U.S. patent number D442,852 [Application Number D/109,870] was granted by the patent office on 2001-05-29 for squared overlap coil. This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to John C. Forster, Praburam Gopalraja, Michael Rosenstein.
United States Patent | D442,852 |
Gopalraja , et al. | May 29, 2001 |
Inventors: | Gopalraja; Praburam (San Jose, CA), Forster; John C. (San Francisco, CA), Rosenstein; Michael (Sunnyvale, CA) |
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Assignee: | Applied Materials, Inc. (Santa
Clara, CA) |
Appl. No.: | D/109,870 |
Filed: | August 24, 1999 |
Current U.S. Class: | D8/395; D8/396 |
Current International Class: | 0808 |
Field of Search: | ;D8/394-396 ;D13/133,149 ;D15/144.2 ;204/192.25,279,297,671 ;285/420,322 ;24/2R,22,25,28EE,16EB,2CW ;439/799,816,860,575,574 |
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N Jiwari et al., 8257a Journal of Vacuum Science & Technology A 12(4), "Helicon Wave Plasma Reactor Employing a Single-loop Antenna", Jul./Aug. 1994, pp. 1322-1327. . U.S. application No. 29/109,892. . U.S. application No. 29/109,893. . U.S. application No. 08/113,577, 5423063. . U.S. application No. 29/090,631. . U.S. application No. 29/090,618. . Applied Materials, Inc., Exhibit A, dated more than one year prior to Aug. 24, 1999, the filing date of the present application. (Exhibit A is a drawing of a prior art coil design which is prior to the design of the present application.).. |
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