U.S. patent application number 14/532914 was filed with the patent office on 2015-02-26 for semiconductor device and method of manufacturing the same.
This patent application is currently assigned to RENESAS ELECTRONICS CORPORATION. The applicant listed for this patent is RENESAS ELECTRONICS CORPORATION. Invention is credited to Hiraku Chakihara, Yasushi Ishii.
Application Number | 20150054045 14/532914 |
Document ID | / |
Family ID | 43897651 |
Filed Date | 2015-02-26 |
United States Patent
Application |
20150054045 |
Kind Code |
A1 |
Chakihara; Hiraku ; et
al. |
February 26, 2015 |
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
Abstract
Technique of improving a manufacturing yield of a semiconductor
device including a non-volatile memory cell in a split-gate
structure is provided. A select gate electrode of a CG shunt
portion is formed so that a second height d2 from the main surface
of the semiconductor substrate of the select gate electrode of the
CG shunt portion positioned in the feeding region is lower than a
first height d1 of the select gate electrode from the main surface
of the semiconductor substrate in a memory cell forming region.
Inventors: |
Chakihara; Hiraku;
(Kawasaki-shi, JP) ; Ishii; Yasushi;
(Kawasaki-shi, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
RENESAS ELECTRONICS CORPORATION |
Kawasaki-shi |
|
JP |
|
|
Assignee: |
RENESAS ELECTRONICS
CORPORATION
|
Family ID: |
43897651 |
Appl. No.: |
14/532914 |
Filed: |
November 4, 2014 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
|
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13740045 |
Jan 11, 2013 |
8896053 |
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14532914 |
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12913759 |
Oct 27, 2010 |
8373216 |
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13740045 |
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Current U.S.
Class: |
257/314 |
Current CPC
Class: |
H01L 27/11568 20130101;
H01L 29/42324 20130101; H01L 29/66659 20130101; H01L 21/823835
20130101; H01L 29/42328 20130101; H01L 21/823462 20130101; H01L
29/792 20130101; H01L 29/40117 20190801; H01L 29/0649 20130101;
H01L 29/42344 20130101; H01L 29/4234 20130101; H01L 29/66825
20130101; H01L 27/11519 20130101; H01L 28/40 20130101; H01L
29/66833 20130101; H01L 27/11521 20130101; H01L 29/7881 20130101;
H01L 21/823443 20130101; H01L 27/0922 20130101; H01L 27/11575
20130101; H01L 27/11548 20130101; H01L 27/11565 20130101; H01L
29/4975 20130101; H01L 29/6653 20130101; H01L 29/7835 20130101;
H01L 29/40114 20190801; H01L 27/11546 20130101 |
Class at
Publication: |
257/314 |
International
Class: |
H01L 27/115 20060101
H01L027/115; H01L 29/423 20060101 H01L029/423; H01L 29/06 20060101
H01L029/06; H01L 29/49 20060101 H01L029/49 |
Foreign Application Data
Date |
Code |
Application Number |
Oct 28, 2009 |
JP |
2009-248002 |
Mar 25, 2010 |
JP |
2010-69271 |
Sep 10, 2010 |
JP |
2010-203164 |
Claims
1-67. (canceled)
68. A semiconductor device including a memory cell of a
non-volatile memory comprising: a semiconductor substrate having a
memory cell forming region and a power supplying region; a first
gate insulating film formed over the semiconductor substrate; a
first gate electrode formed over the semiconductor substrate via
the first gate insulating film for forming the memory cell; a first
insulating film formed over the first gate electrode; a second gate
electrode formed over the semiconductor substrate so as to be
adjacent to the first gate electrode in a first direction for
forming the memory cell; a second gate insulating film having a
charge storage portion inside formed between the second gate
electrode and the semiconductor substrate and between the first
gate electrode and the second gate electrode; an interlayer
insulating film formed over the semiconductor substrate so as to
cover the memory cell; a first plug which supplies a potential to
the first gate electrode and which is formed in the interlayer
insulating film; a second plug which supplies a potential to the
second gate electrode and which is formed in the interlayer
insulating film, wherein the second gate electrode is formed over a
sidewall of a stacked film pattern formed of the first gate
electrode and the first insulating film, wherein the first gate
electrode, the first insulating film, and the second gate electrode
are formed so as to extend in a second direction orthogonal to the
first direction, wherein the first gate electrode is formed in the
power supplying region and includes a first contact portion
connected to the first plug, wherein a first metal silicide layer
is formed in at least a part of an upper surface of the first
contact portion which is not covered by the first insulating film,
wherein the first metal silicide layer is not formed in a part of
an upper surface of the first gate electrode which is covered by
the first insulating film, wherein the second gate electrode is
formed in the power supplying region and includes a second contact
portion connected to the second plug, wherein the second contact
portion extends in a direction away from the first gate electrode
from a position adjacent to the sidewall of the first gate
electrode, wherein the second contact portion does not extend over
the first insulating film, and wherein the second metal silicide
layer is formed in an upper portion of the second gate
electrode.
69. The semiconductor device according to claim 68, wherein a
length of the second contact portion in the first direction is
greater than a length of the second gate electrode in the memory
cell forming region.
70. The semiconductor device according to claim 68, wherein the
second contact portion extends in the first direction.
71. The semiconductor device according to claim 68, wherein the
first contact portion extends in a direction away from the second
gate electrode.
72. The semiconductor device according to claim 71, wherein a
length of the first contact portion in the first direction is
greater than a length of the first gate electrode in the memory
cell forming region.
73. The semiconductor device according to claim 68, further
comprising: a first wiring formed over the interlayer insulating
film and electrically connected to the first contact portion via
the first plug; and a second wiring formed over the interlayer
insulating film and electrically connected to the second contact
portion via the second plug.
74. The semiconductor device according to claim 68, wherein a
device isolation region is formed in the semiconductor substrate,
and wherein the first contact portion and the second contact
portion are formed over the device isolation region.
75. The semiconductor device according to claim 68, wherein the
second gate electrode formed over the memory cell forming region is
formed in a sidewall spacer shape over one sidewall of the first
gate electrode.
Description
CROSS-REFERENCE TO RELATED APPLICATION
[0001] The present application claims priorities from Japanese
Patent Application No. 2009-248002 filed on Oct. 28, 2009, Japanese
Patent Application No. 2010-69271 filed on Mar. 25, 2010, and
Japanese Patent Application No. 2010-203164 filed on Sep. 10, 2010,
the contents of which are hereby incorporated by reference into
this application.
TECHNICAL FIELD OF THE INVENTION
[0002] The present invention relates to a semiconductor device and
a method of manufacturing the same. More particularly, the present
invention relates to technique effectively applied to a
semiconductor device including a non-volatile memory and a method
of manufacturing the semiconductor device.
BACKGROUND OF THE INVENTION
[0003] EEPROM (electrically erasable and programmable read only
memory) is widely used as one of electrically erasable and
programmable non-volatile semiconductor memory devices. These
memory devices (memories), typified by flash memory which is
currently widely used, have a conductive floating gate surrounded
by an oxide film or a trap insulating film under a gate electrode
of a MISFET, and a charge storage state in the floating gate or
trap insulating film is taken as memory information of the memories
and the charge storage state is read as a threshold voltage of the
transistor. The trap insulating film means an insulating film
capable of storing (accumulating) charges, and a silicon nitride
film is an example. A threshold voltage of a MISFET is shifted by
injection/release of charges to/from such a charge storage region
to operate the MISFET as a memory element. As the flash memory,
there is a split-gate-type cell using MONOS
(metal-oxide-nitride-oxide semiconductor). By using a silicon
nitride film as a charge storage region, this MONOS flash memory
has better reliability of data retention than a conductive floating
gate film as the silicon nitride film discretely stores charges,
and oxide films over and under the silicon nitride film can be
thinned as the silicon nitride film has good reliability, and thus
there are advantages such that a voltage lowering in reading and
programming operations can be attained, etc.
[0004] For example, Japanese Patent Application Laid-Open
Publication No. 2003-309193 (Patent Document 1) discloses a
non-volatile memory cell transistor including a first gate
electrode (control gate electrode) and a second gate electrode
(memory gate electrode) disposed via an insulating film and a
charge storage film, wherein the structure is processed so that a
height of the first gate electrode from a surface of a substrate is
lower than a height of the second gate electrode film from the
substrate surface or a height of a gate electrode of a transistor
formed in a peripheral circuit from the surface of the
substrate.
[0005] Japanese Patent Application Laid-Open Publication No.
2006-054292 (Patent Document 2) discloses a method of arranging
isolated subsidiary patterns being adjacent to a select gate
electrode in a memory cell that has a split-gate structure and
forming contacts to wiring portions formed in a self-aligned manner
by filling polysilicon of a sidewall gate to a gap between the
subsidiary patterns.
[0006] Japanese Patent Application Laid-Open Publication No.
2006-049737 (Patent Document 3) discloses a memory cell in which a
memory gate line is formed on a sidewall of a select gate line via
an insulating film, a contact portion extended in an X direction is
provided from above a second portion of the select gate line to a
device isolation region, and the memory cell is connected to
wirings via plugs buried in contact holes formed on contact
portions.
[0007] Japanese Patent Application Laid-Open Publication No.
2005-347679 (Patent Document 4) discloses a MONOS (metal oxide
nitride oxide semiconductor) type non-volatile memory cell in which
a cap insulating film to be a mask during a processing of a select
gate electrode is formed on the select gate electrode, and a memory
gate electrode is formed on a sidewall of a stacked film formed of
the select gate electrode and the cap insulating film.
SUMMARY OF THE INVENTION
[0008] Miniaturization of semiconductor devices including
non-volatile memories has been increasingly advanced. Also,
technology for improving a manufacturing yield of the semiconductor
devices including non-volatile memories has been desired. Moreover,
technology for ensuring reliability after improving performance of
miniaturized non-volatile memories is desired.
[0009] A preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of a
semiconductor device including a non-volatile memory.
[0010] Another preferred aim of the present invention is to provide
technology capable of improving reliability of the semiconductor
device.
[0011] Another preferred aim of the present invention is to provide
technology capable of advancing miniaturization of the
semiconductor device.
[0012] Another preferred aim of the present invention is to provide
technology capable of improving performance of the semiconductor
device.
[0013] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also improving reliability of the
semiconductor device.
[0014] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also advancing miniaturization of the
semiconductor device.
[0015] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also improving performance of the
semiconductor device.
[0016] Another preferred aim of the present invention is to provide
technology capable of improving reliability of the semiconductor
device and also advancing miniaturization of the semiconductor
device.
[0017] Another preferred aim of the present invention is to provide
technology capable of improving reliability of the semiconductor
device and also improving performance of the semiconductor
device.
[0018] Another preferred aim of the present invention is to provide
technology capable of advancing miniaturization of the
semiconductor device and also improving performance of the
semiconductor device.
[0019] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also improving reliability of the
semiconductor device, and advancing miniaturization of the
semiconductor device.
[0020] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also improving reliability of the
semiconductor device, and improving performance of the
semiconductor device.
[0021] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also advancing miniaturization of the
semiconductor device, and improving performance of the
semiconductor device.
[0022] Another preferred aim of the present invention is to provide
technology capable of improving reliability of the semiconductor
device and also advancing miniaturization of the semiconductor
device, and improving performance of the semiconductor device.
[0023] Another preferred aim of the present invention is to provide
technology capable of improving a manufacturing yield of the
semiconductor device and also advancing miniaturization of the
semiconductor device, and improving performance of the
semiconductor device.
[0024] The above and other preferred aims and novel characteristics
of the present invention will be apparent from the description of
the present specification and the accompanying drawings.
[0025] The typical ones of the inventions disclosed in the present
application will be briefly described as follows.
[0026] A semiconductor device according to a typical embodiment is
a semiconductor device including: a memory cell forming region in
which a plurality of memory cells are formed in an array; and a
feeding region, in a semiconductor substrate. The memory cell
formed in the memory cell forming region includes: a first gate
insulating film formed on the semiconductor substrate; a select
gate electrode formed on the first gate insulating film and having
a first height from a main surface of the semiconductor substrate;
a memory gate electrode formed in a side-wall shape on one of side
surfaces of the select gate electrode; and a second gate insulating
film formed between the select gate electrode and the memory gate
electrode, and formed between the memory gate electrode and the
semiconductor substrate. In addition, in the feeding region, the
select gate electrode having a second height that is lower than the
first height is provided, a pad electrode formed of a conductive
film in a same layer as the memory gate electrode runs over a
partial region of the select gate electrode having the second
height formed in the feeding region, and the pad electrode is
connected to the memory gate electrode formed in the memory cell
forming region.
[0027] A method of manufacturing a semiconductor device according
to a typical embodiment is a method of manufacturing a
semiconductor device including a memory cell. A process of forming
the memory cell includes the steps of: forming a first gate
insulating film on a semiconductor substrate; forming a first
conductive film on the first gate insulating film; forming a select
gate electrode having a first height from a main surface of the
semiconductor substrate by processing the first conductive film;
thinning the select gate electrode in a feeding region to make a
second height of the select gate electrode in the feeding region
from the main surface of the semiconductor substrate lower than the
first height; then, forming a second gate insulating film on the
semiconductor substrate; forming a second conductive film on the
second gate insulating film; forming a memory gate electrode in a
sidewall shape on a side surface of the select gate electrode by
performing an anisotropic etching on the second conductive film
using a photoresist pattern as a mask, and at the same time,
forming a pad electrode running over the select gate electrode
having the second height in the feeding region; removing the memory
gate electrode formed on one sidewall in a memory cell forming
region to leave the memory gate electrode formed on the other
sidewall; then, forming a source region and a drain region to the
semiconductor substrate in a region in which the memory cell is
formed; and then, forming a silicide layer to an upper surface of
the memory gate electrode, an upper surface of the select gate
electrode, an upper surface of the pad electrode, and upper
surfaces of the source region and the drain region in the region in
which the memory cell is formed.
[0028] In addition, in the semiconductor device of another typical
embodiment, a contact portion of the memory gate electrode does not
have a portion positioned above a select gate electrode.
[0029] Moreover, in the method of manufacturing semiconductor
device according to another typical embodiment, a contact portion
of the memory gate electrode is once formed to have a portion
running over the select gate electrode, and then the contact
portion is subjected to an isotropic etching so that the contact
portion does not have a portion running over the select gate
electrode.
[0030] The effects obtained by typical aspects of the present
invention will be briefly described below.
[0031] According to the typical embodiments, a manufacturing yield
can be improved in a semiconductor device including a non-volatile
memory cell.
[0032] Another effect of the present invention is improving
reliability of the semiconductor device.
[0033] Another effect of the present invention is advancing
miniaturization of the semiconductor device.
[0034] Another effect of the present invention is improving
performance of the semiconductor device.
[0035] Another effect of the present invention is improving a
manufacturing yield and also improving reliability of the
semiconductor device.
[0036] Another effect of the present invention is improving a
manufacturing yield and also advancing miniaturization of the
semiconductor device.
[0037] Another effect of the present invention is improving a
manufacturing yield and also improving performance of the
semiconductor device.
[0038] Another effect of the present invention is improving
reliability of the semiconductor device and also advancing
miniaturization of the semiconductor device.
[0039] Another effect of the present invention is improving
reliability of the semiconductor device and also improving
performance of the semiconductor device.
[0040] Another effect of the present invention is advancing
miniaturization of the semiconductor device and also improving
performance of the semiconductor device.
[0041] Another effect of the present invention is improving a
manufacturing yield, also improving reliability of the
semiconductor device, and also advancing miniaturization of the
semiconductor device.
[0042] Another effect of the present invention is improving a
manufacturing yield, also improving reliability of the
semiconductor device, and also improving performance of the
semiconductor device.
[0043] Another effect of the present invention is improving a
manufacturing yield, also advancing miniaturization of the
semiconductor device, and also improving performance of the
semiconductor device.
[0044] Another effect of the present invention is improving
reliability of the semiconductor device, also advancing
miniaturization of the semiconductor device, and also improving
performance of the semiconductor device.
[0045] Another effect of the present invention are improving a
manufacturing yield, improving reliability of the semiconductor
device, advancing miniaturization of the semiconductor device, and
also improving performance of the semiconductor device.
BRIEF DESCRIPTIONS OF THE DRAWINGS
[0046] FIG. 1 is a cross-sectional view of a main part of a
non-volatile memory cell according to a first embodiment of the
present invention, cutting a channel along a direction crossing a
memory gate electrode;
[0047] FIG. 2 is a plan view of a main part of a feeding region of
a non-volatile memory cell according to the first embodiment of the
present invention;
[0048] FIG. 3 is a cross-sectional view of a main part taken along
the line A-A' of FIG. 2 (a cross-sectional view of a main part of a
shunt portion of the memory gate electrode and a select gate
electrode);
[0049] FIG. 4 is a cross-sectional view of a main part illustrating
a first modification example of the feeding region of the
non-volatile memory cell according to the first embodiment of the
present invention;
[0050] FIG. 5 is a cross-sectional view of a main part illustrating
a second modification example of the feeding region of the
non-volatile memory cell according to the first embodiment of the
present invention;
[0051] FIG. 6 is a cross-sectional view of a main part taken along
the line B-B' of FIG. 5 (a cross-sectional view of a main part of a
shunt portion of the memory gate electrode and the select gate
electrode);
[0052] FIG. 7 is cross-sectional view of a main part illustrating a
third modification example of the feeding region of the
non-volatile memory cell according to the first embodiment of the
present invention;
[0053] FIG. 8 is a cross-sectional view of a main part illustrating
a manufacturing process of a semiconductor device including the
non-volatile memory cell according to the first embodiment of the
present invention;
[0054] FIG. 9 is a cross-sectional view of the semiconductor device
including the non-volatile memory cell in the same portion as FIG.
8 during the manufacturing process of the semiconductor device
continued from FIG. 8;
[0055] FIG. 10 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 9;
[0056] FIG. 11 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 10;
[0057] FIG. 12 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 11;
[0058] FIG. 13 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 12;
[0059] FIG. 14 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 13;
[0060] FIG. 15 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 14;
[0061] FIG. 16 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 15;
[0062] FIG. 17 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 16;
[0063] FIG. 18 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 17;
[0064] FIG. 19 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 18;
[0065] FIG. 20 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 19;
[0066] FIG. 21 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 20;
[0067] FIG. 22 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 21;
[0068] FIG. 23 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 22;
[0069] FIG. 24 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 23;
[0070] FIG. 25 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 24;
[0071] FIG. 26 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 8 during the manufacturing process of the semiconductor
device continued from FIG. 25;
[0072] FIG. 27 is a cross-sectional view of a main part (a
cross-sectional view of a main part of a memory gate electrode and
a select gate electrode) in a feeding region of a non-volatile
memory cell according to a second embodiment of the present
invention;
[0073] FIG. 28 is a cross-sectional view of a main part
illustrating a first modification example of the feeding region of
the non-volatile memory cell according to the second embodiment of
the present invention;
[0074] FIG. 29 is a cross-sectional view of a main part
illustrating a second modification example of the feeding region of
the non-volatile memory cell according to the second embodiment of
the present invention;
[0075] FIG. 30 is a cross-sectional view of a main part
illustrating a manufacturing process of a semiconductor device
including the non-volatile memory cell according to the second
embodiment of the present invention;
[0076] FIG. 31 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 30 during the manufacturing process of the semiconductor
device continued from FIG. 30;
[0077] FIG. 32 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 30 during the manufacturing process of the semiconductor
device continued from FIG. 31;
[0078] FIG. 33 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 30 during the manufacturing process of the semiconductor
device continued from FIG. 32;
[0079] FIG. 34 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 30 during the manufacturing process of the semiconductor
device continued from FIG. 33;
[0080] FIG. 35 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 30 during the manufacturing process of the semiconductor
device continued from FIG. 34;
[0081] FIG. 36 is a cross-sectional view of the semiconductor
device including the non-volatile memory cell in the same portion
as FIG. 30 during the manufacturing process of the semiconductor
device continued from FIG. 35;
[0082] FIG. 37 is a plan view of a main part of a semiconductor
device according to a third embodiment of the present
invention;
[0083] FIG. 38 is a plan view of a main part of the semiconductor
device according to the third embodiment of the present
invention;
[0084] FIG. 39 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device according to the third embodiment of the
present invention;
[0085] FIG. 40 is a cross-sectional view of a main part
(cross-sectional view taken along the line B1-B1) of the
semiconductor device according to the third embodiment of the
present invention;
[0086] FIG. 41 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device according to the third embodiment of the
present invention;
[0087] FIG. 42 is a cross-sectional view of a main part
(cross-sectional view taken along the line D1-D1) of the
semiconductor device according to the third embodiment of the
present invention;
[0088] FIG. 43 is a cross-sectional view of a main part
(cross-sectional view taken along the line E1-E1) of the
semiconductor device according to the third embodiment of the
present invention;
[0089] FIG. 44 is a cross-sectional view of a main part
illustrating a schematic cross-sectional structure of a memory cell
in the semiconductor device according to the third embodiment of
the present invention;
[0090] FIG. 45 is an equivalent circuit diagram of the memory
cell;
[0091] FIG. 46 is a table illustrating an example of conditions of
applying voltage to each part of a select memory cell upon
"program," "erase," and "read";
[0092] FIG. 47 is a process flow diagram illustrating a part of a
manufacturing process of the semiconductor device according to the
third embodiment of the present invention;
[0093] FIG. 48 is a plan view of a main part of the semiconductor
device during the manufacturing process according to the third
embodiment of the present invention;
[0094] FIG. 49 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process same as that
of FIG. 48;
[0095] FIG. 50 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 48 and 49;
[0096] FIG. 51 is a cross-sectional view (cross-sectional view
taken along the line A1-A1) of the semiconductor device during the
manufacturing process continued from FIGS. 48 to 50;
[0097] FIG. 52 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 51;
[0098] FIG. 53 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIGS. 51 and
52;
[0099] FIG. 54 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process same as that
of FIG. 53;
[0100] FIG. 55 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 53 and 54;
[0101] FIG. 56 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 53 to 55;
[0102] FIG. 57 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 56;
[0103] FIG. 58 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIGS. 56 and
57;
[0104] FIG. 59 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process same as that
of FIG. 58;
[0105] FIG. 60 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 58 and 59;
[0106] FIG. 61 is a plan view of the semiconductor device during
the manufacturing process continued from FIGS. 58 to 60;
[0107] FIG. 62 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process same as that
of FIG. 61;
[0108] FIG. 63 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 61 and 62;
[0109] FIG. 64 is a plan view of the semiconductor device during
the manufacturing process continued from FIGS. 61 to 63;
[0110] FIG. 65 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process same as that
of FIG. 64;
[0111] FIG. 66 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 64 and 65;
[0112] FIG. 67 is a cross-sectional view of a main part
(cross-sectional view taken along the line D1-D1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 64 to 66;
[0113] FIG. 68 is a cross-sectional view of a main part
(cross-sectional view taken along the line E1-E1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 64 to 67;
[0114] FIG. 69 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 64 to 68;
[0115] FIG. 70 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 69;
[0116] FIG. 71 is a cross-sectional view of a main part
(cross-sectional view taken along the line D1-D1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 69 and 70;
[0117] FIG. 72 is a cross-sectional view of a main part
(cross-sectional view taken along the line E1-E1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 69 to 71;
[0118] FIG. 73 is a plan view of the semiconductor device during
the manufacturing process continued from FIGS. 69 to 72;
[0119] FIG. 74 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process same as that
of FIG. 73;
[0120] FIG. 75 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 73 and 74;
[0121] FIG. 76 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 73 to 75;
[0122] FIG. 77 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 76;
[0123] FIG. 78 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 76 and 77;
[0124] FIG. 79 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 78;
[0125] FIG. 80 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 78 and 79;
[0126] FIG. 81 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 80;
[0127] FIG. 82 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 80 and 81;
[0128] FIG. 83 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 82;
[0129] FIG. 84 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 82 and 83;
[0130] FIG. 85 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 84;
[0131] FIG. 86 is a cross-sectional view of a main part
(cross-sectional view taken along the line A1-A1) of the
semiconductor device during the manufacturing process continued
from FIGS. 84 and 85;
[0132] FIG. 87 is a cross-sectional view of a main part
(cross-sectional view taken along the line C1-C1) of the
semiconductor device during the manufacturing process same as that
of FIG. 86;
[0133] FIG. 88 is a cross-sectional view of a main part of a
semiconductor device of a comparative example;
[0134] FIG. 89 is a cross-sectional view of a main part of the
semiconductor device of the comparative example;
[0135] FIG. 90 is an explanatory diagram illustrating a photoresist
pattern which is shifted due to a misalignment of a photomask etc.
(cross-sectional view taken along the line A1-A1);
[0136] FIG. 91 is an explanatory diagram illustrating the
photoresist pattern which is shifted due to a misalignment of a
photomask etc. (cross-sectional view taken along the line
C1-C1);
[0137] FIG. 92 is an explanatory diagram illustrating the
photoresist pattern which is shifted due to a misalignment of a
photomask etc. (cross-sectional view taken along the line
A1-A1);
[0138] FIG. 93 is an explanatory diagram illustrating the
photoresist pattern which is shifted due to a misalignment of a
photomask etc. (cross-sectional view taken along the line
C1-C1);
[0139] FIG. 94 is an explanatory diagram illustrating the
photoresist pattern which is shifted due to a misalignment of a
photomask etc. (cross-sectional view taken along the line
C1-C1);
[0140] FIG. 95 is a plan view of a main part of a semiconductor
device during a manufacturing process according to a fourth
embodiment of the present invention;
[0141] FIG. 96 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIG. 95;
[0142] FIG. 97 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIG. 96;
[0143] FIG. 98 is an explanatory diagram of a region to be
subjected to a side etching by an isotropic etching of a step
S10;
[0144] FIG. 99 is an explanatory diagram of the region to be
subjected to a side etching by the isotropic etching of the step
S10;
[0145] FIG. 100 is a cross-sectional view of a main part of a
semiconductor device according to a fifth embodiment of the present
invention;
[0146] FIG. 101 is a plan view of a main part of the semiconductor
device according to the fifth embodiment of the present
invention;
[0147] FIG. 102 is a plan view of a main part of the semiconductor
device according to the fifth embodiment of the present
invention;
[0148] FIG. 103 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device according to the fifth embodiment of the
present invention;
[0149] FIG. 104 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device according to the fifth embodiment of the
present invention;
[0150] FIG. 105 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during a manufacturing process according to
the fifth embodiment of the present invention;
[0151] FIG. 106 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIG.
105;
[0152] FIG. 107 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process same as that
of FIG. 106;
[0153] FIG. 108 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 106 and 107;
[0154] FIG. 109 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process continued
from FIGS. 106 to 108;
[0155] FIG. 110 is a plan view of a main part of the semiconductor
device during the manufacturing process same as that of FIG.
109;
[0156] FIG. 111 is a plan view of a main part of the semiconductor
device during the manufacturing process same as that of FIGS. 109
and 110;
[0157] FIG. 112 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process same as that
of FIG. 111;
[0158] FIG. 113 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 111 and 112;
[0159] FIG. 114 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIGS. 111 to
113;
[0160] FIG. 115 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process same as that
of FIG. 114;
[0161] FIG. 116 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 114 and 115;
[0162] FIG. 117 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIGS. 114 to
116;
[0163] FIG. 118 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process same as that
of FIG. 117;
[0164] FIG. 119 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIGS. 117 and 118;
[0165] FIG. 120 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process continued
from FIGS. 117 to 119;
[0166] FIG. 121 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIG. 120;
[0167] FIG. 122 is a plan view of a main part of the semiconductor
device during the manufacturing process continued from FIGS. 120
and 121;
[0168] FIG. 123 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process continued
from FIG. 122;
[0169] FIG. 124 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIG. 123;
[0170] FIG. 125 is a cross-sectional view of a main part
(cross-sectional view taken along the line F1-F1) of the
semiconductor device during the manufacturing process continued
from FIGS. 123 and 124;
[0171] FIG. 126 is a cross-sectional view of a main part
(cross-sectional view taken along the line G1-G1) of the
semiconductor device during the manufacturing process same as that
of FIG. 125;
[0172] FIG. 127A is a plan view of a feeding region of a
non-volatile memory cell which has been studied by the inventors of
the present invention;
[0173] FIG. 127B is a cross-sectional view (cross-sectional view of
a main part taken along the line C-C' of FIG. 127A) of the feeding
region of the non-volatile memory cell which has been studied by
the inventors of the present invention; and
[0174] FIG. 128 is a cross-sectional view of a main part of a
semiconductor device including a non-volatile semiconductor device
which the inventors of the present invention.
DESCRIPTIONS OF THE PREFERRED EMBODIMENTS
[0175] In the embodiments described below, the invention will be
described in a plurality of sections or embodiments when required
as a matter of convenience. However, these sections or embodiments
are not irrelevant to each other unless otherwise stated, and the
one relates to the entire or a part of the other as a modification
example, details, or a supplementary explanation thereof.
[0176] Also, in the embodiments described below, when referring to
the number of elements (including number of pieces, values, amount,
range, and the like), the number of the elements is not limited to
a specific number unless otherwise stated or except the case where
the number is apparently limited to a specific number in principle.
The number larger or smaller than the specified number is also
applicable. Further, in the embodiments described below, it goes
without saying that the components (including element steps) are
not always indispensable unless otherwise stated or except the case
where the components are apparently indispensable in principle.
Similarly, in the embodiments described below, when the shape of
the components, positional relation thereof, and the like are
mentioned, the substantially approximate or similar shapes and the
like are included therein unless otherwise stated or except the
case where it is conceivable that they are apparently excluded in
principle. The same goes for the numerical value and the range
mentioned above.
[0177] Also, in some drawings referenced in the embodiments,
hatching is used even in a plan view to facilitate viewing of the
drawings.
[0178] In the following embodiments, a metal insulator
semiconductor field effect transistor (MISFET) representing a field
effect transistor is abbreviated as "MIS", a p-channel type MISFET
is abbreviated as "pMIS", and an n-channel type MISFET is
abbreviated as "nMIS". It is needless to say that MONOS type memory
cell also is a subordinate concept of the MIS. In the following
embodiments, "silicon nitride" not only includes Si.sub.3N.sub.4
but also includes insulating films of nitride of silicon having
similar compositions. In the following embodiments, the term
"wafer" mainly indicates a silicon (Si) single-crystal wafer and it
indicates not only the same but also a silicon-on-insulator (SOI)
wafer, an insulating film substrate for forming an integrated
circuit thereon, or the like. The shape of the wafer includes not
only a circular shape or a substantially circular shape but also a
square shape, a rectangular shape, and the like.
[0179] Moreover, components having the same function are denoted by
the same reference symbols throughout the drawings for describing
the embodiment, and the repetitive description thereof will be
omitted. Hereinafter, embodiments of the present invention will be
described in detail with reference to the accompanying
drawings.
First Embodiment
[0180] First, a non-volatile memory which has been studied by the
inventors of the present invention will be described.
[0181] As a non-volatile memory which is electrically
programmable/erasable, EEPROM (electrically erasable programmable
read only memory) using polycrystalline silicon for its floating
gate has been used. However, in the EEPROM having this structure,
when there is a failure in only a part of its insulating film which
surrounds the floating gate, all charges stored in a storage node
may come out since a charge storage layer of the EEPROM is a
conductor. Particularly, if the degree of integration is improved
as miniaturization is advanced in the future, this problem would be
more apparent.
[0182] Accordingly, in recent years, a MONOS type non-volatile
memory cell using an insulating film having trap levels such as a
nitride film as a charge storage layer has been attracting
attention. In this case, charges which contribute to data storage
are stored in discrete traps in a nitride film which is an
insulator, and even when an abnormal leakage occurs as a failure
occurs in a part somewhere in an insulating film surrounding a
storage node, the whole of charges in the charge storage layer will
not come out, and thus the reliability of data retention can be
improved.
[0183] As the MONOS type non-volatile memory cell, a memory cell of
a single transistor structure has been proposed. Since the memory
cell of this structure is prone to be affected by disturb as
compared with memory cells of the EEPROM, a memory cell of a
split-gate structure having a two-transistor configuration, in
which a select gate is provided, has been proposed.
[0184] However, in the MONOS type non-volatile memory cell of the
split-gate structure has various technical problems described
below. Note that the technical problems described below are not
disclosed in background art such as Patent Documents 1 to 6
mentioned above, and the inventors of the present invention are the
first ones who found out the technical problems.
[0185] An example of the MONOS type non-volatile memory cells of
the split-gate structure is a memory cell in which a memory gate
electrode in a sidewall shape is provided by self alignment. In
this case, since an alignment margin in photolithography is not
necessary and a gate length of the memory gate electrode formed in
self alignment can be smaller than or equal to the minimum feature
size of photolithography, more miniaturized memory cells can be
achieved than the memory cells in which memory gate electrodes are
formed using photoresist patterns.
[0186] When the memory gate electrode in a sidewall shape is used,
electric application to the outside of the memory gate electrode is
made by, as illustrated in FIGS. 127A and 127B, using a pad
electrode 51 formed of a conductive film in the same layer as a
memory gate electrode MG. That is, at the same time of forming the
memory gate MG in a sidewall shape by self alignment on a sidewall
of a select gate electrode CG, the pad electrode 51 is formed in a
feeding region of the memory gate electrode MG by using a
photoresist pattern. The pad electrode 51 has a shape running over
a part of the region of the select gate electrode CG in
consideration of an alignment margin or a size variation margin of
the memory gate electrode MG and the pad electrode 51.
[0187] After forming a memory cell, a MISFET (metal insulator
semiconductor field effect transistor) in a peripheral circuit
region, and a capacitor element, an interlayer insulating film 9 is
formed on a main surface of a semiconductor substrate 1, and a
thickness of the interlayer insulating film 9 is determined by an
element having the largest height from the main surface of the
semiconductor substrate 1. Generally, the select gate electrode CG
or the gate electrode of the MISFET is the tallest on the main
surface of the semiconductor substrate 1. Meanwhile, when the pad
electrode 51 is formed by running over a partial region of the
select gate electrode CG, the pad electrode 51 in the feeding
region is the tallest from the main surface of the semiconductor
substrate 1 as illustrated in FIG. 128.
