| Patent | Date |
|---|
Substrate cleaning tool, substrate cleaning apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate cleaning tool
Grant 11,424,138 - Ishibashi August 23, 2 | 2022-08-23 |
Cleaning Module, Substrate Processing Apparatus Including Cleaning Module, And Cleaning Method
App 20220013352 - Mizuno; Toshio ; et al. | 2022-01-13 |
Storage container of scrubbing member and package of same
Grant 11,180,303 - Nakano , et al. November 23, 2 | 2021-11-23 |
Washing device and washing method
Grant 11,164,758 - Ishibashi November 2, 2 | 2021-11-02 |
Storage container of scrubbing member and package of same
Grant 11,142,386 - Nakano , et al. October 12, 2 | 2021-10-12 |
Washing Device And Washing Method
App 20210272820 - Ishibashi; Tomoatsu | 2021-09-02 |
Apparatus for cleaning substrate and substrate cleaning method
Grant 11,094,548 - Kajita , et al. August 17, 2 | 2021-08-17 |
Substrate Processing Apparatus And Substrate Cleaning Method
App 20210242015 - Ishibashi; Tomoatsu | 2021-08-05 |
Substrate cleaning apparatus and substrate cleaning method
Grant 11,081,373 - Ishibashi August 3, 2 | 2021-08-03 |
Storage Container Of Scrubbing Member And Package Of Same
App 20210163208 - Nakano; Hisajiro ; et al. | 2021-06-03 |
Substrate Cleaning Device And Substrate Cleaning Method
App 20210129194 - ISHIBASHI; Tomoatsu | 2021-05-06 |
Substrate washing device
Grant 10,991,602 - Fukaya , et al. April 27, 2 | 2021-04-27 |
Substrate cleaning roll, substrate cleaning apparatus, and substrate cleaning method
Grant 10,892,173 - Ishibashi January 12, 2 | 2021-01-12 |
Cover For Swing Member Of Substrate Processing Apparatus, Swing Member Of Substrate Processing Apparatus, And Substrate Processing Apparatus
App 20200402820 - KITAGAWA; Yoshitaka ; et al. | 2020-12-24 |
Jig For Attaching And Detaching Cleaning Member
App 20200391258 - FUJIMOTO; TOMOAKI ; et al. | 2020-12-17 |
Substrate Cleaning Method And Substrate Cleaning Apparatus
App 20200258737 - A1 | 2020-08-13 |
Substrate cleaning apparatus
Grant 10,737,301 - Ishibashi A | 2020-08-11 |
Cleaning device, method of manufacturing the same and substrate cleaning apparatus
Grant 10,625,308 - Ishibashi | 2020-04-21 |
Substrate Cleaning Member And Substrate Cleaning Apparatus
App 20200118843 - Ishibashi; Tomoatsu | 2020-04-16 |
Substrate Cleaning Tool, Substrate Cleaning Apparatus, Substrate Processing Apparatus, Substrate Processing Method, And Method O
App 20200066549 - Ishibashi; Tomoatsu | 2020-02-27 |
Roll-type Processing Member, Pencil-type Processing Member, And Substrate Processing Apparatus Including Any One Of These
App 20200030855 - Ishibashi; Tomoatsu | 2020-01-30 |
Roll-type processing member, pencil-type processing member, and substrate processing apparatus including any one of these
Grant 10,471,481 - Ishibashi Nov | 2019-11-12 |
Cleaning device and roll cleaning member
Grant 10,453,708 - Ishibashi Oc | 2019-10-22 |
Substrate drying apparatus, storage medium, and substrate drying method
Grant 10,395,949 - Ishibashi A | 2019-08-27 |
Cleaning member and substrate cleaning apparatus
Grant 10,315,232 - Ishibashi | 2019-06-11 |
Substrate Cleaning Device And Substrate Cleaning Method
App 20190164769 - KAJITA; Shinji ; et al. | 2019-05-30 |
Substrate Cleaning Device, Substrate Cleaning Method, Substrate Processing Device, And Substrate Drying Device
