U.S. patent number 7,241,397 [Application Number 10/811,912] was granted by the patent office on 2007-07-10 for honeycomb optical window deposition shield and method for a plasma processing system.
This patent grant is currently assigned to Tokyo Electron Limited. Invention is credited to Paula A. Calabrese, Steven T. Fink, Andrej S. Mitrovic.
United States Patent |
7,241,397 |
Fink , et al. |
July 10, 2007 |
Honeycomb optical window deposition shield and method for a plasma
processing system
Abstract
An optical window deposition shield including a backing plate
having a through hole, and a honeycomb structure having a plurality
of adjacent cells configured to allow optical viewing through the
honeycomb structure. Each cell of the honeycomb structure has an
aspect ratio of length to diameter sufficient to impede a
processing plasma from traveling through the full length of the
cell. A coupling device configured to couple the honeycomb core
structure to the backing plate such that the honeycomb structure is
aligned with at least a portion of the through hole in the backing
plate. The optical window deposition shield shields the optical
viewing window of a plasma processing apparatus from contact with
the plasma.
Inventors: |
Fink; Steven T. (Mesa, AZ),
Mitrovic; Andrej S. (Phoenix, AZ), Calabrese; Paula A.
(Phoenix, AZ) |
Assignee: |
Tokyo Electron Limited (Tokyo,
JP)
|
Family
ID: |
35059923 |
Appl.
No.: |
10/811,912 |
Filed: |
March 30, 2004 |
Prior Publication Data
|
|
|
|
Document
Identifier |
Publication Date |
|
US 20050225248 A1 |
Oct 13, 2005 |
|
Current U.S.
Class: |
216/67; 118/712;
118/713; 118/715; 118/723E; 156/345.24; 156/345.25; 204/192.32;
204/192.33; 204/298.11; 204/298.31; 204/298.32; 216/59; 216/60 |
Current CPC
Class: |
H01J
37/32458 (20130101); H01J 37/32972 (20130101); H01L
21/67069 (20130101) |
Current International
Class: |
C23C
16/00 (20060101); C23C 14/34 (20060101); G01L
21/30 (20060101) |
Field of
Search: |
;204/192.32,192.33,298.11,298.31,298.32 ;156/345.24,345.25
;118/715,723E,712,713 ;216/59,60,67 ;427/8,10 |
References Cited
[Referenced By]
U.S. Patent Documents
Foreign Patent Documents
Other References
The Random House College Dictionary, p. 635, 1982. cited by
examiner.
|
Primary Examiner: McDonald; Rodney G.
Attorney, Agent or Firm: Oblon, Spivak, McClelland, Maier
& Neustadt, P.C.
Claims
The invention claimed is:
1. An optical window deposition shield comprising: a backing plate
having a through hole; a honeycomb structure comprising plural
adjacent corrugated sheets attached together to form a plurality of
adjacent cells in spaces between the adjacent corrugated sheets,
the cells configured to allow optical viewing through the honeycomb
structure, each cell having an aspect ratio of length to diameter
sufficient to impede a processing plasma from traveling through the
full length of the cell; and a coupling device configured to couple
the honeycomb structure to the backing plate such that the
honeycomb structure is aligned with at least a portion of the
through hole in the backing plate.
2. The optical window deposition shield of claim 1, wherein said
backing plate comprises aluminum sheet metal.
3. The optical window deposition shield of claim 1, wherein said
backing plate comprises anodized aluminum sheet metal.
4. The optical window deposition shield of claim 1, wherein said
backing plate is configured to be coupled to a chamber liner such
that the through hole is at least partially aligned with a hole in
the chamber liner.
5. The optical window deposition shield of claim 4, wherein said
through hole substantially contours the hole in the chamber
liner.
6. The optical window deposition shield of claim 1, wherein said
honeycomb structure comprises aluminum.
7. The optical window deposition shield of claim 6, wherein said
honeycomb structure is coated with a protective coating.
8. The optical window deposition shield of claim 6, wherein said
protective coating comprises a compound including an oxide of
aluminum.
9. The optical window deposition shield of claim 6, wherein said
protective coating comprises a compound including a mixture of
Al.sub.2O.sub.3 and Y.sub.2O.sub.3.
10. The optical window deposition shield of claim 6, wherein said
protective coating comprises a compound including at least one of a
III-column element and a lanthanon element.
11. The optical window deposition shield of claim 10, wherein the
III-column element comprises at least one of yttrium, scandium, and
lanthanum.
12. The optical window deposition shield of claim 10, wherein the
lanthanon element comprises at least one of cerium, dysprosium, and
europium.
13. The optical window deposition shield of claim 6, wherein said
protective coating comprises at least one of yttria
(Y.sub.2O.sub.3), Sc.sub.2O.sub.3, Sc.sub.2F.sub.3, YF.sub.3,
LA.sub.2O.sub.3, CeO.sub.2, Eu.sub.2O.sub.3, and DyO.sub.3.
14. The optical window deposition shield of claim 1, wherein said
honeycomb structure is configured to fit snugly into a hole in a
plasma processing chamber liner to provide a deposition shield
within said hole in the chamber liner.
