U.S. patent number 3,906,237 [Application Number 05/363,823] was granted by the patent office on 1975-09-16 for ion gauges.
This patent grant is currently assigned to U.S. Philips Corporation. Invention is credited to Lawrence Graham Pittaway.
United States Patent |
3,906,237 |
Pittaway |
September 16, 1975 |
**Please see images for:
( Certificate of Correction ) ** |
Ion gauges
Abstract
An ion gauge in which the collector is arranged outside the
ionisation region and the ions representing the gas pressure are
extracted from the ionisation region via an aperture in an X-ray
screen and directed by a reflector electrode onto the collector
electrode. The ion reflector electrode surrounding the collector
electrode is constructed and shaped so that soft X-rays passing
through the ion-exit aperture undergo multiple reflections at the
reflector electrode before they are able to be reflected onto the
collector. A cylindrical reflector electrode is disclosed provided
with an internal truncated conical X-ray reflecting member which
intercepts soft X-rays and reflects them back and forth several
times between the cylindrical and conical reflecting surfaces. The
end of the cylindrical reflecting electrode nearest the ion-exit
aperture is tapered inwardly to reflect onto the conical reflector
X-rays falling on that part of the surface.
Inventors: |
Pittaway; Lawrence Graham
(Salfords, Near Redhill, EN) |
Assignee: |
U.S. Philips Corporation (New
York, NY)
|
Family
ID: |
10220876 |
Appl.
No.: |
05/363,823 |
Filed: |
May 25, 1973 |
Foreign Application Priority Data
|
|
|
|
|
May 26, 1972 [GB] |
|
|
25017/72 |
|
Current U.S.
Class: |
250/489;
250/505.1 |
Current CPC
Class: |
H01J
41/06 (20130101) |
Current International
Class: |
H01J
41/00 (20060101); H01J 41/06 (20060101); H01j
003/108 () |
Field of
Search: |
;250/489,503,508,515,505
;313/7 ;324/33 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lawrence; James W.
Assistant Examiner: Anderson; B. C.
Attorney, Agent or Firm: Trifari; Frank R. Drumheller;
Ronald L.
Claims
I claim:
1. An ion gauge having a low x-ray photo-electron current,
comprising:
a source of electrons;
a conductive electron accelerating grid cage adjacent said source
which cage may be suitably biased so as to accelerate electrons
from said source into said cage to collide with and ionize gas
molecules therein, said cage having a conductive wall substantially
opaque to any x-rays generated by collision of said accelerated
electrons with said cage, said wall having an aperture through
which gas ions may be extracted from the interior of said cage, the
mesh of said cage being sufficiently small so as to shield the
interior of said cage from electron accelerating fields exterior
thereto;
an annular extractor electrode exterior to said cage and adjacent
and surrounding said aperture but insulated therefrom, which
extractor electrode may be suitably biased to draw gas ions from
said cage;
a thin rod-like collector electrode mounted external to said cage
with the axis thereof directed toward said aperture, which
collector electrode may be suitably biased to collect gas ions
drawn from said cage by said extractor electrode; and
a hollow deflector electrode positioned adjacent to but insulated
from said extractor electrode for receiving gas ions drawn from
said cage by said extractor electrode, said deflector electrode
surrounding said collector electrode so as to deflect gas ions
toward said collector electrode upon suitable biasing of said
deflector electrode, said deflector electrode having at least two
interior surfaces which converge away from said aperture to form a
relection trap for soft x-rays, the interior surfaces of said
deflector electrode being so angled that most soft x-rays coming
from said cage through said aperture and striking said deflector
electrode suffer multiple reflections in said reflection trap
before striking said collector electrode, thereby substantially
reducing the intensity of soft x-rays striking said collector
electrode and the photo-electron current generated thereby.
2. An ion gauge as defined in claim 1 wherein said deflector
electrode includes a cylindrical inner surface and an inner surface
in the shape of a truncated cone, said cylindrical and truncated
cone surfaces both being coaxial with said collector electrode
opposing one another and converging away from said aperture to form
a reflection trap.
3. An ion gauge as defined in claim 2 wherein said collector
electrode protrudes from the apical end of said truncated cone
surface and said cylindrical surface surrounds said cone
surface.
4. An ion gauge as defined in claim 3 wherein said cylindrical
surface has a larger diameter than said aperture and at the end
thereof adjacent said aperture tapers inward to a diameter
substantially the same as said aperture.
