U.S. patent number RE46,088 [Application Number 14/704,647] was granted by the patent office on 2016-08-02 for maintainable substrate carrier for electroplating.
This patent grant is currently assigned to SunPower Corporation. The grantee listed for this patent is SunPower Corporation. Invention is credited to Emmanuel Chua Abas, Jose Francisco S. Capulong, Arnold Villamor Castillo, Chen-An Chen, Edmundo Anida Divino, Jake Randal G. Ermita, Diana Xiaobing Ma.
United States Patent |
RE46,088 |
Chen , et al. |
August 2, 2016 |
Maintainable substrate carrier for electroplating
Abstract
One embodiment relates to a substrate carrier for use in
electroplating a plurality of substrates. The carrier includes a
non-conductive carrier body on which the substrates are placed and
conductive lines embedded within the carrier body. A plurality of
conductive clip attachment parts are attached in a permanent manner
to the conductive lines embedded within the carrier body. A
plurality of contact clips are attached in a removable manner to
the clip attachment parts. The contact clips hold the substrates in
place and conductively connecting the substrates with the
conductive lines. Other embodiments, aspects and features are also
disclosed.
Inventors: |
Chen; Chen-An (San Jose,
CA), Abas; Emmanuel Chua (Laguna, PH), Divino;
Edmundo Anida (Cavite, PH), Ermita; Jake Randal
G. (Laguna, PH), Capulong; Jose Francisco S.
(Laguna, PH), Castillo; Arnold Villamor (Batangas,
PH), Ma; Diana Xiaobing (Saratoga, CA) |
Applicant: |
Name |
City |
State |
Country |
Type |
SunPower Corporation |
San Jose |
CA |
US |
|
|
Assignee: |
SunPower Corporation (San Jose,
CA)
|
Family
ID: |
45869524 |
Appl.
No.: |
14/704,647 |
Filed: |
May 5, 2015 |
Related U.S. Patent Documents
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Application
Number |
Filing Date |
Patent Number |
Issue Date |
|
Reissue of: |
12889232 |
Sep 23, 2010 |
8221601 |
Jul 17, 2012 |
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Current U.S.
Class: |
1/1 |
Current CPC
Class: |
C25D
17/08 (20130101); C25D 17/005 (20130101); C25D
17/004 (20130101); C25D 17/10 (20130101); H05K
3/0097 (20130101); H05K 2203/0169 (20130101); H05K
2203/0723 (20130101); C25D 17/001 (20130101) |
Current International
Class: |
C25B
9/02 (20060101); C25D 17/00 (20060101); C25D
17/10 (20060101); C25D 17/08 (20060101); H05K
3/00 (20060101) |
References Cited
[Referenced By]
U.S. Patent Documents
Other References
International Search Report for Application No. PCT/US2011/043576,
Oct. 21, 2011, 2 sheets. cited by applicant.
|
Primary Examiner: Xu; Ling
Attorney, Agent or Firm: Okamoto & Benedicto LLP
Government Interests
STATEMENT OF FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
The invention described herein was made with Governmental support
under contract number DE-FC36-07GO17043 awarded by the United
States Department of Energy. The Government may have certain rights
in the invention.
Claims
What is claimed is:
1. A substrate carrier for use in electroplating a plurality of
substrates, the carrier comprising: a non-conductive carrier body
on which the substrates are placed; conductive lines embedded
within the carrier body; a plurality of conductive clip attachment
parts, the clip attachment parts being attached in a permanent
manner to the conductive lines embedded within the carrier body;
and a plurality of contact clips attached in a removable manner to
the clip attachment parts, the contact clips holding the substrates
in place and conductively connecting the substrates with the
conductive lines.
2. The substrate carrier of claim 1, wherein a contact clip
includes: a base of the contact clip; a hole in the base which is
aligned with a clip attachment part of the substrate carrier; an
O-ring arranged between the base of the contact clip and the
carrier body; and a connecting screw going through said hole in the
base and through said O-ring so as to attach the base to the clip
attachment part and compress the O-ring.
3. The substrate carrier of claim 1, wherein the contact clip
further includes: a spring coupled to the plate; an arm coupled to
the spring; and a tip coupled to the arm, wherein the tip makes
contact with the substrate being held by the clip.
.[.4. The substrate carrier of claim 3, wherein the spring of the
contact clip comprises multiple bends of metal..].
.[.5. The substrate carrier of claim 3, wherein the arm of the
contact clip comprises a tapered metal plate which is narrower
towards the tip portion..].
.[.6. The substrate carrier of claim 3, wherein a single piece of
metal is used to form the base, the spring and the arm of the
contact clip..].
.[.7. The substrate carrier of claim 6, wherein the single piece of
metal comprises a stainless steel..].
8. The substrate carrier of claim 1, wherein a contact clip
comprises: a base of the contact clip; a hole in the base which is
aligned with a clip attachment part of the substrate carrier; a
spring-attachment plate of the contact clip; a hole in the plate
which is aligned with the hole in the base; and a connecting screw
going through said holes and being screwed onto the clip attachment
part so as to attach the base and the plate to the carrier
body.
9. The substrate carrier of claim 8, wherein the contact clip
further comprises: an O-ring which has a hole which is aligned
between said holes of the base and the plate and which is
compressed between the base and the plate.
10. The substrate carrier of claim 9, wherein the contact clip
further comprises: a torsion spring mechanically coupled to the
plate; and a lever mechanically coupled to both the plate and the
spring.
11. The substrate carrier of claim 10, wherein the base and the
lever are plastic parts, and wherein the screw, the plate, and the
spring are metal parts.
12. The substrate carrier of claim 10, wherein pressing down on a
handle of the lever causes an arm of the spring to lift away from a
surface of the carrier body.
13. The substrate carrier of claim 1, further comprising: a
plurality of spacers on the carrier body, the spacers being
configured to space the substrates from a surface of the carrier
body when the substrates are clipped onto the carrier.
