Wang; Anchuan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Wang; Anchuan.The latest application filed is for "systems and methods for nitride-containing film removal".
Company Profile
23.137.139
- Wang; Anchuan - San Jose CA
- - San Jose CA US
- Wang; Anchuan - Sunnyvale CA
- Wang; Anchuan - US
- Wang; Anchuan - Fremont CA
Patent Activity
| Patent | Date |
|---|---|
| Systems And Methods For Nitride-containing Film Removal App 20220254648 - Wang; Baiwei ; et al. | 2022-08-11 |
| Systems And Methods For Tungsten-containing Film Removal App 20220165580 - Cui; Zhenjiang ; et al. | 2022-05-26 |
| Systems and methods to form airgaps Grant 11,335,565 - Chen , et al. May 17, 2 | 2022-05-17 |
| Airgap Formation Processes App 20220115263 - Pal; Ashish ; et al. | 2022-04-14 |
| Systems And Methods For Selective Metal Compound Removal App 20220084832 - Cui; Zhenjiang ; et al. | 2022-03-17 |
| Integration Processes Utilizing Boron-doped Silicon Materials App 20220020599 - Koshizawa; Takehito ; et al. | 2022-01-20 |
| Airgap formation processes Grant 11,211,286 - Pal , et al. December 28, 2 | 2021-12-28 |
| Gate Contact Over Active Regions App 20210249270 - THAREJA; Gaurav ; et al. | 2021-08-12 |
| Systems and methods for aluminum-containing film removal Grant 11,062,921 - Cui , et al. July 13, 2 | 2021-07-13 |
| Thermal silicon etch Grant 11,004,689 - Li , et al. May 11, 2 | 2021-05-11 |
| Gate contact over active processes Grant 11,004,687 - Thareja , et al. May 11, 2 | 2021-05-11 |
| Systems and methods utilizing solid-phase etchants Grant 10,872,778 - Chen , et al. December 22, 2 | 2020-12-22 |
| Self-limiting selective etching systems and methods Grant 10,755,941 - Chen , et al. A | 2020-08-25 |
| Gate Contact Over Active Processes App 20200258744 - A1 | 2020-08-13 |
| Systems And Methods To Form Airgaps App 20200234971 - Chen; Zhijun ; et al. | 2020-07-23 |
| 3D NAND high aspect ratio structure etch Grant 10,692,880 - Cui , et al. | 2020-06-23 |
| Systems and methods to form airgaps Grant 10,615,047 - Chen , et al. | 2020-04-07 |
| Systems And Methods Utilizing Solid-phase Etchants App 20200013632 - Chen; Zhijun ; et al. | 2020-01-09 |
| Self-limiting Selective Etching Systems And Methods App 20200013628 - Chen; Zhijun ; et al. | 2020-01-09 |
| Water-free etching methods Grant 10,497,579 - Chen , et al. De | 2019-12-03 |
| Oxide and metal removal Grant 10,465,294 - Wang , et al. No | 2019-11-05 |
| Water-free etching methods Grant 10,468,267 - Chen , et al. No | 2019-11-05 |
| Thermal Silicon Etch App 20190326123 - Li; Zihui ; et al. | 2019-10-24 |
| Oxide etch selectivity systems and methods Grant 10,424,463 - Xu , et al. Sept | 2019-09-24 |
| Oxide etch selectivity systems and methods Grant 10,424,464 - Xu , et al. Sept | 2019-09-24 |
| Systems And Methods To Form Airgaps App 20190267248 - Chen; Zhijun ; et al. | 2019-08-29 |
| Thermal silicon etch Grant 10,319,600 - Li , et al. | 2019-06-11 |
| Selective SiN lateral recess Grant 10,319,603 - Chen , et al. | 2019-06-11 |
| Oxygen treatment for nitride etching Grant 10,283,324 - Chen , et al. | 2019-05-07 |
| Oxygen Treatment For Nitride Etching App 20190122865 - Chen; Zhijun ; et al. | 2019-04-25 |
| Methods for selective etching of a silicon material Grant 10,249,507 - Li , et al. | 2019-04-02 |
| Methods for selective etching of a silicon material using HF gas without nitrogen etchants Grant 10,204,796 - Ingle , et al. Feb | 2019-02-12 |
