| Patent | Date |
|---|
Device and method for monitoring a mobile object
Grant 11,361,272 - Ferrozzi , et al. June 14, 2 | 2022-06-14 |
Micromechanical device having a decoupled micromechanical structure
Grant 10,843,917 - Zunft , et al. November 24, 2 | 2020-11-24 |
Device And Method For Monitoring A Mobile Object
App 20200327487 - FERROZZI; Roberto ; et al. | 2020-10-15 |
Exposed-die mold package for a sensor and method for encapsulating a sensor that interacts with the environment
Grant 10,717,645 - Feyh , et al. | 2020-07-21 |
Nanostructured gas sensor
Grant 10,545,108 - Samarao , et al. Ja | 2020-01-28 |
Sensor device
Grant 10,502,595 - Feyh , et al. Dec | 2019-12-10 |
Micromechanical Device Having A Decoupled Micromechanical Structure
App 20190276305 - Zunft; Steffen ; et al. | 2019-09-12 |
Membrane for a capacitive MEMS pressure sensor and method of forming a capacitive MEMS pressure sensor
Grant 10,351,420 - Feyh , et al. July 16, 2 | 2019-07-16 |
Robust inertial sensors
Grant 10,317,211 - Kim , et al. | 2019-06-11 |
Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile device
Grant 10,298,858 - Feyh , et al. | 2019-05-21 |
Li-ion battery with alumina coated porous silicon anode
Grant 10,224,540 - Samarao , et al. | 2019-03-05 |
Combined pressure and humidity sensor
Grant 10,184,910 - Lammel , et al. Ja | 2019-01-22 |
MEMS pressure sensor with multiple membrane electrodes
Grant 10,183,857 - Graham , et al. Ja | 2019-01-22 |
Trench based capacitive humidity sensor
Grant 10,175,188 - O'Brien , et al. J | 2019-01-08 |
System and method for forming a buried lower electrode in conjunction with an encapsulated MEMS device
Grant 10,160,632 - Graham , et al. Dec | 2018-12-25 |
Membrane for a Capacitive MEMS Pressure Sensor and Method of Forming a Capacitive MEMS Pressure Sensor
App 20180327257 - Feyh; Ando ; et al. | 2018-11-15 |
Sensor Device
App 20180313674 - Feyh; Ando ; et al. | 2018-11-01 |
Exposed-Die Mold Package for a Sensor and Method for Encapsulating a Sensor that Interacts with the Environment
App 20180273376 - Feyh; Ando ; et al. | 2018-09-27 |
MEMS gas chromatograph and method of forming a separator column for a MEMS gas chromatograph
Grant 10,060,888 - Feyh , et al. August 28, 2 | 2018-08-28 |
Nanostructured lanthanum oxide humidity sensor
Grant 10,036,717 - Samarao , et al. July 31, 2 | 2018-07-31 |
Anti-getter: expandable polymer microspheres for MEMS devices
Grant 10,035,699 - Samarao , et al. July 31, 2 | 2018-07-31 |
Method to modulate the sensitivity of a bolometer via negative interference
Grant 10,006,810 - Rocznik , et al. June 26, 2 | 2018-06-26 |
Resistive switching for MEMS devices
Grant 9,945,727 - Samarao , et al. April 17, 2 | 2018-04-17 |
Inertial and pressure sensors on single chip
Grant 9,908,771 - Feyh , et al. March 6, 2 | 2018-03-06 |
Titanium nitride for MEMS bolometers
Grant 9,903,763 - Samarao , et al. February 27, 2 | 2018-02-27 |
Nanostructured Gas Sensor
App 20180011043 - Samarao; Ashwin K. ; et al. | 2018-01-11 |
Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure
Grant 9,863,901 - Feyh , et al. January 9, 2 | 2018-01-09 |
Nanostructured Lanthanum Oxide Humidity Sensor
App 20170370864 - SAMARAO; Ashwin K. ; et al. | 2017-12-28 |
Anti-Getter: Expandable Polymer Microspheres for MEMS Devices
App 20170362078 - Samarao; Ashwin K. ; et al. | 2017-12-21 |
Resistive Switching for MEMS Devices
