Coating and developing apparatus

Description

FIG. 1 is a front, left and top perspective view of the coating and developing apparatus showing the new design;

FIG. 2 is a rear, right and top perspective view thereof;

FIG. 3 is a front elevation view thereof;

FIG. 4 is a rear elevation view thereof;

FIG. 5 is a left side elevation view thereof;

FIG. 6 is a right side elevation view thereof; and,

FIG. 7 is a top plan view thereof.

The broken lines illustrate portions of the coating and developing apparatus that form no part of the claimed design.

Claims

CLAIM The ornamental design for a coating and developing apparatus, as shown and described.

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Inventors:	Tsuchiyama; Masashi (Koshi, JP), Nakashima; Tsunenaga (Koshi, JP), Hayashi; Shinichi (Koshi, JP)
Applicant:	Name City State Country Type Tsuchiyama; Masashi Nakashima; Tsunenaga Hayashi; Shinichi Koshi Koshi Koshi N/A N/A N/A JP JP JP
Assignee:	Tokyo Electron Limited (Tokyo, JP)
Appl. No.:	D/430,388
Filed:	August 24, 2012

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Foreign Application Priority Data

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Mar 2, 2012 [JP]			2012-004786

Current U.S. Class:	D15/122
Current International Class:	1509
Field of Search:	;D15/122,124,127,128,130,131 ;29/26A,26R,30,33A-33T,34R,39,50,563-566,564.1-564.8 ;118/64,300,309,310,324,665 ;427/240 ;483/17-57

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References Cited [Referenced By]

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U.S. Patent Documents

2400315	May 1946	Paasche
3669068	June 1972	Geitz
D266520	October 1982	Engel
6068702	May 2000	Bertellotti et al.
D567264	April 2008	Muller et al.
D616472	May 2010	Fusejima
D622296	August 2010	Ueberschlag
D635596	April 2011	Hiroshima et al.
D637631	May 2011	Hiroshima et al.
D655323	March 2012	Brockhage
D659728	May 2012	Mueller
D664570	July 2012	Mueller
D667031	September 2012	Mueller
D674420	January 2013	Ueberschlag et al.
D685825	July 2013	Hoelbl
2006/0233960	October 2006	Warren et al.

Primary Examiner: Palasik; Patricia
Attorney, Agent or Firm: Abelman, Frayne & Schwab