed
at the time of initiating or terminating scanning exposure.
Therefore, the movable blades 235A and 235B are supported by
respective slide mechanisms 236A and 236B such that the movable
blades 235A and 235B can be opened and closed. The slide mechanisms
236A and 236B constitute a movable blind driving mechanism. The
operation of the movable blind driving mechanism is controlled by a
stage control system 246.
[0122] An image of a pattern in the illumination area 241 on the
reticle R is projected onto a slit-shaped exposure field 247 on the
wafer W through a projection optical system PL with a projection
magnification .beta. (.beta. is 1/4 or 1/5, for example). Here, a
Z-axis is taken in a direction parallel to an optical axis of the
projection optical system PL, and an X-axis is taken in a direction
parallel to the scanning direction of the reticle R and the wafer W
during scanning exposure in a plane perpendicular to the Z-axis. A
Y-axis is taken in a direction (non-scanning direction)
perpendicular to the X-axis in a plane perpendicular to the Z-axis.
The reticle R is held on a scanning stage 242 which is slidable in
the direction X on a reticle base 243. The wafer W is held on a
wafer stage 248 which scans the wafer W in the direction X and
which also positions the wafer W in the direction Y. The wafer
stage 248 incorporates a Z-stage for positioning the wafer W in the
direction Z.
[0123] The scanning stage 242 is supported on the reticle base 243
through a hydrostatic air bearing (not shown), and driven to move
in the direction X by a driving system comprising a linear motor
(not shown). Similarly, the wafer stage 248 is supported on a base
(not shown) through a hydrostatic air bearing, and driven to move
in two-dimensional directions X and Y by a driving system
comprising a linear motor (not shown). In this embodiment, the
operations of the scanning stage 242 and wafer stage 248 are
controlled by the stage control system 246 through these driving
systems. It should be noted that the driving systems for the
scanning stage 242 and the wafer stage 248 may each comprise a ball
screw and a rotary motor for driving the ball screw to rotate.
[0124] During scanning exposure, the stage control system 246
drives the scanning stage 242 retaining the reticle R to scan at a
predetermined speed VR in the direction +X (or -X) relative to the
illumination are a 241 through the driving system (not shown), and
synchronously drives the wafer stage 248 through the driving system
(not shown), thereby scanning a predetermined shot area on the
wafer W in the direction -X (or +X) at a speed VW
(=.beta..multidot.VR) relative to the exposure field 247. Thus, a
pattern formed on the reticle R is sequentially transferred onto
the shot area. During the scanning exposure, the stage control
system 246 controls the position of the movable blind (235A and
235B) through the slide mechanisms 236A and 236B. A method of
controlling the position of the movable blind (235A and 235B)-will
be explained below with reference to FIGS. 13(A), 13(B) and
13(C).
[0125] Immediately after the initiation of scanning exposure, as
shown in FIG. 13(A), an image 237R of the aperture of the fixed
blind 237, shown in FIG. 8, extends over beyond the outer edges of
a light-blocking frame 288 surrounding a pattern area 287 on the
reticle R. Therefore, in order to avoid exposure for an unnecessary
portion, the position of the movable blade 235B, shown in FIG. 8,
is moved such that one edge 235Ra of an image 235R of the movable
blind (235A and 235B) lies in the frame 288. Thereafter, as shown
in FIG. 13(B), when the image 237R of the fixed blind 237 fits in
the pattern area 287 in the scanning direction, the image 235R of
the movable blind (235A and 235B) is set so as to surround the
image 237R. Upon completion of the scanning exposure, as shown in
FIG. 13(C), if the image 237R of the fixed blind 237 extends over
beyond the outer edges of the frame 288, the position of the
movable blade 235A, shown in FIG. 8, is moved such that the other
edge 235Rb of the image 235R of the movable blind (235A and 235B)
lies in the frame 288. By the described operation, the slit-shaped
illumination area 241 on the reticle R is prevented from extending
over beyond the outer edges of the frame 288, and thus unnecessary
pattern exposure onto the wafer W is prevented.
[0126] Referring to FIG. 8, an illumination uniformity sensor 249
is installed in the vicinity of the wafer W on the wafer stage 248.
The illumination uniformity sensor 249 comprises a photoelectric
detector having a light-receiving surface which is flush with the
exposure surface of the wafer W. A detection signal output from the
illumination uniformity sensor 249 is supplied to the main control
system 219. Further, the wafer stage 248 is provided thereon with a
fiducial mark board 250 which is used to effect reticle alignment.