[0188] Therefore, it is necessary to more thickly form the
interlayer insulating film 9 in accordance with the height of the
pad electrode 51, and along with that, a contact hole to be formed
later is necessary to be deep. Particularly, when forming a contact
hole reaching the main surface of the semiconductor substrate 1
(cf. FIG. 128), a diameter of an opening near the bottom of the
contact hole is small, and thus a connection portion of a plug has
a high resistance or no conduction when the plug is formed in a
later step. In addition, when the interlayer insulating film 9 is
thick, due to a lack of height of a photoresist pattern formed in
an etching of the contact hole, a problem of a shape failure of the
contact hole is expected to occur at an upper portion of the
device, and this shape abnormality may cause a short-circuit
failure among gate electrodes of adjacent MISFETs. Due to such a
failure, manufacture yield of the semiconductor device is
lowered.
[0189] Hereinafter, a first embodiment of the present invention
will be described in detail with reference to FIG. 1.
[0190] An example of a structure of a non-volatile memory cell
according to the first embodiment of the present invention will be
described with reference to FIG. 1, and an example of a structure
in a feeding region of a memory gate electrode and a select gate
electrode which form the non-volatile memory cell will be described
with reference to FIGS. 2 and 3. FIG. 1 is a cross-sectional view
of a main part of a channel of a non-volatile memory cell taken
along a direction crossing a memory gate electrode, FIG. 2 is a
plan view of a main part of the memory gate electrode and a select
gate electrode in a feeding region, and FIG. 3 is a cross-sectional
view of a main part taken along the line A-A' in FIG. 2. Here, a
MONOS type non-volatile memory cell having a split-gate structure
using a memory gate electrode in a sidewall shape is
exemplified.
[0191] First, a structure of the non-volatile memory cell formed in
a region (memory cell forming region, memory region) in which a
plurality of memory cells are formed will be described with
reference to FIG. 1.
[0192] As illustrated in FIG. 1, a semiconductor substrate 1 is
formed of, for example, p-type single crystal silicon, and a select
nMIS (Qnc) and a memory nMIS (Qnm) of a memory cell MC are arranged
in an active region of a main surface (device forming surface) of
the semiconductor substrate 1. A drain region Drm of the memory
cell MC includes an n.sup.--type semiconductor region 2ad having a
comparatively low impurity concentration and an n.sup.+-type
semiconductor region 2b having a comparatively high impurity
concentration higher than that of the n.sup.--type semiconductor
region 2ad (LDD (lightly doped drain) structure). In addition, a
source region Srm of the memory cell MC includes an n.sup.--type
semiconductor region 2as having a comparatively low impurity
concentration and an n.sup.+-type semiconductor region 2b having a
comparatively high impurity concentration higher than that of the
n.sup.--type semiconductor region 2as (LDD structure). The
n.sup.--type semiconductor regions 2ad and 2as are arranged on a
channel region side of the memory cell MC, and the n.sup.+-type
semiconductor regions 2b are arranged at positions away from the
channel region side of the memory cell MC by the n.sup.--type
semiconductor regions 2ad and 2as.
[0193] On the main surface of the semiconductor substrate between
the drain region Drm and the source region Srm, a select gate
electrode CG of the select nMIS (Qnc) and a memory gate electrode
MG of the memory nMIS (Qnm) extend and be adjacent to each other,
and the plurality of memory cells MC are adjacent to each other via
device isolation portions STI (shallow trench isolation) formed to
the semiconductor substrate 1 in the extending direction of the
select gate electrode CG and the memory gate electrode MG (see
FIGS. 2 and 3). The memory gate electrode MG is formed in a
sidewall shape to one of sidewalls of the select gate electrode CG.
The select gate electrode CG is formed of a first conductive film
of, for example, n-type low-resistance polycrystalline silicon, and
a gate length of the select gate electrode CG is, for example,
about 80 to 120 nm. The memory gate electrode MG is formed of a
second conductive film of, for example, n-type low-resistance
polycrystalline silicon, and a gate length of the memory gate
electrode MG is, for example, about 50 to 100 nm. In addition, a
height of the select gate electrode CG from the main surface of the
semiconductor substrate 1 is, for example, 150 to 250 nm.
[0194] Further, a silicide layer 3 such as nickel silicide (NiSi),
cobalt silicide (CoSi.sub.2), or the like is formed to upper
surfaces of the select gate electrode CG and the memory gate
electrode MG. A thickness of the silicide layer 3 is, for example,
about 20 nm. In the non-volatile memory cells of split-gate
structure, it is necessary to supply potential to both the select
gate electrode CG and the memory gate electrode MG, and an
operation speed of the memory cell largely depends on resistance
values of the select gate electrode CG and the memory gate
electrode MG. Thus, it is preferable to reduce the resistances of
the select gate electrode CG and the memory gate electrode MG by
forming the silicide layers 3. The silicide layer 3 described above
is also formed to an upper surface of the n.sup.+-type
semiconductor region 2b forming the source region Srm or the drain
region Drm.
[0195] Between the select gate electrode CG and the main surface of
the semiconductor substrate 1 (p-well HPW), a gate insulating film
(first gate insulating film) 4 is provided. The gate insulating
film 4 is formed of a first insulating film of, for example, a
silicon oxide film or a high-dielectric-constant (high-k) film such
as hafnium oxide (HfSiON), and a thickness of the gate insulating
film 4 is, for example, about 1 to 5 nm.
[0196] To a main surface of the semiconductor substrate 1 (p-well
HPW) under the gate insulating film 4, for example, boron is
introduced so that a p-type semiconductor region 5 is formed. The
p-type semiconductor region 5 is a semiconductor region for forming
a channel of the select nMIS (Qnc), and a threshold voltage of the
select nMIS (Qnc) is set to a predetermined value by the p-type
semiconductor region 5.
[0197] The memory gate MG is provided to a side surface of the
select gate electrode CG via a gate insulating film (second gate
insulating film). The gate insulating film (second insulating film)
which insulates the select gate electrode CG and the memory gate
electrode MG is formed of a stacked film of an insulating film
(fourth insulating film) 6b, a charge storage layer CSL, and an
insulating film (fifth insulating film) 6t (hereinafter, mentioned
as the insulating films 6b and 6t and the charge storage layer
CSL). In addition, the memory gate electrode MG is arranged in a
second region of the semiconductor substrate 1 via the insulating
films 6b and 6t and the charge storage layer CSL. Note that, in
FIG. 1, denotation of the insulating films 6b and 6t and the charge
storage layer CSL is expressed as 6b/CSL/6t.
[0198] The charge storage layer CSL is formed of an insulating film
having trap levels, for example, a silicon nitride film, and a
thickness of the charge storage layer CSL is, for example, about 5
to 20 nm. The insulating film having trap levels is not limited to
a silicon nitride film, and a high-dielectric-constant film having
a higher dielectric constant than silicon nitride film such as an
aluminum oxide film (alumina), a hafnium oxide film, a tantalum
oxide film, or the like may be used. When using an insulating film
having trap levels as the charge storage layer CSL, charges are
trapped in the trap levels formed in the insulating film, thereby
storing charges in the insulating film. The insulating films 6b and
6t are formed of, for example, silicon oxide, and a thickness of
the insulating film 6b is, for example, about 1 to 10 nm, and a
thickness of the insulating film 6t is, for example, 4 to 15 nm.
The insulating films 6b and 6t can be formed of silicon oxide
containing nitride.
[0199] A sidewall SW is formed to one side surface of the select
gate electrode CG (a side surface opposite to the memory gate
electrode MG, a side surface on the drain region Drm side) and to
one side surface of the memory gate electrode MG (a side surface
opposite to the select gate electrode CG, a side surface on the
source region Srm side). The sidewall SW is formed of, as an
insulating film, a stacked film of a silicon oxide film 7b, a
silicon nitride film 7m, and a silicon oxide film 7t. A thickness
of the silicon oxide film 7b is, for example, about 20 nm, that of
the silicon nitride film 7m is, for example, about 25 nm, and that
of the silicon oxide film 7t is, for example, about 50 nm.
[0200] An n-type semiconductor region 8 is formed by introducing,
for example, arsenic or phosphorus into the semiconductor substrate
1 (p-well HPW) under the insulating film 6b and between the p-type
semiconductor region 5 and the source region Srm. The n-type
semiconductor region 8 is a semiconductor region for forming a
channel of the memory nMIS (Qnm), and a threshold voltage of the
memory nMIS (Qnm) is set to a predetermined value by the n-type
semiconductor region 8.
[0201] The memory cell MC is covered by the interlayer insulating
film 9, and a contact hole (third contact hole) CNT reaching the
drain region Drm is formed to the interlayer insulating film 9. The
interlayer insulating film 9 is formed of a third insulating film,
and is formed of, as an insulating film, a stacked film of a
silicon nitride film 9a and a silicon oxide film 9b. A first layer
wiring M1 extending in a direction crossing the memory gate
electrode MG (or the select gate electrode CG) is connected to the
drain region Drm via a plug (third plug) PLG buried inside the
contact hole CNT. The plug PLG is formed of a third conductive
film, for example, a stacked film of: a comparatively thin barrier
film formed of a stacked film of titanium and titanium nitride; and
a comparatively thick conductive film formed of tungsten, aluminum,
or the like formed to be wrapped by the barrier film.
[0202] Next, a structure of a shunt portion of the memory gate
electrode MG and the select gate electrode CG formed in the feeding
region will be described with reference to FIGS. 2 and 3.
[0203] As illustrated in FIGS. 2 and 3, the feeding region is
arranged to be adjacent to the memory cell forming region, and the
feeding region is formed on the device isolation portion STI. The
memory cell forming region is a region in which memory cells are
formed in an array, and the feeding region is a region for
supplying voltage to the select gate electrode CG and the memory
gate electrode MG. The select gate electrode CG formed in the
memory cell forming region is terminated at the feeding region, and
the memory gate electrode MG in a sidewall shape is formed to a
sidewall of the select gate electrode CG via the insulating films
6b and 6t and the charge storage layer CSL.
[0204] In a shunt portion of the memory gate electrode MG
(hereinafter, called an MG shunt region) formed in the feeding
region, a pad electrode PAD formed of a second conductive film in
the same layer of the memory gate electrode MG is formed, and the
pad electrode PAD is formed by running over a partial region of a
shunt region of the select gate electrode CG (hereinafter, called a
CG shunt portion) formed in the feeding region. The pad electrode
PAD is formed in the same step as a step of forming the memory gate
electrode MG by self alignment on the sidewall of the select gate
electrode CG, and the memory gate electrode MG in a sidewall shape
and the pad electrode PAD are connected.
[0205] A contact hole (first contact hole) CM is formed to the
interlayer insulating film 9 that is formed on the main surface of
the semiconductor substrate 1, the contact hole CM reaching the
silicide layer 3 that is formed on an upper surface of the pad
electrode PAD. The pad electrode PAD is electrically connected to
the first layer wiring M1 via a plug (first plug) PM formed of the
third conductive film buried in the contact hole CM.
[0206] A height of the select gate electrode CG formed in the
memory cell forming region from the main surface of the
semiconductor substrate 1 to an upper surface of the select gate
electrode CG is denoted by a first height d1. The CG shunt portion
is formed of the select gate electrode CG having the first height
d1 and the select gate electrode CG having a second height d2 that
is smaller than the first height d1 from the main surface of the
semiconductor substrate 1 to an upper surface of the select gate
electrode CG. The select gate electrode CG having the first height
d1 is formed by being connected to the select gate electrode CG
having the first height d1 formed in the memory cell forming
region. The select gate electrode CG having the second height d2 is
formed at the termination portion of the CG shunt portion by being
connected to the select gate electrode CG having the first height
d1. The pad electrode PAD is formed by running over a partial
region of the select gate electrode CG having the second height d2
of the CG shunt portion.
[0207] The feeding region is formed on the device isolation region
STI. This is because, even when the contact hole CM penetrates
through the pad electrode PAD and the insulating films 6b and 6t
and the charge storage layer CSL upon forming the contact hole CM
before forming the plug PM on the pad electrode PAD, causing an
over etching reaching the main surface of the semiconductor
substrate 1, the plug PM formed after forming the contact hole CM
is prevented from being electrically connected to the semiconductor
substrate 1. Since it is necessary to consider an alignment margin
of an active region ACT and the CG shunt portion, at a boundary
portion of the memory cell forming region and the CG shunt portion
in the feeding region, the select gate electrode CG having the
first height d1, which is connected to the select gate electrode CG
in the memory cell forming region, is formed in addition to the
select gate electrode CG having the second height d2 on the
termination portion side.
[0208] In this manner, according to the first embodiment, in the
feeding region, the pad electrode PAD is formed to run over the
partial region of the select gate electrode CG having the second
height d2 that is smaller than the first height d1, and thus a
third height third height d3, which is a height from the main
surface of the semiconductor substrate 1 to an upper surface of the
pad electrode PAD running over the partial region of the select
gate electrode CG of the CG shunt portion, is smaller than that in
the case of forming the pad electrode PAD running over the select
gate electrode CG having the first height d1 (see FIG. 127). In
this manner, effects described hereinafter can be attained.
[0209] After forming a memory cell and a capacitor element and then
forming a MISFET in a peripheral circuit region, the interlayer
insulating film 9 is formed on the main surface of the
semiconductor substrate 1. A thickness of the interlayer insulating
film 9 is determined by an element having the largest height from
the main surface of the semiconductor substrate 1. This is because
a margin is ensured, the margin with respect to variations in a
polishing amount upon planarizing the third insulating film by
polishing using a CMP (chemical mechanical polishing) method after
depositing the third insulating film for forming the interlayer
insulating film 9. By ensuring the thickness of the interlayer
insulating film 9 formed on an element having the largest height
from the main surface of the semiconductor substrate 1, a problem
that a surface of the element is also polished due to variations in
the polishing amount upon polishing using a CMP method is avoided.
Generally, an element having the largest height from the main
surface of the semiconductor substrate 1 is the select gate
electrode CG of the memory cell or the gate electrode of the MISFET
in the peripheral circuit region. Meanwhile, when forming the pad
electrode PAD running over the partial region of the select gate
electrode CG, the part of the pad electrode PAD running over the
select gate electrode CG is the element having the largest height
from the semiconductor substrate 1.
[0210] However, in the first embodiment, as described above, a part
of the select gate electrode CG formed in the feeding region is
formed to have the second height d2 with respect to the select gate
electrode CG having the first height d1 formed in the memory cell
forming region, and the pad electrode PAD is formed to run over the
partial region of the select gate electrode CG having the second
height second height d2, and thus the third height third height d3
can be small. Thus, the margin can be ensured without thickly
forming the thickness of the interlayer insulating film 9 to be
formed thereafter. Therefore, a depth of a contact hole to be
formed thereafter will not be deep, thereby ensuring an opening
diameter near a bottom of the contact hole. By ensuring the opening
diameter near the bottom of the contact hole, a high resistance
occurring between the plug formed by burying a conductive film in
the contact hole and a connection portion or no conduction can be
prevented. In addition, the interlayer insulating film 9 is not
necessarily formed thickly, it is possible to prevent a shape
failure occurring in the pad electrode PAD due to a lack of
thickness of a photoresist pattern upon an etching for forming the
contact hole.
[0211] Herein, conditions of the first height d1, the second height
d2, and the third height d3 for attaining the above-described
effects will be considered. When the pad electrode PAD is formed to
run over the select gate electrode CG in the feeding region, a
surface portion of the silicide layer 3 formed to the upper surface
of the pad electrode PAD becomes the highest portion from the main
surface of the semiconductor substrate 1. As described above, it is
sufficient as long as the height of the element to be the largest
from the main surface of the semiconductor substrate 1 can be
reduced, the above-described effects are attained when d1>d2.
Also, when a relation of d1.gtoreq.d3 is satisfied while the
relation of d1>d2 is satisfied, it is more preferable because
the height from the main surface of the semiconductor substrate 1
will not be increased than that before forming the pad electrode
PAD even when the pad electrode PAD is formed.
[0212] As illustrated in FIGS. 2 and 3, the pad electrode PAD is
formed by stretching the second conductive film in the same layer
as the memory gate electrode MG in the same direction as the select
gate electrode CG. Meanwhile, the shape of the pad electrode PAD in
the first embodiment is not limited to the type of extending the
pad electrode PAD in the same direction as the select gate
electrode CG, and the pad electrode PAD can be formed to extend in
a direction crossing a direction in which the select gate electrode
CG extends.
[0213] Next, a first modification example of the feeding region
according to the first embodiment will be described with reference
to a cross-sectional view of a main part of the feeding region
illustrated in FIG. 4.
[0214] In the CG shunt portion in the feeding region described
above with reference to FIGS. 2 and 3, the thickness of the select
gate electrode CG is set to the second height d2 through the whole
region of the CG shunt portion except for the boundary portion of
the memory cell region and the CG shunt portion, and a contact hole
CC is formed to reach the silicide layer 3 formed on the upper
surface of the select gate electrode CG in the CG shunt portion
having the second height d2. Meanwhile, in the first modification
example of the feeding region illustrated in FIG. 4, the select
gate electrode CG having the second height d2 and the select gate
electrode CG having the first height d1 are formed in the CG shunt
portion, and the pad electrode PAD is formed by running over the
partial region of the select gate electrode CG of the CG shunt
portion having the second height d2, and the contact hole CC is
formed to reach the silicide layer 3 formed to the upper surface of
the select gate electrode CG of the CG shunt portion having the
first height d1.
[0215] When forming the contact hole CC reaching the select gate
electrode CG of the shunt portion having the second height d2 (see
FIGS. 2 and 3), a depth of the contact hole CC is close to that of
other contact holes, and thus a size shift amount can be
suppressed, and the contact hole CC having a diameter substantially
close to a set size can be formed.
[0216] As compared to that, in the first modification example of
forming the contact hole CC reaching the select gate electrode CG
of the CG shunt portion having the first height d1, the diameter of
the contact hole CC tends to be larger than that of other contact
holes. Therefore, in consideration of an alignment margin of the
contact hole CC and the select gate electrode CG of the CG shunt
portion, it is necessary to make the layout of the select gate
electrode CG of the CG shunt portion large. However, when the
diameter of the contact hole CC is large, a connection resistance
of a plug PC buried inside the contact hole CC and the silicide
layer 3 formed to the upper surface of the select gate electrode CG
can be small.
[0217] A second modification example of the feeding region
according to the first embodiment will be described with reference
to FIGS. 5 and 6. FIG. 5 is a plan view describing the second
modification example of the feeding region, and FIG. 6 is a
cross-sectional view of a main part taken along the line B-B' in
FIG. 5 (cross-sectional view of a main part of the memory gate
electrode MG and the shunt portion of the select gate electrode
CG). In the second modification example of the feeding region,
using the present invention to one feeding region shared by two
memory cell forming regions will be described.
[0218] For example, the first memory cell forming region and the
second memory cell forming region are arranged next to each other,
and the feeding region is arranged to be sandwiched between the
first memory cell forming region and the second memory cell forming
region. Note that, in FIGS. 5 and 6, only one of the first and
second memory cell forming regions is illustrated. The feeding
region is formed on the device isolation portion STI. The first and
second memory cell forming regions are regions in which memory
cells are formed in an array, and the feeding region is a region of
supplying voltage to the first memory cell forming region and the
second memory cell forming region. The select gate electrode CG of
the first memory cell forming region and the select gate electrode
CG of the second memory cell forming region terminate at the
feeding region, and the termination portion of the select gate
electrode CG formed in the first memory cell forming region and the
termination portion of the select gate electrode CG formed in the
second memory cell forming region are arranged in the same straight
line. On a sidewall of the select gate electrode CG, the memory
gate MG in a sidewall shape is formed via the insulating films 6b
and 6t and the charge storage layer CSL.
[0219] At the MG shunt portion formed in the feeding region, the
pad electrode PAD formed of the second conductive film in the same
layer as the memory gate electrode MG is formed by running over
both: a partial region of a first CG shunt portion (termination
portion of the select gate electrode CG in the first memory cell
forming region) having the second height d2 and formed in the
feeding region; and a partial region of a second CG shunt portion
(termination portion of the select gate electrode CG in the second
memory cell forming region) having the second height d2. The pad
electrode PAD is formed in the same step of forming the memory gate
electrode MG by self alignment to the sidewall of the select gate
electrode CG, and the memory gate electrode MG in the sidewall
shape and the pad electrode PAD are connected. Therefore, via the
pad electrode PAD, the memory gate electrode MG formed to the
sidewall of the select gate electrode CG off the first memory cell
forming region and the memory gate electrode MG formed to the
sidewall of the select gate electrode CG of the second memory cell
forming region are electrically connected.
[0220] To the interlayer insulating film 9 formed on the main
surface of the semiconductor substrate 1, a contact hole CM
reaching the silicide layer 3 formed to the upper surface of the
pad electrode PAD is formed, and the pad electrode PAD is
electrically connected to the first layer wiring via a plug PM
formed of the third conductive film buried in the contact hole CM.
Here, as illustrated in FIG. 6, sidewalls SW are formed to
sidewalls of the pad electrode PAD. Thus, when the distance between
the first CG shunt portion and the second CG shunt portion is too
short, the region for forming the contact hole CM is filled by the
sidewall SW. In this case, an insulating film (omitted in FIG. 6),
which works as an etching stopper film upon forming the contact
hole CM, is further formed on the sidewalls SW, and thus it is
difficult to form the contact hole CM as desired. Therefore, it is
necessary to set the distance between the first CG shunt portion
and the second CG shunt portion so that the region for forming the
contact hole CM is ensured even when the sidewalls SW are
formed.
[0221] Further, in the same manner as the feeding region described
above with reference to FIGS. 2 and 3, the second height d2 from
the main surface of the semiconductor substrate 1 to the upper
surface of the select gate electrodes CG of the first and second CG
shunt portions, over which the pad electrode PAD running, is formed
to be lower than the first height d1 from the main surface of the
semiconductor substrate 1 to the upper surface of the select gate
electrode CG of the memory cell forming region.
[0222] In this manner, also in the feeding region shared by the two
memory cell forming regions, the relationship of d1>d2 is
satisfied, and thus the third height d3 can be small and it is not
necessary to thickly form the interlayer insulating film 9.
According to the foregoing, as described with reference to FIGS. 2
and 3, a high resistance and no conduction at the bottom of the
plug or a shape failure of the pad electrode PAD can be
prevented.
[0223] Further, when forming a pad electrode PAD as that of the
second modification example, to form a photoresist pattern upon
processing the second conductive film which forms the pad electrode
PAD, the photolithography can focus on the second conductive film
running over the first CG shunt portion and the second CG shunt
portion. Therefore, since there is no bump upon focusing of the
photolithography, accuracy of the photolithography is improved and
a shape failure of the pad electrode PAD formed by processing the
second conductive film can be prevented.
[0224] A third modification example according to the first
embodiment will be described with reference to a cross-sectional
view of the feeding region illustrated in FIG. 7. The third
modification example of the feeding region is, in the same manner
as the feeding region of the second modification example, a feeding
region shared by two memory cell forming regions. Meanwhile, in the
feeding region, a dummy portion DMY is formed between the first CG
shunt portion (termination portion of the select gate electrode CG
in the first memory cell forming region) and the second CG shunt
portion (termination portion of the select gate electrode CG of the
second memory cell forming region). And, the termination portion of
the select gate electrode CG in the first memory cell forming
region, the dummy portion DMY, and the termination portion of the
select gate electrode CG in the second memory cell forming region
are arranged in the same straight line.
[0225] While the dummy portion DMY is formed by the second
conductive film in the same layer as the select gate electrode CG,
the dummy portion DMY is not electrically connected to the select
gate electrode CG of the first CG shunt portion or the select gate
electrode CG of the second CG shunt portion and is spaced apart
from the select gate electrode CG of the first CG shunt portion or
the select gate electrode CG of the second CG shunt portion. A
height from the main surface of the semiconductor substrate 1 to an
upper surface of the dummy portion DMY is substantially the same as
the second height d2 of the select gate electrodes CG of the first
and second CG shunt portions from the main surface of the
semiconductor substrate 1 to the upper surface of the select gate
electrode CG.
[0226] In addition, in the same manner as the feeding region
described above with reference to FIGS. 5 and 6, the second height
d2 from the main surface of the semiconductor substrate 1 to the
upper surface of the select gate electrode CG of the first and
second shunt portions over which the pad electrode PAD is running
is formed to be lower than the first height d1 from the main
surface of the semiconductor substrate 1 to the upper surface of
the select gate electrode CG of the memory forming region.
[0227] At the MG shunt portion formed in the feeding region, the
pad electrode PAD, which is formed of the second conductive film in
the same layer as the memory gate electrode MG, runs over the
select gate electrode CG of the first CG shunt portion, the dummy
portion DMY, and the select gate electrode CG of the second CG
shunt portion. In addition, the contact hole CM reaching the
silicide layer that is formed to the upper surface of the pad
electrode PAD is formed to the interlayer insulating film 9 formed
on the main surface of the semiconductor substrate 1. The contact
hole CM is formed to reach the silicide layer 3 formed to the upper
surface of the pad electrode PAD on the dummy portion DMY.
[0228] In this manner, also when the dummy portion DMY is arranged
between the first CG shunt portion and the second CG shunt portion,
the relationship of d1>d2 is satisfied in the feeding region
shared by the two memory cell forming regions, and, the height from
the main surface of the semiconductor substrate 1 to the upper
surface of the dummy portion DMY is also substantially the same as
the second height d2 being smaller than the first height d1, and
thus the third height d3 can be small and it is not necessary to
thickly form the interlayer insulating film 9. Accordingly, a high
resistance and no conduction at the bottom surface of the plug or a
shape failure of the dummy portion DMY can be prevented. In
addition to that, in the third modification example, by forming the
contact hole CM reaching the silicide layer 3 that is formed to the
upper surface of the pad electrode PAD on the dummy portion DMY,
the diameter of the contact hole CM can be large, and thus a
contact resistance between the plug PM buried inside the contact
hole CM and the silicide layer 3 formed to the upper surface of the
pad electrode PAD can be small.
[0229] Further, in the same manner as the second modification
example, to form a pad electrode PAD as that of the third
modification example, the photolithography can focus on the second
conductive film running over the first CG shunt portion and the
second CG shunt portion to form a photoresist pattern upon
processing the second conductive film which forms the pad electrode
PAD. Therefore, since there is no bump upon focusing of the
photolithography, accuracy of the focus in the photolithography is
improved, and a shape failure of the pad electrode PAD formed by
processing the second conductive film can be prevented.
[0230] Next, an example of a method of manufacturing a
semiconductor device including a non-volatile memory cell according
to the first embodiment will be described in the order of steps
with reference to FIGS. 8 to 26. FIGS. 8 to 26 are cross-sectional
views of: a memory region; a feeding region (MG shunt portion and
CG shunt portion); a capacitor element region; and a peripheral
circuit region (low-voltage nMIS region, low-voltage pMIS region,
high-voltage nMIS region, and high-voltage pMIS region) during a
manufacturing process of the semiconductor device. As to the memory
region and the peripheral circuit region, cross-sectional views in
a gate-length direction are illustrated, and, as to the feeding
region, in the same manner as FIGS. 2 and 3, cross-sectional views
in a direction perpendicular to the gate-length direction are
illustrated. MISFETs formed in the peripheral circuit region
constitute processors of CPU etc., logic circuits, input/output
circuits, peripheral circuits of memories such as decoders and
sense amplifiers, booster circuits, and so forth.
[0231] First, as illustrated in FIG. 8, to the main surface of the
semiconductor substrate (at this stage, a thin plate of a
semiconductor in a plane and substantially circular shape, called
semiconductor wafer) 1, for example, the device isolation portions
STI in a groove shape and active regions ACT arranged to be
surrounded by the device isolation portions STI are formed. More
specifically, after forming isolation grooves to predetermined
portions of the semiconductor substrate 1, an insulating film such
as silicon oxide is deposited on the main surface of the
semiconductor substrate 1, and further, the insulating film is
polished by a CMP method or the like so that the insulating film is
left only in the isolation grooves, thereby burying the insulating
film inside the isolation grooves. In this manner, the device
isolation portions STI are formed. The device isolation portions
STI are also formed to the semiconductor substrate 1 in the feeding
region and the capacitor element region.
[0232] Next, as illustrated in FIG. 9, an n-type impurity is
selectively ion-implanted into the semiconductor substrate 1 in the
peripheral circuit region, thereby forming a buried n-well NISO.
Subsequently, a p-type impurity is selectively ion-implanted into
the semiconductor substrate 1 in the memory region and the
high-voltage nMIS region, thereby forming the p-well HPW; and an
n-type impurity is selectively ion-implanted into the semiconductor
substrate 1 in the high-voltage pMIS region, thereby forming the
n-well HNW. In the same manner, a p-type impurity is selectively
ion-implanted into the semiconductor substrate 1 in the low-voltage
nMIS region, thereby forming a p-well PW; and an n-type impurity is
selectively ion-implanted into the semiconductor substrate 1 in the
low-voltage pMIS region, thereby forming an n-well NW.
[0233] Next, a p-type impurity, for example, boron is selectively
ion-implanted into the semiconductor substrate 1 in the memory
region. In this manner, to the semiconductor substrate 1 in the
memory region, a semiconductor region 5 of p-type for channel
formation of the select nMIS (Qnc) is formed. In the same manner, a
predetermined impurity is ion-implanted into the semiconductor
substrate 1 in each of the low-voltage nMIS region, low-voltage
pMIS region, high-voltage nMIS region, and high-voltage pMIS region
of the peripheral circuit region, respectively. In this manner,
semiconductor region Dc for channel formation is formed to the
semiconductor substrate 1 in each of low-voltage nMIS region,
low-voltage pMIS region, high-voltage nMIS region, and high-voltage
pMIS region of the peripheral circuit region.
[0234] Next, by performing an oxidation processing on the
semiconductor substrate 1, a gate insulating film 4A formed of, for
example, silicon oxide and having a thickness of about 20 nm is
formed to the main surface of the semiconductor substrate 1.
Subsequently, after removing the gate insulating films 4A in the
memory region, low-voltage nMIS region, and low-voltage pMIS
region, an oxidation processing is performed to the semiconductor
substrate 1. In this manner, a gate insulating film (first gate
insulating film) 4 formed of, for example, silicon oxide and having
a thickness of about 1 to 5 nm is formed as an insulating film to
the main surface of the semiconductor substrate 1. At the same
time, the gate insulating film (third gate insulating film) 4
formed of, for example, silicon oxide and having a thickness of
about 1 to 5 nm is formed as an insulating film to the main surface
of the semiconductor substrate 1 in the low-voltage nMIS region and
low-voltage pMIS region. The gate insulating film 4 is not limited
to silicon oxide, and it may be formed of a
high-dielectric-constant film of, for example, hafnium oxide
(HfSiON).
[0235] Next, as illustrated in FIG. 10, after depositing a
conductive film 10 formed of, for example, amorphous silicon to the
main surface of the semiconductor substrate 1 by a CVD (chemical
vapor deposition) method, an n-type impurity is introduced into the
conductive film 10 in the memory region, feeding region, and
capacitor element region by an ion implantation method or the like,
thereby forming an n-type conductive film (first conductive film)
10n. Thicknesses of the conductive films 10 and 10n are, for
example, about 140 nm.
[0236] Next, as illustrated in FIG. 11, the n-type conductive film
10n in the memory region, feeding region, and capacitor element
region is patterned by lithography technology and dry-etching
technology. In this manner, to the memory region and the feeding
region, the select gate electrodes CG of the select nMIS (Qnc)
formed of the n-type conductive films 10n are formed. A gate length
of the select gate electrode CG in the memory region is, for
example, about 100 nm. At the same time, a bottom electrode 10E
formed of the n-type conductive film 10n is formed in the capacitor
element region.
[0237] Next, as illustrated in FIG. 12, by using photolithography
and dry etching, the n-type conductive films 10n in the CG shunt
portion in the feeding region and the capacitor element region, and
the conductive film 10 in the peripheral circuit region are thinned
to a predetermined thickness (second height d2).
[0238] Next, using the select gate electrode CG of the select nMIS
(Qnc) and a photoresist pattern as masks, an n-type impurity, for
example, arsenic or phosphorus is ion-implanted into the main
surface of the semiconductor substrate 1 in the memory region,
thereby forming the n-type semiconductor region 8 for channel
formation of the memory nMIS (Qnm).
[0239] Next, as illustrated in FIG. 13, on the main surface of the
semiconductor substrate 1, the insulating film 6b formed of, for
example, silicon oxide as an insulating film, the charge storage
layer CSL formed of, for example, silicon nitride as an insulating
film having trap levels, and the insulating film 6t formed of, for
example, silicon oxide as an insulating film are formed in series.
The insulating film 6b is formed by, for example, a thermal
oxidation method or an ISSG (in-situ steam generation) oxidation
method, the charge storage layer CSL is formed by, for example, a
CVD method, and the insulating film 6t is formed by, for example, a
CVD method or an ISSG method. An example of a total thickness of
the insulating films 6b and 6t and the charge storage layer CSL is
about 20 nm. And, the insulating films 6b and 6t may be formed of
silicon oxide containing nitride, and the charge storage layer CSL
may be formed of a high-dielectric-constant film having a higher
dielectric constant than a silicon nitride film such as an aluminum
oxide film (alumina), hafnium oxide film, or tantalum oxide
film.
[0240] Next, the second conductive film formed of low-resistance
polycrystalline silicon is deposited on the main surface of the
semiconductor substrate 1. The second conductive film is formed by
a CVD method and has a thickness of, for example, about 50 nm.
[0241] Next, by using photolithography and anisotropic dry etching,
the second conductive film is processed. In this manner, in the CG
shunt portions in the memory region and the feeding region,
sidewalls 11 are formed to both side surfaces of the select gate
electrode CG of the select nMIS (Qnc) via the insulating films 6b
and 6t and the charge storage layer CSL. At the same time, in the
MG shunt portion in the feeding region, a partial region, which is
formed to be low by etching illustrated in FIG. 12 described above
in the CG shunt portion in the feeding region, is covered by a
photoresist pattern RP, thereby forming the pad electrode PAD via
the insulating films 6b and 6t and the charge storage layer CSL.
Further, in the capacitor element region, the bottom electrode 10E
is covered by the photoresist pattern RP, thereby forming a top
electrode 11E via the insulating films 6b and 6t and the charge
storage layer CSL.
[0242] Since the conductive film 10 of the CG shunt portion is
thinly formed to have the second height d2, the second conductive
film formed at the portion is formed at a position at a lower
height from the main surface of the semiconductor substrate 1 than
the second conductive film formed on the region not etched in the
step illustrated in FIG. 12 described above. Therefore, as compared
to the case of forming the second conductive film without thinly
forming the conductive film 10 of the CG shunt portion, a bump in
the region, in which the photoresist pattern RP is formed, in the
CG shunt portion is small, and thus a focus shift in the
photolithography due to the bump is reduced and processing accuracy
of the photoresist pattern RP is improved. Therefore, a shape
failure of the pad electrode PAD formed by processing the second
conductive film can be prevented.
