U.S. patent number 7,514,358 [Application Number 11/231,386] was granted by the patent office on 2009-04-07 for sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor. This patent grant is currently assigned to Applied Materials, Inc.. Invention is credited to Wei Cao, Ling Chen, Hua Chung, Vincent Ku.
United States Patent | 7,514,358 |
Cao , et al. | April 7, 2009 |
**Please see images for: ( Certificate of Correction ) ** |
Embodiments of the invention provide a method for forming tantalum nitride materials on a substrate by employing an atomic layer deposition (ALD) process. The method includes heating a tantalum precursor within an ampoule to a predetermined temperature to form a tantalum precursor gas and sequentially exposing a substrate to the tantalum precursor gas and a nitrogen precursor to form a tantalum nitride material. Thereafter, a nucleation layer and a bulk layer may be deposited on the substrate. In one example, a radical nitrogen compound may be formed from the nitrogen precursor during a plasma-enhanced ALD process. A nitrogen precursor may include nitrogen or ammonia. In another example, a metal-organic tantalum precursor may be used during the deposition process.
Inventors: | Cao; Wei (Milpitas, CA), Chung; Hua (San Jose, CA), Ku; Vincent (Palo Alto, CA), Chen; Ling (Sunnyvale, CA) |
---|---|
Assignee: | Applied Materials, Inc. (Santa
Clara, CA) |
Family ID: | 29586722 |
Appl. No.: | 11/231,386 |
Filed: | September 21, 2005 |
Document Identifier | Publication Date | |
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US 20060019494 A1 | Jan 26, 2006 | |
Application Number | Filing Date | Patent Number | Issue Date | ||
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10379438 | Mar 4, 2003 | 6972267 | |||
60362189 | Mar 4, 2002 | ||||
Current U.S. Class: | 438/643; 257/E21.168; 257/E21.17; 438/627; 438/785 |
Current CPC Class: | C23C 16/045 (20130101); C23C 16/34 (20130101); C23C 16/4408 (20130101); C23C 16/45557 (20130101); H01L 21/28562 (20130101) |
Current International Class: | H01L 21/4763 (20060101); H01L 21/31 (20060101); H01L 21/469 (20060101) |
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