| Patent | Date |
|---|
Method For Producing Semiconductor Wafers From Monocrystalline Silicon
App 20220298670 - Heuwieser; Walter ; et al. | 2022-09-22 |
Method For Depositing An Epitaxial Layer On A Front Side Of A Semiconductor Wafer, And Device For Carrying Out The Method
App 20220267926 - HABERECHT; Joerg ; et al. | 2022-08-25 |
Method For Pulling A Single Crystal Of Silicon In Accordance With The Czochralski Method
App 20220259762 - MANGELBERGER; Karl ; et al. | 2022-08-18 |
Installation And Method For Polishing Semiconductor Wafers
App 20220258303 - FRANKE; Jonny ; et al. | 2022-08-18 |
Method For Producing Semiconductor Wafers
App 20220236205 - BOY; Michael ; et al. | 2022-07-28 |
Method For Separating A Plurality Of Slices From Workpieces During A Number Of Separating Processes By Means Of A Wire Saw, And Semiconductor Wafer Made Of Monocrystalline Silicon
App 20220234250 - PIETSCH; Georg ; et al. | 2022-07-28 |
Single crystal of silicon with <100> orientation, which is doped with n-type dopant, and method for producing such a single crystal
Grant 11,390,962 - Raming , et al. July 19, 2 | 2022-07-19 |
Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
Grant 11,380,621 - Schauer , et al. July 5, 2 | 2022-07-05 |
Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer
Grant 11,302,565 - Moos , et al. April 12, 2 | 2022-04-12 |
Semiconductor wafer made of single-crystal silicon and process for the production thereof
Grant 11,280,026 - Mueller , et al. March 22, 2 | 2022-03-22 |
Method For Polishing A Semiconductior Wafer
App 20220080549 - HEILMAIER; Alexander ; et al. | 2022-03-17 |
Method For Producing Semiconductor Wafers By Means Of A Wire Saw
App 20220040883 - BEYER; Axel ; et al. | 2022-02-10 |
Method For Producing Semiconductor Wafers Using A Wire Saw, Wire Saw, And Semiconductor Wafers Made Of Monocrystalline Silicon
App 20220040882 - BEYER; Axel ; et al. | 2022-02-10 |
Semiconductor Wafer Having Epitaxial Layer
App 20210376088 - Werner; Norbert ; et al. | 2021-12-02 |
Method, Control System, And System For Machining A Semiconductor Wafer, And Semiconductor Wafer
App 20210358737 - BEYER; Axel ; et al. | 2021-11-18 |
Device For Pulling A Single Crystal Of Semiconductor Material Out Of A Melt Using The Cz Method, And Method Using The Device
App 20210340690 - Molchanov; Alexander | 2021-11-04 |
Method for polishing a semiconductor wafer on both sides
Grant 11,161,217 - Dutschke November 2, 2 | 2021-11-02 |
Method, control system and plant for processing a semiconductor wafer, and semiconductor wafer
Grant 11,158,549 - Welsch , et al. October 26, 2 | 2021-10-26 |
Separating apparatus for polysilicon
Grant 11,154,908 - Buschhardt , et al. October 26, 2 | 2021-10-26 |
Method for dressing polishing pads
Grant 11,148,250 - Dutschke , et al. October 19, 2 | 2021-10-19 |
Monocrystalline semiconductor wafer and method for producing a semiconductor wafer
Grant 11,075,070 - Roettger , et al. July 27, 2 | 2021-07-27 |
Method For Producing A Single Crystal From Semiconductor Material By The Fz Method; Device For Carrying Out The Method And Semiconductor Silicon Wafer
App 20210222319 - ALTMANNSHOFER; Ludwig ; et al. | 2021-07-22 |
Method for pulling a single crystal composed of semiconductor material from a melt contained in a crucible
Grant 11,060,202 - Schroeck , et al. July 13, 2 | 2021-07-13 |
Screen plate for screening plants for mechanical classification of polysilicon
Grant 11,059,072 - Bergmann , et al. July 13, 2 | 2021-07-13 |
Method and apparatus for pulling a single crystal by the FZ method
Grant 11,021,808 - Schroeck June 1, 2 | 2021-06-01 |
Method for pulling a single crystal by the FZ method comprising reducing the power of a melting apparatus based on geometrical dimensions of the drop
Grant 10,988,856 - Schroeck April 27, 2 | 2021-04-27 |
Susceptor for holding a semiconductor wafer with an orientation notch during the deposition of a layer on a front side of the semiconductor wafer and method for depositing the layer by using the susceptor
Grant 10,991,614 - Schauer April 27, 2 | 2021-04-27 |
Method and device for producing coated semiconductor wafers
Grant 10,982,324 - Haberecht April 20, 2 | 2021-04-20 |
Process For Producing Semiconductor Wafers
App 20210111080 - BOY; Michael ; et al. | 2021-04-15 |
Semiconductor wafer composed of single-crystal silicon with high gate oxide breakdown, and a process for the manufacture thereof
Grant 10,961,640 - Mueller , et al. March 30, 2 | 2021-03-30 |
Method for epitaxially coating semiconductor wafers, and semiconductor wafer
Grant 10,961,638 - Hager , et al. March 30, 2 | 2021-03-30 |
Epitaxially Coated Semiconductor Wafer Of Monocrystalline Silicon And Method For Production Thereof
