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Semiconductor device and method of manufacturing the same Grant 11,081,491 - Chakihara August 3, 2 | 2021-08-03 |
Semiconductor Device And Method Of Manufacturing The Same App 20190326311 - CHAKIHARA; Hiraku | 2019-10-24 |
Semiconductor device Grant 10,056,402 - Hayashi , et al. August 21, 2 | 2018-08-21 |
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Semiconductor Device And Manufacturing Method Thereof App 20180053658 - SAITO; Kentaro ;   et al. | 2018-02-22 |
Semiconductor device and manufacturing method thereof Grant 9,831,093 - Saito , et al. November 28, 2 | 2017-11-28 |
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Semiconductor Device And Manufacturing Method Thereof App 20170053922 - SAITO; Kentaro ;   et al. | 2017-02-23 |
Method of manufacturing semiconductor device Grant 9,570,610 - Toba , et al. February 14, 2 | 2017-02-14 |
Semiconductor device Grant 9,543,315 - Chakihara , et al. January 10, 2 | 2017-01-10 |
Semiconductor device and method of manufacturing the same Grant 9,520,504 - Toba , et al. December 13, 2 | 2016-12-13 |
Semiconductor device and method of manufacturing the same Grant 9,443,991 - Funayama , et al. September 13, 2 | 2016-09-13 |
Method Of Manufacturing Semiconductor Device App 20160260795 - Abe; Satoshi ;   et al. | 2016-09-08 |
Method Of Manufacturing Semiconductor Device App 20160225902 - TOBA; Koichi ;   et al. | 2016-08-04 |
Method For Manufacturing A Semiconductor Device App 20160204116 - Kawashima; Yoshiyuki ;   et al. | 2016-07-14 |
Semiconductor Device And Method Of Manufacturing The Same App 20160190350 - FUNAYAMA; Kota ;   et al. | 2016-06-30 |
Semiconductor device and manufacturing method of semiconductor device Grant 9,379,127 - Toba , et al. June 28, 2 | 2016-06-28 |
Method of manufacturing semiconductor device Grant 9,373,630 - Toba , et al. June 21, 2 | 2016-06-21 |
Manufacturing Method Of Semiconductor Device App 20160172201 - KAWASHIMA; Yoshiyuki ;   et al. | 2016-06-16 |
Method Of Manufacturing Semiconductor Device App 20160118394 - TOBA; Koichi ;   et al. | 2016-04-28 |
Semiconductor device and method of manufacturing the same Grant 9,324,883 - Funayama , et al. April 26, 2 | 2016-04-26 |
Method for manufacturing a semiconductor device Grant 9,324,726 - Kawashima , et al. April 26, 2 | 2016-04-26 |
Semiconductor device and a manufacturing method thereof Grant 9,324,725 - Saito , et al. April 26, 2 | 2016-04-26 |
Manufacturing method of semiconductor device Grant 9,299,569 - Kawashima , et al. March 29, 2 | 2016-03-29 |
Semiconductor Device App 20160079160 - Ishii; Yasushi ;   et al. | 2016-03-17 |
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Semiconductor Device And A Manufacturing Method Thereof App 20160035739 - SAITO; Kentaro ;   et al. | 2016-02-04 |
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Method Of Manufacturing A Semiconductor Device App 20160027794 - Nishikizawa; Hiroshi ;   et al. | 2016-01-28 |
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Semiconductor Device And Manufacturing Method Thereof App 20150380425 - Ogata; Koji ;   et al. | 2015-12-31 |
Semiconductor device having a capacitive element Grant 9,214,350 - Ishii , et al. December 15, 2 | 2015-12-15 |
Semiconductor device and a manufacturing method thereof Grant 9,196,748 - Saito , et al. November 24, 2 | 2015-11-24 |
Semiconductor Device And Manufacturing Method Thereof App 20150325583 - Funayama; Kota ;   et al. | 2015-11-12 |
