U.S. patent application number 09/944509 was filed with the patent office on 2002-03-14 for device and method for isolating a short-circuited integrated circuit (ic) from other ics on a semiconductor wafer.
Invention is credited to Beffa, Raymond J., Cloud, Eugene H., Farnworth, Warren M., Nevill, Leland R., Waller, William K..
Application Number | 20020030507 09/944509 |
Document ID | / |
Family ID | 22180907 |
Filed Date | 2002-03-14 |
United States Patent
Application |
20020030507 |
Kind Code |
A1 |
Farnworth, Warren M. ; et
al. |
March 14, 2002 |
Device and method for isolating a short-circuited integrated
circuit (IC) from other ICs on a semiconductor wafer
Abstract
A circuit for isolating a short-circuited integrated circuit
(IC) formed on the surface of a semiconductor wafer from other ICs
formed on the wafer that are interconnected with the shortcircuited
IC includes control circuitry within the short-circuited IC for
sensing the short circuit. The control circuitry may sense the
short circuit in a variety of ways, including sensing excessive
current drawn by the short-circuited IC, and sensing an abnormally
low or high voltage within the short-circuited IC. Switching
circuitry also within the short-circuited IC selectively isolates
the short-circuited IC from the other ICs on the wafer in response
to the control circuitry sensing the short circuit. As a result, if
the wafer is under probe test, for example, testing can continue
uninterrupted on the other ICs while the short-circuited IC is
isolated.
Inventors: |
Farnworth, Warren M.;
(Nampa, ID) ; Waller, William K.; (Boise, ID)
; Nevill, Leland R.; (Boise, ID) ; Beffa, Raymond
J.; (Boise, ID) ; Cloud, Eugene H.; (Boise,
ID) |
Correspondence
Address: |
TRASK BRITT
P.O. BOX 2550
SALT LAKE CITY
UT
84110
US
|
Family ID: |
22180907 |
Appl. No.: |
09/944509 |
Filed: |
August 30, 2001 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
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09944509 |
Aug 30, 2001 |
|
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|
09083819 |
May 22, 1998 |
|
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|
6313658 |
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Current U.S.
Class: |
361/101 |
Current CPC
Class: |
G01R 31/318511 20130101;
G01R 31/52 20200101; G01R 31/2884 20130101 |
Class at
Publication: |
324/765 |
International
Class: |
G01R 031/26 |
Claims
What is claimed is:
1. In an integrated circuit having an internal circuit and having
an external terminal for communicating between the internal circuit
and circuitry external to the integrated circuit, a device for
isolating the internal circuit from said external terminal, the
device comprising: control circuitry for sensing a short in the
internal circuit and outputting a control signal in response
thereto, the control circuitry having circuitry for sensing current
drawn by the internal circuit exceeding a predetermined threshold
and for outputting a control signal in response thereto, the
control circuitry comprising: a first PMOS transistor having a
source coupled to a supply terminal, a gate coupled to an output
terminal, and a drain coupled to a control signal terminal; a first
resistive device coupled between the supply terminal and the output
terminal; a second resistive device coupled between the control
signal terminal and a reference voltage bond pad; a second PMOS
transistor having a source coupled to the supply terminal, a gate,
and a drain coupled to the control signal terminal; and an inverter
coupled between the control signal terminal and the gate of the
second PMOS transistor; and switching circuitry coupled to the
control circuitry for isolating the internal circuit from the
external terminal in response to receiving the control signal.
2. The device of claim 1, wherein the external terminal comprises a
supply voltage bond pad for receiving a supply voltage from
circuitry external to the IC, wherein the short-sensing control
circuitry includes a supply terminal coupled to the supply voltage
bond pad for receiving the supply voltage, an output terminal for
outputting the received supply voltage, and a control signal
terminal for outputting the control signal in response to a current
flow between the supply terminal and the output terminal exceeding
a predetermined threshold.