App 20210087705 - SCHAUER; Reinhard ; et al. | 2021-03-25 |
Method for pulling a single crystal by the FZ method comprising dynamically adapting the power of a melting apparatus based on a position of lower and upper phase boundaries
Grant 10,907,271 - Schroeck February 2, 2 | 2021-02-02 |
Susceptor for holding a semiconductor wafer, method for depositing an epitaxial layer on a front side of a semiconductor wafer, and semiconductor wafer with epitaxial layer
Grant 10,865,499 - Haberecht December 15, 2 | 2020-12-15 |
Method for the vapour phase etching of a semiconductor wafer for trace metal analysis
Grant 10,861,704 - Hoelzlwimmer December 8, 2 | 2020-12-08 |
Method for producing a semiconductor wafer of monocrystalline silicon, device for producing a semiconductor wafer of monocrystalline silicon and semiconductor wafer of monocrystalline
Grant 10,844,513 - Heuwieser , et al. November 24, 2 | 2020-11-24 |
Semiconductor wafer made of monocrystalline silicon, and method for producing same
Grant 10,844,515 - Mueller , et al. November 24, 2 | 2020-11-24 |
Susceptor For Holding A Semiconductor Wafer With An Orientation Notch During The Deposition Of A Layer On A Front Side Of The Semiconductor Wafer And Method For Depositing The Layer By Using The Susceptor
App 20200365443 - SCHAUER; Reinhard | 2020-11-19 |
Method And Apparatus For Resuming The Wire Sawing Process Of A Workpiece After An Unplanned Interruption
App 20200316817 - RIEGER; Alexander ; et al. | 2020-10-08 |
Method And Device For Producing Coated Semiconductor Wafers
App 20200318234 - HABERECHT; Joerg | 2020-10-08 |
Method For Depositing An Epitaxial Layer On A Front Side Of A Semiconductor Wafer And Device For Carrying Out The Method
App 20200294794 - Haberecht; Joerg ; et al. | 2020-09-17 |
SINGLE CRYSTAL OF SILICON WITH <100> ORIENTATION, WHICH IS DOPED WITH N-TYPE DOPANT, AND METHOD FOR PRODUCING SUCH A SINGL
App 20200270764 - RAMING; Georg ; et al. | 2020-08-27 |
Method for determining and regulating a diameter of a single crystal during pulling of the single crystal
Grant 10,738,392 - Schroeck , et al. A | 2020-08-11 |
Semiconductor Wafer Composed Of Monocrystalline Silicon
App 20200248333 - Kind Code | 2020-08-06 |
Silicon wafer with homogeneous radial oxygen variation
Grant 10,731,271 - Mangelberger , et al. | 2020-08-04 |
Semiconductor Wafer Composed Of Single-crystal Silicon And Process For Producing A Semiconductor Wafer Composed Of Single-crysta
App 20200240039 - MUELLER; Timo ; et al. | 2020-07-30 |
Method for polishing a semiconductor wafer
Grant 10,707,069 - Schwandner , et al. | 2020-07-07 |
Heteroepitaxial Wafer And Method For Producing A Heteroepitaxial Wafer
App 20200203485 - THAPA; Sarad Bahadur ; et al. | 2020-06-25 |
Semiconductor Wafer Made Of Single-crystal Silicon And Process For The Production Thereof
App 20200165745 - MUELLER; Timo ; et al. | 2020-05-28 |
Semiconductor Wafer Of Monocrystalline Silicon And Method Of Producing The Semiconductor Wafer
App 20200168712 - SATTLER; Andreas ; et al. | 2020-05-28 |
Silicon Wafer With Homogeneous Radial Oxygen Variation
App 20200149184 - MANGELBERGER; Karl ; et al. | 2020-05-14 |
Method And Apparatus For Pulling A Single Crystal By The Fz Method
App 20200149183 - SCHROECK; Thomas | 2020-05-14 |
Method And Apparatus For Pulling A Single Crystal By The Fz Method
App 20200141025 - SCHROECK; Thomas | 2020-05-07 |
Method, Control System And Plant For Processing A Semiconductor Wafer, And Semiconductor Wafer
App 20200126876 - WELSCH; Stefan ; et al. | 2020-04-23 |
Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer
Grant 10,597,795 - Moos , et al. | 2020-03-24 |
Separating Apparatus For Polysilicon
App 20200086348 - BUSCHHARDT; Thomas ; et al. | 2020-03-19 |
Method For Polishing A Semiconductor Wafer On Both Sides
App 20200039020 - DUTSCHKE; Vladimir | 2020-02-06 |
Wire Saw, Wire Guide Roll And Method For Simultaneously Cutting A Multiplicity Of Wafers From An Ingot
App 20200016671 - PIETSCH; Georg | 2020-01-16 |
Method And Apparatus For Pulling A Single Crystal By The Fz Method
App 20190352795 - SCHROECK; Thomas | 2019-11-21 |
Epitaxially coated semiconductor wafer, and method for producing an epitaxially coated semiconductor wafer
Grant 10,483,128 - Mueller , et al. Nov | 2019-11-19 |
Method For Pulling A Single Crystal Composed Of Semiconductor Material From A Melt Contained In A Crucible
App 20190345630 - SCHROECK; Thomas ; et al. | 2019-11-14 |
Device For Handling A Semiconductor Wafer In An Epitaxy Reactor And Method For Producing A Semiconductor Wafer Having An Epitaxi
App 20190311941 - MOOS; Patrick ; et al. | 2019-10-10 |
