Kouzuma; Yutaka
Patent Applications and Registrations
Patent applications and USPTO patent grants for Kouzuma; Yutaka.The latest application filed is for "substrate processing method and plasma processing apparatus".
- Kouzuma; Yutaka - Tokyo JP
- Kouzuma; Yutaka - Kudamatsu JP
| Patent | Date |
|---|---|
| Substrate processing method and plasma processing apparatus Grant 11,276,579 - Kobayashi , et al. March 15, 2 | 2022-03-15 |
| Substrate Processing Method And Plasma Processing Apparatus App 20210366721 - KOBAYASHI; Hiroyuki ; et al. | 2021-11-25 |
| Plasma Etching Method And Plasma Processing Apparatus App 20210358760 - FUJISAKI; Sumiko ; et al. | 2021-11-18 |
| Detecting Method And Detecting Device Of Gas Components And Processing Apparatus Using Detecting Device Of Gas Components App 20210231571 - OGAWA; Yoshifumi ; et al. | 2021-07-29 |
| Ion shield plate base for semiconductor manufacturing apparatus Grant D924,824 - Kouzuma , et al. July 13, 2 | 2021-07-13 |
| Vacuum Processing Apparatus App 20210151298 - KOBAYASHI; Hiroyuki ; et al. | 2021-05-20 |
| Vacuum processing apparatus Grant 10,937,635 - Kobayashi , et al. March 2, 2 | 2021-03-02 |
| Plasma etching method and plasma etching apparatus Grant 10,872,779 - Miyoshi , et al. December 22, 2 | 2020-12-22 |
| Integrated type ion shield for semiconductor manufacturing apparatus Grant D901,407 - Kouzuma , et al. November 10, 2 | 2020-11-10 |
| Wafer processing method and wafer processing apparatus Grant 10,825,664 - Watanabe , et al. November 3, 2 | 2020-11-03 |
| Ion shield plate for semiconductor manufacturing apparatus Grant D900,760 - Kouzuma , et al. November 3, 2 | 2020-11-03 |
| Plasma Processing Method App 20200328099 - KOBAYASHI; Hiroyuki ; et al. | 2020-10-15 |
| Plasma Etching Method And Plasma Etching Apparatus App 20200006079 - MIYOSHI; Nobuya ; et al. | 2020-01-02 |
| Infrared lamp heater transmission window for semiconductor manufacturing apparatus Grant D864,885 - Kobayashi , et al. Oc | 2019-10-29 |
| Vacuum Processing Apparatus App 20190237302 - KOBAYASHI; Hiroyuki ; et al. | 2019-08-01 |
| Wafer Processing Method And Wafer Processing Apparatus App 20190198299 - WATANABE; Tomoyuki ; et al. | 2019-06-27 |
| Etching method and etching apparatus Grant 10,325,781 - Shinoda , et al. | 2019-06-18 |
| Vacuum processing apparatus Grant 10,290,472 - Kobayashi , et al. | 2019-05-14 |
| Operation method of plasma processing apparatus Grant 10,141,207 - Kouzuma , et al. Nov | 2018-11-27 |
| Plasma Processing Apparatus App 20180122665 - KOBAYASHI; Hiroyuki ; et al. | 2018-05-03 |
| Operation Method Of Plasma Processing Apparatus App 20180090345 - KOUZUMA; Yutaka ; et al. | 2018-03-29 |
| Etching Method And Etching Apparatus App 20180076051 - SHINODA; Kazunori ; et al. | 2018-03-15 |
| Vacuum Processing Apparatus App 20170229290 - KOBAYASHI; Hiroyuki ; et al. | 2017-08-10 |
| Plasma processing method and plasma processing apparatus Grant 8,282,848 - Ohmoto , et al. October 9, 2 | 2012-10-09 |
| Manufacturing method in plasma processing apparatus Grant 8,092,637 - Kouzuma , et al. January 10, 2 | 2012-01-10 |
| Plasma Processing Apparatus and Plasma Processing Method App 20090321017 - Tsubone; Tsunehiko ; et al. | 2009-12-31 |
| Manufacturing Method In Plasma Processing Apparatus App 20090218316 - KOUZUMA; Yutaka ; et al. | 2009-09-03 |
| Plasma processing method and plasma processing apparatus App 20080280451 - Ohmoto; Yutaka ; et al. | 2008-11-13 |
| Plasma Processing Apparatus And Plasma Processing Method App 20080236614 - YAKUSHIJI; Mamoru ; et al. | 2008-10-02 |
| Method And Apparatus For Plasma Processing App 20080237184 - YAKUSHIJI; MAMORU ; et al. | 2008-10-02 |
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