U.S. patent number 7,342,434 [Application Number 11/042,090] was granted by the patent office on 2008-03-11 for semiconductor device including capacitor having decoupling capacity.
This patent grant is currently assigned to Fujitsu Limited. Invention is credited to Mutsuaki Kai, Shigetoshi Wakayama.
United States Patent |
7,342,434 |
Wakayama , et al. |
March 11, 2008 |
Semiconductor device including capacitor having decoupling
capacity
Abstract
A capacitor has a MOS gate structure in which a gate insulating
film is held between a gate terminal and a ground terminal as a
dielectric. A switch unit is connected between the gate terminal
and a power supply. The ground terminal is connected to a ground. A
switch control circuit that switches a state of the switch unit
between a conductive state and a nonconductive state is provided. A
predetermined voltage and a voltage of the gate terminal are input
to a non-inverting input terminal and an inverting input terminal
of the switch control circuit, respectively. The switch unit is
conductive when the voltage of the gate terminal is higher than the
predetermined voltage, and nonconductive when the voltage of the
gate terminal is lower than the predetermined voltage.
Inventors: |
Wakayama; Shigetoshi (Kawasaki,
JP), Kai; Mutsuaki (Kawasaki, JP) |
Assignee: |
Fujitsu Limited (Kawasaki,
JP)
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Family
ID: |
36073333 |
Appl.
No.: |
11/042,090 |
Filed: |
January 26, 2005 |
Prior Publication Data
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Document
Identifier |
Publication Date |
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US 20060061409 A1 |
Mar 23, 2006 |
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Foreign Application Priority Data
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Sep 17, 2004 [JP] |
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2004-272382 |
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Current U.S.
Class: |
327/530;
327/541 |
Current CPC
Class: |
H03F
1/52 (20130101); H03F 1/523 (20130101); H03F
3/45183 (20130101); H03F 3/45475 (20130101) |
Current International
Class: |
G11C
5/14 (20060101) |
Field of
Search: |
;327/530,537-538,540-541,543 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
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2003-017569 |
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Jan 2003 |
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JP |
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2003-513478 |
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Apr 2003 |
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JP |
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Primary Examiner: Cox; Cassandra
Attorney, Agent or Firm: Arent Fox LLP
Claims
What is claimed is:
1. A semiconductor device comprising: a capacitor that includes a
gate terminal; a ground terminal; and a gate insulating film
between the gate terminal and the ground terminal; a switch unit
that electrically connects or disconnects the gate terminal to a
power supply; a switch control unit that switches on the switch
unit when a voltage of the gate terminal is higher than a
predetermined voltage, and switches off the switch unit when the
voltage of the gate terminal is lower than the predetermined
voltage, and a reset unit that switches on the switch unit right
after the power supply is turned on.
2. The semiconductor device according to claim 1, wherein the
switch unit includes a p channel metal oxide semiconductor field
effect transistor.
3. The semiconductor device according to claim 1, further
comprising: a reset unit that resets the voltage of the gate
terminal to electrically connect the gate terminal to the power
supply temporarily right after the power supply is turned on.
4. The semiconductor device according to claim 1, wherein the
switch control unit includes a differential amplifier.
5. The semiconductor device according to claim 1, wherein the
switch control unit includes an inverter circuit.
6. A semiconductor device comprising: a capacitor unit that
includes a plurality of parallel-connected capacitors, wherein each
capacitor includes a gate terminal, a ground terminal, and a gate
insulating film between the gate terminal and the ground terminal;
a switch unit that electrically connects or disconnects the gate
terminals to a power supply; a switch control unit that switches on
the switch unit when a voltage of the capacitor unit is higher than
a predetermined voltage, and switches off the switch unit when the
voltage of the capacitor unit is lower than the predetermined
voltage; and a reset unit that switches on the switch unit right
after the power supply is turned on.