5. An ion gauge as defined in claim 1 wherein the soft x-ray
reflecting surfaces of said deflector electrode have an x-ray
reflection coefficient of less than 0.5.
6. An ion gauge as defined in claim 1 wherein said annular
extractor electrode has an inside diameter smaller than said
aperture and smaller than the diameter of said hollow deflector
electrode adjacent thereto.
7. An ion gauge as defined in claim 6 wherein said annular
extractor electrode has a v-shaped cross-section with the apex
thereof directed inward.
8. An ion gauge as defined in claim 1 wherein said wall has a
truncated conical region surrounding said aperture directed away
from said cage.
Description
This invention relates to ionisation vacuum gauges of the kind
employing an external collector electrode.
Low gas pressures in a region of space are frequently measured by
ionisation methods in which electrons emitted by a cathode are
accelerated so that they pass through a mesh wall into an
ionisation space bounded by said mesh wall and located in the
region, with sufficient energy to ionise gas present therein. Ions
so formed are drawn by an electrostatic field towards a suitably
biassed collector electrode and the collector current forms a
measure of the amount of gas present in the ionisation space and
hence of the gas pressure in the said region of space.
Unfortunately other concurrent phenomena also contribute to the
collector current and limit the accuracy and range of gas pressures
over which the gauge will operate satisfactorily.
One such phenomena is the generation of soft X-rays from the
collision of electrons with the mesh and other metal structural
parts surrounding the ionisation space, and interception of this
X-radiation by the collector electrode causes the emission of
photo-electrons thereby. As attempts are made to measure lower gas
pressures, this photo-electron current eventually swamps the ion
measurement current.
Early attempts to reduce the magnitude of the X-ray photocurrent
include the use of a thin wire collector as described by R. T.
Bayard and D. Alpert in Review of Scientific Instruments Volume 21
page 571, and the use of an additional modulator electrode by P. A.
Redhead Review of Scientific Instruments Volume 31 page 343. Thus
by reducing the surface area of the collector electrode the
photocurrent was reduced by comparison with the collected ion
current, and by modulating the ionisation current component it was
made possible to measure a smaller ion current in the presence of a
given residual current due to photo-emission and other factors.
A further reduction in X-ray photo-emission from the collector
electrode was achieved by mounting the collector electrode outside
the ionisation space and withdrawing ions from the ionisation space
via an aperture in an X-ray screen. Examples of such gauges are due
to P. A. Redhead in U.S. Pat. No. 3,465,189 and to J. Groszkowski
described and claimed in British Pat. No. 1,173,354.
In a development of the external-collector ion gauge, described in
U.S. Pat. No. 3,742,343, the ionisation space is formed within a
substantially equipotential boundary wall by employing a fine
aperture mesh which effectively prevents an external electrostatic
field from penetrating the ionisation region and withdrawing ions
which would otherwise pass to the collector. The apertured X-ray
shield is maintained at the same potential as the mesh, and ions
are drawn out towards the collector by means of a suitably biassed
extractor electrode. The ions are then concentrated onto a
collector electrode by means of a deflector electrode. However
there is a tendency for X-rays to pass through the aperture in the
X-ray shield and to be deflected at the surface of the reflector
electrode and thus concentrated onto the collector electrode.
It is an object of the invention to provide an improved ion gauge
employing an external collector, in which the residual X-ray
photocurrent can be significantly reduced.
According to the invention there is provided an ion gauge
comprising a source of electrons, an enclosure formed of
electrically conducting walls surrounding an ionisation space in
which in operation a gas whose pressure is to be measured is
present, the walls of said enclosure including a peripheral
apertured region forming an electron accelerating grid such that in
operation electrons are directed thereat by the application to said
source mounted outside said enclosure of a negative bias relative
to said enclosure sufficient to cause at least some of said
electrons to pass into the ionisation space and to ionise gas
present therein, said enclosure having an end wall substantially
opaque to the passage of soft X-rays and provided with an ion-exit
aperture through which ions formed in said ionisation space by said
electrons can pass out of said ionisation space, a thin rod-like
collector electrode mounted externally with respect to said
ionisation space and directed along the axis of said ion-exit
aperture and biassed in operation to collect ions from said
ionisation space via said ion-exit aperture to provide a current
dependent on the pressure of gas in said ionisation space, and a
deflector electrode arranged to surround said collector electrode
and so biassed that said ions are caused to converge and strike
said collector electrode, said deflector electrode being so formed
that at least the major portion of X-radiation formed by collision
of electrons with the walls of said ionisation space and capable of
striking the collector electrode after passing through said
ion-exit aperture, is caused to suffer multiple reflections at said
deflector electrode and thereby to be substantially reduced in
intensity before being incident on said collector electrode.
