| Patent | Date |
|---|
Transistor comprising an air gap positioned adjacent a gate electrode
Grant 11,456,382 - Economikos , et al. September 27, 2 | 2022-09-27 |
Formation of trench silicide source or drain contacts without gate damage
Grant 11,443,982 - Greene , et al. September 13, 2 | 2022-09-13 |
Methods, apparatus and system for a self-aligned gate cut on a semiconductor device
Grant 10,998,422 - Zang , et al. May 4, 2 | 2021-05-04 |
Gate cut structures
Grant 10,937,786 - Zang , et al. March 2, 2 | 2021-03-02 |
Vertical resistor adjacent inactive gate over trench isolation
Grant 10,923,469 - Zang , et al. February 16, 2 | 2021-02-16 |
Insulating gate separation structure for transistor devices
Grant 10,879,073 - Park , et al. December 29, 2 | 2020-12-29 |
IC structure with metal cap on cobalt layer and methods of forming same
Grant 10,790,363 - Economikos , et al. September 29, 2 | 2020-09-29 |
Wraparound contact surrounding source/drain regions of integrated circuit structures and method of forming same
Grant 10,741,656 - Zang , et al. A | 2020-08-11 |
FinFET having insulating layers between gate and source/drain contacts
Grant 10,741,451 - Zang , et al. A | 2020-08-11 |
Integrated gate contact and cross-coupling contact formation
Grant 10,727,136 - Zang , et al. | 2020-07-28 |
Vertical Resistor Adjacent Inactive Gate Over Trench Isolation
App 20200227404 - Zang; Hui ; et al. | 2020-07-16 |
Gate cut isolation formed as layer against sidewall of dummy gate mandrel
Grant 10,707,206 - Zang , et al. | 2020-07-07 |
Late gate cut using selective dielectric deposition
Grant 10,699,957 - Zang , et al. | 2020-06-30 |
Methods, Apparatus And System For A Self-aligned Gate Cut On A Semiconductor Device
App 20200185509 - Zang; Hui ; et al. | 2020-06-11 |
Late Gate Cut Using Selective Dielectric Deposition
App 20200168509 - Zang; Hui ; et al. | 2020-05-28 |
Gate Cut Isolation Formed As Layer Against Sidewall Of Dummy Gate Mandrel
App 20200161296 - Zang; Hui ; et al. | 2020-05-21 |
Integrated Gate Contact And Cross-coupling Contact Formation
App 20200152518 - Zang; Hui ; et al. | 2020-05-14 |
Formation Of Trench Silicide Source Or Drain Contacts Without Gate Damage
App 20200152509 - Greene; Andrew ; et al. | 2020-05-14 |
Insulating Gate Separation Structure For Transistor Devices
App 20200135473 - Park; Chanro ; et al. | 2020-04-30 |
Finfet Having Insulating Layers Between Gate And Source/drain Contacts
App 20200111713 - Zang; Hui ; et al. | 2020-04-09 |
Gate Cut Structures
App 20200091143 - ZANG; Hui ; et al. | 2020-03-19 |
Oxide Spacer In A Contact Over Active Gate Finfet And Method Of Production Thereof
App 20200083363 - ZANG; Hui ; et al. | 2020-03-12 |
Method of manufacturing finfet devices using narrow and wide gate cut openings in conjunction with a replacement metal gate process
Grant 10,586,860 - Shu , et al. | 2020-03-10 |
Wraparound Contact Surrounding Source/drain Regions Of Integrated Circuit Structures And Method Of Forming Same
App 20200075738 - Zang; Hui ; et al. | 2020-03-05 |
Integrated single diffusion break
Grant 10,580,685 - Zang , et al. | 2020-03-03 |
Transistor Comprising An Air Gap Positioned Adjacent A Gate Electrode
App 20200066899 - Economikos; Laertis ; et al. | 2020-02-27 |
Oxide spacer in a contact over active gate finFET and method of production thereof
Grant 10,573,753 - Zang , et al. Feb | 2020-02-25 |
Gate cut method after source/drain metallization
Grant 10,566,201 - Park , et al. Feb | 2020-02-18 |
Methods, Apparatus, And System To Control Gate Height And Cap Thickness Across Multiple Gates
App 20200052106 - Economikos; Laertis ; et al. | 2020-02-13 |
Ic Structure With Metal Cap On Cobalt Layer And Methods Of Forming Same
App 20200044034 - Economikos; Laertis ; et al. | 2020-02-06 |
Field effect transistors with self-aligned metal plugs and methods
Grant 10,553,486 - Zang , et al. Fe | 2020-02-04 |