14. The substrate carrier of claim 1, further comprising: a
plurality of aligning features on the carrier body, wherein the
aligning features are arranged to align the substrates clipped onto
the carrier into substrate holding areas and to protect the contact
clips from the substrates.
15. The substrate carrier of claim 14, wherein the aligning
features comprise removable pegs.
16. The substrate carrier of claim 1, further comprising: an
electrically conductive bus bar configured at a top side of the
carrier body and conductively coupled to the conductive lines
embedded in the carrier body, the electrically-conductive bus bar
including a plurality of mounting holes for mounting the carrier
onto a work arm for dipping the carrier body into, and raising the
carrier body out of, an electroplating bath while a voltage is
applied to the bus bar.
17. A method of electroplating substrates, the method comprising:
clipping the substrates to a substrate carrier, the substrate
carrier comprising a non-conductive carrier body on which the
substrates are placed, conductive lines embedded within the carrier
body, conductive clip attachment parts attached in a permanent
manner to the conductive lines, and contact clips attached in a
removable manner to the clip attachment parts; mounting the
substrate carrier onto a mechanical arm; applying a voltage to the
substrates via the contact clips; and dipping the substrate carrier
with the substrates clipped thereon into an electroplating bath;
and unclipping the substrates from the substrate carrier when the
electroplating is complete.
18. The method of claim 17, wherein an automated apparatus is
utilized to open the clips when the substrates are clipped to, or
unclipped from, the substrate carrier.
19. The method of claim 17, further comprising: periodically
replacing clips that are removably attached to the carrier
body.
20. The method of claim 17, further comprising: periodically
replacing spacers and aligning features that are removably attached
to the carrier body.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
The present application is related to commonly-owned U.S. patent
application Ser. No. 12/889,219, .Iadd.now U.S. Pat. No. 8,317,987,
.Iaddend.entitled "Non-Permeable Substrate Carrier for
Electroplating," filed on .[.even date herewith.]. .Iadd.Sep. 23,
2010 .Iaddend.by Emmanuel Abas; Chen-An Chen; Diana Ma; and Kalyana
Ganti. The present application is also related to commonly-owned
U.S. patent application Ser. No. 12/889,228, .Iadd.now U.S. Pat.
No. 8,221,600, .Iaddend.entitled "Sealed Substrate Carrier for
Electroplating," filed on .[.even date herewith.]. .Iadd.Sep. 23,
2010 .Iaddend.by Kalyana Ganti.
BACKGROUND
1. Field of Art
This disclosure relates generally to the field of electroplating.
More particular, this disclosure relates to a carrier for use in
electroplating substrates.
2. Description of the Related Art
Electroplating is a deposition technique that may be used to form a
metal layer on a substrate. In some electroplating processes, the
anode may be made out of the metal to be deposited, and the cathode
may be the substrate to be plated. Both the anode and the cathode
are immersed in an electrolyte solution, and a voltage is applied
across the anode and cathode so that an electrical current flows
between them. This causes oxidation of the metal at the anode so
that ions of the metal are dissolved in the solution. This also
causes reduction of the metal ions at the cathode so that a layer
of the metal is deposited onto the substrate. In other
electroplating processes, the solution may have ions of the metal
to be plated, and the anode may be a non-consumable anode. In this
case, the metal ions may be periodically replenished in the
bath.
In order to efficiently electroplate a large number of substrates,
a carrier may be used to hold multiple substrates and to apply
electrical voltages to those substrates during the electroplating
process. The carrier may be used to transfer the substrates between
different chemical baths and also to safely handle them during
rinsing and drying steps.
The present application discloses improved substrate carriers for
electroplating.
SUMMARY
One embodiment relates to a substrate carrier for use in
electroplating a plurality of substrates. The carrier includes a
non-conductive carrier body on which the substrates are placed and
conductive lines embedded within the carrier body. A plurality of
conductive clip attachment parts are attached in a permanent manner
to the conductive lines embedded within the carrier body. A
plurality of contact clips are attached in a removable manner to
the clip attachment parts. The contact clips hold the substrates in
place and conductively connecting the substrates with the
conductive lines.
Another embodiment relates to a method of electroplating
substrates. The substrates are clipped to a substrate carrier. The
substrate carrier comprises a non-conductive carrier body,
conductive lines embedded within the carrier body, conductive clip
attachment parts are attached in a permanent manner to the
conductive lines, and contact clips attached in a removable manner
to the clip attachment parts. The substrate carrier is mounted onto
a mechanical arm, and a voltage is applied to the substrates via
the contact clips. The substrate carrier with the substrates
clipped thereon is dipped into an electroplating bath, and the
substrates are unclipped from the substrate carrier when the
electroplating is complete.
Another embodiment relates to a method of manufacturing a substrate
carrier for use in electroplating a plurality of substrates. First
and second non-conductive plates are formed, each plate having an
inner face and an outer face. Metal lines are provided and clip
attachment parts are conductively attached to the metal lines in a
permanent manner. The inner faces of the plates are bonded with the
metal lines and clip attachment parts embedded therein, and
openings are formed from the outer faces to access the clip
attachment parts.
Other embodiments, aspects and features are also disclosed in the
present application.
BRIEF DESCRIPTION OF THE DRAWINGS
A more complete understanding of the subject matter may be derived
by referring to the detailed description and claims when considered
in conjunction with the following figures, wherein like reference
numbers refer to similar elements throughout the figures.
FIG. 1 is a planar view of an inner face of a non-conductive plate
for a non-permeable substrate carrier in accordance with an
embodiment of the invention.
FIG. 2 is a planar view of an outer face of the non-conductive
plate in accordance with an embodiment of the invention.
FIG. 3 is a perspective view of a substrate holding area the outer
face of the non-conductive plate in accordance with an embodiment
of the invention.