Method For Producing A Semiconductor Wafer Of Monocrystalline Silicon, Device For Producing A Semiconductor Wafer Of Monocrystalline Silicon And Semiconductor Wafer Of Monocrystalline Silicon
App 20190136404 - HEUWIESER; Walter ; et al. | 2019-05-09 |
Semiconductor wafer comprising a monocrystalline group-IIIA nitride layer
Grant 10,283,356 - Thapa , et al. | 2019-05-07 |
Susceptor For Holding A Semiconductor Wafer, Method For Depositing An Epitaxial Layer On A Front Side Of A Semiconductor Wafer, And Semiconductor Wafer With Epitaxial Layer
App 20190106809 - HABERECHT; Joerg | 2019-04-11 |
Wire guide roll for wire saw and method
Grant 10,245,661 - Huber , et al. | 2019-04-02 |
Method for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber
Grant 10,249,493 - Aarts , et al. | 2019-04-02 |
Method and apparatus for depositing a material layer originating from process gas on a substrate wafer
Grant 10,240,235 - Brenninger , et al. | 2019-03-26 |
Method For The Vapour Phase Etching Of A Semiconductor Wafer For Trace Metal Analysis
App 20190051534 - HOELZLWIMMER; Franz | 2019-02-14 |
Method for polishing a semiconductor wafer
Grant 10,189,142 - Roettger , et al. Ja | 2019-01-29 |
Layered semiconductor substrate with reduced bow having a group III nitride layer and method for manufacturing it
Grant 10,192,739 - Storck , et al. Ja | 2019-01-29 |
Fz Silicon And Method To Prepare Fz Silicon
App 20190006190 - HUBER; Alois ; et al. | 2019-01-03 |
Semiconductor Wafer Made Of Monocrystalline Silicon, And Method For Producing Same
App 20180371639 - MUELLER; Timo ; et al. | 2018-12-27 |
Method For Epitaxially Coating Semiconductor Wafers, And Semiconductor Wafer
App 20180363165 - HAGER; Christian ; et al. | 2018-12-20 |
Method For Determining And Regulating A Diameter Of A Single Crystal During Pulling Of The Single Crystal
App 20180363163 - SCHROECK; Thomas ; et al. | 2018-12-20 |
Monocrystalline Semiconductor Wafer And Method For Producing A Semiconductor Wafer
App 20180342383 - ROETTGER; Klaus ; et al. | 2018-11-29 |
Ultrasonic cleaning method
Grant 10,137,483 - Mori , et al. November 27, 2 | 2018-11-27 |
Cleaning method of semiconductor wafer
Grant 10,121,649 - Haibara November 6, 2 | 2018-11-06 |
Method of supporting a growing single crystal during crystallization of the single crystal according to the FZ method
Grant 10,094,042 - Niederer , et al. October 9, 2 | 2018-10-09 |
Method For Producing A Semiconductor Wafer With Epitaxial Layer In A Deposition Chamber, Apparatus For Producing A Semiconductor Wafer With Epitaxial Layer, And Semiconductor Wafer With Epitaxial Layer
App 20180282900 - MOOS; Patrick ; et al. | 2018-10-04 |
Susceptor For Holding A Semiconductor Wafer Having An Orientation Notch, A Method For Depositing A Layer On A Semiconductor Wafer, And Semiconductor Wafer
App 20180211923 - SCHAUER; Reinhard ; et al. | 2018-07-26 |
Method For The Thermal Treatment Of Granular Material Composed Of Silicon, Granular Material Composed Of Silicon, And Method For Producing A Monocrystal Composed Of Silicon
App 20180194633 - BRENNINGER; Georg | 2018-07-12 |
Screen Plate For Screening Plants For Mechanical Classification Of Polysilicon
App 20180185882 - BERGMANN; Andreas ; et al. | 2018-07-05 |
Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
Grant 9,991,208 - Schauer , et al. June 5, 2 | 2018-06-05 |
Method for pulling a single crystal composed of silicon from a melt contained in a crucible, and single crystal produced thereby
Grant 9,988,739 - Gmeilbauer , et al. June 5, 2 | 2018-06-05 |
Method for growing a single crystal by crystallizing the single crystal from a float zone
Grant 9,932,691 - Raming , et al. April 3, 2 | 2018-04-03 |
Device for producing a monocrystal by crystallizing said monocrystal in a melting area
Grant 9,932,690 - Raming , et al. April 3, 2 | 2018-04-03 |
Semiconductor wafer and a method for producing the semiconductor wafer
Grant 9,923,050 - Thapa , et al. March 20, 2 | 2018-03-20 |
Epitaxially Coated Semiconductor Wafer, And Method For Producing An Epitaxially Coated Semiconductor Wafer
App 20180047586 - MUELLER; Timo ; et al. | 2018-02-15 |
Semiconductor Wafer Comprising A Monocrystalline Group-iiia Nitride Layer
App 20170372888 - THAPA; Sarad Bahadur ; et al. | 2017-12-28 |
Method for monitoring the operational state of a surface inspection system for detecting defects on the surface of semiconductor wafers
Grant 9,835,567 - Laube December 5, 2 | 2017-12-05 |
Apparatus and process for producing a crystal of semiconductor material
Grant 9,828,693 - Brenninger , et al. November 28, 2 | 2017-11-28 |
Apparatus and process for producing a single crystal of silicon
Grant 9,828,692 - Brenninger , et al. November 28, 2 | 2017-11-28 |
Ultrasonic cleaning method and ultrasonic cleaning apparatus
