Infrared lamp heater transmission window for semiconductor manufacturing apparatus

Description

FIG. 1 is a front, top and right side perspective view of an infrared lamp heater transmission window for semiconductor manufacturing apparatus according to the design;

FIG. 2 is a rear, bottom and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a rear elevational view thereof;

FIG. 9 is an end view taken along line 9-9 of FIG. 3; and,

FIG. 10 is an end view taken along line 10-10 of FIG. 8.

Claims

CLAIM The ornamental design for an infrared lamp heater transmission window for semiconductor manufacturing apparatus, as shown and described.

---

Inventors:	Kobayashi; Michiaki (Tokyo, JP), Hirozane; Kazuyuki (Tokyo, JP), Harada; Akio (Tokyo, JP), Nunomura; Nobuhide (Tokyo, JP), Kouzuma; Yutaka (Tokyo, JP)
Applicant:	Name City State Country Type Hitachi High-Technologies Corporation Minato-ku, Tokyo N/A JP
Assignee:	Hitachi High-Technologies Corporation (Tokyo, JP)
Appl. No.:	D/638,440
Filed:	February 27, 2018

---

Foreign Application Priority Data

---

Nov 10, 2017 [JP]			2017-025186

Current U.S. Class:	D13/184; D26/138
Current International Class:	1303
Field of Search:	;D13/184 ;D26/1,24,74,72,36,59,118,133,134

---

References Cited [Referenced By]

---

U.S. Patent Documents

D598873	August 2009	Tseng
7806554	October 2010	Chang
D630350	January 2011	Lin
D636117	April 2011	Kim
D636118	April 2011	Kim
8220971	July 2012	Harbers
D694204	November 2013	Meyer
D700737	March 2014	Campagna
D701181	March 2014	Meyer
D705182	May 2014	Meyer
D705183	May 2014	Meyer
D728129	April 2015	Kreuzbichler
9249955	February 2016	Schroll
9627599	April 2017	Lee
9985375	May 2018	McGowan
D835304	December 2018	Hirabayashi
D847414	April 2019	Danesh
2007/0285926	December 2007	Maxik
2011/0012161	January 2011	Hung
2012/0313522	December 2012	Myojo
2015/0131301	May 2015	Ho

Primary Examiner: Hallmark; Janice
Assistant Examiner: Blackwell, II; Harold E
Attorney, Agent or Firm: Crowell & Moring LLP

Images