Pore; Viljami

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pore; Viljami.The latest application filed is for "methods and systems for filling a gap".

Company Profile

30.48.61

Pore; Viljami - Helsinki FI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods And Systems For Filling A Gap App 20220293463 - Vervuurt; Rene Henricus Jozef ; et al.	2022-09-15
Methods And Systems For Filling A Gap App 20220285211 - Farm; Elina ; et al.	2022-09-08
Cyclical Deposition Method And Apparatus For Filling A Recess Formed Within A Substrate Surface App 20220270917 - Liu; Zecheng ; et al.	2022-08-25
Methods And Systems For Depositing A Layer App 20220235460 - Tuominen; Marko ; et al.	2022-07-28
Deposition of SiN Grant 11,367,613 - Chen , et al. June 21, 2	2022-06-21
Silicon Precursors For Silicon Nitride Deposition App 20220181148 - Dezelah; Charles ; et al.	2022-06-09
Methods For Filling A Gap And Related Systems And Devices App 20220165569 - Liu; Zecheng ; et al.	2022-05-26
Methods For Filling A Gap And Related Systems And Devices App 20220165615 - Liu; Zecheng ; et al.	2022-05-26
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface Grant 11,342,216 - Liu , et al. May 24, 2	2022-05-24
Deposition Method And An Apparatus For Depositing A Silicon-containing Material App 20220108915 - Liu; Zecheng ; et al.	2022-04-07
Method And Apparatus For Filling A Recess Formed Within A Substrate Surface App 20220102195 - Pore; Viljami ; et al.	2022-03-31
Si precursors for deposition of SiN at low temperatures Grant 11,289,327 - Niskanen , et al. March 29, 2	2022-03-29
Methods For Depositing Gap Filing Fluids And Related Systems And Devices App 20220076996 - Blanquart; Timothee ; et al.	2022-03-10
Selective Peald Of Oxide On Dielectric App 20220076949 - Tois; Eva ; et al.	2022-03-10
Method and apparatus for filling a recess formed within a substrate surface Grant 11,227,789 - Pore , et al. January 18, 2	2022-01-18
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20210347795 - Pore; Viljami ; et al.	2021-11-11
Selective PEALD of oxide on dielectric Grant 11,170,993 - Tois , et al. November 9, 2	2021-11-09
Method And Apparatus For Filling A Gap App 20210335595 - Pore; Viljami ; et al.	2021-10-28
Method And Apparatus For Filling A Gap App 20210313167 - PORE; Viljami ; et al.	2021-10-07
Method and apparatus for filling a gap Grant 11,107,676 - Pore , et al. August 31, 2	2021-08-31
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 11,072,622 - Pore , et al. July 27, 2	2021-07-27
Si precursors for deposition of SiN at low temperatures Grant 11,069,522 - Niskanen , et al. July 20, 2	2021-07-20
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20210164101 - Pore; Viljami ; et al.	2021-06-03
Uniform deposition of SiOC on dielectric and metal surfaces Grant 10,991,573 - Jia , et al. April 27, 2	2021-04-27
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20210082684 - Niskanen; Antti J. ; et al.	2021-03-18
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 10,941,487 - Pore , et al. March 9, 2	2021-03-09
Selective layer formation using deposition and removing Grant 10,872,765 - Tois , et al. December 22, 2	2020-12-22
Deposition of SiN App 20200365392 - Chen; Shang ; et al.	2020-11-19
Atomic layer deposition of silicon carbon nitride based material Grant 10,818,489 - Pore October 27, 2	2020-10-27
Deposition of boron and carbon containing materials Grant 10,790,137 - Pore September 29, 2	2020-09-29
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20200291518 - Pore; Viljami ; et al.	2020-09-17
Cyclical Deposition Method And Apparatus For Filling A Recess Formed Within A Substrate Surface App 20200266097 - Liu; Zecheng ; et al.	2020-08-20