Grant 9,773,688 - Haibara , et al. September 26, 2 | 2017-09-26 |
Method for manufacturing single-crystal silicon
Grant 9,702,055 - Kato , et al. July 11, 2 | 2017-07-11 |
Method For Depositing A Layer On A Semiconductor Wafer By Vapor Deposition In A Process Chamber
App 20170194137 - Aarts; Wilhelmus ; et al. | 2017-07-06 |
Epitaxial wafer and a method of manufacturing thereof
Grant 9,691,632 - Storck , et al. June 27, 2 | 2017-06-27 |
Method for recharging raw material polycrystalline silicon
Grant 9,670,593 - Kato , et al. June 6, 2 | 2017-06-06 |
Ultrasonic cleaning method
Grant 9,662,687 - Mori , et al. May 30, 2 | 2017-05-30 |
Method for slicing wafers from a workpiece by means of a wire saw
Grant 9,662,804 - Wiesner , et al. May 30, 2 | 2017-05-30 |
Susceptor For Holding A Semiconductor Wafer Having An Orientation Notch, A Method For Depositing A Layer On A Semiconductor Wafer, And Semiconductor Wafer
App 20170117228 - SCHAUER; Reinhard ; et al. | 2017-04-27 |
Method for manufacturing single-crystal silicon
Grant 9,611,566 - Kato , et al. April 4, 2 | 2017-04-04 |
Method for slicing wafers from a workpiece using a sawing wire
Grant 9,579,826 - Reinhardt February 28, 2 | 2017-02-28 |
Method for simultaneously cutting a multiplicity of slices of particularly uniform thickness from a workpiece
Grant 9,573,296 - Pietsch February 21, 2 | 2017-02-21 |
Carrier, method for coating a carrier, and method for the simultaneous double-side material-removing machining of semiconductor wafers
Grant 9,539,695 - Pietsch , et al. January 10, 2 | 2017-01-10 |
Method for the local polishing of a semiconductor wafer
Grant 9,533,394 - Schwandner January 3, 2 | 2017-01-03 |
Ultrasonic cleaning method and ultrasonic cleaning apparatus
Grant 9,457,385 - Mori , et al. October 4, 2 | 2016-10-04 |
Semiconductor wafer composed of monocrystalline silicon and method for producing it
Grant 9,458,554 - Mueller , et al. October 4, 2 | 2016-10-04 |
Method for resuming a wire sawing process of a workpiece after an unplanned interruption
Grant 9,427,888 - Wiesner August 30, 2 | 2016-08-30 |
Method and apparatus for producing a single crystal
Grant 9,422,634 - Raming , et al. August 23, 2 | 2016-08-23 |
Ultrasonic Cleaning Method
App 20160236242 - Mori; Yoshihiro ; et al. | 2016-08-18 |
A Semiconductor Wafer And A Method For Producing The Semiconductor Wafer
App 20160233293 - THAPA; Sarad Bahadur ; et al. | 2016-08-11 |
Method for producing a semiconductor wafer composed of silicon with an epitaxially deposited layer
Grant 9,410,265 - Hager , et al. August 9, 2 | 2016-08-09 |
Method for producing a silicon single crystal
Grant 9,410,262 - Lobmeyer , et al. August 9, 2 | 2016-08-09 |
Method For Dressing Polishing Pads
App 20160199964 - Dutschke; Vladimir ; et al. | 2016-07-14 |
Method For Growing A Single Crystal By Crystallizing The Single Crystal From A Float Zone
App 20160177469 - RAMING; Georg ; et al. | 2016-06-23 |
Apparatus and method for simultaneously slicing a multiplicity of slices from a workpiece
Grant 9,346,188 - Pietsch May 24, 2 | 2016-05-24 |
Method for controlling the diameter of a single crystal to a set point diameter
Grant 9,340,897 - Schroeck May 17, 2 | 2016-05-17 |
Method for simultaneously cutting a multiplicity of wafers from a workpiece
Grant 9,333,673 - Pietsch May 10, 2 | 2016-05-10 |
Method for the double-side polishing of a semiconductor wafer
Grant 9,308,619 - Schwandner April 12, 2 | 2016-04-12 |
Silicon single crystal substrate and method of manufacturing the same
Grant 9,303,332 - Nakai , et al. April 5, 2 | 2016-04-05 |
Method for conditioning polishing pads for the simultaneous double-side polishing of semiconductor wafers
Grant 9,296,087 - Staudhammer March 29, 2 | 2016-03-29 |
Method Of Supporting A Growing Single Crystal During Crystallization Of The Single Crystal According To The FZ Method
App 20160060786 - Niederer; Kurt ; et al. | 2016-03-03 |
Ultrasonic Cleaning Method
App 20160052025 - Mori; Yoshihiro ; et al. | 2016-02-25 |
Semiconductor Wafer Composed Of Monocrystalline Silicon And Method For Producing It
App 20160053405 - Mueller; Timo ; et al. | 2016-02-25 |
Method For Monitoring The Operational State Of A Surface Inspection System For Detecting Defects On The Surface Of Semiconductor Wafers
App 20160041107 - LAUBE; Frank | 2016-02-11 |
Ring-shaped resistance heater for supplying heat to a growing single crystal
Grant 9,249,525 - Knerer , et al. February 2, 2 | 2016-02-02 |
Method for producing an epitaxially coated semiconductor wafer
Grant 9,240,316 - Schauer , et al. January 19, 2 | 2016-01-19 |
Semiconductor wafer composed of silicon and method for producing same
Grant 9,230,798 - Mueller , et al. January 5, 2 | 2016-01-05 |