FIG. 4 is a planar view of a conductive assembly including an
electrically-conductive bus bar and electrically-conductive lines
in accordance with an embodiment of the invention.
FIG. 5A is a first perspective view of a portion of the conductive
assembly of FIG. 4 in accordance with an embodiment of the
invention.
FIG. 5B is a second perspective view of a portion of the conductive
assembly of FIG. 4 in accordance with an embodiment of the
invention.
FIG. 6 is a planar view showing a thermoplastic overmold (or
overcoat) applied to a portion the conductive bus bar in accordance
with an embodiment of the invention.
FIG. 7 is a cross-sectional view which depicts various layers in
the bonding of two carrier plates and a conductive assembly in
accordance with an embodiment of the invention.
FIG. 8 is a perspective view depicting a semiconductor wafer
clipped to a substrate carrier in accordance with an embodiment of
the invention.
FIG. 9A is a perspective view of a first clip assembly in
accordance with an embodiment of the invention.
FIG. 9B is an exploded view showing the parts of the first clip
assembly as separated.
FIG. 10A is a perspective view of a second clip assembly in
accordance with an embodiment of the invention.
FIG. 10B is an exploded view showing the parts of the second clip
assembly as separated.
FIG. 10C further illustrates the Z shape of the lever.
FIG. 11 is a top view showing a double-clip assembly in accordance
with an embodiment of the invention.
FIG. 12 is a perspective view of an outer face on one side of a
permeable substrate carrier in accordance with an embodiment of the
invention.
FIG. 13 is a closer-up perspective view of a portion of the
permeable substrate carrier of FIG. 12 in accordance with an
embodiment of the invention.
FIG. 14 is a flow chart of a method of manufacturing and
maintaining a single-piece substrate carrier for electroplating in
accordance with an embodiment of the invention.
FIG. 15 is a flow chart of a method of using the carrier to
electroplate a plurality of substrates in accordance with an
embodiment of the invention.
DETAILED DESCRIPTION
The following detailed description is merely illustrative in nature
and is not intended to limit the embodiments of the subject matter
or the application and uses of such embodiments. As used herein,
the word "exemplary" means "serving as an example, instance, or
illustration." Any implementation described herein as exemplary is
not necessarily to be construed as preferred or advantageous over
other implementations. Furthermore, there is no intention to be
bound by any expressed or implied theory presented in the preceding
technical field, background, brief summary or the following
detailed description.
Conventional substrate carriers for electroplating have problems
that are difficult to diagnose and solve. One problem with
conventional substrate carriers is that they sometimes break the
substrates during loading of the substrates onto the carrier.
Applicants have analyzed the breakages and have discovered that the
breakages frequently occur in the vicinity of the metal clips used
to hold the substrates to the carrier. Applicants have further
analyzed these breakages and have determined that they are often
due to a portion of the clip impacting the edge of the substrate
when the clip is not fully in a "closed" position.
Another problem with conventional substrate carriers is that the
plating of some of the substrates is frequently incomplete in that
there is non-uniform coverage of the substrate. The positions of
the incompletely-plated substrates in the carrier are not always
the same and appear to be somewhat random. Applicants have analyzed
the incompletely plated substrates and have discovered that the
incompletely-plated "stain" is often at a bottom portion of the
substrate. Applicants have determined that these "stains" are due
to plating solution residue that becomes trapped at the bottom of
the carrier pockets and is not rinsed out.
Other problems relate to a lack of durability of the carriers. In
other words, mechanical breakages limit the useful lifespan of the
conventional substrate carriers before repair or replacement is
necessary. The contact clips frequently fail due to being broken or
damaged, or having too low tension, or not contacting the substrate
in the proper location. In addition, the pads on the carrier often
break or crack. Moreover, the carrier body itself often cracks or
breaks, and the copper conductors within the carrier often fail due
to etching by the chemical baths. Applicants have determined that
that contributing factors for breakage of the carrier body include
overstacking of carriers during staging and mishandling of the
carriers.
The present application discloses improved substrate carriers that
provide solutions to one or more of the above-discussed
problems.
In accordance with one embodiment of the invention, a substrate
carrier is provided that does not have openings allowing solution
to go from one side of the carrier to the other side. In other
words, the substrate carrier is effectively continuous and
non-permeable to the electrolyte solution. A conventional view is
that such openings are advantageous in reducing the weight of the
carrier and allowing the electrolyte solution to flow through from
side to side. However, applicants have surprisingly found that a
"flat" carrier body which is effectively continuous and
non-permeable (without openings going through the body) has various
advantages. First, applicants believe that the flat carrier body
provides a sheeting action which assists in the complete removal of
the electrolyte solution during rinsing. In addition, although the
flat carrier body is conventionally thought to be substantially
heavier (due to the lack of open space), applicants have designed a
flat carrier body with internal cavities so as to substantially
reduce its weight.
In accordance with another embodiment of the invention, a robust
substrate carrier is provided which has improved adhesion between
thermoplastic and metal layers. The improved adhesion results in a
superior hermetic seal which prevents chemical solutions from
prematurely corroding metal within the carrier. As disclosed
herein, the adhesion problems may be solved or reduced by replacing
a previous weak metal-to-thermoplastic surface bond interface with
two strong bond interfaces. The two strong bond interfaces are an
improved metal-to-thermoplastic surface bond interface (using a
bonding technique which provides superior adhesion, such as
injection molding, for example) and a
thermoplastic-to-thermoplastic surface bond interface.
In accordance with another embodiment of the invention, a substrate
carrier is provided which has reduced downtime due to component
failures. The component failures may comprise, for example,
failures of the clips which hold the substrates to be plated to the
carrier. As disclosed herein, a substrate carrier may be configured
such that clips and other components may be removably attached.
This advantageously enables the carrier to be kept in service
without the substantial downtime needed to repair more permanently
attached components.