Method of manufacturing a semiconductor device Grant 9,171,727 - Nishikizawa , et al. October 27, 2 | 2015-10-27 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20150287736 - Toba; Koichi ;   et al. | 2015-10-08 |
Semiconductor Integrated Circuit Device And Process For Manufacturing The Same App 20150279788 - UCHIYAMA; Hiroyuki ;   et al. | 2015-10-01 |
Method of manufacturing semiconductor device and semiconductor device Grant 9,099,334 - Ishii , et al. August 4, 2 | 2015-08-04 |
Semiconductor device and manufacturing method thereof Grant 9,093,319 - Funayama , et al. July 28, 2 | 2015-07-28 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 9,059,100 - Uchiyama , et al. June 16, 2 | 2015-06-16 |
Semiconductor device and manufacturing method of semiconductor device Grant 8,969,943 - Toba , et al. March 3, 2 | 2015-03-03 |
Semiconductor Device And Method Of Manufacturing The Same App 20150054045 - Chakihara; Hiraku ;   et al. | 2015-02-26 |
Manufacturing method of semiconductor device Grant 8,951,860 - Ishii , et al. February 10, 2 | 2015-02-10 |
Semiconductor Device And Method Of Manufacturing The Same App 20140374816 - FUNAYAMA; Kota ;   et al. | 2014-12-25 |
Semiconductor Device Manufacturing Method App 20140377889 - Chakihara; Hiraku ;   et al. | 2014-12-25 |
Semiconductor Device App 20140346581 - Ishii; Yasushi ;   et al. | 2014-11-27 |
Semiconductor device and method of manufacturing the same Grant 8,896,053 - Chakihara , et al. November 25, 2 | 2014-11-25 |
Semiconductor device and method of manufacturing the same Grant 8,853,036 - Funayama , et al. October 7, 2 | 2014-10-07 |
Semiconductor Device And Method Of Manufacturing The Same App 20140239378 - Toba; Koichi ;   et al. | 2014-08-28 |
Semiconductor Device And A Manufacturing Method Thereof App 20140239367 - SAITO; KENTARO ;   et al. | 2014-08-28 |
Method Of Manufacturing A Semiconductor Device App 20140242767 - NISHIKIZAWA; HIROSHI ;   et al. | 2014-08-28 |
Method Of Manufacturing Semiconductor Device App 20140242796 - TOBA; Koichi ;   et al. | 2014-08-28 |
Semiconductor device and a manufacturing method thereof Grant 8,809,934 - Chakihara , et al. August 19, 2 | 2014-08-19 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20140209996 - TOBA; Koichi ;   et al. | 2014-07-31 |
Semiconductor Device And Method Of Manufacturing The Same App 20140106530 - FUNAYAMA; KOTA ;   et al. | 2014-04-17 |
Method Of Manufacturing Semiconductor Device And Semiconductor Device App 20140077310 - Ishii; Yasushi ;   et al. | 2014-03-20 |
Semiconductor memory device and a method of manufacturing the same Grant 8,652,895 - Moniwa , et al. February 18, 2 | 2014-02-18 |
Semiconductor Integrated Circuit Device And Process For Manufacturing The Same App 20140045320 - UCHIYAMA; Hiroyuki ;   et al. | 2014-02-13 |
Semiconductor Device And A Manufacturing Method Thereof App 20140035027 - CHAKIHARA; Hiraku ;   et al. | 2014-02-06 |
Semiconductor device and method of manufacturing the same Grant 8,633,530 - Funayama , et al. January 21, 2 | 2014-01-21 |
Method of manufacturing semiconductor device and semiconductor device Grant 08617974 - | 2013-12-31 |
Method of manufacturing semiconductor device and semiconductor device Grant 8,617,974 - Ishii , et al. December 31, 2 | 2013-12-31 |
