Murakami; Seiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Murakami; Seiro.The latest application filed is for "exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same".

Company Profile

0.12.3

Murakami; Seiro - Chiba JP
Murakami, Seiro - Chiba-shi JP
Murakami; Seiro - Chiba-ken JP
Murakami; Seiro - Tokyo JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same Grant 6,894,763 - Murakami , et al. May 17, 2	2005-05-17
Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the same App 20030218730 - Murakami, Seiro ; et al.	2003-11-27
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system Grant RE38,320 - Nishi , et al. November 18, 2	2003-11-18
Projection exposure apparatus App 20030164933 - Nishi, Kenji ; et al.	2003-09-04
Exposure method and apparatus Grant 6,608,681 - Tanaka , et al. August 19, 2	2003-08-19
Method of driving mask stage and method of mask alignment Grant RE38,113 - Nishi , et al. May 6, 2	2003-05-06
Exposure method and apparatus App 20020176082 - Sakakibara, Yasuyuki ; et al.	2002-11-28
Exposure method and apparatus Grant 6,433,872 - Nishi , et al. August 13, 2	2002-08-13
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system Grant 5,883,704 - Nishi , et al. March 16, 1	1999-03-16
Projection exposure apparatus correcting tilt of telecentricity Grant 5,739,899 - Nishi , et al. April 14, 1	1998-04-14
Method of driving mask stage and method of mask alignment Grant 5,464,715 - Nishi , et al. November 7, 1	1995-11-07
Exposure method and apparatus Grant 5,448,332 - Sakakibara , et al. September 5, 1	1995-09-05
Position detecting system Grant 4,702,606 - Matsuura , et al. October 27, 1	1987-10-27
Alignment apparatus Grant 4,677,301 - Tanimoto , et al. June 30, 1	1987-06-30
Method and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signals Grant 4,639,604 - Murakami , et al. January 27, 1	1987-01-27

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