| Flow distribution plate for surface fluorine reduction Grant 10,204,795 - Huang , et al. Feb | 2019-02-12 |
| Removal methods for high aspect ratio structures Grant 10,186,428 - Xu , et al. Ja | 2019-01-22 |
| Methods for anisotropic control of selective silicon removal Grant 10,170,336 - Li , et al. J | 2019-01-01 |
| Water-free Etching Methods App 20180350619 - Chen; Zhijun ; et al. | 2018-12-06 |
| Water-free Etching Methods App 20180350617 - Chen; Zhijun ; et al. | 2018-12-06 |
| Methods and apparatus for selective dry etch Grant 10,134,581 - Li , et al. November 20, 2 | 2018-11-20 |
| Silicon pretreatment for nitride removal Grant 10,128,086 - Huang , et al. November 13, 2 | 2018-11-13 |
| Selective SiN lateral recess Grant 10,062,579 - Chen , et al. August 28, 2 | 2018-08-28 |
| Methods for etch of metal and metal-oxide films Grant 10,062,578 - Zhang , et al. August 28, 2 | 2018-08-28 |
| Hydrogen plasma based cleaning process for etch hardware Grant 10,026,597 - Rodrigo , et al. July 17, 2 | 2018-07-17 |
| 3d Nand High Aspect Ratio Structure Etch App 20180182777 - CUI; Zhenjiang ; et al. | 2018-06-28 |
| Processing systems and methods for halide scavenging Grant 9,991,134 - Wang , et al. June 5, 2 | 2018-06-05 |
| Removal Methods For High Aspect Ratio Structures App 20180138055 - Xu; Lin ; et al. | 2018-05-17 |
| SELECTIVE SiN LATERAL RECESS App 20180102255 - Chen; Zhijun ; et al. | 2018-04-12 |
| SELECTIVE SiN LATERAL RECESS App 20180102256 - Chen; Zhijun ; et al. | 2018-04-12 |
| Methods For Selective Etching Of A Silicon Material Using Hf Gas Without Nitrogen Etchants App 20180082849 - INGLE; Nitin K. ; et al. | 2018-03-22 |
| Differential silicon oxide etch Grant 9,887,096 - Park , et al. February 6, 2 | 2018-02-06 |
| Self-aligned shielding of silicon oxide Grant 9,875,907 - Wang , et al. January 23, 2 | 2018-01-23 |
| Self-aligned shielding of silicon oxide Grant 9,859,128 - Wang , et al. January 2, 2 | 2018-01-02 |
| Methods for etch of SiN films Grant 9,842,744 - Zhang , et al. December 12, 2 | 2017-12-12 |
| Oxide etch selectivity enhancement Grant 9,837,284 - Chen , et al. December 5, 2 | 2017-12-05 |
| Methods for selective etching of a silicon material using HF gas without nitrogen etchants Grant 9,831,097 - Ingle , et al. November 28, 2 | 2017-11-28 |
| Removal methods for high aspect ratio structures Grant 9,768,034 - Xu , et al. September 19, 2 | 2017-09-19 |
| Methods And Apparatus For Selective Dry Etch App 20170263438 - Li; Ning ; et al. | 2017-09-14 |
| Selective etch for silicon films Grant 9,754,800 - Zhang , et al. September 5, 2 | 2017-09-05 |
| Flow Distribution Plate For Surface Fluorine Reduction App 20170229309 - HUANG; Jiayin ; et al. | 2017-08-10 |
| Methods For Selective Etching Of A Silicon Material App 20170229313 - LI; Zihui ; et al. | 2017-08-10 |
| Oxide Etch Selectivity Systems And Methods App 20170229287 - Xu; Lin ; et al. | 2017-08-10 |
| Hydrogen Plasma Based Cleaning Process For Etch Hardware App 20170200590 - RODRIGO; Chirantha ; et al. | 2017-07-13 |
| Processing systems and methods for halide scavenging Grant 9,704,723 - Wang , et al. July 11, 2 | 2017-07-11 |
| Methods For Selective Etching Of A Silicon Material Using Hf Gas Without Nitrogen Etchants App 20170178915 - INGLE; Nitin K. ; et al. | 2017-06-22 |
| Oxide Etch Selectivity Enhancement App 20170178924 - Chen; Zhijun ; et al. | 2017-06-22 |