Method And Apparatus For Filling A Recess Formed Within A Substrate Surface App 20200266098 - Pore; Viljami ; et al.	2020-08-20
Method and apparatus for filling a gap Grant 10,741,385 - Pore , et al. A	2020-08-11
Deposition of SiN Grant 10,741,386 - Chen , et al. A	2020-08-11
Method And Apparatus For Filling A Gap App 20200227250 - Pore; Viljami ; et al.	2020-07-16
Atomic Layer Deposition Of Silicon Carbon Nitride Based Material App 20200126788 - Pore; Viljami	2020-04-23
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 10,619,244 - Pore , et al.	2020-04-14
Selective Peald Of Oxide On Dielectric App 20200066512 - Tois; Eva ; et al.	2020-02-27
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20200013611 - Niskanen; Antti J. ; et al.	2020-01-09
Atomic layer deposition of silicon carbon nitride based materials Grant 10,515,794 - Pore Dec	2019-12-24
Deposition Of Boron And Carbon Containing Materials App 20190378709 - Pore; Viljami	2019-12-12
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20190371594 - Niskanen; Antti J. ; et al.	2019-12-05
Selective Layer Formation Using Deposition And Removing App 20190341245 - Tois; Eva ; et al.	2019-11-07
Method And Apparatus For Filling A Gap App 20190295837 - Pore; Viljami ; et al.	2019-09-26
Deposition of SiN App 20190295838 - Chen; Shang ; et al.	2019-09-26
Si precursors for deposition of SiN at low temperatures Grant 10,424,477 - Niskanen , et al. Sept	2019-09-24
Atomic Layer Deposition Of Silicon Carbon Nitride Based Materials App 20190279866 - Pore; Viljami	2019-09-12
Deposition of boron and carbon containing materials Grant 10,410,856 - Pore Sept	2019-09-10
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20190263848 - Pore; Viljami ; et al.	2019-08-29
Si precursors for deposition of SiN at low temperatures Grant 10,395,917 - Niskanen , et al. A	2019-08-27
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20190177843 - Pore; Viljami ; et al.	2019-06-13
UNIFORM DEPOSITION OF SiOC ON DIELECTRIC AND METAL SURFACES App 20190172701 - Jia; Lingyun ; et al.	2019-06-06
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 10,308,673 - Pore , et al.	2019-06-04
Deposition of SiN Grant 10,262,854 - Chen , et al.	2019-04-16
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 10,208,379 - Pore , et al. Feb	2019-02-19
Atomic layer deposition of silicon carbon nitride based materials Grant 10,199,211 - Pore Fe	2019-02-05
Method and apparatus for filling a gap Grant 10,177,025 - Pore J	2019-01-08
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20180366314 - Niskanen; Antti J. ; et al.	2018-12-20
Deposition Of Boron And Carbon Containing Materials App 20180330939 - Pore; Viljami	2018-11-15
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20180151344 - Niskanen; Antti J. ; et al.	2018-05-31
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20180087154 - Pore; Viljami ; et al.	2018-03-29
Atomic Layer Deposition Of Silicon Carbon Nitride Based Materials App 20180082838 - Pore; Viljami	2018-03-22
Deposition of boron and carbon containing materials Grant 9,922,817 - Pore March 20, 2	2018-03-20
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20180072764 - Pore; Viljami ; et al.	2018-03-15
Deposition of SiN App 20180068844 - Chen; Shang ; et al.	2018-03-08
Si precursors for deposition of SiN at low temperatures Grant 9,905,416 - Niskanen , et al. February 27, 2	2018-02-27
Method and apparatus for filling a gap Grant 9,887,082 - Pore , et al. February 6, 2	2018-02-06
Method And Apparatus For Filling A Gap App 20180033679 - Pore; Viljami	2018-02-01
Method And Apparatus For Filling A Gap App 20180033606 - Pore; Viljami ; et al.	2018-02-01
Deposition of SiN App 20170372886 - Chen; Shang ; et al.	2017-12-28