15. The optical window deposition shield of claim 1, wherein said
cells of the honeycomb structure have an aspect ratio of about four
or more.
16. The optical window deposition shield of claim 1, wherein said
coupling device comprises a retaining flange that is detachably
coupled to the backing plate by press contact when the backing
plate is coupled to the chamber liner.
17. The optical window deposition shield of claim 1, wherein said
coupling device comprises at least one retaining pin fixed to the
backing plate and configured to engage at least one cell of the
honeycomb structure when the honeycomb structure is pressed over
the at least one retaining pin.
18. The optical window deposition shield of claim 17, wherein the
at least one retaining pin is configured to engage the at least one
cell of the honeycomb structure by deforming the cell.
19. The optical window deposition shield of claim 1, wherein said
coupling device comprises at least one threaded fastener fixed to
the backing plate and configured to hold the honeycomb structure in
contact with the backing plate.
20. An optical window deposition shield comprising: a honeycomb
structure planar sheet having a plurality of adjacent cells
configured to allow optical viewing through the honeycomb
structure, each cell having an aspect ratio of length to diameter
sufficient to impede a processing plasma from traveling through the
full length of the cell; and a clip device configured to hold
opposing ends of the honeycomb planar sheet together to form a
substantially continuous liner of honeycomb material configured to
line a chamber wall of a plasma processing chamber.
21. A plasma processing chamber comprising: a chamber wall having
an optical viewing window; a chamber liner having a liner hole that
is substantially aligned with said viewing window to permit viewing
an interior of the chamber through the viewing window and liner
hole; and an optical window deposition shield substantially aligned
with said viewing window and liner hole, the optical viewing window
deposition shield comprising a backing plate having a through hole,
a honeycomb structure comprising plural adjacent corrugated sheets
attached together to form a plurality of adjacent cells in spaces
between the adjacent corrugated sheets, the cells configured to
allow optical viewing through the honeycomb structure, each cell
having an aspect ratio of length to diameter sufficient to impede a
processing plasma from traveling through the full length of the
cell, and a coupling device configured to couple the honeycomb
structure to the backing plate such that the honeycomb structure is
aligned with at least a portion of the through hole in the backing
plate.
22. The plasma processing chamber of claim 21, wherein said backing
plate comprises aluminum sheet metal.
23. The plasma processing chamber of claim 21, wherein said backing
plate comprises anodized aluminum sheet metal.
24. The plasma processing chamber of claim 21, wherein said backing
plate is configured to be coupled to a chamber liner such that the
through hole is at least partially aligned with a hole in the
chamber liner.
25. The plasma processing chamber of claim 24, wherein said through
hole substantially contours the hole in the chamber liner.
26. The plasma processing chamber of claim 21, wherein said
honeycomb structure comprises aluminum.
27. The plasma processing chamber of claim 26, wherein said
honeycomb structure is coated with a protective coating.
28. The plasma processing chamber of claim 26, wherein said
protective coating comprises a compound including an oxide of
aluminum.
29. The plasma processing chamber of claim 26, wherein said
protective coating comprises a compound including a mixture of
Al.sub.2O.sub.3 and Y.sub.2O.sub.3.
30. The plasma processing chamber of claim 26, wherein said
protective coating comprises a compound including at least one of a
III-column element and a lanthanon element.
31. The plasma processing chamber of claim 30, wherein the
III-column element comprises at least one of yttrium, scandium, and
lanthanum.
32. The plasma processing chamber of claim 30, wherein the
lanthanon element comprises at least one of cerium, dysprosium, and
europium.
33. The plasma processing chamber of claim 26, wherein said
protective coating comprises at least one of yttria
(Y.sub.2O.sub.3), Sc.sub.2O.sub.3, Sc.sub.2F.sub.3, YF.sub.3,
LA.sub.2O.sub.3, CeO.sub.2, Eu.sub.2O.sub.3, and DyO.sub.3.
34. The plasma processing chamber of claim 21, wherein said
honeycomb structure is configured to fit snugly into a hole in a
plasma processing chamber liner to provide a deposition shield
within said hole in the chamber liner.
35. The plasma processing chamber of claim 21, wherein said cells
of the honeycomb structure have an aspect ratio of about four or
more.
36. The plasma processing chamber of claim 21, wherein said
coupling device comprises a retaining flange that is detachably
coupled to the backing plate by press contact when the backing
plate is coupled to the chamber liner.
37. The plasma processing chamber of claim 21, wherein said
coupling device comprises at least one retaining pin fixed to the
backing plate and configured to engage at least one cell of the
honeycomb structure when the honeycomb structure is pressed over
the at least one retaining pin.
38. The plasma processing chamber of claim 37, wherein the at least
one retaining pin is configured to engage the at least one cell of
the honeycomb structure by deforming the cell.
39. The plasma processing chamber of claim 21, wherein said
coupling device comprises at least one threaded fastener fixed to
the backing plate and configured to hold the honeycomb structure in
contact with the backing plate.
40. An optical window deposition shield comprising: means for
impeding processing plasma from traveling into contact with a
viewing window of a plasma chamber and for allowing viewing through
cells formed between attached adjacent corrugated sheets; and means
for holding the means for impeding within an opening of a chamber
liner used in the plasma chamber.