7. A semiconductor device comprising: a capacitor that includes a
gate terminal; a ground terminal; and a gate insulating film
between the gate terminal and the ground terminal; a switch unit
that electrically connects or disconnects the ground terminal to a
ground; a switch control unit that switches on the switch unit when
a voltage of the ground terminal is lower than a predetermined
voltage, and switches off the switch unit when the voltage of the
ground terminal is higher than the predetermined voltage; and a
reset unit that switches on the switch unit right after the power
supply is turned on.
8. The semiconductor device according to claim 7, wherein the
switch unit includes a n channel metal oxide semiconductor field
effect transistor.
9. The semiconductor device according to claim 7, further
comprising: a reset unit that resets the voltage of the ground
terminal to electrically connect the ground terminal to the ground
temporarily right after a power supply is turned on.
10. The semiconductor device according to claim 7, wherein the
switch control unit includes a differential amplifier.
11. The semiconductor device according to claim 7, wherein the
switch control unit includes an inverter circuit.
12. A semiconductor device comprising: a capacitor unit that
includes a plurality of parallel-connected capacitors, wherein each
capacitor includes a gate terminal, a ground terminal, and a gate
insulating film between the gate terminal and the ground terminal;
a switch unit that electrically connects or disconnects the ground
terminals to a ground; a switch control unit that switches on the
switch unit when a voltage of the capacitor unit is lower than a
predetermined voltage, and switches off the switch unit when the
voltage of the capacitor unit is higher than the predetermined
voltage, and a reset unit that switches on the switch unit right
after the power supply is turned on.
Description
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is based upon and claims the benefit of priority
from the prior Japanese Patent Application No. 2004-272382, filed
on Sep. 17, 2004, the entire contents of which are incorporated
herein by reference.
BACKGROUND OF THE INVENTION
1) Field of the Invention
The present invention relates to a semiconductor device having a
decoupling capacity. More specifically, the present invention
relates to a circuit to disconnect a capacitor, which functions as
the decoupling capacity, from a power supply when a dielectric
breakdown occurs in the capacitor.
2) Description of the Related Art
In recent years, demand for acceleration and high integration of
semiconductor chips rises following improved performances of such
as home electric appliances. To meet this demand, a gate area of
each metal oxide semiconductor (MOS) transistor integrated in a
semiconductor chip is increased. A semiconductor chip required to
operate at a high rate, in particular, is intended to stabilize a
power supply voltage by connecting many decoupling capacities
between a power supply and a ground.
Normally, a capacitor that functions as a decoupling capacity
(hereinafter, simply "capacitor") has a MOS gate structure. In
addition, the capacity uses, as a dielectric, an insulating film
formed simultaneously with a gate insulating film of the MOS
transistor. Therefore, if the gate insulating film of the MOS
transistor is thinner following a recent advancement of a
microfabrication technique, the dielectric of the capacitor is
thinner accordingly. As a result, a time-dependent dielectric
breakdown (TDDB) frequently occurs. Namely, a defect of a
dielectric breakdown of a capacitor frequently occurs while a
customer uses a semiconductor chip shipped from a manufacturer. If
the TDDB occurs to the capacitor, then a short-circuit between a
power supply and a ground occurs. This disadvantageously causes an
increase in current consumption and a drop in the power supply
voltage. It is, therefore, necessary to take measures not to cause
such defects when the TDDB occurs to the capacitor after
shipment.
Meanwhile, when occurrence of the TDDB to the capacitor is
discovered at a semiconductor chip test conducted just before the
shipment, the semiconductor chip is abandoned as a defective
product even if a defective capacitor is only a part of the
capacitors on the semiconductor chip. This disadvantageously
deteriorates product yield. To prevent this, a semiconductor
integrated circuit has been suggested in which a p channel MOS
transistor (hereinafter, "PMOS") is connected between the power
supply and the capacitor, which is disconnected from the power
supply when it is determined to be defective by turning off the
PMOS through a signal from an external control circuit (see for
example, Japanese Patent Application Laid-open No. 2003-17569
(FIGS. 1 and 2)). The product yield is improved since this
semiconductor integrated circuit can be shipped as a good product
by disconnecting the defective capacitor from the power supply.
