U.S. patent application number 14/992067 was filed with the patent office on 2016-09-08 for method of manufacturing semiconductor device.
This patent application is currently assigned to Renesas Electronics Corporation. The applicant listed for this patent is Renesas Electronics Corporation. Invention is credited to Satoshi Abe, Hiraku Chakihara, Yoshiyuki Kawashima, Kentaro Saito, Kyoko Umeda.
Application Number | 20160260795 14/992067 |
Document ID | / |
Family ID | 56845518 |
Filed Date | 2016-09-08 |
United States Patent
Application |
20160260795 |
Kind Code |
A1 |
Abe; Satoshi ; et
al. |
September 8, 2016 |
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Abstract
In a semiconductor device including a nonvolatile memory, a
novel stacked capacitive element is provided. The semiconductor
device includes the stacked capacitive element including a first
capacitive electrode made of an n-type well region formed in a
semiconductor substrate, a second capacitive electrode formed so as
to overlap the first capacitive electrode via a first capacitive
insulating film, a third capacitive electrode formed so as to
overlap the second capacitive electrode via a second capacitive
insulating film, and a fourth capacitive electrode formed so as to
overlap the third capacitive electrode via a third capacitive
insulating film. To the first and third capacitive electrodes, a
first potential is applied and, to the second and fourth capacitive
electrodes, a second potential different from the first potential
is applied.
Inventors: |
Abe; Satoshi; (Tokyo,
JP) ; Chakihara; Hiraku; (Tokyo, JP) ; Umeda;
Kyoko; (Tokyo, JP) ; Kawashima; Yoshiyuki;
(Tokyo, JP) ; Saito; Kentaro; (Tokyo, JP) |
|
Applicant: |
Name |
City |
State |
Country |
Type |
Renesas Electronics Corporation |
Tokyo |
|
JP |
|
|
Assignee: |
Renesas Electronics
Corporation
Tokyo
JP
|
Family ID: |
56845518 |
Appl. No.: |
14/992067 |
Filed: |
January 11, 2016 |
Current U.S.
Class: |
1/1 |
Current CPC
Class: |
H01L 27/0629 20130101;
H01L 27/11573 20130101; H01L 28/60 20130101 |
International
Class: |
H01L 49/02 20060101
H01L049/02; H01L 27/115 20060101 H01L027/115 |
Foreign Application Data
Date |
Code |
Application Number |
Mar 3, 2015 |
JP |
2015-040931 |
Claims
1. A semiconductor device, comprising: (a) a semiconductor
substrate having a main surface; (b) a first capacitive electrode
made of a semiconductor region formed in the semiconductor
substrate; (c) a first capacitive insulating film formed over the
main surface of the semiconductor substrate so as to overlap the
first capacitive electrode in plan view; (d) a second capacitive
electrode formed over the first capacitive insulating film so as to
overlap the first capacitive electrode in plan view; (e) a second
capacitive insulating film formed over the second capacitive
electrode so as to cover the second capacitive electrode; (f) a
third capacitive electrode formed over the second capacitive
insulating film so as to overlap the second capacitive electrode in
plan view; (g) a third capacitive insulating film formed over the
third capacitive electrode so as to cover the third capacitive
electrode; and (h) a fourth capacitive electrode formed over the
third capacitive insulating film so as to overlap the third
capacitive electrode in plan view, wherein a capacitor element is
included in which a first potential is applied to each of the first
and third capacitive electrodes and a second potential different
from the first potential is applied to each of the second and
fourth capacitive electrodes.
2. The semiconductor device according to claim 1, wherein the
second capacitive insulating film is made of a laminated film
including a first silicon dioxide film, a first silicon nitride
film formed over the first silicon dioxide film, and a second
silicon dioxide film formed over the first silicon nitride
film.
3. The semiconductor device according to claim 1, wherein the third
capacitive insulating film includes a second silicon nitride
film.
4. The semiconductor device according to claim 1, wherein the
second capacitive electrode has a first upper surface and a first
side surface, and wherein the second capacitive insulating film and
the third capacitive electrode are formed so as to cover the first
upper surface and the first side surface.
5. The semiconductor device according to claim 1, wherein the third
capacitive electrode has a second upper surface and a second side
surface, and wherein the third capacitive insulating film and the
fourth capacitive electrode are formed so as to cover the second
upper surface and the second side surface.
6. A semiconductor device, comprising: (a) a semiconductor
substrate having a main surface and a groove formed in the main
surface; (b) a first capacitive electrode made of a semiconductor
region formed in the semiconductor substrate so as to surround the
groove; (c) a first capacitive insulating film formed over a side
wall of the groove; (d) a second capacitive electrode formed over
the first capacitive insulating film so as to be embedded in the
groove; (e) a second capacitive insulating film formed over the
second capacitive electrode so as to cover the second capacitive
electrode; (f) a third capacitive electrode formed over the second
capacitive insulating film so as to overlap the second capacitive
electrode in plan view; (g) a third capacitive insulating film
formed over the third capacitive electrode so as to cover the third
capacitive electrode; and (h) a fourth capacitive electrode formed
over the third capacitive insulating film so as to overlap the
third capacitive electrode in plan view, wherein a capacitor
element is included in which a first potential is applied to each
of the first and third capacitive electrodes and a second potential
different from the first potential is applied to each of the second
and fourth capacitive electrodes.
7. The semiconductor device according to claim 6, wherein the
groove has a width smaller than double a film thickness of the
second capacitive electrode.
8. The semiconductor device according to claim 7, wherein the
second capacitive electrode has an upper end lower in level than
the main surface of the semiconductor substrate.
9. The semiconductor device according to claim 8, wherein an upper
surface of the third capacitive electrode has a recessed portion at
a position corresponding to the groove, and wherein the third
capacitive insulating film and the fourth capacitive electrode are
formed in the recessed portion.
10. The semiconductor device according to claim 9, wherein the
third capacitive electrode has a film thickness smaller than a film
thickness of the fourth capacitive electrode.
11. The semiconductor device according to claim 6, further
comprising: (i) an interlayer insulating film covering the fourth
capacitive electrode and having a first opening reaching the second
capacitive electrode; (j) a first plug electrode formed in the
first opening; and (k) a first metal wire formed over the
interlayer insulating film and coupled to the first plug
electrode.
12. The semiconductor device according to claim 11, wherein the
first plug electrode is located in the groove in plan view.
13. A semiconductor device, comprising: (a) a semiconductor
substrate having a main surface and a groove formed in the main
surface; (b) a first capacitive electrode made of a semiconductor
region formed in the semiconductor substrate so as to surround the
groove; (c) a first capacitive insulating film formed over a side
wall of the groove; (d) a second capacitive electrode formed over
the first capacitive insulating film along the side wall of the
groove; (e) a second capacitive insulating film formed over the
second capacitive electrode along the side wall of the groove; (f)
a third capacitive electrode formed over the second capacitive
insulating film along the side wall of the groove; (g) a third
capacitive insulating film formed over the third capacitive
electrode along the side wall of the groove; and (h) a fourth
capacitive electrode formed over the third capacitive insulating
film in the groove, wherein a capacitor element is included in
which a first potential is applied to each of the first and third
capacitive electrodes and a second potential different from the
first potential is applied to each of the second and fourth
capacitive electrodes.
14. The semiconductor device according to claim 13, wherein the
groove has a width larger than double a sum of a film thickness of
the second capacitive electrode and a film thickness of the third
capacitive electrode.
15. The semiconductor device according to claim 14, wherein the
groove has the width smaller than double a sum of the film
thickness of the second capacitive electrode, the film thickness of
the third capacitive electrode, and a film thickness of the fourth
capacitive electrode.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The disclosure of Japanese Patent Application No.
2015-040931 filed on Mar. 3, 2015 including the specification,
drawings and abstract is incorporated herein by reference in its
entirety.
BACKGROUND
[0002] The present invention relates to a method of manufacturing a
semiconductor device, which can be used appropriately as a method
of manufacturing, e.g., a semiconductor device having a nonvolatile
memory cell.
[0003] A semiconductor device having a memory cell region where a
memory cell or the like in, e.g., a nonvolatile memory or the like
is formed over a semiconductor substrate and a peripheral circuit
region where a peripheral circuit made of, e.g., a MISFET (Metal
Insulator Semiconductor Field Effect Transistor) or the like is
formed over the semiconductor substrate is used widely.
[0004] For example, there is a case where, as a nonvolatile memory,
a memory cell made of a split-gate cell using a MONOS
(Metal-Oxide-Nitride-Oxide-Semiconductor) film is formed. The
memory cell is formed of two MISFETs which are a control transistor
having a control gate electrode and a memory transistor having a
memory gate electrode. The memory transistor has a gate insulating
film made of a laminated film including, e.g., a silicon dioxide
film, a silicon nitride film, and a silicon dioxide film and
referred to as an ONO (Oxide Nitride Oxide) film.
[0005] To perform electric write/erase operations to the
nonvolatile memory, a voltage higher than a power supply voltage
supplied from outside the semiconductor device is required so that
a boosting circuit including a capacitive element is formed in the
peripheral circuit region of the semiconductor device. In addition,
a bypass capacitor (capacitive element) coupled between a power
supply wire (Vcc) and a ground wire (Gnd) of the semiconductor
device so as to stabilize a power supply is also embedded in the
semiconductor device. As such capacitive elements, PIP (Polysilicon
Insulator Polysilicon) capacitive elements each having excellent
consistency with the manufacturing process of the memory cell are
used.
[0006] In Japanese Unexamined Patent Publication No. 2009-99640
(Patent Document 1), a nonvolatile memory cell is disclosed which
includes a control electrode (corresponding to the foregoing
control gate electrode) 15, a memory gate electrode 26, and a
laminated film (corresponding to the foregoing ONO film) provided
between each of the control electrode 15 and a semiconductor
substrate 10 and the memory gate electrode 26. In addition, a PIP
capacitive element including a lower electrode 16, a capacitive
insulating film 27, and an upper electrode 23 is also disclosed.
Also, a manufacturing method is disclosed which forms each of the
control electrode 15 of the memory cell and the lower electrode 16
of the capacitive element of a polysilicon film 14, forms each of
the memory gate electrode 26 of the memory cell and the upper
electrode 23 of the capacitive element of a polysilicon film 20,
and forms the capacitive insulating film 27 of the capacitive
element of the laminated film of the memory cell.
[0007] In Patent Document 1, a structure in which series-coupled
first and second capacitive elements are stacked is also disclosed.
The first capacitive element includes the semiconductor substrate
as a first electrode and the lower electrode 16 formed over the
semiconductor substrate via a gate insulating film 13 as a second
electrode. Thus, a second capacitor including the lower electrode
16, the capacitive insulating film 27, and the upper electrode 23
(third electrode) is formed such that, over the lower electrode 16
(second electrode), the upper electrode 23 is formed via the
capacitive insulating film 27.
[0008] In Japanese Unexamined Patent Publication No. 2003-309182
(Patent Document 2), a capacitor structure in which an uneven
capacitor formation trench 4a is formed in the top surface of a
capacitor formation region to thus increase the surface area of a
capacitor and improve a capacitance per unit area is disclosed and
a manufacturing method thereof is also disclosed.
RELATED ART DOCUMENTS
Patent Documents
[Patent Document 1]
[0009] Japanese Unexamined Patent Publication No. 2009-99640
[Patent Document 2]
[0010] Japanese Unexamined Patent Publication No. 2003-309182
SUMMARY
[0011] The semiconductor device having a nonvolatile memory cell
studied by the present inventors has a nonvolatile memory cell
including a control gate electrode made of a first-layer
polysilicon film and a memory gate electrode including an ONO film
and a second-layer polysilicon film in a memory cell region, while
having a MISFET having a gate electrode made of a third-layer
polysilicon film.
[0012] Accordingly, it becomes necessary to study a semiconductor
device including a nonvolatile memory including a capacitive
element having a novel structure in which a capacitance per unit
area has been improved using polysilicon films in three layers.
[0013] Other problems and novel features of the present invention
will become apparent from a statement in the present specification
and the accompanying drawings.
[0014] According to an embodiment, a semiconductor device includes
a capacitive element. The capacitive element includes a first
capacitive electrode made of a semiconductor region formed in a
semiconductor substrate, a first capacitive insulating film formed
over a main surface of the semiconductor substrate so as to overlap
the first capacitive electrode in plan view, and a second
capacitive electrode made of a first polysilicon film formed over
the first capacitive insulating film so as to overlap the first
capacitive electrode in plan view. The semiconductor device further
includes a second capacitive insulating film formed over the second
capacitive electrode so as to cover the second capacitive electrode
and a third capacitive electrode made of a second polysilicon film
formed over the second capacitive insulating film so as to overlap
the second capacitive electrode in plan view. The semiconductor
device further includes a third capacitive insulating film formed
over the third capacitive electrode so as to cover the third
capacitive electrode, and a fourth capacitive electrode made of a
third polysilicon film formed over the third capacitive insulating
film so as to overlap the third capacitive electrode. To the first
and third capacitive electrodes, a first potential is applied. To
the second and fourth capacitive electrodes, a second potential
different from the first potential is applied.
[0015] According to the embodiment, a semiconductor device can be
provided which includes a nonvolatile memory including a capacitive
element in which a capacitance per unit area has been improved.
BRIEF DESCRIPTION OF THE DRAWINGS
[0016] FIG. 1 is a view showing an example of a layout
configuration of a semiconductor device in Embodiment 1;
[0017] FIG. 2 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1;
[0018] FIG. 3A is a main-portion plan view of a stacked capacitive
element and FIG. 3B is an illustrative view showing a circuit
configuration of the stacked capacitive element;
[0019] FIG. 4 is a process flow chart showing a part of the
manufacturing process of the semiconductor device in Embodiment
1;
[0020] FIG. 5 is a process flow chart showing a part of the
manufacturing process of the semiconductor device in Embodiment
1;
[0021] FIG. 6 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0022] FIG. 7 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0023] FIG. 8 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0024] FIG. 9 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0025] FIG. 10 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0026] FIG. 11 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0027] FIG. 12 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0028] FIG. 13 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof;
[0029] FIG. 14A is a main-portion plan view of a stacked capacitive
element in Embodiment 2 and FIG. 14B is an illustrative view
showing a circuit configuration of the stacked capacitive element
in Embodiment 2;
[0030] FIG. 15A is a main-portion cross-sectional view of the
stacked capacitive element along the line X2-X2 in FIG. 14A and
FIG. 15B is a main-portion cross-sectional view of the stacked
capacitive element along the line Y1-Y1 in FIG. 14A;
[0031] FIG. 16A is a main-portion cross-sectional view of the
stacked capacitive element along the line X2-X2 in FIG. 14A during
the manufacturing process thereof and FIG. 16B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y1-Y1 in FIG. 14A during the manufacturing process
thereof;
[0032] FIG. 17A is a main-portion cross-sectional view of the
stacked capacitive element along the line X2-X2 in FIG. 14A during
the manufacturing process thereof and FIG. 17B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y1-Y1 in FIG. 14A during the manufacturing process
thereof;
[0033] FIG. 18A is a main-portion cross-sectional view of the
stacked capacitive element along the line X2-X2 in FIG. 14A during
the manufacturing process thereof and FIG. 18B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y1-Y1 in FIG. 14A during the manufacturing process
thereof;
[0034] FIG. 19A is a main-portion cross-sectional view of the
stacked capacitive element along the line X2-X2 in FIG. 14A during
the manufacturing process thereof and FIG. 19B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y1-Y1 in FIG. 14A during the manufacturing process
thereof;
[0035] FIG. 20A is a main-portion plan view of a stacked capacitive
element in Embodiment 3 and FIG. 20B is an illustrative view
showing a circuit configuration of the stacked capacitive element
in Embodiment 3;
[0036] FIG. 21A is a main-portion cross-sectional view of the
stacked capacitive element along the line X3-X3 in FIG. 20A, FIG.