3. The device of claim 1, wherein the control circuitry further
comprises circuitry for sensing a voltage applied to the internal
circuit below a predetermined threshold and for outputting the
control signal in response thereto.
4. The device of claim 1, wherein the control circuitry further
comprises circuitry for sensing a voltage applied to the internal
circuit above a predetermined threshold and for outputting the
control signal in response thereto.
5. An integrated circuit in a semiconductor die comprising: an
external communications terminal, the external communications
terminal comprising a supply voltage bond pad; an internal circuit;
switching circuitry coupled between the external communications
terminal and the internal circuit for selectively isolating the
internal circuit from the external communications terminal in
response to receiving a control signal; and control circuitry
coupled to the external communications terminal and the switching
circuitry for sensing a short in the internal circuit and
outputting the control signal to the switching circuitry in
response thereto, the short-sensing control circuitry comprising: a
first PMOS transistor having a source coupled to a supply terminal,
a gate coupled to an output terminal, and a drain coupled to a
control signal terminal; a first resistive device coupled between
the supply terminal and the output terminal; a second resistive
device coupled between the control signal terminal and a reference
voltage bond pad; a second PMOS transistor having a source coupled
to the supply terminal, a gate, and a drain coupled to the control
signal terminal; and an inverter coupled between the control signal
terminal and the gate of the second PMOS transistor.
6. The integrated circuit of claim 5, wherein the internal circuit
is selected from a group of circuits comprising a Dynamic Random
Access Memory (DRAM) circuit and a Static RAM (SRAM) circuit.
7. A semiconductor wafer comprising a plurality of integrated
circuits in a plurality of semiconductor die on said wafer, each
integrated circuit comprising: an external communications terminal
for connecting to a supply voltage; an internal circuit; switching
circuitry coupled between the external communications terminal and
the internal circuit for selectively isolating the internal circuit
from the external communications terminal in response to receiving
a control signal; and control circuitry coupled to the external
communications terminal and the switching circuitry for sensing a
short in the internal circuit and outputting the control signal to
the switching circuitry in response thereto, the short-sensing
control circuitry comprising: a first PMOS transistor having a
source coupled to a supply terminal, a gate coupled to an output
terminal, and a drain coupled to a control signal terminal; a first
resistor coupled between the supply terminal and the output
terminal; a second resistor coupled between the control signal
terminal and a reference voltage bond pad; a second PMOS transistor
having a source coupled to the supply terminal, a gate, and a drain
coupled to the control signal terminal; and an inverter coupled
between the control signal terminal and the gate of the second PMOS
transistor.
8. A method for testing integrated circuits in each of a plurality
of semiconductor dice on a semiconductor wafer, the method
comprising: providing control circuitry within each semiconductor
die for sensing a short in an integrated circuit of said
semiconductor die, the control circuitry comprising: a first PMOS
transistor having a source coupled to a supply terminal, a gate
coupled to an output terminal, and a drain coupled to a control
signal terminal; a first resistive device coupled between the
supply terminal and the output terminal; a second resistive device
coupled between the control signal terminal and a reference voltage
bond pad; a second PMOS transistor having a source coupled to the
supply terminal, a gate, and a drain coupled to the control signal
terminal; and an inverter coupled between the control signal
terminal and the gate of the second PMOS transistor; and testing
said plurality of semiconductor dice so that when the control
circuitry in one of the semiconductor die of said plurality of
semiconductor dice under test senses a short, automatically
switchably isolating a circuit having a short in the semiconductor
die from other integrated circuits in the semiconductor die.
9. The method of claim 8, wherein the providing control circuitry
comprises providing control circuitry within each semiconductor die
of said plurality of semiconductor dice for sensing current drawn
by an integrated circuit of the plurality of integrated circuits in
a semiconductor die that exceeds a predetermined threshold.
10. The method of claim 8, wherein the providing control circuitry
comprises providing control circuitry within each semiconductor die
for sensing a voltage within a circuit of the plurality of circuits
for a semiconductor die of said plurality of semiconductor dice
that is below a predetermined threshold.