| Self-aligned Shielding Of Silicon Oxide App 20170148642 - Wang; Fei ; et al. | 2017-05-25 |
| Self-aligned Shielding Of Silicon Oxide App 20170148640 - Wang; Fei ; et al. | 2017-05-25 |
| Processing systems and methods for halide scavenging Grant 9,659,792 - Wang , et al. May 23, 2 | 2017-05-23 |
| Metal removal with reduced surface roughness Grant 9,659,791 - Wang , et al. May 23, 2 | 2017-05-23 |
| Methods for selective etching of a silicon material Grant 9,653,310 - Li , et al. May 16, 2 | 2017-05-16 |
| Methods For Selective Etching Of A Silicon Material App 20170133232 - LI; Zihui ; et al. | 2017-05-11 |
| High Aspect Ratio 3-d Flash Memory Device App 20170110475 - Liu; Jie ; et al. | 2017-04-20 |
| Oxide etch selectivity enhancement Grant 9,613,822 - Chen , et al. April 4, 2 | 2017-04-04 |
| Selective titanium nitride removal Grant 9,607,856 - Wang , et al. March 28, 2 | 2017-03-28 |
| Gas-phase silicon nitride selective etch Grant 9,576,815 - Xu , et al. February 21, 2 | 2017-02-21 |
| Etch suppression with germanium Grant 9,576,809 - Korolik , et al. February 21, 2 | 2017-02-21 |
| Cleaning high aspect ratio vias Grant 9,576,788 - Liu , et al. February 21, 2 | 2017-02-21 |
| Gas-phase Silicon Oxide Selective Etch App 20170040180 - Xu; Jingjing ; et al. | 2017-02-09 |
| Oxide Etch Selectivity Systems And Methods App 20170040175 - Xu; Lin ; et al. | 2017-02-09 |
| Gas-phase silicon oxide selective etch Grant 9,564,341 - Xu , et al. February 7, 2 | 2017-02-07 |
| Tungsten separation Grant 9,553,102 - Wang , et al. January 24, 2 | 2017-01-24 |
| Metal Removal With Reduced Surface Roughness App 20170018439 - Wang; Xikun ; et al. | 2017-01-19 |
| Aluminum selective etch Grant 9,520,303 - Wang , et al. December 13, 2 | 2016-12-13 |
| Anisotropic gap etch Grant 9,502,258 - Xue , et al. November 22, 2 | 2016-11-22 |
| Cleaning High Aspect Ratio Vias App 20160314961 - Liu; Jie ; et al. | 2016-10-27 |
| Chlorine-based hardmask removal Grant 9,478,434 - Wang , et al. October 25, 2 | 2016-10-25 |
| Silicon oxide selective removal Grant 9,478,432 - Chen , et al. October 25, 2 | 2016-10-25 |
| Gas-phase Silicon Nitride Selective Etch App 20160307771 - Xu; Jingjing ; et al. | 2016-10-20 |
| Selective titanium nitride etching Grant 9,449,845 - Liu , et al. September 20, 2 | 2016-09-20 |
| Vertical gate separation Grant 9,449,846 - Liu , et al. September 20, 2 | 2016-09-20 |
| Processing systems and methods for halide scavenging Grant 9,449,850 - Wang , et al. September 20, 2 | 2016-09-20 |
| Methods For Etch Of Sin Films App 20160260619 - Zhang; Jingchun ; et al. | 2016-09-08 |
| SILICON ETCH PROCESS WITH TUNABLE SELECTIVITY TO SiO2 AND OTHER MATERIALS App 20160260588 - Park; Seung ; et al. | 2016-09-08 |
| Radical-component oxide etch Grant 9,437,451 - Chen , et al. September 6, 2 | 2016-09-06 |
| Selective Etch For Silicon Films App 20160240389 - Zhang; Jingchun ; et al. | 2016-08-18 |
| Selective etch of silicon by way of metastable hydrogen termination Grant 9,418,858 - Wang , et al. August 16, 2 | 2016-08-16 |
| Dry-etch for selective tungsten removal Grant 9,412,608 - Wang , et al. August 9, 2 | 2016-08-09 |
| Oxide And Metal Removal App 20160222522 - Wang; Xikun ; et al. | 2016-08-04 |
| Highly selective doped oxide removal method Grant 9,406,523 - Chen , et al. August 2, 2 | 2016-08-02 |