App 20170363478 - Samarao; Ashwin K. ; et al. | 2017-12-21 |
A MEMS Gas Chromatograph and Method of Forming a Separator Column for a MEMS Gas Chromatograph
App 20170363588 - Feyh; Ando ; et al. | 2017-12-21 |
Microelectromechanical sensor module and corresponding production method
Grant 9,829,357 - Pirk , et al. November 28, 2 | 2017-11-28 |
System and method for remote temperature measurements in a harsh environment
Grant 9,816,865 - Feyh , et al. November 14, 2 | 2017-11-14 |
Method To Modulate The Sensitivity Of A Bolometer Via Negative Interference
App 20170314995 - Rocznik; Thomas ; et al. | 2017-11-02 |
Micromechanical sensor device with movable gate and corresponding production method
Grant 9,764,941 - Jakovlev , et al. September 19, 2 | 2017-09-19 |
CMOS integrated moving-gate transducer with silicon as a functional layer
Grant 9,725,298 - Feyh , et al. August 8, 2 | 2017-08-08 |
CMOS bolometer
Grant 9,698,281 - Yama , et al. July 4, 2 | 2017-07-04 |
Chip level sensor with multiple degrees of freedom
Grant 9,638,524 - Feyh , et al. May 2, 2 | 2017-05-02 |
Trench Based Capacitive Humidity Sensor
App 20170082567 - O'Brien; Gary ; et al. | 2017-03-23 |
Resistive MEMS humidity sensor
Grant 9,588,073 - Feyh , et al. March 7, 2 | 2017-03-07 |
Portable device with temperature sensing
Grant 9,557,222 - Feyh , et al. January 31, 2 | 2017-01-31 |
Capacitive MEMS sensor and method
Grant 9,556,016 - Feyh January 31, 2 | 2017-01-31 |
Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture
Grant 9,517,928 - Ehrenpfordt , et al. December 13, 2 | 2016-12-13 |
MEMS device having a getter
Grant 9,511,998 - Samarao , et al. December 6, 2 | 2016-12-06 |
Robust Inertial Sensors
App 20160327392 - Kim; Bonsang ; et al. | 2016-11-10 |
Sensor with an embedded thermistor for precise local temperature measurement
Grant 9,476,779 - Graham , et al. October 25, 2 | 2016-10-25 |
MEMS infrared sensor including a plasmonic lens
Grant 9,423,303 - Samarao , et al. August 23, 2 | 2016-08-23 |
Titanium Nitride for MEMS Bolometers
App 20160223404 - Samarao; Ashwin K. ; et al. | 2016-08-04 |
Packaging system and process for inertial sensor modules using moving-gate transducers
Grant 9,400,288 - Feyh , et al. July 26, 2 | 2016-07-26 |
Li-Ion Battery with Alumina Coated Porous Silicon Anode
App 20160190564 - Samarao; Ashwin K. ; et al. | 2016-06-30 |
Serpentine IR sensor
Grant 9,368,658 - Purkl , et al. June 14, 2 | 2016-06-14 |
Mems Device Having A Getter
App 20160137493 - Samarao; Ashwin ; et al. | 2016-05-19 |
CMOS Integrated Moving-Gate Transducer with Silicon as a Functional Layer
App 20160115013 - Feyh; Ando ; et al. | 2016-04-28 |
Capacitive pressure sensor and method
Grant 9,302,906 - Feyh , et al. April 5, 2 | 2016-04-05 |
MEMS acoustic transducer with silicon nitride backplate and silicon sacrificial layer
Grant 9,266,716 - Feyh , et al. February 23, 2 | 2016-02-23 |
Micromechanical functional apparatus, particularly a loudspeaker apparatus, and appropriate method of manufacture
Grant 9,269,831 - Ehrenpfordt , et al. February 23, 2 | 2016-02-23 |
Metamaterial and method for forming a metamaterial using atomic layer deposition
Grant 9,255,328 - Purkl , et al. February 9, 2 | 2016-02-09 |
Piezoelectric based MEMS structure
Grant 9,236,555 - Chen , et al. January 12, 2 | 2016-01-12 |
MEMS infrared sensor including a plasmonic lens
Grant 9,236,522 - Samarao , et al. January 12, 2 | 2016-01-12 |