FIG. 1 is a planar view of an inner face 102 of a non-conductive
(electrically-insulating) plate for a non-permeable substrate
carrier in accordance with an embodiment of the invention. The
non-conductive plate itself is electrically insulating. Also shown
positioned on the inner face is a conductive assembly including an
electrically-conductive bus bar 120 at a top of the carrier and
conductive lines 128 going from the bus bar 120 towards the bottom
of the carrier.
In this exemplary embodiment, the inner face 102 includes fifteen
"X" shaped ribbing patterns 106, each X-shaped ribbing pattern 106
separating four pocket indentations 104. These pocket indentations
104 substantially reduce the weight of the plate.
In addition, shown at the center of the X-shaped ribbing pattern
106 is a center location 111 which corresponds to a center pad
location 211 on the outer face 202 (see FIG. 2, which is described
below). Also shown at a perimeter around each X-shaped ribbing
pattern 106 are first perimeter locations 112 which correspond to
perimeter pad locations 212 on the outer face 202 (see FIG. 2).
Shown at slightly farther out perimeter around each X-shaped
ribbing pattern 106 are second perimeter locations 114 which
correspond to alignment peg locations 214 on the outer face 202
(see FIG. 2).
Further shown in FIG. 1 is a conductive assembly including a metal
bus bar 120 coupled to metal lines 128. For example, the metal bus
bar 120 may be machined stainless steel and the metal lines 128 may
be copper lines. The metal bus bar 120 may be coupled to the metal
lines 128 in an electrically-conductive manner by welding of a
metal cover plate 129 (which may also be stainless steel, for
example). Metal bushings may be welded in the bushing holes 127 to
securely interconnect the plate 129 and a top portion 402 (see FIG.
4) of the metal lines 128. In addition, metal clipping pins 130 are
attached to the metal lines 128 at either side of the X-shaped
ribbing patterns 106. These metal clipping pins may be configured
to allow removable clips to be attached onto the outer surface 202
of the carrier. Some of the metal clipping pins 130 are attached to
metal lines 128 at an edge of the plate and others are attached to
metal lines 128 in an interior of the plate.
The metal bus bar 120 is machined to have a plurality of openings.
Two "keyhole" shaped openings 122 may be included to mount the
carrier onto a mechanical work arm. The "keyhole" shape includes an
alignment feature 123 which enables a more consistent alignment
between the work arm and the carrier. On either side of each
keyhole-shaped opening 122 may be a side opening 124. The side
openings 124 advantageously reduce a weight of the metal bus bar
120. A handle opening 126 is provided at a top center location to
facilitate manual holding of the carrier. The bus bar 120 may also
include a series of bonding holes 132 to facilitate the secure
attachment of a thermoplastic overcoat 602 (see FIG. 6, which is
described below).
Also shown in FIG. 1 are dowel pin holes 140 at the corners of the
carrier. These dowel pin holes 140 go through both the
non-conductive plate and the metal bus bar 120 and may be used for
the alignment of the carrier when it is loaded onto a table or
loader.
FIG. 2 is a planar view of an outer face 202 of the non-conductive
plate in accordance with an embodiment of the invention. A portion
of the conductive bus bar 120 is also shown. In this exemplary
embodiment, the outer face 202 is designed to be substantially
"flat" to reduce a tendency for electrolyte solution to remain
trapped in corners and crevices of the carrier.
The outer face 202 includes fifteen center pad attachment points
211. Shown on a first perimeter around each center pad attachment
point 211 are perimeter pad attachment points 212. These pad
attachment points (211 and 212) may comprise, for example, mounting
holes for removably attaching plastic pads.
Shown on a second perimeter around each center pad attachment point
211 are alignment peg attachment points 214. Points on the second
perimeter are slightly farther out from the center point than
points on the first perimeter. The peg attachment points 214 may
comprise, for example, mounting holes for removably attaching
plastic pegs.
Fifteen areas 213 for holding a substrate (such as a silicon wafer,
for example) are present on the outer face 202 in this exemplary
embodiment. Each substrate holding area 213 is surrounded by the
alignment peg attachment points 214. The pad attachment points (211
and 212) are located within the substrate holding area 213 such
that pads attached at those points provide spacing between the
substrate and the surface of the outer face 202.
Further shown in FIG. 2 are clip attachment features 210. In
accordance with an embodiment of the invention, each clip
attachment feature may comprise a threaded outer surface 502 of a
metal clipping pin (see FIG. 5B, described below). The clip
attachment features are located on opposite sides of each substrate
holding area 213. In the exemplary embodiment shown, the clip
attachment features may be aligned in vertical columns, including
clip attachment features 210 along each side of the plate and clip
attachment features 210 between neighboring substrate holding areas
213 in an interior region of the plate.
FIG. 3 is a perspective view of a substrate holding area 213 on the
outer face 202 of the non-conductive plate in accordance with an
embodiment of the invention. As shown, at a center of the substrate
holding area 213 is a center pad 311 (attached to the center
attachment point 211 shown in FIG. 2). Shown on a first perimeter
around the center pad 311 are perimeter pads 312 that are removably
attached to the perimeter attachment points 212. For example, the
center and perimeter attachment points (211 and 212) may comprise
insertion holes, and the pads (311 and 312) may be attached by
inserting stubs on the underside of the pads into the insertion
holes. The pads (310 and 311) may be are provided so as to
advantageously create a rinsing space between the surface of the
outer face 202 and the substrate to be plated. The pads (310 and
311) may be made of plastic and may be configured to be removable
for ease of replacement when they become worn or damaged. In one
implementation, the pads may have a flat surface that is in a "tear
drop" shape.