| Vertical Gate Separation App 20160218018 - Liu; Jie ; et al. | 2016-07-28 |
| Silicon-carbon-nitride selective etch Grant 9,390,937 - Chen , et al. July 12, 2 | 2016-07-12 |
| Dry-etch selectivity Grant 9,384,997 - Ren , et al. July 5, 2 | 2016-07-05 |
| Low temperature gas-phase carbon removal Grant 9,378,969 - Hsu , et al. June 28, 2 | 2016-06-28 |
| Anisotropic Gap Etch App 20160181112 - Xue; Jun ; et al. | 2016-06-23 |
| Titanium nitride removal Grant 9,373,522 - Wang , et al. June 21, 2 | 2016-06-21 |
| Silicon etch process with tunable selectivity to SiO.sub.2 and other materials Grant 9,368,364 - Park , et al. June 14, 2 | 2016-06-14 |
| V trench dry etch Grant 9,355,856 - Wang , et al. May 31, 2 | 2016-05-31 |
| Non-local plasma oxide etch Grant 9,355,863 - Chen , et al. May 31, 2 | 2016-05-31 |
| Fluorine-based hardmask removal Grant 9,355,862 - Pandit , et al. May 31, 2 | 2016-05-31 |
| Oxide etch selectivity systems and methods Grant 9,349,605 - Xu , et al. May 24, 2 | 2016-05-24 |
| Methods for etch of sin films Grant 9,343,327 - Zhang , et al. May 17, 2 | 2016-05-17 |
| Self-aligned process Grant 9,343,272 - Pandit , et al. May 17, 2 | 2016-05-17 |
| Selective etch for silicon films Grant 9,324,576 - Zhang , et al. April 26, 2 | 2016-04-26 |
| Oxide and metal removal Grant 9,309,598 - Wang , et al. April 12, 2 | 2016-04-12 |
| Silicon Oxide Selective Removal App 20160093506 - Chen; Zhijun ; et al. | 2016-03-31 |
| Oxide Etch Selectivity Enhancement App 20160093505 - Chen; Zhijun ; et al. | 2016-03-31 |
| Gas-phase tungsten etch Grant 9,299,575 - Park , et al. March 29, 2 | 2016-03-29 |
| Aluminum oxide selective etch Grant 9,299,583 - Wang , et al. March 29, 2 | 2016-03-29 |
| SILICON ETCH PROCESS WITH TUNABLE SELECTIVITY TO SiO2 AND OTHER MATERIALS App 20160086807 - PARK; SEUNG ; et al. | 2016-03-24 |
| Chlorine-based Hardmask Removal App 20160086816 - Wang; Xikun ; et al. | 2016-03-24 |
| Fluorine-based Hardmask Removal App 20160086815 - Pandit; Mandar ; et al. | 2016-03-24 |
| V Trench Dry Etch App 20160079072 - Wang; Xikun ; et al. | 2016-03-17 |
| Titanium oxide etch Grant 9,287,134 - Wang , et al. March 15, 2 | 2016-03-15 |
| Integrated Processing For Microcontamination Prevention App 20160068969 - Cui; Zhenjiang ; et al. | 2016-03-10 |
| Processing Systems And Methods For Halide Scavenging App 20160064233 - Wang; Anchuan ; et al. | 2016-03-03 |
| Selective titanium nitride etch Grant 9,275,834 - Park , et al. March 1, 2 | 2016-03-01 |
| Tungsten Separation App 20160056167 - Wang; Xikun ; et al. | 2016-02-25 |
| Dopant etch selectivity control Grant 9,263,278 - Purayath , et al. February 16, 2 | 2016-02-16 |
| Processing Systems And Methods For Halide Scavenging App 20160027673 - Wang; Anchuan ; et al. | 2016-01-28 |
| Silicon germanium processing Grant 9,236,265 - Korolik , et al. January 12, 2 | 2016-01-12 |
| Dry-etch for silicon-and-carbon-containing films Grant 9,236,266 - Zhang , et al. January 12, 2 | 2016-01-12 |
| High Selectivity Gas Phase Silicon Nitride Removal App 20150371865 - Chen; Zhijun ; et al. | 2015-12-24 |
| Low Temperature Gas-phase Carbon Removal App 20150371864 - Hsu; Ching-Mei ; et al. | 2015-12-24 |
| Highly Selective Doped Oxide Removal Method App 20150371866 - Chen; Zhijun ; et al. | 2015-12-24 |
| Protective Silicon Oxide Patterning App 20150371861 - LI; Zihui ; et al. | 2015-12-24 |
| Selective Titanium Nitride Removal App 20150357205 - Wang; Xikun ; et al. | 2015-12-10 |