Capacitive Mems Sensor And Method
App 20150360933 - Feyh; Ando | 2015-12-17 |
Thermally shorted bolometer
Grant 9,199,838 - O'Brien , et al. December 1, 2 | 2015-12-01 |
Inertial and pressure sensors on single chip
Grant 9,194,882 - Feyh , et al. November 24, 2 | 2015-11-24 |
Micromechanical sensor apparatus having a movable gate and corresponding production method
Grant 9,166,066 - Feyh October 20, 2 | 2015-10-20 |
MEMS Acoustic Transducer with Silicon Nitride Backplate and Silicon Sacrificial Layer
App 20150274506 - Feyh; Ando ; et al. | 2015-10-01 |
Arrangement of two substrates having an SLID bond and method for producing such an arrangement
Grant 9,111,787 - Trautmann , et al. August 18, 2 | 2015-08-18 |
Piezoresistive micromechanical sensor component and corresponding measuring method
Grant 9,110,090 - Neul , et al. August 18, 2 | 2015-08-18 |
Microelectronic component and corresponding production process
Grant 9,082,882 - Schelling , et al. July 14, 2 | 2015-07-14 |
Method of manufacturing a sensor device having a porous thin-film metal electrode
Grant 9,064,800 - Feyh , et al. June 23, 2 | 2015-06-23 |
Thin-film encapsulated infrared sensor
Grant 9,064,982 - Purkl , et al. June 23, 2 | 2015-06-23 |
Semiconductor Sensor Having a Suspended Structure and Method of Forming a Semiconductor Sensor Having a Suspended Structure
App 20150160145 - Feyh; Ando ; et al. | 2015-06-11 |
Magnetic field sensor and method for producing a magnetic field sensor
Grant 9,030,198 - Schatz , et al. May 12, 2 | 2015-05-12 |
System And Method For Remote Temperature Measurements In A Harsh Environment
App 20150117490 - Feyh; Ando ; et al. | 2015-04-30 |
Metal Oxide Semiconductor Sensor and Method of Forming a Metal Oxide Semiconductor Sensor Using Atomic Layer Deposition
App 20150118111 - Samarao; Ashwin K. ; et al. | 2015-04-30 |
Thermally Shorted Bolometer
App 20150115160 - O'Brien; Gary ; et al. | 2015-04-30 |
Inertial and Pressure Sensors on Single Chip
App 20150096376 - Feyh; Ando ; et al. | 2015-04-09 |
Chip with a Micro-Electromechanical Structure and Covering Element, and a Method for the Production of Same
App 20150086050 - Feyh; Ando | 2015-03-26 |
Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
Grant 8,986,256 - Scholten , et al. March 24, 2 | 2015-03-24 |
MEMS chip package and method for manufacturing an MEMS chip package
Grant 8,981,499 - Ehrenpfordt , et al. March 17, 2 | 2015-03-17 |
Micromechanical sensor apparatus with a movable gate, and corresponding production process
Grant 8,975,669 - Jakovlev , et al. March 10, 2 | 2015-03-10 |
Inertial And Pressure Sensors On Single Chip
App 20150035093 - Feyh; Ando ; et al. | 2015-02-05 |
Micromechanical Sensor Apparatus having a Movable Gate and Corresponding Production Method
App 20140374804 - Feyh; Ando | 2014-12-25 |
Portable Device With Temperature Sensing
App 20140314120 - Feyh; Ando ; et al. | 2014-10-23 |
Mems Infrared Sensor Including A Plasmonic Lens
App 20140294043 - Samarao; Ashwin ; et al. | 2014-10-02 |
Metamaterial and Method for Forming a Metamaterial Using Atomic Layer Deposition
App 20140272333 - Purkl; Fabian ; et al. | 2014-09-18 |
Thin-film Encapsulated Infrared Sensor
App 20140248735 - Purkl; Fabian ; et al. | 2014-09-04 |
Surface Charge Mitigation Layer For Mems Sensors
App 20140239421 - Graham; Andrew ; et al. | 2014-08-28 |
Capacitive Pressure Sensor And Method