Methods, apparatus and system for a self-aligned gate cut on a semiconductor device
Grant 10,553,698 - Zang , et al. Fe | 2020-02-04 |
Integrated Single Diffusion Break
App 20200035543 - ZANG; Hui ; et al. | 2020-01-30 |
Field Effect Transistors With Self-aligned Metal Plugs And Methods
App 20200035555 - Zang; Hui ; et al. | 2020-01-30 |
Metal resistors integrated into poly-open-chemical-mechanical-polishing (POC) module and method of production thereof
Grant 10,546,853 - Economikos , et al. Ja | 2020-01-28 |
Using Source/drain Contact Cap During Gate Cut
App 20200020687 - Wang; Haiting ; et al. | 2020-01-16 |
Method for forming replacement air gap
Grant 10,535,771 - Economikos , et al. Ja | 2020-01-14 |
Performing concurrent diffusion break, gate and source/drain contact cut etch processes
Grant 10,522,410 - Economikos , et al. Dec | 2019-12-31 |
Using source/drain contact cap during gate cut
Grant 10,522,538 - Wang , et al. Dec | 2019-12-31 |
Metal Resistors Integrated Into Poly-open-chemical-mechanical-polishing (poc) Module And Method Of Production Thereof
App 20190393212 - Economikos; Laertis ; et al. | 2019-12-26 |
Method For Forming Replacement Air Gap
App 20190393335 - Economikos; Laertis ; et al. | 2019-12-26 |
Contact structures
Grant 10,510,613 - Shu , et al. Dec | 2019-12-17 |
Resistor within single diffusion break, and related method
Grant 10,510,749 - Zang , et al. Dec | 2019-12-17 |
Semiconductor Device With Improved Gate-source/drain Metallization Isolation
App 20190378722 - Economikos; Laertis ; et al. | 2019-12-12 |
Gate cut in replacement metal gate process
Grant 10,504,798 - Xie , et al. Dec | 2019-12-10 |
Transistor Fins With Different Thickness Gate Dielectric
App 20190371796 - Zang; Hui ; et al. | 2019-12-05 |
Transistors Having Double Spacers At Tops Of Gate Conductors
App 20190363174 - Zang; Hui ; et al. | 2019-11-28 |
Transistor fins with different thickness gate dielectric
Grant 10,475,791 - Zang , et al. Nov | 2019-11-12 |
A Method Of Manufacturing Finfet Devices Using Narrow And Wide Gate Cut Openings In Conjuction With A Replacement Metal Gate Pro
App 20190341475 - Shu; Jiehui ; et al. | 2019-11-07 |
Method For Forming And Trimming Gate Cut Structure
App 20190341468 - Zang; Hui ; et al. | 2019-11-07 |
Performing Concurrent Diffusion Break, Gate And Source/drain Contact Cut Etch Processes
App 20190326177 - Economikos; Laertis ; et al. | 2019-10-24 |
Methods, Apparatus And System For A Self-aligned Gate Cut On A Semiconductor Device
App 20190319112 - Zang; Hui ; et al. | 2019-10-17 |
Contacts Formed With Self-aligned Cuts
App 20190295898 - Xie; Ruilong ; et al. | 2019-09-26 |
Fin field-effect transistor (FinFET) and method of production thereof
Grant 10,418,285 - Zang , et al. Sept | 2019-09-17 |
Intergrated circuit structure including single diffusion break abutting end isolation region, and methods of forming same
Grant 10,388,652 - Shi , et al. A | 2019-08-20 |
Gate contact structure positioned above an active region with air gaps positioned adjacent the gate structure
Grant 10,388,747 - Xie , et al. A | 2019-08-20 |
Gate Cut In Replacement Metal Gate Process
App 20190252268 - Xie; Ruilong ; et al. | 2019-08-15 |
Gate cut in replacement metal gate process
Grant 10,373,873 - Park , et al. | 2019-08-06 |
Contacts formed with self-aligned cuts
Grant 10,373,875 - Xie , et al. | 2019-08-06 |
Methods of forming source/drain contact structures on integrated circuit products
Grant 10,373,877 - Wang , et al. | 2019-08-06 |
Contact Structures
App 20190229019 - Shu; Jiehui ; et al. | 2019-07-25 |
Integrated Circuit Structure Including Single Diffusion Break Abutting End Isolation Region, And Methods Of Forming Same
App 20190148373 - Shi; Yongiun ; et al. | 2019-05-16 |
Self-aligned gate caps with an inverted profile
Grant 10,276,391 - Zang , et al. | 2019-04-30 |
Gate cut structure with liner spacer and related method