| Non-local Plasma Oxide Etch App 20150357201 - Chen; Zhijun ; et al. | 2015-12-10 |
| Selective etch of silicon nitride Grant 9,209,012 - Chen , et al. December 8, 2 | 2015-12-08 |
| Oxide And Metal Removal App 20150345028 - Wang; Xikun ; et al. | 2015-12-03 |
| Doped silicon oxide etch Grant 9,202,708 - Chen , et al. December 1, 2 | 2015-12-01 |
| Processing Systems And Methods For Halide Scavenging App 20150332930 - Wang; Anchuan ; et al. | 2015-11-19 |
| Even tungsten etch for high aspect ratio trenches Grant 9,190,293 - Wang , et al. November 17, 2 | 2015-11-17 |
| Processing systems and methods for halide scavenging Grant 9,184,055 - Wang , et al. November 10, 2 | 2015-11-10 |
| Methods For Etch Of Metal And Metal-oxide Films App 20150318186 - Zhang; Jingchun ; et al. | 2015-11-05 |
| Dry-etch For Selective Oxidation Removal App 20150311089 - Kim; Sang Hyuk ; et al. | 2015-10-29 |
| Processing systems and methods for halide scavenging Grant 9,153,442 - Wang , et al. October 6, 2 | 2015-10-06 |
| Gas-phase Tungsten Etch App 20150262829 - Park; Seung ; et al. | 2015-09-17 |
| Differential Silicon Oxide Etch App 20150249018 - Park; Seung H. ; et al. | 2015-09-03 |
| Radical-component Oxide Etch App 20150235863 - Chen; Zhijun ; et al. | 2015-08-20 |
| Processing Systems And Methods For Halide Scavenging App 20150235865 - Wang; Anchuan ; et al. | 2015-08-20 |
| Non-local plasma oxide etch Grant 9,111,877 - Chen , et al. August 18, 2 | 2015-08-18 |
| Methods For Etch Of Sin Films App 20150214067 - Zhang; Jingchun ; et al. | 2015-07-30 |
| Processing systems and methods for halide scavenging Grant 9,093,371 - Wang , et al. July 28, 2 | 2015-07-28 |
| Conformal oxide dry etch Grant 9,093,390 - Wang , et al. July 28, 2 | 2015-07-28 |
| Titanium Oxide Etch App 20150206764 - WANG; Xikun ; et al. | 2015-07-23 |
| Dry-etch For Selective Tungsten Removal App 20150179464 - Wang; Xikun ; et al. | 2015-06-25 |
| Methods for etch of metal and metal-oxide films Grant 9,064,815 - Zhang , et al. June 23, 2 | 2015-06-23 |
| Dry-etch for selective oxidation removal Grant 9,064,816 - Kim , et al. June 23, 2 | 2015-06-23 |
| Even Tungsten Etch For High Aspect Ratio Trenches App 20150170935 - Wang; Xikun ; et al. | 2015-06-18 |
| Dopant Etch Selectivity Control App 20150170920 - Purayath; Vinod R. ; et al. | 2015-06-18 |
| Selective titanium nitride removal Grant 9,040,422 - Wang , et al. May 26, 2 | 2015-05-26 |
| Differential silicon oxide etch Grant 9,034,770 - Park , et al. May 19, 2 | 2015-05-19 |
| Aluminum Selective Etch App 20150129541 - Wang; Xikun ; et al. | 2015-05-14 |
| Dry-etch Selectivity App 20150132968 - Ren; He ; et al. | 2015-05-14 |
| Etch Suppression With Germanium App 20150126039 - Korolik; Mikhail ; et al. | 2015-05-07 |
| Silicon Germanium Processing App 20150126040 - Korolik; Mikhail ; et al. | 2015-05-07 |
| Processing systems and methods for halide scavenging Grant 9,023,732 - Wang , et al. May 5, 2 | 2015-05-05 |
| Radical-component oxide etch Grant 9,023,734 - Chen , et al. May 5, 2 | 2015-05-05 |
| Selective Titanium Nitride Etching App 20150118857 - Liu; Jie ; et al. | 2015-04-30 |
| Methods for etch of sin films Grant 8,999,856 - Zhang , et al. April 7, 2 | 2015-04-07 |
| Selective Etch Of Silicon Nitride App 20150079797 - Chen; Zhijun ; et al. | 2015-03-19 |