11. The method of claim 8, wherein the providing control circuitry
comprises providing control circuitry within a semiconductor die of
said plurality of semiconductor dice for sensing a voltage within a
circuit of said the plurality of circuits in the semiconductor die
that is above a predetermined threshold.
12. The method of claim 8, wherein the testing the plurality of
semiconductor dice comprises probe testing the plurality of
semiconductor dice.
13. The method of claim 8, wherein the isolating the integrated
circuit of a semiconductor die having a short from the other
integrated circuits of the semiconductor die comprises opening a
switch in the integrated circuit having a short that couples
internal circuitry therein to the other integrated circuits in the
semiconductor die.
14. A method for isolating a short-circuiting integrated circuit of
a semiconductor die formed on a surface of a semiconductor wafer
from another semiconductor die formed on the surface of the wafer
interconnected with the short-circuiting integrated circuit of said
semiconductor die, the method comprising: sensing the
short-circuiting integrated circuit of said semiconductor die using
control circuitry, the control circuitry comprising: a first PMOS
transistor having a source coupled to a supply terminal, a gate
coupled to an output terminal, and a drain coupled to a control
signal terminal; a first resistive device coupled between the
supply terminal and the output terminal; a second resistive device
coupled between the control signal terminal and a reference voltage
bond pad; a second PMOS transistor having a source coupled to the
supply terminal, a gate, and a drain coupled to the control signal
terminal; and an inverter coupled between the control signal
terminal and the gate of the second PMOS transistor; and in
response thereto, automatically switchably isolating the
short-circuiting integrated circuit of said semiconductor die from
said another semiconductor die.
15. In an integrated circuit of a semiconductor die located on a
wafer, said integrated circuit having an internal circuit, the
internal circuit having a reference voltage bond pad and having an
external terminal for communication between the internal circuit
and circuitry external to said integrated circuit, a device for
isolating the internal circuit from said external terminal for
communication, the device comprising: control circuitry for sensing
a short in said internal circuit and outputting a control signal in
response thereto, said control circuitry including a supply voltage
terminal coupled to said external terminal for receiving a supply
voltage, said external terminal comprising a supply voltage bond
pad for receiving said supply voltage, an output terminal for
outputting the supply voltage, and a control signal terminal for
outputting a control signal in response to a current flow between
the supply terminal and the output terminal exceeding a
predetermined threshold, said control circuitry including: first
PMOS transistor having a source coupled to the supply terminal, a
gate coupled to the output terminal, and a drain coupled to the
control signal terminal; a first resistor coupled between the
supply terminal and the output terminal; a second resistor coupled
between the control signal terminal and the reference voltage bond
pad; a second PMOS transistor having a source coupled to the supply
terminal, a gate, and a drain coupled to the control signal
terminal; and an inverter coupled between the control signal
terminal and the gate of the second PMOS transistor; and switching
circuitry coupled to the control circuitry for isolating the
internal circuit from said external terminal for communication in
response to receiving the control signal.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application is a continuation of application Ser. No.
09/083,819, filed May 22, 1998, pending.
BACKGROUND
[0002] Field of the Invention: This invention relates in general to
integrated circuits (ICs) fabricated on semiconductor wafers and,
more specifically, to devices and methods for isolating a
short-circuited IC from other ICs on a semiconductor wafer so that,
for example, probe testing may proceed on the other ICs on the
wafer despite the presence of the short-circuited IC.
[0003] State of the Art: As shown in FIG. 1, integrated circuits
(ICs) 10 are small electronic circuits formed on the surface of a
wafer 12 of semiconductor material, such as silicon, in an IC
manufacturing process referred to as "fabrication." Once
fabricated, ICs 10 are electronically probed to evaluate a variety
of their electronic characteristics. Probing typically involves
positioning needle-like probes (not shown) onto bond pads 14 on the
surfaces of ICs 10 to test the ICs 10 using various electronic
signals supplied through the probes. As described in U.S. Pat. Nos.
