Nishi; Kenji

Patent Applications and Registrations

Patent applications and USPTO patent grants for Nishi; Kenji.The latest application filed is for "substrate processing apparatus and substrate processing method".

Company Profile

2.116.58

Nishi; Kenji - Kumamoto JP
Nishi; Kenji - Issy les Moulineaux FR
Nishi; Kenji - Yokohama JP
Nishi; Kenji - Koshi JP
Nishi; Kenji - Meudon FR
Nishi; Kenji - Yokohama-shi Kanagawa 235-0022 JP
Nishi; Kenji - Isogo-ku Yokohama-shi JP
Nishi; Kenji - Kanagawa JP
Nishi; Kenji - Zama JP
Nishi; Kenji - Kawasaki JP
Nishi, Kenji - Zama-shi JP
Nishi; Kenji - Tokyo JP
Nishi; Kenji - Kanagawa-ken JP
Nishi, Kenji - Yokama-shi JP
Nishi, Kenji - Chiyoda-ku JP
Nishi, Kenji - Kawasaki-shi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate processing apparatus having top plate with through hole and substrate processing method Grant 10,892,176 - Ikeda , et al. January 12, 2	2021-01-12
Substrate Processing Apparatus And Substrate Processing Method App 20190355593 - Ikeda; Yoshinori ; et al.	2019-11-21
Substrate Processing Apparatus, Substrate Processing System, And Substrate Processing Method App 20190341272 - Ikeda; Yoshinori ; et al.	2019-11-07
Method for switching a subscription from a first MNO to a second MNO Grant 9,603,002 - Nishi , et al. March 21, 2	2017-03-21
Liquid processing apparatus, liquid processing method and storage medium Grant 9,305,767 - Nishi , et al. April 5, 2	2016-04-05
Method To Establish A Secure Voice Communication Using Generic Bootstrapping Architecture App 20160044505 - NISHI; Kenji ; et al.	2016-02-11
Method For Switching A Subscription From A First Mno To A Second Mno App 20140206338 - Nishi; Kenji ; et al.	2014-07-24
Image display device and image display system Grant 8,289,230 - Nishi October 16, 2	2012-10-16
Liquid Processing Apparatus, Liquid Processing Method And Storage Medium App 20120234356 - Nishi; Kenji ; et al.	2012-09-20
Method For A Secure Device To Resolve An Ip Address Of A Target Server App 20120158940 - Nishi; Kenji	2012-06-21
Image display device using P-polarized light and S-polarized light Grant 7,738,179 - Nishi June 15, 2	2010-06-15
Information inputting tool, storage device, information inputting device, and information processing equipment Grant 7,688,305 - Nishi March 30, 2	2010-03-30
Image Display Device And Image Display System App 20100039351 - Nishi; Kenji	2010-02-18
Image display device and image display system App 20070188407 - Nishi; Kenji	2007-08-16
Exposure apparatus and an exposure method Grant 7,256,869 - Nishi August 14, 2	2007-08-14
Exposure apparatus and an exposure method App 20070109515 - Nishi; Kenji	2007-05-17
Information inputting tool, storage device, information inputting device, and information processing equipment App 20070103430 - Nishi; Kenji	2007-05-10
Image display device and simulation device App 20070075917 - Nishi; Kenji	2007-04-05
Exposure apparatus and method Grant 7,177,008 - Nishi , et al. February 13, 2	2007-02-13
Image display unit App 20070018124 - Nishi; Kenji	2007-01-25
Exposure method, exposure apparatus, and method for producing device Grant 7,126,689 - Nishi October 24, 2	2006-10-24
Image display unit and projection optical system Grant 7,068,444 - Nishi June 27, 2	2006-06-27
Exposure apparatus and stage device, and device manufacturing method Grant 7,068,350 - Nishi , et al. June 27, 2	2006-06-27
Process for producing lacturose-containing powder composition, lacturose-containing powder composition obtained by the process and feed additive Grant 7,037,377 - Tomita , et al. May 2, 2	2006-05-02
Projection exposure apparatus Grant RE39,083 - Nishi May 2, 2	2006-05-02
Image display unit and projection optical system App 20060072215 - Nishi; Kenji	2006-04-06
Projection exposure apparatus Grant RE38,798 - Nishi September 20, 2	2005-09-20