According to Japanese Patent Application Laid-open No. 2003-17569,
however, the capacitor that becomes defective after the shipment
(in other words, while a client uses the product) cannot be
disconnected from the power supply. Thus, this conventional
semiconductor integrated circuit is disadvantageously incapable of
dealing with the capacitor to which a defect occurs after the
shipment.
SUMMARY OF THE INVENTION
It is an object of the present invention to at least solve the
problems in the conventional technology.
A semiconductor device according to an aspect of the present
invention includes a capacitor with a gate terminal, a ground
terminal, and a gate insulating film between the gate terminal and
the ground terminal; a switch unit that electrically connects or
disconnects the gate terminal to a power supply; and a switch
control unit that switches on the switch unit when a voltage of the
gate terminal is higher than a predetermined voltage, and switches
off the switch unit when the voltage of the gate terminal is lower
than the predetermined voltage.
A semiconductor device according to another aspect of the present
invention includes a capacitor unit that has a plurality of
parallel-connected capacitors with a gate terminal, a ground
terminal, and a gate insulating film between the gate terminal and
the ground terminal; a switch unit that electrically connects or
disconnects the gate terminals to a power supply; and a switch
control unit that switches on the switch unit when a voltage of the
capacitor unit is higher than a predetermined voltage, and switches
off the switch unit when the voltage of the capacitor unit is lower
than the predetermined voltage.
A semiconductor device according to still another aspect of the
present invention includes a capacitor with a gate terminal, a
ground terminal, and a gate insulating film between the gate
terminal and the ground terminal; a switch unit that electrically
connects or disconnects the ground terminal to a ground; and a
switch control unit that switches on the switch unit when a voltage
of the ground terminal is lower than a predetermined voltage, and
switches off the switch unit when the voltage of the ground
terminal is higher than the predetermined voltage.
A semiconductor device according to still another aspect of the
present invention includes a capacitor unit that has a plurality of
parallel-connected capacitors with a gate terminal, a ground
terminal, and a gate insulating film between the gate terminal and
the ground terminal; a switch unit that electrically connects or
disconnects the ground terminals to a ground; and a switch control
unit that switches on the switch unit when a voltage of the
capacitor unit is lower than a predetermined voltage, and switches
off the switch unit when the voltage of the capacitor unit is
higher than the predetermined voltage.
The other objects, features, and advantages of the present
invention are specifically set forth in or will become apparent
from the following detailed description of the invention when read
in conjunction with the accompanying drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a circuit diagram for explaining a principle of a first
configuration of a semiconductor device according to the present
invention;
FIG. 2 is a circuit diagram for explaining a principle of a second
configuration of the semiconductor device according to the present
invention;
FIG. 3 is a circuit diagram that depicts one example of a
semiconductor device according to a first embodiment of the present
invention;
FIG. 4 is a circuit diagram that depicts one example of a switch
control circuit;
FIG. 5 is a circuit diagram that depicts another example of the
semiconductor device according to the first embodiment;
FIG. 6 is a circuit diagram that depicts still another example of
the semiconductor device according to the first embodiment;
FIG. 7 is a circuit diagram that depicts one example of a
semiconductor device according to a second embodiment of the
present invention;
FIG. 8 is a circuit diagram that depicts another example of the
semiconductor device according to the second embodiment;
FIG. 9 is a circuit diagram that depicts one example of a
semiconductor device according to a third embodiment of the present
invention;
FIG. 10 is a circuit diagram that depicts another example of the
switch control circuit;
FIG. 11 is a circuit diagram that depicts one example of a
semiconductor device according to a fourth embodiment of the
present invention;
FIG. 12 is a circuit diagram that depicts another example of the
semiconductor device according to the fourth embodiment;
FIG. 13 is a circuit diagram that depicts still another example of
the semiconductor device according to the fourth embodiment;
FIG. 14 is a circuit diagram that depicts one example of a
semiconductor device according to a fifth embodiment of the present
invention;
FIG. 15 is a circuit diagram that depicts another example of the
semiconductor device according to the fifth embodiment;
FIG. 16 is a circuit diagram that depicts one example of a
semiconductor device according to a sixth embodiment of the present
invention;
FIG. 17 is a circuit diagram that depicts one example of a
semiconductor device according to a seventh embodiment of the
present invention; and
FIG. 18 is a circuit diagram that depicts another example of the
semiconductor device according to the seventh embodiment.