Method of manufacturing semiconductor integrated circuit device Grant 8,569,144 - Funayama , et al. October 29, 2 | 2013-10-29 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 8,569,107 - Uchiyama , et al. October 29, 2 | 2013-10-29 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 8,558,352 - Uchiyama , et al. October 15, 2 | 2013-10-15 |
Non-volatile memory semiconductor device Grant 8,546,867 - Chakihara , et al. October 1, 2 | 2013-10-01 |
Method of fabricating a nonvolatile memory Grant 8,507,340 - Chakihara , et al. August 13, 2 | 2013-08-13 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Grant 8,476,138 - Chakihara , et al. July 2, 2 | 2013-07-02 |
Semiconductor Device And A Manufacturing Method Thereof App 20130164927 - CHAKIHARA; Hiraku ;   et al. | 2013-06-27 |
Method Of Manufacturing Semiconductor Device And Semiconductor Device App 20130149854 - ISHII; Yasushi ;   et al. | 2013-06-13 |
Semiconductor Device and Method of Manufacturing the Same App 20130126960 - CHAKIHARA; Hiraku ;   et al. | 2013-05-23 |
Non-volatile Memory Semiconductor Device App 20130119454 - CHAKIHARA; Hiraku ;   et al. | 2013-05-16 |
Manufacturing Method Of Semiconductor Device App 20130084684 - ISHII; Yasushi ;   et al. | 2013-04-04 |
Semiconductor device and a manufacturing method thereof Grant 8,395,203 - Chakihara , et al. March 12, 2 | 2013-03-12 |
Semiconductor device and method of manufacturing the same Grant 8,373,216 - Chakihara , et al. February 12, 2 | 2013-02-12 |
Non-volatile memory semiconductor device Grant 8,357,968 - Chakihara , et al. January 22, 2 | 2013-01-22 |
Semiconductor Device And Manufacturing Method Thereof App 20120292679 - FUNAYAMA; Kota ;   et al. | 2012-11-22 |
Semiconductor Integrated Circuit Device And Process For Manufacturing The Same App 20120220104 - UCHIYAMA; Hiroyuki ;   et al. | 2012-08-30 |
Semiconductor Device And Manufacturing Method Of Semiconductor Device App 20120132978 - TOBA; Koichi ;   et al. | 2012-05-31 |
Method Of Manufacturing Semiconductor Integrated Circuit Device App 20120129317 - FUNAYAMA; Kota ;   et al. | 2012-05-24 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 8,183,091 - Uchiyama , et al. May 22, 2 | 2012-05-22 |
Semiconductor Integrated Circuit Device And Process For Manufacturing The Same App 20120091565 - UCHIYAMA; Hiroyuki ;   et al. | 2012-04-19 |
Method of manufacturing semiconductor integrated circuit device Grant 8,133,795 - Funayama , et al. March 13, 2 | 2012-03-13 |
Semiconductor Device And Method Of Manufacturing The Same App 20110272753 - Funayama; Kota ;   et al. | 2011-11-10 |
Semiconductor Memory Device And A Method Of Manufacturing The Same App 20110275207 - MONIWA; Masahiro ;   et al. | 2011-11-10 |
Method Of Manufacturing A Semiconductor Integrated Circuit Device App 20110250752 - Chakihara; Hiraku ;   et al. | 2011-10-13 |
Semiconductor Memory Device And A Method Of Manufacturing The Same, A Method Of Manufacturing A Vertical Misfet And A Vertical Misfet, And A Method Of Manufacturing A Semiconductor Device And A Semiconductor Device App 20110230041 - CHAKIHARA; Hiraku ;   et al. | 2011-09-22 |
Method of manufacturing a semiconductor integrated circuit device Grant 7,985,678 - Chakihara , et al. July 26, 2 | 2011-07-26 |
Semiconductor memory device and a method of manufacturing the same Grant 7,981,738 - Moniwa , et al. July 19, 2 | 2011-07-19 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Grant 7,972,920 - Chakihara , et al. July 5, 2 | 2011-07-05 |
Method Of Manufacturing Semiconductor Integrated Circuit Device App 20110129984 - FUNAYAMA; Kota ;   et al. | 2011-06-02 |
