Methods and systems for determining drift in a position of a light beam with respect to a chuck

Reich , et al. March 31, 2

Patent Grant 7511816

U.S. patent number 7,511,816 [Application Number 11/155,026] was granted by the patent office on 2009-03-31 for methods and systems for determining drift in a position of a light beam with respect to a chuck. This patent grant is currently assigned to KLA-Tencor Technologies Corp.. Invention is credited to Yevgeny Kruptesky, Juergen Reich, Christian Wolters.


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