App 20190088510 - ISHIBASHI; Tomoatsu | 2019-03-21 |
Washing Device And Washing Method
App 20190080933 - ISHIBASHI; Tomoatsu | 2019-03-14 |
Substrate cleaning apparatus and substrate cleaning method
Grant 10,192,757 - Ishibashi Ja | 2019-01-29 |
Washing device and washing method
Grant 10,170,344 - Ishibashi J | 2019-01-01 |
Substrate cleaning apparatus and substrate cleaning method
Grant 10,163,664 - Ishibashi Dec | 2018-12-25 |
Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle
Grant 10,090,189 - Ishibashi October 2, 2 | 2018-10-02 |
Sponge for substrate cleaning
Grant D822,926 - Ishibashi July 10, 2 | 2018-07-10 |
Substrate drying apparatus, substrate drying method and control program
Grant 10,008,380 - Ishibashi , et al. June 26, 2 | 2018-06-26 |
Substrate cleaning apparatus
Grant 10,002,778 - Ishibashi June 19, 2 | 2018-06-19 |
Cleaning Member And Substrate Cleaning Apparatus
App 20180126422 - ISHIBASHI; Tomoatsu | 2018-05-10 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20180068877 - ISHIBASHI; Tomoatsu | 2018-03-08 |
Sponge for substrate cleaning
Grant D805,268 - Ishibashi December 12, 2 | 2017-12-12 |
Substrate cleaning apparatus
Grant 9,824,903 - Ishibashi November 21, 2 | 2017-11-21 |
Substrate Washing Device
App 20170323809 - FUKAYA; Koichi ; et al. | 2017-11-09 |
Substrate Cleaning Roll, Substrate Cleaning Apparatus, And Substrate Cleaning Method
App 20170316959 - ISHIBASHI; Tomoatsu | 2017-11-02 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20170316960 - ISHIBASHI; Tomoatsu | 2017-11-02 |
Roller for substrate cleaning
Grant D800,401 - Ishibashi October 17, 2 | 2017-10-17 |
Roller for substrate cleaning
Grant D799,768 - Ishibashi October 10, 2 | 2017-10-10 |
Sponge for substrate cleaning
Grant D799,129 - Ishibashi October 3, 2 | 2017-10-03 |
Cleaning Device, Method Of Manufacturing The Same And Substrate Cleaning Apparatus
App 20170209902 - ISHIBASHI; Tomoatsu | 2017-07-27 |
Cleaning Device And Roll Cleaning Member
App 20170170034 - ISHIBASHI; Tomoatsu | 2017-06-15 |
Substrate cleaning and drying apparatus
Grant 9,677,811 - Ishibashi June 13, 2 | 2017-06-13 |
Sponge for substrate cleaning
Grant D787,143 - Ishibashi May 16, 2 | 2017-05-16 |
Cleaning device, method of manufacturing the same and substrate cleaning apparatus
Grant 9,643,216 - Ishibashi May 9, 2 | 2017-05-09 |
Substrate cleaning apparatus and substrate cleaning method
Grant 9,640,384 - Ishibashi May 2, 2 | 2017-05-02 |
Substrate processing apparatus
Grant 9,630,296 - Ishibashi April 25, 2 | 2017-04-25 |
Cleaning Device, Method Of Manufacturing The Same And Substrate Cleaning Apparatus
App 20160144410 - ISHIBASHI; Tomoatsu | 2016-05-26 |
Roll-type Processing Member, Pencil-type Processing Member, And Substrate Processing Apparatus Including Any One Of These
App 20160126113 - ISHIBASHI; Tomoatsu | 2016-05-05 |
Polishing Apparatus
App 20160052104 - ISHIBASHI; Tomoatsu | 2016-02-25 |
Substrate Cleaning Apparatus
App 20150352600 - ISHIBASHI; Tomoatsu | 2015-12-10 |
Cleaning Apparatus And Cleaning Method
App 20150348806 - ISHIBASHI; Tomoatsu | 2015-12-03 |
Surface potential measuring apparatus and surface potential measuring method
Grant 9,194,903 - Ishibashi November 24, 2 | 2015-11-24 |
Substrate Drying Apparatus, Storage Medium, And Substrate Drying Method
App 20150303078 - ISHIBASHI; Tomoatsu | 2015-10-22 |
Polishing apparatus