21B is a main-portion cross-sectional view of the stacked
capacitive element along the line Y2-Y2 in FIG. 20A, and FIG. 21C
is a main-portion cross-sectional view of the stacked capacitive
element along the line Y3-Y3 in FIG. 20A;
[0037] FIG. 22A is a main-portion cross-sectional view of the
stacked capacitive element along the line X3-X3 in FIG. 20A during
the manufacturing process thereof, FIG. 22B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y2-Y2 in FIG. 20A during the manufacturing process thereof,
and FIG. 22C is a main-portion cross-sectional view of the stacked
capacitive element along the line Y3-Y3 in FIG. 20A during the
manufacturing process thereof;
[0038] FIG. 23A is a main-portion cross-sectional view of the
stacked capacitive element along the line X3-X3 in FIG. 20A during
the manufacturing process thereof, FIG. 23B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y2-Y2 in FIG. 20A during the manufacturing process thereof,
and FIG. 23C is a main-portion cross-sectional view of the stacked
capacitive element along the line Y3-Y3 in FIG. 20A during the
manufacturing process thereof;
[0039] FIG. 24A is a main-portion cross-sectional view of the
stacked capacitive element along the line X3-X3 in FIG. 20A during
the manufacturing process thereof, FIG. 24B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y2-Y2 in FIG. 20A during the manufacturing process thereof,
and FIG. 24C is a main-portion cross-sectional view of the stacked
capacitive element along the line Y3-Y3 in FIG. 20A during the
manufacturing process thereof; and
[0040] FIG. 25A is a main-portion cross-sectional view of the
stacked capacitive element along the line X3-X3 in FIG. 20A during
the manufacturing process thereof, FIG. 25B is a main-portion
cross-sectional view of the stacked capacitive element along the
line Y2-Y2 in FIG. 20A during the manufacturing process thereof,
and FIG. 25C is a main-portion cross-sectional view of the stacked
capacitive element along the line Y3-Y3 in FIG. 20A during the
manufacturing process thereof.
DETAILED DESCRIPTION
[0041] In the following embodiments, if necessary for the sake of
convenience, the embodiments will be each described by being
divided into a plurality of sections or embodiments. However, they
are by no means irrelevant to each other unless particularly
explicitly described otherwise, but are in relations such that one
of the sections or embodiments is a modification, details,
supplementary explanation, and so forth of part or the whole of the
others.
[0042] Also, in the following embodiments, when the number and the
like (including the number, numerical value, amount, range, and the
like) of elements are referred to, they are not limited to specific
numbers unless particularly explicitly described otherwise or
unless they are obviously limited to specific numbers in principle.
The number and the like of the elements may be not less than or not
more than specific numbers.
[0043] Also, in the following embodiments, it goes without saying
that the components thereof (including also elements, steps, and
the like) are not necessarily indispensable unless particularly
explicitly described otherwise or unless the components are
considered to be obviously indispensable in principle. Likewise,
when the shapes, positional relationships, and the like of the
components and the like are referred to in the following
embodiments, the shapes and the like are assumed to include those
substantially proximate or similar thereto and the like unless
particularly explicitly described otherwise or unless it can be
considered that they obviously do not in principle. The same shall
apply in regard to the foregoing numerical value and range.
[0044] The following will describe representative embodiments in
detail on the basis of the drawings. Note that, throughout all the
drawings for illustrating the embodiments, members having the same
functions are designated by the same reference numerals, and a
repeated description thereof is omitted. In the following
embodiments, a description of the same or like parts will not be
repeated in principle unless particularly necessary.
[0045] In the drawings used in the embodiments, hatching may be
omitted even in a cross section for improved clarity of
illustration.
Embodiment 1
Example of Layout Configuration of Semiconductor Chip
[0046] Referring to the drawings, a description will be given of a
semiconductor device (semiconductor integrated circuit device)
having a nonvolatile memory in Embodiment 1. First, a description
will be given of a layout configuration of the semiconductor device
(semiconductor chip) formed with a system including the nonvolatile
memory. FIG. 1 is a view showing an example of a layout
configuration of a semiconductor chip CHP in Embodiment 1. In FIG.
1, the semiconductor chip CHP includes a CPU (Central Processing
Unit) 51, a RAM (Random Access Memory) 52, an analog circuit 53, an
EEPROM (Electrically Erasable Programmable Read Only Memory) 54, a
flash memory 55, and an I/O (Input/Output) circuit 56 to form the
semiconductor device.
[0047] The CPU (circuit) 51 is referred to also as a central
arithmetic operation processing unit, which reads an instruction
from a storage device and performs various arithmetic and control
operations on the basis of the instruction.
[0048] The RAM (circuit) 52 is a memory which allows information
stored therein to be read randomly, i.e., as needed therefrom or
allows information to be stored to be written newly therein. The
RAM 52 is referred to also as a randomly writable/readable memory.
The RAM as an IC memory is subdivided into two types which are a
DRAM (Dynamic RAM) using a dynamic circuit and an SRAM (Static RAM)
using a static circuit. The DRAM is a randomly writable/readable
memory which needs a memory retaining operation. The SRAM is a
randomly writable/readable memory which does not need a memory
retaining operation.
[0049] The analog circuit 53 is a circuit which handles a voltage
or current signal continuously changing with time, i.e., a circuit
which handles an analog signal. The analog circuit 53 includes,
e.g., an amplification circuit, a conversion circuit, a modulation
circuit, an oscillation circuit, a power supply circuit, and the
like. The analog circuit 53 includes a plurality of capacitive
elements.
[0050] An EEPROM 54 and a flash memory 55 are types of nonvolatile
memories which are electrically rewritable in each of a write
operation and an erase operation. The EEPROM 54 and the flash
memory 55 are referred to also as electrically
erasable/programmable read only memories. Each of memory cells in
the EEPROM 54 and the flash memory 55 includes, e.g., a MONOS
transistor or an MNOS (Metal Nitride Oxide Semiconductor)
transistor for storage (memory). For a write operation and an erase
operation to each of the EEPROM 54 and the flash memory 55, a
Fowler-Nordheim tunneling phenomenon is used. Note that the write
operation and the erase operation can also be performed using hot
electrons and hot holes. Each of the write operation and the erase
operation to the EEPROM 54 and the flash memory 55 needs a voltage
higher than an external power supply voltage. Accordingly, each of
the EEPROM 54 and the flash memory 55 includes a boosting circuit
or the like and the boosting circuit includes a plurality of
capacitive elements. The difference between the EEPROM 54 and the
flash memory 55 is that the EEPROM 54 is, e.g., a nonvolatile
memory to which an erase operation can be performed on a byte
basis, while the flash memory 55 is, e.g., a nonvolatile memory to
which an erase operation can be performed on a word-line basis. In
general, in the flash memory 55, a program for executing various
processes in the CPU 51 and the like are stored. On the other hand,
in the EEPROM 54, various data items which are rewritten with high
frequency are stored.
[0051] The I/O circuit 56 is an input/output circuit which outputs
data from within the semiconductor chip CHP to an external device
coupled to the semiconductor chip CHP and inputs data from the
external device coupled to the semiconductor chip CHP into the
semiconductor chip. A bypass capacitor (capacitive element) coupled
between the power supply line (Vcc) of the semiconductor chip CHP
and a ground wire (Gnd) is also placed in the I/O circuit 56.
[0052] In each of the EEPROM 54 and the flash memory 55, memory
cells as a plurality of nonvolatile memories are arranged in rows
and columns. Each of the CPU 1, the RAM 52, the analog circuit 53,
the I/O circuit 56, and the respective portions of the EEPROM 54
and the flash memory 55 which are other than the memory cells are
formed using a high-breakdown-voltage MISFET or a
low-breakdown-voltage MISFET. The high-breakdown-voltage MISFET and
the low-breakdown-voltage MISFET are formed respectively of an
n-type MISFET and a p-type MISFET.
[0053] <Structure of Semiconductor Device>
[0054] FIG. 2 is a main-portion cross-sectional view of the
semiconductor device in Embodiment 1. FIG. 3A is a main-portion
plan view of a stacked capacitive element. FIG. 3B is an
illustrative view showing an example of a circuit configuration of
the stacked capacitive element.
[0055] As shown in FIG. 2, the semiconductor device includes a
semiconductor substrate 1. The semiconductor substrate 1 is a
semiconductor wafer made of p-type monocrystalline silicon having a
specific resistance of, e.g., about 1 to 10 .OMEGA.m or the
like.
[0056] The semiconductor device has, as parts of the main surface
of the semiconductor substrate 1, a memory cell region 1A and
peripheral circuit regions 1B, 1C, and 1D. In the memory cell
region 1A, a memory cell MC is formed. In the peripheral circuit
region 1B, a MISFET QH as a p-channel high-breakdown-voltage MISFET
is formed. In the peripheral circuit region 1C, a MISFET QL as an
n-channel low-breakdown-voltage MISFET is formed. In the peripheral
circuit region 1D, a stacked capacitive element CS is formed. The
memory cell region 1A corresponds to the EEPROM 54 or the flash
memory 55 in FIG. 1. The memory cell region 1A and the peripheral
circuit regions 1B, 1C, and 1D need not be adjacent to each
other.
[0057] First, a configuration of the memory cell MC formed in the
memory cell region 1A will specifically be described.
[0058] In the memory cell region 1A, the semiconductor device has
an active region AR1 and an isolation region IR. The isolation
region IR is for isolating the element formed in the active region
AR. In the isolation region IR, an isolation film 2 is formed. The
active region AR1 is defined, i.e., demarcated by the isolation
region IR and electrically isolated from another active region by
the isolation region IR. In the active region AR1, a p-type well
PW1 is formed. The p-type well PW1 has a p-type conductivity
type.
[0059] As shown in FIG. 2, in the p-type well PW1 of the memory
cell region 1A, the memory cell MC including a memory transistor MT
and a control transistor CT is formed. In the memory cell region
1A, a plurality of the memory cells MC are actually formed in an
array configuration. FIG. 2 shows a cross section of one of the
memory cells MC.
[0060] The memory cell MC is a split-gate memory cell. That is, as
shown in FIG. 2, the memory cell MC includes a control transistor
CT having a control gate electrode CG and a memory transistor MT
coupled in series to the control transistor CT and having a memory
gate electrode MG.
[0061] As shown in FIG. 2, the memory cell MC includes an n-type
semiconductor region MS, an n-type semiconductor region MD, the
control gate electrode CG, and the memory gate electrode MG. Each
of the n-type semiconductor regions MS and MD has an n-type
conductivity type which is opposite to the p-type conductivity
type. The memory cell MC also includes a gate insulating film GIt
formed between the control gate electrode CG and the p-type well
PW1 of the semiconductor substrate 1 and a gate insulating film GIm
formed between the memory gate electrode MG and the p-type well PW1
of the semiconductor substrate 1 and between the memory gate
electrode MG and the control gate electrode CG.
[0062] The control gate electrode CG and the memory gate electrode
MG extend along the main surface of the semiconductor substrate 1
with the gate insulating film GIm being interposed between the
respective side surfaces (side walls) thereof facing each other and
are arranged side by side. The extending directions of the control
gate electrode CG and the memory gate electrode MG are
perpendicular to the surface of the paper sheet with FIG. 2. The
control gate electrode CG is formed over the portion of the p-type
well WP1 which is located between the semiconductor regions MD and
MS, i.e., over the main surface of the semiconductor substrate 1
via the gate insulating film GIt. On the other hand, the memory
gate electrode MG is formed over the portion of the p-type well PW1
which is located between the semiconductor regions MD and MS, i.e.,
over the main surface of the semiconductor substrate 1 via the gate
insulating film GIm. The memory gate electrode MG is located closer
to the semiconductor region MS, while the control gate electrode CG
is located closer to the semiconductor region MD. The control gate
electrode CG and the memory gate electrode MG are gate electrodes
forming the memory cell MC, i.e., the nonvolatile memory.
[0063] The control gate electrode CG and the memory gate electrode
MG are adjacent to each other with the gate insulating film GIm
being interposed therebetween. The memory gate electrode MG is
formed over the side surface, i.e., side wall of the control gate
electrode CG via the gate insulating film GIm into a sidewall
spacer shape. The gate insulating film GIm extends over the two
regions which are the region between the memory gate electrode MG
and the p-type well PW1 of the semiconductor substrate 1 and the
region between the memory gate electrode MG and the control gate
electrode CG.
[0064] The gate insulating film GIt is made of an insulating film
3. The insulating film 3 is made of a silicon dioxide film, a
silicon nitride film, a silicon oxynitride film, or a
high-dielectric-constant film having a specific permittivity higher
than that of the silicon nitride film, i.e., a so-called High-k
film. Note that, in the present application, when a High-k film or
high-dielectric-constant film is mentioned, the High-k film or
high-dielectric-constant film means a film having a dielectric
constant (specific permittivity) higher than that of a silicon
nitride film. As the insulating film 3, a metal oxide film such as,
e.g., a hafnium oxide film, a zirconium oxide film, an aluminum
oxide film, a tantalum oxide film, or a lanthanum oxide film can be
used.
[0065] The gate insulating film IGm is made of an insulating film
7. The insulating film 7 is made of a laminated film including a
silicon dioxide film, a silicon nitride film as a charge storage
portion over the silicon dioxide film, and a silicon dioxide film
over the silicon nitride film and referred to as an ONO film. Note
that, as described above, the gate insulating film GIm between the
memory gate electrode MG and the p-type well PW1 functions as the
gate insulating film of the memory transistor MG. On the other
hand, the gate insulating film GIm between the memory gate
electrode MG and the control gate electrode CG functions as an
insulating film for providing insulation, i.e., electrical
isolation between the memory gate electrode MG and the control gate
electrode CG.
[0066] Of the insulating film 7, the silicon nitride film is an
insulating film for storing charges and functions as the charge
storage portion. That is, the silicon nitride film is a trapping
insulating film formed in the insulating film 7. Accordingly, the
insulating film 7 can be regarded as an insulating film having the
internal charge storage portion.
[0067] The silicon dioxide films located over and under the silicon
nitride film can function as charge block layers which confine
charges thereto. That is, by providing a structure in which the
silicon nitride film is interposed between the upper and lower
silicon dioxide films, the leakage of the charges stored in the
silicon nitride film is prevented.
[0068] The control gate electrode CG is made of a conductor film 4.
The conductor film 4 is made of silicon. For example, the conductor
film 4 is made of, e.g., an n-type polysilicon film as a
polycrystalline silicon film into which an n-type impurity has been
introduced or the like. Specifically, the control gate electrode CG
is made of the patterned conductor film 4.
[0069] The memory gate electrode MG is made of a conductor film 8.
The conductor film 8 is made of silicon and formed of, e.g., an
n-type polysilicon film as a polycrystalline silicon film into
which an n-type impurity has been introduced or the like. The
memory gate electrode MG is formed over the side wall of the
control gate electrode CG adjacent to the memory gate electrode MG
which is located on a first side of the control gate electrode
CG.