Exposure method and apparatus with vibration-preventative control Grant 6,937,319 - Nishi August 30, 2	2005-08-30
Process for producing lacturose-containing powder composition, lacturose-containing powder composition obtained by the process and feed additive App 20050166911 - Tomita, Mamoru ; et al.	2005-08-04
Stage apparatus, scanning type exposure apparatus, and device produced with the same Grant 6,906,782 - Nishi June 14, 2	2005-06-14
Projection exposure apparatus Grant 6,900,879 - Nishi May 31, 2	2005-05-31
Vibration control device, stage device and exposure apparatus Grant 6,894,449 - Nishi May 17, 2	2005-05-17
Manufacturing method in manufacturing line, manufacturing method for exposure apparatus, and exposure apparatus Grant 6,891,603 - Nishi May 10, 2	2005-05-10
Mask exchanging method and exposure apparatus Grant 6,885,437 - Nishi , et al. April 26, 2	2005-04-26
Projection exposure apparatus Grant 6,870,598 - Nishi March 22, 2	2005-03-22
Stage apparatus, exposure apparatus and method for exposing substrate plate Grant 6,864,955 - Nishi , et al. March 8, 2	2005-03-08
Exposure apparatus, substrate processing system, and device manufacturing method Grant 6,853,443 - Nishi February 8, 2	2005-02-08
Exposure apparatus and stage device, and device manufacturing method App 20050024610 - Nishi, Kenji ; et al.	2005-02-03
Mask producing method Grant 6,841,323 - Nishi January 11, 2	2005-01-11
Exposure method and apparatus Grant 6,836,093 - Nishi December 28, 2	2004-12-28
Exposure apparatus and method App 20040233407 - Nishi, Kenji ; et al.	2004-11-25
Mask exchanging method and exposure apparatus App 20040223132 - Nishi, Kenji ; et al.	2004-11-11
Exposure method and device App 20040218158 - Nishi, Kenji	2004-11-04
Exposure method and apparatus Grant 6,813,000 - Nishi November 2, 2	2004-11-02
Projection exposure apparatus Grant 6,803,992 - Tokuda , et al. October 12, 2	2004-10-12
Exposure apparatus and an exposure method Grant 6,798,491 - Nishi , et al. September 28, 2	2004-09-28
Exposure Method and Apparatus with Vibration-Preventative Control App 20040160586 - Nishi, Kenji	2004-08-19
Exposure method and device Grant 6,765,647 - Nishi July 20, 2	2004-07-20
Projection exposure apparatus App 20040119959 - Nishi, Kenji	2004-06-24
Method and apparatus for reducing countermass stroke with initial velocity App 20040119436 - Binnard, Michael ; et al.	2004-06-24
Exposure apparatus, exposure method using the same, and method of manufacture of circuit device App 20040114121 - Nishi, Kenji ; et al.	2004-06-17
Stage system, exposure apparatus, and device manufacturing method Grant 6,741,332 - Nishi May 25, 2	2004-05-25
Projection exposure apparatus and projection exposure method Grant 6,727,978 - Nishi April 27, 2	2004-04-27
Projection exposure apparatus Grant 6,707,536 - Nishi March 16, 2	2004-03-16
Exposure method and exposure apparatus Grant 6,704,090 - Nishi March 9, 2	2004-03-09
Exposure apparatus and method Grant 6,700,667 - Nishi March 2, 2	2004-03-02
Mask producing method App 20040036846 - Nishi, Kenji	2004-02-26
Exposure Apparatus And An Exposure Method App 20040032575 - Nishi, Kenji ; et al.	2004-02-19
Exposure method, exposure apparatus, method for producing exposure apparatus, and method for producing device Grant 6,690,450 - Nishi February 10, 2	2004-02-10
Vibration control device, stage device and exposure apparatus App 20040017167 - Nishi, Kenji	2004-01-29
Exposure method and apparatus Grant 6,667,796 - Nishi December 23, 2	2003-12-23
Mask producing method Grant 6,653,025 - Nishi November 25, 2	2003-11-25
Exposure apparatus, exposure method, and device manufacturing method Grant 6,654,095 - Nishi November 25, 2	2003-11-25
Projection exposure apparatus Grant 6,654,097 - Nishi November 25, 2	2003-11-25
