U.S. patent application number 15/480015 was filed with the patent office on 2019-09-12 for micromechanical device having a decoupled micromechanical structure.
The applicant listed for this patent is Robert Bosch GmbH. Invention is credited to Michael Baus, Ando Feyh, Andrew Graham, Bonsang Kim, Mariusz Koc, Ralf Maier, Gary O'Brien, Steffen Zunft.
Application Number | 20190276305 15/480015 |
Document ID | / |
Family ID | 60021293 |
Filed Date | 2019-09-12 |
![](/patent/app/20190276305/US20190276305A9-20190912-D00000.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00001.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00002.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00003.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00004.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00005.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00006.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00007.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00008.png)
![](/patent/app/20190276305/US20190276305A9-20190912-D00009.png)
United States Patent
Application |
20190276305 |
Kind Code |
A9 |
Zunft; Steffen ; et
al. |
September 12, 2019 |
MICROMECHANICAL DEVICE HAVING A DECOUPLED MICROMECHANICAL
STRUCTURE
Abstract
A micromechanical device having a substrate wafer, a functional
layer situated above it which has a mobile micromechanical
structure, and a cap situated on top thereof, having a first
cavity, which is formed at least by the substrate wafer and the cap
and which includes the micromechanical structure. The
micromechanical device has a fixed part and a mobile part, which
are movably connected to each other with at least one spring
element, and the first cavity is situated in the mobile part. Also
described is a method for producing the micromechanical device.
Inventors: |
Zunft; Steffen; (Reutlingen,
DE) ; Kim; Bonsang; (Mountain View, CA) ;
Feyh; Ando; (Reutlingen, DE) ; Graham; Andrew;
(Redwood City, CA) ; O'Brien; Gary; (Palo Alto,
CA) ; Baus; Michael; (Bietigheim-Bissinggen, DE)
; Maier; Ralf; (Gerlingen, DE) ; Koc; Mariusz;
(Stuttgart, DE) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Robert Bosch GmbH |
Stuttgart |
|
DE |
|
|
Prior
Publication: |
|
Document Identifier |
Publication Date |
|
US 20170305740 A1 |
October 26, 2017 |
|
|
Family ID: |
60021293 |
Appl. No.: |
15/480015 |
Filed: |
April 5, 2017 |
Related U.S. Patent Documents
|
|
|
|
|
|
Application
Number |
Filing Date |
Patent Number |
|
|
15108414 |
Jun 27, 2016 |
10317211 |
|
|
PCT/US2014/072694 |
Dec 30, 2014 |
|
|
|
15480015 |
|
|
|
|
61921927 |
Dec 30, 2013 |
|
|
|
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
B81C 2203/0118 20130101;
B81C 1/00333 20130101; B81B 2203/0315 20130101; B81B 7/0016
20130101; B81B 2203/0163 20130101; B81B 2201/0235 20130101; B81B
2201/0242 20130101; B81C 2203/0109 20130101; B81B 7/0048
20130101 |
International
Class: |
B81B 7/00 20060101
B81B007/00; B81C 1/00 20060101 B81C001/00 |
Foreign Application Data
Date |
Code |
Application Number |
Apr 21, 2016 |
DE |
102016206791.5 |
Claims
1. A micromechanical device, comprising: a substrate wafer; a
functional layer disposed thereon which has a mobile
micromechanical structure; a cap situated on top thereof; and a
first cavity, which is formed at least by the substrate wafer and
the cap and includes the micromechanical structure; wherein the
micromechanical device has a fixed part and a mobile part, which
are movably connected to each other with at least one spring
element, the first cavity being situated in the mobile part.
2. The micromechanical device of claim 1, wherein the spring
element is etched out of at least one of the functional layer, the
substrate wafer, and the cap.
3. The micromechanical device of claim 1, wherein the first cavity
is situated inside a second cavity.
4. The micromechanical device of claim 3, wherein the second cavity
is formed at least from the fixed part, a first wafer cap, and a
second wafer cap.
5. A method for producing a micromechanical device, the method
comprising: providing a MEMS wafer having a substrate wafer, a
functional layer disposed thereon which has a mobile
micromechanical structure, and a cap situated on top thereof, and a
first cavity, which is formed at least by the substrate wafer and
the cap and which includes the micromechanical structure; bonding a
second wafer cap to the cap with a spacer; trenching the MEMS wafer
from the direction of the substrate wafer and configuring a fixed
part and a mobile part, the first cavity being situated in the
mobile part; and bonding a first wafer cap to the substrate wafer
with a further spacer and configuring a second cavity, in which the
mobile part having the first cavity is situated.