Process for cleaning, drying and hydrophilizing a semiconductor wafer
Grant 9,230,794 - Schwab , et al. January 5, 2 | 2016-01-05 |
Method for polishing semiconductor wafers by means of simultaneous double-side polishing
Grant 9,221,149 - Baumann , et al. December 29, 2 | 2015-12-29 |
Method for polishing both sides of a semiconductor wafer
Grant 9,224,613 - Schwandner December 29, 2 | 2015-12-29 |
Apparatus And Process For Producing A Crystal Of Semiconductor Material
App 20150354087 - BRENNINGER; Georg ; et al. | 2015-12-10 |
Device and method for buffer-storing a multiplicity of wafer-type workpieces
Grant 9,199,791 - Pietsch December 1, 2 | 2015-12-01 |
Method for polishing a semiconductor material wafer
Grant 9,193,026 - Schwandner November 24, 2 | 2015-11-24 |
Semiconductor Wafer Composed Of Silicon And Method For Producing Same
App 20150325433 - MUELLER; Timo ; et al. | 2015-11-12 |
Method For Simultaneously Cutting A Multiplicity Of Slices Of Particularly Uniform Thickness From A Workpiece
App 20150314484 - Pietsch; Georg | 2015-11-05 |
Method for simultaneously slicing a multiplicity of wafers from a cylindrical workpiece
Grant 9,174,361 - Blank November 3, 2 | 2015-11-03 |
Epitaxial Wafer And A Method Of Manufacturing Thereof
App 20150303071 - STORCK; Peter ; et al. | 2015-10-22 |
Apparatus And Process For Producing A Single Crystal Of Silicon
App 20150292109 - BRENNINGER; Georg ; et al. | 2015-10-15 |
Method For Drying Wafer Substrates And Wafer Holder For Conduction Of The Method
App 20150294883 - Kuehnstetter; Albert ; et al. | 2015-10-15 |
Method For Slicing Wafers From A Workpiece Using A Sawing Wire
App 20150283727 - Reinhardt; Claudia | 2015-10-08 |
Device for depositing a layer on a semiconductor wafer by means of vapour deposition
Grant 9,153,472 - Brenninger October 6, 2 | 2015-10-06 |
Semiconductor wafer with a layer of Al.sub.zGa.sub.1-zN and process for producing it
Grant 9,147,726 - Thapa , et al. September 29, 2 | 2015-09-29 |
Device For Producing A Monocrystal By Crystallizing Said Monocrystal In A Melting Area
App 20150203987 - Raming; Georg ; et al. | 2015-07-23 |
Induction heating coil and method for melting granules composed of semiconductor material
Grant 9,084,296 - Altmannshofer , et al. July 14, 2 | 2015-07-14 |
Method for cutting workpiece with wire saw
Grant 9,073,235 - Tagami , et al. July 7, 2 | 2015-07-07 |
Method for slicing wafers from a workpiece
Grant 9,073,135 - Huber , et al. July 7, 2 | 2015-07-07 |
Method For Slicing Wafers From A Workpiece By Means Of A Wire Saw
App 20150158203 - Wiesner; Peter ; et al. | 2015-06-11 |
Silicon single crystal production method
Grant 9,051,661 - Kyufu June 9, 2 | 2015-06-09 |
Method and apparatus for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber
Grant 9,018,021 - Brenninger April 28, 2 | 2015-04-28 |
Method and apparatus for trimming the working layers of a double-side grinding apparatus
Grant 9,011,209 - Pietsch , et al. April 21, 2 | 2015-04-21 |
Silicon wafer and method for producing it
Grant 9,005,563 - von Ammon , et al. April 14, 2 | 2015-04-14 |
Graphite crucible and silicon single crystal manufacturing apparatus
Grant 8,992,682 - Kato , et al. March 31, 2 | 2015-03-31 |
Method For Simultaneously Cutting A Multiplicity Of Wafers From A Workpiece
App 20150083104 - Pietsch; Georg | 2015-03-26 |
Method for trimming the working layers of a double-side grinding apparatus
Grant 8,986,070 - Pietsch , et al. March 24, 2 | 2015-03-24 |
Insert carrier and method for the simultaneous double-side material-removing processing of semiconductor wafers
Grant 8,974,267 - Pietsch , et al. March 10, 2 | 2015-03-10 |
Method for cooling a workpiece made of semiconductor material during wire sawing
Grant 8,968,054 - Wiesner , et al. March 3, 2 | 2015-03-03 |
Device For Depositing A Layer On A Semiconductor Wafer By Means Of Vapour Deposition
App 20150056787 - Brenninger; Georg | 2015-02-26 |
Method of manufacturing silicon single crystal, silicon single crystal, and wafer
Grant 8,961,685 - Nakai , et al. February 24, 2 | 2015-02-24 |
Method For Manufacturing Single-crystal Silicon
App 20150040820 - Kato; Hideo ; et al. | 2015-02-12 |
Method For The Double-side Polishing Of A Semiconductor Wafer
App 20140370786 - Schwandner; Juergen | 2014-12-18 |
Method for trimming the working layers of a double-side grinding apparatus
Grant 8,911,281 - Pietsch , et al. December 16, 2 | 2014-12-16 |
Method For Controlling The Diameter Of A Single Crystal To A Set Point Diameter
App 20140360425 - SCHROECK; Thomas | 2014-12-11 |
Method for pulling a single crystal composed of silicon with a section having a diameter that remains constant