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system Grant RE38,320 - Nishi , et al. November 18, 2	2003-11-18
Method and apparatus for positioning substrate and the like Grant 6,624,433 - Okumura , et al. September 23, 2	2003-09-23
Stage system, exposure apparatus, and device manufacturing method App 20030169409 - Nishi, Kenji	2003-09-11
Stage apparatus, exposure apparatus and method for exposing substrate plate App 20030164934 - Nishi, Kenji ; et al.	2003-09-04
Projection exposure apparatus App 20030164933 - Nishi, Kenji ; et al.	2003-09-04
Exposure method and apparatus Grant 6,608,681 - Tanaka , et al. August 19, 2	2003-08-19
Scanning exposure apparatus having adjustable illumination area and methods related thereto Grant 6,608,665 - Nishi , et al. August 19, 2	2003-08-19
Projection exposure apparatus App 20030151728 - Nishi, Kenji	2003-08-14
Exposure method and apparatus App 20030142281 - Nishi, Kenji	2003-07-31
Exposure method, illuminating device, and exposure system Grant 6,597,430 - Nishi , et al. July 22, 2	2003-07-22
Exposure method, exposure apparatus, method for adjusting the exposure apparatus, and device manufacturing method App 20030128344 - Nishi, Kenji	2003-07-10
Stage apparatus, scanning type exposure apparatus, and device produced with the same App 20030128348 - Nishi, Kenji	2003-07-10
Exposure apparatus and method Grant 6,590,634 - Nishi , et al. July 8, 2	2003-07-08
Projection exposure method and apparatus Grant 6,590,636 - Nishi July 8, 2	2003-07-08
Stage apparatus and method for producing circuit device utilizing the same Grant 6,590,633 - Nishi , et al. July 8, 2	2003-07-08
Exposure apparatus, substrate processing system, and device meanufacturing method App 20030117596 - Nishi, Kenji	2003-06-26
Apparatus and method for projection exposure Grant 6,563,565 - Nishi May 13, 2	2003-05-13
Method of driving mask stage and method of mask alignment Grant RE38,113 - Nishi , et al. May 6, 2	2003-05-06
Exposure apparatus and method App 20030081191 - Nishi, Kenji ; et al.	2003-05-01
Exposure apparatus and method using light having a wavelength less than 200 nm App 20030081192 - Nishi, Kenji	2003-05-01
Exposure apparatus and an exposure method Grant 6,549,269 - Nishi , et al. April 15, 2	2003-04-15
Projection exposure apparatus Grant 6,545,746 - Nishi April 8, 2	2003-04-08
Exposure apparatus having projection optical system with aberration correction element Grant 6,522,386 - Nishi February 18, 2	2003-02-18
Projection exposure apparatus and projection exposure method App 20030025893 - Nishi, Kenji	2003-02-06
Projection exposure apparatus App 20030002020 - Nishi, Kenji	2003-01-02
Method of exposing and apparatus therefor Grant 6,498,352 - Nishi December 24, 2	2002-12-24
Exposure apparatus and method App 20020191171 - Nishi, Kenji	2002-12-19
Exposure method and apparatus App 20020176082 - Sakakibara, Yasuyuki ; et al.	2002-11-28
Exposure method and projection exposure apparatus Grant RE37,913 - Nishi November 26, 2	2002-11-26
Shape measuring method and shape measuring device, position control method, stage device, exposure apparatus and method for producing exposure apparatus, and device and method for manufacturing device Grant 6,486,955 - Nishi November 26, 2	2002-11-26
Aligning apparatus and method for aligning mask patterns with regions on a substrate App 20020171833 - Nishi, Kenji	2002-11-21
Projection exposure apparatus App 20020149756 - Tokuda, Noriaki ; et al.	2002-10-17
Exposure Apparatus And Method App 20020135776 - NISHI, KENJI	2002-09-26
Method And Apparatus For Positioning Substrate And The Like App 20020113218 - OKUMURA, MASAHIKO ; et al.	2002-08-22
Exposure apparatus and method App 20020109827 - Nishi, Kenji	2002-08-15
Exposure method and apparatus Grant 6,433,872 - Nishi , et al. August 13, 2	2002-08-13
Substrate transport apparatus and method App 20020089655 - Kida, Yoshiki ; et al.	2002-07-11