Semiconductor Device And A Manufacturing Method Thereof App 20110121382 - CHAKIHARA; Hiraku ;   et al. | 2011-05-26 |
Semiconductor Device And Method Of Manufacturing The Same App 20110095348 - CHAKIHARA; Hiraku ;   et al. | 2011-04-28 |
Semiconductor Memory Device And A Method Of Manufacturing The Same App 20110034017 - MONIWA; Masahiro ;   et al. | 2011-02-10 |
Method Of Manufacturing A Semiconductor Integrated Circuit Device App 20110021022 - Chakihara; Hiraku ;   et al. | 2011-01-27 |
Method of manufacturing a semiconductor integrated circuit device Grant 7,833,905 - Chakihara , et al. November 16, 2 | 2010-11-16 |
Semiconductor memory device and a method of manufacturing the same Grant 7,829,952 - Moniwa , et al. November 9, 2 | 2010-11-09 |
Semiconductor Integrated Circuit Device And Process For Manufacturing The Same App 20100197105 - UCHIYAMA; Hiroyuki ;   et al. | 2010-08-05 |
Semiconductor Memory Device and a Method of Manufacturing the Same, A Method of Manufacturing a Vertical MISFET and a Vertical MISFET, and a Method of Manufacturing a Semiconductor Device and a Semiconductor Device App 20100136778 - Chakihara; Hiraku ;   et al. | 2010-06-03 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Grant 7,701,020 - Chakihara , et al. April 20, 2 | 2010-04-20 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 7,696,608 - Uchiyama , et al. April 13, 2 | 2010-04-13 |
Non-volatile Memory Semiconductor Device App 20100078705 - CHAKIHARA; Hiraku ;   et al. | 2010-04-01 |
Method Of Manufacturing A Semiconductor Integrated Circuit Device App 20090275193 - Chakihara; Hiraku ;   et al. | 2009-11-05 |
Semiconductor Memory Device And A Method Of Manufacturing The Same App 20090261390 - MONIWA; Masahiro ;   et al. | 2009-10-22 |
Semiconductor memory device and a method of manufacturing the same Grant 7,598,133 - Moniwa , et al. October 6, 2 | 2009-10-06 |
Method of manufacturing a semiconductor integrated circuit device Grant 7,595,266 - Chakihara , et al. September 29, 2 | 2009-09-29 |
Semiconductor Memory Device And A Method Of Manufacturing The Same, A Method Of Manufacturing A Vertical Misfet And A Vertical Misfet, And A Method Of Manufacturing A Semiconductor Device And A Semiconductor Device App 20090140342 - CHAKIHARA; Hiraku ;   et al. | 2009-06-04 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Grant 7,495,289 - Chakihara , et al. February 24, 2 | 2009-02-24 |
Semiconductor Integrated Circuit Device And Process For Manufacturing The Same App 20080283970 - Uchiyama; Hiroyuki ;   et al. | 2008-11-20 |
Method of Manufacturing A Semiconductor Integrated Circuit Device App 20080268639 - Chakihara; Hiraku ;   et al. | 2008-10-30 |
Semiconductor integrated circuit device and a method of manufacturing the same Grant 7,411,238 - Nishida , et al. August 12, 2 | 2008-08-12 |
Method of manufacturing a semiconductor integrated circuit device Grant 7,402,475 - Chakihara , et al. July 22, 2 | 2008-07-22 |
Semiconductor Integrated Circuit Device And A Method Of Manufacturing The Same App 20080128855 - NISHIDA; Akio ;   et al. | 2008-06-05 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 7,327,014 - Uchiyama , et al. February 5, 2 | 2008-02-05 |
Semiconductor memory device and a method of manufacturing the same Grant 7,279,754 - Moniwa , et al. October 9, 2 | 2007-10-09 |
Semiconductor memory device and a method of manufacturing the same App 20070173006 - Moniwa; Masahiro ;   et al. | 2007-07-26 |