41. A method for impeding a processing plasma from traveling into
contact with a viewing window of a plasma chamber, the method
comprising; providing a mounting hole in a liner of the plasma
chamber; and fixedly mounting a honeycomb structure within the
mounting hole, said honeycomb structure comprising plural adjacent
corrugated sheets attached together to form a plurality of adjacent
cells in spaces between the adjacent corrugated sheets, the cells
configured to allow optical viewing through the honeycomb
structure, each cell having an aspect ratio of length to diameter
sufficient to impede a processing plasma from traveling through the
full length of the cell.
42. An optical window deposition shield comprising: a backing plate
having a through hole; a honeycomb structure comprising a plurality
of adjacent cells configured to allow optical viewing through the
honeycomb structure, each cell having an aspect ratio of length to
diameter sufficient to impede a processing plasma from traveling
through the full length of the cell; and a coupling device
configured to couple the honeycomb structure to the backing plate
such that the honeycomb structure is aligned with at least a
portion of the through hole in the backing plate and comprising a
retaining flange that is detachably coupled to the backing plate by
press contact when the backing plate is coupled to a chamber
liner.
43. An optical window deposition shield comprising: a backing plate
having a through hole; a honeycomb structure comprising a plurality
of adjacent cells configured to allow optical viewing through the
honeycomb structure, each cell having an aspect ratio of length to
diameter sufficient to impede a processing plasma from traveling
through the full length of the cell; and a coupling device
configured to couple the honeycomb structure to the backing plate
such that the honeycomb structure is aligned with at least a
portion of the through hole in the backing plate and comprising at
least one retaining pin fixed to the backing plate and configured
to engage at least one cell of the honeycomb structure when the
honeycomb structure is pressed over the at least one retaining
pin.
44. The optical window deposition shield of claim 43, wherein the
at least one retaining pin is configured to engage the at least one
cell of the honeycomb structure by deforming the cell.
45. A plasma processing chamber comprising: a chamber wall having
an optical viewing window; a chamber liner having a liner hole that
is substantially aligned with said viewing window to permit viewing
an interior of the chamber through the viewing window and liner
hole; and an optical window deposition shield substantially aligned
with said viewing window and liner hole, the optical viewing window
deposition shield comprising a backing plate having a through hole,
a honeycomb structure comprising a plurality of adjacent cells
configured to allow optical viewing through the honeycomb
structure, each cell having an aspect ratio of length to diameter
sufficient to impede a processing plasma from traveling through the
full length of the cell, and a coupling device configured to couple
the honeycomb structure to the backing plate such that the
honeycomb structure is aligned with at least a portion of the
through hole in the backing plate and comprising a retaining flange
that is detachably coupled to the backing plate by press contact
when the backing plate is coupled to the chamber liner.
46. A plasma processing chamber comprising: a chamber wall having
an optical viewing window; a chamber liner having a liner hole that
is substantially aligned with said viewing window to permit viewing
an interior of the chamber through the viewing window and liner
hole; and an optical window deposition shield substantially aligned
with said viewing window and liner hole, the optical viewing window
deposition shield comprising a backing plate having a through hole,
a honeycomb structure comprising a plurality of adjacent cells
configured to allow optical viewing through the honeycomb
structure, each cell having an aspect ratio of length to diameter
sufficient to impede a processing plasma from traveling through the
full length of the cell, and a coupling device configured to couple
the honeycomb structure to the backing plate such that the
honeycomb structure is aligned with at least a portion of the
through hole in the backing plate and comprising at least one
retaining pin fixed to the backing plate and configured to engage
at least one cell of the honeycomb structure when the honeycomb
structure is pressed over the at least one retaining pin.
47. The plasma processing chamber of claim 46, wherein the at least
one retaining pin is configured to engage the at least one cell of
the honeycomb structure by deforming the cell.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to an improved component for a plasma
processing system and, more particularly, to an optical window
deposition shield employed in a plasma processing system to provide
optical access to a process space through the deposition
shield.
2. Discussion of the Background
The fabrication of integrated circuits (IC) in the semiconductor
industry typically employs plasma to create and assist surface
chemistry within a plasma reactor necessary to remove material from
and deposit material to a substrate. In general, plasma is formed
with the plasma reactor under vacuum conditions by heating
electrons to energies sufficient to sustain ionizing collisions
with a supplied process gas. Moreover, the heated electrons can
have energy sufficient to sustain dissociative collisions and,
therefore, a specific set of gasses under predetermined conditions
(e.g. chamber pressure, gas flow rate etc.) are chosen to produce a
population of charged species and chemically reactive species
suitable to the particular process being performed within the
chamber (e.g. etching processes where materials are removed from
the substrate or deposition where materials are added to the
substrate).
Although the formation of a population of charged species (ions,
etc.) and chemically reactive species is necessary for performing
the function of the plasma processing system (i.e. material etch,
material deposition, etc.) at the substrate surface, other
component surfaces on the interior of the plasma processing chamber
are exposed to the physically and chemically active plasma and, in
time, can erode or become coated with deposits. The erosion or
coating of exposed components in the plasma processing system can
lead to a gradual degradation of the plasma processing performance
and ultimately to complete failure of the system.