[0070] The semiconductor region MS is a semiconductor region
functioning as one of a source region and a drain region. The
semiconductor region MD is a semiconductor region functioning as
the other of the source region and the drain region. Here, the
semiconductor region MS is the semiconductor region functioning as,
e.g., the source region, while the semiconductor region MD is the
semiconductor region functioning as, e.g., the drain region. Each
of the semiconductor regions MS and MD is made of a semiconductor
region into which an n-type impurity has been introduced and has an
LDD (Lightly doped drain) structure.
[0071] The source semiconductor region MS includes an n.sup.--type
semiconductor region 14 and an n.sup.+-type semiconductor region 17
having an impurity concentration higher than that of the
n.sup.--type semiconductor region 14. The drain semiconductor
region MD includes the n.sup.--type semiconductor region 14 and the
n.sup.+-type semiconductor region 17 having an impurity
concentration higher than that of the n.sup.--type semiconductor
region 14. The n.sup.+-type semiconductor region 17 has a junction
depth deeper than that of the n.sup.--type semiconductor region 14
and an impurity concentration higher than that thereof.
[0072] Over the side wall of the control gate electrode CG which is
closer to the drain region and over the side wall of the memory
gate electrode MG which is closer to the source region, sidewall
spacers SW each made of an insulating film such as a silicon
dioxide film, a silicon nitride film, or a laminated film thereof
are formed.
[0073] The n.sup.--type semiconductor region 14 included in the
source semiconductor region MS is formed self-alignedly with the
side surface of the memory gate electrode MG. The n.sup.+-type
semiconductor region 17 is formed self-alignedly with the side
surface of the sidewall spacer SW. Accordingly, the
lower-concentration n.sup.--type semiconductor region 14 is formed
under the sidewall spacer SW over the side wall of the memory gate
electrode MG, while the higher-concentration n.sup.+-type
semiconductor region 17 is formed outside the lower-concentration
n.sup.--type semiconductor region 14.
[0074] The n.sup.--type semiconductor region 14 included in the
drain semiconductor region MD is formed self-alignedly with the
side surface of the control gate electrode CG. The n.sup.+-type
semiconductor region 17 is formed self-alignedly with the side
surface of the sidewall spacer SW. Accordingly, the
lower-concentration n.sup.--type semiconductor region 14 is formed
under the sidewall spacer SW over the side wall of the control gate
electrode CG, while the higher-concentration n.sup.+-type
semiconductor region 17 is formed outside the lower-concentration
n.sup.--type semiconductor region 14. Consequently, the
lower-concentration n.sup.--type semiconductor region 14 is formed
so as to be adjacent to the p-type well PW1 as the channel region
of the control transistor CT.
[0075] Under the gate insulating film GIm under the memory gate
electrode MG, the channel region of the memory transistor is
formed. Under the gate insulating film GIt under the control gate
electrode CG, the channel region of the control transistor CT is
formed.
[0076] Over each of the n.sup.+-type semiconductor regions 17,
i.e., over the upper surface of each of the n.sup.+-type
semiconductor regions 17, a metal silicide layer 18 has been formed
using a salicide (Self Aligned Silicide) technique or the like. The
metal silicide layer 18 is made of, e.g., a cobalt silicide layer,
a nickel silicide layer, a platinum-added nickel silicide layer, or
the like. The metal silicide layer 18 allows reductions in
diffusion resistance and contact resistance. Note that the metal
silicide layer 18 is formed also over each of the control gate
electrode CG and the memory gate electrode MG.
[0077] Next, a specific description will be given of a
configuration of the p-channel high-breakdown-voltage MISFET QH
formed in the peripheral circuit region 1B.
[0078] In the peripheral circuit region 1B, the semiconductor
device includes an active region AR2 and the isolation region IR.
The structure and function of the isolation region IR are as
described above. The active region AR2 is defined, i.e., demarcated
by the isolation region IR and electrically isolated from another
active region by the isolation region IR. In the active region AR2,
an n-type well NW1 is formed. That is, the active region AR2 is the
region where the n-type well NW1 is formed. The n-type well NW1 has
an n-type conductivity type.
[0079] As shown in FIG. 2, the high-breakdown-voltage MISFET QH
includes semiconductor regions each including a p.sup.--type
semiconductor region 13 and a p.sup.+-type semiconductor region 16,
a gate insulating film GIH formed over the n-type well NW1, and a
gate electrode GEH formed over the gate insulating film GIH. Each
of the p.sup.--type semiconductor region 13 and the p.sup.+-type
semiconductor region 16 is formed in the upper-layer portion of the
semiconductor substrate 1. Each of the p.sup.--type semiconductor
region 13 and the p.sup.+-type semiconductor region 16 has the
p-type conductivity type opposite to the n-type conductivity
type.
[0080] The gate insulating film GIH functions as the gate
insulating film of the MISFET QH. The gate insulating film GIH is
made of an insulating film 11. The insulating film 11 is made of a
silicon dioxide film, a silicon nitride film, a silicon oxynitride
film, or a high-dielectric-constant film having a specific
permittivity higher than that of the silicon nitride film, i.e., a
so-called High-k film. As the insulating film 11 made of the High-k
film, a metal oxide film such as, e.g., a hafnium oxide film, a
zirconium oxide film, an aluminum oxide film, a tantalum oxide
film, or a lanthanum oxide film can be used.
[0081] The gate electrode GEH is made of a conductor film 12. The
conductor film 12 is made of silicon and formed of, e.g., a p-type
polysilicon film as a polycrystalline silicon film into which a
p-type impurity has been introduced or the like. Specifically, the
gate electrode GEH is made of the patterned conductor film 12. The
conductor film 12 is formed of a conductor film different from the
conductor film 4 included in the control gate electrode CG.
[0082] Each of the semiconductor regions including the p.sup.--type
semiconductor region 13 and the p.sup.+-type semiconductor region
16 is a source or drain semiconductor region (source region or
drain region) into which a p-type impurity has been introduced and
which has a DDD (Double Diffused Drain) structure. That is, the
p.sup.--type semiconductor region 13 has a junction depth deeper
than that of the p.sup.+-type semiconductor region 16 and an
impurity concentration higher than that thereof.
[0083] Over the side walls of the gate electrode GEH, the sidewall
spacers SW each made of an insulating film such as a silicon
dioxide film, a silicon nitride film, or a laminated film thereof
are formed.
[0084] Over the p.sup.+-type semiconductor region 16, i.e., over
the upper surface of p.sup.+-type semiconductor region 16, the
metal silicide layer 18 is formed using a salicide technique or the
like in the same manner as over the n.sup.+-type semiconductor
region 17 in the memory cell MC. Note that the metal silicide layer
18 is formed also over the gate electrode GEH.
[0085] Next, a configuration of the n-channel low-breakdown-voltage
MISFET QL formed in the peripheral circuit region 1C will
specifically be described.
[0086] In the peripheral circuit region 1C, the semiconductor
device includes an active region AR3 and the isolation region IR.
The structure and function of the isolation region IR are as
described above. The active region AR3 is defined, i.e., demarcated
by the isolation region IR and electrically isolated from another
active region by the isolation region IR. In the active region AR3,
a p-type well PW2 is formed. That is, the active region AR3 is a
region where the p-type well PW2 is formed. The p-type well PW2 has
a p-type conductivity type.
[0087] As shown in FIG. 2, the low-breakdown-voltage MISFET QL
includes semiconductor regions each including the n.sup.--type
semiconductor region 14 and the n.sup.+-type semiconductor region
17, a gate insulating film GIL formed over the p-type well PW2, and
a gate electrode GEL formed over the gate insulating film GIL. The
n.sup.--type semiconductor region 14 and the n.sup.+-type
semiconductor region 17 are formed in the upper-layer portion of
the p-type well PW2 of the semiconductor substrate 1. Each of the
n.sup.--type semiconductor region 14 and the n.sup.+-type
semiconductor region 17 has the n-type conductivity type opposite
to the p-type conductivity type.
[0088] The gate insulating film GIL functions as the gate
insulating film of the MISFET QL. The gate insulating film GIL is
made of an insulating film 10.
[0089] The gate electrode GEL is made of a conductor film made of
the conductor film 12 and formed in the same layer as that of the
conductor film 12 included in the gate electrode GEH of the MISFET
QH.
[0090] Each of the semiconductor regions including the n.sup.--type
semiconductor region 14 and the n.sup.+-type semiconductor region
17 is a source or drain semiconductor region (source region or
drain region) into which an n-type impurity has been introduced and
has an LDD structure, similarly to the semiconductor regions MS and
MD of the memory cell MC. That is, the n.sup.+-type semiconductor
region 17 has a junction depth deeper than that of the n.sup.--type
semiconductor region 14 and an impurity concentration higher than
that thereof.
[0091] Over the side walls of the gate electrode GEL, the sidewall
spacers SW each made of an insulating film such as a silicon
dioxide film, a silicon nitride film, or a laminated film thereof
are formed.
[0092] Over each of the n.sup.+-type semiconductor region 17, i.e.,
over the upper surface of each of the n.sup.+-type semiconductor
regions 17, the metal silicide layer 18 has been formed using a
salicide technique or the like in the same manner as over each of
the n.sup.+-type semiconductor regions 17 in the memory cell MC.
Note that the metal silicide layer 18 is formed also over the gate
electrode GEL.
[0093] Preferably, the gate length of the high-breakdown-voltage
MISFET QH is longer than the gate length of the
low-breakdown-voltage MISFET QL. A drive voltage for the
high-breakdown-voltage MISFET QH is higher than a drive voltage for
the low-breakdown-voltage MISFET QL. The breakdown voltage of the
high-breakdown-voltage MISFET QH is higher than the breakdown
voltage of the low-breakdown-voltage MISFET QL.
[0094] Preferably, the film thickness of the gate insulating film
GIH is larger than a film thickness TIL of the gate insulating film
GIL. This allows the drive voltage for the high-breakdown-voltage
MISFET QH to be higher than the drive voltage for the
low-breakdown-voltage MISFET QL.
[0095] Next, a configuration of the stacked capacitive element CS
formed in the peripheral circuit region 1D will specifically be
described.
[0096] In the peripheral circuit region 1D, the semiconductor
device has active regions AR41 and AR42 and the isolation region
IR. The structure and function of the isolation region IR are as
described above. Under the active regions AR41 and AR42 and the
isolation region IR, an n-type well (n-type well region) AR42 is
formed continuously. The active region AR42 is for supplying an
intended potential to the n-type well NW2. In the active region
NW2, the n.sup.+-type semiconductor region 17 and the n.sup.--type
semiconductor region 14 are provided. The n-type well NW2 is
included in a first capacitive electrode CE1. The n-type well NW2
included in the first capacitive electrode CE1 is formed by the
same step of forming the p-type MISFET QH in which the p-type
MISFET QH is formed.
[0097] Over the active region AR41, a second capacitive electrode
CE2 is formed via a first capacitive insulating film CZ1. The
second capacitive electrode CE2 completely covers the active region
AR41 in plan view and extends to the isolation region IR adjacent
to the active region AR41. The first capacitive insulating film CZ1
can be formed of, e.g., the insulating film 3 in the same layer as
that of the gate insulating film GIt. Preferably, the first
capacitive insulating film CZ1 may be formed appropriately of an
insulating film having a film thickness larger than that of the
gate insulating film GIt. The second capacitive electrode CE2 is
formed of the conductor film 4 in the same layer as that of the
control gate electrode CG. The second capacitive electrode CE2 and
the first capacitive insulating film CZ1 have equal shapes in plan
view.
[0098] That is, in the active region AR41, a first capacitor
including the first capacitive electrode CE1, the first capacitive
insulating film CZ1, and the second capacitive electrode CE2 is
formed.
[0099] A third capacitive electrode CE3 is formed so as to cover
the upper and side surfaces of the second capacitive electrode CE2
via a second capacitive insulating film CZ2. In plan view, the
third capacitive electrode CE3 has a portion overlapping the second
capacitive electrode CE2 in plan view and portions protruding from
the second capacitive electrode CE2 and extending over the
isolation region IR. The third capacitive electrode CE3 is formed
of a conductor film 8 in the same layer as that of the memory gate
electrode MG. The second capacitive insulating film CZ2 is formed
of the insulating film 7 in the same layer as that of the gate
insulating film GIm. The third capacitive electrode CE3 and the
second capacitive insulating film CZ2 have equal shapes in plan
view.
[0100] That is, a second capacitor including the second capacitive
electrode CE2, the second capacitive insulating film CZ2, and the
third capacitive electrode CE3 is formed so as to overlap the first
capacitor in plan view.
[0101] A fourth capacitive electrode CE4 is formed so as to cover
the upper and side surfaces of the third capacitive electrode CE3
via a third capacitive insulating film CZ3. The fourth capacitive
electrode CE4 has a portion overlapping the third capacitive
electrode CE3 and portions protruding from the third capacitive
electrode CE3 and extending over the isolation region IR. The
fourth capacitive electrode CE4 is formed of the conductor film 12
in the same layer as that of the gate electrode GEH of the MISFET
QH or the gate electrode GEL of the MISFET QL. The third capacitive
insulating film CZ3 is made of an insulating film 9. The insulating
film 9 is formed of a laminated film including, e.g., a silicon
dioxide film and a silicon nitride film over the silicon dioxide
film. The fourth capacitive electrode CE4 and the third capacitive
insulating film CZ3 have equal shapes in plan view.
[0102] That is, a third capacitor including the third capacitive
electrode CE3, the third capacitive insulating film CZ3, and the
fourth capacitive electrode CE4 is formed so as to overlap the
second capacitor in plan view. In the active region AR41, the
stacked capacitive element CS in which the first, second, and third
capacitors are stacked is formed.
[0103] Over the respective side walls of the third and second
capacitive electrodes CE3 and CE2, the sidewall spacers SW are
formed. Over the n.sup.+-type semiconductor region 17, the upper
surface of the fourth capacitive electrode CE4, the upper surface
of the third capacitive electrode CE3 exposed from the sidewall
spacer SW, and the upper surface of the second capacitive electrode
CE2, the metal silicide layers 18 are formed. Note that the metal
silicide layer over the upper surface of the second capacitive
electrode CE2 is not shown.
[0104] FIG. 3A is a main-portion plan view of the stacked
capacitive element. FIG. 3B is an illustrative view showing a
circuit configuration of the stacked capacitive element. Using
FIGS. 3A and 3B, the configuration of the stacked capacitive
element CS will be described.
[0105] As shown in FIG. 3A, the stacked capacitive element CS has a
structure in which, e.g., the rectangular first capacitive
electrode CE having longer sides in a lateral direction, the
rectangular second capacitive electrode CE2 having longer sides in
a vertical direction, the rectangular third capacitive electrode
CE3 having longer sides in the lateral direction, and the
rectangular fourth capacitive electrode CE4 having longer sides in
the lateral direction are stacked. At the center portion of the
first capacitive electrode CE1, the active region AR41 is located.
The active region AR42 is located apart from the active region
AR41. As described above, the active region AR42 is for supplying
the intended potential to the n-type well NW2 included in the first
capacitive electrode CE1. The locations of the active regions AR41
and AR42 are not limited to the foregoing. The shapes of the first,
second, third, and fourth capacitive electrodes CE1, CE2, CE3, and
CE4 are also not limited to rectangles.