The fiducial mark board 250 has a fiducial mark 250A which
comprises an opening pattern. The reticle R is also provided with
an alignment mark corresponding to the fiducial mark 250A. When the
reticle R has been replaced with another, for example, the fiducial
mark board 250 is moved into the effective exposure field of the
projection optical system PL, and the fiducial mark 250A of the
fiducial mark board 250 is illuminated from below with illuminating
light in the same wavelength band as the illuminating light IL by a
light source 251. Under the illuminating light, an image of the
fiducial mark 250A and an image of the alignment mark on the
reticle R are observed with a reticle alignment microscope 244 via
a mirror 245 provided above the reticle R. The reticle R is aligned
with respect to the fiducial mark board 250 on the basis of the
result of the observation.
[0127] The fiducial mark board 250 is also provided with a fiducial
mark for focus calibration, and a detection system is disposed
underneath the fiducial mark.
[0128] FIG. 12(A) shows the fiducial mark for focus calibration and
the detection system. In FIG. 12(A), a fiducial mark 250B, which
comprises a cross-shaped opening pattern, is formed in a
light-blocking film on the fiducial mark board 250, and a detection
system 254 is disposed underneath the fiducial mark 250B. The
position of the image-formation plane of the projection optical
system PL is obtained by using the fiducial mark 250B as follows:
In the detection system 254, illuminating light in the same
wavelength band as the illuminating light IL, shown in FIG. 8, is
led to the inside of the wafer stage 248 through an optical fiber
bundle 281, and the fiducial mark 250B is illuminated from below by
the illuminating light through a collimator lens 282, a half-mirror
283, and a condenser lens 284. Illuminating light passing through
the fiducial mark 250B passes through the projection optical system
PL to form an image of the fiducial mark 250B on the pattern
formation surface of the reticle R. Reflected light from the
pattern formation surface returns to the fiducial mark 250B through
the projection optical system PL. Reflected illuminating light
passing through the fiducial mark 250B enters the detection system
254 in which it passes through the condenser lens 284 and is
reflected by the half-mirror 283 to enter a photoelectric detector
286 through a condenser lens 285.
[0129] A detection signal (photoelectrically converted signal) S6
output from the photoelectric detector 286 is supplied to the main
control system 219, shown in FIG. 8. In this case, when the
position in the direction Z of the fiducial mark 250B is changed by
driving the Z-stage in the wafer stage 248, as shown in FIG. 12(B),
the detection signal S6 changes such that it reaches a peak when
the Z-coordinate of the fiducial mark 250B coincides with the
position of the image-formation plane of the projection optical
system PL. Accordingly, the position of the image-formation plane
of the projection optical system PL can be obtained from the change
of the detection signal S6. Once the position of the
image-formation plane of the projection optical system PL has been
determined in this way, exposure can be effected under favorable
conditions by setting the exposure surface of the wafer W at the
determined position. Thus, calibration (focus calibration) of the
image-formation plane position of the projection optical system PL
is effected by using the fiducial mark 250B on the fiducial mark
board 250.
[0130] Referring to FIG. 8, leakage light which is reflected by the
beam splitter 231, which has a transmittance of the order of 98%,
is converged through a condenser lens 232 onto a light-receiving
surface of an integrator sensor 233 which comprises a photoelectric
detector. The light-receiving surface of the integrator sensor 233
is conjugate with both the pattern formation surface of the reticle
R and the exposure surface of the wafer W. A detection signal
(photoelectrically converted signal) output from the integrator
sensor 233 is supplied to the exposure control system 220. The
detection signal is also supplied to a power supply system 222 for
the mercury lamp 201 through the exposure control system 220.
[0131] A memory 221 is connected to the exposure control system
220. The memory 221 is stored with a conversion coefficient and
other necessary data for obtaining exposure energy on the wafer W
from the output signal from the integrator sensor 233. In this
embodiment, however, the output signal from the integrator sensor
233 is calibrated by using a predetermined reference illuminance
meter, for example. Therefore, the memory 221 is also stored with a
correction coefficient for correcting the output signal from the
integrator sensor 233 on the basis of the result of the
calibration.