Shown on a second perimeter around the center pad 311 are alignment
pegs 314 that are removably attached to the alignment peg
attachment points 214. (Points on the second perimeter are slightly
farther out from the center pad 311 than points on the first
perimeter.) For example, the peg attachment points 214 may comprise
insertion holes, and the pegs 314 may be attached by inserting a
stub at the bottom of each peg into an insertion hole. The pegs 314
have the dual functionalities of holding the substrate to be plated
within the substrate holding space and protecting the clips from
damage that may be caused by the substrate. The pegs 314 may be
made out of plastic and may be configured to be removable for ease
of replacement when they become worn or damaged. In one
implementation, the pegs 314 may be tapered.
As further shown, on one side of the substrate holding area 213 is
a first set of three clip attachment features 210, and on the other
aide is a second set of three clip attachment features 210. The
clip attachment features 210 may be configured such that
electrically-conductive clips may be removably attached for ease of
replacement when they become worn or damaged. The clip attachment
features 210 form an electrically-conductive path between the
conductive assembly (such as depicted in FIG. 4) and the
electrically-conductive clips.
In addition, FIG. 3 depicts relief cuts 316 surrounding the clip
attachment features 1210. These relief cuts 316 are recessed areas
that facilitate proper positioning of a base of a clip assembly
(for example, see base 1012 of clip assembly 1000 shown in FIGS.
10A and 10B).
FIG. 4 is a planar view of a conductive assembly (weldment)
including an electrically-conductive bus bar 120 and metal lines
128 in accordance with an embodiment of the invention. As shown,
metal clipping pins 130 are attached to the metal lines 128. As
further shown, the metal lines 128 are attached to a connecting
plate 402 which is used to connect the conductive bus bar 120 to
the metal lines 128. In one embodiment, the bus bar 120 may be
formed from stainless steel, and the metal lines 128 may comprise
copper lines.
FIGS. 5A and 5B are two perspective views showing portions of the
conductive assembly of FIG. 4 in accordance with an embodiment of
the invention. As shown in FIG. 5A, the connecting plate 402 is
sandwiched between two metal cover plates 129. Bushings may then be
welded in the bushing holes 127 so as to electrically and
mechanically connect the conductive bus bar 120 to the metal lines
120. The metal clipping pins 130 are attached in a permanent manner
(for example, welded) to the metal lines 120. As shown in FIG. 5B,
the metal clipping pins 130 may include a threaded outer surface
502. Furthermore, a thermoplastic layer (or overcoat) 504 may be
deposited, for example, by injection molding, around the metal
clipping pins 130 on the metal lines 128. In addition, a further
thermoplastic layer (or overcoat) 506 may be deposited, for
example, by dip coating or spray coating, over the metal lines 128.
For ease of illustration, only a small segment of the metal lines
128 is shown with the thermoplastic layer 506 in FIG. 5B. However,
the thermoplastic layer 506 may be coated over either a portion of,
or an entirety of, the metal lines 128 in accordance with
embodiments of the invention.
FIG. 6 is a planar view showing a thermoplastic overmold (or
overcoat) 602 applied to a portion the conductive bus bar 120 in
accordance with an embodiment of the invention. As shown, the
thermoplastic overmold 602 preferably spans a horizontal length of
the conductive bus bar 120. In this exemplary configuration, the
thermoplastic overmold 602 fills the bonding holes 132 the so as to
bond securely to the conductive bus bar 120. The thermoplastic
overmold 602 over select portions of the conductive bus bar 120 may
be applied, for example, by injection molding.
FIG. 7 is a cross-sectional view which depicts various layers in
the bonding of two carrier plates and a conductive assembly in
accordance with an embodiment of the invention. Note that FIG. 7 is
not to scale and depicts the various layers for purposes of
explanation.
As shown, a lower portion of the conductive bus bar 120 is
sandwiched between the inner faces 102 of the two non-conductive
carrier plates 700. As shown, the thermoplastic overmold 602 covers
both sides of the conductive bus bar 120. A solvent cement layer
732 may be used to form a plastic-to-plastic bond between the inner
surfaces 102 of the non-conductive carrier plates 700 and the
thermoplastic overcoat 602 on the conductive bus bar 120.
FIG. 8 is a perspective view depicting a semiconductor wafer 804
clipped to a substrate carrier in accordance with an embodiment of
the invention. As shown, the wafer 804 may be placed in a space
defined by alignment pegs 314 along its perimeter. Underneath the
wafer 804 may be spaced from the outer face 202 of the carrier by a
plurality of pads (for example, a center pad 311 and perimeter pads
312) (not shown). In this exemplary embodiment,
electrically-conductive clips 802 are attached to the clip
attachment features 210 on opposite sides of the wafer 804. When
holding the wafer 804 to the carrier, each electrically-conductive
clip 802 may be positioned so that its contact point rests on a
metallic contact pad 806 on the surface of the wafer 804. In an
exemplary embodiment, the wafer 804 is configured such that each
contact pad 806 is located directly above one of the perimeter pads
312 so that the clip may press the wafer directly against the pad
(see neighboring space for another wafer on the right).
FIG. 9A is a perspective view of a first clip assembly 900 in
accordance with an embodiment of the invention. As shown, the first
clip assembly 900 may include a clip 901, a screw 912 and an O-ring
914. In this exemplary embodiment, the clip 901 may be formed from
a single stainless steel piece (SS 301 which is fully hardened, for
example). In addition, the screw 912 may be threaded on the inside
so that it may be screwed onto the outer thread 502 of the clip
attachment pin 130.
FIG. 9B is an exploded view showing the parts of the first clip
assembly 900 as separated. In addition, various features of the
clip 901 are labeled. As seen, the clip 901 includes a base 902
with a hole 904. The clip attachment pin 130 fits through the
O-ring 914 and the hole 904, and then the screw 912 may be screwed
onto outer thread 502 of the clip attachment pin 130. The base 904
of the clip 901 may also include one or more alignment features 903
so as to provide for the correct angular orientation of the clip
once it is attached.
As further shown, a spring 905 may extend upward from the base 902.