[0106] In the X- and Y-directions at the paper sheet with FIG. 3A,
the second capacitive electrode CE2 is located so as to completely
cover the active region AR41. Also, the third capacitive electrode
CE3 is formed over the second capacitive electrode CE2 so as to
completely cover the active region AR41. Also, the fourth
capacitive electrode CE4 is formed over the third capacitive
electrode CE3 so as to completely cover the active region AR41. The
second capacitive electrode CE2 has a protruding portion which does
not overlap the active region AR41 and the third and fourth
capacitive electrodes CE3 and CE4 in the Y-direction. The third
capacitive electrode CE3 has a protruding portion which does not
overlap the active region AR41 and the second and fourth capacitive
electrodes CE2 and CE4 in the X-direction. The fourth capacitive
electrode CE4 has a protruding portion which does not overlap the
active region AR41 and the second and third capacitive electrodes
CE2 and CE3 in the X-direction. Note that the main-portion
cross-sectional view of the stacked capacitive element CS shown in
the peripheral circuit region 1D in FIG. 2 is a cross section along
the line X1-X1 in FIG. 3.
[0107] As shown in FIG. 3B, the stacked capacitive element CS has a
structure in which the first, second, and third capacitors are
coupled in parallel to each other. The first capacitor includes the
first and second capacitive electrodes CE1 and CE2. The second
capacitor includes the second and third capacitive electrodes CE2
and CE3. The third capacitor includes the third and fourth
capacitive electrodes CE3 and CE4. The first and second capacitors
share the second capacitive electrode CE2. The second and third
capacitors share the third capacitive electrode CE3. To the first
and third capacitive electrodes CE1 and CE3, a first potential is
applied. To the second and fourth capacitive electrodes CE2 and
CE4, a second potential different from the first potential is
applied. That is, the first, second, and third capacitors are
coupled in parallel to each other.
[0108] Next, using FIG. 2, a configuration over the memory cell MC
formed in the memory cell region 1A, over the MISFET QH formed in
the peripheral circuit region 1B, over the MISFET QL formed in the
peripheral circuit region 1C, and over the stacked capacitive
electrode CS formed in the peripheral circuit region 1D will
specifically be described.
[0109] Over the semiconductor substrate 1, an interlayer insulating
film 19 is formed so as to cover the control gate electrode CG, the
memory gate electrode MG, the gate electrode GEH, the gate
electrode GEL, the fourth capacitive electrode CE4, and the
sidewall spacers SW. The interlayer insulating film 19 is made of a
laminated film including, e.g., a silicon nitride film and a
silicon dioxide film over the silicon nitride film and has the
planarized upper surface.
[0110] In the interlayer insulating film 19, contact holes
(openings) are formed and, in the contact holes, conductive plug
electrodes 20 are embedded.
[0111] Each of the plug electrodes 20 is formed of a thin barrier
conductor film formed over the bottom portion and the side wall,
i.e., side surface of the contact hole and a main conductor film
located over the barrier conductor film and formed so as to be
embedded in the contact hole. In FIG. 2, for simpler illustration,
the barrier conductor film and the main conductor film each
included in the plug electrode 20 are integrally shown. Note that
the barrier conductor film included in the plug electrode 20 can
be, e.g., a titanium (Ti) film, a titanium nitride (TiN) film, or a
laminated film thereof and the main conductor film included in the
plug electrode 20 can be, e.g., a tungsten (W) film.
[0112] The plug electrodes 20 embedded in the contact holes are
electrically coupled to the n.sup.+-type semiconductor regions 17,
the p.sup.+-type semiconductor regions 16, the third capacitive
electrode CE3, the fourth capacitive electrode CE4, and the like.
There is also the plug electrode 20 electrically coupled to the
second capacitive electrode CE2, though not shown.
[0113] Over the interlayer insulating film 19, metal wires 21 are
formed and electrically coupled to the plug electrodes 20. The
metal wires 21 are formed of, e.g., tungsten (W) wires or aluminum
(Al) wires. The metal wires 21 may also be embedded wires using
copper (Cu) as a main conductive material.
[0114] <Method of Manufacturing Semiconductor Device>
[0115] Next, a description will be given of a method of
manufacturing the semiconductor device in Embodiment 1.
[0116] FIGS. 4 and 5 are process flow charts showing a part of the
manufacturing process of the semiconductor device in Embodiment 1.
FIGS. 6 to 13 are main-portion cross-sectional views of the
semiconductor device in Embodiment 1 during the manufacturing
process thereof. The cross-sectional views of FIGS. 6 to 13 are
main-portion cross-sectional views of the memory cell region 1A and
the peripheral circuit regions 1B, 1C, and 1D, which show the
formation of the memory cell MC in the memory cell region 1A, the
formation of the MISFET QH in the peripheral circuit region 1B, the
formation of the MISFET QL in the peripheral circuit region 1C, and
the formation of the stacked capacitive element CS in the
peripheral circuit region 1D.
[0117] In Embodiment 1, a description will be given of the case
where the n-channel control transistor CT and the n-channel memory
transistor MT are formed in the memory cell region 1A. However, it
is also possible to invert the conductivity type and form the
p-channel control transistor CT and the p-channel memory transistor
MT in the memory cell region 1A.
[0118] Likewise, in Embodiment 1, a description will be given of
the case where the p-channel MISFET QH is formed in the peripheral
circuit region 1B. However, it is also possible to invert the
conductivity type and form the n-channel MISFET QH in the
peripheral circuit region 1B. It is also possible to form a CMISFET
(Complementary MISFET) or the like in the peripheral circuit region
1B. Likewise, in Embodiment 1, a description will be given also of
the case where the n-channel MISFET QL is formed in the peripheral
circuit region 1C, but it is also possible to invert the
conductivity type and form the p-channel MISFET QL in the
peripheral circuit region 1C. It is also possible to form a CMISFET
or the like in the peripheral circuit region 1C.
[0119] First, as shown in FIG. 6, the semiconductor substrate 1 as
a semiconductor wafer made of p-type monocrystalline silicon having
a specific resistance of, e.g., about 1 to 10 .OMEGA.cm is
provided, i.e., prepared (Step S1 in FIG. 4).
[0120] Next, as shown in FIG. 6, the isolation film 2 is formed
(Step S2 in FIG. 4). The isolation film 2 serves as the isolation
region IR defining the active region AR1 in the memory cell region
1A of the main surface of the semiconductor substrate 1. The
isolation film 2 also serves as the isolation region IR defining
the active region AR2 in the peripheral circuit region 1B of the
main surface of the semiconductor substrate 1. The isolation film 2
also serves as the isolation region IR defining the active region
AR3 in the peripheral circuit region 1C of the main surface of the
semiconductor substrate 1. The isolation film 2 also serves as the
isolation region IR defining the active regions AR1 and AR42 in the
peripheral circuit region 1D of the main surface of the
semiconductor substrate 1.
[0121] The isolation film 2 is made of an insulator such as silicon
dioxide and can be formed by, e.g., a STI (Shallow Trench
Isolation) method. The insulating film 2 can be provided by, e.g.,
forming isolation trenches in the isolation regions IR and then
selectively forming an insulating film made of, e.g., silicon
dioxide in each of the isolation trenches.
[0122] Next, as shown in FIG. 6, in the peripheral circuit regions
1B and 1D, the n-type wells NW1 and NW2 are formed in the active
regions AR2, AR41, and AR42 (Step S3 in FIG. 4). The n-type wells
NW1 and NW2 can be formed by introducing an n-type impurity such
as, e.g., phosphorus (P) into the semiconductor substrate 1 by an
ion implantation method or the like. Each of the n-type wells NW1
and NW2 is formed to a predetermined depth from the main surface of
the semiconductor substrate 1 to be deeper than the isolation
trenches. That is, the n-type wells NW1 and NW2 are formed also
under the isolation film 2. The n-type well NW2 serves as the first
capacitive electrode CE1 of the stacked capacitive element CS.
[0123] Next, as shown in FIG. 6, in the memory cell region 1A, the
p-type well PW1 is formed in the active region AR1 (Step S4 in FIG.
4). The p-type well PW1 can be formed by introducing a p-type
impurity such as, e.g., boron (B) into the semiconductor substrate
1 by an ion implantation method or the like. The p-type well PW1 is
formed to a predetermined depth from the main surface of the
semiconductor substrate 1. Note that the order in which Steps S3
and S4 are performed can be reversed.
[0124] Next, as shown in FIG. 7, over the entire main surface of
the semiconductor substrate 1, the insulating film 3 and the
conductor film 4 are formed (Step S5 in FIG. 4).
[0125] In Step S5, first, over the memory cell region 1A and the
peripheral circuit regions 1B, 1C, and 1D of the main surface of
the semiconductor substrate 1, the insulating film 3 is formed. The
insulating film 3 formed over the p-type well PW1 in the memory
cell region 1A serves as an insulating film for the gate insulating
film GIt of the memory cell MC. Over the peripheral circuit region
1D, the insulating film 3 serves as the first capacitive insulating
film CZ1. The insulating film 3 can be formed using a thermal
oxidation method, a sputtering method, an atomic layer deposition
(ALD) method, a chemical vapor deposition (CVD) method, or the
like.
[0126] When the film thickness of the first capacitive insulating
film CZ1 is set larger than the film thickness of the gate
insulating film GIt, after a thick insulating film for the first
capacitive insulating film CZ1 is formed over the semiconductor
substrate 1, the thick insulating film is selectively removed from
the memory cell region 1A and then a thin insulating film for the
gate insulating film GIt is formed over the memory cell region
1A.
[0127] In Step S5, next, as shown in FIG. 7, the conductor film 4
is formed over the insulating film 3 over the memory cell region 1A
and the peripheral circuit regions 1B, 1C, and 1D. The conductor
film 4 is made of a polycrystalline silicon film, i.e., polysilicon
film. The conductor film 4 can be formed using a CVD method or the
like. Alternatively, it is also possible to deposit an amorphous
silicon film as the conductive film 4 and change the amorphous
silicon film to a polycrystalline silicon film by the subsequent
heat treatment. The film thickness of the conductor film 4 is set
to 70 to 120 nm.
[0128] As the conductor film 4, a conductor film having a low
resistivity due to, e.g., an n-type impurity such as phosphorus (P)
or arsenic (As) or a p-type impurity such as boron (B) introduced
therein is preferably used.
[0129] Next, as shown in FIG. 7, the conductor film 4 is patterned
(Step S6 in FIG. 4). In Step S6, using, e.g., photolithography and
etching, the conductor film 4 is patterned into a desired
two-dimensional shape.
[0130] First, over the conductor film 4, a resist film PR1 is
formed. The resist film PR1 has a pattern covering the area of the
memory cell region 1A where the control gate electrode CG is to be
formed and exposing the other portion thereof. The resist film PR1
also has a pattern covering the peripheral circuit regions 1B and
1C, covering the area of the peripheral circuit region 1D where the
second capacitive electrode CE2 is to be formed, and exposing the
other portion thereof.
[0131] Next, using the resist film PR1 as an etching mask, the
conductor film 4 is etched by anisotropic dry etching or the like
to be patterned. Thus, over the memory cell region 1A, the control
gate electrode CG made of the conductor film 4 is formed and the
gate insulating film GIt made of the insulating film 3 located
between the control gate electrode CG and the p-type well PW1 of
the semiconductor substrate 1 is formed. That is, over the memory
cell region 1A, the control gate electrode CG is formed over the
p-type well PW1 of the semiconductor substrate 1 via the gate
insulating film GIt.
[0132] Also, over the peripheral circuit region 1D, the first
capacitive insulating film CZ1 and the second capacitive electrode
CE2 are formed so as to cover the active region AR42. On the other
hand, over the peripheral circuit regions 1B and 1C, the conductor
film 4 is left. Then, the resist film, i.e., the resist film PR1 is
removed.
[0133] Note that, from the memory cell region 1A, the portion of
the insulating film 3 which is uncovered with the control gate
electrode CG is removed by performing the dry etching in Step S6 or
performing wet etching after the dry etching in Step S6. As a
result, at the portion of the memory cell region 1A where the
control gate electrode CG is not formed, the p-type well PW1 of the
semiconductor substrate 1 is exposed. From the peripheral circuit
region 1D, the insulating film 3 exposed from the second capacitive
electrode CE2 is also removed by similarly performing the dry
etching in Step S6 or performing wet etching after the dry etching.
In plan view, the first capacitive insulating film CZ1 has a
pattern equal to that of the second capacitive electrode CE2.
[0134] In Step S7, first, over the memory cell region 1A and the
peripheral circuit region 1B, 1C, and 1D of the main surface of the
semiconductor substrate 1, the insulating film 7 for the gate
insulating film GIm of the memory transistor MT is formed. At this
time, over the exposed portion of the memory cell region 1A of the
main surface of the semiconductor substrate 1 and the upper and
side surfaces of the control gate electrode CG, the insulating film
7 is formed. Also, over the upper surfaces of the portions of the
conductor film 4 which are left over the peripheral circuit regions
1B and 1C, the insulating film 7 is formed. Also, over the upper
and side surfaces of the second capacitive electrode CE2 over the
peripheral circuit region 1D and the peripheral circuit region 1D
of the main surface of the semiconductor substrate 1, the
insulating film 7 is formed. Over the peripheral circuit region 1D,
the insulating film 7 serves as the second capacitive insulating
film CZ2.
[0135] As described above, the insulating film 7 has the internal
charge storage portion and is made of a laminated film in which the
silicon dioxide film, the silicon nitride film, and the silicon
dioxide film are formed upwardly in this order as insulating
films.
[0136] Of the insulating film 7, the lower-layer silicon dioxide
film can be formed by a thermal oxidation method or an ISSG
(in-situ steam generation) oxidation method at a temperature of,
e.g., about 1000 to 1100.degree. C. Also, of the insulating film 7,
the silicon nitride film can be formed by, e.g., a CVD method.
Also, of the insulating film 7, the upper-layer silicon dioxide
film can be formed by, e.g., a CVD method.
[0137] Note that, in Embodiment 1, the silicon nitride film is used
as an insulating film having a trap level. However, the insulating
film having a trap level is not limited to the silicon nitride
film. For example, a high-dielectric-constant film having a
dielectric constant higher than that of the silicon nitride film,
such as an aluminum oxide (alumina) film, a hafnium oxide film, or
a tantalum oxide film can be used.
[0138] In Step S7, next, the conductor film 8 is formed over the
insulating film 7 over the memory cell region A and the peripheral
circuit regions 1B, 1C, and 1D.
[0139] Preferably, the conductor film 8 is formed of, e.g., a
polycrystalline silicon film, i.e., polysilicon film. The conductor
film 8 can be formed using a CVD method or the like. It is also
possible to deposit an amorphous silicon film as the conductor film
8 and then change the amorphous silicon film to a polycrystalline
silicon film by the subsequent heat treatment. The film thickness
of the conductor film 8 is controlled to 50 to 70 nm. The conductor
film 8 is formed to have a film thickness smaller than the film
thickness of the conductor film 4 or the conductor film 12
described later.
[0140] As the conductor film 8, a conductor film having a low
resistivity due to an n-type impurity such as, e.g., phosphorus (P)
or arsenic (As) or a p-type impurity such as boron (B) introduced
therein is preferably used.
[0141] Next, as shown in FIG. 8, the conductor film 8 is etched
back using an anisotropic dry etching technique to form the memory
gate electrode MG and the third capacitive electrode CE3 (Step S8
in FIG. 4).