App 20140231939 - Feyh; Ando ; et al. | 2014-08-21 |
MEMS with single use valve and method of operation
Grant 8,779,533 - Feyh , et al. July 15, 2 | 2014-07-15 |
CMOS Integrated Moving-Gate Transducer with Silicon as a Functional Layer
App 20140175525 - Feyh; Ando ; et al. | 2014-06-26 |
Method of Manufacturing a Sensor Device Having a Porous Thin-Film Metal Electrode
App 20140175523 - Feyh; Ando ; et al. | 2014-06-26 |
Microelectromechanical loudspeaker array with predetermined period of time of diaphragm relaxation
Grant 8,761,418 - Feyh , et al. June 24, 2 | 2014-06-24 |
Resistive MEMS Humidity Sensor
App 20140167791 - Feyh; Ando ; et al. | 2014-06-19 |
Sensor With An Embedded Thermistor For Precise Local Temperature Measurement
App 20140169405 - Graham; Andrew ; et al. | 2014-06-19 |
Sensor and method for its production
Grant 8,749,013 - Benzel , et al. June 10, 2 | 2014-06-10 |
Methods To Combine Radiation-based Temperature Sensor And Inertial Sensor And/or Camera Output In A Handheld/mobile Device
App 20140152772 - Feyh; Ando ; et al. | 2014-06-05 |
MEMS Infrared Sensor Including a Plasmonic Lens
App 20140151834 - Samarao; Ashwin K. ; et al. | 2014-06-05 |
Packaging System And Process For Inertial Sensor Modules Using Moving-gate Transducers
App 20140150553 - Feyh; Ando ; et al. | 2014-06-05 |
MEMS Pressure Sensor Assembly with Electromagnetic Shield
App 20140150560 - O'Brien; Gary ; et al. | 2014-06-05 |
Chip Level Sensor with Multiple Degrees of Freedom
App 20140150552 - Feyh; Ando ; et al. | 2014-06-05 |
Combined Pressure And Humidity Sensor
App 20140116122 - Lammel; Gerhard ; et al. | 2014-05-01 |
Microelectronic Component and Corresponding Production Process
App 20140084349 - Schelling; Christoph ; et al. | 2014-03-27 |
Micromechanical Sensor Device With Movable Gate And Corresponding Production Method
App 20140077272 - Jakovlev; Oleg ; et al. | 2014-03-20 |
Serpentine Ir Sensor
App 20140061845 - Purkl; Fabian ; et al. | 2014-03-06 |
Cmos Bolometer
App 20140054740 - Yama; Gary ; et al. | 2014-02-27 |
System And Method For Forming A Buried Lower Electrode In Conjunction With An Encapsulated Mems Device
App 20140054730 - Graham; Andrew ; et al. | 2014-02-27 |
Mems Pressure Sensor With Multiple Membrane Electrodes
App 20140054731 - Graham; Andrew ; et al. | 2014-02-27 |
Micromechanical Device for Measuring an Acceleration, a Pressure or the Like and a Corresponding Method
App 20130327147 - Feyh; Ando ; et al. | 2013-12-12 |
Microelectromechanical Sensor Module And Corresponding Production Method
App 20130327163 - Pirk; Tjalf ; et al. | 2013-12-12 |
Thermally decoupled micro-structured reference element for sensors
Grant 8,556,504 - Herrmann , et al. October 15, 2 | 2013-10-15 |
Micromechanical Sound Transducer Arrangement and a Corresponding Production Method
App 20130228937 - Ehrenpfordt; Ricardo ; et al. | 2013-09-05 |
Micromechanical Sensor Apparatus With A Movable Gate, And Corresponding Production Process
App 20130221411 - Jakovlev; Oleg ; et al. | 2013-08-29 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
Grant 8,492,850 - Lammel , et al. July 23, 2 | 2013-07-23 |
Method for producing a micromechanical component
Grant 8,492,188 - Stahl , et al. July 23, 2 | 2013-07-23 |
Piezoelectric Based MEMS Structure
App 20130181575 - Chen; Po-Jui ; et al. | 2013-07-18 |