[0132] The light-receiving surface of the integrator sensor 233 is
placed at a position conjugate with the pattern surface of the
reticle R, thereby preventing an error from being introduced into
the signal detected by the integrator sensor 233 even when the
configuration of the illumination system aperture stop is changed
by rotating the illumination system aperture stop plate 216.
However, the light-receiving surface of the integrator sensor 233
may be placed at an observation plane practically conjugate with a
Fourier transform plane (pupil plane) in the projection optical
system PL with respect to the pattern surface of the reticle R,
thereby making it possible to receive all light rays passing
through the observation plane.
[0133] In this embodiment, a condenser lens 252 and a wafer
reflectivity monitor 253 which comprises a photoelectric detector
are installed at that side of the beam splitter 231 having a
transmittance of the order of 98% which is remote from the
integrator sensor 233. The light-receiving surface of the wafer
reflectivity monitor 253 is made approximately conjugate with the
surface of the wafer W by the condenser lens 252. In this case,
light reflected from the wafer when illuminating light passing
through the reticle R is applied to the wafer W through the
projection optical system PL is received by the wafer reflectivity
monitor 253 through the projection optical system PL, the reticle
R, etc., and a detection signal (photoelectrically converted
signal) output from the wafer reflectivity monitor 253 is supplied
to the main control system 219. The main control system 219 obtains
a quantity (power) of illuminating light passing through the
projection optical system PL on the basis of the quantity of
illuminating light IL applied to the reticle R and a quantity of
reflected light from the wafer W which is calculated from the
signal detected by the wafer reflectivity monitor 253. Further, the
main control system 219 predicts an amount of thermal expansion of
the projection optical system PL on the basis of thermal energy
which is obtained by multiplying the obtained light quantity by the
exposure time, and obtains-an amount of change of image-formation
characteristics such as distortion of the projection optical system
PL on the basis of the predicted amount of thermal expansion. Then,
the main control system 219 corrects the image-formation
characteristics of the projection optical system PL to the previous
state through an image-formation characteristic correcting
mechanism (not shown) which is connected to the projection optical
system PL.
[0134] In this embodiment, a telecentricity correcting mechanism
300 is disposed between the mirror 240 and the reticle R. The
telecentricity correcting mechanism 300 is provided in order to
maintain the telecentricity on the wafer W side by correcting the
tilt of a part of principal rays involving non-linear angular
errors due, for example, to changeover of illumination conditions
from the ordinary illumination to annular zone illumination or
other modified illumination. More specifically, under the ordinary
illumination, the telecentricity is corrected by the adjusting
mechanism 215, as shown for example in FIG. 15(A), thereby
eliminating linear residual errors. In this state, if the ordinary
illumination is switched to annular zone illumination or other
modified illumination by the switching operation of the
illumination system aperture stop plate 216, non-linear angular
errors may occur as shown in FIG. 15(B) or 15(C). In such a case,
the telecentricity correcting mechanism 300 corrects the non-linear
angular errors to thereby maintain the required telecentricity. It
is assumed in the following description that, under the ordinary
illumination conditions, there is no residual non-linear error
which cannot be corrected by the adjusting mechanism 215.
[0135] FIG. 14(A) is a schematic plan view of the telecentricity
correcting mechanism 300. As shown in the figure, the
telecentricity correcting mechanism 300 has a plate 303 which
reciprocates in the lateral direction (direction X) of the slit 241
along a pair of guide rails 301. Three plane-parallel plates 302A,
302B and 302C as three difference kinds of correction optical
member are fitted into three openings, respectively, formed in the
plate 303 at predetermined intervals along the direction of
movement of the plate 303. The plane-parallel plates 302A, 302B and
302C are provided to respectively correspond to three aperture
stops provided in the illumination system aperture stop plate 216,
that is, the aperture stop 218B for reducing the a value, the
aperture stop 218C for the annular zone illumination, and the
aperture stop 218D for the modified light source method.
[0136] FIG. 14(A) shows a state where the central plane-parallel
plate 302B lies directly above the slit 241. FIG. 14(B) is a
schematic side view of the plane-parallel plate 302B in the state
shown in FIG. 14(A). The plane-parallel plate 302B is formed such
that its left end portion as viewed in FIG. 14(B) is thicker than
the other portion thereof by At. Thus, the tilt of a principal ray
at the left end as viewed in FIG. 14(B) is corrected on the reticle
R so that the principal ray is directed in the same direction as
the design direction.