[0142] In Step S8, first, a resist film PR2 is formed using
photolithography. The resist film PR2 has a pattern covering the
portion of the peripheral circuit region 1D where the third
capacitive electrode CE3 is to be formed and exposing the other
region thereof. The resist film PR2 also has the pattern exposing
the memory cell region 1A and the peripheral circuit regions 1B and
1C. Next, anisotropic dry etching is performed on the conductor
film 8 to etch back the conductor film 8. As a result, the
conductor film 8 is left in sidewall spacer shapes over the both
side walls, i.e., side surfaces of the control gate electrode CG
via the insulating films 7 to form the memory gate electrode MG and
a spacer SP1.
[0143] In the etch-back process described above, the conductor film
8 and the insulating film 7 are removed from the peripheral circuit
regions 1B and 1C. On the other hand, the conductor film 8 is left
only over the portion of the peripheral circuit region 1D which is
covered with the resist film PR2 to form the third capacitive
electrode CE3. Since the insulating film 7 exposed from the third
capacitive electrode CE3 is also removed from the peripheral
circuit region 1D, the second capacitive insulating film CZ2 has a
pattern equal to that of the third capacitive electrode CD3 in plan
view.
[0144] Next, as shown in FIG. 9, the spacer SP1 and the insulating
film 7 are removed (Step S9 in FIG. 4).
[0145] In Step S9, first, a resist film (not shown) which covers
the memory gate electrode MG and exposes the spacer SP1 is formed
over the semiconductor substrate 1. Then, by dry etching using the
formed resist film as an etching mask, the spacer SP1 is removed.
On the other hand, the memory gate electrode MG that has been
covered with the resist film is not etched but is left. Then, the
resist film is removed. The resist film (not shown) covers the
peripheral circuit regions 1B, 1D, and 1D.
[0146] In Step S9, next, the portion of the insulating film 7 which
is uncovered with the memory gate electrode MG is removed by
etching such as, e.g., wet etching. At this time, over the memory
cell region 1A, the insulating film 7 located between the memory
gate electrode MG and the p-type well PW1 and between the memory
gate electrode MG and the control gate electrode CG is not removed
but is left, while the insulating film 7 located over the other
region is removed. At this time, over the memory cell region 1A,
the gate insulating film GIm including the portion of the
insulating film 7 which is left between the memory gate electrode
MG and the p-type well PW1 and the portion of the insulating film 7
which is left between the memory gate electrode MG and the control
gate electrode CG is formed.
[0147] Next, over the semiconductor substrate, the insulating film
9 is formed (Step S10 in FIG. 4).
[0148] In Step S10, first, over the memory cell region 1A and the
peripheral circuit regions 1B, 1C, and 1D of the main surface of
the semiconductor substrate 1, the insulating film 9 is formed. The
insulating film 9 is formed so as to cover the exposed portion of
the memory cell region 1A of the main surface the semiconductor
substrate 1, the control gate electrode CG, and the memory gate
electrode MG. The insulating film 9 is also formed so as to cover
the portions of the conductor film 4 which are left over the
peripheral circuit regions 1B and 1C, the peripheral circuit region
1D of the main surface of the semiconductor substrate 1, and the
second and third capacitive electrodes CE2 and CE3.
[0149] The insulating film 9 includes a laminated film including,
e.g., a silicon dioxide film and a silicon nitride film over the
silicon dioxide film. The silicon dioxide film is formed by a
thermal oxidation method or an ISSG oxidation method. The silicon
nitride film can be formed using, e.g., a CVD method or the
like.
[0150] The insulating film 9 is a protective film (protective
insulating film) for the memory cell MC which is formed so as to
cover the memory cell MC. The insulating film 9 is formed so as to
cover the control gate electrode CG, the gate insulating films GIt
and GIm, and the memory gate electrode MG over the memory cell
region 1A and the memory cell region 1A of the main surface of the
semiconductor substrate 1 (p-type well PW1). In the steps including
and subsequent to Step S11 shown in FIG. 4, the MISFET QH is formed
in the peripheral circuit region 1B and the MISFET QL is formed in
the peripheral circuit region 1C. In the steps of forming the
MISFETs QH and QL, treatments such as thermal oxidation (e.g., Step
S13) and etching (e.g., Step S15) are performed. The insulating
film 9 is provided so as to prevent the control gate electrode CG,
the memory gate electrode MG, the gate insulating films GIt and GIm
which are formed over the memory cell region 1A, the main surface
of the semiconductor substrate 1, and the like from being oxidized
or etched during the treatments such as thermal oxidation and
etching mentioned above.
[0151] The insulating film 9 serves as the third capacitive
insulating film CZ3 of the stacked capacitive element CS over the
peripheral circuit region 1D.
[0152] Next, as shown in FIG. 10, from the peripheral circuit
regions 1B an 1C, the insulating film 9 and the conductor film 4
are removed (Step S11 in FIG. 5).
[0153] In Step S11, as shown in FIG. 10, a resist film PR3 having a
pattern covering the memory cell region 1A and the peripheral
circuit region 1D and exposing the peripheral circuit regions 1B
and 1C is formed. Then, using the resist film PR3 as an etching
mask, the insulating film 9 and the conductor film 4 are removed by
etching such as, e.g., dry etching. Thus, as shown in FIG. 10, the
conductive film 4 can completely be removed from the peripheral
circuit regions 1B and 1C. The insulating film 3 is removed also
from the peripheral circuit regions 1B and 1C. Then, the resist
film PR3 is removed, while the insulating film 9 is left over the
memory cell region 1A and the peripheral circuit region 1D.
[0154] Next, as shown in FIG. 11, in the active region AR3 of the
peripheral circuit region 1C, the p-type well PW2 is formed (Step
S12 in FIG. 5). Similarly to the p-type well PW1, the p-type well
PW2 can be formed by introducing a p-type impurity such as, e.g.,
boron (B) into the semiconductor substrate 1 by an ion implantation
method or the like. The p-type well PW2 is formed from the main
surface of the semiconductor substrate 1 to a predetermined
depth.
[0155] Next, as shown in FIG. 11, over the entire main surface of
the semiconductor substrate 1, the insulating films 10 and 11 and
the conductor film 12 are formed (Step S13 in FIG. 5).
[0156] In Step S13, first, as shown in FIG. 11, over the peripheral
circuit regions 1B and 1C, the insulating films 11 and 10 are
formed. The insulating film 11 is for the gate insulating film GIH
of the MISFET QH. The insulating film 10 is for the gate insulating
film GIL of the MISFET QL. Accordingly, the film thickness of the
insulating film 11 is larger than the film thickness of the
insulating film 10. The insulating film 11 is formed over the
n-type well NW1, while the insulating film 10 is formed over the
p-type well PW2.
[0157] The insulating films 11 and 10 can be formed by, e.g., a
thermal oxidation method. In this case, each of the insulating
films 11 and 10 is made of a silicon dioxide film. However, it may
also be possible to perform nitridation treatment on the silicon
dioxide film to provide a silicon oxynitride film. The insulating
film 11 may also be formed by, e.g., an ISSG oxidation method.
[0158] In Step S13, next, over the semiconductor substrate 1, the
conductor film 12 is formed. The conductor film 12 is for forming
the gate electrode GEH of the MISFET QH, the gate electrode GEL of
the MISFET QL, and the fourth capacitive electrode CE4.
[0159] Preferably, the conductor film 12 is made of a
polycrystalline silicon film, i.e., polysilicon film. The conductor
film 12 can be formed using a CVD method or the like. It is also
possible to deposit an amorphous film as the conductor film 12 and
change the amorphous silicon film to a polycrystalline silicon film
by the subsequent heat treatment. The film thickness of the
conductor film 12 is controlled to 70 to 120 nm, which is larger
than the film thickness of the conductor film 8.
[0160] As the conductor film 12, a conductor film having a lower
resistivity due to an n-type impurity such as, e.g., phosphorus (P)
or arsenic (As) or a p-type impurity such as boron (B) introduced
therein. For example, it is preferable to introduce a p-type
impurity into the conductor film 12 over the peripheral circuit
region 1B and introduce an n-type impurity into the conductor film
12 over the peripheral circuit region 1C.
[0161] Next, as shown in FIG. 11, the conductor film 12 is removed
from the memory cell region 1A, while the fourth capacitive
electrode CE4 is formed over the peripheral circuit region 1D (Step
S14 in FIG. 5).
[0162] In Step S14, first, a resist film PR4 having a pattern
exposing the memory cell region 1A, covering the peripheral circuit
regions 1B and 1C, covering the area of the peripheral circuit
region 1D where the fourth capacitive electrode CE4 is to be
formed, and exposing the other area thereof is formed.
[0163] Next, using the resist film PR4 as an etching mask, the
conductor film 12 is etched by, e.g., dry etching or the like to be
removed. Thus, as shown in FIG. 11, the portion of the conductor
film 12 which has been left over the memory cell region 1A is
removed and the insulating film 9 is also removed. Over the
peripheral circuit region 1D, using the resist film PR4, the
conductor film 12 and the insulating film 9 are patterned to thus
be able to form the fourth capacitive electrode CE4 and the third
capacitive insulating film CZ3. Then, the portion of the resist
film PR4 which has been left over the peripheral circuit regions 1B
and 1C is removed.
[0164] Next, as shown in FIG. 12, over the peripheral circuit
regions 1B and 1C, the conductor film 12 is patterned (Step S15 in
FIG. 5).
[0165] First, over the main surface of the semiconductor substrate
1, a resist film (not shown) is formed. The resist film has a
pattern covering the memory cell region 1A and the peripheral
circuit region 1D, covering the area of the peripheral circuit
region 1B where the gate electrode GEH is to be formed, exposing
the other portion thereof, covering the area of the peripheral
circuit region 1C where the gate electrode GEL is to be formed, and
exposing the other portion thereof.
[0166] Next, using the foregoing resist film, the conductor film 12
is etched by, e.g., anisotropic etching or the like to be
patterned.
[0167] As a result, over the peripheral circuit region 1B, the gate
electrode GEH made of the conductor film 12 is formed and the gate
insulating film GIH made of the insulating film 11 located between
the gate electrode GEH and the n-type well NW1 of the semiconductor
substrate 1 is formed. Over the peripheral circuit region 1C, the
gate electrode GEL made of the conductor film 12 is formed and the
gate insulating film GIL made of the insulating film 10 located
between the gate electrode GEL and the p-type well PW2 of the
semiconductor substrate 1 is formed. Then, the foregoing resist
film is removed. Note that the fourth capacitive electrode CE4, the
gate electrode GEH, and the gate electrode GEL may also be
patterned in the same step.
[0168] Next, as shown in FIG. 12, the n.sup.--type semiconductor
regions 14 and the p.sup.--type semiconductor regions 13 are formed
using an ion implantation method or the like (Step S16 in FIG. 5).
In Step S16, an n-type impurity such as, e.g., arsenic (As) or
phosphorus (P) is introduced into the p-type wells PW1 and PW2 and
the n-type well NW2 of the semiconductor substrate 1 using the
control gate electrode CG, the memory gate electrode MG, the gate
electrode GEL, and the isolation film 2 as a mask. Thus, the
n.sup.--type semiconductor regions 14 are formed. Also, e.g., boron
(B) is introduced as a p-type impurity into the n-type well NW1 of
the semiconductor substrate 1 using the gate electrode GEH and the
isolation film 2 as a mask. Thus, the p.sup.--type semiconductor
regions 13 are formed.
[0169] At this time, in the memory cell region 1A, the n.sup.--type
semiconductor regions 14 are formed by self-alignment with the
respective side surfaces of the memory gate electrode MG and the
control gate electrode CG. Also, in the peripheral circuit region
1C, the n.sup.--type semiconductor regions 14 are formed by
self-alignment with the side surfaces of the gate electrode GEL.
Also, in the peripheral circuit region 1D, the n.sup.--type
semiconductor regions 14 are formed by self-alignment with the
isolation film 2. On the other hand, in the peripheral circuit
region 1B, the p.sup.--type semiconductor regions 13 are formed by
self-alignment with the side surfaces of the gate electrode
GEH.
[0170] Next, as shown in FIG. 13, over the side walls of the
control gate electrode CG, over the side walls of the memory gate
electrode MG, over the side walls of the gate electrode GEH, over
the side walls of the gate electrode GEL, over the side walls of
the third capacitive electrode CE3, and over the side walls of the
fourth capacitive electrode CE4, the sidewall spacers SW are formed
(Step S17 in FIG. 5). At the same time, the sidewall spacers SW are
formed also over the side walls of the second capacitive electrode
CE2, though not shown.
[0171] First, over the entire main surface of the semiconductor
substrate 1, an insulating film for the sidewall spacers SW is
formed. The formed insulating film is etched back by, e.g.,
anisotropic etching. Thus, over the side walls of the control gate
electrode CG, over the side walls of the memory gate electrode MG,
over the side walls of the gate electrode GEH, over the side walls
of the gate electrode GEL, over the side walls of the third
capacitive electrode CE3, and over the side walls of the fourth
capacitive electrode CE4, the insulating film is selectively left
to form the sidewall spacers SW. Each of the sidewall spacers SW is
made of an insulating film such as a silicon dioxide film, a
silicon nitride film, or a laminated film thereof.
[0172] Next, as shown in FIG. 13, the n.sup.+-type semiconductor
regions 17 and the p.sup.+-type semiconductor regions 16 are formed
using an ion implantation method or the like (Step S18 in FIG. 5).
In Step S18, an n-type impurity such as, e.g., arsenic (As) or
phosphorus (P) is introduced into the p-type wells PW1 and PW2 and
the n-type well NW2 using the control gate electrode CG, the memory
gate electrode MG, the gate electrode GEL, the sidewall spacers SW
over the side walls thereof, and the isolation film 2 as a mask to
thus form the n.sup.+-type semiconductor regions 17. On the other
hand, e.g., boron (B) is introduced as a p-type impurity into the
n-type well NW1 of the semiconductor substrate 1 using the gate
electrode GEH, the sidewall spacers SW formed over the side walls
thereof, and the isolation film 2 as a mask to thus form the
p.sup.+-type semiconductor regions 16.
[0173] At this time, in the memory cell region 1A, the n.sup.+-type
semiconductor regions 17 are formed by self-alignment with the
sidewall spacers SW over the respective side walls of the control
gate electrode CG and the memory gate electrode MG. Also, in the
peripheral circuit region 1C, the n.sup.+-type semiconductor
regions 17 are formed by self-alignment with the sidewall spacers
SW over the both side walls of the gate electrode GEL. Also, in the
peripheral circuit region 1B, the p.sup.+-type semiconductor
regions 16 are formed by self-alignment with the sidewall spacers
SW over the both side walls of the gate electrode GEH. Also, in the
peripheral circuit region 1D, the n.sup.+-type semiconductor
regions 17 are formed in the n-type well NW2 by self-alignment with
the isolation film 2. Since the n.sup.+-type semiconductor regions
17 are formed deeper than the n.sup.--type semiconductor regions
14, in FIG. 13, only the n.sup.+-type semiconductor regions 17 are
shown.
[0174] Thus, as shown in FIG. 2, in the memory cell region 1A, the
memory cell MC including the control transistor CT and the memory
transistor MT is formed. That is, the control gate electrode CG,
the gate insulating film GIt, the memory gate electrode MG, and the
gate insulating film GIm form the memory cell MC as the nonvolatile
memory.