Grant 9,162,337 - Ishibashi October 20, 2 | 2015-10-20 |
Substrate processing method
Grant 9,142,398 - Ishibashi September 22, 2 | 2015-09-22 |
Substrate cleaning method
Grant 9,142,399 - Ishibashi September 22, 2 | 2015-09-22 |
Roller shaft for substrate cleaning
Grant D735,427 - Ishibashi , et al. July 28, 2 | 2015-07-28 |
Substrate Cleaning Apparatus And Substrate Processing Apparatus
App 20150179484 - ISHIBASHI; Tomoatsu | 2015-06-25 |
Substrate cleaning apparatus and substrate cleaning method
Grant 9,058,977 - Ishibashi June 16, 2 | 2015-06-16 |
Substrate Cleaning Apparatus And Substrate Processing Apparatus
App 20150144164 - ISHIBASHI; Tomoatsu | 2015-05-28 |
Substrate cleaning method and roll cleaning member
Grant 9,011,605 - Ishibashi April 21, 2 | 2015-04-21 |
Substrate Cleaning And Drying Apparatus
App 20150040419 - Ishibashi; Tomoatsu | 2015-02-12 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20150034121 - ISHIBASHI; Tomoatsu | 2015-02-05 |
Substrate cleaning method
Grant 8,932,407 - Ishibashi January 13, 2 | 2015-01-13 |
Substrate Processing Apparatus
App 20140352608 - ISHIBASHI; Tomoatsu | 2014-12-04 |
Substrate Cleaning Apparatus
App 20140331440 - ISHIBASHI; Tomoatsu | 2014-11-13 |
Substrate Processing Method
App 20140299163 - ISHIBASHI; Tomoatsu | 2014-10-09 |
Substrate Drying Apparatus, Substrate Drying Method And Control Program
App 20140259728 - ISHIBASHI; Tomoatsu ; et al. | 2014-09-18 |
Surface Potential Measuring Apparatus And Surface Potential Measuring Method
App 20140253136 - ISHIBASHI; Tomoatsu | 2014-09-11 |
Substrate Processing Method
App 20140248782 - ISHIBASHI; Tomoatsu | 2014-09-04 |
Roller shaft for semiconductor cleaning
Grant D710,062 - Ishibashi , et al. July 29, 2 | 2014-07-29 |
Substrate drying apparatus, substrate drying method and control program
Grant 8,769,842 - Ishibashi , et al. July 8, 2 | 2014-07-08 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20140182632 - ISHIBASHI; Tomoatsu | 2014-07-03 |
Substrate Cleaning Apparatus
App 20140182634 - ISHIBASHI; Tomoatsu | 2014-07-03 |
Polishing Apparatus
App 20140187122 - ISHIBASHI; Tomoatsu | 2014-07-03 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20140182628 - ISHIBASHI; Tomoatsu | 2014-07-03 |
Roller for semiconductor wafer cleaning
Grant D707,408 - Ishibashi June 17, 2 | 2014-06-17 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20140158159 - ISHIBASHI; Tomoatsu | 2014-06-12 |
Substrate Cleaning Apparatus And Substrate Cleaning Method
App 20140158160 - ISHIBASHI; Tomoatsu | 2014-06-12 |
Substrate Cleaning Method
App 20130312790 - Ishibashi; Tomoatsu | 2013-11-28 |
Substrate Drying Apparatus, Substrate Drying Method And Control Program
App 20130219740 - ISHIBASHI; Tomoatsu ; et al. | 2013-08-29 |
Substrate Cleaning Method
App 20130220368 - ISHIBASHI; Tomoatsu | 2013-08-29 |
Method Of Predicting Cleaning Performance And Substrate Cleaning Method
App 20120325266 - ISHIBASHI; Tomoatsu | 2012-12-27 |
Substrate Cleaning Method And Roll Cleaning Member
App 20120312323 - ISHIBASHI; Tomoatsu | 2012-12-13 |
Substrate Drying Apparatus, Substrate Drying Method And Control Program
App 20110289795 - ISHIBASHI; Tomoatsu ; et al. | 2011-12-01 |
Substrate processing method and substrate processing apparatus
App 20070224811 - Wang; Xinming ; et al. | 2007-09-27 |
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