Micromechanical Functional Apparatus, Particularly A Loudspeaker Apparatus, And Appropriate Method Of Manufacture
App 20130126991 - Ehrenpfordt; Ricardo ; et al. | 2013-05-23 |
MEMS Chip Package and Method for Manufacturing an MEMS Chip Package
App 20130126992 - Ehrenpfordt; Ricardo ; et al. | 2013-05-23 |
Piezoresistive Micromechanical Sensor Component and Corresponding Measuring Method
App 20130098154 - Neul; Reinhard ; et al. | 2013-04-25 |
Microelectromechanical Loudspeaker Array, And Method For Operating A Microelectromechanical Loudspeaker Array
App 20130094679 - Feyh; Ando ; et al. | 2013-04-18 |
Micromechanical Functional Apparatus, Particularly A Loudspeaker Apparatus, And Appropriate Method Of Manufacture
App 20130094684 - Ehrenpfordt; Ricardo ; et al. | 2013-04-18 |
Sensor for detecting thermal radiation
Grant 8,415,760 - Mueller , et al. April 9, 2 | 2013-04-09 |
Method for manufacturing porous microstructures, porous microstructures manufactured according to this method, and the use thereof
Grant 8,377,315 - Scholten , et al. February 19, 2 | 2013-02-19 |
Coated Capacitive Sensor
App 20130032904 - Feyh; Ando ; et al. | 2013-02-07 |
Mems With Single Use Valve And Method Of Operation
App 20130015536 - Feyh; Ando ; et al. | 2013-01-17 |
Method for producing porous microneedles and their use
Grant 8,354,033 - Scholten , et al. January 15, 2 | 2013-01-15 |
Sensor and method for the manufacture thereof
Grant 8,334,534 - Reinmuth , et al. December 18, 2 | 2012-12-18 |
Microsystem
App 20120291543 - RETTIG; Christian ; et al. | 2012-11-22 |
Microsystem
Grant 8,286,854 - Rettig , et al. October 16, 2 | 2012-10-16 |
Contact Arrangement For Establishing A Spaced, Electrically Conducting Connection Between Microstructured Components
App 20120187509 - Gottfried; Knut ; et al. | 2012-07-26 |
Micromechanical Microphone Device and Method for Producing a Micromechanical Microphone Device
App 20120189143 - Buhmann; Alexander ; et al. | 2012-07-26 |
Manufacturing method for a micromechanical component having a thin-layer capping
Grant 8,212,326 - Feyh July 3, 2 | 2012-07-03 |
Method For Manufacturing A Semiconductor Structure, And A Corresponding Semiconductor Structure
App 20120132925 - Lammel; Gerhard ; et al. | 2012-05-31 |
Magnetic Field Sensor And Method For Producing A Magnetic Field Sensor
App 20120126799 - Schatz; Frank ; et al. | 2012-05-24 |
Method For Producing A Micromechanical Component
App 20120129291 - Stahl; Heiko ; et al. | 2012-05-24 |
Micromechanical component and method for its production
Grant 8,165,324 - Feyh , et al. April 24, 2 | 2012-04-24 |
Method for manufacturing a sensor element, and sensor element
Grant 8,163,585 - Feyh April 24, 2 | 2012-04-24 |
Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure
Grant 8,148,234 - Lammel , et al. April 3, 2 | 2012-04-03 |
Method For Manufacturing Porous Microstructures, Porous Microstructures Manufactured According To This Method, And The Use Thereof
App 20110281102 - Scholten; Dick ; et al. | 2011-11-17 |
Arrangement of Two Substrates having an SLID Bond and Method for Producing such an Arrangement
App 20110233750 - Trautmann; Achim ; et al. | 2011-09-29 |
Micromechanical Component And Method For Its Production
App 20110221455 - Feyh; Ando | 2011-09-15 |
Thermally Decoupled Micro-Structured Reference Element for Sensors
App 20110211613 - Herrmann; Ingo ; et al. | 2011-09-01 |
Sensor
Grant 8,007,169 - Opitz , et al. August 30, 2 | 2011-08-30 |