5,059,899 and 5,214,657 to Farnworth et al., in some cases, ICs 10
are tested using test probes that contact probe pads 16 positioned
on the surface of a semiconductor wafer 12 rather than, or in
addition to, contacting bond pads 14 on the ICs 10.
[0004] Sometimes shorts develop in some of the ICs 10 on a
semiconductor wafer 12 as a result of fabrication errors. These
shorts can interfere with the probe testing described above in a
variety of ways. For example, in some instances, a supply voltage
V.sub.CC, provided to ICs 10 on a wafer 12 through probes
contacting bond pads 14 on the ICs 10 or probe pads 16 on the wafer
12, may be shorted to ground through one of the ICs 10. As a
result, over-current protection circuitry, such as a fuse, present
in testing equipment that provides the supply voltage V.sub.CC to
the probes, will likely "trip" the equipment off-line, causing a
brief but significant delay in the manufacturing of ICs 10 while
the equipment is reset. In addition, such a V.sub.CC-to-ground
short in an IC 10 may make the entire wafer 12 untestable until the
IC 10 with the short is identified and either repaired or
disconnected, which involves a separate manual process that can
cause additional delays in the manufacturing process.
[0005] In other instances, a test signal V.sub.TEST supplied to a
group of ICs 10 on a semiconductor wafer 12 through a probe pad 16
on the wafer 12 may be distorted for all of the ICs 10 in the group
by, for example, a V.sub.TEST-to-ground or a V.sub.TEST-to-V.sub.CC
short in one of the ICs 10 in the group. This distortion may
interfere with probe testing of all of the ICs 10 in the group, and
may require that the IC 10 with the short be manually identified
and repaired or disconnected before the ICs 10 in the group can be
successfully probe tested.
[0006] Therefore, there is a need in the art for a device and
method for isolating a short-circuited IC on a semiconductor wafer
from other ICs on the wafer. Preferably, such a device and method
should isolate a short-circuited IC before the IC interferes with
probe testing of other ICs so the probe testing can continue
uninterrupted.
SUMMARY OF THE INVENTION
[0007] An inventive device for isolating a short-circuited
integrated circuit (IC) from other ICs formed on the surface of a
semiconductor wafer that are interconnected with the
short-circuited IC includes control circuitry within the
short-circuited IC for sensing the short circuit. The control
circuitry may sense the short circuit in a variety of ways,
including sensing excessive current drawn by the short-circuited
IC, and sensing an abnormally low or high voltage within the
short-circuited IC. Switching circuitry also within the
short-circuited IC selectively isolates the short-circuited IC from
the other ICs on the wafer in response to the control circuitry
sensing the short circuit. As a result, if the wafer is under probe
test, for example, testing can continue uninterrupted on the other
ICs while the short-circuited IC is isolated.
[0008] Further embodiments of the present invention are directed to
an IC including the control and switching circuitry described
above, a semiconductor wafer including many of these ICs, and an
electronic system, such as a computer system, including at least
one of these ICs.
[0009] In an inventive method for testing ICs formed on the surface
of a semiconductor wafer, control circuitry is provided in the ICs
for sensing shorts in the ICs. The ICs are then tested, and if the
control circuitry in one of the ICs senses a short, the
short-circuiting IC is automatically switchably isolated from the
other ICs.
