Wafer boat

Watanabe , et al. April 15, 1

Patent Grant D378823

U.S. patent number D378,823 [Application Number D/047,277] was granted by the patent office on 1997-04-15 for wafer boat. This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Hirofumi Kitayama, Shingo Watanabe.


United States Patent D378,823
Watanabe ,   et al. April 15, 1997

Wafer boat

Claims

The ornamental design for wafer boat, as shown and described.
Inventors: Watanabe; Shingo (Kanagawa-Ken, JP), Kitayama; Hirofumi (Kanagawa-Ken, JP)
Assignee: Tokyo Electron Limited (Tokyo-to, JP)
Appl. No.: D/047,277
Filed: November 30, 1995

Foreign Application Priority Data

May 30, 1995 [JP] 7-15174
Current U.S. Class: D15/140; D13/182
Field of Search: ;D6/607,629 ;D13/182 ;D15/140 ;118/500,715,728 ;206/454 ;211/41 ;432/152 ;414/935

References Cited [Referenced By]

U.S. Patent Documents
D361752 August 1995 Yamaga
D366868 February 1996 Ohsawa
5482559 January 1996 Imai et al.
5510146 April 1996 Miyasaka
Primary Examiner: Davis; Antoine Duval
Attorney, Agent or Firm: Ladas & Parry

Description



FIG. 1 is a front view of a wafer boat showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a left side view thereof, the right side view being a mirror image and, therefore, not shown;

FIG. 6 is a cross sectional view thereof on the section line 6--6 in FIG. 1;

FIG. 7 is a cross sectional view thereof on the section line 7--7 in FIG. 3; and,

FIG. 8 is a front/top/right side perspective view thereof.

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