Thus, in order to minimize the damage of components of a plasma
processing system, more particularly optical windows, an optical
window deposition shield is mounted between the optical window and
the plasma. FIG. 6 is a partial cross-sectional view of a
conventional optical window deposition shield in relation to a
chamber wall deposition shield. As seen in this figure, the optical
window deposition shield 1 includes a main body 3 and a peripheral
flange 5 used to connect the optical window deposition shield 1
with a chamber wall shield 10. As seen in the partial cross-section
portion of the optical window deposition shield 1 itself, the
optical window deposition shield 1, typically fabricated from
aluminum, includes many high aspect ratio holes 7 that open to the
plasma. The high aspect ratio holes 7 have a ratio of length to
diameter of four or greater. While these high aspect ratio holes 7
allow viewing through the optical window deposition shield 1,
because of their geometry, the high aspect ratio holes 7 do not
allow plasma to form close to the optical window of a plasma
chamber that the shield is used in. Further, the optical window
deposition shield 1 can be coated with various protective
materials. For example, the optical window deposition shield 1 can
be anodized to produce a surface layer of aluminum oxide, which is
more resistant to the plasma. Details of an optical window
deposition shield in relation to a plasma processing chamber will
be discussed with respect to FIG. 1 below.
While effective in shielding the optical window of a processing
chamber, prior art optical window deposition shields such as the
one shown in FIG. 6 pose problems. First, the process of forming
multiple holes in a block of aluminum does not provide a large
ratio of viewing area (i.e., holes) to metal region, thereby making
viewing of the plasma properties through the shield 1
difficult.
Moreover, the prior art optical viewing window shields are
expensive to manufacture and are typically machined to a specific
shape corresponding to the chamber liner configuration. Therefore,
periodic maintenance, such as removal of the optical window
deposition shield 1 for cleaning and inspection, is performed to
prolong the life of the shield. Because the optical window
deposition shield 1 is an integral structure fastened to the
chamber liner 10, removal is complicated and time consuming, which
results in further expense in the way of labor and chamber
down-time. Finally, the optical window deposition shield 1 is heavy
and bulky making safe disposal difficult.
As an alternative to the optical window deposition shield, the
damage of the optical window can be minimized by providing gas flow
over the optical window to keep it free of plasma contact during
plasma processing. However, the necessary gas flow device is
expensive and cannot easily be retrofitted to an existing
chamber.
SUMMARY OF THE INVENTION
One object of the present invention is to address the above
described and/or other problems in the art of plasma processing
system.
Another object of the present invention is to provide an optical
window deposition shield that is disposable.
Still another object of the present invention is to provide an
optical window deposition shield that minimizes the frequency of
maintenance of an optical window and replacement of new optical
window.
These and/or other objects of the invention are provided by an
optical window deposition shield including a backing plate having a
through hole, and a honeycomb structure having a plurality of
adjacent cells configured to allow optical viewing through the
honeycomb structure. Each cell of the honeycomb structure has an
aspect ratio of length to diameter sufficient to impede a
processing plasma from traveling through the full length of the
cell. A coupling device configured to couple the honeycomb core
structure to the backing plate such that the honeycomb structure is
aligned with at least a portion of the through hole in the backing
plate.
In another aspect of the invention, an optical window deposition
shield includes a honeycomb structure planar sheet having a
plurality of adjacent cells configured to allow optical viewing
through the honeycomb structure. Each cell of the honeycomb
structure has an aspect ratio of length to diameter sufficient to
impede a processing plasma from traveling through the full length
of the cell. Also included is a clip device configured to hold
opposing ends of the honeycomb planar sheet together to form a
substantially continuous liner of honeycomb material configured to
line the chamber wall of a plasma processing chamber.
In yet another aspect of the invention, a plasma processing chamber
includes a chamber wall having an optical viewing window, a chamber
liner having a hole that is substantially aligned with the viewing
window to permit viewing an interior of the chamber through the
viewing window and hole, and an optical window deposition shield
substantially aligned with the viewing window and liner hole. The
optical viewing window deposition shield includes a backing plate
having a through hole, and a honeycomb structure having a plurality
of adjacent cells configured to allow optical viewing through the
honeycomb structure. Each cell of the honeycomb structure has an
aspect ratio of length to diameter sufficient to impede a
processing plasma from traveling through the full length of the
cell. A coupling device configured to couple the honeycomb core
structure to the backing plate such that the honeycomb structure is
aligned with at least a portion of the through hole in the backing
plate.
Still another aspect includes an optical window deposition shield
having means for impeding processing plasma from traveling into
contact with a viewing window of a plasma chamber, and means for
holding the means for impeding within an opening of a chamber liner
used in the plasma chamber.
Another aspect of the invention includes a method for impeding a
processing plasma from traveling into contact with a viewing window
of a plasma chamber. The method includes providing a mounting hole
in a liner of the plasma chamber, and fixedly mounting a honeycomb
structure within the mounting hole, the honeycomb structure having
a plurality of adjacent cells configured to allow optical viewing
through the honeycomb structure, each cell having an aspect ratio
of length to diameter sufficient to impede a processing plasma from
traveling through the full length of the cell.