6. The micromechanical device of claim 2, wherein the first cavity
is situated inside a second cavity.
Description
RELATED APPLICATION INFORMATION
[0001] The present application claims priority to and the benefit
of German patent application no. 10 2016 206 791.5, which was filed
in Germany on Apr. 21, 2016, the disclosure of which is
incorporated herein by reference.
FIELD OF THE INVENTION
[0002] The present invention is based on a micromechanical device
having a substrate wafer, a functional layer disposed thereon that
includes a mobile micromechanical structure, and having a cap
situated on top thereof, as well as a first cavity, which is formed
at least by the substrate wafer and the cap and includes the
micromechanical structure.
BACKGROUND INFORMATION
[0003] Micromechanical sensors for measuring the yaw rate or
acceleration are made up of at least one mobile structure, which is
insulated from the external environment inside a cavity. In most
instances the mobile structure is produced on a substrate wafer
employing surface-micromechanical technology. The cavity is
produced by placing a wafer cap on the substrate wafer. By their
nature, micromechanical inertial sensors exhibit a sensitive
response to vibrations, thrusts and other mechanical effects from
the outside. To satisfy the requirement with regard to vibration
sensitivity, for example, packaging that protects the actual sensor
chip from vibrations with the aid of an external damping structure
is therefore used. For the decoupling of mechanical stress that may
lead to bending of the sensor chip and thus to faulty signals, soft
adhesives are employed. The adhesives further limit the selection
options for the packaging in terms of forms and materials. The
connection region, i.e. the sealing frame or the bonding frame
between the substrate wafer and the wafer cap, has a robust
configuration, partially because of external media.
SUMMARY OF THE INVENTION
[0004] The present invention is intended to insulate the actual
micromechanical device from external mechanical influences at the
wafer level.
[0005] The present invention is based on a micromechanical device,
which includes a substrate wafer, a functional layer disposed
thereon that includes a mobile micromechanical structure, and a cap
situated on top thereof, a first cavity, which is formed at least
from the substrate wafer and from the cap and includes the
micromechanical structure. The core of the present invention
consists of the micromechanical device having a fixed part and a
mobile part, which are movably connected to each other with the aid
of at least one spring element, the first cavity being situated in
the mobile part. In this way the mobile micromechanical structure
is advantageously able to be mechanically decoupled and damped from
its environment without the entire micromechanical device having to
be decoupled and damped from its environment.
[0006] According to an advantageous further development of the
present invention, the spring element is etched out of the
functional layer or also out of the substrate wafer or also out of
the cap.
[0007] This advantageously makes it possible to provide different
rigidities, different locations of the micromechanical device, and
different geometries in the configuration of the spring
element.
[0008] In a particularly advantageous further development of the
present invention, it is provided that the first cavity be situated
within a second cavity. In an advantageous manner, the second
cavity thus protects the first cavity from environmental
influences.
[0009] According to an advantageous further development of the
present invention, the second cavity is formed at least from the
fixed part, from a first wafer cap, and a second wafer cap.
[0010] The present invention also relates to a method for producing
a micromechanical device. This advantageously allows for a
mechanical decoupling of the mobile micromechanical structure from
its environment and for packaging at the wafer level as well as
sealing from environmental influences.
[0011] The sensor chip in the related art is advantageously
subdivided by processing the chip. Thus, a portion of the chip is
exposed with the aid of a suitable process. This produces springs
that allow for the free movement of the current sensor chip. In an
especially advantageous development of the present invention, a
second cavity, which encloses the first cavity, is produced with
the aid of two additional wafer caps. The two cavities may have
different fillings (e.g., gases having different pressures). The
vibration decoupling through a suitable design of the connection
springs, i.e. the at least one spring element, provides cost
advantages in comparison with the damping used in the packaging.
The overall system is able to be given a more advantageous
packaging (ICP). A higher pressure in the external cavity in
comparison with the internal cavity may have a positive effect on
the damping. Because of the elastic suspension, mechanical stress
no longer reaches the sensor element, which means that better
stability of the sensor signals is able to be achieved. Stress
decoupling requires less attention in the ICP. The external cavity
has a buffer effect for media reaching the chip from the outside
before such media begins to affect the functionality of the sensor
core.