The deflector electrode can be formed so that the major portion of
the X-radiation passing through the ion exit aperture is caused to
be reflected more than three times before reaching the collector
electrode and the X-ray reflecting portions of said deflector
electrode preferably has an X-ray reflection coefficient of less
than 0.5. The deflector electrode can include a cylindrical surface
and a further surface of revolution arranged within said
cylindrical surface coaxial both with said cylindrical surface and
with said collector electrode, so that at least the major portion
of said X-radiation passing through said aperture and directed onto
the inward facing said cylindrical surface, is reflected onto the
outward facing said further surface of revolution and thereafter
suffers multiple reflection between said surfaces. The said further
surface of revolution can comprise a truncated conical member the
apex of which is directed towards the ion exit aperture. The inward
facing cylindrical surface can be tapered gradually inwards towards
the end adjacent the ion exit aperture so that X-rays incident
thereon which would in the absence of said taper be reflected onto
the collector electrode, are reflected onto the outward facing
conical surface instead.
The end wall of the ionisation space having therein the ion-exit
aperture, can be electrically connected to the remaining walls of
the ionisation space so as to be maintained at the same potential
as said walls and an annular extractor electrode can be arranged
adjacent the ion exit aperture outside the space enclosed by said
walls and biassed negatively with respect to the walls of the
ionisation space so as to extract ions from the ionisation space
via said ion-exit aperture.
In order that the present invention may be clearly understood and
readily carried into effect an embodiment thereof will now be
particularly described by way of example, with reference to the
accompanying drawings of which:
FIG. 1 is a longitudinal section of an ion gauge embodying the
invention,
FIG. 2 is a longitudinal section of the extractor and deflector
electrode assembly of a prior form of external collector gauge
illustrating the paths taken by X-rays entering via the ion-exit
aperture, and
FIG. 3 is a longitudinal sectional outline diagram of part of the
ion gauge of FIG. 1 illustrating the paths taken by X-rays entering
the collector region via the ion-exit aperture.
An ion gauge embodying the invention is illustrated in longitudinal
section in FIG. 1 to which reference will now be made. The ion
gauge shown in FIG. 1 is normally called a nude ion gauge since it
is not provided with an airtight surrounding envelope and is
intended to be mounted in apparatus, within which the pressure is
to be measured, by means of a flange 23.
Cathodes 1, 2 in the form of electron emissive filaments are
connected to support and connection wires 21 mounted in glass seals
25, and which project therefrom so that heating and biassing
potentials can be fed thereto. It is desirable to employ filaments
which can be operated at a relatively low temperature, for example
a rhenium filament coated with lanthanum hexaboride, to prevent
dissociation of hydrogen present, however any convenient filament
and coating material can be employed.
The glass seals 25, which form insulating supports for various
electrodes via respective support wires, are attached to and each
form a seal with a metal plate 26 which latter is sealed to a
conducting cylinder 24. The metal flange 23, welded to the cylinder
24, enables the ion gauge to be attached to a vacuum system to form
a seal therewith. The glass employed for the seals 25 is chosen to
have a coefficient of thermal expansion which is compatible with
that of the plate 26.
An ionisation space 13 is bounded by a conductive electron
acceleration grid assembly 3 comprising a peripheral wall 4 and one
end wall 5, both formed of a closely woven wire mesh, conveniently
of Tungsten, and a further end wall 6, substantially opaque to soft
X-rays, and formed of thin sheet metal, conveniently stainless
steel. The mesh size of the closely woven wire mesh forming the
walls 4 and 5 is such that the largest dimension of each aperture
in the mesh is small enough to prevent the field present, in
operation, outside the electron accelerating grid 3 due to a
potential difference applied between the grid 3 and the cathodes 1,
2 and between the grid 3 and the surroundings which comprise
principally the grounded electrically conducting cylindrical screen
24, conveniently of stainless steel, from penetrating the
ionisation space 13 to a significant extent. In this way conditions
can be provided in normal operation so that, when an electron
acceleration field is employed which is sufficient to provide
optimum ionisation of the gas whose pressure is to be measured, the
collector output current does not fall significantly when the
electron accelerating field is increased while other parameters,
such as gas pressure and other electrode potentials, are maintained
constant. Other forms of apertured conducting material can
alternatively be employed for the electron transparent wall region
4, 5, for example a suitable metal such as copper, electrodeposited
on a mesh base and then stripped from the base, provided that the
largest dimension of each of the apertures is small enough to
prevent the electrostatic field set up outside the grid 3 from
significantly penetrating the ionisation space 13.