Manufacturing method for a porous microneedle array and corresponding porous microneedle array and corresponding substrate composite
App 20110137254 - Scholten; Dick ; et al. | 2011-06-09 |
Micromechanical component having thin-layer encapsulation and production method
Grant 7,923,794 - Feyh April 12, 2 | 2011-04-12 |
Sensor for detecting thermal radiation
App 20110057285 - Mueller; Thorsten ; et al. | 2011-03-10 |
Inertial sensor having a field effect transistor
App 20110057236 - Feyh; Ando | 2011-03-10 |
Microsystem
App 20110048132 - Rettig; Christian ; et al. | 2011-03-03 |
Manufacturing method for a micromechanical component having a thin-layer capping
App 20110018078 - FEYH; Ando | 2011-01-27 |
Radiation sensor element, method for producing a radiation sensor element and sensor field
Grant 7,868,298 - Feyh January 11, 2 | 2011-01-11 |
Sensor And Method For Producing The Same
App 20110002359 - Benzel; Hubert ; et al. | 2011-01-06 |
Method for producing a micromechanical component having a thin-layer capping
Grant 7,851,248 - Kronmueller , et al. December 14, 2 | 2010-12-14 |
Composite Of At Least Two Semiconductor Substrates And A Production Method
App 20100308475 - Trautmann; Achim ; et al. | 2010-12-09 |
Microscreen for filtering particles in microfluidics applications and production thereof
App 20100296986 - Feyh; Ando | 2010-11-25 |
Micromechanical Component Having Wafer Through-plating And Corresponding Production Method
App 20100155961 - Feyh; Ando | 2010-06-24 |
Sensor and method for the manufacture thereof
App 20100140618 - Reinmuth; Jochen ; et al. | 2010-06-10 |
Micromechanical Component And Corresponding Production Method
App 20100051810 - Herrmann; Ingo ; et al. | 2010-03-04 |
Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type
App 20100035068 - Lammel; Gerhard ; et al. | 2010-02-11 |
Method For Producing A Micromechanical Component Having A Thin-layer Capping
App 20100003790 - Kronmueller; Silvia ; et al. | 2010-01-07 |
Method for manufacturing a sensor element, and sensor element
App 20090294880 - Feyh; Ando | 2009-12-03 |
Method for Manufacturing a Semiconductor Structure, and a Corresponding Semiconductor Structure
App 20090236610 - Lammel; Gerhard ; et al. | 2009-09-24 |
Micromechanical Component and Method for its Production
App 20090232334 - Feyh; Ando ; et al. | 2009-09-17 |
Method for Producing Porous Microneedles and their Use
App 20090200262 - Scholten; Dick ; et al. | 2009-08-13 |
Sensor
App 20090129440 - Opitz; Bernhard ; et al. | 2009-05-21 |
Micromechanical component having thin-layer encapsulation and production method
App 20080296747 - Feyh; Ando | 2008-12-04 |
Radiation sensor element, method for producing a radiation sensor element and sensor field
App 20080265168 - Feyh; Ando | 2008-10-30 |
Method for producing a device including an array of microneedles on a support, and device producible according to this method
App 20080245764 - Pirk; Tjalf ; et al. | 2008-10-09 |
Method for manufacturing semiconical microneedles and semiconical microneedles manufacturable by this method
App 20080197106 - Feyh; Ando | 2008-08-21 |
Method for manufacturing an at least partially porous, hollow silicon body, hollow silicon bodies manufacturable by this method, and uses of these hollow silicon bodies
App 20080050610 - Stumber; Michael ; et al. | 2008-02-28 |
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