[0243] Next, as illustrated in FIG. 14, with using a photoresist
pattern as a mask, the sidewalls 1 exposed from the photoresist
pattern are etched. In this manner, in the memory region, the
memory gate electrodes MG (sidewalls 11) of the memory nMIS (Qnm)
are formed to only one side surface of each of the select gate
electrodes CG of the select nMIS (Qnc). A gate length of the memory
gate electrode MG is, for example, about 65 nm.
[0244] Next, in the memory region, the insulating films 6b and 6t
and the charge storage layer CSL are selectively etched except for:
those between the select gate electrode CG and the memory gate
electrode MG and between the semiconductor substrate 1 and the
memory gate electrode MG in the memory region; those between the
select gate electrode CG and the memory gate electrode MG and
between the device isolation portion STI and the memory gate
electrode MG in the MG shunt portion in the feeding region; and
those between the bottom electrode 10E and the top electrode 11E in
the capacitor element region.
[0245] In the capacitor element region, using the insulating films
6b and 6t and the charge storage layer CSL as a capacitor
insulating film (dielectric film), a capacitor element formed of:
the bottom electrode 10E formed of the first conductive film in the
same layer as the select gate electrode CG of the select nMIS
(Qnc); and the top electrode 11E formed of the second conductive
film in the same layer as the memory gate electrode MG of the
memory nMIS (Qnm) is formed. The capacitor element forms, for
example, a charge pump circuit used in a power supply circuit which
outputs voltage higher than input voltage. The charge pump circuit
can boost voltage by switching connection states of a plurality of
capacitor elements using a switch or the like. Also, since the
capacitor element is formed on the device isolation portion STI
formed to the semiconductor substrate 1 and a parasitic capacitance
formed by the substrate portion and the bottom electrode 10E is
negligibly small, the above operation can be stably performed.
Further, even when a position of a contact hole reaching the top
electrode 11E formed in a later step and a position of a contact
hole reaching the bottom electrode 10E shift due to a shift of the
photoresist pattern etc., as they shift over the device isolation
portion STI, the wiring and the semiconductor substrate 1 will not
be short-circuited via the contact holes.
[0246] Next, as illustrated in FIG. 15, an n-type impurity is
introduced into the conductive film 10 in the low-voltage nMIS
region and the high-voltage nMIS region in the peripheral circuit
region by an ion implantation method or the like, thereby forming
an n-type conductive film 10na. Also, a p-type impurity is
introduced into the conductive film in the low-voltage pMIS region
and the high-voltage pMIS region in the peripheral circuit region
by an ion implantation method or the like, thereby forming a p-type
conductive film 10p.
[0247] Next, as illustrated in FIG. 16, the conductive films 10na
and 10p in the peripheral circuit region are patterned using
photolithography and dry etching, thereby forming: a gate electrode
GLn formed of the conductive film 10na of the low-voltage nMIS; a
gate electrode GLp formed of the conductive film 10p of the
low-voltage pMIS; a gate electrode GHn formed of the conductive
film 10na of the high-voltage nMIS; and a gate electrode GHp formed
of the conductive film 10p of the high-voltage pMIS. Gate lengths
of the gate electrode GLn of the low-voltage nMIS and the gate
electrode GLp of the low-voltage pMIS in the active regions are,
for example, about 100 nm. Gate lengths of the gate electrode GHn
of the high-voltage nMIS and the gate electrode GHp of the
high-voltage pMIS are, for example, about 400 nm.
[0248] As the gate lengths of the MISFETs become shorter along
miniaturization, a resist pattern upon etching the conductive films
10na and 10p in the peripheral circuit region is very thinly formed
in this step. The pad electrode PAD is formed at a high position as
compared to other elements on the main surface of the semiconductor
substrate 1 because the pad electrode PAD is formed by running over
the select gate electrode CG. Thus, the resist pattern on the pad
electrode PAD may be thin as the resist pattern is not formed at a
desired thickness. In this case, there is a possibility that the
resist pattern is eliminated by etching upon etching the gate
electrodes GLn, GLp, GHn, and GHp. Since the pad electrode PAD is
formed of low-resistance polycrystalline silicon same as the
conductive films 10na and 10p, when the resist pattern on the pad
electrode PAD is eliminated, the pad electrode PAD is trimmed,
possibly causing a problem of a shape failure occurring in the pad
electrode PAD.
[0249] Meanwhile, in the first embodiment, since the pad electrode
PAD is formed by running over the select gate electrode CG that is
thinly formed, the third height d3 from the main surface of the
semiconductor substrate 1 to the upper surface of the pad electrode
PAD is formed to be low when the pad electrode PAD is formed. Thus,
a bump is reduced and it is easy to form the resist pattern at a
desired thickness, and the problem of a shape failure occurring in
the pad electrode PAD can be avoided. Also, by the step illustrated
in FIG. 12 described above, the amount of etching the conductive
films 10na and 10p is reduced when forming the gate electrodes GLn,
GLp, GHn, and GHp, and thus it becomes difficult to eliminate the
resist pattern and the problem of eliminating the resist pattern on
the pad electrode PAD can be avoided.
[0250] Next, to the main surface of the semiconductor substrate 1
in the high-voltage nMIS of the peripheral circuit region, an
n-type impurity for example, arsenic is ion-implanted using a
photoresist pattern as a mask, thereby forming n.sup.--type
semiconductor regions 13 to the main surface of the semiconductor
substrate 1 in the high-voltage nMIS region of the peripheral
circuit region in a self-aligned manner to the gate electrode GHn.
In the same manner, to the main surface of the semiconductor
substrate 1 in the high-voltage pMIS region of the peripheral
circuit region, a p-type impurity, for example, boron fluoride is
ion-implanted, thereby forming p.sup.--type semiconductor regions
14 to the main surface of the semiconductor substrate 1 in the
high-voltage pMIS region of the peripheral circuit region in a
self-aligned manner to the gate electrode GHp.
[0251] Next, as illustrated in FIG. 17, after an insulating film
having a thickness of about 10 nm formed of, for example, silicon
oxide is deposited by a CVD method on the main surface of the
semiconductor substrate 1, the insulating film is processed by
anisotropic dry etching. In this manner, in the memory region,
sidewalls 15 are formed to: a side surface of the select gate
electrode CG opposite to the memory gate electrode MG and a side
surface of the memory gate electrode MG in the memory region; a
side surface of the pad electrode PAD at the MG shunt portion in
the feeding region; a side surface of the top electrode 11E in the
capacitor element region; and both side surfaces of the gate
electrode GLn of the low-voltage nMIS, gate electrode GLp of the
low-voltage pMIS, gate electrode GHn of the high-voltage nMIS, and
gate electrode GHp of the high-voltage pMIS in the peripheral
circuit region, respectively. A spacer length of the sidewall 15
is, for example, about 6 nm. In this manner, a side surface of the
gate insulating film 4 exposed between the select gate electrode CG
of the select nMIS (Qnc) and the semiconductor substrate 1, and
side surfaces of the insulating films 6b and 6t and the charge
storage layer CSL exposed between the memory gate electrode MG of
the memory nMIS (Qnm) and the semiconductor substrate 1 can be
covered by the sidewalls 15. As the sidewalls 15 are formed, an
effective channel length of the n.sup.--type semiconductor region
and the p.sup.--type semiconductor region can be large in a step of
forming the n.sup.--type semiconductor region in the low-voltage
nMIS region and a step of forming the p.sup.--type semiconductor
region in the low-voltage pMIS of the peripheral circuit region
described later. Therefore, a short-channel effect of the
low-voltage nMIS and the low-voltage pMIS can be suppressed.
[0252] Next, after forming a photoresist pattern 16 having its edge
portion positioned at the upper surface of the select gate
electrode CG of the select nMIS (Qnc) in the memory region, the
photoresist pattern 16 covering a part of the select gate electrode
CG on the memory gate electrode MG side of the memory nMIS (Qnm)
and the memory gate electrode MG, an n-type impurity, for example,
arsenic is ion-implanted into the main surface of the semiconductor
substrate 1 using the select gate electrode CG, memory gate
electrode MG, and the photoresist pattern 16 as masks, thereby
forming an n-type semiconductor region 2ad to the main surface of
the semiconductor substrate 1 in a self-aligned manner to the
select gate electrode CG.
[0253] Next, as illustrated in FIG. 18, after removing the
photoresist pattern 16, a photoresist pattern 17 having its edge
portion positioned at the upper surface of the select gate
electrode CG of the select nMIS (Qnc) in the memory region, the
photoresist pattern 17 covering a part of the select gate electrode
CG opposite to the memory gate electrode MG of the select nMIS
(Qnc) in the memory region, an n-type impurity, for example,
arsenic is ion-implanted into the main surface of the semiconductor
substrate 1 using the select gate electrode CG, memory gate
electrode MG, and the photoresist pattern 17 as masks, thereby
forming n.sup.--type semiconductor regions 2as to the main surface
of the semiconductor substrate 1 in a self-aligned manner to the
memory gate electrode MG.
[0254] Here, the n.sup.--type semiconductor region 2ad has been
formed first and then the n.sup.--type semiconductor regions 2as
have been formed. Meanwhile, the n.sup.--type semiconductor regions
2as may be formed first and then the n.sup.--type semiconductor
region 2ad may be formed. In addition, subsequent to the ion
implantation of an n-type impurity to form the n.sup.--type
semiconductor region 2ad, a p-type semiconductor region may be
formed to surround a lower portion of the n.sup.--type
semiconductor region 2ad by ion-implanting a p-type impurity, for
example, boron to the main surface of the semiconductor substrate
1.
[0255] Next, as illustrated in FIG. 19, to the main surface of the
semiconductor substrate 1 in the low-voltage nMIS region of the
peripheral circuit region, an n-type impurity, for example, arsenic
is ion-implanted using a photoresist pattern as a mask, thereby
forming n.sup.--type semiconductor regions 18 to the main surface
of the semiconductor substrate 1 in the low-voltage nMIS region of
the peripheral circuit region in a self-aligned manner to the gate
electrode GLn. In the same manner, to the main surface of the
semiconductor substrate 1 in the low-voltage pMIS region of the
peripheral circuit region, a p-type impurity, for example, boron
fluoride is ion-implanted using a photoresist pattern as a mask,
thereby forming p.sup.--type semiconductor regions 19 to the main
surface of the semiconductor substrate 1 in the low-voltage pMIS
region of the peripheral circuit region in a self-aligned manner to
the gate electrode GLp.
[0256] Next, as illustrated in FIG. 20, on the main surface of the
semiconductor substrate 1, for example, a silicon oxide film 7b, a
silicon nitride film 7m, and a silicon oxide film 7t are deposited
in series by a CVD method, and these films are etched back by an
anisotropic etching. In this manner, sidewalls SW are formed to: a
side surface of the select gate electrode CG opposite to the memory
gate electrode MG, and a side surface of the memory gate electrode
MG in the memory region; a side surface of the pad electrode PAD of
the MG shunt portion in the feeding region; a side surface of the
upper electrode 11E in the capacitor element region; and both side
surfaces of each of the gate electrode GLn of the low-voltage nMIS,
gate electrode GLp of the low-voltage pMIS, gate electrode GHn of
the high-voltage nMIS, and gate electrode GHp of the high-voltage
pMIS. A thickness of the silicon oxide film 7b is, for example,
about 20 nm, a thickness of the silicon nitride film 7m is, for
example, 25 nm, and a thickness of the silicon oxide film 7t is,
for example, about 50 nm.
[0257] Next, as illustrated in FIG. 21, to the main surface of the
semiconductor substrate 1 in the low-voltage pMIS region and the
high-voltage pMIS region of the peripheral circuit region, a p-type
impurity, for example, boron or boron fluoride is ion-implanted
using a photoresist pattern 20 as a mask, thereby forming
p.sup.+-type semiconductor regions 21 in a self-aligned manner to
the gate electrode GLp of the low-voltage pMIS and the gate
electrode GHp of the high-voltage pMIS. In this manner,
source/drain regions SD of the high-voltage pMIS formed of the
p.sup.--type semiconductor regions and the p.sup.+-type
semiconductor regions 21 are formed, and source/drain regions SD
formed of the p.sup.--type semiconductor regions 19 and the
p.sup.+-type semiconductor regions 21 are formed.
[0258] Next, as illustrated in FIG. 22, into the main surface of
the semiconductor substrate 1 in the low-voltage nMIS region and
high-voltage nMIS region of the memory region and peripheral
circuit region, an n-type impurity, for example, arsenic and
phosphorus are ion-implanted using a photoresist pattern 22 as a
mask, thereby forming n.sup.+-type semiconductor regions 2b in a
self-aligned manner to the select gate electrode CG of the select
nMIS (Qnc) and the memory gate electrode MG of the memory nMIS
(Qnm) in the memory region; and forming n.sup.+-type semiconductor
regions 23 in a self-aligned manner to the gate electrode GLn of
the low-voltage nMIS and the gate electrode GHn of the high-voltage
nMIS in the peripheral circuit region. In this manner, the drain
region Drm formed of the n.sup.--type semiconductor region tad and
the n.sup.+-type semiconductor region 2b, and the source regions
Srm formed of the n.sup.--type semiconductor region 2as and the
n.sup.+-type semiconductor region 2b are formed in the memory
region. In addition, source/drain regions SD of the high-voltage
nMIS formed of the n.sup.--type semiconductor regions 13 and the
n.sup.+-type semiconductor regions 23, and source/drain regions SD
of the low-voltage nMIS formed of the n.sup.--type semiconductor
regions 18 and the n.sup.+-type semiconductor regions 23 are formed
in the peripheral circuit region.
[0259] Next, as illustrated in FIG. 23, the silicide layers 3 are
formed in a salicide (self-align silicide) process to: the upper
surfaces of the memory gate electrodes MG, the upper surface of the
select gate electrode CG, and upper surfaces of the n.sup.+-type
semiconductor regions 2b of the memory nMIS (Qnm) in the memory
region; the upper surfaces of the pad electrode PAD of the MG shunt
portion, and the upper surface of the select gate electrode CG of
the select nMIS (Qnc) of the CG shunt portion in the feeding
region; an upper surface of the gate electrode GLn and upper
surfaces of the n.sup.+-type semiconductor regions 23 of the
low-voltage nMIS, an upper surface of the gate electrode GLp and
upper surfaces of the p.sup.+-type semiconductor regions 21 of the
low-voltage pMIS, an upper surface of the gate electrode GHn and
upper surfaces of the n.sup.+-type semiconductor regions 23 of the
high-voltage nMIS, and an upper surface of the gate electrode GHp
and upper surfaces of the p.sup.+-type semiconductor regions 21 of
the high-voltage pMIS, in the peripheral circuit region; and an
upper surface of a part of the top electrode 11E not overlapping
the select gate electrode CG and the sidewalls SW in plane in the
capacitor element region. As the silicide layer 3, for example,
nickel silicide, cobalt silicide, or the like is used.
[0260] By forming the silicide layers 3, contact resistances
between the silicide layers 3 and plugs etc. to be formed to upper
portions of the silicide layers 3 can be reduced. In addition, in
the memory region, resistances of the memory gate electrode MG,
source region Srm, and drain region Drm of the memory nMIS
themselves can be reduced. Moreover, in the peripheral circuit
region, resistances of the gate electrode GLn of the low-voltage
nMIS, the gate electrode GLp of the low-voltage pMIS, the gate
electrode GHn of the high-voltage nMIS, and the gate electrode GHp
of the high-voltage pMIS themselves, and resistances of the
source/drain regions SD themselves can be reduced.
[0261] According to the foregoing steps, the memory cell, the
capacitance element, and the low-voltage nMIS, low-voltage pMIS,
high-voltage nMIS, and high-voltage pMIS formed in the peripheral
circuit region according to the first embodiment are substantially
completed.
[0262] As described in FIG. 3 above, the height from the main
surface of the semiconductor substrate 1 to the upper surface of
the select gate electrode CG is the first height d1. The CG shunt
portion in the feeding region is formed of: the select gate
electrode CG having the first height d1; and the select gate
electrode CG having the height of the second height d2 that is
lower than the first height from the main surface of the
semiconductor substrate 1 to the upper surface of the select gate
electrode CG. The pad electrode PAD connected to the memory gate
electrode MG is formed by running over the select gate electrode CG
having the second height d2. Since the second height d2 is lower
than the first height d1, the pad electrode PAD can be formed to be
lower than that when being formed by running over the select gate
electrode CG having the first height d1. In the capacitor element
region, the capacitor insulating film formed of the insulating
films 6b and 6t and the charge storage layer CSL is formed on the
bottom electrode 10E formed of the conductive film 10 having the
second electrode d2, and the top electrode 11E formed of the second
conductive film is formed on the capacitor insulating film. A
height of the bottom electrode 10E is, in the step illustrated in
FIG. 12, reduced from the first height d1 to the second height d2
by etching, and then, the capacitor insulating film and the top
electrode 11E are formed, so that a height from the main surface of
the semiconductor substrate 1 of the whole of the capacitor element
can be formed to be low.
[0263] According to the foregoing steps, a maximum height of the
elements formed on the main surface of the semiconductor substrate
1 becomes low, and it is possible to ensure a margin during a
polishing by a CMP method on the third insulating film which forms
the interlayer insulating film 9 without thickly forming the
interlayer insulating film 9 formed in a later step. Therefore,
even when a deep contact hole is formed to the interlayer
insulating film 9, an opening diameter near the bottom of the
contact hole can be ensured, and a high resistance or no conduction
between the plug formed by burying a conductive film in the contact
hole and a connection portion can be prevented. Moreover, a shape
failure of the pad electrode PAD occurring upon etching for forming
the contact hole due to a lack of a thickness of a photoresist
pattern can be prevented.
[0264] To attain the effect, in the step illustrated in FIG. 12,
the conductive film 10 is etched to establish the condition of
d1>d2 regarding the height of the select gate electrode CG.
Meanwhile, in addition to the above condition, it is more
preferable to establish a condition of d1.gtoreq.d3 in the
relationship of the first height d1 and the third height d3 that is
a height from the main surface of the semiconductor substrate 1 to
the upper surface of the pad electrode PAD running over the partial
region of the select gate electrode CG of the CG shunt portion and
also is a height from the main surface of the semiconductor
substrate 1 to the upper surface of the top electrode 11E of the
capacitor element. This is because, when the condition of
d1.gtoreq.d3 is established, even when the pad electrode PAD or the
upper electrode 11E is formed, the height of the select gate
electrode CG from the main surface of the semiconductor substrate 1
will not be increased as compared with that before forming the pad
electrode PAD or the upper electrode 11E, and thus the
inconvenience mentioned above due to thickly forming the interlayer
insulating film 9 can be avoided. Meanwhile, the heights of the
gate electrodes GLn, GLp, GHn, and GHp of the MISFETs (low-voltage
nMIS, low-voltage pMIS, high-voltage nMIS, and high-voltage pMIS)
in the peripheral circuit region are also etched to be thin until
the second height d2 in the step illustrated in FIG. 12. Therefore,
in the step illustrated in FIG. 16, the amount of etching upon
etching the gate electrodes GLn, GLp, GHn, and GHp is reduced, and
thus the resist pattern is difficult to be eliminated, and a
problem of elimination of the resist pattern on the pad electrode
PAD that is formed to be higher than other elements during the
etching can be avoided.
[0265] Next, as illustrated in FIG. 24, the silicon nitride film 9a
is deposited as an insulating film on the main surface of the
semiconductor substrate 1 by a CVD method. The silicon nitride film
9a works as an etching-stopper film upon forming a contact hole
described later.
[0266] Subsequently, as illustrated in FIG. 25, the silicon oxide
film 9b is deposited as an insulating film by a CVD method, and the
silicon oxide film 9b is polished by a CMP method, thereby forming
the interlayer insulating film 9 formed of the silicon nitride film
9a and the silicon oxide film 9b. As described above, the height of
the pad electrode PAD is formed to be lower than that in FIG. 127B,
the height of the elements on the main surface of the semiconductor
substrate 1 as a whole is lowered and a margin of a polishing by a
CMP method thereafter can be ensured without thickly forming the
silicon oxide film 9b. The same goes to the top electrode 11E of
the capacitance element.
[0267] Next, as illustrated in FIG. 26, in the memory region, the
contact hole CNT reaching the silicide layer 3 on the drain region
Drm is formed to the interlayer insulating film 9. At the same
time, in the feeding region, the contact hole CC reaching the
silicide layer 3 on the select gate electrode CG of the CG shunt
portion is formed, and the contact hole CM reaching the silicide
layer 3 on the pad electrode PAD of the MG shunt portion is formed
to the interlayer insulating film 9.
[0268] In addition, in the peripheral circuit region, on each of
the gate electrodes (GHn, GHp, GLn, GLp) of the high-voltage nMIS,
high-voltage pMIS, low-voltage nMIS, and low-voltage pMIS, the
contact hole CA reaching the silicide layer 3 on the source/drain
regions SD is formed. In FIG. 26, to simplify the description, the
contact holes CA reaching the source/drain regions of the
low-voltage nMIS and the low-voltage pMIS are exemplified.
[0269] Further, in the capacitor element region, the contact hole
CB reaching the silicide layer 3 on each of the upper surfaces of
the top electrode 11E and bottom electrode 10E is formed in a
portion where the top electrode 11E and the bottom electrode 10E
are not overlapped. In FIG. 26, to simplify the description, the
contact hole CB reaching the top electrode 11E is exemplified.
[0270] In the situation, since the interlayer insulating film 9
formed in the steps of FIGS. 24 and 25 is formed to be lower than
that formed in the step of FIG. 127B, even when a deep contact hole
such as the contact hole CMT is formed to the interlayer insulating
film 9, an opening diameter near the bottom of the contact hole can
be ensured. Moreover, upon performing an etching for forming the
contact hole, a shape failure occurring to the pad electrode PAD
due to a lack of a thickness of a photoresist pattern can be
prevented.
[0271] Next, the plug PLG is formed inside the contact hole CNT,
the plug PC is formed inside the contact hole CC, the plug PM is
formed inside the contact hole CM, the plug PA is formed inside the
contact hole CA, and a plug PB is formed inside the contact hole
PB. The plugs PLG, PC, PM, PA, and PB are formed of a stacked film
including: a relatively thin barrier film of a stacked film of, for
example, titanium and titanium nitride; and a relatively thick
conductive film formed of a tungsten or aluminum film formed to be
wrapped by the relatively thin barrier film. In the situation, as
the opening diameter near the bottom of the contact hole is
ensured, for example, a high resistance or no conduction at the
connection portion between the plug PLG and the silicide layer 3 on
the drain region Drm can be prevented. Thereafter, on the
interlayer insulating film 9, a first layer wiring (not
illustrated) containing copper or aluminum as a main component is
formed.
[0272] From here, the semiconductor device including the
non-volatile memory will be manufactured through a normal
manufacturing process of a semiconductor device.
[0273] Note that, while the heights from the main surface of the
semiconductor substrate 1 to the top surfaces of the gate
electrodes GLn, GLp, GHn, and GHp of the low-voltage nMIS,
low-voltage pMIS, high-voltage nMIS, and high-voltage pMIS formed
in the peripheral circuit region are set to be the second height
d2, the conductive film 10 may not be etched by forming a resist
pattern to the whole of the peripheral circuit region. In this
case, the height from the main surface of the semiconductor
substrate 1 to the upper surfaces of the gate electrodes GLn, GLp,
GHn, and GHp are formed to be the first height d1, and the etching
step illustrated in FIG. 12 described above is not included, and
thus the gate electrodes GLn, GLp, GHn, and GHp can be formed
without variations in height.
Second Embodiment
[0274] A different point of a second embodiment from the first
embodiment described above is a cap insulating film CAP formed via
an insulating film on the upper surface of the first conductive
film forming the select gate electrode CG of the select nMIS (Qnc)
in the memory cell forming region.
[0275] More specifically, in the first embodiment described above,
the select gate electrode CG of the select nMIS (Qnc) in the memory
cell forming region and the select gate electrode CG of the CG
shunt portion in the feeding region are formed of the first
conductive film, and the thickness of the select gate electrode CG
of the CG shunt portion in the feeding region is processed to be
thinner than the thickness of the select gate electrode CG in the
memory cell forming region, i.e., to be the second height d2. In
addition, the pad electrode PAD is formed by running over the
thinly processed select gate electrode CG. In this manner, the
third height third height d3, which is a height from the main
surface of the semiconductor substrate 1 to the upper surface of
the pad electrode PAD running over the partial region of the select
gate electrode CG of the CG shunt portion, is lower than that in
the case of forming the pad electrode PAD on the select gate
electrode CG having the first height d1.
[0276] However, in the second embodiment, the cap insulating film
CAP is formed on the select gate electrode CG of the select nMIS
(Qnc) in the memory cell forming region via an insulating film, and
the cap insulating film CAP is not formed on the select gate
electrode CG of the CG shunt portion in the feeding region, so that
the pad electrode PAD is formed on the select gate electrode CG to
which the cap insulating film CAP is not formed, thereby making the
third height d3 lower than that when forming the pad electrode PAD
on the cap insulating film CAP.
[0277] An example of structures of the memory gate electrode MG
forming a non-volatile memory cell of the second embodiment and a
feeding region of the select gate electrode CG will be described
with reference to FIG. 27. FIG. 27 is a cross-sectional view of a
main part of the memory gate electrode MG and the select gate
electrode CG in the feeding region.
[0278] As illustrated in FIG. 27, in the same manner as the first
embodiment, in the MG shunt portion, the pad electrode PAD formed
of the second conductive film in the same layer as the memory gate
electrode MG (not illustrated) is formed by running over a partial
region of the select gate electrode CG of the CG shunt portion. The
pad electrode PAD is formed in the same step as forming the memory
gate electrode MG to a sidewall of the select gate electrode CG in
a self-aligned manner, and the memory gate electrode MG in the
sidewall shape and the pad electrode PAD are connected.
[0279] In the memory cell forming region, the select nMIS (Qnc) is
formed, and the cap insulating film CAP formed of the second
conductive film is formed to the upper surface of the select gate
electrode CG of the select nMIS (Qnc) via an insulating film 25
formed of a sixth insulating film. A height from the main surface
of the semiconductor substrate 1 to an upper surface of a stacked
film formed of the select gate electrode CG, insulating film 25,
and cap insulating film CAP is set to the first height d1.
Meanwhile, the feeding region includes a region in which the
insulating film 25 and the cap insulating film CAP are not formed
on the upper surface of the select gate electrode CG, that is, a
region in which only the select gate electrode CG is formed. A
height from the main surface of the semiconductor substrate 1 to
the upper surface of the select gate electrode CG in that region is
set to the second height d2. As the pad electrode PAD is formed on
the select gate electrode CG having the second height d2 from which
the insulating film 25 and the cap insulating film CAP are removed,
the height d3 is lower than that when forming the pad electrode PAD
on the cap insulating film CAP.
[0280] To the interlayer insulating film 9 in the feeding region,
the contact hole CC is formed reaching the silicide layer 3 formed
to the upper surface of the select gate electrode CG from which the
insulating film 25 and the cap insulating film CAP are removed. The
select gate electrode CG in the feeding region is electrically
connected to the first layer wiring via the plug PC formed of the
third conductive film buried inside the contact hole CC. Also, to
the interlayer insulating film 9 in the feeding region, the contact
hole CM reaching the silicide layer 3 formed to the upper surface
of the pad electrode PAD is formed. The pad electrode PAD is
electrically connected to the first layer wiring via the plug PM
formed of the third conductive film buried inside the contact hole
CM.
[0281] As described above, according to the second embodiment, the
cap insulating film CAP is formed to the upper surface of the
select gate electrode CG in the memory cell forming region via the
insulating film 25, and the insulating film 25 and the cap
insulating film CAP are not formed to the upper surface of the
select gate electrode CG of the CG shunt portion. In this manner,
the third height d3 of the upper surface of the pad electrode PAD
running over the partial region of the select gate electrode CG of
the CG shunt portion from the main surface of the semiconductor
substrate 1 is lower than that when forming the pad electrode PAD
on the cap insulating film CAP. Thus, the same effects as those of
the first embodiment can be obtained.
[0282] Particularly, when the thickness of the stacked film of the
insulating films 6b and 6t, the charge storage layer CSL, and the
pad electrode PAD is thinner than or same as a thickness of the
stacked film of the insulating film 25 and the cap insulating film
CAP, a relationship of d1.gtoreq.d3 is established, and, as the
maximum height from the main surface of the semiconductor substrate
1 will not be increased by forming the pad electrode PAD, it is
more preferable.
[0283] Next, first and second modification examples of the memory
gate electrode MG formed in the feeding region and the shunt
portion of the select gate electrode CG according to the second
embodiment will be described.
[0284] The first modification example of the feeding region
according to the second embodiment will be described with reference
to the cross-sectional view of a main part of the feeding region
(cross-sectional view of the memory gate electrode MG and the CG
shunt portion of the select gate electrode CG) illustrated in FIG.
28. The first modification example of the feeding region according
to the second embodiment is similar to that of the second
modification example of the feeding region according to the first
embodiment, and the present invention is applied in one feeding
region shared by two memory cell forming regions.
[0285] More specifically, in the MG shunt portion formed in the
feeding region, the pad electrode PAD formed of the second
conductive film in the same layer as the memory gate electrode MG
is formed, the pad electrode PAD running over both a partial region
of a first CG shunt portion (termination portion of the select gate
electrode CG in a first memory cell forming region) and a partial
region of a second CG shunt portion (termination portion of the
select gate electrode CG in a second memory cell forming region)
formed in the feeding region. The pad electrode PAD is formed in
the same step of forming the memory gate electrode MG to the
sidewall of the select gate electrode CG in a self-aligned manner,
and the memory gate electrode MG in the sidewall shape and the pad
electrode PAD are connected. Therefore, via the pad electrode PAD,
the memory gate electrode MG formed to the sidewall of the select
gate electrode CG of the first CG shunt portion and the memory gate
electrode MG formed to the sidewall of the select gate electrode CG
of the second CG shunt portion are electrically connected.
[0286] In the same manner as the feeding region described above
with reference to FIG. 27, in the select nMIS formed in the memory
cell forming region, the cap insulating film CAP is formed to the
upper surface of the select gate electrode CG of the select nMIS
(Qnc) via the insulating film 25, but the insulating film 25 and
the cap insulating film CAP are not formed to the upper surface of
the select gate electrode CG formed to the CG shunt portion in the
feeding region. Therefore, the second height d2 of the select gate
electrode CG of the first and second CG shunt portions from the
main surface of the semiconductor substrate 1 to the upper surface
of the select gate electrode CG is lower than the first height d1
from the main surface of the semiconductor substrate 1 to the upper
surface of the stacked film of the select gate electrode CG,
insulating film 25, and cap insulating film CAP in the memory cell
forming region. In this manner, the effects same as that of the
second modification example of the feeding region according to the
first embodiment described above can be obtained.
[0287] As described above, particularly, when the relationship of
d1.gtoreq.d3 is established, the maximum height from the main
surface of the semiconductor substrate 1 is not increased from that
before forming the pad electrode PAD by forming the pad electrode
PAD, and it is more preferable.
[0288] The second modification example of the feeding region
according to the second embodiment will be described with reference
to the cross-sectional view of a main part (cross-sectional view of
a main part of the memory gate electrode MG and the shunt portion
of the select gate electrode CG) of the feeding region illustrated
in FIG. 29.
[0289] The second modification example of the feeding region
according to the second embodiment is same as the third
modification example of the feeding region according to the first
embodiment, and the present invention is applied to one feeding
region shared by two memory cell forming regions in which the dummy
portion DMY is arranged between the first CG shunt portion
(termination portion of the select gate electrode CG in the first
memory cell forming region) and the second CG shunt portion
(termination portion of the select gate electrode CG in the second
memory cell forming region).
[0290] While the dummy portion DMY is formed of the first
conductive film in the same layer as the select gate electrode CG,
the insulting film 25 and the cap insulating film CAP are not
formed to the upper surface of the dummy portion DMY. The dummy
portion DMY is not electrically connected to the select gate
electrode CG of the first CG shunt portion or the select gate
electrode CG of the second CG shunt portion, and is spaced apart
from the select gate electrode CG of the first CG shunt portion or
the select gate electrode CG of the second CG shunt portion. The
height of the dummy portion DMY from the main surface of the
semiconductor substrate 1 is substantially the same as the second
height d2 from the main surface of the semiconductor substrate 1 to
the upper surface of the select gate electrode CG of the first and
second CG shunt portions.
[0291] In the same manner as the feeding region described with
reference to FIG. 27 above, in the select nMIS (Qnc) formed in the
memory cell forming region, the cap insulating film CAP is formed
to the upper surface of the select gate electrode CG via the
insulating film 25, but the insulating film 25 and the cap
insulating film CAP are not formed to the upper surface of the
select gate electrode CG formed in the CG shunt portion in the
feeding region. Therefore, the second height d2 of the select gate
electrode CG of the first and second CG shunt portions from the
main surface of the semiconductor substrate 1 to the upper surface
of the select gate electrode CG is lower than the first height d1
from the main surface of the semiconductor substrate 1 to the upper
surface of the stacked film of the select gate electrode CG,
insulating film 25, and cap insulating film CAP in the memory cell
forming region.
[0292] In this manner, the same effects as those of the third
modification example of the feeding region according to the first
embodiment described above can be obtained.
[0293] As described above, particularly, when the relationship of
d1.gtoreq.d3 is established, as the maximum height from the main
surface of the semiconductor substrate 1 is not increased from that
before forming the pad electrode PAD by forming the pad electrode
PAD, it is more preferable.
[0294] Next, an example of a method of manufacturing a
semiconductor device including the non-volatile memory cell
according to the second embodiment will be described in the order
of steps with reference to FIGS. 30 to 36. FIGS. 30 to 36 are
cross-sectional views of a main part of the memory region, feeding
region (MG shunt portion and CG shunt portion), capacitor element
region, and peripheral circuit region (low-voltage nMIS region,
low-voltage pMIS region, high-voltage nMIS region, and high-voltage
pMIS region) during a manufacturing process of the semiconductor
device. The memory region and the peripheral circuit region are
illustrated by cross-sectional views in a gate-length direction,
and the feeding region is illustrated by cross-sectional views in a
direction perpendicular to the gate-length direction in the same
manner as FIG. 27 described above. Note that the manufacturing
procedure until forming the gate insulating films 4 and 4A to the
main surface of the semiconductor substrate 1 is the same as that
of the first embodiment, and thus descriptions thereof will be
omitted.