Grant 8,906,157 - Schroeck , et al. December 9, 2 | 2014-12-09 |
Method for polishing a semiconductor wafer
Grant 8,882,565 - Schwandner , et al. November 11, 2 | 2014-11-11 |
Silicon wafer and method of manufacturing the same
Grant RE45,238 - Fukuda , et al. November 11, 2 | 2014-11-11 |
Method For Manufacturing Single-crystal Silicon
App 20140326173 - Kato; Hideo ; et al. | 2014-11-06 |
P-type silicon single crystal and method of manufacturing the same
Grant 8,872,307 - Nakai October 28, 2 | 2014-10-28 |
Method For Polishing Semiconductor Wafers By Means Of Simultaneous Double-side Polishing
App 20140308878 - Baumann; Rainer ; et al. | 2014-10-16 |
Method for the simultaneous double-side material-removing processing of at least three workpieces
Grant 8,851,958 - Pietsch October 7, 2 | 2014-10-07 |
Method for slicing a multiplicity of wafers from a crystal composed of semiconductor material
Grant 8,844,511 - Kaeser , et al. September 30, 2 | 2014-09-30 |
Method For Polishing A Semiconductor Material Wafer
App 20140287656 - Schwandner; Juergen | 2014-09-25 |
Semiconductor Wafer With A LayerOf AlzGa1-zN and Process For Producing It
App 20140264776 - Thapa; Sarad Bahadur ; et al. | 2014-09-18 |
Method for producing a single crystal composed of silicon by remelting granules
Grant 8,834,627 - von Ammon , et al. September 16, 2 | 2014-09-16 |
Method of manufacturing annealed wafer
Grant 8,835,284 - Nakai , et al. September 16, 2 | 2014-09-16 |
Semiconductor layer structure comprising a cavity layer and method for fabricating the semiconductor layer structure
Grant 8,829,532 - Murphy , et al. September 9, 2 | 2014-09-09 |
Method For Conditioning Polishing Pads For The Simultaneous Double-side Polishing Of Semiconductor Wafers
App 20140235143 - Staudhammer; Johannes | 2014-08-21 |
Method for the simultaneous material-removing processing of both sides of at least three semiconductor wafers
Grant 8,801,500 - Pietsch August 12, 2 | 2014-08-12 |
Method for providing a respective flat working layer on each of the two working disks of a double-side processing apparatus
Grant 8,795,776 - Pietsch August 5, 2 | 2014-08-05 |
Method For Polishing A Semiconductor Wafer
App 20140206261 - Roettger; Klaus ; et al. | 2014-07-24 |
Dissolved nitrogen concentration monitoring method, substrate cleaning method, and substrate cleaning apparatus
Grant 8,778,085 - Haibara , et al. July 15, 2 | 2014-07-15 |
Method for polishing a semiconductor wafer
Grant RE44,986 - Zapilko , et al. July 1, 2 | 2014-07-01 |
Method for producing a multiplicity of semiconductor wafers by processing a single crystal
Grant 8,758,537 - Oelkrug , et al. June 24, 2 | 2014-06-24 |
Method for pulling a silicon single crystal
Grant 8,758,506 - Baer June 24, 2 | 2014-06-24 |
Method And Apparatus For Trimming The Working Layers Of A Double-side Grinding Apparatus
App 20140170939 - Pietsch; Georg ; et al. | 2014-06-19 |
Method And Apparatus For Trimming The Working Layers Of A Double-side Grinding Apparatus
App 20140170942 - Pietsch; Georg ; et al. | 2014-06-19 |
Method for slicing wafers from a workpiece
Grant 8,746,227 - Huber , et al. June 10, 2 | 2014-06-10 |
Method For Resuming A Wire Sawing Process Of A Workpiece After An Unplanned Interruption
App 20140144420 - Wiesner; Peter | 2014-05-29 |
Process For Polishing A Semiconductor Wafer, Comprising The Simultaneous Polishing Of A Front Side And Of A Reverse Side Of A Substrate Wafer
App 20140141613 - Heilmaier; Alexander ; et al. | 2014-05-22 |
Method for the double-side polishing of a semiconductor wafer
Grant 8,721,390 - Schwandner , et al. May 13, 2 | 2014-05-13 |
Methods for producing epitaxially coated silicon wafers
Grant 8,709,156 - Haberecht April 29, 2 | 2014-04-29 |
Crystal pulling apparatus and method for the production of heavy crystals
Grant 8,691,009 - Altekruger , et al. April 8, 2 | 2014-04-08 |
Method for producing a semiconductor wafer
Grant 8,685,270 - Schwandner , et al. April 1, 2 | 2014-04-01 |
Method and an apparatus for growing a silicon single crystal from a melt
Grant 8,679,251 - Filar March 25, 2 | 2014-03-25 |
Method For Producing A Silicon Single Crystal
App 20140060421 - Lobmeyer; Josef ; et al. | 2014-03-06 |
Layered Semiconductor Substrate And Method For Manufacturing It
App 20140048848 - Storck; Peter ; et al. | 2014-02-20 |
Semiconductor Wafer Composed Of Monocrystalline Silicon And Method For Producing It
App 20140044945 - Mueller; Timo ; et al. | 2014-02-13 |
Method for polishing a substrate composed of semiconductor material
Grant 8,647,985 - Schwandner , et al. February 11, 2 | 2014-02-11 |
Method for polishing a semiconductor wafer
Grant 8,647,173 - Schwandner , et al. February 11, 2 | 2014-02-11 |
