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Substrate processing apparatus, substrate processing system, and substrate processing method
Grant 11,450,544 - Kobata , et al. September 20, 2 | 2022-09-20 |
Control Method For Processing Of A Substrate
App 20220266414 - MIKI; Tsutomu ; et al. | 2022-08-25 |
Substrate Processing Apparatus
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Output Signal Processing Apparatus For Eddy Current Sensor
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Polishing Head System And Polishing Apparatus
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Polishing Head System And Polishing Apparatus
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Substrate Polishing Apparatus And Substrate Polishing Method
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Substrate Polishing Apparatus, Method Of Creating Thickness Map, And Method Of Polishing A Substrate
App 20210101250 - Watanabe; Katsuhide ; et al. | 2021-04-08 |
Eddy Current Sensor
App 20210001447 - Abe; Atsushi ; et al. | 2021-01-07 |
Substrate Processing Apparatus, Substrate Processing System, And Substrate Processing Method
App 20200243364 - Kobata; Itsuki ; et al. | 2020-07-30 |
Substrate Processing Apparatus, And Method For Specifying Area To Be Partially Polished By Substrate Processing Apparatus
App 20200223027 - WATANABE; Katsuhide ; et al. | 2020-07-16 |
Polishing Machine And A Polishing Method For A Substrate
App 20200171618 - KOBATA; Itsuki ; et al. | 2020-06-04 |
Substrate processing apparatus, substrate processing system, and substrate processing method
Grant 10,665,487 - Kobata , et al. | 2020-05-26 |
Substrate processing apparatus and substrate processing method
Grant 10,500,691 - Imai , et al. Dec | 2019-12-10 |
Substrate Processing Control System, Substrate Processing Control Method, And Program
App 20190240799 - TAKEDA; Koichi ; et al. | 2019-08-08 |
Magnetic Element And Eddy Current Sensor Using The Same
App 20190193242 - TAKAHASHI; Taro ; et al. | 2019-06-27 |
Substrate Processing Apparatus And Substrate Processing System Including The Same
App 20180286717 - WATANABE; Katsuhide ; et al. | 2018-10-04 |
Polishing method
Grant 10,056,277 - Kobayashi , et al. August 21, 2 | 2018-08-21 |
Polishing apparatus and polished-state monitoring method
Grant 9,999,955 - Kobayashi , et al. June 19, 2 | 2018-06-19 |
Substrate Processing Apparatus And Substrate Processing Method
App 20180056470 - IMAI; Masayoshi ; et al. | 2018-03-01 |
Polishing Machine And A Polishing Method For A Substrate
App 20170259395 - KOBATA; Itsuki ; et al. | 2017-09-14 |
Polishing Apparatus
App 20170252889 - WATANABE; Katsuhide ; et al. | 2017-09-07 |
Polishing apparatus
Grant 9,687,955 - Watanabe , et al. June 27, 2 | 2017-06-27 |
Polishing Method
App 20170148655 - KOBAYASHI; Yoichi ; et al. | 2017-05-25 |
Substrate Processing Apparatus, Substrate Processing System. And Substrate Processing Method
App 20170047237 - KOBATA; Itsuki ; et al. | 2017-02-16 |
Method of adjusting profile of a polishing member used in a polishing apparatus, and polishing apparatus
Grant 9,156,130 - Shimano , et al. October 13, 2 | 2015-10-13 |
Polishing apparatus having substrate holding apparatus
Grant 9,149,903 - Fukushima , et al. October 6, 2 | 2015-10-06 |
Method of obtaining a sliding distance distribution of a dresser on a polishing member, method of obtaining a sliding vector distribution of a dresser on a polishing member, and polishing apparatus
Grant 9,108,292 - Shimano , et al. August 18, 2 | 2015-08-18 |
Polishing apparatus having thermal energy measuring means
Grant 9,073,170 - Fukushima , et al. July 7, 2 | 2015-07-07 |
Elastic membrane for semiconductor wafer polishing
Grant D729,753 - Fukushima , et al. May 19, 2 | 2015-05-19 |