| Dry-etch for selective tungsten removal Grant 8,980,763 - Wang , et al. March 17, 2 | 2015-03-17 |
| Dry-etch selectivity Grant 8,969,212 - Ren , et al. March 3, 2 | 2015-03-03 |
| Selective etch of silicon nitride Grant 8,956,980 - Chen , et al. February 17, 2 | 2015-02-17 |
| Tungsten oxide processing Grant 8,951,429 - Liu , et al. February 10, 2 | 2015-02-10 |
| Selective titanium nitride etching Grant 08921234 - | 2014-12-30 |
| Selective titanium nitride etching Grant 8,921,234 - Liu , et al. December 30, 2 | 2014-12-30 |
| Selective Etch Of Silicon By Way Of Metastable Hydrogen Termination App 20140308816 - Wang; Anchuan ; et al. | 2014-10-16 |
| Conformal Oxide Dry Etch App 20140308818 - Wang; Anchuan ; et al. | 2014-10-16 |
| Processing Systems And Methods For Halide Scavenging App 20140271097 - WANG; Anchuan ; et al. | 2014-09-18 |
| Processing Systems And Methods For Halide Scavenging App 20140273489 - Wang; Anchuan ; et al. | 2014-09-18 |
| Processing Systems And Methods For Halide Scavenging App 20140273481 - Wang; Anchuan ; et al. | 2014-09-18 |
| Processing Systems And Methods For Halide Scavenging App 20140273406 - Wang; Anchuan ; et al. | 2014-09-18 |
| Processing Systems And Methods For Halide Scavenging App 20140273488 - Wang; Anchuan ; et al. | 2014-09-18 |
| Processing Systems And Methods For Halide Scavenging App 20140262038 - Wang; Anchuan ; et al. | 2014-09-18 |
| Dry-etch For Silicon-and-carbon-containing Films App 20140273491 - Zhang; Jingchun ; et al. | 2014-09-18 |
| Selective Titanium Nitride Removal App 20140256131 - Wang; Xikun ; et al. | 2014-09-11 |
| Selective etch of silicon by way of metastable hydrogen termination Grant 8,808,563 - Wang , et al. August 19, 2 | 2014-08-19 |
| Conformal oxide dry etch Grant 8,801,952 - Wang , et al. August 12, 2 | 2014-08-12 |
| Dry-etch For Selective Oxidation Removal App 20140199850 - Kim; Sang Hyuk ; et al. | 2014-07-17 |
| Dry-etch for silicon-and-carbon-containing films Grant 8,771,536 - Zhang , et al. July 8, 2 | 2014-07-08 |
| Remotely-excited fluorine and water vapor etch Grant 8,771,539 - Zhang , et al. July 8, 2 | 2014-07-08 |
| Dry etch process Grant 8,765,574 - Zhang , et al. July 1, 2 | 2014-07-01 |
| Selective Titanium Nitride Etching App 20140179111 - Liu; Jie ; et al. | 2014-06-26 |
| Non-local Plasma Oxide Etch App 20140166617 - Chen; Zhijun ; et al. | 2014-06-19 |
| Dry-etch For Selective Tungsten Removal App 20140154889 - Wang; Xikun ; et al. | 2014-06-05 |
| Dry-etch Selectivity App 20140141621 - Ren; He ; et al. | 2014-05-22 |
| Dry Etch Process App 20140134842 - Zhang; Jingchun ; et al. | 2014-05-15 |
| Radical Chemistry Modulation And Control Using Multiple Flow Pathways App 20140099794 - Ingle; Nitin K. ; et al. | 2014-04-10 |
| Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Grant 8,679,983 - Wang , et al. March 25, 2 | 2014-03-25 |
| Selective suppression of dry-etch rate of materials containing both silicon and oxygen Grant 8,679,982 - Wang , et al. March 25, 2 | 2014-03-25 |
| Silicon-carbon-nitride Selective Etch App 20140080310 - Chen; Zhijun ; et al. | 2014-03-20 |
| Differential Silicon Oxide Etch App 20140080309 - Park; Seung H. ; et al. | 2014-03-20 |
| Radical-component Oxide Etch App 20140080308 - Chen; Zhijun ; et al. | 2014-03-20 |
| Dry-etch for silicon-and-nitrogen-containing films Grant 8,642,481 - Wang , et al. February 4, 2 | 2014-02-04 |