[0175] Also, as shown in FIG. 2, in the peripheral circuit region
1B, the high-breakdown-voltage MISFET QH is formed and, in the
peripheral circuit region 1C, the low-breakdown-voltage MISFET QL
is formed. That is, the gate electrode GEH and the gate insulating
film GIH form the high-breakdown-voltage MISFET QH, while the gate
electrode GEL and the gat insulating film GIL form the
low-breakdown-voltage MISFET QL. Over the peripheral circuit region
1D, the first, second, and third capacitors are formed. The first
capacitor includes the first capacitive electrode CE1, the first
capacitive insulating film CZ1, and the second capacitive electrode
CE2. The second capacitor includes the second capacitive electrode
CE2, the second capacitive insulating film CZ2, and the third
capacitive electrode CE3. The third capacitor includes the third
capacitive electrode CE3, the third capacitive insulating film CZ3,
and the fourth capacitive electrode CE4. The first, second, and
third capacitors are positioned in stacked relation to form the
stacked capacitive element CS.
[0176] Next, as shown in FIG. 2, the metal silicide layers 18 and
the interlayer insulating film 19 are formed (Step S19 in FIG.
5).
[0177] In Step S19, first, as shown in FIG. 2, the metal silicide
layers 18 are formed. By performing a known salicide process, as
shown in FIG. 2, the respective metal silicide layers 18 are formed
over the n.sup.+-type semiconductor regions 17 and the p.sup.+-type
semiconductor regions 16.
[0178] The metal silicide layers 18 are formed also over the
respective upper surfaces of the control gate electrode CG, the
memory gate electrode MG, the gate electrode GEH, the gate
electrode GEL, the third capacitive electrode CE3, and the fourth
capacitive electrode CE4. The metal silicide layer 18 is formed
also over the upper surface of the second capacitive electrode CE2,
though not shown. The metal silicide layers 18 can be, e.g., cobalt
silicide layers, nickel silicide layers, or platinum-added nickel
silicide layers.
[0179] In Step S19, next, as shown in FIG. 2, the interlayer
insulating film 19 is formed. The interlayer insulating film 19 is
formed so as to cover the control gate electrode CG, the gate
insulating film GIm, the memory gate electrode MG, the gate
electrodes GEH and GEL, the second capacitive electrode CE2, the
third capacitive electrode CE3, the fourth capacitive electrode
CE4, and the sidewall spacers SW. The interlayer insulating film 19
is made of a single-layer silicon dioxide film, a laminated film
including a silicon nitride film and a silicon dioxide film, or the
like. After the interlayer insulating film 19 is formed by, e.g., a
CVD method, the upper surface of the interlayer insulating film 19
is planarized by, e.g., a CMP (Chemical Mechanical Polishing)
method.
[0180] Next, as shown in FIG. 2, the plug electrodes 20 are formed
to extend through the interlayer insulating film 19 (Step S20 in
FIG. 5). First, using a resist film (not shown) formed over the
interlayer insulating film 19 using photolithography as an etching
mask, the interlayer insulating film 19 is dry-etched to be formed
with contact holes. Next, after a conductor film is formed in the
contact holes, the conductor film over the interlayer insulating
film 19 is removed therefrom by a CMP method to form the plug
electrodes 20 in the contact holes.
[0181] The contact holes and the plug electrodes 20 embedded
therein are formed over the n.sup.+-type semiconductor regions 17
and over the p.sup.+-type semiconductor regions 16. The plug
electrodes 20 are formed also over the third capacitive electrode
CD3 and over the fourth capacitive electrode CE4. As shown in FIG.
3A, the plug electrode 20 is formed also over the second capacitive
electrode CE2.
[0182] Next, in Step S21 in FIG. 5, as shown in FIG. 2, the
plurality of metal wires 21 are formed over the interlayer
insulating film 9.
[0183] <Main Characteristic Features and Effects of Embodiment
1>
[0184] The stacked capacitive element CS has a structure in which
the second capacitive electrode CE2 is stacked over the first
capacitive electrode CE1 made of the n-type well NW2 (semiconductor
region) via the first capacitive insulating film CZ1, the third
capacitive electrode CE3 is stacked over the second capacitive
electrode CE2 via the second capacitive insulating film CZ2, and
the fourth capacitive electrode CE4 is stacked over the third
capacitive electrode CE3 via the third capacitive insulating film
CZ3. That is, the first, second, third, and fourth capacitive
electrodes CE1, CE2, CE3, and CE4 have regions overlapping each
other in plan view. Each of the electrodes overlaps the active
region AR41 in plan view.
[0185] The first capacitive electrode CE1, the first capacitive
insulating film CZ1, and the second capacitive electrode CE2 are
included in the first capacitor. The second capacitive electrode
CE2, the second capacitive insulating film CZ2, and the third
capacitive electrode CE3 are included in the second capacitor. The
third capacitive electrode CE3, the third capacitive insulating
film CZ3, and the fourth capacitive electrode CE4 are included in
the third capacitor. The stacked capacitive element CS includes the
first, second, and third capacitors which are coupled in parallel
to each other.
[0186] Thus, the staked capacitive element CS has a configuration
in which the plurality of capacitors including the plurality of
electrodes overlapping each other are coupled in parallel to each
other. This can improve a capacitance per unit area and form the
small-size large-capacitance capacitive element.
[0187] Since the capacitive electrodes and the capacitive
insulating films of the stacked capacitive element CS are formed
using the semiconductor regions, the conductor films, and the
insulating films which are included in the memory cell MC and the
MISFETs (both of the high-breakdown-voltage MISFET and the
low-breakdown-voltage MISFET), the semiconductor device having the
large-capacitance stacked capacitive element CS can be provided
without increasing the steps in the manufacturing process of the
semiconductor device.
[0188] The second capacitive insulating film CZ2 is formed using
the insulating film 7 including the silicon nitride film. This can
increase the capacitance value of the second capacitor. The
capacitive insulating film CZ3 also includes the silicon nitride
film. This can increase the capacitance value of the third
capacitor.
[0189] The second capacitive insulating film CZ2 is formed using
the insulating film 7 including the silicon dioxide film and the
silicon nitride film. This allows the stacked capacitive element CS
with a reduced leakage current to be provided. The capacitive
insulating film CZ3 also includes the silicon dioxide film and the
silicon nitride film and therefore achieves the same effect.
Embodiment 2
[0190] Embodiment 2 is a modification of Embodiment 1. In
Embodiment 2, portions common to those in Embodiment 1 are
designated by the same reference numerals. In Embodiment 2, in the
grooves formed in the main surface of a semiconductor substrate,
parts of first and second capacitive electrodes are formed. The
structures of the memory cell MC, the MISFET QH, and the MISFET QL
and the manufacturing methods thereof are the same as in Embodiment
1. Accordingly, a description will be given herein of the structure
of the stacked capacitive element formed in the peripheral circuit
region 1D and the manufacturing method thereof.
[0191] <Structure of Semiconductor Device>
[0192] FIG. 14A is a main-portion plan view of the stacked
capacitive element. FIG. 14B is an illustrative view showing an
example of the circuit configuration of the stacked capacitive
element. FIG. 15A is a main-portion cross-sectional view along the
line X2-X2 in FIG. 14A. FIG. 15B is a main-portion cross-sectional
view along the line Y1-Y1 in FIG. 14A.
[0193] As shown in FIG. 14A, the stacked capacitive element CS has
a structure in which a rectangular first capacitive electrode CE1
having longer sides in a lateral direction, a rectangular second
capacitive electrode CE2 having longer sides in a vertical
direction, a rectangular third capacitive electrode CE3 having
longer sides in the lateral direction, and a rectangular fourth
capacitive electrode CE4 having longer sides in the lateral
direction are stacked. At the center portion of the first
capacitive electrode CE1, an active region AR43 is located. The
active region AR42 is located apart from the active region AR43. As
described above, the active region AR42 is for supplying the
intended potential to the n-type well NW2 included in the first
capacitive electrode CE1. The locations of the active regions AR43
and AR42 are not limited to the foregoing. The shapes of the first,
second, third, and fourth capacitive electrodes CE1, CE2, CE3, and
CE4 are also not limited to rectangles.
[0194] In the X- and Y-directions at the paper sheet with FIG. 14A,
the active region AR43 is located so as to completely cover the
second capacitive electrode CE2. Within the active region AR43, an
annular groove GV having an intended width is formed. The annular
groove GV includes two grooves GV extending in parallel to each
other in the X-direction and two grooves GV extending in parallel
to each other in the Y-axis direction, which are coupled to each
other. Between the two grooves GV extending in the Y-direction,
another groove GV is formed to couple the two grooves GV extending
in the X-direction. In FIG. 14A, the outer shape of the groove GV
is represented by the broken line.
[0195] The second capacitive electrode CE2 is formed only in the
groove GV and in the region enclosed by the broken lines adjacent
to each other in FIG. 14A. The third capacitive electrode CE3 is
located over the second capacitive electrode CE2 to extend in the
X-direction and cross the grooves GV extending in the Y-direction.
The fourth capacitive electrode CE4 is located over the third
capacitive electrode CE3 to extend in the X-direction and cross the
grooves GV extending in the Y-direction. The fourth capacitive
electrode CE4 is wider than the third capacitive electrode CE3 in
the Y-direction to completely cover the third capacitive electrode
CE3.
[0196] The second capacitive electrode CE2 has a protruding portion
which does not overlap the third and fourth capacitive electrodes
CE3 and CE4 in the Y-direction. The third capacitive electrode CE3
has a protruding portion which does not overlap the active region
AR43 and the second fourth capacitive electrodes CE2 and CE4 in the
X-direction. The fourth capacitive electrode CE4 has a protruding
portion which does not overlap the active region AR43 and the
second and third capacitive electrodes CE2 and CE3 in the
X-direction.
[0197] The circuit configuration shown in FIG. 14B is the same as
that shown in FIG. 3B.
[0198] As shown in FIG. 15A or 15B, in the peripheral circuit
region 1D, the semiconductor device has the active regions AR43 and
AR42 and the isolation region IR. Under the active regions AR43 and
AR42 and the isolation regions IR, the n-type well NW2 is formed
continuously. In the active region AR43, the groove GV is formed to
extend inward from the main surface of the semiconductor substrate
1. The groove GV is defined by the side walls and the bottom
surface thereof. The n-type well NW2 is formed deeper than the
groove GV so as to cover the side walls of the groove GV and
surround the groove GV. The n-type well NW2 forms the first
capacitive electrode CE1.
[0199] In the groove GV, the second capacitive electrode CE2 made
of the conductor film 4 is formed via the first capacitive
insulating film CZ1 made of the insulating film 3. Over the side
walls and the bottom surface of the groove GV, the first capacitive
insulating film CZ1 is formed. In the groove GV, the second
capacitive electrode CE2 is embedded up to a predetermined depth.
However, the upper end (upper surface) of the second capacitive
electrode CE2 is lower in level than the main surface of the
semiconductor substrate 1 by a distance d. The first capacitor
including the first capacitive electrode CE1, the first capacitive
insulating film CZ1, and the second capacitive electrode CE2 is
formed along the bottom surface and the side wall of the groove GV.
Accordingly, the capacitance value of the first capacitor can be
increased to be larger than in Embodiment 1.
[0200] In the groove GV, over the second capacitive electrode CE2,
the third capacitive electrode CE3 made of the conductor film 8
extends via the second capacitive insulating film CZ2 made of the
insulating film 7. In the region where the second and third
capacitive electrodes CE2 and CE3 face each other, the second
capacitor including the second capacitive electrode CE2, the second
capacitive insulating film CZ2, and the third capacitive electrode
CE3 is formed.
[0201] The film thickness of the conductor film 8 is set smaller
than that of, e.g., the conductor film 4 or 12. Accordingly, as
shown in FIG. 15A, in the upper surface of the third capacitive
electrode CE3, recessed portions are formed at positions
corresponding to the grooves GV. Over the third capacitive
electrode CE3, the third capacitive insulating film CZ3 made of the
insulating film 9 and the fourth capacitive electrode CE4 made of
the conductor film 12 are formed. In the region where the third and
fourth capacitive electrodes CE3 and CE4 face each other, the third
capacitor including the third capacitive electrode CE3, the third
capacitive insulating film CZ3, and the fourth capacitive electrode
CE4 is formed. In the recessed portions in the upper surface of the
third capacitive electrode CE3 also, the fourth capacitive
electrode CE4 is formed via the third capacitive insulating film
CZ3. By also using the side walls of the recessed portions, the
capacitance value of the third capacitor is increased. As shown in
FIGS. 15A and 15B, the fourth capacitive electrode CE4 also covers
the side surface of the third capacitive electrode CE3 via the
third capacitive insulating film CZ3.
[0202] As shown in FIG. 15B, the second capacitive electrode CE2
formed in the grooves GV is coupled to the metal electrode 21 via
the plug electrode 20 embedded in the opening formed in the
interlayer insulating film 19. Since the second capacitive
electrode CE2 has an upper end (upper surface) lower in level than
the main surface of the semiconductor substrate 1, the depth of the
opening in which the plug electrode 20 coupled to the second
capacitive electrode CE2 is formed can be set shallower than the
depth of the opening in which the plug electrode 20 coupled to the
first capacitive electrode CE1 is formed in Embodiment 1 (FIG. 2).
Since the depth of the opening can be set shallower, the processing
accuracy of the opening is improved to also improve the
manufacturing yield. To be more specific, in the case of Embodiment
2, the depth of the opening is approximately the sum of the film
thickness of the third capacitive electrode CE3, the film thickness
of the fourth capacitive electrode CE4, and the film thickness of
the interlayer insulating film 19 over the fourth capacitive
electrode CE4. By contrast, in Embodiment 1, the depth of the
opening is approximately the sum of the film thickness of the
second capacitive electrode CE2, the film thickness of the third
capacitive electrode CE3, the film thickness of the fourth
capacitive electrode CE4, and the film thickness of the interlayer
insulating film 19 over the fourth capacitive electrode CE4. That
is, in Embodiment 2, the depth of the opening can be set shallower
than that in Embodiment 1 by a dimension equivalent to the film
thickness of the second capacitive electrode CE2. Note that the
deepest opening in Embodiment 1 is the opening in which the plug
electrode 20 coupled to the first capacitive electrode CE1 is
formed (the same applies also to an opening for the source or drain
region of the memory cell MC or the MISFET QH or QL). The deepest
opening in Embodiment 2 is the opening in which the plug electrode
20 coupled to the first capacitive electrode CE1 is formed.
[0203] <Method of Manufacturing Semiconductor Device>
[0204] Next, using FIGS. 16 to 19, a method of manufacturing the
semiconductor device in Embodiment 2 will be described. As
described above, in FIGS. 16 and 19, a description will be given
only of the peripheral circuit region 1D. FIGS. 16A, 17A, 18A, and
19A are main-portion cross-sectional views of the semiconductor
device in Embodiment 2 during the manufacturing process thereof,
which correspond to FIG. 15A. FIGS. 16B, 17B, and 18B are
main-portion cross-sectional views of the semiconductor device in
Embodiment 2, which correspond to FIG. 15B.
[0205] A process flow showing a part of the manufacturing process
of the semiconductor device in Embodiment 2 is the same as in FIGS.
4 and 5. Note that, in Embodiment 2, Step S22 of "forming the
grooves GV" is additionally provided between Steps S2 and S3.
[0206] In the same manner as in Embodiment 1, Steps S1 and S2 are
performed. However, in Embodiment 2, a capacitive element formation
trench is also formed in the peripheral circuit region 1D in
addition to the isolation trench. The two-dimensional pattern of
the capacitive element formation trench is shown by the broken line
in FIG. 14A. That is, in Step S2, the capacitive element formation
trench is also formed at the same time as the isolation trench is
formed and, in the isolation trench and the capacitive element
formation trench, an insulating film made of a silicon dioxide film
is embedded. Then, as shown in FIGS. 16A and 16B, the insulating
film in the capacitive element formation trench is selectively
removed therefrom to form the grooves GV. At this time, the
isolation film in the isolation trench is not removed but is
left.