Atomic layer deposition of silicon carbon nitride based materials Grant 9,837,263 - Pore December 5, 2	2017-12-05
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 9,828,674 - Pore , et al. November 28, 2	2017-11-28
Si precursors for deposition of SiN at low temperatures Grant 9,824,881 - Niskanen , et al. November 21, 2	2017-11-21
Method and apparatus for filling a gap Grant 9,812,320 - Pore , et al. November 7, 2	2017-11-07
Deposition Of Boron And Carbon Containing Materials App 20170309471 - Pore; Viljami	2017-10-26
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 9,783,563 - Pore , et al. October 10, 2	2017-10-10
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20170133216 - Niskanen; Antti J. ; et al.	2017-05-11
Methods for forming conductive titanium oxide thin films Grant 9,646,820 - Pore , et al. May 9, 2	2017-05-09
Deposition of SiN Grant 9,576,792 - Chen , et al. February 21, 2	2017-02-21
Si precursors for deposition of SiN at low temperatures Grant 9,564,309 - Niskanen , et al. February 7, 2	2017-02-07
Deposition of boron and carbon containing materials Grant 9,543,140 - Pore January 10, 2	2017-01-10
Atomic Layer Deposition Of Silicon Carbon Nitride Based Materials App 20160307751 - Pore; Viljami	2016-10-20
Methods for increasing growth rate during atomic layer deposition of thin films Grant 9,428,842 - Pore August 30, 2	2016-08-30
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20160222515 - Pore; Viljami ; et al.	2016-08-04
Atomic layer deposition of silicon carbon nitride based materials Grant 9,401,273 - Pore July 26, 2	2016-07-26
Deposition of boron and carbon containing materials Grant 9,362,109 - Pore June 7, 2	2016-06-07
Synthesis and use of precursors for ALD of group VA element containing thin films Grant 9,315,896 - Pore , et al. April 19, 2	2016-04-19
Deposition of SiN App 20160079054 - Chen; Shang ; et al.	2016-03-17
Synthesis And Use Of Precursors For Ald Of Tellurium And Selenium Thin Films App 20160031919 - Pore; Viljami ; et al.	2016-02-04
Synthesis and use of precursors for ALD of tellurium and selenium thin films Grant 9,175,390 - Pore , et al. November 3, 2	2015-11-03
Atomic Layer Deposition Of Silicon Carbon Nitride Based Materials App 20150162185 - PORE; VILJAMI	2015-06-11
Methods For Forming Conductive Titanium Oxide Thin Films App 20150162183 - PORE; VILJAMI ; et al.	2015-06-11
Deposition Of Boron And Carbon Containing Materials App 20150104955 - Pore; Viljami	2015-04-16
Deposition Of Boron And Carbon Containing Materials App 20150104954 - Pore; Viljami	2015-04-16
Methods for forming conductive titanium oxide thin films Grant 8,945,675 - Pore , et al. February 3, 2	2015-02-03
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20140273528 - Niskanen; Antti J. ; et al.	2014-09-18
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20140273531 - Niskanen; Antti J. ; et al.	2014-09-18
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES App 20140273477 - Niskanen; Antti J. ; et al.	2014-09-18
Methods For Increasing Growth Rate Of Thin Films App 20140174342 - Pore; Viljami	2014-06-26
Methods for forming thin films comprising tellurium Grant 8,372,483 - Pore , et al. February 12, 2	2013-02-12
Synthesis And Use Of Precursors For Ald Of Group Va Element Containing Thin Films App 20120329208 - Pore; Viljami ; et al.	2012-12-27
Synthesis and Use of Precursors for ALD of Tellurium and Selenium Thin Films App 20100009078 - PORE; Viljami ; et al.	2010-01-14
Methods For Forming Thin Films Comprising Tellurium App 20090324821 - Pore; Viljami ; et al.	2009-12-31
Methods For Forming Conductive Titanium Oxide Thin Films App 20090297696 - Pore; Viljami ; et al.	2009-12-03