BRIEF DESCRIPTION OF THE DRAWINGS
[0010] FIG. 1 is a top view of a conventional semiconductor wafer
showing interconnected integrated circuits (ICs) formed on the
surface of the wafer;
[0011] FIG. 2 is a block diagram and a schematic of an IC including
circuitry for isolating a short-circuiting circuit internal to the
IC from a supply voltage V.sub.CC bond pad on the IC in accordance
with the present invention;
[0012] FIG. 3 is a top view of a semiconductor wafer including
interconnected ICs formed on its surface that are identical to the
IC shown in FIG. 2;
[0013] FIG. 4 is a block diagram of an electronic system including
the IC of FIG. 2;
[0014] FIG. 5 is a block diagram and a schematic of an IC including
an alternative embodiment of circuitry for isolating a
short-circuiting circuit internal to the IC from a supply voltage
V.sub.CC bond pad on the IC in accordance with the present
invention;
[0015] FIG. 6 is a block diagram and a schematic of another
alternative embodiment of circuitry for isolating a
short-circuiting circuit internal to an IC from a supply voltage
V.sub.CC bond pad on the IC in accordance with the present
invention; and
[0016] FIG. 7 is a block diagram and a schematic of still another
alternative embodiment of circuitry for isolating a
short-circuiting circuit internal to an IC from a supply voltage
V.sub.CC bond pad on the IC in accordance with the present
invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
[0017] As shown in FIG. 2, an integrated circuit (IC) 20 in
accordance with the present invention includes control circuitry 22
for sensing a short in a circuit 24 internal to the IC 20 and
switching circuitry 26 for isolating the internal circuit 24 from a
supply voltage V.sub.CC bond pad 28 on the IC 20 in response to the
control circuitry 22 sensing the short. By isolating the
short-circuited internal circuit 24 from the supply voltage
V.sub.CC bond pad 28, the present invention can prevent the short
from "tripping" probe test equipment (not shown) supplying the
supply voltage V.sub.CC to a semiconductor wafer (not shown) during
probe testing of the wafer.
[0018] It should be understood that the IC may comprise any IC,
including, for example, a Dynamic Random Access Memory (DRAM) IC
and a Static RAM (SRAM) IC. It should also be understood that
although the control circuitry and switching circuitry will be
described with respect to specific circuitry, the present invention
includes within its scope any control circuitry and any switching
circuitry capable of performing the functions as described. Also,
although the control circuitry will be described as sensing the
short in the internal circuit by sensing excess current drawn by
the internal circuit, the control circuitry may instead be
constructed to sense abnormally high or low voltages within the
internal circuit indicative of a short circuit. Further, it should
be understood that while the present invention is considered most
applicable to probe testing, its applicability is not limited to
probe testing. In addition, it should be understood that the
present invention can be used to isolate short-circuiting internal
circuitry of an IC from a wide variety of circuitry external to the
IC, and thus is not limited to isolating internal circuitry from a
supply voltage V.sub.CC bond pad.
[0019] Under normal probe testing conditions of the IC 20, when a
short circuit does not exist in the internal circuit 24, a ground
voltage V.sub.SS applied at the gate of a switching PMOS transistor
32 through a large resistance device 34 (e.g., more than 1
M.OMEGA.) turns the switching PMOS transistor 32 on. The ground
voltage V.sub.SS is also applied at the input of an inverter 36,
which then outputs a high voltage at the gate of a hysteresis PMOS
transistor 38, causing the hysteresis PMOS transistor 38 to be off.
Because the switching PMOS transistor 32 is on, the supply voltage
V.sub.CC applied at the bond pad 28 causes a current I to flow
through a sensing resistance device 40 and the switching PMOS
transistor 32 to the internal circuit 24.
[0020] The amount of resistance R of the sensing resistance device
40 is selected so that, under normal probe testing conditions, the
current I drawn by the internal circuit 24 causes a voltage drop V
(equal to I.times.R) across the sensing resistance device 40 that
is less than the threshold voltage .vertline.V.sub.T.vertline. of a
sensing PMOS transistor 42. As a result, the sensing PMOS
transistor 42 is off.