Grant 10,236,213 - Pandey , et al. | 2019-03-19 |
Gate Cut Method For Replacement Metal Gate
App 20190067115 - PARK; Chanro ; et al. | 2019-02-28 |
Self-aligned metal wire on contact structure and method for forming same
Grant 10,199,271 - Xie , et al. Fe | 2019-02-05 |
Fin-type field effect transistors (FINFETS) with replacement metal gates and methods
Grant 10,177,041 - Xie , et al. J | 2019-01-08 |
Forming of marking trenches in structure for multiple patterning lithography
Grant 10,157,796 - Economikos , et al. Dec | 2018-12-18 |
Dual medium filter for ion and particle filtering during semiconductor processing
Grant 10,109,505 - Zhang , et al. October 23, 2 | 2018-10-23 |
Methods of forming field effect transistors (FETS) with gate cut isolation regions between replacement metal gates
Grant 10,090,402 - Park , et al. October 2, 2 | 2018-10-02 |
Fin-type Field Effect Transistors (finfets) With Replacement Metal Gates And Methods
App 20180261514 - Xie; Ruilong ; et al. | 2018-09-13 |
Gate cut integration and related device
Grant 10,056,469 - Li , et al. August 21, 2 | 2018-08-21 |
Gate Cut Integration And Related Device
App 20180233579 - LI; Hui-feng ; et al. | 2018-08-16 |
Methods for nitride planarization using dielectric
Grant 9,966,272 - Sheng , et al. May 8, 2 | 2018-05-08 |
Methods and structures for achieving target resistance post CMP using in-situ resistance measurements
Grant 9,676,075 - Economikos , et al. June 13, 2 | 2017-06-13 |
Dual Medium Filter For Ion And Particle Filtering During Semiconductor Processing
App 20170148647 - Zhang; John H. ; et al. | 2017-05-25 |
Dual medium filter for ion and particle filtering during semiconductor processing
Grant 9,607,864 - Zhang , et al. March 28, 2 | 2017-03-28 |
Methods And Structures For Achieving Target Resistance Post Cmp Using In-situ Resistance Measurements
App 20160361791 - Economikos; Laertis ; et al. | 2016-12-15 |
Cleaning composition and process for cleaning semiconductor devices and/or tooling during manufacturing thereof
Grant 9,058,976 - Chhabra , et al. June 16, 2 | 2015-06-16 |
Reducing Gate Height Variation In Rmg Process
App 20150111373 - Cote; William J. ; et al. | 2015-04-23 |
Cleaning Composition And Process For Cleaning Semiconductor Devices And/or Tooling During Manufacturing Thereof
App 20150024989 - Chhabra; Vishal ; et al. | 2015-01-22 |
Applying different pressures through sub-pad to fixed abrasive CMP pad
Grant 8,858,300 - Cellier , et al. October 14, 2 | 2014-10-14 |
Method of repairing probe pads
Grant 8,822,994 - Zhang , et al. September 2, 2 | 2014-09-02 |
Method and system to predict lithography focus error using simulated or measured topography
Grant 8,792,080 - Sapp , et al. July 29, 2 | 2014-07-29 |
Replacement metal gate transistors using bi-layer hardmask
Grant 8,748,252 - Leobandung , et al. June 10, 2 | 2014-06-10 |
Replacement Metal Gate Transistors Using Bi-layer Hardmask
App 20140148003 - Leobandung; Effendi ; et al. | 2014-05-29 |
Cleaning Composition And Process For Cleaning Semiconductor Devices And/or Tooling During Manufacturing Thereof
App 20140128307 - Chhabra; Vishal ; et al. | 2014-05-08 |
Technique For Uniform Cmp
App 20140097539 - Zhang; John H. ; et al. | 2014-04-10 |
Method And System To Predict Lithography Focus Error Using Simulated Or Measured Topography
App 20140071416 - Cho; Choongyeun ; et al. | 2014-03-13 |
Method And System To Predict Lithography Focus Error Using Simulated Or Measured Topography
App 20140075399 - Cho; Choongyeun ; et al. | 2014-03-13 |
Method And System To Predict Lithography Focus Error Using Simulated Or Measured Topography
App 20140075396 - Cho; Choongyeun ; et al. | 2014-03-13 |
Dual Medium Filter For Ion And Particle Filtering During Semiconductor Processing
App 20130312791 - Zhang; John H. ; et al. | 2013-11-28 |
Method Of Repairing Probe Pads
App 20130072011 - Zhang; John H. ; et al. | 2013-03-21 |
Method Of Repairing Probe Pads
