Roller shaft for semiconductor cleaning

Description

FIG. 1 is a front elevational view of a roller shaft for semiconductor cleaning showing our new design;

FIG. 2 is a rear elevation view thereof;

FIG. 3 is a top plan view thereof, the bottom view being a mirror image thereof;

FIG. 4 is a right side view thereof, the left side view being a mirror image thereof;

FIG. 5 is a cross sectional view taken along the line 5-5 of FIG. 1;

FIG. 6 is a front perspective view, at an enlarged scale;

FIG. 7 is a front elevational view thereof, at an enlarged scale;

FIG. 8 is an enlarged view of the area 8 seen in FIG. 3; and,

FIG. 9 is an enlarged view of the area 9 seen in FIG. 4.

The broken line showing depicts environmental subject matter only and forms no part of the claimed design.

Claims

CLAIM We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.

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Inventors:	Ishibashi; Tomoatsu (Tokyo, JP), Oikawa; Fumitoshi (Tokyo, JP), Tanaka; Hideaki (Tokyo, JP), Hombo; Teruaki (Tokyo, JP)
Applicant:	Name City State Country Type Ishibashi; Tomoatsu Oikawa; Fumitoshi Tanaka; Hideaki Hombo; Teruaki Tokyo Tokyo Tokyo Tokyo N/A N/A N/A N/A JP JP JP JP
Assignee:	Ebara Corporation (Tokyo, JP)
Appl. No.:	D/408,194
Filed:	December 8, 2011

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Foreign Application Priority Data

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Jun 9, 2011 [JP]			2011-013045

Current U.S. Class:	D32/25
Current International Class:	2503
Field of Search:	;D32/1,25,35 ;15/77,102,230,230.12,230.14,230.16 ;134/6 ;451/194

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References Cited [Referenced By]

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Primary Examiner: Nelson; T. Chase
Assistant Examiner: Sims; Kathleen M
Attorney, Agent or Firm: Greenblum & Bernstein P.L.C.