The end wall 6 of the electron accelerator grid 3 is provided with
an outwardly directed truncated conical portion 20 surrounding an
ion-exit aperture 7. A generally cylindrical deflector electrode
31, formed conveniently of stainless steel or alternatively of
molybdenum, tungsten, tantalium or other conducting material having
a relatively low X-ray coefficient of reflection, and having at one
end a wall 32, is conductively attached, for example by welding, to
a connection and support rod 34 by which means the deflector
electrode 31 can either be connected to the electron accelerator
grid 3 or to another suitable source of ion repelling
potential.
An annular extractor electrode 39, formed conveniently of stainless
steel and having a V-shape cross-section, is mounted between the
conical surround 20 of the ion-exit aperture 7 and the open end
portion 33 of the deflector electrode 31 but is insulated therefrom
and is provided with a conducting support 30 which forms the
connection to a source of ion extracting bias potential, not shown.
The inner radial extremity of the annular extractor electrode 39
projects inwardly, in a radial sense, slightly beyond the edge of
the aperture 7 and the edge of the open end portion 33 towards the
axis of the path taken by ions extracted via the aperture 7. The
outer diameter of the electrode 39 is greater than that of the
surrounding edge of the aperture 7 and is therefore partly screened
by the end wall 6 from ions within the ionisation space.
A collector electrode 10 in the form of a wire, conveniently a
tungsten wire extends along the axis of the extracted ion path
within the deflector 31 and is mounted on a conductive support
member 44, which extends through an aperture in the wall 32 and
through a seal 25 to form a terminal connection for the collector
electrode.
The deflector electrode 31 includes a hollow truncated conical
member 35 electrically connected thereto and arranged so that the
collector electrode projects through the aperture formed by the
truncated apex for a short distance. The member 35 can be made of
the same substance as the remainder of the deflector electrode 31
and should exhibit a relatively low reflection coefficient to
X-rays directed at the outer surface thereof.
The open end 33 of the cylindrical portion of the deflector
electrode 31 is preferably formed so that the inward facing
cylindrical surface is tapered gradually inwards towards the end
adjacent the extractor electrode 39.
A bead 36 of an insulating substance, such as glass or ceramic, is
provided on the collector electrode 10 and arranged to screen the
end of the collector support 44 from X-rays directed thereat from
the walls of the ionisation region 13 via the ion-exit aperture 7.
That part of the collector support 44 situated between the end wall
32 of the deflector 31 and the seal 25, is shielded from the
incidence of charged particles present outside the extraction
reflection system by a surrounding conducting cylindrical shield 37
attached and connected to the end wall 32.
In operation the cathodes 1, 2 are biassed negatively with respect
to the grid 3 so that electrons are accelerated towards the mesh
wall 4 and penetrate the apertures therein with sufficient energy
to ionise gas present in the space 13. The screen 24 is connected
to ground and the cathodes 1, 2 are biassed positively with respect
thereto. The extractor electrode 39 and the collector 10 are
biassed negatively with respect to the cathodes 1 or 2. The
deflector 31 is biassed positively with respect to the collector
10, to a potential equal to or greater than that of the grid 3.
Electrons present within the grid 3 form a space charge which,
together with the screening effect of the closely woven mesh walls
4 and 5, produce an electric field within the ionising region 13
which tends to prevent positive ions formed therein from escaping
via apertures in the walls 4 and 5 and to cause the positive ions
to tend to move towards the central part of the ionisation
region.
The potential on the extractor 39 sets up an ion extraction field
which draws positive ions out of the ionisation region 13 via the
aperture 7 towards the collector 10. The converging effect of the
electron lens formed between the extractor 39 and the conical
portion 20 of the wall 6 causes the ions to follow paths which, in
general, avoid collision with the extractor 39. The further
converging lens formed between the extractor 39 and the deflector
31 further assists in directing ions away from the extractor 39 and
towards the collector electrode 10.
The collector electrode 30 is so situated that soft X-rays
generated by the collision of electrons with the peripheral grid
portion 4 of the acceleration grid 3 are substantially shielded
therefrom by the end wall 6. However, soft X-rays generated at the
end wall 5 and in that part of the peripheral grid 4 adjacent
thereto, can pass through the ion-exit aperture 7, strike the
inside surface of the cylindrical portion of the deflector
electrode 31, and be reflected therefrom.