App 20130063173 - Zhang; John H. ; et al. | 2013-03-14 |
Method of repairing probe pads
Grant 8,324,622 - Zhang , et al. December 4, 2 | 2012-12-04 |
Method And System To Predict Lithography Focus Error Using Simulated Or Measured Topography
App 20120194792 - Sapp; Brian Christopher ; et al. | 2012-08-02 |
Polishing method with inert gas injection
Grant 8,143,166 - Zhao , et al. March 27, 2 | 2012-03-27 |
Apparatus, method and computer program product for fast simulation of manufacturing effects during integrated circuit design
Grant 8,117,568 - Xiang , et al. February 14, 2 | 2012-02-14 |
Applying Different Pressures Through Sub-pad To Fixed Abrasive Cmp Pad
App 20110195640 - Cellier; Glenn L. ; et al. | 2011-08-11 |
Apparatus and method of electrolytic removal of metals from a wafer surface
Grant 7,993,498 - Deligianni , et al. August 9, 2 | 2011-08-09 |
Method Of Repairing Probe Pads
App 20110156032 - Zhang; John H. ; et al. | 2011-06-30 |
Apparatus, Method and Computer Program Product for Fast Stimulation of Manufacturing Effects During Integrated Circuit Design
App 20100077372 - Xiang; Hua ; et al. | 2010-03-25 |
Method And Composition For Electro-chemical-mechanical Polishing
App 20100051474 - Andricacos; Panayotis C. ; et al. | 2010-03-04 |
Polishing Method With Inert Gas Injection
App 20090233444 - Zhao; Feng ; et al. | 2009-09-17 |
Apparatus And Method Of Electrolytic Removal Of Metals From A Wafer Surface
App 20090038960 - Deligianni; Hariklia ; et al. | 2009-02-12 |
Detection of diamond contamination in polishing pad and reconditioning system therefor
Grant 7,473,159 - Economikos , et al. January 6, 2 | 2009-01-06 |
Solder connector structure and method
Grant 7,470,985 - Farooq , et al. December 30, 2 | 2008-12-30 |
Solder Connector Structure And Method
App 20080248643 - Farooq; Mukta G. ; et al. | 2008-10-09 |
Detection of diamond contamination in polishing pad
Grant 7,354,333 - Economikos , et al. April 8, 2 | 2008-04-08 |
Detection Of Diamond Contamination In Polishing Pad And Reconditioning System Therefor
App 20080076331 - Economikos; Laertis ; et al. | 2008-03-27 |
Apparatus And Method For Chemical Mechanical Polishing With Improved Uniformity
App 20080051008 - Economikos; Laertis ; et al. | 2008-02-28 |
Solder Connector Structure And Method
App 20080023827 - Farooq; Mukta G. ; et al. | 2008-01-31 |
Planarization system and method using a carbonate containing fluid
Grant 7,214,623 - Delehanty , et al. May 8, 2 | 2007-05-08 |
TEOS assisted oxide CMP process
Grant 7,091,103 - Beintner , et al. August 15, 2 | 2006-08-15 |
Method and composition for electro-chemical-mechanical polishing
App 20060163083 - Andricacos; Panayotis C. ; et al. | 2006-07-27 |
Detection Of Diamond Contamination In Polishing Pad And Reconditioning System Therefor
App 20060166607 - Economikos; Laertis ; et al. | 2006-07-27 |
Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers
Grant 7,040,966 - Salfelder , et al. May 9, 2 | 2006-05-09 |
Chemical mechanical polish with multi-zone abrasive-containing matrix
App 20060079159 - Naujok; Markus ; et al. | 2006-04-13 |
Filling high aspect ratio isolation structures with polysilazane based material
App 20050179112 - Belyansky, Michael P. ; et al. | 2005-08-18 |
Method of forming a trench structure
App 20050170661 - Economikos, Laertis ; et al. | 2005-08-04 |
Planarization System And Method Using A Carbonate Containing Fluid
App 20050079709 - Delehanty, Donald J. ; et al. | 2005-04-14 |
Filling high aspect ratio isolation structures with polysilazane based material
Grant 6,869,860 - Belyansky , et al. March 22, 2 | 2005-03-22 |
Carbonation of pH controlled KOH solution for improved polishing of oxide films on semiconductor wafers
App 20050042877 - Salfelder, Joseph F. ; et al. | 2005-02-24 |
Extendible process for improved top oxide layer for DRAM array and the gate interconnects while providing self-aligned gate contacts