DETAILED DESCRIPTION
Exemplary embodiments and principles of a semiconductor device
according to the present invention will be explained below in
detail with reference to the accompanying drawings. In the
explanations and the drawings, identical elements are designated by
identical reference signs.
FIG. 1 is a circuit diagram for explaining a principle of a first
configuration of a semiconductor device according to the present
invention. As shown in FIG. 1, a capacitor 1 has a MOS gate
structure in which a dielectric (hereinafter, "gate insulating
film") is put between a gate terminal 11 and a ground terminal 12.
A switch unit 2 is connected between the gate terminal 11 and a
power supply 4. The ground terminal 12 is connected to a ground
5.
The semiconductor also includes a switch control circuit 3 that
switches a state of the switch unit 2 between a conductive state
(an ON state) and a nonconductive state (an OFF state). A
predetermined voltage (hereinafter, "reference voltage") Vref and a
voltage of the gate terminal 11 (hereinafter, "gate voltage") Vg
are input to a non-inverting input terminal (a positive terminal)
and an inverting input terminal (a negative terminal) of the switch
control circuit 3, respectively. The gate voltage Vg when a
dielectric breakdown occurs to the capacitor 1 is a divided voltage
obtained by dividing a difference between a power supply voltage
Vdd and a ground voltage Vss by a resistance of the switch unit 2
and a resistance of the capacitor 1 (a MOS diode) to which the
dielectric breakdown occurs. The reference voltage Vref is,
therefore, set at a voltage between the power supply voltage Vdd
and this divided voltage.
According to this first configuration, in a normal state, the
switch unit 2 is conductive and the gate voltage Vg is close to the
power supply voltage Vdd. Therefore, the gate voltage Vg is higher
than the reference voltage Vref, and an output voltage of the
switch control circuit 3 is at a relatively low level (hereinafter,
"L level"). In this state, when a short-circuit occurs between the
gate terminal 11 and the ground terminal 12 of the capacitor 1, the
gate voltage Vg, which is pulled toward the ground voltage Vss,
reduces. The output voltage of the switch control circuit 3 is
switched to a relatively high level (hereinafter, "H level") when
the gate voltage Vg becomes lower than the reference voltage
Vref.
Accordingly, if the switch unit 2 is constituted by such a switch
that is turned on when the output voltage of the switch control
circuit 3 is at the L level and turned off when the output voltage
of the switch control circuit 3 is at the H level, the gate
terminal 11 is always connected to the power supply 4 in a normal
state, that is, the capacitor 1 functions as a decoupling capacity.
After the short-circuit occurs in the capacitor 1, the gate
terminal 11 is disconnected from the power supply 4, thereby making
it possible to prevent a short-circuit between the power supply 4
and the ground 5.
FIG. 2 is a circuit diagram for explaining a principle of a second
configuration of the semiconductor device according to the present
invention. As shown in FIG. 2, the gate terminal 11 of the
capacitor 1 is connected to the power supply 4. The switch unit 2
is connected between the ground terminal 12 of the capacitor 1 and
the ground 5. A voltage of the ground terminal 12 (hereinafter,
"substrate voltage") Vsub is input to the inverting input terminal
(negative terminal) of the switch control circuit 3. The substrate
voltage Vsub when the dielectric breakdown occurs to the capacitor
1 is a divided voltage obtained by dividing the difference between
the power supply voltage Vdd and the ground voltage Vss by the
resistance of the capacitor 1 (the MOS diode) to which the
dielectric breakdown occurs and the resistance of the switch unit
2. The reference voltage Vref is, therefore, set at a voltage
between this divided voltage and the ground voltage Vss. Since the
other constituent elements of the second configuration are equal to
those of the first configuration shown in FIG. 1, they are denoted
by the same reference signs as those shown in FIG. 1, respectively,
and will not be explained herein.