[0295] As illustrated in FIG. 30, on the main surface of the
semiconductor substrate 1, the conductive film 10 formed of, for
example, amorphous silicon is deposited by a CVD method, and then
an n-type impurity is introduced to the conductive film 10 in the
memory region, feeding region, and capacitor element region by an
ion implantation method or the like, thereby forming the n-type
conductive film (first conductive film) 10n. Thicknesses of the
conductive films 10 and 10n are, for example, about 140 nm.
Subsequently, by subjecting the semiconductor substrate 1 to a
thermal oxidation treatment, the insulating film (sixth insulating
film) 25 is formed to the conductive films 10 and 10n. The
insulating film 25 is formed of, for example, silicon oxide, and
has a thickness of, for example, 5 to 10 nm. Subsequently, the cap
insulating film CAP (second insulating film) is deposited on the
insulating film 25 by a CVD method. The cap insulating film CAP is
formed of, for example, silicon nitride, silicon oxide, silicon
oxide containing nitride, or silicon carbide, and has a thickness
of, for example, 50 nm.
[0296] Next, as illustrated in FIG. 31, the cap insulating film
CAP, insulating film 25, and n-type conductive film 10n in the
memory region, feeding region, and capacitor element region are
sequentially patterned using photolithography and dry etching. In
this manner, the select gate electrode CG of the select nMIS (Qnc)
formed of the n-type conductive film 10n is formed. A gate length
of the select gate electrode CG in the memory region is, for
example, about 100 nm. At the same time, the bottom electrode 10E
formed of the n-type conductive film 10n is formed in the capacitor
element region.
[0297] Next, as illustrated in FIG. 32, the cap insulating film CAP
in the CG shunt portion in the feeding region, capacitor element
region, and peripheral circuit region are removed. Here, in the
peripheral circuit region, the silicide layer 3 is necessary to be
formed on each gate electrode of the low-voltage nMIS, low-voltage
pMIS, high-voltage nMIS, and high-voltage pMIS formed in later
steps.
[0298] Therefore, the cap insulating film CAP in the peripheral
circuit region is necessary to be removed in this step. In
addition, in the capacitor element region, when the cap insulating
film CAP is left therein, a dielectric film between the bottom
electrode 10E and the top electrode 11E to be formed in a later
step becomes too thick, resulting in a reduction of a capacitance
value. Therefore, in this step, the cap insulating film CAP in the
capacitor element region is necessary to be removed.
[0299] In addition, upon removing the cap insulating film CAP in
this step, the insulating film 25 works as an etching stopper.
[0300] Next, using the cap insulating film CAP, the select gate
electrode CG of the select nMIS (Qnc), and a photoresist pattern as
a mask, an n-type impurity, for example, arsenic or phosphorus is
ion-implanted into the main surface of the semiconductor substrate
1 in the memory region, thereby forming the n-type semiconductor
regions 8 for forming a channel of the memory nMIS (Qnm).
[0301] Next, as illustrated in FIG. 33, the insulating films 25
remaining in the CG shunt portion of the feeding region, capacitor
element region, and peripheral circuit region are completely
removed, and then, the insulating film 6b formed of, for example,
silicon oxide, the charge storage layer CSL formed of, for example,
silicon nitride, and the insulating film 6t formed of, for example,
silicon oxide are formed in series. The insulating film 6b is
formed by, for example, a thermal oxidation method or an ISSG
oxidation method. The charge storage layer CSL is formed by a CVD
method. The insulating film 6t is formed by, for example, a thermal
oxidation method or an ISSG oxidation method. The insulating films
6b and 6t may be formed of silicon oxide containing nitride. A
total thickness of the insulating films 6b and 6t and the charge
storage layer CSL can be, for example, about 20 nm.
[0302] Next, the second conductive film formed of low-resistance
polycrystalline silicon is deposited on the main surface of the
semiconductor substrate 1. The second conductive film is formed of
a CVD method, and has a thickness of, for example, 50 nm.
[0303] Before depositing the second conductive film, as the
insulating film 25 and the cap insulating film CAP formed to the
upper surface of the select gate electrode CG of the CG shunt
portion are previously removed in the feeding region in the step
illustrated in FIG. 32, a height (third height d3) of the second
conductive film deposited on the select gate electrode CG of the CG
shunt portion via the insulating films 6b and 6t and charge storage
layer CSL from the main surface of the semiconductor substrate 1 to
the upper surface of the pad electrode PAD is lower than or same as
the height (first height d1) of the upper surface of the stacked
film of the select gate electrode CG, insulating film 25, and cap
insulating film CAP in the memory region from the main surface of
the semiconductor substrate 1.
[0304] Next, the second conductive film is processed by using
photolithography and anisotropic dry etching. In this manner, in
the memory region, sidewalls 11 are formed to both side surfaces of
the stacked films of the select gate electrode CG, insulating film
25, and cap insulating film CAP via the insulating films 6b and 6t
and charge storage layer CSL. At the same time, in the CG shunt
portion in the feeding region, the sidewalls 11 are formed to both
side surfaces of the select gate electrode CG via the insulating
films 6b and 6t and charge storage layer CSL. Further, in the MG
shunt portion in the feeding region, a partial region of the CG
shunt portion is covered by a resist pattern RP, thereby forming
the pad electrode PAD via the insulating films 6b and 6t and charge
storage layer CSL. Moreover, in the capacitor element region, the
bottom electrode 10E is covered by the photoresist pattern RP,
thereby forming the top electrode 11E via the insulating films 6b
and 6t and charge storage layer CSL.
[0305] In the CG shunt portion, as the cap insulating film CAP has
been removed in the step illustrated in FIG. 32 described above,
the height (third height d3) of the pad electrode PAD running over
the select gate electrode CG of the CG shunt portion from the main
surface of the semiconductor substrate 1 to the upper surface of
the pad electrode PAD is lower than or same as the height (first
height d1) to the upper surface of the stacked layer of the select
gate electrode CG, insulating film 25, and cap insulating film CAP
in the memory region. A thickness of the select gate electrode CG
of the select nMIS (Qnc) in the memory region is, for example,
about 150 nm, a thickness of the insulating film 25 is, for
example, about 10 nm, and a thickness of the cap insulating film
CAP is, for example, about 50 nm. Thus, a height from the main
surface of the semiconductor substrate 1 to the upper surface of
the cap insulating film CAP in the memory region (not including the
thickness of the gate insulating film 4) is, for example, about 210
nm. Meanwhile, a thickness of the pad electrode PAD of the MG shunt
portion in the feeding region is, for example, about 40 nm, a total
thickness of the insulating films 6b and 6t and charge storage
layer CSL are, for example, about 20 nm. Thus, a height from the
main surface of the semiconductor substrate 1 to the upper surface
of the pad electrode PAD in the feeding region is, for example,
about 210 nm.
[0306] Therefore, as compared to forming the second conductive film
to the portion where the stacked film of the select gate electrode
CG of the CG shunt portion, insulating film 25, and cap insulating
film CAP, a bump in the region in which the photoresist pattern RP
is formed is small at the CG shunt portion, and thus a focus shift
in a lithography process due to a bump is reduced, a processing
accuracy of the photoresist pattern RP is improved, and a shape
failure of the pad electrode PAD formed by processing the second
conductive film can be prevented.
[0307] Next, as illustrated in FIG. 34, using a photoresist pattern
as a mask, the sidewalls 11 exposed from the photoresist pattern
are etched. In this manner, in the memory region, the memory gate
electrodes MG (sidewalls) 11 of the memory nMIS (Qnm) are formed
only on one side surface of each of the stacked films of the select
gate electrode CG, insulating film 25, and cap insulating film CAP.
The gate length of the memory gate electrode MG is, for example,
about 65 nm.
[0308] Next, the insulating films 6b and 6t and charge storage
layer CSL are selectively removed except for those left: between
the memory gate electrode MG and the stacked film of the select
gate electrode CG, insulating film 25, and cap insulating film CAP,
and between the semiconductor substrate 1 and the memory gate
electrode MG in the memory region; between the select gate
electrode CG and the pad electrode PAD and between the device
isolation portion STI and the pad electrode PAD in the MG shunt
portion in the feeding region; and between the bottom electrode 10E
and the top electrode 11E in the capacitor element region.
[0309] In the capacitor element region, a capacitor element is
formed having: the bottom electrode 10E formed of the first
conductive film in the same layer as the select gate electrode CG
of the select nMIS (Qnc); and the top electrode 11E formed of the
second conductive film in the same layer as the memory gate
electrode MG of the memory nMIS (Qmc), by taking the insulating
films 6b and 6t and charge storage layer CSL as a capacitor
insulating film (dielectric film).
[0310] Next, following a manufacturing process same as the first
embodiment described above (cf., FIGS. 15 and 16), the conductive
film 10 of the low-voltage nMIS region and the high-voltage nMIS
region in the peripheral circuit region is turned into the n-type
conductive film 10na, and the conductive film 10 of the low-voltage
pMIS region and high-voltage pMIS region in the peripheral circuit
region is turned into the p-type conductive film 10p, and then the
conductive films 10na and 10p in the peripheral circuit region are
patterned by lithography technology and dry etching technology,
thereby forming the gate electrode GLn formed of the conductive
film 10na of the low-voltage nMIS, gate electrode GLp formed of the
conductive film 10p of the low-voltage pMIS, the gate electrode GHn
formed of conductive film 10na of the high-voltage nMIS, the gate
electrode GHp formed of the conductive film 10p of the high-voltage
pMIS.
[0311] As the gate length is shortened by miniaturization
(scaling), the resist pattern used upon etching of the conductive
films 10na and 10p in the peripheral circuit region in this step is
very thinly formed. In the region in which the pad electrode PAD is
formed, due to the bump, the resist pattern on the pad electrode
PAD is not formed at a desired thickness, and may be thin. In this
case, upon etching the gate electrodes GLn, GLp, GHn, and GHp, the
resist pattern is feared to be eliminated. Since the pad electrode
PAD is formed of low-resistance polycrystalline silicon same as the
conductive films 10na and 10p, if the resist pattern on the pad
electrode PAD is eliminated, the pad electrode PAD may be etched
and a problem of occurrence of a shape failure of the pad electrode
PAD may be posed.
[0312] Meanwhile, in the second embodiment, as the pad electrode
PAD is formed by running over the select gate electrode CG from
which the insulating film 25 and the cap insulating film CAP are
removed, the third height d3 of the pad electrode PAD from the main
surface of the semiconductor substrate 1 to the upper surface of
the pad electrode PAD when the pad electrode PAD is formed is low.
Thus, the bump is reduced and it is easy to form the resist pattern
at a desired thickness, and the problem of occurrence of a shape
failure of the pad electrode PAD can be avoided.
[0313] Next, following a manufacturing process same as that of the
first embodiment (cf. FIGS. 17 to 23), the drain region Drm formed
of the n.sup.--type semiconductor region 2ad and n.sup.+-type
semiconductor region 2b and the source region Srm formed of the
n.sup.--type semiconductor region 2as and n.sup.+-type
semiconductor region 2b are formed in the memory region. The
source/drain regions SD of the high-voltage nMIS formed of the
n.sup.--type semiconductor region 13 and the n.sup.+-type
semiconductor region 23, and the source/drain regions SD of the
low-voltage nMIS formed of the n.sup.--type semiconductor region 18
and the n.sup.+-type semiconductor region 23 are formed in the
peripheral circuit region.
[0314] Next, as illustrated in FIG. 35, the silicide layers 3 are
formed to: the upper surfaces of the memory gate electrodes MG, and
upper surfaces of the n.sup.+-type semiconductor regions 2b of the
memory nMIS (Qnm) in the memory region; the upper surface of the
pad electrode PAD of the MG shunt portion, and the upper surface of
the select gate electrode CG, to which the cap insulating film CAP
is not formed, of the select nMIS (Qnc) of the CG shunt portion in
the feeding region; an upper surface of the gate electrode GLn and
upper surfaces of the n.sup.+-type semiconductor regions 23 of the
low-voltage nMIS, an upper surface of the gate electrode GLp and
upper surfaces of the p.sup.+-type semiconductor regions 21 of the
low-voltage pMIS, an upper surface of the gate electrode GHn and
upper surfaces of the n.sup.+-type semiconductor regions 23 of the
high-voltage nMIS, and an upper surface of the gate electrode GHp
and upper surfaces of the p.sup.+-type semiconductor regions 21 of
the high-voltage pMIS in the peripheral circuit region; and an
upper surface of a part of the top electrode 11E not overlapping
with the select gate electrode CG and the sidewalls SW in plane in
the capacitor element region.
[0315] Through the foregoing process, the capacitor element and the
low-voltage nMIS, low-voltage pMIS, high-voltage nMIS, and
high-voltage pMIS formed in the peripheral circuit region according
to the second embodiment are substantially completed.
[0316] As illustrated in FIG. 35, the pad electrode PAD is formed
on the select gate electrode CG from which the insulating film 25
and the cap insulating film CAP are removed. In addition, the
capacitor insulating film (insulating films 6b and 6t and charge
storage layer CSL) of the capacitor element and the top electrode
11E are also formed on the bottom electrode 10E from which the
insulating film 25 and cap insulating film CAP are removed. In this
manner, the maximum height of the elements on the main surface of
the semiconductor substrate 1 after forming the pad electrode PAD
and top electrode 11E can be lower than that when forming the pad
electrode PAD and top electrode 11E on the cap insulating film CAP.
As a result, even when the interlayer insulating film 9 to be
formed in a later step is not thickly formed, a margin upon
polishing the third insulating film that forms the interlayer
insulating film 9 by a CMP method can be ensured. Therefore, also
when forming a deep contact hole to the interlayer insulating film
9, an opening diameter near the bottom of the contact hole can be
ensured, and a high resistance or no conduction of the plug formed
by burying a conductive film to the contact hole can be prevented.
Moreover, upon performing an etching for forming the contact hole,
occurrence of a shape failure to the pad electrode PAD due to a
lack of a thickness of the photoresist pattern can be
prevented.
[0317] As described above, particularly, when the relationship of
d1.gtoreq.d3 is established, as the maximum height from the main
surface of the semiconductor substrate 1 is not changed from that
before forming the pad electrode PAD by forming the pad electrode
PAD, it is more preferable.
[0318] Next, following a manufacturing process as that of the first
embodiment described above (cf., FIGS. 24 and 25), the silicon
nitride film 9a is deposited as an insulating film on the main
surface of the semiconductor substrate 1 by a CVD method. The
silicon nitride film 9a works as an etching stopper upon forming a
contact hole described below. Subsequently, the silicon oxide film
9b is formed as an insulating film by a CVD method and polished by
a CMP method, thereby forming the interlayer insulating film 9
formed of the silicon nitride film 9a and silicon oxide film 9b.
Since the height of the pad electrode PAD from the main surface of
the semiconductor substrate 1 is formed to be low as described
above, the height of the whole elements on the main surface of the
semiconductor substrate 1 is low, and thus a margin in an upcoming
polishing by a CMP method can be ensured without thickly depositing
the silicon oxide film 9b. The same goes to the top electrode 11E
of the capacitor element.
[0319] Next, as illustrated in FIG. 36, the contact hole CNT
reaching the silicide layer 3 on the drain region Drm is formed to
the interlayer insulating film 9 in the memory region. At the same
time, in the feeding region, the contact hole CC reaching the
silicide layer 3 on the select gate electrode CG of the CG shunt
portion is formed, and the contact hole CM reaching the silicide
layer 3 on the pad electrode PAD of the MG shunt portion is
formed.
[0320] Further, in the peripheral circuit region, the contact holes
CA reaching the silicide layer 3 are formed on the gate electrodes
(GHn, GHp, GLn, GLp) and the source/drain regions SD of the
high-voltage nMIS, high-voltage pMIS, low-voltage nMIS, and
low-voltage pMIS, respectively. In the capacitor element region, in
a portion where the top electrode 11E and the bottom electrode 10E
are not overlapped in a plane, the contact holes CB are formed
reaching the silicide layers 3 of each of upper surfaces the top
electrode 11E and bottom electrode 10E.
[0321] At this time, since the interlayer insulating film 9 is
formed to be low, the opening diameter near the bottom of the
contact hole can be ensured even when a deep contact hole such as
the contact hole CNT is formed to the interlayer insulating film 9.
Also, upon performing an etching for forming the contact hole,
occurrence of a shape failure to the pad electrode PAD due to a
lack of a thickness of the photoresist pattern can be
prevented.
[0322] Next, the plug PLG is formed inside the contact hole CNT,
the plug PC is formed in the contact hole CC, the plug PM is formed
inside the contact hole CM, the plug PA is formed inside the
contact hole CA, and the plug PB is formed inside the contact hole
CB. Thereafter, by forming the first layer wiring, the memory cell,
the capacitor element, and the low-voltage nMIS, low-voltage pMIS,
high-voltage nMIS, and high-voltage pMIS formed in the peripheral
circuit region are substantially completed.
[0323] From here, the semiconductor device including the
non-volatile memory will be manufactured through a normal
manufacturing process of a semiconductor device.
[0324] Note that, while the insulating film 25 has been formed
between the select gate electrode CG of the select nMIS (Qnc) and
the cap insulating film CAP in the second embodiment, the present
invention can be also applied to a non-volatile memory in which the
insulating film 25 is not formed. Meanwhile, in this case, the
upper surface of the select gate electrode CG is feared to be
etched also in the etching for removing the pad electrode PAD.
[0325] The above-described first embodiment and second embodiment
can be used in a semiconductor device including a semiconductor
element having a first gate electrode and a second gate electrode
formed to be adjacent to each other via an insulating film, the
semiconductor device having a feeding region for supplying voltage
to the first gate electrode and supplying voltage to the second
gate electrode. Specifically, the present invention can be used in
a semiconductor device including a memory cell of a split-gate
structure of two-transistor configuration. The same goes to third
to fifth embodiments described below.
Third Embodiment
[0326] The present invention is a semiconductor device including a
non-volatile memory (non-volatile memory element, flash memory,
non-volatile semiconductor memory device), and the non-volatile
memory uses a trap insulating film (an insulating film capable of
storing charges) to mainly a charge storage portion. In the
following embodiments, the non-volatile memory is basically an
n-channel type MISFET (metal insulator semiconductor field effect
transistor) and the descriptions will be made based on a memory
cell using the trap insulating film. In addition, polarities
(polarities of applied voltages upon program, erase, and read, and
polarities of carriers) will be mentioned to describe operation of
using a memory cell based on an n-channel MISFET. If the memory
cell is based on a p-channel type MISFET, the same operation can be
achieved in principle when all polarities of applied voltages and
conductivities of carriers are reversed.
[0327] A structure of the semiconductor device of the present
invention will be described with reference to the attached
drawings. FIGS. 37 and 38 are plan views of a main part of the
semiconductor device of the present invention, and FIGS. 39 to 43
are cross-sectional views of a main part of the semiconductor
device of the present invention. A cross section taken along the
line A1-A1 in FIG. 37 corresponds to FIG. 39, a cross section taken
along the line B1-B1 in FIG. 37 corresponds to FIG. 40, a cross
section taken along the line C1-C1 in FIG. 37 corresponds to FIG.
41, a cross section taken along the line D1-D1 in FIG. 37
corresponds to FIG. 42, and a cross section taken along the line
E1-E1 in FIG. 37 corresponds to FIG. 43. FIG. 44 is a
cross-sectional view of a main part illustrating a schematic
cross-sectional structure of a memory cell M1 in the semiconductor
device of the present invention.
[0328] To facilitate understanding, a planar layout of a select
gate electrode SG, a memory gate electrode MG1, an insulating film
65 between the select gate electrode SG and the memory gate
electrode MG1, a source semiconductor region MS, a drain
semiconductor region MD, a device isolation region 62, a contact
hole CT, etc. is illustrated in the plan view of FIG. 37, and
illustration of other components are omitted. While FIG. 38
illustrates a planar region same as FIG. 37, hatching is added to
the device isolation region 62, and the select gate electrode SG
and memory gate electrode MG1 are illustrated by dotted lines. The
region without hatching corresponds to an active region (active
region defined by the device isolation regions 62) in FIG. 38.
Also, in FIG. 38, illustration of the contact hole CT is omitted.
In FIG. 44, a cross-sectional region corresponding to the right
half of FIG. 39 (cross-sectional region for one memory cell) is
illustrated, and a semiconductor substrate 61, a p-type well PW1,
insulating films 63 and 65, a select gate electrode SG, a memory
gate electrode MG1, and semiconductor regions MS and MD are
illustrated. Meanwhile, illustrations of a sidewall insulating film
68, a metal silicide layer 71, an insulating film 72, the contact
hole CT, a plug PG, and a wiring MM1 are omitted.
[0329] The semiconductor device of the present embodiment
illustrated in FIGS. 37 to 44 is a semiconductor device including a
non-volatile memory.
[0330] For example, to a memory cell region (memory cell forming
region, memory-cell-array forming region) 61A of the semiconductor
substrate (semiconductor wafer) formed of p-type single crystal
silicon having a resistivity of about 1 to 10 .OMEGA.cm, a MISFET
(metal insulator semiconductor field effect transistor; MIS
transistor; MIS-type field effect transistor) to be a memory cell
of the non-volatile memory is formed.
[0331] To the semiconductor substrate 61, the device isolation
regions 62 for isolating devices (elements) are formed, and a
p-type well PW1 is formed in an active region isolated (defined) by
the device isolation regions 62.
[0332] To the p-type well PW1 of the memory cell region 61A, a
memory cell array MC1 of the non-volatile memory formed of a memory
transistor and a select transistor (control transistor) is formed.
In the memory cell region 61A, a plurality of the memory cells MC1
are formed in an array, and the memory cell region 61A is
electrically isolated from other regions by the device isolation
regions 62. That is, the memory cell region 61A corresponds to a
region in which the plurality of memory cells MC1 are formed
(arranged, arrayed) in an array in a main surface of the
semiconductor substrate 61.
[0333] The memory cell MC1 of the non-volatile memory formed in the
memory cell region 61A is a memory cell of split-gate type using a
MONOS film, and including two connected MISFETs of a select
transistor (control transistor) having the select gate electrode
(control gate electrode) SG and a memory transistor having the
memory gate electrode (gate electrode for a memory) MG1.
[0334] Here, the MISFET having the gate insulating film including a
charge storage portion and the memory gate electrode MG1 is called
memory transistor (transistor for memory), and the MISFET having
the gate insulating film and the select gate electrode SG is called
select transistor (transistor for selecting memory cell, control
transistor). Thus, the memory gate electrode MG1 is a gate
electrode of the memory transistor, and the select gate electrode
SG is a gate electrode of the select transistor, and thus the
select gate electrode SG and memory gate electrode MG1 are gate
electrodes forming (a memory cell of) the non-volatile memory.
[0335] Hereinafter, a configuration of the memory cell MC1 will be
specifically described.
[0336] As illustrated in FIGS. 38 and 44, the memory cell MC1 of
the non-volatile memory includes: the n-type semiconductor regions
MS and MD for source and drain formed in the p-type well PW1 of the
semiconductor substrate 61; the select gate electrode SG formed
above the semiconductor substrate 61 (p-type well PW1); and the
memory gate electrode MG1 formed above the semiconductor substrate
61 (p-type well PW1) and being adjacent to the select gate
electrode SG. In addition, the memory cell MC1 of the non-volatile
memory further includes: the insulating film (gate insulating film)
63 formed between the select gate electrode SG and the
semiconductor substrate 61 (p-type well PW1); and the insulating
film 65 formed between the memory gate electrode MG1 and the
semiconductor substrate 61 (p-type well PW1). The memory gate
electrode MG1 of each memory cell MC1 forms a word line of each of
the memory cells MC1.
[0337] The select gate electrode SG and the memory gate electrode
MG1 are arranged next to each other and extended along the main
surface of the semiconductor substrate 61 interposing the
insulating film 65 between their facing side surfaces (sidewalls).
The select gate electrode SG and the memory gate electrode MG1 are
formed between the semiconductor region MD and the semiconductor
region MS above the semiconductor substrate 61 (p-type well PW1)
interposing the insulating films 63 and 65 (note that the select
gate electrode SG interposes the insulating film 63 and the memory
gate electrode MG1 interposes the insulating film 65). The memory
gate electrode MG1 is positioned on the semiconductor region MS
side, and the select gate electrode SG is positioned on the
semiconductor region MD side.
[0338] The select gate electrode SG and the memory gate electrode
MG1 are adjacent to each other interposing the insulating film 65
therebetween, and the memory gate electrode MG1 is formed in a
sidewall spacer shape on one sidewall (side surface) of the select
gate electrode SG interposing the insulating film 65. Hereinafter,
the "sidewall spacer shape" may be called "sidewall shape." The
insulating film 65 is extended across both of a region between the
memory gate electrode MG1 and the semiconductor substrate 61
(p-type well PW1) and a region between the memory gate electrode
MG1 and the select gate electrode SG.
[0339] The insulating film 63 formed between the select gate
electrode SG and the semiconductor substrate 61 (p-type well PW1)
(i.e., the insulating film 63 under the select gate electrode SG)
works as a gate insulating film of the select transistor. Also, the
insulating film 65 between the memory gate electrode MG1 and the
semiconductor substrate 61 (p-type well PW1) (i.e., the insulating
film 65 under the memory gate electrode MG1) works as a gate
insulating film (gate insulating film having a charge storage
portion inside) of the memory transistor.
[0340] The insulating film 65 is a gate insulating film having a
stacked-layer structure of: an insulating film for storing charges
(i.e., charge storage portion) of, for example, a silicon nitride
film 65b; and insulating films positioned above and under the
charge storing insulating film of, for example, a silicon oxide
film 65c and a silicon oxide film 65a. That is, the insulating film
65 is formed of a stacked film including the silicon oxide film
(oxide film) 65a, the silicon nitride film (nitride film) 65b, and
the silicon oxide film (oxide film) 65c. In other words, the
insulating film 65 is formed of an ONO (oxide-nitride-oxide) film
of the silicon oxide film (oxide film) 65a, the silicon nitride
film (nitride film) 65b, and the silicon oxide film (oxide film)
65c stacked in this order from the farthest side from the memory
gate electrode MG1. As the silicon nitride film 65b is a trap
insulating film and works as a charge storage film (charge storage
portion) for storing charges, the insulating film 65 can be taken
as an insulating film having a charge storage portion (here, the
silicon nitride film 65b) inside.
[0341] Note that, while the insulating film 65 is illustrated in
FIG. 44 as a stacked film of the silicon oxide film 65a, silicon
nitride film 65b, and silicon oxide film 65c, the insulating film
65 is illustrated as a simple insulating film for simplifying
illustration in the cross-sectional views of FIGS. 39 to 43.
However, in fact, also in the cross-sectional views of FIGS. 39 to
43, the insulating film 65 is formed of a stacked film of the
silicon oxide film 65a, silicon nitride film 65b, and silicon oxide
film 65c.
[0342] The insulating film 63 is formed of, for example, a silicon
oxide film or a silicon oxynitride film. Also, other than the
silicon oxide film or silicon oxynitride film, a metal oxide film
having a higher dielectric constant than a silicon nitride film
such as a hafnium oxide film, aluminum oxide film (alumina), or a
tantalum oxide film may be used for the insulating film 63.
[0343] The semiconductor region MS is a semiconductor region which
works as one of a source region and a drain region, and the
semiconductor region MD is a semiconductor region which works as
the other one of the source region and drain region. Herein, the
semiconductor region MS is a semiconductor region which works as
the source region, and the semiconductor region MD is a
semiconductor region which works as a drain region. The
semiconductor regions MS and MD are formed of semiconductor regions
(n-type impurity diffusion layers) into which an n-type impurity is
introduced, and each of them has an LDD (lightly-doped drain)
structure. That is, the semiconductor region MS includes an
n.sup.--type semiconductor region 67a and an n.sup.+-type
semiconductor region 69a having a higher impurity concentration
than the n.sup.--type semiconductor region 67a, and the
semiconductor region MD includes an n.sup.--type semiconductor
region 67b and an n.sup.+-type semiconductor region 69b having a
higher impurity concentration than the n.sup.--type semiconductor
region 67b. The n.sup.+-type semiconductor region 69a has a deeper
junction depth and a higher impurity concentration than the
n.sup.--type semiconductor region 67a, and the n.sup.+-type
semiconductor region 69b has a deeper junction depth and a higher
impurity concentration than the n.sup.--type semiconductor region
67b.
[0344] As illustrated in FIG. 37, a plurality of the memory cells
MC1 of the non-volatile memory are arranged in an array to the main
surface of the semiconductor substrate 61 (more specifically, to
the memory cell region 61A). Among the plurality of memory cells
MC1 arranged in an array (matrix) in an X direction and a Y
direction in FIG. 37, the select gate electrodes SG of the memory
cells MC1 aligned in the X direction are integrally formed being
connected in the X direction. That is, one of the select gate
electrodes SG extended in the X direction of FIG. 37 forms a select
gate electrode of the plurality of memory cell MC1 aligned in the X
direction in FIG. 37, and a plurality of lines of the select gate
electrodes SG extended in the X direction are arranged to be
aligned in the Y direction in FIG. 37. Therefore, each of the
select gate electrodes SG is extended in the X direction in FIG.
37, and also works as a select gate line which electrically
connects select gate electrodes of the plurality of memory cells
MC1 aligned in the X direction in FIG. 37 and the select gate
electrodes of the plurality of memory cells MC1 aligned in the X
direction in FIG. 37 to each other.
[0345] Among the plurality of memory cells MC arranged in an array
(matrix) in the X direction and Y direction in FIG. 37, the memory
gate electrodes MG1 next to each other of the memory cells MC1
aligned in the X direction in FIG. 37 are integrally formed being
connected in the X direction. That is, one of the memory gate
electrodes MG1 extended in the X direction in FIG. 37 forms a
memory gate electrode of the plurality of memory cells MC1 aligned
in the X direction in FIG. 37, and a plurality of lines of the
memory gate electrodes MG1 extended in the X direction are arranged
to be aligned in the Y direction in FIG. 37. Therefore, each of the
memory gate electrodes MG1 is extended in the X direction in FIG.
37, and also works as a memory gate line which electrically
connects the memory gate electrodes of the plurality of memory
cells MC1 aligned in the X direction in FIG. 37 and the memory gate
electrodes of the plurality of memory cells MC1 aligned in the X
direction in FIG. 37 to each other. The memory gate electrode MG1
is adjacent to the select gate electrode SG interposing the
insulating film 65 therebetween. Note that the X direction and Y
direction in FIG. 37 are directions parallel to the main surface of
the semiconductor substrate 61, in which the Y direction is a
direction crossing the X direction; more preferably, the Y
direction is a direction perpendicular to the X direction.
[0346] Among the plurality of memory cells MC1 arranged in an array
in the X direction and Y direction in FIG. 37, the memory cells MC1
which are adjacent to each other in the Y direction in FIG. 37
interposing the semiconductor region MD which is the drain region
share the drain semiconductor region MD which is the drain region,
as illustrated in FIGS. 37 and 39, and also, the memory cells MC1
next to (adjacent to) each other in the Y direction in FIG. 37
interposing the semiconductor region MS which is the source region
share the semiconductor region MS which is the source region.
[0347] On sidewalls of the memory gate electrode MG1 and select
gate electrode SG (sidewalls not adjacent to each other), sidewall
insulating films (sidewalls, sidewall spacers) 68 formed of an
insulator (insulating film) such as silicon oxide are formed. That
is, the sidewall insulating films 68 are formed on a sidewall (side
surface) of the memory gate electrode MG1 that is on the opposite
side of the side adjacent to the select gate electrode SG
interposing the insulating film 65, and on a sidewall (side
surface) of the select gate electrode SG on the opposite side of
the side adjacent to the memory gate electrode MG1 via the
insulating film 65.
[0348] The n.sup.--type semiconductor region 67a forming the source
semiconductor region MS is formed in a self-aligned manner to the
sidewall of the memory gate electrode MG1, and the n.sup.+-type
semiconductor region 69a is formed in a self-aligned manner to the
side surface (side surface opposite to that abutting the memory
gate electrode MG1) of the sidewall insulating film 68 on the
sidewall of the memory gate electrode MG1. Therefore, the n''-type
semiconductor region 67a having a low concentration is formed under
the sidewall insulating film 68 on the sidewall of the memory gate
electrode MG1, and the n.sup.+-type semiconductor region 69a having
a high concentration is formed outside the n.sup.--type
semiconductor region 67b having a low concentration. Therefore, the
n.sup.--type semiconductor region 67a having a low concentration is
formed to be adjacent to the channel region of the memory
transistor; and the n.sup.+-type semiconductor region 69a having a
high concentration abuts the n.sup.--type semiconductor region 67a
having a low concentration and is formed to be away from the
channel region of the memory transistor by the n.sup.--type
semiconductor region 67a.
[0349] The n.sup.--type semiconductor region 67b forming the drain
semiconductor region MD is formed in a self-aligned manner to the
sidewall of the select gate electrode SG, and the n.sup.+-type
semiconductor region 69b is formed to the side surface (side
surface opposite to that abutting the select gate electrode SG) of
the sidewall insulating film 68 on the select gate electrode SG.
Therefore, the n.sup.--type semiconductor region 67b having a low
concentration is formed under the sidewall insulating film 8 on the
sidewall of the select gate electrode SG, and the n.sup.+-type
semiconductor region 69b having a high concentration is formed
outside the n.sup.--type semiconductor region 67b having a low
concentration. Therefore, the n.sup.--type semiconductor region 67b
having a low concentration is formed to be adjacent to the channel
region of the select transistor; and the n.sup.+-type semiconductor
region 69b having a high concentration abuts the n''-type
semiconductor region 67b having a low concentration, and is formed
to be away from the channel region of the select transistor by the
n.sup.--type semiconductor region 67b.
[0350] The channel region of the memory transistor is formed to a
semiconductor substrate region (p-type well PW1) under the
insulating film 65 under the memory gate electrode MG1, and the
channel region of the select transistor is formed to a
semiconductor substrate region (p-type well PW1) under the
insulating film 63 under the select gate electrode SG. To the
channel-forming region of the select transistor under the
insulating film 63 under the select gate electrode SG, a
semiconductor region (p-type semiconductor region or n-type
semiconductor region) for threshold adjustment of the select
transistor is formed as needed. To the channel-forming region of
the memory transistor under the insulating film 65 under the memory
gate electrode MG1, a semiconductor region (p-type semiconductor
region and n-type semiconductor region) for threshold adjustment of
the memory transistor is formed as needed.
