Electrode plate peripheral ring for a plasma processing apparatus Patent Grant Isozaki , et al. Dec [Hitachi High-Technologies Corporation]

Electrode plate peripheral ring for a plasma processing apparatus

Isozaki , et al. Dec

Patent Grant D871609

U.S. patent number D871,609 [Application Number D/635,296] was granted by the patent office on 2019-12-31 for electrode plate peripheral ring for a plasma processing apparatus. This patent grant is currently assigned to Hitachi High-Technologies Corporation. The grantee listed for this patent is Hitachi High-Technologies Corporation. Invention is credited to Takao Arase, Takahisa Hashimoto, Masakazu Isozaki, Masahito Mori, Kenetsu Yokogawa.

United States Patent	D871,609
Isozaki , et al.	December 31, 2019

Electrode plate peripheral ring for a plasma processing apparatus

Claims

CLAIM The ornamental design for an electrode plate peripheral ring for a plasma processing apparatus, as shown and described.

Inventors:

Isozaki; Masakazu (Tokyo, JP), Mori; Masahito (Tokyo, JP), Yokogawa; Kenetsu (Tokyo, JP), Arase; Takao (Tokyo, JP), Hashimoto; Takahisa (Tokyo, JP)

Applicant:

Name	City	State	Country	Type
Hitachi High-Technologies Corporation	Minato-ku, Tokyo	N/A	JP

Assignee:

Hitachi High-Technologies Corporation (Tokyo, JP)

Appl. No.:

D/635,296

Filed:

January 30, 2018

Foreign Application Priority Data


Aug 31, 2017 [JP]			2017-018890

Current U.S. Class:	D24/224
Current International Class:	2402
Field of Search:	;D24/107,110.6,113,129,144,206,224,193,197,216 ;D23/200,213-215,222,223,229,283,269 ;D15/140,17,126,138,199 ;D13/182 ;D12/212 ;D8/66,358,375

References Cited [Referenced By]

U.S. Patent Documents


D368516	April 1996	Matsumura
D458380	June 2002	Dutil
D494551	August 2004	Doba
D563531	March 2008	Katsura
D638550	May 2011	Bedingham
D649986	December 2011	Fujikata
D667561	September 2012	Bedingham
D672050	December 2012	Lee
D683451	May 2013	Todd
D697038	January 2014	Matsumoto
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Foreign Patent Documents


D1117165	Aug 2001	JP
D1142402	Jun 2002	JP
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Other References

Spiral Wound Gasket, CRIR, 12 in, 161/8 in. Online, published date unknown. Retrieved on Apr. 19, 2019 from URL: https://www.zoro.com/klinger-spiral-wound-gasket-type-cr-spiral-wound-gas- ket-crir-12-in-16-18-in-swcrir-1200-p1-g-we-oa/i/G1610248/. cited by examiner .
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GAMFLEX Metal Jacket Gaskets. Online, published date unknown. Retrieved on Apr. 19, 2019 from URL: http://www.gambitgi.eu/en/produkty/seals/gamflex-metal-jacket-gaskets.htm- l. cited by examiner .
Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018. cited by applicant .
Okuda et al., Design U.S. Appl. No. 29/635,289, filed Jan. 30, 2018. cited by applicant .
Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018. cited by applicant.

Primary Examiner: Hattan; Susan Bennett
Assistant Examiner: Agilee; Omeed
Attorney, Agent or Firm: Crowell & Moring LLP

Description

This application contains subject matter related to the following co-pending U.S. design patent applications:

Application Ser. No. 29/635,287, filed herewith and entitled "Electrode Plate for a Plasma Processing Apparatus";

Application Ser. No. 29/635,289, filed herewith and entitled "Gas Ring for a Plasma Processing Apparatus"; and

Application Ser. No. 29/635,292, filed herewith and entitled "Electrode Cover for a Plasma Processing Apparatus".

FIG. 1 is a front, bottom and right side perspective view of an electrode plate peripheral ring for a plasma processing apparatus according to the design;

FIG. 2 is a rear, bottom and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a rear elevational view thereof;

FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 3;

FIG. 10 is a cross-sectional view taken along line 10-10 of FIG. 3;

FIG. 11 is an enlarged view of the portion shown in BOX 11 in FIG. 9;

FIG. 12 is an enlarged view of the portion shown in BOX 12 in FIG. 11; and,

FIG. 13 is a rear, bottom and left side perspective view of a cross-sectional view taken along line 10-10 of FIG. 3.

The broken lines in FIG. 9 show the boundary of the enlarged portion illustrated in FIG. 11 and form no part of the claimed design. The broken lines in FIG. 11 show the boundary of the enlarged portion illustrated in FIG. 12 and form no part of the claimed design.

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References

Patent Diagrams and Documents