BRIEF DESCRIPTION OF THE DRAWINGS
A more complete appreciation of the invention and many of the
attendant advantages thereof will be readily obtained as the same
becomes better understood by reference to the following detailed
description when considered in connection with the accompanying
drawings, where:
FIG. 1 shows a simplified block diagram of a plasma processing
system according to an embodiment of the present invention,
FIG. 2 shows a top view of a chamber liner having an optical window
deposition shield according to an embodiment of the present
invention,
FIG. 3A shows an enlarged cross-sectional top view of a chamber
liner having an optical window deposition shield according to an
embodiment of the present invention,
FIG. 3B shows an orthogonal plan view of the optical window
deposition shield of FIG. 3A,
FIG. 3C shows an orthogonal side view of the optical window
deposition shield of FIG. 3A,
FIG. 3D shows a plan view of an optical window deposition shield
according to an embodiment of the present invention,
FIG. 4A shows an enlarged cross-sectional view of a chamber liner
having an optical window deposition shield according to another
embodiment of the present invention,
FIG. 4B shows an enlarged cross-sectional view of a chamber liner
having an optical window deposition shield according to another
embodiment of the present invention,
FIG. 4C shows an enlarged cross-sectional view of a chamber liner
having an optical window deposition shield according to another
embodiment of the present invention,
FIG. 5 shows a semiconductor processing chamber having an optical
window deposition shield that connects upper and lower chamber
liners according to an embodiment of the present invention, and
FIG. 6 shows an enlarged cross-sectional view of a conventional
optical window deposition shield in relation to a chamber wall
deposition shield.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
Referring now to the drawings, wherein like reference numerals
designate identical or corresponding parts throughout the several
views. FIG. 1 shows a simplified block diagram of a plasma
processing system according to an embodiment of the present
invention. As seen in this figure, a plasma processing system 100
includes a plasma processing chamber 10, an upper assembly 20, an
electrode plate 24, a substrate holder 30 for supporting a
substrate 35, and a pumping duct 40 coupled to a vacuum pump (not
shown) for providing a reduced pressure atmosphere 11 in plasma
processing chamber 10. Plasma processing chamber 10 can facilitate
the formation of processing plasma in a process space 12 adjacent
substrate 35. The plasma processing system 100 can be configured to
process 200 mm substrates, 300 mm substrates, or larger.
In the illustrated embodiment, the upper assembly 20 can include at
least one of a cover, a gas injection assembly, and an upper
electrode impedance match network. For example, the electrode plate
24 can be coupled to an RF source. In another alternate embodiment,
the upper assembly 20 includes a cover and an electrode plate 24,
wherein the electrode plate 24 is maintained at an electrical
potential equivalent to that of the plasma processing chamber 10.
For example, the plasma processing chamber 10, the upper assembly
20, and the electrode plate 24 can be electrically connected to
ground potential.
Plasma processing chamber 10 can, for example, further include a
deposition shield 14 for protecting the plasma processing chamber
10 from the processing plasma in the process space 12, and an
optical viewport 16. Optical viewport 16 can include an optical
window 17 coupled to the backside of an optical window deposition
shield 18, and an optical window clamp 19 can be configured to
couple optical window 17 to the optical window deposition shield
18. Sealing members, such as O-rings (not shown), can be provided
between the optical window clamp 19 and the optical window 17,
between the optical window 17 and the optical window deposition
shield 18, and between the optical window deposition shield 18 and
the plasma processing chamber 10. Optical viewport 16 can, for
example, permit monitoring of optical emission from the processing
plasma in process space 12.
Substrate holder 30 can, for example, further include a vertical
translational device 50 surrounded by a bellows 52 coupled to the
substrate holder 30 and the plasma processing chamber 10, and
configured to seal the vertical translational device 50 from the
reduced pressure atmosphere 11 in plasma processing chamber 10.
Additionally, a bellows shield 54 can, for example, be coupled to
the substrate holder 30 and configured to protect the bellows 52
from the processing plasma. Substrate holder 30 can, for example,
further be coupled to at least one of a focus ring 60, and a shield
ring 62. Furthermore, a baffle plate 64 can extend about a
periphery of the substrate holder 30.
Substrate 35 can be, for example, transferred into and out of
plasma processing chamber 10 through a slot valve (not shown) and
chamber feed-through (not shown) via robotic substrate transfer
system where it is received by substrate lift pins (not shown)
housed within substrate holder 30 and mechanically translated by
devices housed therein. Once substrate 35 is received from
substrate transfer system, it is lowered to an upper surface of
substrate holder 30.
Substrate 35 can be, for example, affixed to the substrate holder
30 via an electrostatic clamping system. Furthermore, substrate
holder 30 can, for example, further include a cooling system
including a re-circulating coolant flow that receives heat from
substrate holder 30 and transfers heat to a heat exchanger system
(not shown), or when heating, transfers heat from the heat
exchanger system. Moreover, gas can, for example, be delivered to
the back-side of substrate 35 via a backside gas system to improve
the gas-gap thermal conductance between substrate 35 and substrate
holder 30. Such a system can be utilized when temperature control
of the substrate is required at elevated or reduced temperatures.