[0351] The select gate electrode SG is formed of a conductor, and
formed by patterning a silicon film 64 (for example, a
polycrystalline silicon film to which an n-type impurity is
introduced) formed on the semiconductor substrate 61. Meanwhile,
the memory gate electrode MG1 is formed of a conductor and formed
by anisotropically etching (etching back) a silicon film 66 (for
example, a polycrystalline silicon film to which an n-type impurity
is introduced) formed on the semiconductor substrate 61 to cover
the select gate electrode SG and leaving the silicon film 66 on the
sidewall of the select gate electrode SG via the insulating film
65. The memory gate electrode MG1 formed of the silicon film 66 is
formed on one of the sidewalls of the select gate electrode SG
formed of the patterned silicon film 64 via the insulating film
65.
[0352] The select gate electrode SG and the memory gate electrode
MG1 being adjacent to each other via the insulating film 65 are not
only extended to the memory cell region 61A but also further
extended to a word shunt region 61C. The word shunt region 61C is a
region for leading out the select gate electrode SG and the memory
gate electrode MG to a wiring MM1, and, as observed in a comparison
between FIGS. 37 and 38, the device isolation region 62 is formed
to the whole of the word shunt region 61C. Therefore, in the word
shunt region 61C, the select gate electrode SG and memory gate
electrode MG1 being adjacent to each other via the insulating film
65 are extended on the device isolation region 62.
[0353] In each of the memory cells MC1 in the memory cell forming
region 61A, the insulating film 63 which works as an gate
insulating film is formed under the select gate electrode SG (i.e.,
between the select gate electrode SG and the semiconductor
substrate 61 (p-type well PW1)), regardless of a forming method of
the insulating film 63.
[0354] However, when the insulating film 63 is formed by a general
thermal oxidation method, the insulating film 63 is not formed on
the device isolation region 62 upon forming the insulating film 63,
and thus the insulating film 63 is not formed under a portion of
the select gate electrode SG (for example, the select gate
electrode SG in the word shunt region 61C) being extended on the
device isolation region 62, and the select gate electrode SG is
directly arranged on the device isolation region 62. That is, the
insulating film 63 is not formed between the select gate electrode
SG and the device isolation region 62.
[0355] Meanwhile, when the insulating film 63 is formed by
deposition by a CVD method or sputtering, the insulating film 63 is
also formed on the device isolation region 62 upon forming the
insulating film 63, and thus the insulating film 63 is also formed
under the portion of the select gate electrode SG being extended on
the device isolation region 62 (for example, select gate electrode
SG in the word shunt region 61C). That is, the insulating film 63
is formed between the select gate electrode SG and the device
isolation region 62. Note that, in FIGS. 40 to 43, an example of
forming the insulating film 63 by a thermal oxidation, that is, an
example of not having the insulating film 63 interposed between the
device isolation region 62 and the select gate electrode SG is
illustrated.
[0356] Also, in each of the memory cells MC1 in the memory cell
region 61A, the insulating film 65 is formed between the memory
gate electrode MG1 and the semiconductor substrate 61 (p-type well
PW1) and between the memory gate electrode MG1 and the select gate
electrode SG. As the insulating film 65 possibly be also formed on
the device isolation region 62 upon deposition, the insulating film
65 is also formed under a portion of the memory gate electrode MG1
being extended on the device isolation region 62 (for example, the
memory gate electrode MG1 in the word shunt region 61C). Therefore,
in the region in which the memory gate electrode MG1 is extended on
the device isolation region 62 (for example, the word shunt region
61C), the insulating film 65 is formed between the memory gate
electrode MG1 and the device isolation region 62 and between the
memory gate electrode MG1 and the select gate electrode SG. That
is, in the region in which the memory gate electrode MG1 is
extended on the device isolation region 62 (for example, word shunt
region 61C), the insulating film 65 is extended across both regions
of the region between the memory gate electrode MG1 and the device
isolation region 62 and the region between the memory gate
electrode MG1 and the select gate electrode SG.
[0357] Note that, even when the insulating film 65 is not formed
between the memory gate electrode MG1 and the device isolation
region 62, it does not adversely affect the operation of the
non-volatile memory. Therefore, the present application does not
eliminate an example of not forming the insulating film 65 between
the memory gate electrode MG1 and device isolation region 62. That
is, in the region in which the memory gate electrode MG1 is
extended on the active region (here, the p-type well PW1) of the
semiconductor substrate 61, the insulating film 65 is necessary to
be formed between the memory gate electrode MG1 and the active
region (here, the p-type well PW1) of the semiconductor substrate
61. Meanwhile, in the region (for example, the word shunt region
61C) in which the memory gate electrode MG1 is extended on the
device isolation region 62, not only an example of forming the
insulating film 65 between the memory gate electrode MG1 and the
device isolation region 62 but also an example of not forming the
insulating film 65 between the memory gate electrode MG1 and the
device isolation region 62 are acceptable.
[0358] A metal silicide layer 71 is formed to upper surfaces
(surfaces) of the select gate electrodes SG, memory gate electrodes
MG1, n.sup.+-type semiconductor regions 69a and 69b by salicide
(self aligned silicide) technology, so that the metal silicide
layer 71 reduces a diffusion resistance and/or a contact
resistance. The metal silicide layer 71 is formed of, for example,
a cobalt silicide layer, a nickel silicide layer, or the like.
[0359] An insulating film (interlayer insulating film) 72 is formed
as an interlayer insulating film on the semiconductor substrate 61
to cover the select gate electrode SG, memory gate electrode MG1,
and sidewall insulating film 68. The insulating film 72 is formed
of a single film of a silicon oxide film or a stacked film of a
silicon nitride film and a silicon oxide film formed on the silicon
nitride film, the silicon oxide film being thicker than the silicon
nitride film.
[0360] Contact holes (opening portions, through-holes) CT are
formed to the insulating film 72. The contact holes CT penetrate
through the insulating film 72. A plug (conductor portion,
conductor portion for connection) PG is formed (buried) inside the
contact hole CT. The plug PG can be taken as a conductor portion
(conductor portion for connection) buried inside the contact hole
CT.
[0361] The plug PG is formed of a barrier conductor film 73a formed
on a bottom portion and a sidewall of the contact hole CT, and a
main conductor film 73b formed on the barrier conductor film 73a to
fill the contact hole CT. The barrier conductor film 73a is formed
of, for example, a titanium film, titanium nitride film, or a
stacked film of a titanium film and a titanium nitride film. The
main conductor film 73b is formed of, for example, a tungsten
film.
[0362] On the insulating film 72 in which the plugs PG are buried,
the wiring (first wiring layer) MM1 is formed. The wirings MM1 can
be taken as buried wirings (for example, buried copper wirings),
and are buried by a damascene method in wiring trenches in the
insulating film 74 formed on the insulating film 72. The wiring MM1
is not limited to the buried wiring and can be variously modified.
For example, the wiring MM1 can be a wring (for example, an
aluminum wiring or tungsten wiring) formed by patterning a
conductor film formed on the insulating film 72.
[0363] Among the contact holes CT and the plugs PG filling the
contact holes CT, contact holes CT1 (illustrated in FIG. 37) and
plugs PG1 filling the contact holes CT (the plugs PG1 filling the
contact holes CT1 are not illustrated in the cross-sectional views)
for connections to the source semiconductor regions MS are formed
to an upper portion of the source semiconductor region MS of a
source dummy region 61B at an end portion (outer periphery portion)
of the memory cell region 61A. As the contact holes CT1 and the
plugs PG filling the contact holes CT1 for connections to the
source semiconductor regions MS are arranged in the source dummy
region 61B at the end portion (outer periphery portion) of the
memory cell region 61A, the source dummy region 61B is a memory
cell dummy region and works as a countermeasure to crystal defects.
Therefore, it is preferable not to arrange the memory cell MC1 (not
to use it as a memory cell MC1) in the source dummy region 61B.
[0364] Also, among the contact holes CT and plugs PG filling the
contact holes CT, contact holes CT2 (illustrated in FIGS. 37 and
39) and plugs PG2 filling the contact holes CT2 for connections to
the drain semiconductor regions MD are formed to an upper portion
of the drain semiconductor region MD (the n.sup.+-type
semiconductor regions 69b of the drain semiconductor regions MD) of
each of the memory cells MC1 in the memory cell region 61A.
[0365] Also, among the contact holes CT and the plugs PG filling
the contact holes CT, contact holes CT3 (illustrated in FIGS. 37
and 40) and plugs PG3 filling the contact holes CT3 for connections
to the select gate electrodes SG are formed to an upper portion of
contact portions SGa of the select gate electrodes SG in the word
shunt region 61C. Further, among the contact holes CT and the plugs
PG filling the contact holes CT, contact holes CT4 (illustrated in
FIGS. 37 and 41) and plugs PG4 filling the contact holes CT4 for
connections to the select gate electrodes SG are formed to an upper
portion of contact portions MG1a of the memory gate electrodes MG1
in the word shunt region 61C.
[0366] Next, the select gate electrode SG and the memory gate
electrode MG1 in the word shunt region 61C will be described in
more detail.
[0367] While the select gate electrode SG in the memory cell region
61A works as a gate electrode of the select transistor forming the
memory cell MC1, the select gate electrode SG in the word shunt
region 61C is positioned above the device isolation region 62, and
works as a select gate line which mutually electrically connects
select gate electrodes of the plurality of memory cells MC1 aligned
in the X direction in FIG. 37 instead of working as a gate
electrode of the select transistor in the memory cell MC1. Also,
while the memory gate electrode MG1 in the memory cell region 61A
works as a gate electrode of the memory transistor forming the
memory cell MC1, the memory gate electrode MG1 in the word shunt
region 61C is positioned above the device isolation region 62 and
works as a memory gate line which mutually electrically connects
the memory gate electrodes of the plurality of memory cells MC1
aligned in the X direction in FIG. 37 instead of working as a gate
electrode of the memory transistor in the memory cell MC1.
[0368] In the word shunt region 61C, the select gate electrode SG
has a contact portion SGa for connection to the contact hole CT3
and the plus PG3 filling the contact hole CT3. When viewed in a
plane (i.e., in a plane parallel to the main surface of the
semiconductor substrate 61), the contact portion SGa is extended in
a direction crossing the extending direction of the select gate
electrode SG (here, the X direction in FIG. 37), more preferably,
in a direction perpendicular to the extending direction of the
select gate electrode SG (here, the X direction in FIG. 37). Thus,
in the select gate electrode SG, the contact portion SGa has a
larger width (width in the direction orthogonal to the extending
direction of the select gate electrode SG) than the other region
than the contact portion SGa. Therefore, the contact portion SGa
can be regarded as a portion (wide portion) of the select gate
electrode SG having a large width in the select gate electrode SG.
Herein, the width of the select gate electrode SG corresponds to a
width in a direction orthogonal to the extending direction (here, Y
direction) of the select gate electrode SG (here, the X direction
in FIG. 37).
[0369] The contact portion SGa is integrally formed with the select
gate electrode SG. That is, by patterning the silicon film 64
formed on the main surface of the semiconductor substrate 61, the
contact portion SGa is also integrally formed with the select gate
electrode SG. Thus, the contact portion SGa can be regarded as a
part of the select gate electrode SG, but the contact portion SGa
is not a portion which works as a gate electrode of the select
transistor in the memory cell MC1 of the non-volatile memory.
Therefore, the contact portion SGa of the select gate electrode SG
is preferable to be provided in the other region (here, the word
shunt region 61C) than the memory cell region 61A in which the
plurality of memory cells MC1 are arranged in an array, and also
preferable to be arranged on the device isolation region 62.
[0370] The contact hole CT3 is formed to the insulating film
(interlayer insulating film) 72 on the contact portion SGa having a
relatively larger width in the select gate electrode SG, and the
plug PG3 buried in the contact hole CT3 is electrically connected
to the contact portion SGa of the select gate electrode SG. The
plug PG3 abuts and is electrically connected to the contact portion
SGa of the select gate electrode SG at a bottom portion of the
contact hole CT3. When the metal silicide layer 71 is formed to an
upper portion of the select gate electrode SG, as illustrated in
FIG. 40, the plug PG3 buried in the contact hole CT3 abuts and is
electrically connected to the metal silicide layer 71 on the
contact portion SGa at the bottom portion of the contact hole CT3,
so that the plug PG3 is electrically connected to (the contact
portion SGa of) the select gate electrode SG.
[0371] As the plug PG3 is electrically connected to a select gate
wiring (wiring to be connected to the select gate electrode SG)
MM1b among the wirings MM1, the select gate wiring MM1b is
electrically connected to the contact portion SGa of the select
gate electrode SG via the plug PG3 buried in the contact hole
CT3.
[0372] As the contact hole CT3 and the plug PG3 filling the contact
hole CT3 are formed on the contact portion SGa of the select gate
electrode SG, a part of the select gate electrode SG (here, the
contact portion SGa) can be surely exposed at the bottom portion of
the contact hole CT3, so that the plug PG3 can be surely connected
(electrically connected) to the select gate electrode SG. Also,
exposure of the memory gate electrode MG1 at the bottom portion of
the contact hole CT3 can be surely prevented, and a
short-circuiting of the select gate electrode SG and the memory
gate electrode MG1 by the plug PG3 can be prevented.
[0373] Note that, as described above, the select gate electrode SG
including the contact portion SGa is formed of the patterned
silicon film 64. That is, while more details will be described
later, the select gate electrode SG including the contact portion
SGa is formed by patterning the silicon film 64 formed on the main
surface of the semiconductor substrate 61 using a resist pattern
(corresponding to a photoresist pattern RP1 described later) on the
silicon film 64 as a mask. The resist pattern (corresponding to the
photoresist pattern RP1 described later) used here has a same
planar shape (same pattern shape) as the select gate electrode SG
including the contact portion SGa.
[0374] Meanwhile, the memory gate electrode MG1 is formed on one of
the sidewalls of the select gate electrode SG via the insulating
film 65 and extended on the semiconductor substrate 61 with the
select gate electrode SG, and also, the memory gate electrode MG1
has the contact portion MG1a for connection to the contact hole CT4
and the plug PG4 filling the contact hole CT4 in the word shunt
region 61C. Among the memory gate electrodes MG1, the other portion
than the contact portion MG1a is formed in a sidewall shape
(sidewall spacer shape) via the insulating film 65 on one of the
sidewalls of the select gate electrode SG, and the portion formed
in the sidewall shape and the contact portion MG1a are integrally
formed. Thus, the contact portion MG1a can be regarded as a part of
the memory gate electrode MG1, and does not work as a gate
electrode of the memory transistor in the memory cell MC1 of the
non-volatile memory. Therefore, the contact portion MG1a of the
memory gate electrode MG1 is preferable to be provided to a region
(here, the word shunt region 61C) other than the memory cell region
61A in which the plurality of memory cells MC1 are arranged, and
also preferable to be arranged on the device isolation region
62.
[0375] In the memory gate electrode MG1, the contact portion MG1a
is integrally formed with the portion (adjacent in the X direction
in FIG. 37) being adjacent to the contact portion MG1a and formed
in a sidewall shape (i.e., the other portion than the contact
portion MG1a among the memory gate electrodes MG1). In addition,
the contact portion MG1a is extended, from a position adjacent to
one of the sidewalls of the select gate electrode SG (sidewall on
the side where the memory gate electrode MG1 is formed) via the
insulating film 65, in a direction to be away from the adjacent
select gate electrode SG (here, a direction parallel to the Y
direction in FIG. 37 and also a direction to be away from the
adjacent select gate electrode SG). When viewed in a plane (i.e.,
in a plane parallel to the main surface of the semiconductor
substrate 61), the contact portion MG1a is extended in a direction
crossing the extending direction (here, the X direction in FIG. 37)
of the memory gate electrode MG1, more preferably, in a direction
perpendicular to the extending direction (here, the X direction in
FIG. 37) of the memory gate electrode MG1.
[0376] As one of main features of the present embodiment, the
contact portion MG1a of the memory gate electrode MG1 does not run
over the select gate electrode SG. That is, the contact portion
MG1a does not have a portion positioned above the select gate
electrode SG. As described above, the device isolation region 62 is
formed to the whole of the word shunt region 61C, and the select
gate electrodes SG and the memory gate electrodes MG1 are extended
on the device isolation region 62 in the word shunt region 61C, and
thus the contact portion MG1a of the memory gate electrode MG1 is
extended from the position on the one of the sidewalls of the
select gate electrode SG to the position above the device isolation
region without running over the select gate electrode SG. Note that
the insulating film 65 is interposed between the contact portion
MG1a of the memory gate electrode MG1 and the sidewall of the
select gate electrode SG.
[0377] The memory gate electrode MG1 is formed by etching back
(anisotropically etching) the silicon film 66 formed on the
semiconductor substrate 61 to cover the select gate electrode SG
and leaving the insulating film 66 in a sidewall shape on the
sidewall of the select gate electrode SG via the insulating film
65. While details will be described later, in the etch-back step of
the silicon film 66, a resist pattern (corresponding to a
photoresist pattern RP2 described below) is formed on the silicon
film 66 and the silicon film 66 is left under the resist pattern,
so that the contact portion MG1a of the memory gate electrode MG1
is formed. While a planar shape (pattern shape) of the resist
pattern (corresponding to a photoresist pattern RP2 described
below) used here includes the planar pattern shape of the contact
portion MG1a in the plane, the planar shape of resist pattern is
not completely identical to the planar shape (planer pattern shape)
of the contact portion MG1a. This is because a part of the
insulating film 66 left under the resist pattern (corresponding to
a photoresist pattern RP2 described below) is removed in an
isotropic etching step thereafter (corresponding to a step S10
described below). Note that the wording "in a plane" in the present
embodiment and the following embodiments means a plane parallel to
the main surface of the semiconductor substrate 61.
[0378] The contact hole CT4 is formed to the insulating film
(interlayer insulating film) 72 on the contact portion MG1a of the
memory gate electrode MG1 and the plug (conductor portion) PG4
buried in the contact hole CT4 is electrically connected to the
contact portion MG1a of the memory gate electrode MG1. The plug PG4
abuts and is electrically connected to the contact portion MG1a of
the memory gate electrode MG1 at a bottom portion of the contact
hole CT4. When the silicide layer 71 is formed to an upper portion
of the memory gate electrode MG1, as illustrated in FIG. 41, the
plug PG4 buried in the contact hole CT4 abuts and is electrically
connected to the silicide layer 71 on the contact portion MG1a at
the bottom portion of the contact hole CT4, and thus the plug PG4
is electrically connected to (the contact portion MG1a of) the
memory gate electrode MG1.
[0379] As the plug PG4 is electrically connected to the memory gate
wiring (wiring to be connected to the memory gate electrode MG1)
MM1a among the wirings MM1, the memory gate wiring MM1a is
electrically connected to the contact portion MG1a of the memory
gate electrode MG1 via the plug PG4 buried in the contact hole
CT4.
[0380] The contact portion MG1a of the memory gate electrode MG1 is
flatly extended on the device isolation region 62 and has a
substantially flat upper surface in a region away from the (the
insulating film 65 on the sidewall) of the select gate electrode SG
by more than or equal to a distance corresponding to a thickness of
the contact portion MG1a (corresponding to a deposited thickness of
the silicon film 66 and also a gate length of the memory gate
electrode MG1). The contact hole CT4 and the plug PG4 filling the
contact hole CT4 are formed on the flat portion of the contact
portion MG1a.
[0381] When the contact hole CT4 and the plug PG4 filling the
contact hole CT4 are formed on the memory gate electrode MG1 in a
sidewall shape without the contact portion MG1a different from the
present embodiment, it is not easy to surely form the contact hole
CT4 on the memory gate electrode MG1 in a sidewall shape without
overlapping with the select gate electrode SG. For example, as a
margin to a position shift of the contact hole is small, there are
possibilities that reliability of the electric connection between
the plug PG4 and the memory gate electrode MG1 is lowered, and a
manufacturing yield of the semiconductor device is lowered.
[0382] In the present embodiment, by forming the contact hole CT4
and the plug PG4 filling the contact hole CT4 on the contact
portion MG1a of the memory gate electrode MG1, the contact portion
MG1a which is a part of the memory gate electrode MG1 can be surely
exposed at the bottom portion of the contact hole CT4, and the plug
PG4 can be surely connected (electrically connected) to the memory
gate electrode MG1. Also, exposure of the select gate electrode SG
at the bottom portion of the contact hole CT4 can be adequately
prevented, and short-circuiting between the select gate electrode
SG and the memory gate electrode MG1 by the plug PG4 can be
prevented.
[0383] Also, in the memory gate electrode MG1, in consideration of
a misalignment of the contact hole CT4 upon opening the contact
hole CT4, the planar shape (pattern shape) of the contact portion
MG1a is formed to be a predetermined size not to cause a
misalignment (phenomenon such that the contact portion MG1a and the
contact hole CT4 have no overlap in a plane, and the contact
portion MG1a is not exposed from the contact hole CT4). That is,
the planar shape (planar size) of the contact portion MG1a is
designed to have at least a part of the contact hole CT4 being
overlapped with the contact portion MG1a in a plane even when an
opening position of the contact hole CT4 is varied in a measure due
to a process variation. In this manner, the contact portion MG1a of
the memory gate electrode MG1 is more surely exposed at the bottom
portion of the contact hole CT4, and the plug PG4 is more surely
connected (electrically connected) to the memory gate electrode
MG1.
[0384] Also, the contact portion MG1a of the memory gate electrode
MG1 is extended on the device isolation region 62 from a position
adjacent to the sidewall of the select gate electrode SG via the
insulating film 65 toward a direction to be away from the select
gate electrode SG, and the contact hole CT4 is formed on the
contact portion MG1a positioned above the device isolation region
62. Thus, not only a situation where the contact hole CT4 is
included in the contact portion MG1a of the memory gate electrode
MG1 in a plane, but also a situation where only a part of the
contact hole CT4 is overlapped with the contact portion MG1a of the
memory gate electrode MG1 and the other part of the contact hole
CT4 is not overlapped with the contact portion MG1a of the memory
gate electrode MG1 in a plane are acceptable. Therefore, at the
stage of designing the semiconductor device, the layout of the
contact hole CT4 and the contact portion MG1a can be designed to
have the contact hole CT4 being partially overlapped with the
contact portion MG1a of the memory gate electrode MG1, and this
situation is illustrated in FIG. 37.
[0385] When the contact hole CT4 is included in the contact portion
MG1a of the memory gate electrode MG1 in a plane, a part of the
contact portion MG1a of the memory gate electrode MG1 is exposed at
the bottom portion of the contact hole CT4, and the device
isolation region 62 is not exposed. When not the whole of the
contact hole CT4 is overlapped with the contact portion MG1a but
only a part of the contact hole CT4 is overlapped with the contact
portion MG1a of the memory gate electrode MG1, not only a part of
the contact portion MG1a of the memory gate electrode MG1 but also
the device isolation region 62 may be exposed at the bottom portion
of the contact hole CT4 (FIG. 41 illustrates this situation). At
the bottom portion of the contact hole CT4, even when the device
isolation region 62 is exposed in addition to the contact portion
MG1a, as the device isolation region 62 is an insulator,
short-circuiting of the plug PG4 buried in the contact hole CT4 and
a conductive member, which normally should not be connected, can be
prevented. Also, as a side surface at a lower portion of the plug
PG4 is contacted with the contact portion MG1a, an electric
connection between the plug PG4 and the contact portion MG1a can be
ensured.
[0386] FIG. 45 is an equivalent circuit diagram of the memory cell
MC1. FIG. 46 is a table (explanatory diagram) illustrating examples
of conditions of voltages applied to each part of the select memory
cell upon "program," "erase," and "read" according to the present
embodiment. In the table of FIG. 46, a voltage Vd to be applied to
the drain region (semiconductor region MD) of the memory cell
(select memory cell) illustrated in FIGS. 44 and 45, a voltage Vsg
to be applied to the select gate electrode SG, a voltage Vmg to be
applied to the memory gate electrode MG1, a voltage Vs to be
applied to a source region (semiconductor region MS), and a base
voltage Vb to be applied to the p-type well PW1 are described. Note
that the voltages illustrated in the table of FIG. 46 are examples
of conditions of applied voltages, and they are not limited to this
and can be variously modified. Also, in the present embodiment,
injection of electrons into the silicon nitride film 65b which is a
charge storage portion in the insulating film 65 of the memory
transistor is defined as "program," and injection of holes is
defined as "erase."
[0387] A programming method can be a hot-electron programming
called SSI (source side injection). For example, the voltages as
listed in the row of "program" in FIG. 46 are applied to respective
parts of a select memory cell to be programmed so that electrons
are injected into the silicon nitride film 65b in the insulating
film 65 of the select memory cell. Hot electrons are generated in a
channel region (between the source and drain) below and between two
gate electrodes (the memory gate electrode MG1 and the select gate
electrode SG), and the hot electrons are injected to the silicon
nitride film 65b which is the charge storage portion in the
insulating film 65 below the memory gate electrode MG1. The
injected hot electrons are trapped at trap levels in the silicon
nitride film 65b in the insulating film 65, resulting in an
increase in a threshold voltage of the memory transistor.
[0388] An erasing method can be a BTBT (band-to-band tunneling)
hot-hole injection erase. That is, erase is performed by injecting
holes generated by BTBT (band-to-band tunneling) into the charge
storage portion (the silicon nitride film 65b in the insulating
film 65). For example, voltages as listed in the row of "erase" in
FIG. 46 are applied to respective parts of the select memory cell
to be erased to generate holes by the BTBT (band-to-band tunneling)
phenomenon and accelerate the holes, thereby injecting the holes
into the silicon nitride film 65b in the insulating film 65 of the
select memory cell, and lowering the threshold voltage of the
memory transistor.
[0389] Upon read, for example, the voltages as listed in the row of
"read" in FIG. 46 are applied to respective parts of the select
memory cell to be read. The voltage Vmg to be applied to the memory
gate electrode MG1 upon read is set to a value between the
threshold voltage of the memory transistor in a programmed state
and a threshold voltage in an erased state, thereby determining the
programmed state and the erased state.
[0390] Next, a manufacturing process of the semiconductor device
according to the present embodiment will be described with
reference to the accompanied drawings.
[0391] FIG. 47 is a process flow diagram illustrating a part of the
manufacturing process of the semiconductor device according to the
present embodiment. FIGS. 48 to 87 are plan views or
cross-sectional views of a main part during the manufacturing
process of the semiconductor device according to the present
embodiment. Among FIGS. 48 to 87, FIGS. 48, 53, 58, 61, 64, and 73
are plan views of a main part, and FIGS. 49-52, 54-57, 59, 60, 62,
63, 65-72, and 74-87 are cross-sectional views of a main part.
[0392] While an embodiment of forming n-channel type MISFETs
(select transistor and memory transistor) in the memory cell region
61A will be described in the present embodiment, p-channel type
MISFETs (select transistor and memory transistor) can be formed in
the memory cell region 61A by reversing the polarity.
[0393] First, as illustrated in FIG. 48 (plan view of a main part),
FIG. 49 (cross-sectional view taken along the line A1-A1), and FIG.
(cross-sectional view taken along the line C1-C1), the
semiconductor substrate (semiconductor wafer) 61 formed of single
crystal silicon or the like having a resistivity of about 1 to 10
.OMEGA.cm is prepared (step S1 in FIG. 47). Then, to the main
surface of the semiconductor substrate 61, the device isolation
regions (device isolation insulating regions) 62 which define
(section) active regions are formed (step S2 in FIG. 47). The
device isolation region 62 is formed of an insulator such as
silicon oxide, and can be formed by, for example, STI (shallow
trench isolation) method etc. For example, after forming trenches
for device isolation to the main surface of the semiconductor
substrate 61, an insulating film formed of, for example, silicon
oxide is buried in the trenches for device isolation, thereby
forming the device isolation regions 62. As illustrated in FIG. 48,
in the memory cell region 61A, the device isolation regions 62 are
formed between regions to which respective memory cells MC1 are
formed, and, in the word shunt region 61C, the device isolation
region 62 is formed to the whole of the main surface of the
semiconductor substrate 61.
[0394] Next, a p-type impurity such as boron (B) is ion-implanted
etc., thereby forming the p-type wells PW1 (step S3 in FIG. 47).
The p-type well PW1 is formed to a predetermined depth from the
main surface of the semiconductor substrate 61. The p-type well PW1
is mainly formed to the memory cell region 61A, and the memory cell
region 61A is electrically isolated from the other regions by the
device isolation regions 62.
[0395] Next, to adjust the threshold voltage of the select
transistor to be formed later to the memory cell region 61A, if
needed, a doped-channel ion implantation is performed to a surface
portion (surface layer portion) of the memory cell region 61A.
[0396] Note that, while FIG. 48 is a plan view, to facilitate
viewing of the drawing, different hatchings are added to the device
isolation region 62 and the p-type well PW1, respectively.
[0397] Next, after subjecting a surface of the semiconductor
substrate 61 (p-type well PW1) to a cleaning process by diluted
hydrofluoric acid etc., as illustrated in FIG. 51 (cross-sectional
view taken along the line A1-A1) and FIG. 52 (cross-sectional view
taken along the line C1-C1), the insulating film 63 for a gate
insulating film is formed to the main surface of the semiconductor
substrate 61 (surface of the p-type well PW1) (step S4 in FIG. 47).
The insulating film 63 is an insulating film to be a gate
insulating film of the select transistor to be formed later. The
insulating film 63 is formed of, a thin silicon oxide film or a
silicon oxynitride film, and formed by, for example, thermal
oxidation etc. When a silicon oxynitride film is used for the
insulating film 63, the silicon oxynitride film can be formed by
subjecting a silicon oxide film formed by thermal oxidation etc. to
a nitridation process. A thickness of the insulating film 63 can
be, for example, about 2 to 3 nm. While the insulating film 63 is
not formed on the device isolation region 62 upon forming the
insulating film 63 by a thermal oxidation (this situation is
illustrated in FIG. 52), the insulating film 63 is formed also on
the device isolation region 62 upon forming the insulating film 63
by a CVD method or a sputtering method.
[0398] Next, as illustrated in FIGS. 51 and 52, on the insulating
film 63 in memory cell region 61A and on the main surface of the
semiconductor substrate 61 including a portion above the device
isolation region 62 in the word shunt region 61C, the silicon film
(first conductor film) 64 is formed (deposited) as a conductor film
(conductive film) for forming the select gate electrode SG (step S5
in FIG. 47). The silicon film 64 can be formed by using a CVD
(chemical vapor deposition) method or the like. A thickness of the
silicon film 64 (deposited thickness) can be, for example, 100 to
200 nm. After forming the silicon film 64, a photoresist pattern
(though not being illustrated, this photoresist pattern is formed
to the entire region of the peripheral circuit region described
later) is formed on the silicon film 64 by using photolithography.
Using the photoresist pattern as a mask, an n-type impurity is
introduced into the memory cell region 61A (including the source
dummy region 61B) and the silicon film 64 in the word shunt region
61C by ion implantation or the like. In this manner, the silicon
film 64 in the memory cell region 61A (including the source dummy
region 61B) and the word shunt region 61C is turned into an n-type
silicon film 64.
[0399] Next, a photoresist pattern (resist pattern) RP1 is formed
on the silicon film 64 by using photolithography technology, and
then, using the photoresist pattern RP1 as an etching mask, the
silicon film 64 is patterned by etching (dry etching) as
illustrated in FIG. 53 (plan view of a main part), FIG. 54
(cross-sectional view taken along the line A1-A1), and FIG. 55
(cross-sectional view taken along the line C1-C1) (step S6 in FIG.
47). The patterned silicon film 64 forms the select gate electrode
SG. The pattern of the formed select gate electrode SG has the same
pattern shape as the photoresist pattern RP1, and the select gate
electrode SG integrally includes the contact portion SGa arranged
in the word shunt region 61C. In the memory cell region 61A, the
insulating film 63 remaining under the select gate electrode SG
becomes a gate insulating film of the select transistor. Then, the
photoresist pattern RP1 is removed. FIGS. 53 to 55 correspond to
the stage where the photoresist pattern RP1 has been already
removed. Note that, while FIG. 53 is a plan view, hatching is added
to the select gate electrode SG to facilitate viewing. Note that
the photoresist pattern RP1 and photoresist patterns RP1a, RP2,
RP3, and RP4 described below can be taken as photoresist patterns
used in etching.
[0400] In the memory cell region 61A, the insulating film 63 in
other portions than that covered by the select gate electrodes SG
(i.e., the insulating film 63 other than that to be gate insulating
films) may be removed by the dry etching performed in the step S6
or performing a wet etching after the dry etching.
[0401] Next, to adjust the threshold voltage of the memory cell
transistor to be formed later to the memory cell region 61A, if
needed, a channel-doped ion implantation is performed to a surface
portion (surface layer portion) of the p-type well PW1 in the
memory cell region 61A.
[0402] Next, after performing a washing process and subjecting the
main surface of the semiconductor substrate 61 to a cleaning
process, as illustrated in FIG. 56 (cross-sectional view taken
along the line A1-A1) and FIG. 57 (cross-sectional view taken along
the line C1-C1), the insulating film 65 for gate insulating film of
the memory transistor is formed on the main surface of the
semiconductor substrate 61 and the surfaces of the select gate
electrodes SG (step S7 in FIG. 47).
[0403] The insulating film 65 is an insulating film having a charge
storage portion inside, and formed of the stacked film (ONO film)
as the insulating film of the silicon oxide film 65a, silicon
nitride film 65b, and silicon oxide film 65c formed in series from
the bottom. Meanwhile, to facilitate viewing, in FIGS. 56 and 57,
the stacked film of the silicon oxide film 65a, silicon nitride
film 65b, and silicon oxide film 65c is simply illustrated as the
insulating film 65. Thus, in reality, the insulating film 65 is
formed of a stacked film of the silicon oxide film (oxide film)
65a, silicon nitride film (nitride film) 65b on the silicon oxide
film 65a, and silicon oxide film (oxide film) 65c on the silicon
nitride film 65b. In the step S7, as illustrated in FIGS. 56 and
57, the insulating film 65 is formed to the main surface (surface)
of the semiconductor substrate 61 (including the p-type well PW1
and device isolation region 62), and the surfaces (side surfaces
and upper surfaces) of the select gate electrodes SG (note that the
insulating film 65 is not formed to lower portions of the select
gate electrodes SG). While the insulating film 65 is generally also
formed on the device isolation region 62 in view of the film
formation process, the insulating film 65 may not be formed on the
device isolation region 62.