BRIEF DESCRIPTION OF THE DRAWINGS
[0012] FIG. 1 schematically shows a micromechanical device having a
cavity in the related art.
[0013] FIG. 2 schematically shows a micromechanical device having a
cavity that is micromechanically decoupled, in a first specific
embodiment of the present invention.
[0014] FIGS. 3a and b schematically show a respective
micromechanical device according to the present invention, which
includes a cavity that is micromechanically decoupled with the aid
of various springs.
[0015] FIG. 4 schematically shows a micromechanical device having a
first cavity, which is micromechanically decoupled and situated
inside a second cavity, in a second specific embodiment of the
present invention.
[0016] FIGS. 5a, 5b and 5c schematically show a respective
micromechanical device according to the present invention, which
has a first cavity that is micromechanically decoupled by various
springs and is situated inside a second cavity.
[0017] FIGS. 6a, 6b, 6c, 6d, and 6e show a method according to the
present invention for producing a micromechanical device having two
cavities, stacked inside one another, through a stack of four
wafers.
DETAILED DESCRIPTION
[0018] FIG. 1 shows a micromechanical device having a cavity in the
related art. Shown is the schematic structure of a micromechanical
device 10 in the form of a typical micromechanical yaw-rate or
acceleration sensor. It is made up of at least one mobile
micromechanical structure 220, which is produced in a functional
plane 200 on substrate wafer 100. Micromechanical structure 220 is
movably suspended with the aid of suspension springs 250. A wafer
cap 300 protects this structure from the environment. A first
cavity 400, inside which mobile structure 220 is situated, is
formed between wafer cap 300 and substrate wafer 100. Wafer cap 300
and substrate wafer 100 are connected to each other with the aid of
a sealing frame 320.
[0019] FIG. 2 schematically shows a micromechanical device having a
cavity that is micromechanically decoupled, in a first specific
embodiment of the present invention.
[0020] In contrast to the previously described micromechanical
device in the related art, this micromechanical device according to
the present invention includes a fixed part 20 and a mobile part
25, which are movably connected to each other with the aid of at
least one spring element 350. First cavity 400 is situated in
mobile part 25. In the exemplary embodiment at hand, mobile part 25
is exposed from fixed part 20 by trenches through the layer
substructure in a region outside a sealing frame 320 of first
cavity 400, the layer structure being made up of substrate 100,
micromechanical functional layer 200 and cap 300. Elastic
structures in the form of spring elements 350 are exposed as well,
which connect mobile part 25 to fixed part 20. Substrate 100 may be
a substrate wafer, in particular a silicon wafer. As an
alternative, functional layer 200 also stands for a system of
multiple layers. In this example, cap 300 is a wafer cap. As an
alternative, however, cap 300 may also be realized as a thin-film
cap, for example. The layer structure may alternatively also be a
wafer stack.
[0021] FIGS. 3a and b schematically show a respective
micromechanical device according to the present invention, which
includes a cavity that is micromechanically decoupled with the aid
of various springs. Spring elements 350 may be made from different
planes of the layer structure of substrate 100, functional layer
200 and cap 300, for instance from the entire layer structure or
from the entire wafer stack, as shown in FIG. 3a. Spring elements
350, for example, may also consist of only micromechanical
functional layer 200, as shown in FIG. 3b.
[0022] FIG. 4 schematically shows a micromechanical device having a
first cavity, which is micromechanically decoupled and situated
inside a second cavity in a second specific embodiment of the
present invention. Shown is first cavity 400, which is situated
inside second cavity 500. Second cavity 500 is bounded by a first
external wafer cap 520 and a second external wafer cap 540. First
external wafer cap 520 is situated on substrate 100 of fixed part
20 with the aid of spacer 560. Second external wafer cap 540 is
situated on the layer of fixed part 20 that forms cap 300 on mobile
part 25 with the aid of spacer 560. The two additional caps 520,
540 protect exposed first cavity 400 from the environment. Spacers
560 allow for a free movement of first cavity 400. For example,
these spacers 560 may be made from the material of the cap or of
the connection material for connecting the wafers, such as sealing
glass.
[0023] FIGS. 5a, b, and c schematically show a respective
micromechanical device according to the present invention, which
has a first cavity which is micromechanically decoupled with the
aid of various springs and situated inside a second cavity. The
plan views are meant to represent possible placements and the
structure of spring elements 350 by way of example. The basic
system can be seen in FIG. 5a. To be added to the inner mobile
micromechanical structure 220 only present as yet and which is
disposed in first cavity 400 by suspension springs 250 is a second
spring system having spring elements 350, which suspend mobile part
25 having first cavity 400 within second cavity 500 on fixed part
20. Possible developments of the spring elements can be gathered
from FIGS. 5b and 5c.