In other embodiments, heating elements, such as resistive heating
elements, or thermo-electric heaters/coolers can be included.
In the illustrated embodiment, shown in FIG. 1, substrate holder 30
can include an electrode through which RF power is coupled to the
processing plasma in process space 12. For example, substrate
holder 30 can be electrically biased at a RF voltage via the
transmission of RF power from a RF generator (not shown) through an
impedance match network (not shown) to substrate holder 30. The RF
bias can serve to heat electrons to form and maintain plasma. In
this configuration, the system can operate as a reactive ion etch
(RIE) reactor, wherein the chamber and upper gas injection
electrode serve as ground surfaces. A typical frequency for the RF
bias can range from 1 MHz to 100 MHz and is preferably 13.56 MHz.
RF systems for plasma processing are well known to those skilled in
the art.
Alternately, the processing plasma formed in process space 12 can
be formed using a parallel-plate, capacitively coupled plasma (CCP)
source, an inductively coupled plasma (ICP) source, any combination
thereof, and with and without DC magnet systems. Alternately, the
processing plasma in process space 12 can be formed using electron
cyclotron resonance (ECR). In yet another embodiment, the
processing plasma in process space 12 is formed from the launching
of a Helicon wave. In yet another embodiment, the processing plasma
in process space 12 is formed from a propagating surface wave.
FIG. 2 is an illustration of a chamber liner having an optical
window deposition shield in accordance with one embodiment of the
present invention. The chamber liner 14 may form a deposition
shield for the entire portion of a plasma processing chamber such
as that shown in FIG. 1. In FIG. 2, the optical window deposition
shield 18 is shown by way of a partial cross-sectional view of the
chamber liner 14. The optical window deposition shield 18 includes
a honeycomb structure 80 that allows optical viewing of a plasma
(not shown) on the interior of the chamber liner 14, while impeding
the plasma contacting a chamber window (not shown) that is aligned
with the optical window deposition shield 18 on the exterior of the
chamber liner 14. The optical window deposition shield 18 also
includes a backing plate 82 that couples the honeycomb structure 80
with the chamber liner 14. Details of alternative configurations of
the optical window deposition shield 18 in relation to the chamber
liner 14 are shown in FIGS. 3A, 4A, 4B and 4C.
FIG. 3A is an enlarged cross-sectional top view of a chamber liner
having an optical window deposition shield in accordance with an
embodiment of the present invention. FIG. 3B is an orthogonal plan
view and FIG. 3C is an orthogonal side view of the optical window
deposition shield shown in FIG. 3A. As seen in these figures, the
chamber liner 14 includes an inner annular portion 142 and an outer
annular portion 144. The chamber liner 14 is fastened to the upper
assembly 20 and the electrode plate 24 by way of a connecting
device 146.
As best seen in the cross-sectional portion of FIG. 3A, the chamber
liner 14 also includes a through hole having a small opening 148
facing the interior of the chamber liner 14, and an enlarged
opening 149 at the exterior of the chamber liner 14 so as to form a
retaining surface or lip 150 in the chamber liner 14. As seen in
FIG. 3A, the backing plate 82 of the optical window deposition
shield 18 fits within the enlarged opening 149 in flush contact
with the lip 150, while the honeycomb structure 80 fits within the
smaller opening 148. In the embodiment of FIG. 3A, the small
opening 148 includes a front portion 151 that engages the honeycomb
structure 80 to prevent the honeycomb structure 80 from dropping
into the process space 12 and to assist in maintaing the honeycomb
structure 80 in a fixed position. Preferably, the honeycomb
structure 80 snugly engages the sidewalls of the smaller opening
148 to be held in contact with the front portion 151. In this
regard, the honeycomb structure 80 preferably has an expansion
quality that allows it to be slightly compressed when placed within
the smaller opening 148, and then expand to engage the sidewalls of
the opening 148.
In the embodiment of FIG. 3A, the backing plate 82 engages the lip
150 to assist in substantially maintaining the honeycomb structure
80 in a fixed position within the chamber liner 14. In the
embodiment of FIG. 3A, the backing plate 82 includes a fastening
device 147 such as screws to fix the backing plate 82 to the
chamber liner 14 so as to assist in maintaining the honeycomb
structure 80 in a fixed position. However, other mechanisms for
holding the backing plate within the large opening 149 may be used.
For example, the periphery of the backing plate 82 and/or sidewall
of the opening 149 may include an elastic material or device that
deforms when the backing plate 82 is inserted into the opening 149,
but maintains tension contact between the backing plate 82 and
sidewall such that the backing plate is substantially held in a
fixed position within the opening 149. The backing plate 82 may or
may not be in contact with the lip 150, but should substantially
contact the fixed backing plate to remain within the opening
148.