In this case, the spring comprises folds of the metal which forms
the clip. A clip arm 906 may start at the top of the spring 905 and
extend away from the base 902. As seen, the arm 906 may be tapered
in an exemplary embodiment to improve its lifetime. A tip portion
908 may extend downward from the end of the arm 906 which is
furthest from the base 902. A contact feature 910 may be formed at
the lowest point of the tip portion 908. The contact feature 910 is
the part of the clip 901 which makes physical contact with the
substrate to be plated (for example, at the contact pads 806 on a
surface of a semiconductor wafer). In one implementation, the
contact feature 910 is approximately 1 mm wide.
FIG. 10A is a perspective view of a second clip assembly 1000 in
accordance with an embodiment of the invention. In this exemplary
embodiment, the second clip assembly 1000 may include both metal
and plastic parts. FIG. 10B is an exploded view showing parts of
the second clip assembly 1000 as separated. As shown, the second
clip assembly may a plastic base 1012, a metal spring-attachment
plate 1014, a metal screw 1016, a metal double-torsion
spring-loaded clip 1018, a plastic lever 1020, and a rubber O-ring
1022.
The screw 1016 includes a shaft which fits through an opening of
the spring attachment plate 1014, the O-ring 1022, and through an
opening in the base 1012. In an exemplary implementation, the shaft
1042 may be threaded internally so as to be screwed onto an outer
thread 502 of a metal clipping pin 130. The lever 1020 is also
attached to the base 1020 using features 1030.
Wire ends 1038 at a base of the spring-loaded clip 1018 fit into
ferrule features 1040 on the spring attachment plate 1014. The arm
1036 of the spring-loaded clip 1018 fits through an opening 1034 in
the lever 1020. When the arm 1042 of the lever 102 is pressed down,
the arm 1036 of the clip 1018 is raised. When the arm 1042 of the
lever 102 is released, the arm 1036 of the clip 1018 is
lowered.
The shaft of the screw 1016 may pass through the O-ring 1022, a
hole in the spring-attachment plate 1014, and a hole in the base
1012. The shaft of the screw 1016 may have an inner thread which
screws onto the outer thread of the clip attachment pin 130 so as
to attach the base 1012 to the outside face 202 of the
non-conductive carrier plate. The O-ring 1022 may fit into a
recessed ring surrounding the hole in the base 1012 so as to
prevent the electrolytic solution of the plating bath from reaching
to the clip attachment pin 130.
The spring-loaded clip 1018 may be made of stainless steel (SS 301,
for example) and may include wire ends 1038 that fit into ferrules
1040 of the spring-attachment plate 1014. The spring-loaded clip
1018 may further include an arm 1036 that may be squeezed so as to
fit in and through a spring hole 1034 in the lever 1020. The spring
opening 1034 may provide dual functionalities of protecting the
spring coils 1037 and limiting the right-to-left and left-to-right
movements of the arm 1036. The lever 1020 may include male
rotatable attachment features 1030 that fit into corresponding
female rotatable attachment features 1028 of the base 1012. The
male rotatable attachment features 1030 thus form a pivot shaft for
pivotally mounting the lever 1020.
The lever (actuating arm) 1020 may be formed in a "Z" shape. The Z
shape is illustrated in FIG. 10C. The Z shape of the lever 1020
advantageously allows for a wide window for opening the clips,
particularly when they are arranged into a double-clip assembly
1100 as described below in relation to FIG. 11.
When the clip assembly 1000 is attached to the clip attachment pin
130, a handle 1042 of the lever 1020 may be pressed down to open
(disengage) the clip by lifting up the arm of the spring-loaded
clip 1018 and so raise the contact feature 1044 at its tip.
Releasing the handle 1042 of the lever 1020 causes the clip to
close (engage) by lowering the arm of the spring-loaded clip 1018
so that the contact feature 1044 exerts a downward force to hold in
place the substrate to be plated.
In accordance with an embodiment of the invention, the clip
assembly 1000 forms an electrically-conductive path from the metal
clipping pins 130 to the substrate to be electroplated. In one
implementation, the screw 1016, the spring-attachment plate 1014
and the clip 1018 are each metallic so as to form the
electrically-conductive path from the metal clipping pins 130 to
the substrate to be electroplated.
FIG. 11 is a top view showing a double-clip assembly 1100 in
accordance with an embodiment of the invention. Such a double-clip
assembly 1100 is preferably attached to the clip attachment
features 210 which are located between two substrate holding areas
213. As shown, in this embodiment, the base 1012 is configured with
two sets of female rotatable attachment features 1028 (one set to
the left of the screw 1016 and one set to the right of the screw
1016) such that two levers 1020 may be pivotally mounted to the
base 1012. Two spring arms 1018 are attached by inserting their
wire ends 1038 into two sets of ferrules 1040 on the
spring-attachment plate 1014 and by squeezing them into the spring
holes 1034 of the levers 1020. One spring arm 1018 is oriented with
its tip portion is over a first substrate holding area 213 towards
the top of the diagram, and the other spring arm 1018 is oriented
with its tip is over a second substrate holding area 213 towards
the bottom of the diagram.
In accordance with an embodiment of the invention, a robotic
machine may be configured to open all the clips surrounding each
substrate holding area 213 and a wafer (or other substrate to be
processed) may be placed therein. The opening of the clips may be
accomplished by simultaneously pressing down on the handles 1042 to
raise the arms of the corresponding spring-loaded clips 1018. The
clips surrounding each substrate holding area 213 may then be
closed by the robotic machine releasing the handles 1042 to lower
the arms of the corresponding spring-loaded clips 1018 such that
the contact features 1044 press against the metallic contact pads
806 to hold the wafer (or other substrate or other substrate to be
plated) firmly in place. Once all the wafers (or other substrates)
to be processed have been thus loaded onto the carrier, then the
plating and other processing may be performed. After the
processing, a robotic machine may be configured to re-open all the
clips surrounding each substrate holding area 213 so that the
processed wafers (or other substrates) may be removed and replaced
with wafers to be subsequently processed.
