| Patent | Date |
|---|
Methods And Systems For Optical Surface Defect Material Characterization
App 20210010949 - Xu; Zhiwei ; et al. | 2021-01-14 |
Surface defect inspection with large particle monitoring and laser power control
Grant 10,324,045 - Cui , et al. | 2019-06-18 |
System and method for reducing radiation-induced false counts in an inspection system
Grant 10,241,217 - Jiang , et al. | 2019-03-26 |
Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system
Grant 10,215,712 - Wolters , et al. Feb | 2019-02-26 |
Haze and defect distribution and aperture configuration in surface metrology inspectors
Grant 10,088,345 - Huang , et al. October 2, 2 | 2018-10-02 |
System and Method for Reducing Radiation-Induced False Counts in an Inspection System
App 20180045837 - Jiang; Ximan ; et al. | 2018-02-15 |
TDI sensor in a darkfield system
Grant 9,891,177 - Vazhaeparambil , et al. February 13, 2 | 2018-02-13 |
Surface Defect Inspection With Large Particle Monitoring And Laser Power Control
App 20180038803 - Cui; Steve (Yifeng) ; et al. | 2018-02-08 |
System and method for reducing radiation-induced false counts in an inspection system
Grant 9,841,512 - Jiang , et al. December 12, 2 | 2017-12-12 |
Laser with integrated multi line or scanning beam capability
Grant 9,678,350 - Wolters , et al. June 13, 2 | 2017-06-13 |
System and Method for Reducing Radiation-Induced False Counts in an Inspection System
App 20160334516 - Jiang; Ximan ; et al. | 2016-11-17 |
TDI Sensor in a Darkfield System
App 20160097727 - Vazhaeparambil; Jijen ; et al. | 2016-04-07 |
Inspection beam shaping for improved detection sensitivity
Grant 9,255,891 - Wolters , et al. February 9, 2 | 2016-02-09 |
Illumination energy management in surface inspection
Grant 9,194,812 - Wolters , et al. November 24, 2 | 2015-11-24 |
Method and Apparatus for Producing and Measuring Dynamically Focused, Steered, and Shaped Oblique Laser Illumination for Spinning Wafer Inspection System
App 20150330907 - Wolters; Christian ; et al. | 2015-11-19 |
Multi-spot defect inspection system
Grant 9,182,358 - Xu , et al. November 10, 2 | 2015-11-10 |
Surface scanning inspection system with independently adjustable scan pitch
Grant 9,116,132 - Wolters , et al. August 25, 2 | 2015-08-25 |
Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system
Grant 9,068,952 - Petrenko , et al. June 30, 2 | 2015-06-30 |
Surface Scanning Inspection System With Independently Adjustable Scan Pitch
App 20150055128 - Wolters; Christian ; et al. | 2015-02-26 |
Monitoring incident beam position in a wafer inspection system
Grant 8,934,091 - Reich , et al. January 13, 2 | 2015-01-13 |
Surface scanning inspection system with adjustable scan pitch
Grant 8,885,158 - Wolters , et al. November 11, 2 | 2014-11-11 |
Illumination Energy Management in Surface Inspection
App 20140328043 - Wolters; Christian ; et al. | 2014-11-06 |
Multi-Spot Defect Inspection System
App 20140268118 - Xu; Zhiwei ; et al. | 2014-09-18 |
Illumination energy management in surface inspection
Grant 8,786,850 - Wolters , et al. July 22, 2 | 2014-07-22 |
Large particle detection for multi-spot surface scanning inspection systems
Grant 8,755,044 - Reich , et al. June 17, 2 | 2014-06-17 |
Inspection Beam Shaping For Improved Detection Sensitivity
App 20140139829 - Wolters; Christian ; et al. | 2014-05-22 |
Illumination Energy Management in Surface Inspection
App 20140118729 - Wolters; Christian ; et al. | 2014-05-01 |
Monitoring Incident Beam Position in a Wafer Inspection System
App 20140071437 - Reich; Juergen ; et al. | 2014-03-13 |
Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layer
Grant 8,582,094 - Shortt , et al. November 12, 2 | 2013-11-12 |
Laser with Integrated Multi Line or Scanning Beam Capability
App 20130250385 - Wolters; Christian ; et al. | 2013-09-26 |
Large Particle Detection For Multi-Spot Surface Scanning Inspection Systems
App 20130050689 - Reich; Juergen ; et al. | 2013-02-28 |
Fast laser power control with improved reliability for surface inspection
Grant 8,294,887 - Biellak , et al. October 23, 2 | 2012-10-23 |
Surface Scanning Inspection System With Adjustable Scan Pitch
App 20120229802 - Wolters; Christian ; et al. | 2012-09-13 |
Dynamic range extension in surface inspection systems
Grant 8,134,698 - Wolters , et al. March 13, 2 | 2012-03-13 |
Method and apparatus for producing and Measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system
App 20110051132 - Petrenko; Aleksey ; et al. | 2011-03-03 |
Systems and methods for inspecting a specimen with light at varying power levels
Grant 7,787,114 - Wolters , et al. August 31, 2 | 2010-08-31 |
Contemporaneous surface and edge inspection
Grant 7,773,212 - Wolters , et al. August 10, 2 | 2010-08-10 |
Systems and methods for inspecting a wafer with increased sensitivity
Grant 7,697,129 - Haller , et al. April 13, 2 | 2010-04-13 |
System and method to create haze standard
Grant 7,605,915 - Wolters , et al. October 20, 2 | 2009-10-20 |
Illumination energy management in surface inspection
Grant 7,548,308 - Mcmillan , et al. June 16, 2 | 2009-06-16 |
Methods and systems for determining drift in a position of a light beam with respect to a chuck
Grant 7,511,816 - Reich , et al. March 31, 2 | 2009-03-31 |
Systems And Methods For Inspecting A Wafer With Increased Sensitivity
App 20090009754 - Haller; Kurt L. ; et al. | 2009-01-08 |
Systems And Methods For Inspecting A Specimen With Light At Varying Power Levels
App 20080304069 - Wolters; Christian ; et al. | 2008-12-11 |
System And Method To Create Haze Standard
App 20080245958 - Wolters; Christian ; et al. | 2008-10-09 |
Systems and methods for inspecting a wafer with increased sensitivity
Grant 7,372,559 - Haller , et al. May 13, 2 | 2008-05-13 |
Methods and systems for inspecting a specimen using light scattered in different wavelength ranges
Grant 7,304,310 - Shortt , et al. December 4, 2 | 2007-12-04 |
Systems and methods for inspecting a wafer with increased sensitivity
App 20070132987 - Haller; Kurt L. ; et al. | 2007-06-14 |
Methods and systems for determining drift in a position of a light beam with respect to a chuck
App 20060285112 - Reich; Juergen ; et al. | 2006-12-21 |
Illumination energy management in surface inspection
App 20060256325 - Mcmillan; Wayne ; et al. | 2006-11-16 |
Methods for forming a calibration standard and calibration standards for inspection systems
Grant 7,027,146 - Smith , et al. April 11, 2 | 2006-04-11 |
| 