According to this second configuration, in a normal state, the
switch unit 2 is conductive and the substrate voltage Vsub is close
to the ground voltage Vss. Therefore, the substrate voltage Vsub is
lower than the reference voltage Vref, and the output voltage of
the switch control circuit 3 is at the H level. In this state, when
a short-circuit occurs between the gate terminal 11 and the ground
terminal 12 of the capacitor 1, the substrate voltage Vsub, which
is pulled toward the power supply voltage Vdd, increases. When the
substrate voltage Vsub becomes higher than the reference voltage
Vref, the output voltage of the switch control circuit 3 is
switched to the L level.
Accordingly, if the switch unit 2 is constituted by such a switch
that is turned on when the output voltage of the switch control
circuit 3 is at the H level and turned off when the output voltage
of the switch control circuit 3 is at the L level, the ground
terminal 12 is always connected to the ground 5 in a normal state,
that is, the capacitor 1 functions as a decoupling capacity. After
the short-circuit occurs in the capacitor 1, the ground terminal 12
is disconnected from the ground 5, thereby making it possible to
prevent a short-circuit between the power supply 4 and the ground
5.
FIG. 3 is a circuit diagram that depicts one example of a
semiconductor device according to a first embodiment of the present
invention. As shown in FIG. 3, the semiconductor device in the
first embodiment has the first configuration shown in FIG. 1 and
includes a PMOS 21 used as the switch unit 2. Further, a PMOS 6 is
provided between the gate terminal 11 and the power supply 4, and
connected to the PMOS 21 in parallel as a reset unit that
initializes the voltage of the gate terminal 11. The PMOS 21
serving as the switch unit 2 will be referred to as "first PMOS 21"
and the PMOS 6 serving as the reset unit will be referred to as
"second PMOS 6", hereinafter.
A source, a gate, and a drain of the first PMOS 21 are connected to
the power supply 4, an output terminal of a switch control circuit
3A, and the gate terminal 11 of the capacitor 1, respectively. A
source and a drain of the second PMOS 6 are connected to the power
supply 4 and the gate terminal 11, respectively. A reset signal
(/Reset) is input to a gate of the second PMOS 6 from a control
circuit (not shown). The other constituent elements of the
semiconductor device are equal to those of the first configuration
shown in FIG. 1.
FIG. 4 is a circuit diagram that depicts one example of the switch
control circuit 3A. The switch control circuit 3A is a typical
differential amplifier that includes three n channel MOS
transistors (hereinafter, "NMOSs") 31, 32, and 33 and two PMOSs 34
and 35. Agate input voltage Vin of the NMOS 31 is the gate voltage
Vg of the capacitor 1. The reference voltage Vref is input to a
gate of the NMOS 32. A source of the NMOS 31 and a source of the
NMOS 32 are connected to a drain of the NMOS 33 serving as a
current source. A gate and a source of the NMOS 33 are connected to
the power supply 4 and the ground 5, respectively.
A drain of the NMOS 31 and a drain of the NMOS 32 are connected to
a drain of the PMOS 34 and a drain of the PMOS 35, respectively. A
source of the PMOS 34 and a source of the PMOS 35 are connected to
the power supply 4. A gate of the PMOS 34 is connected to a gate of
the PMOS 35, the drain of the PMOS 35, and the drain of the NMOS
32. The drain of the PMOS 34 and the drain of the NMOS31 are
connected to an output terminal of this differential amplifier, and
an output voltage Vout is output from the output terminal. A
differential amplifier having a different configuration to that
shown in FIG. 4 can be used as the switch control circuit 3A.
