NAKASHIMA; Tsunenaga

Patent Applications and Registrations

Patent applications and USPTO patent grants for NAKASHIMA; Tsunenaga.The latest application filed is for "substrate cleaning method, processing container cleaning method, and substrate processing device".

Company Profile

4.21.21

NAKASHIMA; Tsunenaga - Kumamoto JP
Nakashima; Tsunenaga - Koshi JP
Nakashima; Tsunenaga - Koshi City JP
NAKASHIMA; Tsunenaga - Koshi-shi JP
Nakashima; Tsunenaga - Koshi-Machi JP
Nakashima; Tsunenaga - Kumamoto-Ken JP
Nakashima; Tsunenaga - Kikuchi-gun JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate Cleaning Method, Processing Container Cleaning Method, And Substrate Processing Device App 20220001426 - IKEDA; Kyoko ; et al.	2022-01-06
Treatment solution supply apparatus and substrate treatment system Grant 10,807,027 - Ichino , et al. October 20, 2	2020-10-20
Liquid processing apparatus, liquid processing method, and storage medium Grant 10,643,872 - Abe , et al.	2020-05-05
Substrate Processing Apparatus App 20200064741 - Nakashima; Tsunenaga	2020-02-27
Treatment Solution Supply Apparatus And Substrate Treatment System App 20190076763 - ICHINO; Katsunori ; et al.	2019-03-14
Substrate treatment system, substrate transfer method and computer storage medium Grant 9,984,905 - Nakaharada , et al. May 29, 2	2018-05-29
Substrate treatment system, substrate transfer method and computer storage medium Grant 9,984,904 - Nakaharada , et al. May 29, 2	2018-05-29
Liquid Processing Apparatus, Liquid Processing Method, And Storage Medium App 20170358464 - Abe; Masahiro ; et al.	2017-12-14
Substrate Treatment System, Substrate Transfer Method And Computer Storage Medium App 20160372346 - NAKAHARADA; Masahiro ; et al.	2016-12-22
Substrate Treatment System, Substrate Transfer Method And Computer Storage Medium App 20160372345 - NAKAHARADA; Masahiro ; et al.	2016-12-22
Substrate treatment system, substrate transfer method and computer storage medium Grant 9,460,942 - Nakaharada , et al. October 4, 2	2016-10-04
Substrate treatment system, substrate transfer method, and a non-transitory computer storage medium Grant 9,287,145 - Nakaharada , et al. March 15, 2	2016-03-15
Chemical Liquid Container Replacement Device, Container Mounting Module, Chemical Liquid Container Replacement Method, And Substrate Processing Apparatus App 20150096682 - Nakashima; Tsunenaga	2015-04-09
Coating and developing apparatus Grant D690,330 - Tsuchiyama , et al. September 24, 2	2013-09-24
Process liquid feed mechanism Grant 8,511,331 - Nakashima , et al. August 20, 2	2013-08-20
Chemical liquid supply nozzle and chemical liquid supply method Grant 8,469,285 - Nakashima , et al. June 25, 2	2013-06-25
Substrate Treatment System, Substrate Transfer Method, And A Non-transitory Computer Storage Medium App 20130112223 - Nakaharada; Masahiro ; et al.	2013-05-09
Substrate Treatment System, Substrate Transfer Method And Computer Storage Medium App 20130112224 - NAKAHARADA; Masahiro ; et al.	2013-05-09
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium Grant 8,354,141 - Nakashima , et al. January 15, 2	2013-01-15
Wet processing system, wet processing method and storage medium Grant 8,236,378 - Nakashima , et al. August 7, 2	2012-08-07
Process Liquid Feed Mechanism App 20110265896 - NAKASHIMA; Tsunenaga ; et al.	2011-11-03
Liquid Treatment Apparatus, Mounting And Dismounting Method Of A Cup Body, And Storage Medium App 20110220216 - NAKASHIMA; Tsunenaga ; et al.	2011-09-15
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium Grant 7,984,690 - Nakashima , et al. July 26, 2	2011-07-26
Chemical Liquid Supply Nozzle And Chemical Liquid Supply Method App 20110159701 - NAKASHIMA; Tsunenaga ; et al.	2011-06-30
Wet Processing System, Wet Processing Method And Storage Medium App 20100216259 - Nakashima; Tsunenaga ; et al.	2010-08-26
Wet processing system, wet processing method and storage medium Grant 7,752,999 - Nakashima , et al. July 13, 2	2010-07-13
Solution treatment apparatus and solution treatment method Grant 7,736,498 - Matsuoka , et al. June 15, 2	2010-06-15
Liquid processing method and liquid processing apparatus Grant 7,640,885 - Nakashima , et al. January 5, 2	2010-01-05
Solution Treatment Apparatus And Solution Treatment Method App 20090214759 - Matsuoka; Nobuaki ; et al.	2009-08-27
Solution treatment apparatus and solution treatment method Grant 7,547,614 - Matsuoka , et al. June 16, 2	2009-06-16
Complex pipe and coating/development processing apparatus equipped with complex pipe App 20080289715 - Nakashima; Tsunenaga ; et al.	2008-11-27
Wet Processing System, Wet Processing Method And Storage Medium App 20080100809 - Nakashima; Tsunenaga ; et al.	2008-05-01
Liquid treatment apparatus, mounting and dismounting method of a cup body, and storage medium App 20080092813 - Nakashima; Tsunenaga ; et al.	2008-04-24
Semiconductor manufacturing apparatus and method Grant 7,287,920 - Hayashi , et al. October 30, 2	2007-10-30
Liquid processing method and liquid processing apparatus App 20070245953 - Nakashima; Tsunenaga ; et al.	2007-10-25
Liquid processing method and liquid processing apparatus App 20060233952 - Nakashima; Tsunenaga ; et al.	2006-10-19
Semiconductor manufacturing apparatus and method App 20060194445 - Hayashi; Shinichi ; et al.	2006-08-31
Solution treatment apparatus and solution treatment method App 20060189103 - Matsuoka; Nobuaki ; et al.	2006-08-24

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