U.S. patent number D642,605 [Application Number D/358,979] was granted by the patent office on 2011-08-02 for lid assembly for a substrate processing chamber. This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to Tetsuya Ishikawa, David H. Quach, Alexander Tam.
United States Patent | D642,605 |
Ishikawa , et al. | August 2, 2011 |
Inventors: | Ishikawa; Tetsuya (Saratoga, CA), Tam; Alexander (Union City, CA), Quach; David H. (San Jose, CA) |
---|---|
Assignee: | Applied Materials, Inc. (Santa
Clara, CA) |
Appl. No.: | D/358,979 |
Filed: | April 2, 2010 |
Current U.S. Class: | D15/144.1 |
Current International Class: | 1501 |
Field of Search: | ;D10/46 ;D15/122,144.1 ;118/723DC,723E,723ER,723IR,723R,715,69 ;134/8 ;156/345.43,345.35,345.45 ;428/64.1 |
D291118 | July 1987 | Miller et al. |
6050446 | April 2000 | Lei et al. |
6110556 | August 2000 | Bang et al. |
6302964 | October 2001 | Umotoy et al. |
6364949 | April 2002 | Or et al. |
6517634 | February 2003 | Pang et al. |
6719851 | April 2004 | Kurita et al. |
7024105 | April 2006 | Fodor et al. |
7396480 | July 2008 | Kao et al. |
7520957 | April 2009 | Kao et al. |
7767024 | August 2010 | Kao et al. |
7905959 | March 2011 | Tzu et al. |
2002/0017243 | February 2002 | Pyo |
2002/0092471 | July 2002 | Kang et al. |
2006/0021573 | February 2006 | Monsma et al. |
2008/0072820 | March 2008 | Burrows et al. |
2009/0095221 | April 2009 | Tam et al. |
2009/0241833 | October 2009 | Moshtagh et al. |
2009/0308318 | December 2009 | Chen et al. |
2010/0107977 | May 2010 | Kasai et al. |
Tam, et al., U.S. Appl. No. 12/831,522, filed Jul. 7, 2010, entitled "Showerhead Assembly With Metrology Port Purge." cited by other. |
uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.
While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.
All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.