An operation of the semiconductor device constituted as shown in
FIG. 3 will next be explained. After a current is carried to the
semiconductor device, the second PMOS 6 becomes conductive in
response to the reset signal that is at the L level. The gate
voltage Vg input to the switch control circuit 3A is thereby equal
to the power supply voltage Vdd, in other words, higher than the
reference voltage Vref. Accordingly, the output voltage of the
switch control circuit 3A becomes at the L level and the first PMOS
21 becomes conductive. Thereafter, the reset signal turns to be the
H level and the second PMOS 6 is made nonconductive. However, since
the first PMOS 21 is conductive, the state in which the output
voltage of the switch control circuit 3A is at the L level and the
first PMOS 21 is conductive is kept.
In a normal state, that is, if no dielectric breakdown occurs to
the gate insulating film of the capacitor 1, the gate voltage Vg is
always equal to the power supply voltage Vdd. Therefore, the first
PMOS 21 is conductive and the capacitor 1 functions as a decoupling
capacity. In this state, when a dielectric breakdown occurs to the
gate insulating film of the capacitor 1, the gate voltage Vg is
reduced. When the gate voltage Vg becomes lower than the reference
voltage Vref, then the output voltage of the switch control circuit
3A is switched to the H level, and the first PMOS 21 is made
nonconductive. Namely, the gate terminal 11 is disconnected from
the power supply 4, so that a short-circuit between the power
supply 4 and the ground 5 through the capacitor 1 to which the
dielectric breakdown occurs can be prevented.
As shown in FIG. 5, the switch unit 2 can be an NMOS 22 in place of
the first PMOS 21. In this case, the gate voltage Vg and the
reference voltage Vref are input to the non-inverting input
terminal (positive terminal) and the inverting input terminal
(negative terminal) of the switch control circuit 3A, respectively.
As shown in FIG. 6, the reset unit can be an NMOS 61 in place of
the second PMOS 6. In this case, the reset signal (Reset) input to
a gate of the NMOS 61 turns to be the H level right after the
current is carried to the semiconductor device, and then changes to
the L level. The semiconductor devices in the examples shown in
FIGS. 5 and 6 can exhibit the same advantages as those of the
semiconductor device in the example shown in FIG. 3.
FIG. 7 is a circuit diagram that depicts one example of a
semiconductor device according to a second embodiment of the
present invention. The semiconductor device according to the second
embodiment differs from that according to the first embodiment in
that the second PMOS 6 serving as the reset unit is connected
between the gate of the first PMOS 21 and the ground 5. The other
constitution of the semiconductor device according to the second
embodiment is equal to that according to the first embodiment. With
this configuration, when the reset signal (/Reset) turns to be the
L level right after the current is carried to the semiconductor
device, the second PMOS 6, and then the first PMOS 21 become
conductive.
The semiconductor device shown in FIG. 8 differs from that shown in
FIG. 7 in that the reset unit is the NMOS 61 in place of the second
PMOS 6. With this configuration, when the reset signal (Reset)
turns to be the H level right after the current is carried to the
semiconductor, the NMOS 61, and then the first PMOS 21 become
conductive. The semiconductor devices in the examples shown in
FIGS. 7 and 8 according to the second embodiment exhibit the same
advantages as those of the semiconductor device according to the
first embodiment.
FIG. 9 is a circuit diagram that depicts one example of a
semiconductor device according to a third embodiment of the present
invention. As shown in FIG. 9, the semiconductor device according
to the third embodiment differs from that according to the first
embodiment in that an inverter circuit is used as a switch control
circuit 3B. FIG. 10 is a circuit diagram of the inverter circuit.
