Mitrovic; Andrej S.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Mitrovic; Andrej S..The latest application filed is for "method and system for monitoring component consumption".

Company Profile

0.23.30

Mitrovic; Andrej S. - Phoenix AZ
Mitrovic; Andrej S - Phoenix AZ
Mitrovic, Andrej S. - Phoneix AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process Grant 8,050,900 - Mitrovic , et al. November 1, 2	2011-11-01
System and method for using first-principles simulation to facilitate a semiconductor manufacturing process Grant 8,032,348 - Mitrovic , et al. October 4, 2	2011-10-04
System and method for using first-principles simulation to characterize a semiconductor manufacturing process Grant 8,014,991 - Mitrovic , et al. September 6, 2	2011-09-06
Chuck pedestal shield Grant 7,789,963 - Mitrovic , et al. September 7, 2	2010-09-07
Apparatus and method for use of optical system with a plasma processing system Grant 7,591,923 - Mitrovic , et al. September 22, 2	2009-09-22
Method and system for monitoring component consumption Grant 7,353,141 - Mitrovic , et al. April 1, 2	2008-04-01
Method And System For Monitoring Component Consumption App 20070192059 - Mitrovic; Andrej S. ; et al.	2007-08-16
Honeycomb optical window deposition shield and method for a plasma processing system Grant 7,241,397 - Fink , et al. July 10, 2	2007-07-10
Method and system for monitoring component consumption Grant 7,233,878 - Mitrovic , et al. June 19, 2	2007-06-19
Plasma chamber wall segment temperature control App 20070114206 - Mitrovic; Andrej S. ; et al.	2007-05-24
Plasma chamber wall segment temperature control App 20070113976 - Mitrovic; Andrej S. ; et al.	2007-05-24
Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck Grant 7,208,067 - Mitrovic April 24, 2	2007-04-24
Plasma chamber wall segment temperature control Grant 7,186,313 - Mitrovic , et al. March 6, 2	2007-03-06
Method and apparatus for improved plasma processing uniformity Grant 7,164,236 - Mitrovic , et al. January 16, 2	2007-01-16
Chuck pedestal shield App 20060191484 - Mitrovic; Andrej S. ; et al.	2006-08-31
Plasma processing system and method App 20060060303 - Fink; Steven T. ; et al.	2006-03-23
Method and apparatus for determining plasma impedance Grant 7,015,414 - Mitrovic March 21, 2	2006-03-21
Low reflection microwave window Grant 6,965,287 - Mitrovic November 15, 2	2005-11-15
Controlled method for segmented electrode apparatus and method for plasma processing Grant 6,962,664 - Mitrovic November 8, 2	2005-11-08
Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy Grant 6,958,484 - Mitrovic October 25, 2	2005-10-25
Honeycomb optical window deposition shield and method for a plasma processing system App 20050225248 - Fink, Steven T. ; et al.	2005-10-13
Low Reflection Microwave Window App 20050219015 - Mitrovic, Andrej S.	2005-10-06
Apparatus and method for use of optical system with a plasma processing system App 20050173375 - Mitrovic, Andrej S. ; et al.	2005-08-11
Method and system for monitoring component consumption App 20050171730 - Mitrovic, Andrej S. ; et al.	2005-08-04
Addition of power at selected harmonics of plasma processor drive frequency Grant 6,917,204 - Mitrovic , et al. July 12, 2	2005-07-12
Closed-drift hall effect plasma vacuum pump for process reactors Grant 6,899,527 - Quon , et al. May 31, 2	2005-05-31
Method and apparatus for determining plasma impedance App 20050067386 - Mitrovic, Andrej S.	2005-03-31
System and method for using first-principles simulation to provide virtual sensors that facilitate a semiconductor manufacturing process App 20050071039 - Mitrovic, Andrej S.	2005-03-31
System and method for using first-principles simulation to characterize a semiconductor manufacturing process App 20050071036 - Mitrovic, Andrej S.	2005-03-31
System and method for using first-principles simulation to facilitate a semiconductor manufacturing process App 20050071034 - Mitrovic, Andrej S.	2005-03-31
Segmented electrode apparatus for plasma processing Grant 6,863,020 - Mitrovic , et al. March 8, 2	2005-03-08
Linear inductive plasma pump for process reactors Grant 6,824,363 - Mitrovic , et al. November 30, 2	2004-11-30
Method and device for attenuating harmonics in semiconductor plasma processing systems Grant 6,812,646 - Windhorn , et al. November 2, 2	2004-11-02
Method and structure to segment RF coupling to silicon electrode Grant 6,806,653 - Strang , et al. October 19, 2	2004-10-19
Method and system for monitoring RF impedance to determine conditions of a wafer on an electrostatic chuck App 20040188021 - Mitrovic, Andrej S.	2004-09-30
Plasma reactor coil magnet App 20040168771 - Mitrovic, Andrej S.	2004-09-02
Method and apparatus for improved plasma processing uniformity App 20040168770 - Mitrovic, Andrej S. ; et al.	2004-09-02
Closed-drift hall effect plasma vacuum pump for process reactors App 20040151595 - Quon, Bill H. ; et al.	2004-08-05
Plasma processing system and method App 20040104681 - Mitrovic, Andrej S.	2004-06-03
Applied plasma duct system Grant 6,729,850 - Dandl , et al. May 4, 2	2004-05-04
Method and apparatus for transferring heat from a substrate to a chuck App 20040043639 - Mitrovic, Andrej S. ; et al.	2004-03-04
Device and method for coupling two circuit components which have different impedances Grant 6,700,458 - Mitrovic , et al. March 2, 2	2004-03-02
Addition of power at selected harmonics of plasma processor drive frequency App 20040035837 - Mitrovic, Andrej S. ; et al.	2004-02-26
Method and apparatus for 2-d spatially resolved optical emission and absorption spectroscopy App 20040026035 - Mitrovic, Andrej S.	2004-02-12
Capacitively coupled RF voltage probe App 20040021454 - Jevtic, Jovan ; et al.	2004-02-05
Method and structure to segment RF coupling to silicon electrode App 20030141795 - Strang, Eric J. ; et al.	2003-07-31
Segmented electrode apparatus and method for plasma processing App 20030137250 - Mitrovic, Andrej S.	2003-07-24
Method and apparatus for improved plasma processing uniformity App 20030137251 - Mitrovic, Andrej S. ; et al.	2003-07-24
Linear inductive plasma pump for process reactors App 20030123992 - Mitrovic, Andrej S. ; et al.	2003-07-03
Applied plasma duct system App 20030117080 - Dandl, Raphael A. ; et al.	2003-06-26
Method and device for attenuating harmonics in semiconductor plasma processing systems App 20030057844 - Windhorn, Thomas H. ; et al.	2003-03-27
Device and method for coupling two circuit components which have different impedances App 20030038688 - Mitrovic, Andrej S. ; et al.	2003-02-27
Segmented electrode apparatus and method for plasma processing App 20020170676 - Mitrovic, Andrej S. ; et al.	2002-11-21

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