FIG. 12 is a perspective view of an outer face 1202 on one side of
a permeable substrate carrier in accordance with an embodiment of
the invention. In this alternate embodiment, the two plates forming
each substrate carrier each include at least one opening for each
substrate holding area. The embodiment illustrated has one large
opening 1204 at the center of each substrate holding area. As
shown, the openings 1204 may be circular, for example. The openings
1204 reduce the weight of the carrier body and allows rinsing
solution to flow through (permeate) the carrier body. Applicants
believe that the openings 1204 reduce a drag force when the carrier
is removed from a bath.
The conductive assembly (weldment) including the
electrically-conductive bus bar 120 at the top of the carrier and
conductive lines 128 going from the bus bar 120 towards the bottom
of the carrier may be the same as, or similar to, the conductive
assembly described above in relation to FIGS. 4, 5A, 5B, 6 and
7.
Further shown in FIG. 12 are clip attachment features 1210 on left
and right sides of each opening 1204. Electrically-conductive clips
are preferably attached to the clip attachment features 1210. The
electrically-conductive clips may be the same as, or similar to,
the clip assembly 900 described above in relation to FIGS. 9A and
9B, or the clip assemblies (1000 and 1100) described above in
relation to FIGS. 10A, 10B, 10C and 11.
In addition, FIG. 12 shows support ribs 1220 on the left, bottom,
and right sides of the carrier body. These support ribs 1220
provide structural strength to the carrier body. In accordance with
an embodiment of the invention, the support ribs 1220 have a
tapered profile to advantageously facilitate non-retention of
electrolyte solution.
Also shown in FIG. 12 are horizontal support bars 1222. The
horizontal support bars 1222 may be configured between rows of the
openings 1204 to provide additional structural strength to the
carrier body. In accordance with an embodiment of the invention,
the raised horizontal support bars 1222 have a tapered profile to
advantageously facilitate non-retention of electrolyte
solution.
In addition, FIG. 12 shows a plurality of stacking features 1224 on
the carrier body. In one implementation, the stacking features 1224
may be arranged periodically along the horizontal support bars
1222. The stacking features 1224 are configured so as to maintain
alignment and separation between carrier bodies when they are
stacked.
FIG. 13 is a closer-up perspective view of a portion of the
permeable substrate carrier of FIG. 12 in accordance with an
embodiment of the invention. As shown, each side surrounding an
opening 1204 includes substrate alignment features 1314. The
substrate alignment features 1314 are positioned around the opening
1204 and are configured such that the wafer (or other substrate) to
be plated fits within a region having these substrate alignment
features 1314 at its perimeter.
As further shown, there are several spacing features 1312
positioned around the opening 1204. The spacing features 1312 are
positioned to lie underneath the wafer or other substrate to be
plated when it is clipped to the substrate carrier. The spacing
features 1312 provides a space or gap between the substrate and the
carrier.
In addition, FIG. 13 depicts relief cuts 1316 surrounding the clip
attachment features 1210. These relief cuts 1316 are recessed areas
that facilitate proper positioning of a base of a clip assembly
(for example, see base 1012 of clip assembly 1000 shown in FIGS.
10A and 10B).
FIG. 14 is a flow chart of a method 1400 of manufacturing and
maintaining a single-piece substrate carrier for electroplating in
accordance with an embodiment of the invention. The single-piece
substrate carrier is substantially more robust when compared
against a prior multiple-piece substrate carrier.
Blocks 1402 through 1408 pertain to the manufacture of a conductive
assembly. The conductive assembly may be, for example, configured
as the conductive assembly (weldment) described above in relation
to FIG. 4.
In block 1402, an electrically-conductive bus bar is fabricated. In
one example, the bus bar may be fabricated by machining a 6
millimeter thick stainless steel (SS 316, for example) bar to a
shape with openings such as described above in relation to the bus
bar 120 shown in FIG. 1. After machining, the bus bar may be
deburred and cleaned.
In block 1404, a portion of the bus bar spanning its horizontal
length is overmolded or overcoated with a thermoplastic. The
overmolding or overcoating may be performed, for example, by
injection molding chlorinated polyvinyl chloride (CPVC) over a
lower portion of the bus bar. In one example, the thermoplastic
overcoat may be formed over an area of the bus bar such as the area
602 shown in FIG. 6.
In block 1405, the bus bar and metal lines may be pre-treated prior
to being conductively attached together. The pre-treatment may
comprise degreasing with sand blasting and/or using a grit cloth to
remove surface deposits and may also comprise cleaning with
multiple washes and air drying. The pre-treatment may also include
pre-treating with chemicals to promote adhesion between the bus bar
(stainless steel, for example) and the metal lines (copper, for
example).
In block 1406, metal lines are conductively attached to the bus
bar. This may be accomplished, for example, by welding the metal
lines (for example, copper) to the bus bar (for example, stainless
steel). In one example, the metal lines may be configured similarly
to the configuration of metal lines 128 shown in FIG. 4.
In block 1408, clip-attachment parts are conductively attached to
the metal lines, and thermoplastic layers may be deposited. The
thermoplastic layers may include, for example, a thermoplastic
layer (see 504 in FIG. 5B) surrounding each clip-attachment parts
and a thermoplastic layer (see 506 in FIG. 5B) over the metal
lines.
Blocks 1410 and 1412 pertain to the manufacture of the
non-conductive plates for the carrier body. In one embodiment, the
non-conductive plates may be formed from CPVC material. Other
embodiments may use different thermoplastic materials.