Manufacturing method in manufacturing line, manufacturing method for exposure apparatus, and exposure apparatus App 20020085190 - Nishi, Kenji	2002-07-04
Exposure apparatus, exposure method using the same and method of manufacture of circuit device Grant 6,414,743 - Nishi , et al. July 2, 2	2002-07-02
Projection exposure apparatus and method Grant 6,400,441 - Nishi , et al. June 4, 2	2002-06-04
Method and apparatus for positioning substrate Grant 6,400,445 - Nishi , et al. June 4, 2	2002-06-04
Exposure apparatus and method Grant 6,396,568 - Nishi May 28, 2	2002-05-28
Scanning exposure method and apparatus App 20020050576 - Nishi, Kenji ; et al.	2002-05-02
Projection exposure method and apparatus App 20020036762 - Nishi, Kenji	2002-03-28
Projection Exposure Apparatus App 20020021424 - TOKUDA, NORIAKI ; et al.	2002-02-21
Stage apparatus, scanning type exposure apparatus, and device produced with the same App 20020018192 - Nishi, Kenji	2002-02-14
Exposure apparatus and method Grant 6,341,007 - Nishi , et al. January 22, 2	2002-01-22
Projection exposure apparatus Grant 6,335,787 - Nishi January 1, 2	2002-01-01
Exposure method and exposure apparatus App 20010055103 - Nishi, Kenji	2001-12-27
Stage apparatus, scanning type exposure apparatus, and device produced with the same Grant 6,331,885 - Nishi December 18, 2	2001-12-18
Exposure apparatus, exposure method using the same, and method of manufacture of circuit device App 20010043321 - Nishi, Kenji ; et al.	2001-11-22
Mask producing method App 20010041297 - Nishi, Kenji	2001-11-15
Exposure method, exposure apparatus, and method for producing device App 20010028456 - Nishi, Kenji	2001-10-11
Method and apparatus which exposes a second object with a pattern formed on a first object and which performs statistical calculation based on position information of marks on the first object Grant 6,279,881 - Nishi August 28, 2	2001-08-28
Method for positioning substrate App 20010016293 - Nishi, Kenji ; et al.	2001-08-23
Exposure method, exposure apparatus, method for producing exposure apparatus, and method for producing device App 20010015795 - Nishi, Kenji	2001-08-23
Apparatus and method for projection exposure App 20010010579 - Nishi, Kenji	2001-08-02
Method for positioning substrate Grant 6,225,012 - Nishi , et al. May 1, 2	2001-05-01
Exposure apparatus Grant 6,115,107 - Nishi September 5, 2	2000-09-05
Scanning exposure method and apparatus in which a mask and a substrate are moved at different scan velocities and exposure parameters are varied Grant 6,100,515 - Nishi , et al. August 8, 2	2000-08-08
Projection optical apparatus using plural wavelengths of light Grant RE36,799 - Nishi August 1, 2	2000-08-01
Projection exposure apparatus having an off-axis alignment system and method of alignment therefor Grant RE36,730 - Nishi June 13, 2	2000-06-13
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement Grant 6,051,843 - Nishi April 18, 2	2000-04-18
Exposure apparatus and method Grant 6,002,467 - Nishi , et al. December 14, 1	1999-12-14
Method and apparatus for the alignment of a substrate Grant 5,995,234 - Nishi November 30, 1	1999-11-30
Projection exposure apparatus Grant 5,995,263 - Tokuda , et al. November 30, 1	1999-11-30
Illumination optical apparatus using different number of light sources under different exposure modes, method of operating and method of manufacturing thereof Grant 5,991,009 - Nishi , et al. November 23, 1	1999-11-23
Projection exposure apparatus and projection exposure method Grant 5,959,721 - Nishi September 28, 1	1999-09-28
Exposure apparatus and method for measuring a quantity of light with temperature variations Grant 5,894,341 - Nishi , et al. April 13, 1	1999-04-13
Projection exposure apparatus and method Grant 5,892,572 - Nishi April 6, 1	1999-04-06
Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system Grant 5,883,704 - Nishi , et al. March 16, 1	1999-03-16
Exposure apparatus Grant 5,861,944 - Nishi January 19, 1	1999-01-19
Scanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposure Grant 5,854,671 - Nishi December 29, 1	1998-12-29
Substrate transport apparatus Grant 5,842,824 - Nishi December 1, 1	1998-12-01
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement Grant 5,844,247 - Nishi December 1, 1	1998-12-01
Illumination optical apparatus and method having a wavefront splitter and an optical integrator Grant 5,815,248 - Nishi , et al. September 29, 1	1998-09-29
Stepping accuracy measuring method Grant 5,798,195 - Nishi August 25, 1	1998-08-25
Exposure apparatus wherein a wafer contact portion of a movable stage includes linear ridges Grant 5,793,474 - Nishi August 11, 1	1998-08-11
Projection exposure apparatus correcting tilt of telecentricity Grant 5,739,899 - Nishi , et al. April 14, 1	1998-04-14
Aligning method and apparatus Grant 5,737,441 - Nishi April 7, 1	1998-04-07
Projection exposure apparatus Grant 5,734,478 - Magome , et al. March 31, 1	1998-03-31
Method and apparatus for the alignment of a substrate Grant 5,657,129 - Nishi August 12, 1	1997-08-12
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement Grant 5,646,413 - Nishi July 8, 1	1997-07-08
Scanning exposure method and apparatus Grant 5,591,958 - Nishi , et al. January 7, 1	1997-01-07
Method for aligning shot areas on a substrate Grant 5,561,606 - Ota , et al. October 1, 1	1996-10-01
Exposure apparatus Grant 5,559,582 - Nishi , et al. September 24, 1	1996-09-24
Method and apparatus for the alignment of a substrate Grant 5,493,403 - Nishi February 20, 1	1996-02-20
Projection exposure apparatus Grant 5,477,304 - Nishi December 19, 1	1995-12-19
Projection exposure apparatus Grant 5,473,410 - Nishi December 5, 1	1995-12-05
Method of measuring the bent shape of a movable mirror of an exposure apparatus Grant 5,473,435 - Masuyuki , et al. December 5, 1	1995-12-05
Stage-position measuring apparatus Grant 5,469,260 - Takagi , et al. November 21, 1	1995-11-21
Method of driving mask stage and method of mask alignment Grant 5,464,715 - Nishi , et al. November 7, 1	1995-11-07
Exposure method and apparatus Grant 5,448,332 - Sakakibara , et al. September 5, 1	1995-09-05
Projection exposure apparatus having an off-axis alignment system and method of alignment therefor Grant 5,243,195 - Nishi September 7, 1	1993-09-07
Exposure method and projection exposure apparatus Grant 5,194,893 - Nishi March 16, 1	1993-03-16
Projection optical apparatus using plural wavelengths of light Grant 5,138,176 - Nishi August 11, 1	1992-08-11
Automatic follow-up projecting system Grant 5,114,224 - Miyamoto , et al. May 19, 1	1992-05-19
Exposure apparatus Grant 5,003,342 - Nishi March 26, 1	1991-03-26
Method of cutting and disassembling cylindrical structure Grant 5,001,870 - Yokota , et al. March 26, 1	1991-03-26
Alignment system for exposure apparatus Grant 4,962,318 - Nishi October 9, 1	1990-10-09
Optical device for alignment in a projection exposure apparatus Grant 4,880,310 - Nishi November 14, 1	1989-11-14
Projection exposure apparatus Grant 4,856,905 - Nishi August 15, 1	1989-08-15
Projection optical apparatus with focusing and alignment of reticle and wafer marks Grant 4,829,193 - Nishi May 9, 1	1989-05-09
Alignment apparatus Grant 4,794,426 - Nishi December 27, 1	1988-12-27
Projection optical apparatus for mask to substrate alignment Grant 4,780,616 - Nishi , et al. October 25, 1	1988-10-25
Projection exposure apparatus Grant 4,739,373 - Nishi , et al. April 19, 1	1988-04-19
Method of and apparatus for crushing earth under the ground Grant 4,688,648 - Ikeda , et al. August 25, 1	1987-08-25

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