Semiconductor integrated circuit device and manufacturing method thereof Grant 7,221,056 - Yamamoto , et al. May 22, 2 | 2007-05-22 |
Semiconductor integrated circuit device and process for manufacturing the same App 20070063315 - Uchiyama; Hiroyuki ;   et al. | 2007-03-22 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Grant 7,190,031 - Chakihara , et al. March 13, 2 | 2007-03-13 |
Semiconductor device and a method of manufacturing the same Grant 7,179,737 - Nishida , et al. February 20, 2 | 2007-02-20 |
Semiconductor integrated circuit device and a method of manufacturing the same App 20070034968 - Nishida; Akio ;   et al. | 2007-02-15 |
Semiconductor memory device and method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Grant 7,161,215 - Chakihara , et al. January 9, 2 | 2007-01-09 |
Semiconductor integrated circuit device and process for manufacturing the same Grant 7,154,164 - Uchiyama , et al. December 26, 2 | 2006-12-26 |
Semiconductor integrated circuit device and a method of manufacturing the same Grant 7,145,194 - Nishida , et al. December 5, 2 | 2006-12-05 |
Semiconductor integrated circuit device including dummy patterns located to reduce dishing Grant 7,112,870 - Uchiyama , et al. September 26, 2 | 2006-09-26 |
Semiconductor memory device and method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device App 20060208319 - Chakihara; Hiraku ;   et al. | 2006-09-21 |
Method of manufacturing a semiconductor integrated circuit device Grant 7,109,126 - Chakihara , et al. September 19, 2 | 2006-09-19 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device App 20060202286 - Chakihara; Hiraku ;   et al. | 2006-09-14 |
Semiconductor integrated circuit device and process for manufacturing the same App 20060192270 - Uchiyama; Hiroyuki ;   et al. | 2006-08-31 |
Method of manufacturing a semiconductor integrated circuit device App 20060057795 - Chakihara; Hiraku ;   et al. | 2006-03-16 |
Semiconductor integrated circuit device including dummy patterns located to reduce dishing Grant 7,009,233 - Uchiyama , et al. March 7, 2 | 2006-03-07 |
Semiconductor integrated circuit equipment and its manufacture method App 20050230716 - Moriya, Satoshi ;   et al. | 2005-10-20 |
Semiconductor integrated circuit device including dummy patterns located to reduce dishing App 20050110065 - Uchiyama, Hiroyuki ;   et al. | 2005-05-26 |
Semiconductor integrated circuit device and manufacturing method thereof App 20050073051 - Yamamoto, Naoki ;   et al. | 2005-04-07 |
Semiconductor device and a method of manufacturing the same App 20050059236 - Nishida, Akio ;   et al. | 2005-03-17 |
Method of manufacturing a semiconductor integrated circuit device App 20040242014 - Chakihara, Hiraku ;   et al. | 2004-12-02 |
Semiconductor integrated circuit device and a method of manufacturing the same App 20040164360 - Nishida, Akio ;   et al. | 2004-08-26 |
Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device App 20040043550 - Chakihara, Hiraku ;   et al. | 2004-03-04 |
Semiconductor memory device and a method of manufacturing the same App 20040005755 - Moniwa, Masahiro ;   et al. | 2004-01-08 |
Semiconductor integrated circuit device including dummy patterns located to reduce dishing App 20030183860 - Uchiyama, Hiroyuki ;   et al. | 2003-10-02 |
Semiconductor integrated circuit device including dummy patterns located to reduce dishing Grant 6,603,162 - Uchiyama , et al. August 5, 2 | 2003-08-05 |