[0024] According to FIG. 5b, for example, U-shaped springs 350 may
be situated on four sides, disposed opposite one another, of mobile
part 25 having first cavity 400, the springs extending through
second cavity 500 and being connected to fixed part 20 at their
other end.
[0025] FIG. 5c shows another possible setup, in which a respective
multiply bent flexible spring 350 having a rectangular
cross-section is situated at four sides of mobile part 25 including
first cavity 400, the length of the springs utilizing the free
intermediate space in second cavity 500.
[0026] As an alternative, it is also possible to provide only one
spring element 350 (not shown).
[0027] FIGS. 6a through e show a method according to the present
invention for producing a micromechanical device having two
cavities, stacked inside each other, through a stack of four
wafers.
[0028] There are various possibilities for implementing the present
invention in a possible process sequence. In the following text,
the sequence is to be outlined by way of example using a known
process sequence for a current MEMS chip.
[0029] The starting point is a MEMS wafer having an inner mobile
structure (FIG. 6a). MEMS wafer 600 includes a substrate wafer 100,
a functional layer 200, and a wafer cap 300. They form first cavity
400, in which mobile micromechanical structure 220 is situated and
suspended with the aid of suspension springs 250. Mobile
micromechanical structure 220 and suspension springs 250 are etched
out of functional layer 200.
[0030] First, cap 300 is thinned down from this MEMS wafer 600 from
the direction of the top surface (FIG. 6b). Then, second wafer cap
540 is bonded with clearance to cap 300 using a spacer 560 (FIG.
6c). Spacer(s) 560, for example, may be made from the material of
the cap or from the connection material for connecting the wafers,
such as a sealing glass, which is also used for the bonding.
[0031] From the direction of the underside of substrate 100,
current MEMS wafer then is initially thinned down and subsequently
trenched (FIG. 6d). The configuration of the MEMS wafer must have
uninterrupted silicon in the region of the new trench so that the
trench will not be stopped. The trench is stopped in second cavity
500, which is already partially set up and bounded by wafer cap
540. On the one hand, mobile part 25 having first cavity 400 is
exposed through the trench and thereby separated from fixed part
20. On the other, spring elements 350, which connect mobile part 25
and fixed part 20, are at least partially etched out. In the
example at hand, spring elements 350 are made up of all three
layers of the layer system, i.e. cap 300, functional layer 200, and
substrate 100. Spring elements 350 are thus already completely
etched out after the trenches have been introduced.
[0032] Now, first wafer cap 520 is bonded to substrate 100 in fixed
part 20 (FIG. 6e).
[0033] At the end, electrical bond pads are optionally exposed by
trenching through first external wafer cap (not shown).
[0034] In general terms, the method according to the present
invention includes at least the following steps: [0035] (a)
Providing a MEMS wafer 600 having a substrate wafer 100, a
functional layer 200 disposed thereon which has a mobile
micromechanical structure 220, and a cap 300 situated on top
thereof, as well as a first cavity 400, which is formed at least by
substrate wafer 100 and cap 300 and includes micromechanical
structure 220. [0036] (b) Bonding a second wafer cap 540 to cap 300
with the aid of a spacer 560. [0037] (c) Trenching the MEMS wafer
600 from the direction of substrate wafer 100 and developing a
fixed part 20 and a mobile part 25, first cavity 400 being situated
in mobile part 25. [0038] (d) Bonding a first wafer cap 520 to
substrate wafer 100 with the aid of a further spacer 560 and
developing a second cavity 500, in which mobile part 25 having
first cavity 400 is situated.
THE LIST OF REFERENCE NUMERALS IS AS FOLLOWS:
[0039] 10 micromechanical device
[0040] 20 fixed part
[0041] 25 mobile part
[0042] 100 substrate
[0043] 200 functional plane
[0044] 220 mobile micromechanical structure
[0045] 250 suspension springs
[0046] 300 wafer cap
[0047] 320 sealing frame
[0048] 350 spring element
[0049] 400 first cavity
[0050] 500 second cavity
[0051] 520 first wafer cap
[0052] 540 second wafer cap
[0053] 560 spacer
[0054] 600 MEMS wafer
* * * * *