As shown in FIG. 10, a gate input voltage Vin of a PMOS 36 and an
NMOS 37 is the gate voltage Vg of the capacitor 1. A drain of the
PMOS 36 and a drain of the NMOS 37 are connected to an output
terminal of this inverter circuit, and the output voltage Vout is
output from the output terminal.
A threshold, that is, the reference voltage Vref of this inverter
circuit is about half the power supply voltage Vdd. However, by
adjusting a gate length and a gate width of each of the PMOS 36 and
the NMOS 37, the reference voltage Vref can be changed. The
semiconductor device according to the third embodiment can exhibit
the same advantages as those of the semiconductor device according
to the first embodiment. Further, according to the third
embodiment, a circuit scale can be reduced, as compared with the
semiconductor device in which the differential amplifier is used as
the switch control circuit 3.
FIG. 11 is a circuit diagram that depicts one example of a
semiconductor device according to a fourth embodiment of the
present invention. As shown in FIG. 11, the semiconductor device
according to the fourth embodiment has the second configuration
shown in FIG. 2, and an NMOS 23 is used as the switch unit 2. In
addition, an NMOS 62 serving as the reset unit that initializes the
voltage of the ground terminal 12 is provided between the ground
terminal 12 and the ground 5 and connected in parallel to the NMOS
23. The NMOS 23 serving as the switch unit 2 will be referred to as
"first NMOS 23" and the NMOS 62 serving as the reset unit will be
referred to as "second NMOS 62", hereinafter. A source, a gate, and
a drain of the first NMOS 23 are connected to the ground 5, the
output terminal of the switch control circuit 3A, and the ground
terminal 12 of the capacitor 1, respectively.
A source and a drain of the second NMOS 62 are connected to the
ground 5 and the ground terminal 12, respectively. The reset signal
(Reset) is input to a gate of the second NMOS 62 from a control
circuit (not shown). The switch control circuit 3A is a typical
differential amplifier shown in FIG. 4. Other constituent elements
of the semiconductor device are equal to those of the second
configuration shown in FIG. 2. A differential amplifier having a
different configuration to that shown in FIG. 4 can be used as the
switch control circuit 3A.
An operation of the semiconductor device constituted as shown in
FIG. 11 will next be explained. After a current is carried to the
semiconductor device, the second NMOS 62 becomes conductive in
response to the reset signal that is at the H level. The substrate
voltage Vsub input to the switch control circuit 3A is thereby
equal to the ground voltage Vss, in other words, lower than the
reference voltage Vref. Accordingly, the output voltage of the
switch control circuit 3A becomes at the H level and the first NMOS
23 becomes conductive. Thereafter, the reset signal turns to be the
L level and the second NMOS 62 is made nonconductive. However,
since the first NMOS 23 is conductive, the state in which the
output voltage of the switch control circuit 3A is at the H level
and the first NMOS 23 is conductive is kept.
In a normal state, that is, if no dielectric breakdown occurs to a
gate insulating film of the capacitor 1, the substrate voltage Vsub
is always equal to the ground voltage Vss. Therefore, the first
NMOS 23 is conductive and the capacitor 1 functions as the
decoupling capacity. In this state, if a dielectric breakdown
occurs to the gate insulating film of the capacitor 1, the
substrate voltage Vsub is increased. When the substrate voltage
Vsub becomes higher than the reference voltage Vref, then the
output voltage of the switch control circuit 3A is switched to the
L level and the first NMOS 23 is made nonconductive. Namely, the
ground terminal 12 is disconnected from the ground 5, so that a
short-circuit between the power supply 4 and the ground 5 through
the capacitor 1 to which the dielectric breakdown occurs can be
prevented.
As shown in FIG. 12, the switch unit 2 can be a PMOS 24 in place of
the first NMOS 23. In this case, the substrate voltage Vsub and the
reference voltage Vref are input to the non-inverting input
terminal (positive terminal) and the inverting input terminal
(negative terminal) of the switch control circuit 3A, respectively.