[0404] In addition, while the silicon nitride film 65b is formed as
the insulating film having trap levels in the present embodiment,
the insulating film is not limited to a silicon nitride film and
can be a high-dielectric constant film having a higher dielectric
constant than a silicon nitride film, such as an aluminum oxide
film (alumina), a hafnium oxide film, or a tantalum oxide film.
Alternatively, the insulating film may be formed of silicon
nano-dots.
[0405] In the insulating film 65, the silicon oxide film can be
formed by, for example, an oxidation treatment (thermal oxidation
treatment) or a CVD method, or a combination of oxidation treatment
and CVD. The silicon nitride film can be formed by, for example, a
CVD method. For example, after forming the bottom silicon oxide
film (corresponding to the silicon oxide film 65a) in the
insulating film 65 by a thermal oxidation treatment, the silicon
nitride film in the insulating film 65 is deposited by a CVD
method, and further, the top silicon oxide film (corresponding to
the silicon oxide film 65c) can be formed by a CVD method and a
thermal oxidation treatment. A thickness of the silicon oxide film
65a in the insulating film 65 can be, for example, about 3 to 6 nm,
a thickness of the silicon nitride film 65b can be, for example,
about 5 to 10 nm, and a thickness of the silicon oxide film 65c can
be, for example, 4 to 7 nm.
[0406] The insulating film 65 works as a gate insulating film of
the memory transistor to be formed later, and has a charge storage
function. Thus, the insulating film 65 has a stacked structure of
at least three layers, and has its inner layer (the silicon nitride
film 65b) having a lower potential barrier height than that of its
outer layer (the silicon oxide films 65a and 65c). The structure
can be achieved by making the insulating film 65 as a stacked film
including the silicon oxide film 65a, the silicon nitride film 65b
on the silicon oxide film 65a, and the silicon oxide film 65c on
the silicon nitride film 65b.
[0407] Next, as illustrated in FIG. 58 (plan view of a main part),
FIG. 59 (cross-sectional view taken along the line A1-A1), and FIG.
60 (cross-sectional view taken along the line C1-C1), on the whole
of the main surface of the semiconductor substrate 61, i.e., on the
insulating film 65, the silicon film (second conductor film) 66 is
formed (deposited) as a conductor film (conductive film) to cover
the select gate electrode SG (step S8 in FIG. 47). Note that, while
FIG. 58 is a plan view, the silicon film 66 and insulating film 65
are transparent in FIG. 58 and hatching is added to the photoresist
pattern RP2 described below to facilitate viewing.
[0408] The silicon film 66 is formed of, for example, a silicon
film such as a polycrystalline film (doped polysilicon film) into
which an n-type impurity (for example, phosphorus (P)) is
introduced, and can be formed by using a CVD method or the like. A
thickness (deposited thickness) of the silicon film 66 can be, for
example, about 50 to 100 nm.
[0409] Next, on the silicon film 66, the photoresist pattern
(resist pattern) RP2 is formed by using photolithography
technology. Then, using the photoresist pattern RP2 as an etching
mask, the silicon film 66 exposed from the photoresist pattern RP2
is etched back by anisotropic dry etching (step S9 in FIG. 47).
[0410] In the etch-back process of the step S9, the silicon film 66
is anisotropically etched (etched back) only by the deposited
thickness of the silicon film 66 so that the silicon film 66 is
left on both of the sidewalls of the select gate electrode SG (via
the insulating film 65) in a sidewall (sidewall spacer) shape; and
the silicon film 66 under the photoresist pattern RP2 is left, and
the silicon film 66 in the other region is removed. In this manner,
as illustrated in FIG. 61 (plan view of a main part), FIG. 62
(cross-sectional view taken along the line A1-A1), and FIG. 63
(cross-sectional view taken along the line C1-C1), the memory gate
electrode MG1 is formed of the silicon film 66 left in a sidewall
shape on one of the sidewalls of the select gate electrode SG via
the insulating film 65, and a silicon spacer (conductor spacer) SP1
is formed of the silicon film 66 left in a sidewall shape on the
other sidewall via the insulating film 65. The silicon spacer SP1
can be regarded as a sidewall spacer formed of a conductor, that
is, a conductor spacer. In addition, a contact portion MG1b is
formed by the remaining silicon film 66 not being etched under the
photoresist pattern RP2. A part of the contact portion MG1b will be
the contact portion MG1a later. Since the etch-back process in the
step S9 is an anisotropic etching, the formed contact portion MG1b
has the same pattern shape (planar shape) as the photoresist
pattern RP2.
[0411] As illustrated in FIGS. 58 and 60, in the word shunt region
61C, the photoresist pattern RP2 is formed to cross the select gate
electrode SG, more preferably, to be orthogonal to the select gate
electrode SG. That is, the photoresist pattern RP2 being extended
to cross (preferably, be orthogonal to) the select gate electrode
SG is formed on the silicon film 66. Therefore, as the contact
portion MG1b is formed to cross (preferably, be orthogonal to) the
select gate electrode SG, the contact portion MG1b has a portion
running over the select gate electrode SG (i.e., a portion
positioned on the select gate electrode SG). Thereafter, the
photoresist pattern RP2 is removed. FIGS. 61 to 63 correspond to
the stage where the photoresist pattern RP2 has been already
removed. Note that, while FIG. 61 is a plan view, to facilitate
understanding, the insulating film 65 is transparent, and hatching
is added to the remaining silicon film 66 (i.e., the silicon spacer
SP1, the memory gate electrode MG1 and the contact portion MG1b) in
FIG. 61.
[0412] In this manner, at the stage upon performing the etch-back
process of the step S9, the silicon film 66 other than that being
covered by the photoresist pattern RP2 becomes a sidewall shape to
be the memory gate electrode MG1 and the silicon spacer SP1, and
the silicon film 66 covered by the photoresist pattern RP2 becomes
the contact portion MG1b leaving the entire thickness of the
deposited thickness of the silicon film 66. And, the memory gate
electrode MG1 and the silicon spacer SP1 are formed on the
sidewalls of the select gate electrode SG opposite to each other,
and the structure is substantially symmetry across the pattern of
the select gate electrode SG. Also, at the stage upon performing
the etch-back process of the step S9, the insulating film 65 not
covered by the memory gate electrode MG1, the silicon spacer SP1,
and the contact portion MG1b is exposed. The insulating film 65
under the memory gate electrode MG1 in the memory cell region 61A
becomes the gate insulating film of the memory transistor. As the
memory gate length (gate length of the memory gate electrode MG1)
is determined depending on the deposited thickness of the silicon
film 66, the memory gate length can be adjusted by adjusting the
deposited thickness of the silicon film 66 deposited in the step S8
described above.
[0413] Next, as illustrated in FIG. 64 (plan view of a main part),
FIG. 65 (cross-sectional view taken along the line A1-A1), FIG. 66
(cross-sectional view C1-C1), FIG. 67 (cross-sectional view taken
along the line D1-D1), and FIG. 68 (cross-sectional view taken
along the line E1-E1), the photoresist pattern (resist pattern) RP3
covered by the memory gate electrode MG1 and exposing the silicon
spacer SP1 is formed on the semiconductor substrate 61 by
photolithography technology. The photoresist pattern RP3 is formed
to cover a part of the contact portion MG1b and the memory gate
electrode MG1 other than the contact portion MG1b, and to expose
another part of the contact portion MG1b and the silicon spacer
SP1. Note that, while the FIG. 64 is a plan view, to facilitate
understanding, the insulating film 65 is transparent, and hatching
is added to the silicon spacer SP1 and the contact portion MG1b
exposed without being covered by the photoresist pattern RP3 in
FIG. 64.
[0414] Next, as illustrated in FIG. 69 (cross-sectional view taken
along the line A1-A1), FIG. 70 (cross-sectional view taken along
the line C1-C1), FIG. 71 (cross-sectional view taken along the line
D1-D1), and FIG. 72 (cross-sectional view taken along the line
E1-E1), an isotropic etching is performed using the photoresist
pattern RP3 as an etching mask, thereby removing the silicon spacer
SP1 (step S10 in FIG. 47). Thereafter, as illustrated in FIG. 73
(plan view of a main part), FIG. 74 (cross-sectional view taken
along the line A1-A1), and FIG. 75 (cross-sectional view taken
along the line C1-C1), the photoresist pattern RP3 is removed. In
the etching process in the step S10, it is important to perform
isotropic etching. Note that, while the FIG. 73 is a plan view, to
facilitate understanding, the insulating film 65 is transparent,
and hatching is added to the remaining silicon film 66 (i.e., the
memory gate electrode MG1 and the contact portion MG1a) in FIG.
73.
[0415] As illustrated in FIGS. 64 to 68, the photoresist pattern
RP3 is formed not to be overlapped with the silicon spacer SP1 in a
plane. That is, the silicon spacer SP1 is not covered by the
photoresist pattern RP3, and the etching of the step S10 is
performed in a state having the silicon spacer SP1 being exposed.
Thus, all of the silicon spacer SP1 is removed by the etching in
the step S10.
[0416] Also, as illustrated in FIGS. 64 and 66, the photoresist
pattern RP3 is formed to be overlapped with a part of the contact
portion MG1b in a plane, and not to be overlapped with another part
of the contact portion MG1b in a plane. That is, the contact
portion MG1b has a part covered by the photoresist pattern RP3 and
a part not covered by the photoresist pattern RP3. Therefore, the
contact portion MG1b has a part exposed upwards and not being
covered by the photoresist pattern RP3, and this part (of the
contact portion MG1b not covered by the photoresist pattern RP3) is
removed by the etching in the step S10.
[0417] Different from the present embodiment, when the etching
performed in the step S10 is an anisotropic etching, the part of
the contact portion GM1b covered by the photoresist pattern RP3 is
not etched and remains. However, in the present embodiment, a
feature in the etching process of the step S10 is performing
isotropic etching.
[0418] Since the etching performed in the step S10 is isotropic
etching, when the contact portion MG1b not covered by the
photoresist pattern RP3 is etched in a longitudinal direction (a
thickness direction, i.e., a direction substantially perpendicular
to the main surface of the semiconductor substrate 61), the contact
portion MG1b have a portion whose upper part is covered by the
photoresist pattern RP3 and whose side surface is exposed, and the
contact portion MG1b is side-etched from the exposed portion.
[0419] Therefore, in the isotropic etching step of the step S10,
the contact portion MG1b not only has a portion not covered by the
photoresist pattern RP3 and removed, but also a part of a portion
covered by the photoresist pattern RP3 and removed by side etching.
In the contact portion MG1b, a remaining part, which has not been
removed in the isotropic etching step in the step S10, becomes the
contact portion MG1a. Therefore, the contact portion MG1a is formed
of a part of the contact portion MG1b, and the other part than the
part to be the contact portion MG1a is removed by the etching in
the step S10. The contact portion MG1a (i.e., the remaining part of
the contact portion MG1b not removed by the isotropic etching step
in the step S10) is integrally formed with the memory gate
electrode MG1 (i.e., the memory gate electrode MG1 other than the
contact portion MG1a) in a sidewall shape.
[0420] Also, as illustrated in FIGS. 64 to 68, the photoresist
pattern RP3 is formed to be overlapped with the memory gate
electrode MG1 in a sidewall shape in a plane. That is, the
photoresist pattern RP3 is formed to include the memory gate
electrode MG1 in a sidewall shape in a plane. Note that "the memory
gate electrode MG1 in a sidewall shape" before the isotropic
etching of the step S10 corresponds to "the memory gate electrode
MG1 other than the contact portion MG1b," and "the memory gate
electrode MG1 in a sidewall shape" after the isotropic etching of
the step S10 corresponds to "the memory gate electrode MG1 other
than the contact portion MG1a."
[0421] Therefore, when the photoresist pattern RP3 is formed, the
memory gate electrode MG1 in a sidewall shape (i.e., memory gate
electrode MG1 other than the contact portion MG1b) is covered by
the photoresist pattern RP3, and not exposed in both the
longitudinal direction (vertical direction) and a crosswise
direction (horizontal direction) as the select gate electrode SG is
provided in the crosswise direction. As the etching of the step S10
is performed in this state (a state in which the memory gate
electrode MG1 is not exposed in both the longitudinal direction and
the crosswise direction), the memory gate electrode MG1 in a
sidewall shape is not etched by the etching of the step S10, and
eventually remains.
[0422] Also, while the etching performed in the etching process of
the step S10 is necessarily an isotropic etching, either of dry
etching or wet etching can be used. Note that dry etching is more
preferable than wet etching, and using isotropic dry etching as the
etching in the etching process of the step S10 has advantages
including good controllability of etching amount and small
variations. When using dry etching, for example, O.sub.2/CF.sub.4
etc. can be used as an etching gas.
[0423] According to such a step S10, the silicon spacer SP1 is
removed and the memory gate electrode MG1 in a sidewall shape is
left, so that the contact portion MG1b becomes the contact portion
MG1a.
[0424] Next, as illustrated in FIG. 76 (cross-sectional view taken
along the line A1-A1) and FIG. 77 (cross-sectional view taken along
the line C1-C1), in the insulating film 65, an exposed part not
covered by the memory gate electrode MG1 (including the contact
portion MG1a) is removed by etching (for example, wet etching)
(step S11 in FIG. 47). Here, the insulating film 65 positioned
under the memory gate electrode MG1 and the insulating film 65
positioned between the memory gate electrode MG1 and the select
gate electrode SG are not removed and remains. Thus, both the
insulating film 65 positioned under the contact portion MG1a and
the insulating film 65 positioned between the contact portion MG1a
and the select gate electrode SG are not removed and remains.
[0425] Next, an n-type impurity, for example, arsenic (As) or
phosphorus (P) etc. is introduced (doped) into the semiconductor
substrate 61 (p-type well PW1) using the select gate electrode SG
and the memory gate electrode MG1 as an ion-implantation blocking
mask, thereby forming the n.sup.--type semiconductor regions
(impurity diffusion layers) 67a and 67b (step 512 in FIG. 47).
[0426] Here, the n.sup.--type semiconductor region 67a is formed in
a self-aligned manner to a sidewall of the memory gate electrode
MG1 (sidewall on a side opposite to that adjacent to the select
gate electrode SG via the insulating film 65) in the memory cell
region 61A, and the n.sup.--type semiconductor region 67b is formed
in a self-aligned manner to a sidewall of the select gate electrode
SG (sidewall on a side opposite to that adjacent to the memory gate
electrode MG1 via the insulating film 65) in the memory cell region
61A. The n.sup.--type semiconductor region 67a and the n.sup.--type
semiconductor region 67b can work as parts of the source/drain
regions of the memory cell formed in the memory cell region
61A.
[0427] Next, as illustrated in FIG. 78 (cross-sectional view taken
along the line A1-A1) and FIG. 79 (cross-sectional view taken along
the line C1-C1), on the sidewalls of the select gate electrode SG
and memory gate electrode MG1, (sidewalls on sides opposite to
those of the select gate electrodes SG and the memory gate
electrodes MG1 adjacent to each other via the insulating film 65),
the sidewall insulating films (sidewall, sidewall spacer) 68 formed
of an insulator, for example, silicon oxide are formed (step S13 in
FIG. 47). For example, an insulating film such as a silicon oxide
film is deposited on the entire surface of the main surface of the
semiconductor substrate 61, and the insulating film is subjected to
an anisotropic etching (etching back), thereby selectively leaving
the insulating film only on the sidewalls of the select gate
electrodes SG and memory gate electrodes MG1, so that the sidewall
insulating films 68 are formed. As illustrated in FIG. 79, the
sidewall insulating film 68 may be formed also on the sidewalls
(side surfaces) of the contact portions MG1a. While the sidewall
insulating film 68 has been formed as a silicon oxide film in the
present embodiment, the sidewall insulating film 68 is not limited
to silicon oxide film, and the sidewall insulating film 68 may be
formed of a silicon nitride film or a stacked film of a silicon
oxide film and a silicon nitride film.
[0428] Next, an n-type impurity, for example, arsenic (As) or
phosphorus (P) etc. is introduced (doped) into the semiconductor
substrate 61 (p-type well PW1) using the select gate electrode SG,
the memory gate electrode MG1, and the sidewall insulating film 68
on the select gate electrode SG and memory gate electrode MG1 as an
ion-implantation blocking mask, thereby forming the n.sup.+-type
semiconductor regions (impurity diffusion layers) 69a and 69b
having a high concentration (step S14 in FIG. 47).
[0429] Here, the n.sup.+-type semiconductor region 69a is formed to
the sidewall insulating film 68 in a self-aligned manner to the
sidewall of the memory gate electrode MG1 in the memory cell region
61A, and the n.sup.+-type semiconductor region 69b is formed in a
self-aligned manner to the sidewall insulating film 68 on the
sidewall of the select gate electrode SG in the memory cell region
61A. In this manner, an LDD (lightly doped drain) structure is
formed.
[0430] The n-type semiconductor region MS, which works as a source
region of the memory transistor, is formed of the n.sup.--type
semiconductor region 67a and the n.sup.+-type semiconductor region
69a that has a higher impurity concentration than the n.sup.--type
semiconductor region 67a, and the n-type semiconductor region MD,
which works as a drain region of the select transistor, is formed
of the n.sup.--type semiconductor region 67b and the n.sup.+-type
semiconductor region 69b having a higher impurity concentration
than the n.sup.--type semiconductor region 67b.
[0431] In this manner, the memory cell MC1 of the non-volatile
memory is formed in the memory cell region 61A described above.
[0432] Next, if needed, an etching (for example, wet etching using
diluted hydrofluoric acid) is performed, thereby cleaning
(exposing) upper surfaces (surfaces) of the select gate electrode
SG, memory gate electrode MG1, and n.sup./-type semiconductor
regions 69a and 69b. The etching here can be a light etching to the
extent of removing natural oxide films.
[0433] Next, using salicide technology, as illustrated in FIG. 80
(cross-sectional view taken along the line A1-A1) and FIG. 81
(cross-sectional view taken along the line C1-C1), to upper
portions (upper surfaces, surfaces, upper-layer portions) of the
select gate electrodes SG, memory gate electrodes MG1, and
n.sup.+-type semiconductor regions 69a and 69b, the metal silicide
layers (metal silicide films) 71 are formed, respectively. By
forming the metal silicide layers 71, diffusion resistance and/or
contact resistance can be lowered. The metal silicide layer 71 can
be formed in the following manner.
[0434] First, a metal film (not illustrated) is formed (deposited)
on the entire surface of the main surface of the semiconductor
substrate 61 including the upper surfaces (surfaces) of the select
gate electrodes SG, memory gate electrodes MG1, and n.sup.+-type
semiconductor regions 69a and 69b to cover the select gate
electrodes SG, memory gate electrodes MG1, and sidewall insulating
films 68. This metal film is formed of, for example, a cobalt (Co)
film or a nickel (Ni) film etc., and can be formed by using
sputtering or the like. Then, a thermal treatment is performed on
the semiconductor substrate 61, thereby reacting the metal film and
the upper layer portions (surface layer portions) of the select
gate electrodes SG, memory gate electrodes MG1, and n.sup.+-type
semiconductor regions 69a and 69b. In this manner, the metal
silicide layers 71 are formed to the upper portions (upper
surfaces, surfaces, upper layer portions) of the select gate
electrodes SG, memory gate electrodes MG1, and n.sup.+-type
semiconductor regions 69a and 69b, respectively. The metal silicide
layer 71 can be, for example, a cobalt silicide layer (when the
metal film described above is a cobalt film), or a nickel silicide
layer (when the metal film is a nickel film). Then, unreacted part
of the metal film described above is removed. Cross-sectional views
of this stage are illustrated in FIGS. 80 and 81.
[0435] Also, as illustrated in FIG. 81, the metal silicide layers
71 are formed to portions not covered by the sidewall insulating
films 68 among the upper surfaces of the contact portions MG1a of
the memory gate electrodes MG1. In addition, as illustrated in FIG.
40, the metal silicide layers 71 are formed also on the upper
surfaces of the contact portions SGa of the select gate electrodes
SG.
[0436] Next, as illustrated in FIG. 82 (cross-sectional view taken
along the line A1-A1) and FIG. 83 (cross-sectional view taken along
the line C1-C1), on the entire surface of the semiconductor
substrate 61, the insulating film (interlayer insulating film) 72
is formed (deposited) as an interlayer insulating film to cover the
select gate electrodes SG, memory gate electrodes MG1, and the
sidewall insulating films 68. The insulating film 72 is formed of a
single film of a silicon oxide film or a stacked film of a silicon
nitride film and a silicon oxide film on the silicon nitride film,
and can be formed by a CVD method or the like. When the insulating
film 72 is formed of the stacked film of a silicon nitride film and
a silicon oxide film on the silicon nitride film, a thickness of
the silicon oxide film on the top layer side is larger than that of
the silicon nitride film on the bottom layer side. The silicon
nitride film on the bottom layer side works as an etching stopper
film upon forming the contact holes CT to the insulating film 72.
After forming the insulating film 72, the upper surface of the
insulating film 72 is planarized by using a CMP (chemical
mechanical polishing) method, if needed.
[0437] Next, using a photoresist pattern (not illustrated) formed
on the insulating film 72 by using a photolithography method, the
insulating film 72 is dry-etched, thereby forming the contact holes
(opening portions, through-holes) CT to the insulating film 72 as
illustrated in FIG. 84 (cross-sectional view taken along the line
A1-A1) and FIG. 85 (cross-sectional view taken along the line
C1-C1).
[0438] The contact holes CT are formed to upper portions of the
n.sup.+-type semiconductor regions 69a and 69b, the contact
portions SGa, and the contact portions MG1a of the memory gate
electrodes MG1. The contact holes CT include the contact holes CT1,
CT2, CT3, and CT4 as described above. Among the contact holes CT,
the contact holes CT4 are formed to the insulating film (interlayer
insulating film) 72 at the upper portions of the contact portions
MG1a of the memory gate electrodes MG1. A part of (a part of the
metal silicide layer 71 on the surface of) the contact portion MG1a
of the memory gate electrode MG1 is exposed at the bottom portion
of the contact hole CT4. Also, the contact hole CT2 is formed to
the insulating film (interlayer insulating film) 72 at an upper
portion of the n.sup.+-type semiconductor region 69b, and a part of
(a part of the metal silicide layer 71 on the surface of) the
n.sup.+-type semiconductor region 69b is exposed at the bottom
portion of the contact hole CT2. Further, as observed in FIG. 40
described above, the contact holes CT3 are formed to the insulating
film (interlayer insulating film) 72 at upper portions of the
contact portions SGa of the select gate electrodes SG, and a part
of (a part of the metal silicide layer 71 on the surface of) the
contact portion SGa of the select gate electrode SG is exposed at
the bottom portion of the contact hole CT3.
[0439] Next, as illustrated in FIG. 86 (cross-sectional view taken
along the line A1-A1) and FIG. 87 (cross-sectional view taken along
the line C1-C1), inside the contact holes CT, the conductive plugs
PG formed of tungsten (W) or the like are formed as conductor
portions (connection conductor portions).
[0440] To form the plugs PG, for example, the barrier conductor
film 73a is formed on the insulating film 72 including inside
portions (on bottom portions and sidewalls) of the contact holes
CT. The barrier conductor film 73a can be, for example, a titanium
film, a titanium nitride film, or a stacked film of a titanium film
and a titanium nitride film. Then, the main conductor film 73b
formed of a tungsten film or the like is formed on the barrier
conductor film 73a to fill the contact holes CT, and unnecessary
parts of the main conductor film 73b and the barrier conductor
films 73a are removed by a CMP method or an etch-back method etc.,
thereby forming the plugs PG.
[0441] Among the plugs PG, the plug PG2 buried in the contact hole
CT2 abuts and is electrically connected to (the metal silicide
layer 71 on the surface of) the n.sup.--type semiconductor region
69b. Among the plugs PG, the plug PG4 buried in the contact hole
CT4 abuts and is electrically connected to (the metal silicide
layer 71 on the surface of) the contact portion MG1a of the memory
gate electrode MG1. Also, as observed in FIG. 40, the plug PG3
buried in the contact hole CT3 abuts and is electrically connected
to (the metal silicide layer 71 on the surface of) the contact
portion SGa of the select gate electrode SG.
[0442] Next, as illustrated in FIGS. 39 to 43, the wiring (wiring
layer) MM1 is formed on the insulating film 72 in which the plug PG
are buried. Forming such a wiring MM1 by damascene technique (here,
single damascene technique) will be described.
[0443] First, as illustrated in FIGS. 39 to 43, after forming the
insulating film (interlayer insulating film) 74 on the insulating
film 72 in which the plugs PG are buried, wiring trenches (trenches
to which the wirings MM1 are buried in the insulating film 74) are
formed by using photolithography technique and dry etching
technique. Then, a barrier conductor film (e.g., titanium nitride
film, tantalum film, or tantalum nitride film) is formed on the
main surface of the semiconductor substrate 61 (i.e., on the
insulating film 74 including the bottom portions and sidewalls of
the wiring trenches), and subsequently, a seed layer of copper is
formed on the barrier conductor film by a CVD method or sputtering,
and further, a copper plating film is formed on the seed layer
using an electroplating method to fill the inside of the wiring
grooves by the copper plating film. Thereafter, the copper plating
film, seed layer, and barrier conductor film in other regions than
the inside of the wiring trenches are removed by a CMP method, so
that the wiring MM1 of a first layer containing copper as a main
conductive material is formed. The wiring MM1 is buried in the
wiring trenches 74. Note that, to simplify drawings, in FIGS. 39 to
43, the copper plating film, seed film, and barrier conductor film
forming the wiring MM1 are integrally illustrated.
[0444] The wiring MM1 is electrically connected to the source
region (semiconductor region MS) of the memory transistor, the
drain region (drain semiconductor region MD) of the select
transistor, the contact portion SGa of the select gate electrode
SG, or the contact portion MG1a of the memory gate electrode MG1
via the plug PG buried in the contact hole CT. For example, as
illustrated in FIG. 41, the memory gate wiring (wiring to be
connected to the memory gate electrode MG1) among the wirings MM1
is electrically connected to the contact portion MG1a of the memory
gate electrode MG1 via the plug PG4 buried in the contact hole CT4.
Also, as illustrated in FIG. 40, the select gate wiring (wiring to
be connected to the select gate wiring SG) MM1b among the wirings
MM1 is electrically connected to the contact portion SGa of the
select gate electrode SG via the plug PG3 buried in the contact
hole CT3.
[0445] While wirings of second and following layers are formed by a
dual damascene method etc. thereafter, illustration and description
thereof will be omitted. Also, the wiring MM1 and wirings of upper
layers above the wiring MM1 are not limited to damascene wirings
(buried wirings), and they can be formed by patterning a conductor
film for wiring, for example, a tungsten wiring or aluminum wiring
can be used.
[0446] Next, comparing with a semiconductor device of a comparative
example, main effects of the present embodiment will be
described.
[0447] FIGS. 88 and 89 are cross-sectional views of a main part of
a semiconductor device of the comparative example, and correspond
to FIGS. 39 and 40 of the present embodiment described above. Note
that, in the semiconductor device of the comparative example in
FIGS. 88 and 89, a memory gate electrode MG101, a select gate
electrode SG101, a sidewall insulating film 168, a metal silicide
layer 171, an insulating film 172, a contact hole CT101, a plug
PG101, an insulating film 174, and a wiring MM101 correspond to the
memory gate electrode MG1, the select gate electrode SG, the
sidewall insulating film 68, the metal silicide layer 71, the
insulating film 72, the contact hole CT, the plug PG, the
insulating film 74, and the wiring MM1 of the present embodiment,
respectively. Also, in the semiconductor device of the comparative
example illustrated in FIGS. 88 and 89, the contact portion MG101a
corresponds to the contact portion MG1a of the present embodiment
described above.
[0448] In the semiconductor device of the comparative example
illustrated in FIGS. 88 and 89, the contact portion MG101a of the
memory gate electrode MG101 runs over the select gate electrode
SG101. That is, a part of the contact portion MG101a of the memory
gate electrode MG101 is positioned above the select gate electrode
SG101, and the contact portion MG101a is extended across a position
above the select gate electrode SG101 to the device isolation
region 62. Regarding the contact portion MG101a, upon forming the
memory gate electrode MG101 in a sidewall shape by etching back a
silicon film (corresponding to the silicon film 66) formed on the
main surface of the semiconductor substrate 61, a photoresist
pattern (corresponding to RP2 described above) is formed to an
upper portion of the silicon film and the silicon film is left
under the photoresist pattern to form the contact portion MG101a.
Upon removing a silicon spacer (corresponding to the silicon spacer
SP1 described above) on one of sidewalls of the select gate
electrode SG101 and leaving the memory gate electrode MG101 on the
other sidewall of the select gate electrode SG101, a not-etched
part of the memory gate electrode MG101a running over the select
gate electrode SG101 is left, and the structure, in which the
contact portion MG101a is running over the select gate electrode
SG101, is maintained also in the semiconductor device of the
comparative example after manufacture.
[0449] Through the study of the inventors of the present invention,
it has been found out that the following problems occur in the
semiconductor device of the comparative example illustrated in
FIGS. 88 and 89.
[0450] In the comparative example in which a part of the contact
portion MG101a of the memory gate electrode MG101 is running over
the select gate electrode SG101, it is necessary to make a
thickness of the insulating film 172 (distance from the main
surface of the semiconductor substrate 61 to an upper surface of
the insulating film 172) larger so that also the contact portion
MG101a running over the select gate electrode SG101 is sufficiently
covered by the insulating film 172.
[0451] However, it is necessary to form the contact hole CT101
formed to the insulating film 172 to surely penetrate through the
insulating film 172. Therefore, when the insulating film 172 is
thick, an etching amount of the dry etching upon forming the
contact hole CT101 to the insulating film 172 is increased, and an
etching amount of the photoresist pattern being formed (not
illustrated) is increased. Therefore, a yield is feared to be
lowered as a shape abnormality in the contact hole occurs. Also, it
becomes necessary to set the over-etching amount larger, and it may
cause damages to the part exposed at the bottom portion of the
contact hole CT101 due to an over-etching.
[0452] Also, when the thickness of the insulating film 172 is
large, a depth of the contact hole CT1 formed in the insulating
film 172 becomes large. However, it becomes difficult to form a
contact hole when an aspect ratio (horizontal to vertical ratio) is
too large. Thus, when the thickness of the insulating film becomes
too large, to suppress an increase in the aspect ratio of the
contact hole CT101, it becomes necessary to increase a planar size
(opening area) of the contact hole CT101, but it is a disadvantage
to miniaturization of semiconductor devices.
[0453] Also, to form a peripheral circuit other than the
non-volatile memory in the other regions of the semiconductor
substrate 61 which is the same with that to which the non-volatile
memory is formed, a gate processing (a patterning step of forming a
gate electrode of the peripheral circuit) is performed in a region
to form the peripheral circuit (peripheral circuit forming region)
while the non-volatile memory forming region (including regions
corresponding to the memory cell region 61A, the source dummy
region 61B, and the word shunt region 61C) is being covered by a
photoresist pattern. Here, in the comparative example, the upper
surface of the contact portion MG101a running over the select gate
electrode SG101 is at the highest position among the elements
formed on the semiconductor substrate 61, and the part is necessary
to be covered by a photoresist pattern having a thickness capable
of sufficiently protecting in a patterning of the gate electrode of
the peripheral circuit. Therefore, as the photoresist pattern is
necessary to be thicker than the present embodiment, a thickness of
a photoresist pattern for the gate processing (photoresist pattern
which covers a gate-electrode formation planned region in the
peripheral circuit region) is large. When the thickness of the
photoresist pattern for gate processing is large, it becomes
difficult to form a miniaturized gate electrode. Thus, the
comparative example has a disadvantage in miniaturization of the
gate electrode in the peripheral circuit forming region.
[0454] Also, in the structure in which a part of the contact
portion MG101a is running over the select gate electrode SG101 as
the comparative example, variations in position and size of the
contact portion MG101a tend to be large. Thus, to ensure a process
margin, the size of the contact portion MG101a should be large,
resulting in a disadvantage in miniaturization of semiconductor
devices.
[0455] Meanwhile, in the present embodiment, the contact portion
MG1a of the memory gate electrode MG1 is not running over the
select gate electrode SG. That is, the contact portion MG1a does
not have a part positioned on the select gate electrode SG. The
memory gate electrode MG1 in the other region than the contact
portion MG1a is formed in a sidewall (sidewall spacer) shape on one
sidewall of the select gate electrode SG, and does not run over the
select gate electrode SG. Thus, the memory gate electrode MG1
including the contact portion MG1a does not have a part positioned
on the select gate electrode SG.
[0456] Further, in the present embodiment, while the contact
portions MG1a are provided to a plurality of the memory gate
electrodes MG1 when a plurality of lines of the select gate
electrodes SG and the memory gate electrodes MG1 being adjacent via
the insulating film 65 are extended on the main surface of the
semiconductor substrate 61, none of the memory gate electrode MG1
has the contact portion MG1a running over the select gate electrode
SG (the memory gate electrode MG1 does not have a portion
positioned on the select gate electrode SG). That is, when a
plurality of the select gate electrodes SG and a plurality of the
memory gate electrodes MG1 being adjacent via the insulating film
65 are extended on the main surface of the semiconductor substrate
61, none of the memory gate electrodes MG1 (the memory gate
electrodes MG1 including the contact portions MG1a) has a portion
positioned above the select gate electrode SG.
[0457] More specifically, in the present embodiment, at the stage
of depositing the silicon film 66, while the silicon film 66 is
formed to cover the pattern (select gate electrode SG) of the
silicon film 64, all portions of the silicon film 66 positioned
above the silicon film 64 after the silicon film 66 is deposited
are removed thereafter (specifically, in the steps S9 and S10
described above). Therefore, after the isotropic etching step of
the step S10 described above, there is no portion where the silicon
film 66 is arranged above the silicon film 64 (select gate
electrode SG), and this state will be maintained in the
manufactured semiconductor device.
[0458] Therefore, in the present embodiment, as the insulating film
72 is formed in a state where the contact portion MG1a of the
memory gate electrode MG1 does not run over the select gate
electrode SG (i.e., a state where the silicon film 66 does not have
a portion arranged above the silicon film 64), the thickness of the
insulating film 72 can be reduced as compared with the comparative
example described above in which a part of the contact portion
MG101 runs over the select gate electrode SG101. Since the
thickness of the insulating film 72 can be reduced, the amount of
etching and the amount of over etching in the dry etching upon
forming the contact holes CT can be set at a small amount, and
occurrence of a shape abnormality in the contact holes CT due to a
large amount of etching, and/or occurrence of damage due to
overetching can be suppressed or prevented. Therefore, reliability
of the semiconductor device can be improved, and also, performance
of the semiconductor device can be improved.