[0021] When a short circuit (e.g., a short circuit to ground) does
exist in the internal circuit 24, the internal circuit 24 rapidly
draws excessive current I through the sensing resistance device 40,
causing the voltage drop V across the sensing resistance device 40
to exceed the threshold voltage .vertline.V.sub.T.vertline. of the
sensing PMOS transistor 42. As a result, the sensing PMOS
transistor 42 turns on, thereby applying the supply voltage
V.sub.CC at the gate of the switching PMOS transistor 32 and at the
input of the inverter 36. Application of the supply voltage
V.sub.CC at the input of the inverter 36 causes the inverter 36 to
output a low voltage at the gate of the hysteresis PMOS transistor
38, thereby turning the hysteresis PMOS transistor 38 on and
reinforcing application of the supply voltage V.sub.CC at the gate
of the switching PMOS transistor 32. This causes the switching PMOS
transistor 32 to turn off, thereby interrupting the excessive
current flow I and isolating the short-circuited internal circuit
24 from the bond pad 28.
[0022] Because the current flow I is interrupted, the voltage drop
V across the sensing resistance device 40 drops to zero, causing
the sensing PMOS transistor 42 to turn off. Despite this, the
switching PMOS transistor 32 remains off, because feedback of the
supply voltage V.sub.CC from the drain of the hysteresis PMOS
transistor 38 to the input of the inverter 36 causes the inverter
36 to continue to output a low voltage at the gate of the
hysteresis PMOS transistor 38, thereby causing the hysteresis PMOS
transistor 38 to remain on and to continue to apply the supply
voltage V.sub.CC to the gate of the switching PMOS transistor 32.
The IC 20 remains in this state, with the short-circuited internal
circuit 24 isolated from the bond pad 28, and hence from other ICs
under test, by the switching PMOS transistor 32 until the supply
voltage V.sub.CC is no longer applied to the bond pad 28, at which
point the control circuitry 22 is reset.
[0023] As shown in FIG. 3, multiple ICs 20 are formed and
interconnected on the surface of a semiconductor wafer 50 in
accordance with the present invention. As shown in FIG. 4, an
electronic system 52, such as a computer system, includes an input
device 54, an output device 56, a processor 58, and a memory device
60 incorporating the IC 20 of FIGS. 2 and 3.
[0024] As shown in FIG. 5, an IC 70 in accordance with an
alternative embodiment of the present invention includes a fuse 72
for sensing a short in a circuit 74 internal to the IC 70 and for
isolating the internal circuit 74 from a supply voltage V.sub.CC
bond pad 78 on the IC 70 when excessive current is drawn by the
short.
[0025] As shown in FIG. 6 in another alternative embodiment of the
present invention, an IC 80 includes control circuitry 82 for
sensing a short in a circuit 84 internal to the IC 80 and switching
circuitry 86 for isolating the internal circuit 84 from a supply
voltage V.sub.CC bond pad 88 on the IC 80 in response to the
control circuitry 82 sensing the short. By isolating the
short-circuited internal circuit 84 from the supply voltage
V.sub.CC bond pad 88, the present invention can prevent the short
from "tripping" probe test equipment (not shown) supplying the
supply voltage V.sub.CC to a semiconductor wafer (not shown) during
probe testing of the wafer.
[0026] Under normal probe testing conditions of the IC 80, when a
short circuit does not exist in the internal circuit 84, a series
of biasing resistors 90, 92, and 94 biases the base 96 of a
switching bipolar junction transistor (BJT) 98 at a voltage
intermediate the supply voltage V.sub.CC and a ground voltage
V.sub.SS so that the BJT 98 is on. A voltage taken from between the
biasing resistors 92 and 94 and applied at the input of an inverter
100 causes the inverter 100 to output a high voltage to the gate of
a hysteresis PMOS transistor 102, causing the hysteresis PMOS
transistor 102 to be off. Because the switching BJT 98 is on, the
supply voltage V.sub.CC applied at the bond pad 88 causes a current
I to flow through a resistor 104 and the BJT 98 to the internal
circuit 84.
