Oikawa; Fumitoshi
Patent Applications and Registrations
Patent applications and USPTO patent grants for Oikawa; Fumitoshi.The latest application filed is for "substrate cleaning device and method of cleaning substrate".
- Oikawa; Fumitoshi - Tokyo JP
- Oikawa; Fumitoshi - Kanagawa JP
- Oikawa; Fumitoshi - Ayase JP
- Oikawa, Fumitoshi - Ayase-shi JP
- Oikawa, Fumitoshi - Kanagawa-ken JP
| Patent | Date |
|---|---|
| Substrate Cleaning Device And Method Of Cleaning Substrate App 20220203411 - Oikawa; Fumitoshi ; et al. | 2022-06-30 |
| Substrate Cleaning Devices, Substrate Processing Apparatus, Substrate Cleaning Method, And Nozzle App 20220016651 - Oikawa; Fumitoshi ; et al. | 2022-01-20 |
| Apparatus for cleaning substrate and substrate cleaning method Grant 11,094,548 - Kajita , et al. August 17, 2 | 2021-08-17 |
| Cleaning Apparatus And Polishing Apparatus App 20210202273 - MIYAZAKI; Mitsuru ; et al. | 2021-07-01 |
| Substrate Cleaning Apparatus And Cleaning Method Of Substrate App 20210111018 - OIKAWA; Fumitoshi ; et al. | 2021-04-15 |
| Substrate Cleaning Device And Substrate Cleaning Method App 20190164769 - KAJITA; Shinji ; et al. | 2019-05-30 |
| Method And Apparatus For Cleaning Substrate App 20150287617 - WANG; Xinming ; et al. | 2015-10-08 |
| Method and apparatus for cleaning substrate Grant 9,089,881 - Wang , et al. July 28, 2 | 2015-07-28 |
| Roller shaft for semiconductor cleaning Grant D710,062 - Ishibashi , et al. July 29, 2 | 2014-07-29 |
| Substrate Cleaning Method App 20130000671 - WANG; Xinming ; et al. | 2013-01-03 |
| Substrate processing apparatus and substrate processing method Grant 8,226,771 - Oikawa , et al. July 24, 2 | 2012-07-24 |
| Method And Apparatus For Cleaning Substrate App 20110209727 - WANG; Xinming ; et al. | 2011-09-01 |
| Substrate Processing Apparatus and Substrate Processing Method App 20090301518 - Oikawa; Fumitoshi ; et al. | 2009-12-10 |
| Substrate cleaning apparatus Grant 6,851,152 - Sotozaki , et al. February 8, 2 | 2005-02-08 |
| Substrate cleaning apparatus and cleaning member Grant 6,842,933 - Oikawa , et al. January 18, 2 | 2005-01-18 |
| Substrate cleaning apparatus and cleaning member App 20040074029 - Oikawa, Fumitoshi ; et al. | 2004-04-22 |
| Substrate cleaning apparatus and cleaning member Grant 6,651,287 - Oikawa , et al. November 25, 2 | 2003-11-25 |
| Substrate cleaning apparatus App 20020029431 - Oikawa, Fumitoshi ; et al. | 2002-03-14 |
| Substrate cleaning apparatus App 20020022445 - Sotozaki, Hiroshi ; et al. | 2002-02-21 |
| Substrate cleaning apparatus and cleaning member App 20020004962 - Oikawa, Fumitoshi ; et al. | 2002-01-17 |
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