[0207] Next, as shown in FIGS. 16A and 16B, in the peripheral
circuit region 1D, the n-type well NW2 is formed in the active
regions AR43 and AR42. This process step corresponds to Step S3 in
FIG. 4. The n-type well NW2 is formed in the active regions AR43
and AR42 and is also formed under the isolation film 2. The n-type
well NW2 is integrally formed in the active regions AR43 and AR42.
In addition, the n-type well NW2 is formed so as to surround the
side wall and the bottom surface of the groove GV. The n-type well
NW2 serves as the first capacitive electrode CE1.
[0208] Next, after Step S4 in FIG. 4 is performed, Step S5 is
performed. As shown in FIGS. 17A and 17B, over the bottom surface
and the side wall of the groove GV and the top surface of the
semiconductor substrate 1, the first capacitive insulating film CZ1
made of the insulating film 3 is formed. Next, over the first
capacitive insulating film CZ1, the conductor film 4 is formed, and
then Step S6 is performed. In the peripheral circuit region 1D, the
conductor film 4 is left only in the groove GV to form the second
capacitive electrode CE2.
[0209] A width W1 of the groove GV is set smaller than double the
film thickness of the conductor film 4. As a result, when the
conductor film 4 made of a polysilicon film is deposited, the
groove GV is completely filled therewith. The second capacitive
electrode CE2 is formed by anisotropic dry etching in Step S6 such
that the upper end (upper surface) thereof is lower in level than
the main surface of the semiconductor substrate by a distance d
(>0). That is, the conductor film 4 remains only in the groove
GV. In Embodiment 1, in Step S6, the resist film PR1 is provided
over the peripheral circuit region 1D. By contrast, in Embodiment
2, the peripheral circuit region 1D is not covered with the resist
film PR1 so that the conductor film 4 is exposed.
[0210] Next, Steps S7 and S8 are performed. In the same manner as
in Embodiment 1, over the second capacitive electrode CE2, the
insulating film 7 and the conductor film 8 are deposited. Then, as
shown in FIGS. 18A and 18B, over the conductor film 8, the resist
film PR2 having a pattern covering the portion of the conductor
film 8 where the third capacitive electrode CE3 is to be formed and
exposing the other region thereof is formed. Using the resist film
PR2 as a mask, the conductor film 8 is patterned to form the third
capacitive electrode CE3. Then, the insulating film 7 is etched
into the same pattern as that of the third capacitive electrode CE3
to form the second capacitive insulating film CZ2. In the groove
GV, the upper end of the second capacitive electrode CE2 is lower
in level than the main surface of the semiconductor substrate 1.
Consequently, over the groove GV, in the top surface of the third
capacitive electrode CE3, the recessed portions are formed.
[0211] Next, Step S9 is performed. Then, in the same manner as in
Embodiment 1, Step S10 is performed to form the insulating film 9
over the semiconductor substrate 1. Over the peripheral circuit
region 1D, the insulating film 9 is formed so as to cover the main
surface of the semiconductor substrate 1 and the third capacitive
electrode CE3.
[0212] Next, after Steps S10 to S12 are performed, Step S13 is
performed. In the step of forming the conductor film 12 in Step
S13, in the same manner as in Embodiment 1, the conductor film 12
is formed over the insulating film 9 over the peripheral circuit
region 1D. Next, as shown in FIGS. 19A and 19B, in the same manner
as in Embodiment 1, Step S14 is performed to form the fourth
capacitive electrode CE4 and the third capacitive insulating film
CZ3 over the peripheral circuit region 1D. Here, the third
capacitive insulating film CZ3 and the fourth capacitive electrode
CE4 are formed also in the recessed portions formed in the top
surface of the third capacitive electrode CE3.
[0213] Next, in the same manner as in Embodiment 1, Steps S15 to
S21 are performed to complete the semiconductor device in
Embodiment 2 shown in FIGS. 15A and 15B.
[0214] <Main Characteristic Features and Effects of Embodiment
2>
[0215] According to Embodiment 2, the second capacitive electrode
CE2 of the stacked capacitive element CS is formed along the bottom
surfaces and the side walls of the grooves GV. This can increase
the capacitance value of the first capacitor.
[0216] In addition, the top surface of the third capacitive
electrode CE3 has the recessed portions and the third capacitive
insulating film CZ3 and the fourth capacitive electrode CE4 are
formed in the recessed portions. This can increase the capacitance
value of the third capacitor.
[0217] Since the second capacitor electrode CE2 is formed in the
grooves GV and the plug electrode 20 coupled to the second
capacitive electrode CE2 is formed in the grooves GV, the opening
in the interlayer insulating film 19 in which the plug electrode 20
is provided can be made shallow. This can improve the processing
accuracy of the opening to also improve the manufacturing
yield.
Embodiment 3
[0218] A semiconductor device in Embodiment 3 is a modification of
Embodiment 2. The portions of the semiconductor device in
Embodiment 3 common to those of the semiconductor device in
Embodiment 2 are designated by the same reference numerals. In a
stacked capacitive element in Embodiment 3, first, second, and
third capacitive electrodes are formed along the side walls of the
grooves formed in the main surface of a semiconductor substrate.
The structures of the memory cell MC and the MISFETs QH and QL and
the manufacturing methods thereof are the same as in Embodiment 2
(i.e., the same as in Embodiment 1). Accordingly, a description
will be given herein of the structure of the stacked capacitive
element formed in the peripheral circuit region 1D and the
manufacturing method thereof.
[0219] <Structure of Semiconductor Device>
[0220] FIG. 20A is a main-portion plan view of the stacked
capacitive element. FIG. 20B is an illustrative view showing an
example of a circuit configuration of the stacked capacitive
element. FIG. 21A is a main-portion cross-sectional view of the
stacked capacitive element along the line X3-X3 in FIG. 20A. FIG.
21B is a main-portion cross-sectional view of the stacked
capacitive element along the line Y2-Y2 in FIG. 20A. FIG. 21C is a
main-portion cross-sectional view of the stacked capacitive element
along the line Y3-Y3 in FIG. 20C.
[0221] As shown in FIG. 20A, the stacked capacitive element CS has
a structure in which the rectangular first capacitive electrode CE1
having longer sides in a lateral direction, the rectangular second
capacitive electrode CE2 having longer sides in a vertical
direction, the rectangular third capacitive electrode CE3 having
longer sides in the lateral direction, and the rectangular fourth
capacitive electrode CE4 having longer sides in the lateral
direction are stacked. At the center portion of the first
capacitive electrode CE1, an active region AR44 is located. The
active region AR42 is located apart from the active region AR44. As
described above, the active region AR42 is for supplying the
intended potential to the n-type well NW2 included in the first
capacitive electrode CE1. The locations of the active regions AR44
and AR42 are not limited to the foregoing. The shapes of the first,
second, third, and fourth capacitive electrodes CE1, CE2, CE3, and
CE4 are also not limited to rectangles.
[0222] In the X- and Y-directions at the paper sheet with FIG. 20A,
the second capacitive electrode CE2 is located so as to completely
cover the active region AR44. In the active region AR44, the
annular groove GV having the intended width is formed. The annular
groove GV includes two grooves extending in parallel to each other
in the X-direction and two grooves extending in parallel to each
other in the Y-axis direction, which are coupled to each other.
Between the two grooves GV extending in the Y-direction, another
groove GV is formed to couple the two grooves GV extending in the
X-direction. In FIG. 20A, the outer shape of the groove GV is
represented by the broken line.
[0223] The second capacitive electrode CE2 is formed along the
bottom surface and the side wall of the groove GV to extend to over
the main surface of the semiconductor substrate 1. The third
capacitive electrode CE3 is located over the second capacitive
electrode CE2 to extend in the X-direction and cross the groove GV
extending in the Y-direction. The third capacitive electrode CE3 is
also formed along the bottom surface and the side wall of the
groove GV to extend to over the main surface of the semiconductor
substrate 1. The fourth capacitive electrode CE4 is located over
the third capacitive electrode CE3 and formed in the groove GV to
have a reduced pattern of the groove GV.
[0224] The second capacitive electrode CE2 has a protruding portion
which does not overlap the third and fourth capacitive electrodes
CE3 and CE4 in the Y-direction. The third capacitive electrode CE3
has a protruding portion which does not overlap the active region
AR44 and the second and fourth capacitive electrodes CE2 and CE4 in
the X-direction. The fourth capacitive electrode CE4 has a
protruding portion which does not overlap the third capacitive
electrode CE3 in the Y-direction.
[0225] The circuit configuration shown in FIG. 20B is the same as
in FIG. 3B.
[0226] As shown in FIG. 21A, 21B, or 21C, in the peripheral circuit
region 1D, the semiconductor device has the active regions AR44 and
AR42 and the isolation regions IR. Under the active regions AR44
and AR42 and the isolation regions IR, the n-type well NW2 is
formed continuously. In the active region AR44, the groove GV is
formed to extend inward from the main surface of the semiconductor
substrate 1. The groove GV is defined by the side wall and the
bottom surface thereof. The n-type well NW2 is formed deeper than
the groove GV so as to cover the side wall of the trench GV and
surround the groove GV. The n-type well NW2 is included in the
first capacitive electrode CE1.
[0227] As shown in FIG. 21A, in the groove GV, the second
capacitive electrode CE2 made of the conductor film 4 is formed via
the first capacitive insulating film CZ1 made of the insulating
film 3. The second capacitive electrode CE2 is formed along the
side wall and the bottom surface of the groove GV. Between the
second capacitive electrode CE2 and the semiconductor substrate 1,
the first capacitive insulating film CZ1 is interposed. The first
capacitor including the first capacitive electrode CE1, the first
capacitive insulating film CZ1, and the second capacitive electrode
CE2 is formed along the bottom surface and the side wall of the
groove GV.
[0228] In the groove GV, the third capacitive electrode CE3 made of
the conductor film 8 is formed via the second capacitive insulating
film CZ2 made of the insulating film 7. The third capacitive
electrode CE3 is formed along the side wall and the bottom surface
of the groove GV. Between the third and second capacitive
electrodes CE3 and CE2, the second capacitive insulating film CZ2
is interposed. The second capacitor including the second capacitive
electrode CE2, the second capacitive insulating film CZ2, and the
third capacitive electrode CE3 is formed along the bottom surface
and the side wall of the groove GV.
[0229] Also, in the groove GV, the fourth capacitive electrode CE4
made of the conductor film 12 is formed via the third capacitive
insulating film CZ3 made of the insulating film 9. The fourth
capacitive electrode CE4 is formed along the side wall and the
bottom surface of the groove GV. Between the fourth and third
capacitive electrodes CE4 and CE3, the third capacitive insulating
film CZ3 is interposed. The third capacitor including the third
capacitive electrode CE3, the third capacitive insulating film CZ3,
and the fourth capacitive electrode CE4 is formed along the bottom
surface and the side wall of the groove GV.
[0230] By forming the first, second, and third capacitors using the
side wall of the groove GV, the capacitance values of the first,
second, and third capacitors can be increased. In Embodiment 3, the
width of the groove GV in the X-direction is formed wider than that
of the groove GV in Embodiment 2.
[0231] In FIGS. 21A, 21B, and 21C, over the side walls of the
second, third, and fourth capacitive electrodes CE2, CE3, and CE4,
the sidewall spacers SW are formed. Over the respective top
surfaces (upper surfaces) of the second, third, and fourth
capacitive electrodes CE2, CE3, and CE4 over the semiconductor
region 17 and the semiconductor region 17, the metal silicide
layers 18 are formed.
[0232] To allow the conductor films 4, 8, and 12 to be formed in
the groove GV, the width of the groove GV shown in FIG. 21A is
larger than double the sum of the respective film thicknesses of
the conductor film 4 (second capacitive electrode CE2) and the
conductor film 8 (third capacitive electrode CE3). Also, to allow
the conductor film 12 (fourth capacitive electrode CE4) to be
embedded in the groove GV after the formation of the conductor film
4 (second capacitive electrode CE2) and the conductor film 8 (third
capacitive electrode CE3) in the groove GV, the width of the groove
GV is set smaller than double the sum of the respective film
thicknesses of the conductor film 4 (second capacitive electrode
CE2), the conductor film 8 (third capacitive electrode CE3), and
the conductor film 12 (fourth capacitive electrode CE4).
[0233] (Method of Manufacturing Semiconductor Device)
[0234] Next, using FIGS. 22 to 25, a method of manufacturing the
stacked capacitive element as a part of the semiconductor device in
Embodiment 3 will be described. As described above, in FIGS. 22 to
25, the description will be given only of the peripheral circuit
region 1D. FIGS. 22A, 23A, 24A, and 25A are main-portion
cross-sectional views of the stacked capacitive element in
Embodiment 3 during the manufacturing process thereof, which
correspond to FIG. 21A. FIGS. 22B, 23B, 24B, and 25B are
main-portion cross-sectional views of the stacked capacitive
element in Embodiment 3 during the manufacturing process thereof,
which correspond to FIG. 21B. FIGS. 22C, 23C, 24C, and 24C are
main-portion cross-sectional views of the stacked capacitive
element in Embodiment 3, which correspond to FIG. 21C.
[0235] A process flow showing a part of the manufacturing process
of the semiconductor device in Embodiment 3 is the same as in
Embodiment 2.
[0236] In the same manner as in Embodiment 2, Steps S1 and S2 are
performed. Note that, in the same manner as in Embodiment 2, in
addition to the isolation trench, the capacitive element formation
trench is also formed in the peripheral circuit region 1D. The
two-dimensional pattern of the capacitive element formation trench
is shown by the broken line in FIG. 20A. That is, the capacitive
element formation trench is also formed at the same time as when
the isolation trench is formed and, in the capacitive element
formation trench also, an insulating film made of a silicon dioxide
film is embedded. Then, as shown in FIGS. 22A, 22B, and 22C, the
insulating film in the capacitive element formation trench is
selectively removed therefrom to form the groove GV. At this time,
the isolation film 2 in the isolation trench is not removed but is
left.
[0237] Next, as shown in FIGS. 22A, 22B, and 22C, in the peripheral
circuit region 1D, the n-type well NW2 is formed in the active
regions AR44 and AR42. This step corresponds to Step S3 in FIG. 4.
The n-type well NW2 is formed in the active regions AR44 and AR42
and is also formed under the isolation film 2. The n-type well NW2
is integrally formed in the active regions AR44 and AR42. In
addition, the n-type well NW2 is formed so as to surround the side
wall and the bottom surface of the groove GV. The n-type well NW2
serves as the first capacitive electrode CE1.
[0238] Next, after Step S4 in FIG. 4 is performed, Step S5 is
performed. As shown in FIGS. 23A, 23B, and 23C, over the bottom
surface and the side wall of the groove GV and the top surface of
the semiconductor substrate 1, the first capacitive insulating film
CZ1 made of the insulating film 3 is formed. Next, over the first
capacitive insulating film CZ1, the conductor film 4 is formed and
then Step S6 is performed. In the peripheral circuit region 1D, the
conductor film 4 is left along the bottom surface and the side wall
of the groove GV to form the second capacitive electrode CE2.
