Lid assembly for a substrate processing chamber

Description

FIG. 1 is a top plan view of a lid assembly for a substrate processing chamber showing our new design.

FIG. 2 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 2 of FIG. 1.

FIG. 3 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 3 of FIG. 1.

FIG. 4 is a side elevation view of the lid assembly of FIG. 1 as viewed from line FIG. 4 of FIG. 1.

FIG. 5 is a side elevation view of the lid assembly of FIG. 1, rotated 180.degree., as viewed from line FIG. 5 of FIG. 1.

FIG. 6 is an isometric top view of the lid assembly of FIG. 1.

FIG. 7 is another isometric top view of the lid assembly of FIG. 1.

FIG. 8 is an isometric bottom view of the lid assembly of FIG. 1; and,

FIG. 9 is a bottom plan view of the lid assembly of FIG. 1.

The broken line showing of structural features is included for the purpose of illustrating non-claimed subject matter and forms no part of the claimed design.

Claims

CLAIM The ornamental design for a lid assembly for a substrate processing chamber, as shown and described.

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Inventors:	Ishikawa; Tetsuya (Saratoga, CA), Tam; Alexander (Union City, CA), Quach; David H. (San Jose, CA)
Assignee:	Applied Materials, Inc. (Santa Clara, CA)
Appl. No.:	D/358,979
Filed:	April 2, 2010

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Current U.S. Class:	D15/144.1
Current International Class:	1501
Field of Search:	;D10/46 ;D15/122,144.1 ;118/723DC,723E,723ER,723IR,723R,715,69 ;134/8 ;156/345.43,345.35,345.45 ;428/64.1

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References Cited [Referenced By]

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Other References

Tam, et al., U.S. Appl. No. 12/831,522, filed Jul. 7, 2010, entitled "Showerhead Assembly With Metrology Port Purge." cited by other.

Primary Examiner: Davis; Antoine D
Attorney, Agent or Firm: Patterson & Sheridan, L.L.P.