As shown in FIG. 13, the reset unit can be a PMOS 63 in place of
the second NMOS 62. In this case, the reset signal (/Reset) input
to a gate of the PMOS 63 turns to be the L level right after the
current is carried to the semiconductor device, and then changes to
the H level. The semiconductor devices in the examples shown in
FIGS. 12 and 13 can exhibit the same advantages as those of the
semiconductor device in the example shown in FIG. 11.
FIG. 14 is a circuit diagram that depicts one example of a
semiconductor device according to a fifth embodiment of the present
invention. As shown in FIG. 14, the semiconductor device according
to the fifth embodiment differs from that according to the fourth
embodiment in that the second NMOS 62 serving as the reset unit is
connected between the gate of the first NMOS 23 and the power
supply 4. Other constitution of the semiconductor device is equal
to that of the semiconductor device according to the fourth
embodiment. With such a configuration, when the reset signal
(Reset) turns to be the H level right after the current is carried
to the semiconductor device, the second NMOS 62, and then the first
NMOS 23 become conductive.
A semiconductor device shown in FIG. 15 differs from that shown in
FIG. 14 in that the reset unit is the PMOS 63 in place of the
second NMOS 62. With this configuration, when the reset signal
(/Reset) turns to be the L level right after the current is carried
to the semiconductor device, the PMOS 63, and then the first NMOS
23 become conductive. The semiconductor devices in the examples
shown in FIGS. 14 and 15 can exhibit the same advantages as those
of the semiconductor device according to the fourth embodiment.
FIG. 16 is a circuit diagram that depicts one example of a
semiconductor device according to a sixth embodiment of the present
invention. As shown in FIG. 16, the semiconductor device according
to the sixth embodiment differs from that according to the fourth
embodiment in that the inverter circuit shown in FIG. 10 is used as
the switch control circuit 3B. The semiconductor device according
to the sixth embodiment can exhibit the same advantages as those of
the semiconductor device according to the fourth embodiment.
Further, according to the sixth embodiment, a circuit scale can be
reduced, as compared with the semiconductor device in which the
differential amplifier is used as the switch control circuit 3.
FIG. 17 is a circuit diagram that depicts one example of a
semiconductor device according to a seventh embodiment of the
present invention. As shown in FIG. 17, the semiconductor device
according to the seventh embodiment is based on the configuration
according to the first embodiment. However, the first PMOS 21, the
second PMOS 6 and the switch control circuit 3A are shared among a
plurality of, for example, four capacitors 71, 72, 73, and 74. With
this configuration, if a dielectric breakdown occurs to a gate
insulating film of at least one of the capacitors 71, 72, 73, and
74 connected to the first PMOS 21, the first PMOS 21 becomes
nonconductive.
According to this configuration, the semiconductor device can
exhibit the same advantages as those of the semiconductor device
according to the first embodiment. In addition, an area occupied by
the switch unit 2, the reset unit, and the switch control circuit
3A can be reduced, as compared with the semiconductor device in
which the switch unit 2, the reset unit, and the switch control
circuit 3A are provided for each capacitor. The seventh embodiment
is applicable to the configurations according to the second to the
sixth embodiments. For example, FIG. 18 is a circuit diagram that
depicts one example in which the seventh embodiment is applied to
the configurations according to the forth embodiment.
The semiconductor devices according to the present invention have
the following advantage. The state of the switch unit is switched
between the conductive state and the nonconductive state based on
the voltage of the gate terminal or the ground terminal of the
capacitor. Therefore, even if a dielectric breakdown occurs to the
capacitor while the customer uses the product, the defective
capacitor can be automatically disconnected from the power supply
or the ground by switching the state of the switch unit to the
nonconductive state based on a change in the voltage of the gate
terminal or the ground terminal of the capacitor.
Although the invention has been described with respect to a
specific embodiment for a complete and clear disclosure, the
appended claims are not to be thus limited but are to be construed
as embodying all modifications and alternative constructions that
may occur to one skilled in the art which fairly fall within the
basic teaching herein set forth.
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