Method for producing semiconductor wafers composed of silicon with reduced pinholes
Grant 8,628,613 - Weber , et al. January 14, 2 | 2014-01-14 |
Method For Simultaneously Slicing A Multiplicity Of Wafers From A Cylindrical Workpiece
App 20130333682 - Blank; Albert | 2013-12-19 |
Ultrasonic Cleaning Method And Ultrasonic Cleaning Apparatus
App 20130312785 - Haibara; Teruo ; et al. | 2013-11-28 |
Ultrasonic Cleaning Method And Ultrasonic Cleaning Apparatus
App 20130312788 - Kubo; Etsuko ; et al. | 2013-11-28 |
Ultrasonic Cleaning Method And Ultrasonic Cleaning Apparatus
App 20130312789 - Uchibe; Masashi ; et al. | 2013-11-28 |
Ultrasonic Cleaning Method And Ultrasonic Cleaning Apparatus
App 20130312786 - Mori; Yoshihiro ; et al. | 2013-11-28 |
Method for producing a single crystal of semiconductor material
Grant 8,580,033 - von Ammon , et al. November 12, 2 | 2013-11-12 |
Method for the treatment of a semiconductor wafer
Grant 8,580,046 - Schwab , et al. November 12, 2 | 2013-11-12 |
Cleaning apparatus, measurement method and calibration method
Grant 8,575,571 - Haibara , et al. November 5, 2 | 2013-11-05 |
Method Of Manufacturing Silicon Single Crystal, Silicon Single Crystal, And Wafer
App 20130277809 - Nakai; Katsuhiko ; et al. | 2013-10-24 |
Method Of Manufacturing Annealed Wafer
App 20130273719 - Nakai; Katsuhiko ; et al. | 2013-10-17 |
Dissolved Nitrogen Concentration Monitoring Method, Substrate Cleaning Method, And Substrate Cleaning Apparatus
App 20130263887 - Haibara; Teruo ; et al. | 2013-10-10 |
Method for producing an epitaxially coated semiconductor wafer
Grant 8,551,870 - Schwandner , et al. October 8, 2 | 2013-10-08 |
Annealed wafer and manufacturing method of annealed wafer
Grant 8,545,622 - Nakai , et al. October 1, 2 | 2013-10-01 |
Method for producing a semiconductor wafer
Grant 8,529,315 - Schwandner , et al. September 10, 2 | 2013-09-10 |
Silicon wafer and method for producing the same
Grant 8,524,001 - Nakai , et al. September 3, 2 | 2013-09-03 |
Silicon wafer and method for producing the same
Grant 8,524,002 - Nakai , et al. September 3, 2 | 2013-09-03 |
Method And An Apparatus For Growing A Silicon Single Crystal From A Melt
App 20130220216 - Filar; Piotr | 2013-08-29 |
Method for the simultaneous double-sided material removal processing of a plurality of semiconductor wafers
Grant 8,512,099 - Kerstan , et al. August 20, 2 | 2013-08-20 |
Apparatus And Method For Simultaneously Slicing A Multiplicity Of Slices From A Workpiece
App 20130206126 - Pietsch; Georg | 2013-08-15 |
Method for grinding a semiconductor wafer
Grant 8,501,028 - Schwandner August 6, 2 | 2013-08-06 |
Method for polishing a semiconductor wafer
Grant 8,500,516 - Schwandner August 6, 2 | 2013-08-06 |
Method For Producing A Single Crystal Of Semiconductor Material
App 20130192518 - von Ammon; Wilfried ; et al. | 2013-08-01 |
Cleaning Method
App 20130192627 - Kubo; Etsuko ; et al. | 2013-08-01 |
Cleaning Apparatus, Equipment, And Method
App 20130192628 - Mori; Yoshihiro ; et al. | 2013-08-01 |
Method For Polishing A Semiconductor Wafer
App 20130189904 - Schwandner; Juergen ; et al. | 2013-07-25 |
Method for the production of a semiconductor structure
Grant 8,492,243 - Haeberlen , et al. July 23, 2 | 2013-07-23 |
Method for producing a single crystal of semiconductor material
Grant 8,475,592 - Ammon , et al. July 2, 2 | 2013-07-02 |
Ultrasonic Cleaning Method
App 20130160791 - Haibara; Teruo ; et al. | 2013-06-27 |
Silicon Single Crystal Substrate and Method Of Manufacturing The Same
App 20130161793 - Nakai; Katsuhiko ; et al. | 2013-06-27 |
Method and Apparatus For Producing A Single Crystal
App 20130160698 - Raming; Georg ; et al. | 2013-06-27 |
Device for pulling a single crystal
Grant 8,470,093 - Muehe , et al. June 25, 2 | 2013-06-25 |
Polishing Pad and Method For Polishing A Semiconductor Wafer
App 20130157543 - Schwandner; Juergen ; et al. | 2013-06-20 |
Support ring for supporting a semiconductor wafer composed of monocrystalline silicon during a thermal treatment, method for the thermal treatment of such a semiconductor wafer, and thermally treated semiconductor wafer composed of monocrystalline silicon
Grant 8,460,465 - Daub , et al. June 11, 2 | 2013-06-11 |
Method and an apparatus for growing a silicon single crystal from a melt
Grant 8,460,462 - Filar June 11, 2 | 2013-06-11 |
Method for producing a single crystal composed of silicon using molten granules
Grant 8,454,746 - von Ammon , et al. June 4, 2 | 2013-06-04 |
Semiconductor wafer with an epitaxially deposited layer, and process for producing the semiconductor wafer
Grant 8,449,675 - Krautbauer , et al. May 28, 2 | 2013-05-28 |
Cleaning Apparatus, Measurement Method And Calibration Method