In the prior form of external-collector ion gauge described in
copending British patent application No. 53007/69 (PHB 32008), the
soft X-rays which pass through the ion-exit aperture and strike the
inside cylindrical surface of the deflector electrode, tend to be
reflected and concentrated onto the collector electrode because of
the rotational symmetry about the axis of the extracted ion beam,
and the end wall of the deflector electrode.
FIG. 2 illustrates in longitudinal section typical paths taken by
soft X-rays passing through the ion-exit aperture 7 from the walls
of the ionisation space 13 into an ion extractor assembly similar
to that illustrated in FIG. 5 of the aforesaid British patent
application No. 53007/69 (PHB 32008). Two ray paths are shown.
X-rays following the path 46 will be reflected by the cylindrical
inner surface of the deflector electrode 51 and, because of the
rotational symmetry, will tend to be concentrated onto the surface
of the collector electrode 50 where, of course, the incident X-rays
will cause the photoemission of electrons and hence add an
undesired component to the collector current which is not pressure
dependent and will tend to swamp the pressure-dependent ion current
to be measured at lower pressures. Another typical X-ray path is
indicated by the reference 47, and this undergoes two reflections,
at the inner cylindrical surface of the deflector 51 and at the end
wall 52, before reaching the collector electrode.
Most metals have a relatively low reflection coefficient, in the
region of from 0.2 to 0.3 for polished surfaces of for example
molybdenum tungsten or tantalum, but since a large proportion of
the soft X-rays passing via the aperture can readily reach the
collector electrode in the arrangement shown in FIG. 2 after only
one or two reflections, the residual intensity of the X-rays
incident on the collector electrode can cause a significant
undesired residual collector current component.
Referring now to FIG. 3, which similarly illustrates typical paths
taken by soft X-rays passing through the ion-exit aperture 7 from
the walls of the ionisation space 13 into the ion extractor
assembly shown in FIG. 1 and embodying the invention, it will be
seen that the inner surface of the cylindrical deflector 31 and the
outer surface of the truncated conical member 35 cooperate to cause
the possible X-ray paths to undergo at least three and preferably
more than three reflections before reaching the collector
electrode. Thus the rays 55 and 56 suffer a plurality of
reflections between the cylindrical inner surface of the deflector
31 and the outer conical surface of the member 35 before reaching
the surface of the collector electrode 10. Since the reflection
coefficient for each reflection is small, the intensity of the
reflected beam will decline rapidly as the number of reflections
suffered by the X-radiation increases.
The deflector 31 can take the cylindrical form shown in FIG. 2, and
the open end is indicated by the dotted profile 33' in FIG. 3.
However, X-rays entering at an oblique angle via the aperture 7,
such as the ray 57, would tend to be reflected onto the collector
electrode 10 after only one reflection, as the ray 57'. In the
preferred embodiment, therefore, the inward facing cylindrical
surface of the deflector electrode 31 is tapered gradually inwards
over the region 33 towards the end adjacent the extractor electrode
39 and the ion-exit aperture 7. It can be seen that, as a result,
the reflected beam path 57" is directed onto the outward facing
surface of the conical member 35 and is repeatedly reflected
between the two surfaces a plurality of times, after which the
resultant intensity is negligible.
The extractor electrode 39 is preferably shaped so that the tip 41
of the V-shaped cross-section has as small a diameter as possible.
When the extractor electrode is shaped with a near-cylindrical
portion at the tip, as shown at 40 in FIG. 2, there will be
presented a relatively large area from which X-radiation can be
reflected directly onto the collector electrode in a manner similar
to that of the ray 57' in FIG. 3.
It should be noted that the inner surface of the deflector
electrode 31 including the portion 33, and the outer surface of the
truncated conical member 35 should be polished to ensure reflection
of X-radiation in the desired direction. An unpolished and
therefore diffusing surface would give uncontrolled scattering and
would increase the chance that a significant amount of X-radiation
would reach the collector after only one or two reflections.
As is well known, the best sensitivity for low pressure measurement
can be obtained by employing a modulator electrode, and this can be
introduced into the ionisation space 13 via an aperture in the end
wall 5 of the grid 3. It has been found by experiment that a gauge
embodying the invention can enable the lower limit of pressure
measurement to be extended by a factor of 5.
* * * * *