App 20040256651 - Dyer, Thomas W. ; et al. | 2004-12-23 |
Filling High Aspect Ratio Isolation Structures With Polysilazane Based Material
App 20040248374 - Belyansky, Michael P. ; et al. | 2004-12-09 |
Extendible process for improved top oxide layer for DRAM array and the gate interconnects while providing self-aligned gate contacts
Grant 6,794,242 - Dyer , et al. September 21, 2 | 2004-09-21 |
Integrated plating and planarization apparatus having a variable-diameter counterelectrode
Grant 6,776,885 - Economikos , et al. August 17, 2 | 2004-08-17 |
Integrated plating and planarization process and apparatus therefor
Grant 6,773,570 - Economikos , et al. August 10, 2 | 2004-08-10 |
TEOS assisted oxide CMP process
App 20040110380 - Beintner, Jochen ; et al. | 2004-06-10 |
Integrated Plating And Planarization Process And Apparatus Therefor
App 20040094427 - Economikos, Laertis ; et al. | 2004-05-20 |
Integrated Plating And Planarization Apparatus Having A Variable-diameter Counterelectrode
App 20040094403 - Economikos, Laertis ; et al. | 2004-05-20 |
Method of filling isolation trenches in a substrate
Grant 6,656,817 - Divakaruni , et al. December 2, 2 | 2003-12-02 |
Method Of Filling Isolation Trenches In A Substrate
App 20030203595 - Divakaruni, Ramachandra ; et al. | 2003-10-30 |
Recess Pt structure for high k stacked capacitor in DRAM and FRAM, and the method to form this structure
Grant 6,596,580 - Lian , et al. July 22, 2 | 2003-07-22 |
Slurry-less chemical-mechanical polishing
Grant 6,569,769 - Economikos , et al. May 27, 2 | 2003-05-27 |
Recess Pt structure for high k stacked capacitor in DRAM and FRAM, and the method to form this structure
App 20030077858 - Lian, Jingyu ; et al. | 2003-04-24 |
Method To Increase Removal Rate Of Oxide Using Fixed-abrasive
App 20020197937 - Economikos, Laertis ; et al. | 2002-12-26 |
Method to increase removal rate of oxide using fixed-abrasive
Grant 6,485,355 - Economikos , et al. November 26, 2 | 2002-11-26 |
Thin film wiring scheme utilizing inter-chip site surface wiring
Grant 6,444,919 - Economikos , et al. September 3, 2 | 2002-09-03 |
Increased polish removal rate of dielectric layers using fixed abrasive pads
Grant 6,350,692 - Economikos , et al. February 26, 2 | 2002-02-26 |
Directional CVD process with optimized etchback
Grant 6,335,261 - Natzle , et al. January 1, 2 | 2002-01-01 |
Structure and method for producing low leakage isolation devices
Grant 6,319,794 - Akatsu , et al. November 20, 2 | 2001-11-20 |
Method of forming a buried bitline in a vertical DRAM device
App 20010017384 - Economikos, Laertis ; et al. | 2001-08-30 |
Method of forming a buried bitline in a vertical DRAM device
Grant 6,218,236 - Economikos , et al. April 17, 2 | 2001-04-17 |
Germanium or silicon-germanium deep trench fill by melt-flow process
Grant 6,180,480 - Economikos , et al. January 30, 2 | 2001-01-30 |
Filling of high aspect ratio trench isolation
Grant 6,136,664 - Economikos , et al. October 24, 2 | 2000-10-24 |
Apparatus for providing solder interconnections to semiconductor and electronic packaging devices
Grant 6,099,935 - Brearley , et al. August 8, 2 | 2000-08-08 |
Low temperature diffusion process for dopant concentration enhancement
Grant 6,057,216 - Economikos , et al. May 2, 2 | 2000-05-02 |
Hermetic sealing of a substrate of high thermal conductivity using an interposer of low thermal conductivity
Grant 6,037,193 - Interrante , et al. March 14, 2 | 2000-03-14 |
High throughput chemical vapor deposition process capable of filling high aspect ratio structures
Grant 6,030,881 - Papasouliotis , et al. February 29, 2 | 2000-02-29 |
Laser ablation apparatus and method
Grant 5,491,319 - Economikos , et al. February 13, 1 | 1996-02-13 |
Applying conductive lines to integrated circuits
Grant 5,289,632 - Chalco , et al. March 1, 1 | 1994-03-01 |
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