[0137] The plane-parallel plate 302B is produced as follows: With
illumination system aperture stop plate 216 set to the aperture
stop 218B for the annular zone illumination, linear errors are
corrected by the adjusting mechanism 215. In this state, light
reflected from the reticle mark and passing through a spatial image
measuring mark provided on the fiducial mark board 250 is detected
in the detection system 254 with the focus position sequentially
shifted, thereby previously obtaining the tilt of principal rays
(telecentricity errors) on the wafer W under the annular zone
illumination conditions. Then, the plane-parallel plate 302B is
produced with its thickness varied in an infinitesimal range so
that the telecentricity errors are eliminated.
[0138] The other plane-parallel plates 302A and 302C are also
produced on the basis of results of measurement carried out in the
same way as the above under respective illumination conditions set
by the aperture stops 218B and 218D of the illumination system
aperture stop plate 216.
[0139] The plate 303 is driven by a driving mechanism 301 as shown
in FIG. 8. In this embodiment, the main control system 219 drives
the plate 303 to move in the direction X through the driving
mechanism 301 in synchronism with the illumination system aperture
stop plate 216, thereby allowing the plane-parallel plates 302A,
302B and 302C for respective illumination conditions to be set
directly above the slit 241 in response to switching of the
illumination conditions. That is, in this embodiment, the driving
mechanism 301 and the main control system 219 in combination
realize a switching device which is actuated in response to the
drive of the illumination system aperture stop plate 216 so as to
set a plane-parallel plate corresponding to illumination conditions
set by the illumination system aperture stop plate 216 into an area
between the reticle R and the condenser lens 239, the area
corresponding to the illumination field 241 on the reticle R.
[0140] Thus, according to this embodiment, an error of
telecentricity on the wafer stage 248 (i.e., tilt of principal
rays) is automatically corrected when the ordinary illumination is
switched to modified illumination. Therefore, neither distortion
nor image quality degradation occurs regardless of unevenness on
the surface of the wafer W or focus change on the wafer W. Thus, it
is possible to obtain high overlay accuracy (including overlay
accuracy between process steps and matching between machines).
[0141] Further, in this embodiment, the plane-parallel plates are
switched from one to another in a direction corresponding to the
lateral direction of the slit 241. Therefore, the plane-parallel
plates can be changed with a minimal space.
[0142] In the second embodiment the present invention has been
described on the assumption that, under the ordinary illumination
conditions, there is no residual non-linear error which cannot be
corrected by the adjusting mechanism 215. However, in a case where
there is a non-linear error under the ordinary illumination
conditions, a plane-parallel plate for correcting telecentricity
errors under the ordinary illumination conditions should be
prepared. In such a case also, neither distortion nor image quality
degradation occurs regardless of unevenness on the surface of the
wafer W or focus change on the wafer W. Accordingly, high overlay
accuracy can be obtained.
[0143] Although in the second embodiment telecentricity errors
(i.e., tilt of principal rays) are inspected by using a spatial
image measuring method in which a projected image of a reticle mark
formed by illuminating light for exposure is spatially measured, it
should be noted that telecentricity errors may be measured by trial
printing.
[0144] Although in the second embodiment the present invention has
been described with respect to a step-and-scan projection exposure
apparatus, it should be noted that the application of the second
embodiment is not necessarily limited to it, and that the present
invention is also satisfactorily applicable to one-shot exposure
type exposure apparatus such as steppers. In such a case also,
substantially the same advantageous effects can be expected.
[0145] Although in the second embodiment a plane-parallel plate
which is varied in thickness at a part thereof is used as an
example of a correction optical member, it should be noted that the
present invention is not necessarily limited to it, and that the
correction optical member may comprise any optical member that is
capable of correcting the tilt of a part of principal rays by
locally changing the refracting power or other method.
[0146] As has been described above, the present invention makes it
possible to ensure the telecentricity on the photosensitive
substrate side independently of illumination conditions.
Accordingly, even when the photosensitive substrate is vertically
displaced, or when there is unevenness on the surface of the
photosensitive substrate, no transverse shift of the image occurs,
and hence neither distortion nor image quality degradation occurs.
Thus, the present invention provides advantageous effects which
have heretofore been impossible to achieve.
[0147] It should be noted that the present invention is not
necessarily limited to the above-described embodiments, but may
adopt various arrangements without departing from the gist of the
present invention.
* * * * *