In block 1410, two non-conductive plates are formed with various
features for the carrier body. In a first embodiment, the carrier
body is designed to be non-permeable to electrolytic solution and
may comprise non-conductive plates with an inner face 102 as shown
in FIG. 1 and an outer face 202 as shown in FIG. 2. In this
embodiment, although holes are formed through the plates for the
clip attachment parts, the thermoplastic layer around the clip
attachment parts are bonded to the inner face of the non-conductive
plate to maintain the non-permeable aspect of the carrier body. In
a second embodiment, the carrier body is designed to be permeable
to electrolytic solution and may be configured with large circular
openings 1204 as shown in FIG. 12.
In block 1412, the surfaces of the plates are prepared prior to
bonding. For example, the surfaces may be sand blasted and then
cleaned with multiple washes and air drying.
Blocks 1414 through 1416 pertain to the integration of the
conductive assembly and the carrier plates to form a single-piece
substrate carrier. In block 1414, a solvent cement is applied to
areas of the inner faces of the two plates. In the plates are made
of CPVC, then an exemplary solvent cement may be a CPVC solvent
cement, such as, for instance, Weld-On.RTM. 724.TM. solvent
cement.
In block 1416, the inner sides of the two plates are bonded with
the overmolded portion of the bus bar and the metal lines encased
therebetween. The positioning of the bus bar and the metal lines
against an inner face of one of the plates is depicted in FIG. 1,
for example. The bonding process may involve, for example:
application of a primer to the inner faces of the plates;
application of a gum material on the areas of the inner faces where
the metal lines are to be embedded; embedding the metal lines
within the gum material; bonding the inner faces of the two plates;
and curing the bonded plates (for example, for 72 hours).
Blocks 1417 and 1420 pertain to adding the clips, pads and pegs
onto the outer faces of the carrier plates.
In block 1417, post-bond drilling for the clip-attachment parts and
tapping or threading of the clip-attachment parts are performed.
Thereafter, in block 1418, clips to hold the substrates to the
carrier may be attached in a removable manner to the clip
attachment features at the outer faces of the carrier. Because the
clips are removably attached, they may be readily replaced when
worn or damaged. In one embodiment, the clips may comprise clip
assemblies 900 such as those depicted in FIGS. 9A and 9B. In
another embodiment, the clips may comprise single clips on the
edges of the carrier and double clips on the interior of the
carrier (where the double clips are between two substrate holding
areas). The single clips may comprise, for example, the clip
assembly 1000 depicted in FIGS. 10A, 10B. The double clips may
comprise, for example, the clip assembly 1100 depicted in FIG.
11.
In block 1420, spacing pads and substrate-alignment pegs may be
removably attached onto the outer faces of the carrier plates.
Because the pads and pegs are removably attached, they may be
readily replaced when worn or damaged. The spacing pads may be
removably attached to the pad attachment points (211 and 212) at
the outer faces 202 of the carrier. In one embodiment, the spacing
pads may comprise the pads (311 and 312) depicted in FIG. 3. The
substrate-alignment pegs may be removably attached to the alignment
peg attachment points 214 at the outer faces 202 of the
carrier.
Blocks 1422 and 1426 pertain to maintaining the substrate carrier.
In block 1422, the carrier is used to electroplate substrates. Use
of the carrier typically involves dipping the carrier with the
substrates clipped thereon into one or more electroplating baths
while a voltage is applied to the substrates by way of the clips.
See the method 1500 described below in relation to FIG. 15, for
example.
Upon occasion, the clips may become worn or damaged. In accordance
with an embodiment of the invention, the worn or damaged clips may
be readily replaced per block 1424. In one implementation, the
replacement of the clips may be performed on a periodic schedule.
This advantageously allows the carrier to be kept in service
without the substantial downtime needed to repair more permanently
attached clips.
Similarly, upon occasion, the spacing pads and/or alignment pegs
may become worn or damaged. In accordance with an embodiment of the
invention, the worn or damaged pads and/or pegs may be readily
replaced per block 1426. In one implementation, the replacement of
the pads and/or pegs may be performed on a periodic schedule. This
advantageously allows the carrier to be kept in service without the
substantial downtime needed to repair more permanently attached
pads and/or pegs.
FIG. 15 is a flow chart of a method 1500 of using a substrate
carrier to electroplate a plurality of substrates in accordance
with an embodiment of the invention. In block 1502, a robotic
loader may be used to clip a plurality of substrates to the
substrate holding areas of the carrier. In block 1504, the
substrate carrier may be mounted on a work arm of an electroplating
machine.
In block 1506, the electroplating machine may mechanically dip the
carrier into an electroplating bath. Per block 1508, a voltage may
be applied to the substrates by way of the electrically-conductive
path traveling through the bus bar, the metal lines, and the clips.
In one example, the substrates may comprise silicon wafers. The
clips may make contact, for example, with a base (seed) layer of
copper (or other metal) in gridlines on the surface of the wafers.
A metal layer may then be deposited from the electroplating bath on
top of the base layer.
Per block 1512, if more metal layers are to be electroplated onto
the substrates, then the method 1500 may loop back to block 1506
and the carrier may be mechanically dipped into a different
electroplating bath to deposit a different metal layer so as to
form a multi-layer stack for a metal contact, for example. When no
more metal layers are to be electroplated onto the substrates, then
per block 1514 the substrates may be removed from the carrier by a
robotic machine, for example. Thereafter, the method 1500 may loop
back to block 1502 and other (unplated) substrates to be processed
may be robotically clipped onto the substrate carrier.
While at least one exemplary embodiment has been presented in the
foregoing detailed description, it should be appreciated that a
number of variations exist. It should also be appreciated that the
exemplary embodiment or embodiments described herein are not
intended to unnecessarily limit the scope, applicability, or
configuration of the claimed subject matter. Rather, the foregoing
detailed description will provide those skilled in the art with a
convenient road map for implementing the described embodiment or
embodiments. It should be understood that various changes can be
made in the design and arrangement of elements without departing
from the scope defined by the claims, which includes known
equivalents and foreseeable equivalents at the time of filing this
patent application.
* * * * *