A Method Of Polishing A Substrate Having A Film On A Surface Of The Substrate For Semiconductor Manufacturing
App 20150111314 - IIZUMI; Takeshi ; et al. | 2015-04-23 |
Polishing Apparatus And Method
App 20150093971 - FUKUSHIMA; Makoto ; et al. | 2015-04-02 |
Polishing Apparatus And Method
App 20150093968 - FUKUSHIMA; Makoto ; et al. | 2015-04-02 |
Method of polishing a substrate having a film on a surface of the substrate for semiconductor manufacturing
Grant 8,951,813 - Iizumi , et al. February 10, 2 | 2015-02-10 |
Film-thickness Measuring Apparatus, Film-thickness Measuring Method, And Polishing Apparatus Having The Film-thickness Measuring Apparatus
App 20150017880 - NOMURA; Toshikazu ; et al. | 2015-01-15 |
Polishing Apparatus And Polished-state Monitoring Method
App 20150017887 - KOBAYASHI; Yoichi ; et al. | 2015-01-15 |
Polishing apparatus having thermal energy measuring means
Grant 8,932,106 - Fukushima , et al. January 13, 2 | 2015-01-13 |
Method Of Obtaining A Sliding Distance Distribution Of A Dresser On A Polishing Member, Method Of Obtaining A Sliding Vector Distribution Of A Dresser On A Polishing Member, And Polishing Apparatus
App 20140342642 - SHIMANO; Takahiro ; et al. | 2014-11-20 |
Elastic membrane
Grant 8,859,070 - Yasuda , et al. October 14, 2 | 2014-10-14 |
Method Of Adjusting Profile Of A Polishing Member Used In A Polishing Apparatus, And Polishing Apparatus
App 20140287653 - SHIMANO; Takahiro ; et al. | 2014-09-25 |
Elastic membrane for semiconductor wafer polishing
Grant D711,330 - Fukushima , et al. August 19, 2 | 2014-08-19 |
Polishing Method
App 20140017824 - IIZUMI; Takeshi ; et al. | 2014-01-16 |
Polishing Method
App 20130337586 - IIZUMI; TAKESHI ; et al. | 2013-12-19 |
Elastic Membrane
App 20130136884 - YASUDA; Hozumi ; et al. | 2013-05-30 |
Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
Grant 8,382,558 - Watanabe , et al. February 26, 2 | 2013-02-26 |
Polishing Apparatus
App 20120064800 - WATANABE; Katsuhide ; et al. | 2012-03-15 |
Polishing Apparatus And Method
App 20120058709 - FUKUSHIMA; Makoto ; et al. | 2012-03-08 |
Elastic membrane for semiconductor wafer polishing apparatus
Grant D633,452 - Namiki , et al. March 1, 2 | 2011-03-01 |
Apparatus For Dressing A Polishing Pad, Chemical Mechanical Polishing Apparatus And Method
App 20100190417 - WATANABE; Katsuhide ; et al. | 2010-07-29 |
Electron beam apparatus and method for manufacturing semiconductor device
Grant 7,372,027 - Ando , et al. May 13, 2 | 2008-05-13 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20070128364 - Shinozaki; Hiroyuki ; et al. | 2007-06-07 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20070111542 - Shinozaki; Hiroyuki ; et al. | 2007-05-17 |
Substrate Treatment Apparatus And Substrate Treatment Method
App 20070107656 - SHINOZAKI; Hiroyuki ; et al. | 2007-05-17 |
Substrate treatment apparatus and substrate treatment method
App 20070111536 - Shinozaki; Hiroyuki ; et al. | 2007-05-17 |
Electron beam apparatus and method for manufacturing semiconductor device
App 20060097165 - Ando; Atsushi ; et al. | 2006-05-11 |
Vibration isolation apparatus using magnetic levitation devices
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Vibration isolating apparatus for table for mounting device sensitive to vibrations and method therefor
App 20020074474 - Haga, Takahide ; et al. | 2002-06-20 |
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Grant 5,951,368 - Watanabe , et al. September 14, 1 | 1999-09-14 |
Polishing apparatus having interlock function
Grant 5,904,608 - Watanabe May 18, 1 | 1999-05-18 |
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Robot with dust-free and maintenance-free actuators
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