[0239] A width W2 of the groove GV is set larger than double the
film thickness of the conductor film 4. As a result, when the
conductor film 4 made of a polysilicon film is deposited, the
groove VB is not filled therewith. That is, the conductor film 4 is
formed along the bottom and side surfaces of the groove GV. In the
same manner as in Embodiment 1, in Step S6, the resist film PR1
corresponding to the area of the peripheral circuit region 1D where
the second capacitive electrode CE2 is to be formed is provided and
then the conductor film 4 is patterned.
[0240] Next, Steps S7 and S8 are performed. In the same manner as
in Embodiment 2, over the second capacitive electrode CE2, the
insulating film 7 and the conductor film 8 are deposited. Then,
over the conductor film 8, a resist film (not shown) having a
pattern covering the portion of the conductor film 8 where the
third capacitive electrode CE3 is to be formed and exposing the
other region is formed. Using the resist film as a mask, the
conductor film 8 is patterned to form the third capacitive
electrode CE3, as shown in FIGS. 24A, 24B, and 24C. Then, the
insulating film 7 is etched into the same pattern as that of the
third capacitive electrode CE3 to form the second capacitive
insulating film CZ2.
[0241] Since the width W2 of the groove GV is sufficiently large,
the third capacitive electrode CE3 is formed along the bottom
surface and the side wall of the groove GV. Even after the
formation of the third capacitive electrode CE3, the groove GV is
not filled therewith.
[0242] Next, Step S9 is performed. Then, in the same manner as in
Embodiment 2, Step S10 is performed to form the insulating film 9
over the semiconductor substrate 1. Over the peripheral circuit
region 1D, the insulating film 9 is formed so as to cover the main
surface of the semiconductor substrate 1 and the third capacitive
electrode CE3.
[0243] Next, after Steps S10 to S12 are performed, Step S13 is
performed. In the step of forming the conductor film 12 in Step
S13, in the same manner as in Embodiment 2, the conductor film 12
is formed over the insulating film 9 over the peripheral circuit
region 1D. Next, as shown in FIGS. 25A, 25B, and 25C, Step S14 is
performed to form the fourth capacitive electrode CE4 and the third
capacitive insulating film CZ3 over the peripheral circuit region
1D. Here, the third capacitive insulating film CZ3 and the fourth
capacitive electrode CE4 are formed in the grooves GV.
[0244] Next, in the same manner as in Embodiment 2, Steps S15 to
S21 are performed to complete the semiconductor device in
Embodiment 3 shown in FIGS. 21A, 21B, and 21C.
[0245] <Main Characteristic Features and Effects of Embodiment
3>
[0246] According to Embodiment 3, not only the first capacitor, but
also the second and third capacitors are formed using the side
walls of the grooves GV. This can also increase the capacitance
values of the second and third capacitors.
[0247] In addition, by forming not only the first capacitor but
also the second and third capacitors in the groove GV, the opening
in the interlayer insulating film 19 can be made shallower. This
can improve the processing accuracy of the opening to also improve
the manufacturing yield.
[0248] While the invention achieved by the present inventors has
been specifically described heretofore on the basis of the
embodiments thereof, the present invention is not limited to the
foregoing embodiments. It will be appreciated that various changes
and modifications can be made in the invention within the scope not
departing from the gist thereof.
[0249] The following is provided as additional description of parts
of the content of the description of the foregoing embodiments.
[0250] (Note 1)
[0251] Provided is a method of manufacturing a semiconductor device
including: a memory cell formed in a first region of a main surface
of a semiconductor substrate; a first MISFET formed in a second
region of the main surface; and a capacitive element formed in a
third region of the main surface. The memory cell includes a
control gate electrode formed over the main surface of the
semiconductor substrate via a first gate insulating film and a
memory gate electrode formed over the main surface of the
semiconductor substrate via a second gate insulating film. The
second gate insulating film has a charge storage portion and is
also interposed between the control gate electrode and the memory
gate electrode. The first MISFET includes a first gate electrode
formed over the main surface of the semiconductor substrate. The
capacitive element includes a first capacitive electrode formed in
the semiconductor substrate, a second capacitive electrode formed
over the main surface of the semiconductor substrate to overlap the
first capacitive electrode in plan view, a third capacitive
electrode formed over the second capacitive electrode to overlap
the second capacitive electrode in plan view, a fourth capacitive
electrode formed over the third capacitive electrode to overlap the
third capacitive electrode in plan view, a first capacitive
insulating film interposed between the first and second capacitive
electrodes, a second capacitive insulating film interposed between
the second and third capacitive electrodes, and a third capacitive
insulating film interposed between the third and fourth capacitive
electrodes. The method includes the steps of: (a) providing the
semiconductor substrate having the first, second, and third
regions; (b) forming a first semiconductor region serving as the
first capacitive electrode in the third region of the semiconductor
substrate; (c) forming a first insulating film over the third
region of the top surface of the semiconductor substrate to form
the first capacitive insulating film; (d) forming a second
insulating film over the first region of the top surface of the
semiconductor substrate to form the first gate insulating film; (e)
forming a first polysilicon film over the semiconductor substrate
to form the control gate electrode over the first gate insulating
film over the first region and form the second capacitive electrode
over the first capacitive insulating film over the third region;
(f) forming a third insulating film over the semiconductor
substrate to form a second gate insulating film over the first
region of the main surface of the semiconductor substrate and over
a side surface of the control gate electrode over the first region
and form the second capacitive insulating film over the second
capacitive electrode over the third region; (g) forming a second
polysilicon film over the semiconductor substrate to form the
memory gate electrode over the second gate insulating film over the
first region and form the third capacitive electrode over the
second capacitive insulating film over the third region; (h)
forming a fourth insulating film so as to cover the control gate
electrode and the memory gate electrode over the first region and
cover the third capacitive electrode over the third region and
forming the third capacitive insulating film over the third region;
and (i) forming a third polysilicon film over the semiconductor
substrate to form the first gate electrode over the second region
and form the fourth capacitive electrode over the third capacitive
insulating film over the third region.
[0252] (Note 2)
[0253] In the method of manufacturing the semiconductor device
according to Note 1, the first insulating film has a film thickness
smaller than that of the second insulating film.
[0254] (Note 3)
[0255] In the method of manufacturing the semiconductor device
according to Note 1, the third insulating film is made of a
laminated film including a first silicon dioxide film, a first
silicon nitride film formed over the first silicon dioxide film,
and a second silicon dioxide film formed over the first silicon
nitride film.
[0256] (Note 4)
[0257] In the method of manufacturing the semiconductor device
according to Note 1, the fourth insulating film includes a second
silicon nitride film.
[0258] (Note 5)
[0259] Provided is a method of manufacturing a semiconductor device
including: a memory cell formed in a first region of a main surface
of a semiconductor substrate; a first MISFET formed in a second
region of the main surface; and a capacitive element formed in a
third region of the main surface. The memory cell includes a
control gate electrode formed over the main surface of the
semiconductor substrate via a first gate insulating film and a
memory gate electrode formed over the main surface of the
semiconductor substrate via a second gate insulating film. The
second gate insulating film has a charge storage portion and is
also interposed between the control gate electrode and the memory
gate electrode. The first MISFET includes a first gate electrode
formed over the main surface of the semiconductor substrate. The
capacitive element includes a first capacitive electrode formed in
the semiconductor substrate, a second capacitive electrode formed
over the main surface of the semiconductor substrate to overlap the
first capacitive electrode in plan view, a third capacitive
electrode formed over the second capacitive electrode to overlap
the second capacitive electrode in plan view, a fourth capacitive
electrode formed over the third capacitive electrode to overlap the
third capacitive electrode in plan view, a first capacitive
insulating film interposed between the first and second capacitive
electrodes, a second capacitive insulating film interposed between
the second and third capacitive electrodes, and a third capacitive
insulating film interposed between the third and fourth capacitive
electrodes. The method includes the steps of: (a) providing the
semiconductor substrate having the first, second, and third
regions; (b) forming a plurality of grooves in the first, second,
third regions of the main surface of the semiconductor substrate,
forming an isolation insulating film in each of the grooves, and
removing the isolation insulating film in the groove in the third
region therefrom to expose a side wall of the groove; (c) forming,
in the third region of the semiconductor substrate, a first
semiconductor region serving as the first capacitive electrode such
that the groove is surrounded thereby; (d) forming a first
insulating film over the side wall of the groove in the third
region to form the first capacitive insulating film; (e) forming a
second insulating film over the first region of the top surface of
the semiconductor substrate to form the first gate insulating film;
(f) forming a first polysilicon film over the semiconductor
substrate to form the control gate electrode over the first gate
insulating film over the first region and form the second
capacitive electrode over the first capacitive insulating film over
the third region; (g) forming a third insulating film over the
semiconductor substrate to form a second gate insulating film over
the first region of the main surface of the semiconductor substrate
and over a side surface of the control gate electrode over the
first region and form the second capacitive insulating film over
the second capacitive electrode over the third region; (h) forming
a second polysilicon film over the semiconductor substrate to form
the memory gate electrode over the second gate insulating film over
the first region and form the third capacitive electrode over the
second capacitive insulating film over the third region; (i)
forming a fourth insulating film so as to cover the control gate
electrode and the memory gate electrode over the first region and
cover the third capacitive electrode over the third region and
forming the third capacitive insulating film over the third region;
and (j) forming a third polysilicon film over the semiconductor
substrate to form the first gate electrode over the second region
and form the fourth capacitive electrode over the third capacitive
insulating film over the third region.
[0260] (Note 6)
[0261] In the method of manufacturing the semiconductor device
according to Note 5, each of the grooves has a width smaller than
double a film thickness of the first polysilicon film.
[0262] (Note 7)
[0263] In the method of manufacturing the semiconductor device
according to Note 6, the second capacitive electrode has an upper
end lower in level than the main surface of the semiconductor
substrate.
[0264] (Note 8)
[0265] In the method of manufacturing the semiconductor device
according to Note 7, the third capacitive electrode has an upper
surface having a recessed portion at a position corresponding to
the groove.
[0266] (Note 9)
[0267] In the method of manufacturing the semiconductor device
according to Note 8, the third capacitive insulating film and the
fourth capacitive electrode are formed in the recessed portion.
[0268] (Note 10)
[0269] In the method of manufacturing the semiconductor device
according to Note 9, the second polysilicon film has a film
thickness smaller than that of the third polysilicon film.
[0270] (Note 11)
[0271] The method of manufacturing the semiconductor device
according to Note 7 further includes: (k) forming an interlayer
insulating film so as to cover the fourth capacitive electrode: (l)
forming an opening in the interlayer insulating film such that the
opening reaches the second capacitive electrode; (m) forming a plug
electrode in the opening; and (n) forming, over the interlayer
insulating film, a metal wire coupled to the plug electrode.
[0272] (Note 12)
[0273] In the method of manufacturing the semiconductor device
according to Note 5, the groove has a width larger than double a
sum of a film thickness of the first polysilicon film and a film
thickness of the second polysilicon film.
[0274] (Note 13)
[0275] In the method of manufacturing the semiconductor device
according to Note 12, the second and third capacitive electrodes
are formed along the side wall of the groove.
[0276] (Note 14)
[0277] In the method of manufacturing the semiconductor device
according to Note 13, the fourth capacitive electrode is formed in
the groove.
[0278] (Note 15)
[0279] Provided is a method of manufacturing a semiconductor device
including: a first capacitive electrode formed in a semiconductor
substrate; a second capacitive electrode formed over a main surface
of the semiconductor substrate to overlap the first capacitive
electrode in plan view; a third capacitive electrode formed over
the second capacitive electrode to overlap the second capacitive
electrode in plan view; a fourth capacitive electrode formed over
the third capacitive electrode to overlap the third capacitive
electrode in plan view; a first capacitive insulating film
interposed between the first and second capacitive electrodes; a
second capacitive insulating film interposed between the second and
third capacitive electrodes; and a third capacitive insulating film
interposed between the third and fourth capacitive electrodes. The
method includes the steps of: (a) providing the semiconductor
substrate; (b) forming, in the semiconductor substrate, a first
semiconductor region serving as the first capacitive electrode; (c)
forming a first insulating film over the main surface of the
semiconductor substrate to form the first capacitive insulating
film; (d) forming a first polysilicon film over the semiconductor
substrate to form the second capacitive electrode over the first
capacitive insulating film; (e) forming a second insulating film
over the semiconductor substrate to form the second capacitive
insulating film over the second capacitive electrode; (f) forming a
second polysilicon film over the semiconductor substrate to form
the third capacitive electrode over the second capacitive
insulating film; (g) forming a third insulating film over the
semiconductor substrate to form the third capacitive insulating
film over the third capacitive electrode; and (h) forming a third
polysilicon film over the semiconductor substrate to form the
fourth capacitive electrode over the third capacitive insulating
film.
[0280] (Note 16)
[0281] Provided is a method of manufacturing a semiconductor device
including: a first capacitive electrode formed in a semiconductor
substrate; a second capacitive electrode formed over the
semiconductor substrate to overlap the first capacitive electrode
in plan view; a third capacitive electrode formed over the second
capacitive electrode to overlap the second capacitive electrode in
plan view; a fourth capacitive electrode formed over the third
capacitive electrode to overlap the third capacitive electrode in
plan view; a first capacitive insulating film interposed between
the first and second capacitive electrodes; a second capacitive
insulating film interposed between the second and third capacitive
electrodes; and a third capacitive insulating film interposed
between the third and fourth capacitive electrodes. The method
includes the steps of: (a) providing the semiconductor substrate;
(b) forming, in a main surface of the semiconductor substrate, a
groove having a side wall; (c) forming, in the semiconductor
substrate, a first semiconductor region serving as the first
capacitive electrode such that the groove is surrounded thereby;
(d) forming a first insulating film over the side wall of the
groove to form the first capacitive insulating film; (e) forming a
first polysilicon film over the semiconductor substrate to form the
second capacitive electrode over the first capacitive insulating
film; (f) forming a second insulating film over the semiconductor
substrate to form the second capacitive insulating film over the
second capacitive electrode; (g) forming a second polysilicon film
over the semiconductor substrate to form the third capacitive
electrode over the second capacitive insulating film; (h) forming a
third insulating film over the semiconductor substrate to form the
third capacitive insulating film over the third capacitive
electrode; and (i) forming a third polysilicon film over the
semiconductor substrate to form the fourth capacitive electrode
over the third capacitive insulating film.
[0282] (Note 17)
[0283] In the method of manufacturing the semiconductor device
according to Note 16, the second capacitive electrode has an upper
end lower in level than the main surface of the semiconductor
substrate.
[0284] (Note 18)
[0285] In the method of manufacturing the semiconductor device
according to Note 17, the third capacitive electrode has an upper
surface having a recessed portion at a position corresponding to
the groove and the third capacitive insulating film and the fourth
capacitive electrode are formed in the recessed portion.
[0286] (Note 19)
[0287] In the method of manufacturing the semiconductor device
according to Note 18, the second polysilicon film has a film
thickness smaller than that of the third polysilicon film.
[0288] (Note 20)
[0289] In the method of manufacturing the semiconductor device
according to Note 16, the groove has a width larger than double a
sum of a film thickness of the first polysilicon film and a film
thickness of the second polysilicon film.
[0290] (Note 21)
[0291] In the method of manufacturing the semiconductor device
according to Note 20, the second and third capacitive electrodes
are formed along the side wall of the groove.
[0292] (Note 22)
[0293] In the method of manufacturing the semiconductor device
according to Note 21, the fourth capacitive electrode is formed in
the groove.
* * * * *