| Etch Remnant Removal App 20130298942 - Ren; He ; et al. | 2013-11-14 |
| Selective suppression of dry-etch rate of materials containing both silicon and nitrogen Grant 8,541,312 - Wang , et al. September 24, 2 | 2013-09-24 |
| Integrated process modulation for PSG gapfill Grant 8,497,211 - Lee , et al. July 30, 2 | 2013-07-30 |
| Polysilicon films by HDP-CVD Grant 8,450,191 - Wang , et al. May 28, 2 | 2013-05-28 |
| Dry-etch For Silicon-and-nitrogen-containing Films App 20130130507 - Wang; Yunyu ; et al. | 2013-05-23 |
| Selective Suppression Of Dry-etch Rate Of Materials Containing Both Silicon And Nitrogen App 20130130506 - Wang; Yunyu ; et al. | 2013-05-23 |
| Selective Etch Of Silicon By Way Of Metastable Hydrogen Termination App 20130089988 - Wang; Anchuan ; et al. | 2013-04-11 |
| Selective Suppression Of Dry-etch Rate Of Materials Containing Both Silicon And Nitrogen App 20130059440 - Wang; Yunyu ; et al. | 2013-03-07 |
| Selective Suppression Of Dry-etch Rate Of Materials Containing Both Silicon And Oxygen App 20130052827 - Wang; Yunyu ; et al. | 2013-02-28 |
| Dry-etch For Silicon-and-nitrogen-containing Films App 20130045605 - Wang; Yunyu ; et al. | 2013-02-21 |
| Dry-etch For Silicon-and-carbon-containing Films App 20130034968 - Zhang; Jingchun ; et al. | 2013-02-07 |
| Integrated Process Modulation For Psg Gapfill App 20120325773 - Lee; Young S. ; et al. | 2012-12-27 |
| Methods For Etch Of Metal And Metal-oxide Films App 20120238103 - Zhang; Jingchun ; et al. | 2012-09-20 |
| Methods For Etch Of Sin Films App 20120238102 - Zhang; Jingchun ; et al. | 2012-09-20 |
| Remotely-excited Fluorine And Water Vapor Etch App 20120211462 - Zhang; Jingchun ; et al. | 2012-08-23 |
| Polysilicon Films By Hdp-cvd App 20120190178 - Wang; Anchuan ; et al. | 2012-07-26 |
| Self Aligned Triple Patterning App 20120085733 - Mebarki; Bencherki ; et al. | 2012-04-12 |
| Transparent conducting oxide thin films and related devices Grant 8,138,364 - Marks , et al. March 20, 2 | 2012-03-20 |
| Post-ash Sidewall Healing App 20120009796 - Cui; Zhenjiang ; et al. | 2012-01-12 |
| Selective Etch For Silicon Films App 20110294300 - Zhang; Jingchun ; et al. | 2011-12-01 |
| High density plasma gapfill deposition-etch-deposition process etchant Grant 7,972,968 - Lee , et al. July 5, 2 | 2011-07-05 |
| Gapfill improvement with low etch rate dielectric liners Grant 7,910,491 - Soo Kwon , et al. March 22, 2 | 2011-03-22 |
| Apparatus and Methods for Cyclical Oxidation and Etching App 20110061810 - Ganguly; Udayan ; et al. | 2011-03-17 |
| Reduction of etch-rate drift in HDP processes Grant 7,867,921 - Wang , et al. January 11, 2 | 2011-01-11 |
| Impurity control in HDP-CVD DEP/ETCH/DEP processes Grant 7,745,350 - Wang , et al. June 29, 2 | 2010-06-29 |
| Gapfill Improvement With Low Etch Rate Dielectric Liners App 20100099236 - Kwon; Young Soo ; et al. | 2010-04-22 |
| Low wet etch rate silicon nitride film Grant 7,678,715 - Mungekar , et al. March 16, 2 | 2010-03-16 |
| High Density Plasma Gapfill Deposition-etch-deposition Process Using Fluorocarbon Etchant App 20100041207 - Lee; Young S. ; et al. | 2010-02-18 |
| High stress diamond like carbon film Grant 7,629,271 - Wu , et al. December 8, 2 | 2009-12-08 |
| Reactive ion etching for semiconductor device feature topography modification Grant 7,628,897 - Mungekar , et al. December 8, 2 | 2009-12-08 |
| Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology Grant 7,595,088 - Kapoor , et al. September 29, 2 | 2009-09-29 |
| Low Wet Etch Rate Silicon Nitride Film App 20090163041 - Mungekar; Hemant P. ; et al. | 2009-06-25 |
| Integrated process modulation (IPM) a novel solution for gapfill with HDP-CVD Grant 7,524,750 - Nemani , et al. April 28, 2 | 2009-04-28 |
| Reduction Of Etch-rate Drift In Hdp Processes App 20090075489 - Wang; Anchuan ; et al. | 2009-03-19 |
| Impurity Control In Hdp-cvd Dep/etch/dep Processes App 20090068853 - Wang; Anchuan ; et al. | 2009-03-12 |
| Gapfill Extension Of Hdp-cvd Integrated Process Modulation Sio2 Process App 20080299775 - Wang; Anchuan ; et al. | 2008-12-04 |
| Multi-step Dep-etch-dep High Density Plasma Chemical Vapor Deposition Processes For Dielectric Gapfills App 20080142483 - Hua; Zhong Qiang ; et al. | 2008-06-19 |
| Method of forming a phosphorus doped optical core using a PECVD process Grant 7,383,702 - M'Saad , et al. June 10, 2 | 2008-06-10 |
| Method of forming a phosphorus doped optical core using a PECVD process Grant 7,325,419 - M'Saad , et al. February 5, 2 | 2008-02-05 |
| Transparent conducting oxide thin films and related devices App 20080024055 - Marks; Tobin J. ; et al. | 2008-01-31 |
| Integrated Process Modulation (ipm) A Novel Solution For Gapfill With Hdp-cvd App 20070243693 - Nemani; Srinivas D. ; et al. | 2007-10-18 |
| Low stress STI films and methods Grant 7,244,658 - Yieh , et al. July 17, 2 | 2007-07-17 |
| Low stress STI films and methods App 20070087515 - Yieh; EllieY ; et al. | 2007-04-19 |
| HDP-CVD multistep gapfill process Grant 7,205,240 - Karim , et al. April 17, 2 | 2007-04-17 |
| Method Of Forming A Phosphorus Doped Optical Core Using A Pecvd Process App 20060266081 - M'Saad; Hichem ; et al. | 2006-11-30 |
| Method Of Forming A Phosphorus Doped Optical Core Using A Pecvd Process App 20060207294 - M'Saad; Hichem ; et al. | 2006-09-21 |
| Method of forming a phosphorus doped optical core using a PECVD process Grant 7,080,528 - M'Saad , et al. July 25, 2 | 2006-07-25 |
| HDP-CVD uniformity control Grant 6,890,597 - Krishnaraj , et al. May 10, 2 | 2005-05-10 |
| Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology App 20050008790 - Kapoor, Bikram ; et al. | 2005-01-13 |
| Hdp-cvd Multistep Gapfill Process App 20040245091 - Karim, M Ziaul ; et al. | 2004-12-09 |
| HDP-CVD uniformity control App 20040224090 - Krishnaraj, Padmanabhan ; et al. | 2004-11-11 |
| Hydrogen assisted HDP-CVD deposition process for aggressive gap-fill technology Grant 6,808,748 - Kapoor , et al. October 26, 2 | 2004-10-26 |
| Reactive ion etching for semiconductor device feature topography modification App 20040079728 - Mungekar, Hemant P. ; et al. | 2004-04-29 |
| Method of forming a phosphorus doped optical core using a PECVD process App 20040079118 - M'Saad, Hichem ; et al. | 2004-04-29 |
| Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers Grant 6,667,248 - M'Saad , et al. December 23, 2 | 2003-12-23 |
| High work function transparent conducting oxides as anodes for organic light-emitting diodes App 20030118865 - Marks, Tobin J. ; et al. | 2003-06-26 |
| Method of manufacturing an optical core App 20030110808 - M'Saad, Hichem ; et al. | 2003-06-19 |
| Low-bias-deposited high-density-plasma chemical-vapor-deposition silicate glass layers App 20030050724 - M'Saad, Hichem ; et al. | 2003-03-13 |
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