In the embodiment of FIG. 3A, coupling between the honeycomb
structure 80 and the backing plate 82 is provided by mere contact
held between these two objects due to their fixed positioning
within the openings 148 and 149. Specifically, coupling between the
honeycomb structure 80 and the backing plate 82 is provided by way
of the front portion 151 and the side walls of the smaller opening
148 holding the honeycomb structure in place, while the backing
plate 82 is held in contact with the honeycomb structure 80 by the
fastening device 147 holding the backing plate against the
honeycomb structure 80 and the lip 150. As would be understood by
one of ordinary skill in the art, however, it is only necessary for
the honeycomb structure 80 to be held within the small opening 148
by either the front portion, or snug engagement with the side walls
of the opening 148, or any other known method for holding the
honeycomb structure 80 within the opening 148. A backing plate may
not be necessary where the honeycomb structure is configured to
maintain a fixed position within the opening 148, such as with the
honeycomb expansion feature described above, but the backing plate
is preferred to ensure the structure 80 remains in a substantially
fixed position.
FIG. 3D shows a plan view of the optical window deposition shield
18 with details of the honeycomb structure in accordance with an
embodiment of the present invention. In the embodiment of FIG. 3D
the backing plate 82 is substantially rectangular in shape and has
a rounded edge rectangular opening 81 occupied by the honeycomb
structure 80. The backing plate 82 is preferably made of aluminum
sheet metal having an anodized coating thereon, however, other
suitable materials may be used. As seen in FIG. 3D, a periphery
portion 84 of the honeycomb core 80 is in planer contact with the
backing plate 82. Thus, the periphery portion 84 of the honeycomb
core 80 may conceal the edge of the opening 81, which is shown in
phantom in the figure. In one embodiment of the invention, the
opening 81 and the shape of the honeycomb core 80 both match the
shape of the opening in the chamber liner 14. However, it is only
necessary that the honeycomb core 80 substantially match the shape
of the through hole in the chamber liner 14 so as to impede the
plasma from reaching the chamber window when the optical window
deposition shield 18 is installed in a plasma chamber.
In FIG. 3D, the honeycomb core 80 is made of a plurality of
corrugated sheets of material 90 that are connected to each other
at connection points 92 and connected to the backing plate 82 to
form a plurality of cells 94. The connecting points 92 may be metal
welds or adhesive connections. If adhesive connections are used,
however, adhesive that does not break down when exposed to a plasma
process is preferably selected to avoid particle contamination in
the plasma chamber. As also seen in FIG. 3D, the honeycomb material
80 can optionally be welded to the backing plate 82 by welds 95.
Each cell 94 may have a ratio length to diameter of four or
greater. However, it is sufficient that each cell 94 has an aspect
ratio sufficient to impede, and preferably substantially prevent, a
plasma from traveling the longitudinal distance of the cell to a
chamber window. The use of a plurality of adjacent cells allows
viewing of the interior of the plasma chamber through the honeycomb
core material 80. Many variations in the thickness of the sheet
material 90 and the size and number of cells 94 are possible. In
one embodiment of the invention, the honeycomb core structure 80 is
formed of the sheet material 90 having a thickness of between 0.002
to 0.005 inches. Moreover, the honeycomb core structure 80, shown
in FIG. 3D, is a schematic representation and, thus, not all
connecting points are represented and the cell sizes vary
widely.
The honeycomb core material 80 is preferably made of aluminum and
may be coated with a protective coating. Alternatively, the
honeycomb core material 80 can also be made of one of titanium
alloys, aluminum alloys, nickel alloys, stainless alloys and carbon
steel alloys. In one embodiment of the invention, the honeycomb
core material 80 is made of 3003 Aluminum alloy or 5056 aluminum
alloy. Also, a laser welded honeycomb core available from BENECOR,
INC of Parson, Kans. can be used as the honeycomb core material 80.
The protective coating can include a compound including an oxide of
aluminum such as Al.sub.2O.sub.3. In another embodiment of the
invention, the protective coating can include a mixture of
Al.sub.2O.sub.3 and Y.sub.2O.sub.3. In still another embodiment of
the invention, the protective coating can include at least one of a
III-column element (i.e., column 3 of the Periodic Table) and a
lanthanon element. In another embodiment of the invention, the
III-column element can comprise at least one of yttrium, scandium,
and lanthanum. In still another embodiment of the present
invention, the lanthanon element can comprise at least one of
cerium, dysprosium, and europium. In another embodiment of the
invention, the compound forming the protective layer can include at
least one of yttria (Y.sub.2O.sub.3), Sc.sub.2O.sub.3,
Sc.sub.2F.sub.3, YF.sub.3, LA.sub.2O.sub.3, CeO.sub.2,
Eu.sub.2O.sub.3, DyO.sub.3.
The above-described structure of the optical window deposition
shield 18 can provide several advantages over the prior art shields
such as that shown in FIG. 6. First, the relatively thin walled
cells 94 of the honeycomb core 80 provide a large ratio of viewing
area to metal region, thereby facilitating viewing of the interior
of a plasma chamber through the optical window deposition shield
18. Moreover, the honeycomb core structure 80 is inexpensive to
manufacture and, therefore, can be periodically replaced rather
than performing labor-intensive maintenance that causes machine
downtime. In this regard, because the honeycomb core 80 is
detachably coupled to the backing plate 82, the honeycomb core 80
can be easily and quickly removed and replaced, while the backing
plate 82 is generally unexposed to plasma and can therefore be
reused. Still further, the structure of the honeycomb core 80
allows it to be easily crushed (such as by hand) to a small volume
for safe and easy disposal.