[0459] In addition, since the insulating film 72 can be formed
thinner in the present embodiment than that of the comparative
example, when the planar sizes (opening areas) of the contact holes
CT are the same, the aspect ratio (horizontal to vertical ratio) of
the contact holes CT can be small, and when the aspect ratios of
the contact holes CT are the same, the planar sizes (opening areas)
of the contact holes CT can be small. Therefore, it becomes easier
to form the contact holes CT, and also, a reduction of the planar
size (opening area) of the contact holes is possible. Therefore, a
manufacturing yield of the semiconductor device can be improved,
and miniaturization (area reduction) of the semiconductor device
can be achieved. Moreover, the miniaturization (size reduction) of
the semiconductor device can be advanced.
[0460] In addition, in the present embodiment, a peripheral circuit
other than the non-volatile memory can be formed in another region
of the semiconductor substrate 61 which is the same semiconductor
substrate 61 to which the non-volatile memory is formed. Here, the
peripheral circuit means a processor such as a CPU, a control
circuit, a sense amplifier, a column decoder, a row decoder, an
input/output circuit, and/or the like. A region in which the
peripheral circuit is formed will be called a peripheral circuit
forming region. While a MISFET and so forth forming the peripheral
circuit are formed to the peripheral circuit forming region of the
main surface of the semiconductor substrate 61, gate electrodes of
the MISFETs in the peripheral circuit forming region can be formed
by using the silicon film 64 (i.e., a silicon film in the same
layer as the silicon film 64 used to form the select gate
electrodes SG) described above. More specifically, after forming
the silicon film 64 in the step S5 described above, the silicon
film 64 is left in the peripheral circuit forming region until the
stage of removing unnecessary portions of the insulating film 65 in
the step S11 described above. Before performing the ion
implantation for LDD formation (here, for forming the n.sup.--type
semiconductor regions 67a and 67b) in the step S12, the remaining
silicon film 64 in the peripheral circuit forming region is
patterned using photolithography technology and dry etching
technology, thereby forming the gate electrode (gate electrode of
the MISFET forming the peripheral circuit) formed of the patterned
silicon film 64.
[0461] Meanwhile, in the peripheral circuit forming region, upon
forming the gate electrodes by patterning the remaining silicon
film 64, the silicon film 64 in the peripheral circuit forming
region is necessary to be patterned in a state where the
non-volatile memory forming region (including the memory cell
region 61A, source dummy region 61B, and word shunt region 61C) is
covered by a photoresist pattern. This is because the select gate
electrode SG and the memory gate electrode MG1 in the non-volatile
memory forming region can be prevented from being etched upon
patterning the silicon film 64 in the peripheral circuit forming
region to form the gate electrodes of the peripheral circuit.
[0462] In the present embodiment, as described above, the contact
portion MG1a of the memory gate electrode MG1 does not run over the
select gate electrode SG. More specifically, as the contact portion
MG1a of the memory gate electrode MG1 does not have a portion
positioned above the select gate electrode SG, the memory gate
electrode MG1 including the contact portion MG1a does not have a
portion positioned above the select gate electrode SG. Therefore,
as compared with the comparative example described above, in the
present embodiment, it is possible to reduce the thickness of the
photoresist pattern (i.e., the photoresist pattern which covers the
entire of the non-volatile memory forming region and a
gate-electrode formation planned region in the peripheral circuit
forming region) used upon forming the gate electrodes (gate
electrodes of the MISFET forming the peripheral circuit) by
patterning the silicon film 64 in the peripheral circuit forming
region. Thus, as the gate electrodes (gate electrodes of the
MISFETs forming the peripheral circuit) can be formed by patterning
the silicon film 64 in the peripheral circuit using a thin
photoresist pattern, miniaturization of the gate electrodes (gate
electrode of the MISFET forming the peripheral circuit) in the
peripheral circuit forming region can be achieved. Therefore,
miniaturization (area reduction) of the semiconductor device can be
achieved, and miniaturization (area reduction) of the semiconductor
device can be advanced.
[0463] In addition, in the present embodiment, as the structure in
which the contact portion MG1a of the memory gate electrode MG1
does not run over the select gate electrode SG is used, it is
easier to ensure a process margin and has an advantage in
miniaturization of the semiconductor device as compared to the
structure of the comparative example in which a part of the contact
portion MG101a runs over the select gate electrode SG101.
[0464] Also, it is preferable that the contact portion MG1a does
not have a portion positioned higher than the height of the upper
surface of the select gate electrode SG and a height of the contact
portion MG1a (i.e., height of a top portion of the memory gate
electrode MG1) is lower than the height of the select gate
electrode SG (i.e., height of the upper surface of the select gate
electrode SG), and accordingly, the most of the effects described
above can be obtained. This point will be described later.
[0465] While the various effects described above can be obtained
according to the feature in the structure of the present embodiment
in this manner, the manufacturing process for obtaining the
structure of the present embodiment is also devised. The design
will be described hereinafter.
[0466] Different from the present embodiment, at the stage where
the silicon film 66 is etched back and the memory gate electrode
MG1 and the silicon spacer SP1 are formed in the step S9, it is
difficult to make the structure in which the contact portion MG1b
does not run over the select gate electrode SG (i.e., the contact
portion MG1b does not have a portion positioned above the select
gate electrode SG) in view of manufacturing technology in
consideration of misalignment of a photomask (misalignment of a
photoresist pattern) etc. Even if the contact portion MG1b is
forcedly made not to run over the select gate electrode SG, the
manufacturing yield of the semiconductor device is feared to be
lowered.
[0467] Accordingly, in the present embodiment, the contact portion
MG1b, which has been formed at the stage where the silicon film 66
is etched back and the memory gate electrode MG1 and the silicon
spacer SP1 are formed in the step S9, has a portion running over
the select gate electrode SG. That is, the contact portion MG1b has
a portion positioned above the select gate electrode SG. Such a
structure can be easily and surely achieved by forming the
photoresist pattern RP2, being extended to cross (more preferably,
to be orthogonal to) the select gate electrode SG, on the silicon
film 66. Even when a misalignment of a photomask (misalignment of
the photoresist pattern RP2) occurs to a certain degree, the
structure can be formed without problems. As the margin can be
ensured, the manufacturing yield of the semiconductor device can be
also improved.
[0468] However, since the contact portion MG1b has a portion
positioned above the select gate electrode SG, to solve the
problems described in relation to the semiconductor device of the
comparative example illustrated in FIGS. 88 and 89 described above,
it is necessary to remove the portion of the contact portion MG1b
positioned above the select gate electrode SG before the step of
forming the insulating film 72. Thus, the step of etching of the
step S10 is devised.
[0469] The photoresist pattern RP3 described above is formed so
that the memory gate electrode MG1 (i.e., memory gate electrode MG1
other than the contact portion MG1b) in a sidewall shape is covered
by the photoresist pattern RP3, and the silicon spacer SP1 is not
covered by the photoresist pattern (i.e., the silicon spacer SP1 is
exposed). This can be easily achieved by positioning the edge
portion of the photoresist pattern RP3 above the select gate
electrode SG as illustrated in FIGS. 64 to 68. When an etching is
performed using the photoresist pattern RP3 as an etching mask, any
of anisotropic etching and isotropic etching can remove the silicon
spacer SP1 and leave the memory gate electrode MG1 in a sidewall
shape (i.e., the memory gate electrode MG1 other than the contact
portion MG1b). Meanwhile, when the etching is anisotropic etching,
a part of the contact portion MG1b remains on the select gate
electrode SG, and thus the problem described in relation to the
semiconductor device of the comparative example as illustrated in
FIGS. 88 and 89 occurs.
[0470] Also, in an anisotropic etching using a photoresist pattern,
it is difficult to remove a part of the contact portion MG1b
positioned above the select gate electrode SG with preventing
etching of the memory gate electrode MG1 (i.e., the memory gate
electrode MG1 other than the contact portion MG1b) in a sidewall
shape in view of manufacturing technology in consideration of a
misalignment of a photomask (misalignment of the photoresist
pattern). Even if the part of the contact portion MG1b positioned
above the select gate electrode SG is forcedly removed, the
manufacturing yield of the semiconductor device is feared to be
lowered.
[0471] Accordingly, in the present embodiment, the part of the
contact portion MG1b positioned above the select gate electrode SG
is removed by isotropic etching in the step S10.
[0472] That is, in the present embodiment, the contact portion MG1b
has a portion covered by the photoresist pattern RP3 and a portion
not covered by the photoresist pattern RP3, and this can be easily
achieved by positioning the edge portion of the photoresist pattern
RP3 above the select gate electrode SG as illustrated in FIGS. 64
to 68. When the photoresist pattern RP3 is used as an etching mask,
the part of the contact portion MG1b not covered by the photoresist
pattern RP3 is removed, and thus an upper part of the contact
portion MG1b covered by the photoresist pattern RP3 and an exposed
side surface of the contact portion MG1b are generated. By using
the isotropic etching as the present embodiment, from the side
surface of the contact portion MG1b exposed from the photoresist
pattern RP3, a part of the contact portion MG1b whose upper portion
is covered by the photoresist pattern RP3 is side-etched to be
removed. By a side-etching by the isotropic etching, a part of the
MG1b covered by the photoresist pattern RP3 and also positioned
above the select gate electrode SG can be removed. By performing
the isotropic etching step of the step S10, the contact portion
MG1b does not have a portion running over the select gate electrode
SG (i.e., a portion positioned above the select gate electrode SG)
eventually, so that the contact portion MG1a is formed. Therefore,
in the step S10, it is necessary to remove the portion of the
contact portion MG1b not covered by the photoresist pattern RP3 and
the portion covered by the photoresist pattern RP3 and positioned
above the select gate electrode SG by isotropic etching.
[0473] Even if a misalignment of the photomask (misalignment of the
photoresist pattern RP3) occurs in a certain degree, as long as the
edge portion of the photoresist pattern is positioned above the
select gate electrode SG, the portion of the contact portion MG1b
positioned above the select gate electrode SG can be removed by
isotropic etching with preventing etching of the memory gate
electrode MG1 (i.e., the memory gate electrode MG1 other than the
contact portion MG1b) in a sidewall shape. In this manner, a margin
of the misalignment of the photomask (misalignment of the
photoresist pattern RP2 described above) can be ensured, and thus
the manufacturing yield of the semiconductor device can be
improved.
[0474] Also, in the present embodiment, an unnecessary portion (a
portion positioned above the select gate electrode SG) of the
contact portion MG1b is removed in the same step as the step of
removing the silicon spacer SP1, and this can be achieved by
performing an isotropic etching as the etching in the step S10. In
this manner, the number of manufacturing steps can be reduced.
Also, throughput of the semiconductor device can be improved, and a
manufacturing cost of the semiconductor device can be reduced.
[0475] In addition, as illustrated in FIG. 75, in the step S10
described above, when the portion of the contact portion MG1b
positioned above the select gate electrode SG is removed by
isotropic etching, it is preferable that the contact portion MG1b
is isotropically etched (continuously) until the height of the
contact portion MG1b does not have a portion positioned higher than
a height H.sub.1 of the upper surface of the select gate electrode
SG. That is, in the step S10, the isotropic etching is preferably
performed (continued) until the height of the top portion
(uppermost portion) of the contact portion MG1b becomes lower than
or equal to the height H.sub.1 of the upper surface of the select
gate electrode SG. In other words, the isotropic etching in the
step S10 is preferably performed until a height H.sub.2 to a top
portion (uppermost portion) 77 of the contact portion MG1a formed
of the remaining contact portion MG1b becomes lower than or equal
to the height H.sub.1 of the upper surface of the select gate
electrode SG (i.e., H.sub.2.ltoreq.H.sub.1). In this manner, the
height of the contact portion MG1a becomes lower than or equal to
the height of the select gate electrode SG, so that the contact
portion MG1a does not have a portion positioned higher than the
height H.sub.1 of the upper surface of the select gate electrode
SG. Note that, when the height of the contact portion MG1a (i.e.,
the height H.sub.2 of the top portion 77) formed in the step S10 is
lower than or equal to the height of the select gate electrode SG
(i.e., the height H.sub.1 of the upper surface of the select gate
electrode SG), the relationship may be maintained in the
manufactured semiconductor device.
[0476] Herein, the top portion (uppermost portion) of the contact
portions MG1b and MG1a correspond to the highest portion of the
contact portions MG1b and MG1a from the main surface of the
semiconductor substrate 61 (the upper surface of the device
isolation region 62 when the device isolation region 62 is formed).
Also, the height H.sub.2 of the top portion 77 of the contact
portion MG1a corresponds to the height to the top portion 77 of the
contact portion MG1a from the main surface of the semiconductor
substrate 61 (the upper surface of the device isolation region 62
when the device isolation region 62 is formed). Also, the height
H.sub.1 of the upper surface of the select gate electrode SG
corresponds to the height from the main surface of the
semiconductor substrate 61 (the upper to the surface of the device
isolation region 62 when the device isolation region 62 is formed)
to the upper surface of the select gate electrode SG. The height
H.sub.1 of the upper surface of the select gate electrode SG can be
regarded as the height of the select gate electrode SG. Note that a
height from the main surface of the semiconductor substrate 61
corresponds to a height in a perpendicular direction to the main
surface of the semiconductor substrate 61. The top portion 77 and
the heights H.sub.1 and H.sub.2 are illustrated in FIG. 75.
[0477] That is, while the contact portion MG1a must not run over
the select gate electrode SG (i.e., the contact portion MG1a must
not have a portion positioned above the select gate electrode),
further, the height H.sub.2 of the top portion (uppermost portion)
77 of the contact portion MG1a is preferably lower than or equal to
the height H.sub.1 of the upper surface of the select gate
electrode SG (i.e., H.sub.2.ltoreq.H.sub.1) A reason of this is as
follows.
[0478] A height H.sub.3 (illustrated in FIG. 74) of the memory gate
electrode MG1 in a sidewall shape (i.e., the memory gate electrode
MG1 other than the contact portion MG1a) is in the same range or
lower than or equal to the height H.sub.1 of the upper surface of
the select gate electrode SG. Here, the height H.sub.3 of the
memory gate electrode MG1 in a sidewall shape corresponds to a
height from the main surface of the semiconductor substrate 61 (the
upper surface of the device isolation region 62 when the device
isolation region 62 is formed) to the top portion (uppermost
portion) of the memory gate electrode MG1 in a sidewall shape. The
top portion (uppermost portion) of the memory gate electrode MG1 in
a sidewall shape corresponds to an uppermost portion of a sidewall
of the memory gate electrode MG1 in a sidewall shape on the side
facing a sidewall of the select gate electrode SG via the
insulating film 65.
[0479] Therefore, the problems described in relation to the
semiconductor device of the comparative example illustrated in
FIGS. 88 and 89 are easier to occur as the height H.sub.2 of the
top portion 77 of the contact portion MG1a is higher than the
height H.sub.1 of the upper surface of the select gate electrode SG
(i.e., H.sub.2>H.sub.1), and as a difference between the heights
H.sub.2 and H.sub.1 is larger. And, when the contact portion MG1a
runs over the select gate electrode SG, the difference between the
height H.sub.2 and the height H.sub.1 is the maximum, and the
problems described in relation to the semiconductor device of the
comparative example illustrated in FIGS. 88 and 89 the most readily
occur.
[0480] On the contrary, in the present embodiment, in addition to
not forming the contact portion MG1a running over the select gate
electrode SG, further, the height H.sub.2 of the top portion 77 of
the contact portion MG1a is formed lower than or equal to the
height H.sub.1 of the upper surface of the select gate electrode SG
(i.e., H.sub.2.ltoreq.H.sub.1), so that the contact portion MG1a
does not have a portion higher than the height of the upper surface
of the select gate electrode SG. In this manner, the problems
described in relation to the semiconductor device of the
comparative example illustrated in FIGS. 88 and 89 can be more
adequately solved.
[0481] More specifically, when the height H.sub.1 of the select
gate electrode is set to be constant, the effect of thinning the
insulating film 72 becomes maximum when the height H.sub.2 of the
top portion 77 of the contact portion MG1a becomes lower than or
equal to the height H.sub.1 of the upper surface of the select gate
electrode SG (i.e., H.sub.2.ltoreq.H.sub.1), and the effects
brought by thinning the insulating film 72 described above can be
enjoyed to the maximum. Also, the effect of thinning the thickness
of the photoresist pattern used upon forming the gate electrode of
the peripheral circuit forming region becomes maximum when the
height H.sub.2 of the top portion 77 of the contact portion MG1a
becomes lower than or equal to the height H.sub.1 of the upper
surface of the select gate electrode SG (i.e.,
H.sub.2.ltoreq.H.sub.1), and the effect of miniaturizing the gate
electrode in the peripheral circuit forming region can be enjoyed
to the maximum.
[0482] In addition, since the contact portion MG1a formed by
isotropic etching in the step S10 is necessary to be electrically
connected to the memory gate electrode MG1 in a sidewall shape
adjacent to the contact portion MG1a in the X direction, the
contact portion MG1a and the memory gate electrode MG1 (i.e., the
memory gate electrode MG1 other than the contact portion MG1a) are
necessary to be integrally formed. Meanwhile, the contact portion
MG1b before the step of isotropic etching in the step S10 is
integrally formed with the memory gate electrode MG1 in a sidewall
shape (i.e., the memory gate electrode MG1 other than the memory
gate electrode MG1) and the silicon spacer SP1.
[0483] Further, the contact portion MG1a is preferable to have a
portion adjacent to the select gate electrode SG via the insulating
film 65. That is, in the step S10, the isotropic etching is
preferably ended (stopped) before the contact portion MG1b loses
the portion adjacent to the select gate electrode SG via the
insulating film 65 (i.e., before the state of a contact portion
MG1d in FIG. 94 described later is obtained). When the contact
portion MG1a does not have a portion adjacent to the select gate
electrode SG via the insulating film 65, a disconnecting between
the contact portion MG1a and the memory gate electrode MG1 adjacent
to the contact portion MG1a is feared to occur. On the contrary,
when the contact portion MG1a has a portion adjacent to the select
gate electrode SG via the insulating film 65, the disconnecting
between the contact portion MG1a and the memory gate electrode MG1
adjacent to the contact portion MG1a can be more surely
prevented.
[0484] Moreover, the photoresist pattern RP3 is required to be
formed to satisfy the following conditions.
[0485] First, the memory gate electrode MG1 (i.e., the memory gate
electrode MG1 other than the contact portion MG1b) in a sidewall
shape is covered by the photoresist pattern RP3. This is to prevent
a disconnecting occurring when the memory gate electrode MG1 in a
sidewall shape is etched by the isotropic etching in the step
S10.
[0486] Next, while it is preferable not to cover the spacer SP1 by
the photoresist pattern RP3, since the etching in the step S10 is
isotropic etching, side-etching of the silicon spacer SP1 is
possible, and thus a part of the silicon spacer SP1 is allowable to
be covered by the photoresist pattern RP3. Note that, when a part
of the silicon spacer SP1 is covered by the photoresist pattern
RP3, not only a part of the silicon spacer SP1 not covered by the
photoresist pattern RP3 but also the part of the silicon spacer SP1
covered by the photoresist pattern RP3 is necessary to be removed
by the isotropic etching in the step S10. In view of surely
preventing occurrence of a remaining portion of the silicon spacer
SP1, it is preferable that the silicon spacer SP1 is not covered by
the photoresist pattern RP3.
[0487] Next, the contact portion MG1b has a portion covered by a
part of the photoresist pattern RP3 and another portion not covered
by the photoresist pattern RP3. This is to form the contact portion
MG1a by side-etching not only the portion not covered by the
photoresist pattern RP3 but also the part covered by the
photoresist pattern RP3 of the contact portion MG1b.
[0488] To satisfy such conditions, as illustrated in FIGS. 64 to
68, it is preferable to position the edge portion of the
photoresist pattern RP3 above the select gate electrode SG. Also,
although there is a possibility of a slight misalignment from a
designed value of the photoresist pattern RP3 to occur due to a
misalignment of the photomask, when the edge portion of the
photoresist pattern RP3 is designed to be near the center (center
in the Y direction) of the select gate electrode SG as illustrated
in FIGS. 64 to 68, the photoresist pattern RP3 can satisfy the
above conditions even when the position of the photoresist pattern
RP3 is slightly misaligned from the designed value.
[0489] FIGS. 90 to 94 are explanatory diagrams illustrating a
misalignment of the position of the photoresist pattern RP3 due to
a misalignment of a photomask etc. FIG. 90 (cross-sectional view
taken along the line A1-A1) corresponds to FIG. 65 described above,
FIG. 91 (cross-sectional view taken along the line C1-C1)
corresponds to FIG. 66 described above, FIG. 92 (cross-sectional
view taken along the line A1-A1) corresponds to FIG. 69 described
above, and FIG. 93 (cross-sectional view taken along the line
C1-C1) and FIG. 94 (cross-sectional view taken along the line
C1-C1) correspond to FIG. 70 described above.
[0490] In FIGS. 90 and 91, due to a misalignment of a photomask
etc., the position of the photoresist pattern RP3 is shifted to the
left as compared to that in FIGS. 65 and 66 described above. Also
in FIGS. 90 and 91, the photoresist pattern RP3 satisfies the above
requirements. Performing an isotropic etching in the step S10 in
this state is illustrated in FIGS. 92 and 93. As illustrated in
FIG. 92, by the isotropic etching of the step S10, the silicon
spacer SP1 is removed, and the memory gate electrode MG1 in a
sidewall shape (i.e., memory gate electrode MG1 other than the
contact portion MG1b) remains. Also, as illustrated in FIG. 93, the
contact portion MG1b becomes the contact portion MG1a as a part of
the contact portion MG1b is removed by the isotropic etching of the
step S10. Etching conditions (etching time etc.) of the isotropic
etching in the step S10 are preferably set as follows.
[0491] While the contact portion MG1d in FIG. 94 corresponds to the
contact portion MG1a in FIG. 93, the contact portion MG1d is formed
as the contact portion MG1b is excessively etched by the isotropic
etching, and thus the contact portion MG1d does not have a portion
adjacent to the select gate electrode SG via the insulating film
65. In the situation of the contact portion MG1d in FIG. 94, a
disconnecting between the contact portion MG1d and the memory gate
electrode MG1 in a sidewall shape adjacent to the contact portion
MG1d possibly occurs. Therefore, the etching conditions (etching
time etc.) of the isotropic etching in the step S10 are set so that
the state of the contact portion MG1d in FIG. 94 is not caused even
when the position of the photoresist pattern RP3 is misaligned, and
the contact portion MG1a has a portion adjacent to the select gate
electrode SG via the insulating film 65 as illustrated in FIG.
93.
[0492] Also, while the contact portion MG1e in FIG. 94 corresponds
to the contact portion MG1a in FIG. 93, the contact portion MG1e is
formed as the contact portion MG1b is insufficiently etched by the
isotropic etching, and thus a part of the contact portion MG1e runs
over the select gate electrode SG. In the situation of the contact
portion MG1e in FIG. 94, the problems described in relation to the
semiconductor device of the comparative example illustrated in
FIGS. 88 and 89 occur. Therefore, the conditions (etching time
etc.) of the isotropic etching in the step S10 are set so that the
state of the contact portion MG1e in FIG. 94 is not caused and the
contact portion MG1a does not run over the select gate electrode SG
as illustrated in FIG. 93 even when the position of the photoresist
pattern RP3 is misaligned, and more preferably, so that the height
H.sub.2 of the top portion 77 of the contact portion MG1a is lower
than or equal to the height H.sub.1 of the select gate electrode SG
(i.e., H.sub.2.ltoreq.H.sub.1).
[0493] In this manner, by setting the etching conditions of the
isotropic etching in the step S10, the effects of the present
embodiment can be surely obtained even when the position of the
photoresist pattern RP3 is misaligned due to a misalignment of a
photomask etc.
Fourth Embodiment
[0494] FIGS. 95 to 97 are plan views of a main part during a
manufacturing process of a semiconductor device according to a
fourth embodiment. FIG. 95 corresponds to FIG. 58 of the third
embodiment described above, FIG. 96 corresponds to FIG. 61 of the
third embodiment described above, and FIG. 97 corresponds to FIG.
73 of the third embodiment described above.
[0495] The present embodiment is different from the third
embodiment described above in the planar shape (pattern shape) of
the contact portion MG1b. As described above, the contact portion
MG1b is formed by leaving the silicon film 66 under the photoresist
pattern RP2 in the etching back (anisotropic etching) step in the
step S9 by the whole thickness of the silicon film 66. Thus, as
understood from a comparison between FIGS. 58 and 61 and a
comparison between FIGS. 95 and 96, the planar shape (pattern
shape) of the contact portion MG1b is the same as the planar shape
(pattern shape) of the photoresist pattern RP2 used in the etching
back (anisotropic etching) step in the step S9. Therefore, the
present embodiment is different from the third embodiment also in
the planar shape (pattern shape) of the photoresist pattern
RP2.
[0496] In the third embodiment and the present embodiment, the
contact portion MG1b is formed to cross the select gate electrode
SG, and extended in a direction (preferably, orthogonal direction;
the Y direction here) crossing the extending direction (here, the X
direction) of the select gate electrode SG. However, in the third
embodiment described above, as illustrated in FIG. 61, the contact
portion MG1b is extended in the direction crossing the extending
direction of the select gate electrode SG having a same (constant)
width W.sub.1. Thus, as illustrated in FIG. 73, in the third
embodiment, a width of the contact portion MG1a remaining after the
step S10 is the same as the width W.sub.1.
[0497] On the contrary, in the present embodiment, as illustrated
in FIG. 96, as compared with a width W.sub.2 (i.e., a width W.sub.2
of the contact portion MG1a) of a portion of the contact portion
MG1b to remain as the contact portion MG1a after the step S10, a
width W.sub.3 of a portion not covered by the photoresist pattern
RP3 and a portion covered by the above-described photoresist
pattern RP3 and positioned above the select gate electrode SG is
smaller (narrower) (i.e., W.sub.2>W.sub.3). The portion of the
contact portion MG1b not covered by the photoresist pattern RP3
(the width W.sub.3 of this portion is smaller than the width
W.sub.2 of the contact portion MG1a) is removed in the step S10,
and the portion of the contact portion MG1b covered by the
photoresist pattern RP3 and positioned above the select gate
electrode SG (the width W.sub.3 of this portion is smaller than the
width W.sub.2 of the contact portion MG1a) is removed by side
etching by the isotropic etching in the step S10. Therefore, in the
present embodiment, a width of the contact portion MG1a remaining
after the step S10 is the same as the width W.sub.2. Herein, the
widths W.sub.1, W.sub.2, and W.sub.3 correspond to a size (width)
of the select gate electrode SG in a direction parallel to the
extending direction of the gate electrode SG (here, the X
direction).
[0498] As described in the third embodiment, when the contact
portion MG1b (eventually, the photoresist pattern RP2 for forming
the contact portion MG1b) has a constant width W.sub.1 and is
extended in a direction (here, the Y direction) crossing the
extending direction (here, the X direction) of the select gate
electrode SG, an allowable amount (margin) to a misalignment of the
photoresist pattern RP2 is improved, and processing accuracy of the
contact portion MG1b can be improved.
[0499] Meanwhile, in the present embodiment, the width W.sub.2 of
the portion of the contact portion MG1b to remain as the contact
portion MG1a after the step S10 is increased so that it becomes
easier to form the contact hole CT4 on the contact portion MG1a
having the width W.sub.2. And, since each width W.sub.3 of the
portion of the contact portion MG1b not covered by the photoresist
pattern RP3 describe above and the portion of the contact portion
MG1b covered by the photoresist pattern RP3 and positioned above
the select gate electrode SG is smaller (narrower) than the width
W.sub.2, occurrence of a disconnecting between the contact portion
MG1a and the memory gate electrode MG1 in a sidewall shape adjacent
to the contact portion MG1a can be more adequately prevented.
Reasons of that will be described with reference to FIGS. 98 and
99.
[0500] FIGS. 98 and 99 are explanatory diagrams of a region to be
side-etched by the isotropic etching in the step S10. FIG. 98
corresponds to a situation in which the planar shape (pattern
shape) of the contact portion MG1b is the planar shape (pattern
shape) of the contact portion MG1b illustrated in FIG. 61 of the
third embodiment. FIG. 99 corresponds to a situation in which the
planar shape (pattern shape) of the contact portion MG1b is the
planar shape (pattern shape) of the contact portion MG1b
illustrated in FIG. 96 of the present embodiment. In FIGS. 98 and
99, a vicinity region of the contact portion MG1a is illustrated,
in which the select gate electrode SG, memory gate electrode MG1
(including the contact portion MG1a), the insulating film 65
between the select gate electrode SG and the memory gate electrode
MG1, and the contact hole CT4 are illustrated, and descriptions of
other components are omitted. Also, while FIGS. 98 and 99 are plan
views, hatching is added to regions in the memory gate electrodes
MG1 (including the contact portion MG1a) in which the side-etching
in the step S10 is advanced. Note that both the cross-sectional
view taken along the line C1-C1 in FIG. 98 and the cross-sectional
view taken along the line C1-C1 in FIG. 99 are substantially the
same as FIG. 41.
[0501] In the present embodiment, in the contact portion MG1b, as
compared with a width W.sub.2 (i.e., a width W.sub.2 of the contact
portion MG1a) of a portion to remain as the contact portion MG1a
after the step S10, a width W.sub.3 of a portion positioned above
the select gate electrode SG is smaller (narrower) (i.e.,
W.sub.2>W.sub.3). The smaller the width W.sub.3 of the portion
of the contact portion MG1b positioned above the select gate
electrode SG, the smaller sizes L.sub.1 and L.sub.2 in the X
direction (extending direction of the memory gate electrode MG1) of
the regions (the regions to which hatching is added in FIGS. 98 and
99) where the side-etching by the isotropic etching in the step S10
advanced in the memory gate electrodes MG1 (including the contact
portion MG1a). Therefore, in the present embodiment, the size
L.sub.2 in the X direction (extending direction of the memory gate
electrode MG1) of the regions (the regions to which hatching is
added in FIG. 99), where side-etching of the isotropic etching in
the step S10 advanced, can be smaller than the width W.sub.2 of the
contact portion MG1a (i.e., W.sub.2>L.sub.2). Therefore, even if
the cross-sectional view taken along the line C1-C1 of the contact
portion MG1a in FIG. 99 becomes like the contact portion MG1d in
FIG. 94 (the contact portion MG1d does not have a portion adjacent
to the select gate electrode SG via the insulating film 65),
through a path illustrated by an arrow 79 in FIG. 99, the contact
portion MG1a and the memory gate electrode MG1 in a sidewall shape
adjacent to the contact portion MG1a are integrally connected, and
thus they are electrically connected. Thus, in the present
embodiment, a disconnecting occurring between the contact portion
MG1a and the memory gate electrode MG1 in a sidewall shape adjacent
to the contact portion MG1a when a misalignment of the photoresist
pattern RP3 occurs can be more adequately prevented.
[0502] Meanwhile, in the third embodiment, etching conditions of
the isotropic etching of the step S10 are set so that the cross
section taken along the line C1-C1 of the contact portion MG1a in
FIG. 99 is not like the contact portion MG1d in FIG. 94 described
above, that is, so that the cross section of the contact portion
MG1a of FIG. 99 is like the contact portion MG1a in FIG. 70 or FIG.
93 described above (the contact portion MG1a includes a portion
adjacent to the select gate electrode SG via the insulating film
65). In this manner, occurrence of a disconnecting between the
contact portion MG1a and the memory gate electrode MG1 in a
sidewall shape adjacent to the contact portion MG1a can be more
adequately prevented.
Fifth Embodiment
[0503] FIG. 100 is a cross-sectional view of a main part of a
semiconductor device according to a fifth embodiment, and
corresponds to FIG. 39 of the third embodiment described above. In
FIG. 100, in the same manner as FIG. 39 of the third embodiment
described above, across section of the memory cell region 61A
(cross section at the position corresponding to the line A1-A1
described above) is illustrated.
[0504] In the third embodiment, the metal silicide layer 71 has
been formed to the upper portion of the select gate electrode SG
and the upper portion of the memory gate electrode MG1. Meanwhile,
in the present embodiment, while the metal silicide 71 is formed to
the upper portion of the memory gate electrode MG1 as illustrated
in FIG. 100, the metal silicide layer 71 is not formed to the upper
portion of the select gate electrode SG other than the contact
portion SGa.
[0505] More specifically, in the present embodiment, as illustrated
in FIG. 100, an insulating film 81 and an insulating film 82 having
a substantially the same planar shape (pattern shape) as that of
the select gate electrode SG are formed on the select gate
electrode SG. That is, the select gate electrode SG is formed as a
stacked-film pattern of the select gate electrode SG, the
insulating film 81, and the insulating film 82 on the select gate
electrode SG, and extended on the semiconductor substrate 61. The
insulating film 82 is formed of, for example, a silicon nitride
film as an insulating film, and the insulating film 81 is formed
of, for example, a silicon oxide film as an insulating film. The
insulating film 82 is formed on the insulating film 81, and formed
to be thicker than the insulating film 81. Therefore, the
insulating film 81 and the insulating film 82 have a stacked
structure (stacked-layer film, stacked-layer insulating film) of
the insulating film 81 which is thin and at a bottom layer side and
the insulating film 82 which is thicker than the insulating film 81
and at a top layer side. As the insulating films 81 and 82 are
formed on the select gate electrode SG, the metal silicide layer 71
will not be formed on the select gate electrode SG in a salicide
process (forming process of the metal silicide layer 71).
[0506] Also, in the third embodiment, the memory gate electrode MG1
has been formed on one sidewall of the select gate electrode SG via
the insulating film 65 and the sidewall insulating film 68 has been
formed on the other sidewall. Meanwhile, in the present embodiment,
since the insulating film 81 and the insulating film 82 are formed
on the select gate electrode SG, the memory gate electrode MG1 is
formed on one sidewall of the stacked pattern (stacked-film
pattern) formed of the select gate electrode SG, insulating film
81, and insulating film 82 via the insulating film 65, and the
sidewall 68 is formed on the other sidewall. That is, while the
select gate electrode SG and the memory gate electrode MG1 have
been formed to be adjacent to each other via the insulating film 65
in the third embodiment, the stacked pattern (stacked-film pattern)
formed of the select gate electrode SG, insulating film 81, and
insulating film 82 and the memory gate electrode MG1 are formed to
be adjacent to each other via the insulating film 65.
