Patent | Date |
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Monolithic optical beam splitter with focusing lens Grant 9,664,909 - Whiteside , et al. May 30, 2 | 2017-05-30 |
Inspection beam shaping for improved detection sensitivity Grant 9,255,891 - Wolters , et al. February 9, 2 | 2016-02-09 |
Illumination energy management in surface inspection Grant 9,194,812 - Wolters , et al. November 24, 2 | 2015-11-24 |
Multi-spot defect inspection system Grant 9,182,358 - Xu , et al. November 10, 2 | 2015-11-10 |
Surface scanning inspection system with independently adjustable scan pitch Grant 9,116,132 - Wolters , et al. August 25, 2 | 2015-08-25 |
Surface Scanning Inspection System With Independently Adjustable Scan Pitch App 20150055128 - Wolters; Christian ;   et al. | 2015-02-26 |
Monitoring incident beam position in a wafer inspection system Grant 8,934,091 - Reich , et al. January 13, 2 | 2015-01-13 |
Surface scanning inspection system with adjustable scan pitch Grant 8,885,158 - Wolters , et al. November 11, 2 | 2014-11-11 |
Illumination Energy Management in Surface Inspection App 20140328043 - Wolters; Christian ;   et al. | 2014-11-06 |
Multi-Spot Defect Inspection System App 20140268118 - Xu; Zhiwei ;   et al. | 2014-09-18 |
Illumination energy management in surface inspection Grant 8,786,850 - Wolters , et al. July 22, 2 | 2014-07-22 |
Large particle detection for multi-spot surface scanning inspection systems Grant 8,755,044 - Reich , et al. June 17, 2 | 2014-06-17 |
Inspection Beam Shaping For Improved Detection Sensitivity App 20140139829 - Wolters; Christian ;   et al. | 2014-05-22 |
Illumination Energy Management in Surface Inspection App 20140118729 - Wolters; Christian ;   et al. | 2014-05-01 |
Monitoring Incident Beam Position in a Wafer Inspection System App 20140071437 - Reich; Juergen ;   et al. | 2014-03-13 |
Large Particle Detection For Multi-Spot Surface Scanning Inspection Systems App 20130050689 - Reich; Juergen ;   et al. | 2013-02-28 |
Computer-implemented methods for inspecting and/or classifying a wafer Grant 8,269,960 - Reich , et al. September 18, 2 | 2012-09-18 |
Surface Scanning Inspection System With Adjustable Scan Pitch App 20120229802 - Wolters; Christian ;   et al. | 2012-09-13 |
Computer-implemented Methods For Inspecting And/or Classifying A Wafer App 20100060888 - Reich; Juergen ;   et al. | 2010-03-11 |
Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool Grant 7,528,944 - Chen , et al. May 5, 2 | 2009-05-05 |
Methods and systems for determining drift in a position of a light beam with respect to a chuck Grant 7,511,816 - Reich , et al. March 31, 2 | 2009-03-31 |
Methods And Systems For Detecting Pinholes In A Film Formed On A Wafer Or For Monitoring A Thermal Process Tool App 20080018887 - Chen; David ;   et al. | 2008-01-24 |
Methods and systems for determining drift in a position of a light beam with respect to a chuck App 20060285112 - Reich; Juergen ;   et al. | 2006-12-21 |
Accelerator pedal Grant 7,044,019 - Hauschopp , et al. May 16, 2 | 2006-05-16 |
Accelerator pedal App 20030217614 - Hauschopp, Marion ;   et al. | 2003-11-27 |