While the embodiment of FIGS. 3A and 3D show the honeycomb core 80
detachably coupled to the backing plate 82, alternative ways of
coupling the honeycomb core 80 to the backing plate 82 may be used.
FIGS. 4A 4C show partial cross-sectional views of the chamber liner
14, depicting the coupling of the honeycomb core 80 to the backing
plate, according to alternative embodiments of the present
invention. FIGS. 4A through 4C emphasize alternative ways of
coupling the honeycomb structure to the backing plate and,
therefore, full details of the optical window deposition shield are
not shown in these figures.
FIG. 4A shows an embodiment of the present invention, wherein the
honeycomb core material 801 is connected to the backing plate 821
by way of at least one spot weld 841. The spot welds are located
adjacent to the central opening of the backing plate 821. Details
of one possible location of the spot welds 841 are shown by the
optional weld areas of FIGS. 3A and 3B discussed above. Thus, with
the embodiment of FIG. 4A, when replacement of the optical window
deposition shield 181 is required, the entire core 801 and sheet
metal backing plate assembly 821 must be removed and replaced.
FIG. 4B shows an embodiment of the present invention similar to the
embodiment of FIG. 3A in that the honeycomb core is detachably
coupled to the backing plate. Specifically, in the embodiment of
FIG. 4B, the backing plate 823 includes at least one retaining pin
843 positioned at an edge of the through hole in the backing plate
823. The retaining pin 843 may be connected to the backing plate
823 by way of an interference fit, threads, set screws for any
similar mechanism for attaching a pin to the backing plate. To
install the honeycomb core 803 to the sheet metal backing plate
823, the core is simply pushed over the pins 843. Each pin 843 will
engage a cell of the honeycomb core 803, deforming it slightly as
the pin is inserted into the cell. This deformation and the
associated friction force retains the core 803 to the sheet metal
backing plate 823. The honeycomb core 803 is replaced by simply
removing the core from the pins 843 of the backing plate, and
placing a new honeycomb core onto the pins 843 of the backing plate
823. Thus, the pins 843 and the backing plate 823 are preferably
reusable. As the pins 843 may be exposed to a plasma, these pins
are preferably coated with a protective coating such as anodized
aluminum, to prolong the life of the pins. Nevertheless, the pin
843 may reach its end of life before the backing plate 823 because
the backing plate 823 is substantially protected from exposure to
the plasma. Thus, it may be necessary to replace the pins 843 along
with the honeycomb core 803. In an alternative embodiment of the
optical window deposition shield 183 shown in FIG. 4B, the pins 843
do not substantially deform the cell of the honeycomb core 803.
FIG. 4C shows an optical window deposition shield 184 wherein a
honeycomb core 804 is detachably coupled to the sheet metal backing
plate 824 by way of threaded fasteners 844. A shaft of the threaded
fastener may be connected to the sheet metal backing plate 824 by
interference fit, threading, etc. The honeycomb core 804 is
installed over the threaded shaft 844 such that the threaded shaft
extends through a cell of the honeycomb core 804. A nut then fixes
the honeycomb core to the backing plate 824. When the honeycomb
core 804 reaches end of life, the nut is removed and the honeycomb
core is replaced by removing the used honeycomb core 804 from the
threaded shaft and placing a new honeycomb core on the threaded
shaft and fixing the new core with the nut. As described with the
pin of the embodiment of FIG. 4B, the threaded shaft and nut are
exposed to plasma and therefore, are preferably coated with a
protective coating. However, the threaded shaft and nut may be
replaced periodically without replacement of the sheet metal
backing plate 824.
FIG. 5 illustrates a semiconductor processing chamber having an
optical window deposition shield that connects upper and lower
chamber liners in accordance with an embodiment of the present
invention. Specifically, the semiconductor processing chamber 500
includes an exterior wall 502 and an interior portion 504. The
exterior wall 502 is protected from the interior 504 by way of an
upper chamber liner 14A and a lower chamber liner 14B. One or more
optical viewing windows may be placed in the exterior wall 502
between the position of the upper chamber liner 14A and the lower
chamber liner 14B. Thus, the optical window deposition shield 185
includes a relatively long piece of substantially planar honeycomb
core 185 that is fashioned into an annular ring and held in place
in the process chamber 500, between the upper and lower chamber
liners 14A and 14B, respectively. The honeycomb ring 185 may be
held together with metallic clips (not shown) before installation
between the liners 14A and 14B. Moreover, the honeycomb core 185
can be made of aluminum and covered with a protective coating as
previously described. In the embodiment of FIG. 5, the honeycomb
core 805 can protect one or more optical windows at the same time.
As with the previously described embodiments, when maintenance
requires changing of the core material 805, the honeycomb core
material 805 is simply removed and a new core is inserted in its
place. Further, as with other embodiments, the core material can be
crushed, bagged, tagged, and safely disposed of.
Any of the above methods may also optionally include machining
anodized (or otherwise coated) surfaces that are not exposed
surfaces (e.g., to obtain a bare metal connection where the
machined surface will mate with another part).
Obviously, numerous modifications and variations of the present
invention are possible in light of the above teachings. It is
therefore to be understood that within the scope of the appended
claims, the invention may be practiced otherwise than as
specifically described herein.
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