[0507] Since other configurations of the memory cell MC in the
present embodiment are substantially the same as that of the third
embodiment described above, descriptions thereof will be
omitted.
[0508] In the present embodiment, as the insulating film 81 and the
insulating film 82 are provided on the select gate electrode SG,
the metal silicide layer 71 is formed to the upper portion of the
memory gate electrode MG1 but not formed to the upper portion of
the select gate electrode SG. Thus, the metal silicide layer 71 on
the memory gate electrode MG1 will not be adjacent to the select
gate electrode SG interposing the thin insulating film 65,
occurrence of a short-circuiting failure between the select gate
electrode SG and the memory gate electrode MG1 can be more
adequately prevented. Meanwhile, in the third embodiment described
above, as the metal silicide layer 71 has been formed to the upper
portion of the memory gate electrode MG1 and the upper portion of
the select gate SG, a resistance of the select gate electrode SG
can be reduced, and thus an operation speed of the non-volatile
memory can be further improved.
[0509] FIGS. 101 and 102 are plan views of a main part of the
semiconductor device according to the present embodiment, and they
illustrate the word shunt region 61C. In FIG. 102, the illustration
of contact holes CT is eliminated from FIG. 101 and the regions
where the metal silicide layers 71 are formed are emphasized by
dots among the upper surfaces of the select gate electrode SG. Note
that, while the metal silicide layers 71 are also formed on the
memory gate electrodes MG1, in FIG. 102, the metal silicide layers
71 on the memory gate electrodes MG1 are not emphasized by dots.
FIGS. 103 and 104 are cross-sectional views of a main part of the
semiconductor device according to the present embodiment, where a
cross-sectional view taken along the line F1-F1 in FIGS. 101 and
102 corresponds to FIG. 103, and a cross-sectional view taken along
the line G1-G1 in FIGS. 101 and 102 corresponds to FIG. 104. Note
that, FIG. 100 described above is a cross-sectional view of the
memory cell region 61A, and the memory cell region 61A and the
source-dummy region 61B are not illustrated in the plan views of
FIGS. 101 and 102.
[0510] Also in the present embodiment, the layout of the word shunt
region 61C can be designed to be the same as the third embodiment
(FIG. 37 described above) described above. Meanwhile, in the
present embodiment in which the insulating film 81 and the
insulating film 82 are formed to the upper portion of the select
gate electrode SG to prevent formation of the metal silicide layer
71, it is more preferable to make the layout of the word shunt
region 61C like that in FIGS. 101 and 102. In the following,
mainly, differences between the layout of the word shunt region 61C
according to the present embodiment (i.e., the layout in FIG. 101)
and the layout of the word shunt region 61C according to the third
embodiment (i.e., the layout in FIG. 37) will be described.
[0511] In the word shunt region 61C, the contact portion SGa of the
select gate electrode SG is extended in a direction (preferably, an
orthogonal direction; the Y direction here) crossing the extending
direction (here, the X direction) of the select gate electrode SG.
As the contact portion SGa is extended in the direction crossing
(preferably, orthogonal to) the extending direction of the select
gate electrode SG, the width of the select gate electrode SG (width
in the direction orthogonal to the extending direction of the
select gate electrode SG) is wide in the region in which the
contact portions SGa are arranged as compared with the region in
which the contact portion SGa are not arranged. In this manner, the
contact holes CT3 and the plugs PG3 filling the contact holes CT3
can be adequately formed on the contact portions SGa of the select
gate electrodes SG. This point is common between the third
embodiment and the present embodiment.
[0512] Meanwhile, as understood from a comparison between FIG. 37
and FIG. 101, regarding the select gate electrode SG, the extending
directions of the contact portion SGa are opposite (reversed) in
the third embodiment and the present embodiment.
[0513] More specifically, in the third embodiment, as illustrated
in FIG. 37, the contact portion MG1a of the memory gate electrode
MG1 has been extended in a direction to be away from the select
gate electrode SG being adjacent via the insulating film 65, and
the contact portion SGa of the select gate electrode SG has been
extended toward the memory gate electrode MG1 being adjacent via
the insulating film 65. Therefore, in the third embodiment,
regarding the memory gate electrode MG and the select gate
electrode SG adjacent to each other via the insulating film 65, the
direction in which the contact portion SGa has been extended from
the select gate electrode SG is the same as the direction in which
the contact portion MG1a has been extended from the memory gate
electrode MG1. That is, when viewed in a plane (i.e., in a plane
parallel to the main surface of the semiconductor substrate 61), in
the third embodiment, as illustrated in FIG. 37, the direction in
which the contact portion SGa protrudes (bulges) from the select
gate electrode SG has been the same as the direction in which the
contact portion MG1a protrudes (bulges) from the memory gate
electrode MG1 in the memory gate electrode MG1 and the select gate
electrode SG adjacent to each other via the insulating film 65.
[0514] On the contrary, in the present embodiment, as illustrated
in FIG. 101, the contact portion MG1a of the memory gate electrode
MG1 is extended in the direction to be away from the select gate
electrode SG being adjacent via the insulating film 65, and
meanwhile, the contact portion SGa of the select gate electrode SG
is extended in the direction to be away from the memory gate
electrode MG1 being adjacent via the insulating film 65. From
another point of view, in the present embodiment, as illustrated in
FIG. 101, the contact portion SGa of the select gate electrode SG
(for example, one of the select gate electrodes SG1 and SG2 in FIG.
101) is extended in a direction to be close to another select gate
electrode SG (for example, the other one of the select gate
electrodes SG1 and SG2) being adjacent via a drain region
(corresponding to the drain semiconductor region MD described
above). Therefore, in the present embodiment, regarding the memory
gate electrode MG1 and the select gate electrode SG adjacent to
each other via the insulating film 65, the direction in which the
contact portion SGa is extended from the select gate electrode SG
is opposite (reversed) to the direction in which the contact
portion MG1a is extended from the memory gate electrode MG1. More
specifically, when viewed in a plane (i.e., a plane parallel to the
main surface of the semiconductor substrate 61), in the present
embodiment, as illustrated in FIG. 101, the direction in which the
contact portion SGa protrudes (bulges) from the select gate
electrode SG is opposite (reversed) to the direction in which the
contact portion MG1a protrudes (bulges) from the memory gate
electrode MG1 in the memory gate electrode MG1 and the select gate
electrode SG adjacent to each other via the insulating film 65.
[0515] Also, while a plurality of the select gate electrodes SG
extended in the X directions are arranged next to each other at the
main surface of the semiconductor substrate 61, in the select gate
electrodes SG (the select gate electrode SG1 and the select gate
electrode SG2 when FIG. 101 is applied) being adjacent to each
other via the drain region (corresponding to the drain
semiconductor region MD described above), the contact portions SGa
are arranged to be shifted in the extending direction of the select
gate electrodes SG (here, the X direction). More specifically, as
illustrated in FIG. 101, the arranged position of the contact
portion SGa of the select gate electrode SG1 and the arranged
position of the contact portion SGa of the other select gate
electrode SG2 being adjacent to the select gate electrode SG1 via
the drain region (corresponding to the drain semiconductor region
MD described above) are arranged to be misaligned in the extending
direction (here, the X direction) of the select gate electrodes SG1
and SG2. In other words, a plurality of the select gate electrode
SG and a plurality of the memory gate electrode MG1 are extended on
the semiconductor substrate 61, and the select gate electrodes SG
(when FIG. 101 is applied, the select gate electrode SG1 and the
select gate electrode SG2) being adjacent to each other in the
direction (here, the Y direction) crossing the extending direction
of the select gate electrode SG (here, the X direction) without
interposing the memory gate electrode MG1 have forming positions of
the contact portions SGa misaligned in the extending direction of
the select gate electrode SG (here, the X direction). Note that,
when a plurality of the select gate electrodes SG and a plurality
of the memory gate electrodes MG1 are extended on the semiconductor
substrate 61, the select gate electrodes SG adjacent to each other
via the drain region (corresponding to the drain semiconductor
region MD described above) are the same as the select gate
electrodes SG adjacent to each other in the direction (here, the Y
direction) crossing the extending direction of the select gate
electrode SG (here, the X direction) without interposing the memory
gate electrode MG1.
[0516] The contact portion SGa of the select gate electrode SG1 is
extended in a direction from the select gate electrode SG1 to be
closer to the select gate electrode SG2, and the contact portion
MG1a of the select gate electrode SG2 is extended from the select
gate electrode SG2 in a direction to be closer to the select gate
electrode SG1. Thus, as illustrated in FIG. 101, as the arranged
position of the contact portion SGa of the select gate electrode
SG1 and the arranged position of the contact portion SGa of the
select gate electrode SG2 are misaligned in the extending direction
of the select gate electrodes SG1 and SG2 (here, the X direction),
a short-circuiting between the contact portion SGa of the select
gate electrode SG1 and the contact portion SGa of the select gate
electrode SG2 occurring when the contact portions SGa are adjacent
can be adequately prevented.
[0517] In addition, in the present embodiment, as illustrated in
FIGS. 102 to 104, the insulating films 81 and 82 are formed on the
select gate electrode SG also in the word shunt region 61C (i.e.,
also on the device isolation region 62), and thus the metal
silicide layer 71 is not formed to the upper portion of the select
gate electrode SG. Meanwhile, this is about the select gate
electrode SG other than the contact portion SGa, and thus the metal
silicide layer 71 is partially formed to the upper portion of the
contact portion SGa. Hereinafter, the metal silicide layer 71
formed to the upper portion of the contact portion SGa of the metal
silicide layers 71 will be called a metal silicide layer 71a.
[0518] In the present embodiment, the other region than the contact
portion contact portion SGa of the select gate electrode SG is
covered by the insulating films 81 and 82, so that the metal
silicide layer 71 is not formed on the select gate electrode SG.
Meanwhile, the contact portion SGa in the select gate electrode SG
has at least a portion not covered by the insulating films 81 and
82, and the metal silicide film 71a is formed in a region at an
upper surface of the contact portion SGa not covered by the
insulating films 81 and 82. That is, at least a part of the upper
surface of the contact portion SGa is not covered by the insulating
films 81 and 82 and the metal silicide layer 71a is formed to the
part, and the metal silicide layer 71 is not formed to a part of
the upper surface of the select gate electrode SG covered by the
insulating films 81 and 82.
[0519] And, the contact hole CT3 is formed to the insulating film
(interlayer insulating film) 72 on the contact portion SGa of the
select gate electrode SG, and the plug (conductor portion) PG3
buried in the contact hole CT3 and the contact portion SGa of the
select gate electrode SG are electrically connected. Thus, the
metal silicide layer 71a formed to the upper portion of the contact
portion SGa of the select gate electrode SG is exposed from the
contact hole CT3, and contacted with the plug PG3. In the present
embodiment, as the metal silicide layer 71 is not formed to the
select gate electrode SG other than the contact portion SGa,
occurrence of a short-circuiting failure between the select gate
electrode SG and the memory gate electrode MG1 can be adequately
prevented, and also, as the metal silicide layer 71 (i.e., the
metal silicide layer 71a) is locally formed to the upper portion of
the contact portion SGa, a contact resistance of the plug PG3 and
the select gate electrode SG can be reduced.
[0520] Further, as illustrated in FIGS. 102 and 104, the metal
silicide layer 71a formed to the upper portion of the contact
portion SGa of the select gate electrode SG is not adjacent (not
adjacent via the insulating film 65) to the memory gate electrode
MG1, and is separated from the memory gate electrode MG1 by a
distance longer than the thickness of the insulating film 65. That
is, in the region in which the contact portion SGa is arranged, the
upper surface of the select gate electrode SG is covered by the
insulating films 81 and 82 in a vicinity of an edge portion of the
select gate electrode SG on the side adjacent to the memory gate
electrode MG1 via the insulating film 65 (i.e., the metal silicide
layer 71 is not formed). Therefore, when viewed in a plane, as
illustrated in FIG. 102, the region in which the metal silicide
layer 71a is formed at the upper surface of the contact portion SGa
of the select gate electrode SG is separated from the memory gate
electrode MG1 interposing the region covered by the insulating
films 81 and 82 at the upper surface of the select gate electrode
SG (the region in which the metal silicide layer 71 is not formed).
Therefore, in the upper surface of the select gate electrode SG,
the region in the vicinity of the edge portion on the side adjacent
to the memory gate electrode MG1 via the insulating film 65 is
covered by the insulating films 81 and 82, regardless of whether
the contact portion SGa is arranged in the region or not. And, in
the upper surface of the select gate electrode SG, between the
region in which the metal silicide layer 71 (here, the metal
silicide layer 71a) is formed and the edge portion on the side
adjacent to the memory gate electrode MG1, the region covered by
the insulating films 81 and 82 is interposed. In this manner, the
metal silicide layer 71a formed to the upper portion of the contact
portion SGa of the select gate electrode SG will not be adjacent to
the memory gate electrode MG1 (the metal silicide layer 71 above)
interposing the thin insulating film 65, and thus occurrence of a
short-circuiting failure between the select gate electrode SG and
the memory gate electrode MG1 can be further adequately
prevented.
[0521] Other configurations of the semiconductor device according
to the present embodiment are substantially the same as the third
embodiment, and thus descriptions thereof will be omitted.
[0522] Next, a manufacturing process of the semiconductor device
according to the present embodiment will be described. FIGS. 105 to
126 are cross-sectional views of a main part or plan views of a
main part during the manufacturing process of the semiconductor
device according to the present embodiment. Among FIGS. 105 to 126,
FIGS. 105, 107 to 109, 112, 113, 115, 116, 118 to 121, and 123 to
126 are cross-sectional views of a main part, and FIGS. 106, 110,
111, 114, 117, and 122 are plan views of a main part.
[0523] As the manufacturing method of the semiconductor device
according to the present embodiment is basically the same as that
of the third embodiment described above, differences from the
above-described third embodiment will be mainly described. Some
parts of the process not particularly mentioned can be performed in
the same manner as those of the manufacturing method of the third
embodiment.
[0524] In the present embodiment, after performing the step of
forming the silicon film 64 in the step S5 described above in the
same manner as the third embodiment, and before performing the
patterning step of the step S6 described above, the insulating
films 81 and 82 are sequentially formed on the silicon film 64 as
illustrated in FIG. 105 (cross-sectional view taken along the line
F1-F1). The insulating film 81 is formed of, for example, a silicon
oxide film, and the insulating film 82 is formed of, for example, a
silicon nitride film, and each of the insulating films 81 and 82
can be formed to the entire of the upper surface of the silicon
film 64. At this moment, the insulating film 81 is formed on the
silicon film 64, and the insulating film 82 is formed on the
insulating film 81. The insulating films 81 and 82 can be formed
by, for example, a CVD method. The insulating film 82 is formed to
be thicker than the insulating film 81.
[0525] Next, on the insulating film 82, a photoresist pattern
(resist pattern) RP1a is formed using photolithography technology.
The photoresist pattern RP1a corresponds to the photoresist pattern
RP1 in the third embodiment described above, and has a pattern
corresponding to the select gate electrodes SG to be formed.
[0526] Next, using the photoresist pattern RP1a as an etching mask,
as illustrated in FIG. 106 (plan view of a main part), FIG. 107
(cross-sectional view taken along the line F1-F1), and FIG. 108
(cross-sectional view taken along the line G1-G1), the insulating
film 82, the insulating film 81, and the silicon film 64 are
pattered by etching (dry etching). The patterning step of the step
S6 has patterned the silicon film 64 in the third embodiment.
Meanwhile, in the present embodiment, a stacked film of the silicon
film 64, insulating film 81, and insulating film 82 is patterned,
and this point is different from the third embodiment. While the
select gate electrode SG is formed of the pattered silicon film 64,
in the present embodiment, at this stage, the insulating film 81
and the insulating film 82 in the same planar shape (pattern shape)
as the select gate electrode SG are formed. Thus, the select gate
electrode SG is formed as a stacked film pattern of the select gate
electrode SG and the insulating films 81 and 82 on the select gate
electrode SG and is extended on the semiconductor substrate 61.
Thereafter, the photoresist pattern RP1a is removed. FIGS. 107 and
108 correspond to the stage in which the photoresist pattern RP1a
has been removed. While FIG. 106 is a plan view of the same region
as the FIG. 101, to facilitate understanding, only the stacked
pattern of the select gate electrode SG and the insulating films 81
and 82 is illustrated.
[0527] Also, as another aspect, after patterning the insulating
film 82 by etching (dry-etching) using the photoresist pattern RP1a
as an etching mask and then removing the photoresist pattern RP1a,
the insulating film 81 and the silicon film 64 may be patterned by
etching (dry etching) using the insulating film 82 as an etching
mask (hard mask).
[0528] The select gate electrode SG integrally includes the contact
portion SGa arranged in the word shunt region 61C. In addition,
while it is not illustrated because FIG. 107 illustrates the word
shunt region 61C, the insulating film 63 remains under the select
gate electrode SG in the memory cell region 61A and becomes a gate
insulating film of the select transistor as observed from FIG. 100
described above.
[0529] Next, in the present embodiment, before performing the step
of forming the insulating film 65 of the step S7 described above, a
step of forming the photoresist pattern RP4 and a step of etching
the insulating film 82 and insulating film 81 using the photoresist
pattern RP4 as an etching mask are performed. This process will be
specifically described.
[0530] First, as illustrated in FIG. 109 (cross-sectional view
taken along the line G1-G1), the photoresist pattern (resist
pattern) RP4 is formed on the main surface of the semiconductor
substrate 61 using photolithography technology. The photoresist
pattern RP4 is formed to cover the whole of the memory cell region
61A and the whole of the source dummy region 61B, and, in the word
shunt region 61C, the select gate electrode SG other than the
contact portion SGa is covered, and at least a part of the contact
portion SGa is not covered (is exposed). That is, the photoresist
pattern RP4 has an opening portion OP1 in the word shunt region
61C, and at least a part of the contact portion SGa is overlapped
with the opening portion OP1 in a plane, and the select gate
electrode SG other than the contact portion SGa is not overlapped
with the opening portion OP1 in a plane.
[0531] Next, using the photoresist pattern RP4 as an etching mask,
the insulating film 82 exposed from the opening portion OP1 of the
photoresist pattern RP4 is removed by etching (dry etching). At
this moment, the insulating film 81 works as an etching stopper
upon etching the insulating film 82. Thereafter, the insulating
film is further removed by etching (dry etching). Then, the
photoresist pattern RP4 is removed. In this manner, as illustrated
in FIGS. 109 and 110, the select gate electrode SG other than the
contact portion SGa is covered by the insulating films 81 and 82,
and at least a part of the contact portion SGa not being covered by
the insulating films 81 and 82 is exposed. Note that, while FIG.
110 is a plan view of the same region as FIG. 101 etc, the pattern
of the select gate electrodes SG is illustrated by solid lines and
positions of the opening portions OP1 are illustrated by dotted
lines, and the regions in which the upper surfaces of the select
gate electrodes SG are exposed as the insulating films 82 and 81
are removed are illustrated with hatching.
[0532] In the present embodiment, as described above, the contact
portion SGa of the select gate electrode SG (for example, one of
the select gate electrodes SG1 and SG2) is extended in a direction
to be closer to another select gate electrode SG (for example, the
other one of the select gate electrodes SG1 and SG2 in FIG. 110)
being adjacent via a drain region (corresponding to the drain
semiconductor region MD described above). Therefore, the select
gate electrodes SG (for example, the select gate electrodes SG1 and
SG2 in FIG. 110) being adjacent to each other via a drain region
(corresponding to the drain semiconductor region MD described
above) have the contact portions SGa extended in a direction to be
closer to one another, and they protrude to be closer to one
another when viewed in a plane.
[0533] Therefore, by arranging the opening portion OP1 of the
photoresist pattern RP4 between the adjacent select gate electrodes
SG (for example, between the select gate electrodes SG1 and SG2 in
FIG. 110) via a drain region (corresponding to the drain
semiconductor region MD), it becomes easy and adequate to achieve
the configuration that at least a part of the contact portion SGa
is overlapped with the opening portion OP1 in a plane and the
select gate electrode SG other than the contact portion SGa is not
overlapped with the opening portion OP1 in a plane. In this manner,
without removing the insulating films 81 and 82 on the select gate
electrode SG other than the contact portion SGa, the insulating
films 81 and 82 on at least the part of the contact portion SGa can
be adequately removed.
[0534] In the upper surface of the select gate electrode SG, the
metal silicide layer 71 is formed in the region where the upper
surface of the select gate electrode SG is exposed as the
insulating films 81 and 82 are removed (i.e., the region with
hatching in FIG. 110), and the other region in the upper surface of
the select gate electrode SG (i.e., the region without hatching in
the select gate electrode SG in FIG. 110) is still covered by the
insulating films 81 and 82 and thus the metal silicide layer 71 is
not formed thereafter. Therefore, in the upper surface of the
select gate electrode SG, the region where the insulating films 81
and 82 are removed is coincident with the region where the metal
silicide layer 71 is formed thereafter.
[0535] Also, as understood from FIG. 110, in the upper surface of
the contact portion SGa, while the insulating films 81 and 82 are
removed from a region separated from an edge portion on the side
being adjacent to the memory gate electrode MG1 by a predetermined
distance L.sub.3 or more, and the metal silicide layer 71 is formed
in the region thereafter, it is preferable that, in the contact
portion SGa, the insulating films 81 and 82 are left in a region
within the predetermined distance L.sub.3 from the edge portion on
the side being adjacent to the memory gate electrode MG1 and the
metal silicide layer 71 is not formed in the region thereafter.
That is, it is preferable to leave not only the insulating films 81
and 82 on the upper surface of the select gate electrode SG other
than the contact portion SGa, but also leave the insulating films
81 and 82 in a vicinity of the edge portion on the side adjacent to
the memory gate electrode MG1 thereafter. In this manner, as
illustrated in FIGS. 102 and 104, the region in which the metal
silicide layer 71 is formed at the upper surface of the contact
portion SGa of the select gate electrode SG is separated from the
memory gate electrode MG1 interposing the region covered by the
insulating films 81 and 82 (region in which the metal silicide
layer 71 is not formed) at the upper surface of the select gate
electrode SG therebetween.
[0536] Moreover, when forming the photoresist pattern RP4, the
peripheral circuit forming region described above is exposed
without being covered by the photoresist pattern RP4. Thus, the
insulating film 82 and the insulating film 81 on the silicon film
64 in the peripheral circuit forming region can be removed in the
same step as the etching step of removing the insulating films 82
and 81 on the contact portion SGa in the word shunt region 61C. In
this manner, using the silicon film 64 remaining in the peripheral
circuit forming region, it becomes easy to later form gate
electrodes of MISFETs forming the peripheral circuit.
[0537] Next, in the same manner as the third embodiment, as
illustrated in FIGS. 111, 112 (cross-sectional view taken along the
line F1-F1), and 113 (cross-sectional view taken along the line
G1-G1), the insulating film 65 is formed in the step S7 described
above, and the silicon film 66 is formed in the step S8 described
above. Then, after forming the photoresist pattern RP2 on the
silicon film 66 in the step S9 described above, the silicon film 66
exposed from the photoresist pattern RP2 is etched back by an
anisotropic etching. Note that, while FIG. 111 is a plan view of
the same region as FIG. 101 etc., the pattern of the select gate
electrodes SG and the pattern of the photoresist pattern RP2 are
illustrated, hatching is added to the photoresist pattern RP2, and
the silicon film 66 and the insulating films 65, 81, and 82 are
transparent.
[0538] In this manner, as illustrated in FIGS. 114, 115
(cross-sectional view taken along the line F1-F1), and 116
(cross-sectional view taken along the line G1-G1), in the both
sidewalls of the stacked pattern of the select gate electrode SG
and the insulating films 81 and 82, the silicon film 66 remains in
a sidewall shape on one of the sidewalls via the insulating film
65, thereby forming the memory gate electrode MG1, and, the silicon
film 66 remains in a sidewall shape on the other sidewall via the
insulating film 65, thereby forming the silicon spacer SP1. Also,
as the silicon film 66 remains unetched under the photoresist
pattern RP2 which works as an etching mask, the contact portion
MG1b is formed.
[0539] Then, the photoresist pattern RP2 is removed. FIGS. 114 to
116 correspond to the stage in which the photoresist pattern RP2
has been removed. Note that, while FIG. 114 is a plan view of the
same region as FIG. 101 etc. described above, patterns of the
select gate electrodes SG and the remaining silicon films 66 (i.e.,
the silicon spacer SP1, memory gate electrode MG1, and contact
portion MG1b) are illustrated, where hatching is added to the
remaining silicon films 66 (i.e., the silicon spacer SP1, memory
gate electrode MG1, and contact portion MG1b), and the insulating
films 65, 81, and 82 are transparent.
[0540] Since the etch-back step of the step S9 is anisotropic
etching, the formed contact portion MG1b has the same pattern shape
(planar shape) as the photoresist pattern RP2. In the word shunt
region 61C, since the photoresist pattern RP2 is formed to cross
(preferably, be orthogonal to) the select gate electrode SG, the
contact portion MG1b is formed to cross (preferably, be orthogonal
to) the select gate electrode SG.
[0541] Also in the present embodiment, the layout (planar shape) of
the photoresist pattern RP2 may be made the same as the third
embodiment (FIG. 58 described above), and thus the layout (planar
shape) of the contact portion MG1b formed thereby may be the same
as the third embodiment (FIG. 58 described above). That is, in the
third embodiment, as illustrated in FIGS. 58 and 60, the
photoresist pattern RP2 has been formed to cross two select gate
electrodes SG (i.e., stride across the two select gate electrodes
SG) being next to each other via a drain region (corresponding to
the drain semiconductor region MD described above). Therefore, the
contact portion MG1b has been formed to cross two select gate
electrodes SG (i.e., stride across the two select gate electrodes
SG) being next to each other via the drain region (corresponding to
the drain semiconductor region MD described above). The layout
(planar shape) of the photoresist pattern RP2 and the contact
portion MG1b according to the third embodiment can be used in the
present embodiment.
[0542] Meanwhile, the layout (planar shape) of the photoresist
pattern RP2 and the contact portion MG1b can be made as illustrated
in FIGS. 111 and 114. More specifically, as illustrated in FIGS.
111 and 112, the photoresist pattern RP2 is formed to cross one
select gate electrode SG (i.e., stride across the one select gate
electrode SG), and in this manner, as illustrated in FIGS. 114 and
115, the contact portion MG1b can be formed to cross one select
gate electrode SG (i.e., stride across the one select gate
electrode SG).
[0543] Regarding both the layout of FIGS. 58 and 60 and the layout
of FIGS. 111 and 114, what is important is to form the photoresist
pattern RP2 to cross (preferably, to be orthogonal to) each select
gate electrode SG, and accordingly, to form the contact portion
MG1b to cross (preferably, to be orthogonal to) each select gate
electrode SG in the word shunt region 61C. While the number of the
select gate electrodes SG strode (crossed) by each contact portion
MG1b can be three or more, in consideration of the layout of the
photoresist pattern RP2, two is preferable as illustrated in FIGS.
58 and 60 or one is preferable as illustrated in FIGS. 111 and 114.
Note that, in FIG. 114, a layout symmetrical about the line S-S is
also formed on the left side of the layout illustrated in FIG. 114,
and thus the contact portion MG1b is formed on the left side of
each contact portion SGa formed on the left side, and consequently,
the numbers of the contact portions SGa and the contact portions
MG1a eventually formed are the same in both layouts of FIGS. 58 and
60 and FIGS. 111 and 114.
[0544] Next, in the same manner as the third embodiment, the step
S10 described above is performed. That is, in the same manner as
the third embodiment, as illustrated in FIGS. 117, 118
(cross-sectional view taken along the line F1-F1), and 119
(cross-sectional view taken along the line G1-G1), the photoresist
pattern RP3 covering the memory gate electrode MG1 and exposing the
silicon spacer SP1 is formed on the semiconductor substrate 61.
Thereafter, as illustrated in FIGS. 120 (cross-sectional view taken
along the line F1-F1), 121 (cross-sectional view taken along the
line G1-G1), and 122, the silicon spacer SP1 is removed by
performing isotropic etching using the photoresist pattern RP3 as
an etching mask. Then, the photoresist pattern RP3 is removed.
[0545] Requirements of the layout of the photoresist pattern RP3
and conditions of the isotropic etching in the step S10 can be
defined in the same manner as the third embodiment, and thus
descriptions thereof will be omitted. Also, the silicon spacer SP1
is removed by the isotropic etching of the step S10 and the memory
gate electrode MG1 in a sidewall shape remains, so that the contact
portion MG1b becomes the contact portion MG1a, and this point is
also the same as the third embodiment, and thus, descriptions
thereof will be omitted. Note that, while FIG. 117 is a plan view
of the same region as FIG. 101 etc. described above, the insulating
films 65, 81, and 82 are transparent, and hatching is added to the
photoresist pattern RP3, and the silicon spacer SP1 and the contact
portion MG1b being exposed without being covered by the photoresist
pattern RP3. In addition, while FIG. 122 is a plan view of the same
region as FIG. 101 etc. described above, the stage where the
photoresist pattern RP3 has been removed is illustrated, the
insulating films 65, 81, and 82 are transparent, and hatching is
added to the remaining silicon film 66 (i.e., the memory gate
electrode MG1 and contact portion MG1a).
[0546] Next, in the same manner as the third embodiment, in the
step S11 described above, as illustrated in FIGS. 123
(cross-sectional view taken along the line F1-F1) and 124
(cross-sectional view taken along the line G1-G1), exposed parts of
the insulating film 65 not covered by the memory gate electrode MG1
(including the contact portion MG1a) are removed. Then, though not
illustrated here, in the same manner as the third embodiment, the
n.sup.--type semiconductor regions 67a and 67b are formed in the
memory cell region 61A (region corresponding to FIG. 100 described
above) in the step S12 described above. Next, in the same manner as
the third embodiment, the sidewall insulating films 68 are formed
in the step S13 described above. Then, though not illustrated here,
in the same manner as the third embodiment, the n.sup.+-type
semiconductor regions 69a and 69b are formed in the memory cell
region 61A (region corresponding to FIG. 100 described above) in
the step S14 described above.
[0547] Next, if necessary, etching (wet etching using, for example,
diluted hydrofluoric acid) is performed to clean (expose) the
contact portion SGa (region not covered by the insulating films 81
and 82) of the select gate electrode SG, the memory gate electrode
MG1, and the upper surface (surface) of the n'-type semiconductor
regions 69a and 69b. The etching here can be a light etching to the
extent of removing natural silicon oxide film.
[0548] Next, in the same manner as the third embodiment, using
salicide technology, as illustrated in FIGS. 125 (cross-sectional
view taken along the line F1-F1), 126 (cross-sectional view taken
along the line G1-G1), and FIG. 100 described above, the metal
silicide layers 71 are formed to the contact portion SGa (region
not covered by the insulating films 81 and 82) of the select gate
electrode SG, memory gate electrode MG1, and the upper portion
(upper surface, surface, upper-layer portion) of the n.sup.+-type
semiconductor regions 69a and 69b, respectively. The step of
forming the metal silicide layer 71 is basically same as that of
the third embodiment except for that the metal silicide layer 71 is
not formed to the part of the upper surface of the select gate
electrode SG covered by the insulating films 81 and 82.
[0549] More specifically, a metal film (not illustrated) is formed
(deposited) on the contact portion SGa (region not covered by the
insulating films 81 and 82) of the select gate electrode SG, the
memory gate electrode MG1, and the whole of the main surface of the
semiconductor substrate 61 including portions on the upper surfaces
(surfaces) of the n.sup.+-type semiconductor regions 69a and 69b to
cover the select gate electrode SG, memory gate electrode MG1, and
sidewall insulating film 68. Then, by performing a thermal
treatment to the semiconductor substrate 61, the contact portion
SGa (region not covered by the insulating films 81 and 82) of the
select gate electrode SG, the memory gate electrode MG1, and the
upper layer portions of the n.sup.+-type semiconductor regions 69a
and 69b are reacted with the metal film, thereby forming the metal
silicide layers 71. Thereafter, unreacted part of the metal film is
removed. FIGS. 125 and 126 illustrate cross-sectional views of this
stage.
[0550] In this manner, the metal silicide layer 71 is formed by
performing a so-called salicide process. Meanwhile, in the third
embodiment described above, the metal film is formed in a state in
which the upper surface of the whole of the select gate electrode
SG is exposed and the reaction with the metal film is made, so that
the metal silicide film 71 is formed to the upper surface of the
whole of the select gate electrode SG. Meanwhile, in the present
embodiment, since the metal film is formed while the select gate
electrode SG other than the contact portion SGa is covered by the
insulating films 81 and 82, the metal silicide 71 is not formed to
the upper portion of the select gate electrode SG other than the
contact portion SGa. And, since the metal film is formed while at
least a part of the contact portion SGa of the select gate
electrode SG is not covered by the insulating films 81 and 82, as
illustrated in FIG. 126, the metal silicide layer 71 is formed to
the upper portion of at least the part of the contact portion SGa
of the select gate electrode SG. Moreover, in the same manner as
the third embodiment, also in the present embodiment, as
illustrated in FIG. 125, the metal silicide layers 71 are formed to
the portions not covered by the sidewall insulating films 68 in the
upper layer of the contact portion MG1a of the memory gate
electrode MG1.
[0551] The following steps are the same as those of the third
embodiment. That is, as illustrated in FIGS. 100, 103, and 104, in
the same manner as the third embodiment, the insulating film
(interlayer insulating film) 72 is formed, the contact holes CT are
formed in the insulating film 72, the plugs PG are formed in the
contact holes CT, the insulating film (interlayer insulating film)
74 is formed on the insulating film 72 in which the plugs PG are
buried, and the wiring MM1 is formed to the insulating film 74.
[0552] Also in the present embodiment, the same effects as those
described in the third embodiment can be obtained except for the
effects uniquely obtained by the present embodiment described
above. In addition, the technique of the fourth embodiment can be
also applied to the present embodiment.
[0553] In the foregoing, the invention made by the inventors of the
present invention has been concretely described based on the
embodiments. However, it is needless to say that the present
invention is not limited to the foregoing embodiments and various
modifications and alterations can be made within the scope of the
present invention.
[0554] The present invention is effectively applied to a
semiconductor device and manufacturing technology of the same.
* * * * *