App 20130112900 - Haibara; Teruo ; et al. | 2013-05-09 |
P-Type Silicon Single Crystal and Method Of Manufacturing The Same
App 20130093058 - Nakai; Katsuhiko | 2013-04-18 |
Method and Apparatus For Depositing A Layer On A Semiconductor Wafer by Vapor Deposition In A Process Chamber
App 20130078743 - Brenninger; Georg | 2013-03-28 |
Method For The Simultaneous Double-side Material-removing Processing Of At Least Three Workpieces
App 20130072093 - Pietsch; Georg | 2013-03-21 |
Method For The Double-side Polishing Of A Semiconductor Wafer
App 20130072091 - Schwandner; Juergen | 2013-03-21 |
Method For The Treatment Of A Semiconductor Wafer
App 20130068262 - Schwab; Guenter ; et al. | 2013-03-21 |
Single-layered Winding Of Sawing Wire With Fixedly Bonded Abrasive Grain For Wire Saws For Slicing Wafers From A Workpiece
App 20130061842 - Junge; Joachim ; et al. | 2013-03-14 |
Ring-Shaped Resistance Heater For Supplying Heat To A Growing Single Crystal
App 20130014695 - Knerer; Dieter ; et al. | 2013-01-17 |
Device and Method For Buffer-Storing A Multiplicity of Wafer-Type Workpieces
App 20130011227 - Pietsch; Georg | 2013-01-10 |
Method For Producing Semiconductor Wafers Composed Of Silicon Having A Diameter Of At Least 450 mm, and Semiconductor Wafer Composed Of Silicon Having A Diameter of 450 mm
App 20120315428 - Raming; Georg ; et al. | 2012-12-13 |
Susceptor For Supporting A Semiconductor Wafer And Method For Depositing A Layer On A Front Side Of A Semiconductor Wafer
App 20120270407 - Werner; Norbert ; et al. | 2012-10-25 |
Method and Apparatus For Depositing A Material Layer Originating From Process Gas On A Substrate Wafer
App 20120263875 - Brenninger; Georg ; et al. | 2012-10-18 |
Method For Cutting Workpiece With Wire Saw
App 20120255535 - Tagami; Makoto ; et al. | 2012-10-11 |
Process Module for the Inline-Treatment of Substrates
App 20120248068 - Schienle; Frank ; et al. | 2012-10-04 |
Method For Slicing Wafers From A Workpiece
App 20120240915 - Huber; Anton ; et al. | 2012-09-27 |
Method For Slicing Wafers From A Workpiece
App 20120240914 - Huber; Anton ; et al. | 2012-09-27 |
Insert Carrier And Method For The Simultaneous Double-side Material-removing Processing Of Semiconductor Wafers
App 20120190277 - Pietsch; Georg ; et al. | 2012-07-26 |
Method For Providing A Respective Flat Working Layer On Each Of The Two Working Disks Of A Double-side Processing Apparatus
App 20120189777 - Pietsch; Georg | 2012-07-26 |
Method For Cooling A Workpiece Made Of Semiconductor Material During Wire Sawing
App 20120178346 - Wiesner; Peter ; et al. | 2012-07-12 |
Method For Producing Silicon Single Crystal Ingot
App 20120160154 - Kato; Hideo ; et al. | 2012-06-28 |
Method For Recharging Raw Material Polycrystalline Silicon
App 20120160156 - Kato; Hideo ; et al. | 2012-06-28 |
Method For Cleaning A Semiconductor Wafer Composed Of Silicon Directly After A Process Of Polishing Of The Semiconductor Wafer
App 20120152278 - Lanz; Reinhold | 2012-06-21 |
Method For The Simultaneous Material-removing Processing Of Both Sides Of At Least Three Semiconductor Wafers
App 20120156970 - Pietsch; Georg | 2012-06-21 |
Method For Producing A Semiconductor Wafer
App 20120149198 - Schwandner; Juergen | 2012-06-14 |
Support Ring For Supporting A Semiconductor Wafer Composed Of Monocrystalline Silicon During A Thermal Treatment, Method For The Thermal Treatment of Such A Semiconductor Wafer, and Thermally Treated Semiconductor Wafer Composed of Monocrystalline Silicon
App 20120098100 - Daub; Erich ; et al. | 2012-04-26 |
Silicon Wafer and Method For Producing It
App 20120039786 - von Ammon; Wilfried ; et al. | 2012-02-16 |
Silicon Wafer And Production Method Thereof
App 20120032229 - Deai; Hiroyuki ; et al. | 2012-02-09 |
Silicon Single Crystal Production Method
App 20120031323 - Kyufu; Shinichi | 2012-02-09 |
Method And Apparatus For Trimming The Working Layers Of A Double-side Grinding Apparatus
App 20120028546 - Pietsch; Georg ; et al. | 2012-02-02 |
Monocrystalline Semiconductor Wafer Comprising Defect-Reduced Regions and Method For Producing It
App 20110318546A1 - | 2011-12-29 |
Method For The Local Polishing Of A Semiconductor Wafer
App 20100330883A1 - | 2010-12-30 |
Method For Producing A Semiconductor Wafer
App 20100327414A1 - | 2010-12-30 |
Method For The Double Sided Polishing Of A Semiconductor Wafer
App 20100330881A1 - | 2010-12-30 |
Method For Producing An Epitaxially Coated Semiconductor Wafer
App 20100330786A1 - | 2010-12-30 |
Polishing Pad and Method For Polishing A Semiconductor Wafer
App 20100330882A1 - | 2010-12-30 |
Method For Polishing The Edge Of A Semiconductor Wafer
App 20100330885A1 - | 2010-12-30 |
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