[0027] The amount of resistance R of the resistor 104 is selected
so that, under normal probe testing conditions, the current I drawn
by the internal circuit 84 causes a voltage drop V (equal to
I.times.R) across the resistor 104 that is less than the threshold
voltage .vertline.V.sub.T.vertline. of a sensing PMOS transistor
106. As a result, the sensing PMOS transistor 106 is off.
[0028] When a short circuit (e.g., a short circuit to ground) does
exist in the internal circuit 84, the internal circuit 84 rapidly
draws excessive current I through the resistor 104, causing the
voltage drop V across the resistor 104 to exceed the threshold
voltage .vertline.V.sub.T.vertline. of the sensing PMOS transistor
106. As a result, the sensing PMOS transistor 106 turns on, thereby
applying the supply voltage V.sub.CC at the base of the switching
BJT 98 and raising the voltage applied at the input to the inverter
100. The rising voltage at the input of the inverter 100 causes the
inverter 100 to output a low voltage at the gate of the hysteresis
PMOS transistor 102, thereby turning the hysteresis PMOS transistor
102 on and reinforcing application of the supply voltage V.sub.CC
at the base 96 of the switching BJT 98. This causes the switching
BJT 98 to turn off, thereby interrupting the excessive current flow
I and isolating the short-circuited internal circuit 84 from the
bond pad 88.
[0029] Because the current flow I is interrupted, the voltage drop
V across the resistor 104 drops to zero, causing the sensing PMOS
transistor 106 to turn off. Despite this, the switching BJT 98
remains off, because the raised voltage at the input to the
inverter 100 causes the inverter 100 to keep the hysteresis PMOS
transistor 102 on, allowing the hysteresis PMOS transistor 102 to
continue to apply the supply voltage V.sub.CC to the base 96 of the
BJT 98. The IC 80 remains in this state, with the short-circuited
internal circuit 84 isolated from the bond pad 88, and hence from
other ICs under test, by the switching BJT 98 until the supply
voltage V.sub.CC is no longer applied to the bond pad 88, at which
point the control circuitry 82 is reset.
[0030] It should be understood that the switching BJT 98 may be
implemented on the IC 80, as is shown in FIG. 6, in a BiCMOS
configuration or, alternatively, may be implemented on a probe card
contacting the bond pad 88 or between ICs on a semiconductor
wafer.
[0031] As shown in FIG. 7 in still another alternative embodiment
of the present invention, an IC 110 includes control circuitry 112
for sensing a short in a circuit 114 internal to the IC 110 and a
micro-relay 116 for isolating the internal circuit 114 from a
supply voltage V.sub.CC bond pad 118 on the IC 110 in response to
the control circuitry 112 sensing the short. By isolating the
short-circuited internal circuit 114 from the supply voltage
V.sub.CC bond pad 118, the present invention can prevent the short
from "tripping" probe test equipment (not shown) supplying the
supply voltage V.sub.CC to a semiconductor wafer (not shown) during
probe testing of the wafer.
[0032] Under normal probe testing conditions of the IC 110, when a
short circuit does not exist in the internal circuit 114, the
control circuitry 112 senses no short in the internal circuit 114,
so it causes the micro-relay 116 to close and allow a current I to
flow to the internal circuit 114.
[0033] When a short circuit (e.g., a short circuit to ground) does
exist in the internal circuit 114, the internal circuit 114 rapidly
draws excessive current I. The control circuitry 112 detects this
excessive current I and, as a result, causes the micro-relay 116 to
open, thereby isolating the internal circuit 114 from the bond pad
118. The control circuitry 112 remains in this state until reset by
the voltage at the bond pad 118 dropping to zero and then rising
again to the supply voltage V.sub.CC.
[0034] It should be understood that the micro-relay may be created
using silicon micro-machining techniques, and may comprise a
capacitively or inductively controlled relay.
[0035] Although the present invention has been described with
reference to particular embodiments, the invention is not limited
to these described embodiments. For example, while the various
steps of operating the inventive device, and hence the various
steps of the inventive method, have been described as occurring in
a particular order, it will be understood that these steps need not
necessarily occur in the described order to fall within the scope
of the present invention. Thus, the invention is limited only by
the appended claims, which include within their scope all
equivalent devices and methods that operate according to the
principles of the invention as described.
* * * * *