U.S. patent number 3,833,811 [Application Number 05/377,524] was granted by the patent office on 1974-09-03 for scanning electron microscope with improved means for focusing.
This patent grant is currently assigned to Nihon Denshi Kabushiki Kaisha. Invention is credited to Hirotami Koike, Shigekata Sakurai, Katsuyoshi Ueno.
United States Patent |
3,833,811 |
Koike , et al. |
September 3, 1974 |
SCANNING ELECTRON MICROSCOPE WITH IMPROVED MEANS FOR FOCUSING
Abstract
A scanning electron microscope for observing a transmitted
electron scanning image of a specimen incorporating a means for
detecting electron beams transmitted in more than one direction
separately and a means for displaying scanning images corresponding
to said detected beams, thus facilitating the focusing adjustment
of the condenser lens system incorporated in said scanning electron
microscope.
Inventors: |
Koike; Hirotami (Tokyo,
JA), Sakurai; Shigekata (Tokyo, JA), Ueno;
Katsuyoshi (Tokyo, JA) |
Assignee: |
Nihon Denshi Kabushiki Kaisha
(Tokyo, JA)
|
Family
ID: |
13400299 |
Appl.
No.: |
05/377,524 |
Filed: |
July 9, 1973 |
Foreign Application Priority Data
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Jul 11, 1972 [JA] |
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47-69360 |
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Current U.S.
Class: |
250/306; 250/397;
250/311 |
Current CPC
Class: |
H01J
37/21 (20130101); H01J 37/153 (20130101); H01J
37/28 (20130101) |
Current International
Class: |
H01J
37/04 (20060101); H01J 37/02 (20060101); H01J
37/28 (20060101); H01J 37/21 (20060101); H01J
37/153 (20060101); H01j 037/26 () |
Field of
Search: |
;250/306,310,311,307,397 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Lawrence; James W.
Assistant Examiner: Church; C. E.
Attorney, Agent or Firm: Webb, Burden, Robinson &
Webb
Claims
Having thus described the invention with the detail and
particularity as required by the Patent Laws, what is desired
protected by Letters Patent is set forth in the following
claims:
1. In a scanning electron microscope incorporating an electron gun
for generating an electron beam, an electron lens system for
focusing the said beam on the surface of a thin specimen, a
scanning means for scanning the beam over the specimen surface, the
improvement comprising a detecting means for separately detecting
the electrons transmitted through the specimen in different
substantially discrete directions and a display means for
simultaneously displaying the scanning images corresponding to the
output signals of said detecting means, said display means enabling
the observation of the positional difference of the said detectors
when the electron beam is out of focus whereby the focus can be
corrected by observing said display means.
2. The improvement in a scanning electron microscope set forth in
claim 1 wherein said detecting means comprises two or more electron
detectors arranged below the specimen such that the respective
detectors detect the electrons transmitted through the specimen in
different directions.
3. The improvement in a scanning electron microscope set forth in
claim 1 wherein said detecting means comprises one electron
detector arranged below the specimen, an aperture plate arranged
above said detectors below the specimen and a means for vibrating
said aperture plate.
4. The improvement in a scanning electron microscope set forth in
claim 1 wherein said detecting means comprises two or more electron
detectors arranged below the specimen, an aperture plate arranged
over said two or more detectors below the specimen and a means for
vibrating said aperture plate.
5. The improvement in a scanning electron microscope set forth in
claim 1 wherein said detecting means comprises one electron
detector arranged below the specimen and a deflecting means for
alternatively deflecting the electron beam so as to vary the
direction of the transmitted electron beam detected by said
detector.
6. The improvement in a scanning electron microscope set forth in
claim 1 wherein said display means comprises two or more
cathode-ray tubes for displaying images corresponding to the
respective directions of the transmitted electron beams.
7. The improvement in a scanning electron microscope set forth in
claim 1 wherein said display means comprises one cathode-ray tube
for alternately displaying images corresponding to the respective
directions of the transmitted electron beams.
Description
This invention relates in general to a scanning electron microscope
and in particular to a means for monitoring the focusing condition
of the electron beam irradiating the specimen under
examination.
In a scanning electron microscope, in order to obtain a very small
diameter beam necessary for high resolution scanning image
observation, the electron beam generated by an electron gun is
condensed by one or more condenser lenses. However, adjustment of
the condenser lens excitation current for optimum beam focus is
difficult for the average microscopist. A further inconvenience is
the fact that the incorporated stigmator which requires adjustment
in order to correct lens astigmatism, a phenomenon detrimental to
obtaining optimum beam focus, is also most difficult to adjust
precisely.
An advantage of this invention is to facilitate adjustment of the
condenser lens excitation current for optimum beam focus. Another
advantage of this invention is to facilitate adjustment of the
stigmator.
These and other objects of the invention will become more readily
apparent by reading the following description in conjunction with
the accompanying drawings of which;
FIG. 1 is a schematic diagram showing one embodiment according to
the invention;
FIG. 2 is a schematic drawing showing the images displayed on the
screens of the cathode-ray tubes shown in FIG. 1;
FIG. 3 is a schematic drawing showing the electron beam path near a
specimen for explaining the invention;
FIG. 4 is a schematic diagram showing another embodiment according
to the invention;
FIG. 5 is a schematic drawing showing the image displayed on the
screen of the cathode-ray tube shown in FIG. 4;
FIGS. 6, 7, 8 and 9 are schematic diagrams showing further
embodiments according to the invention; and
FIG. 10 is a schematic drawing showing the image displayed on the
screen of the cathode-ray tube shown in FIG. 9.
Referring to FIG. 1, a thin specimen 1 is arranged in an evacuated
column 2 of a scanning electron microscope. The specimen 1 is
irradiated by an electron beam EB1 generated by an electron gun 3.
Excitation current supply sources 4 and 5 control the focal length
of condenser lenses 6 and 7 to focus the electron beam EB1 on the
specimen surface. An excitation current supply source 8 energizes
and controls a stigmator 9 in order to correct lens astigmatism.
Scanning coils 10X and 10Y scan the electron beam EB1 over the
desired area of the specimen surface. A signal generator 11
energizes the scanning coils 10X and 10Y and controls the amount of
scan. Beam detectors 12 and 13 detect the electrons transmitted
through the specimen 1. The aperture plates 12a and 13a are
arranged to pass only the transmitted electrons which pass along
the optical axis and at a certain angle .alpha., respectively. The
detected electron output signals, after being amplified by
amplifiers 16 and 17, are applied to the control grids of
cathode-ray tubes 14 and 15, respectively. The electron beams of
said CRT's are scanned by scanning coils 14X, 14Y and 15X, 15Y and,
since these scanning coils are energized and controlled by the same
scanning signal generating source 11 as scanning coils 10X and 10Y,
the scanning of the signals synchronizes with the scanning of the
electron beam EB1. As a result, scanning images corresponding to
electron beams EB2 and EB3 are displayed on the respective
cathode-ray screens 14s and 15s.
If the electron beam EB1 is correctly focussed, the images on the
respective screens will appear in identical positions. On the other
hand, if EB1 is incorrectly focussed, there will be a positional
difference D, as shown in FIG. 2, depending on how much the beam is
out of focus. Thus, in the out of focus condition, it is
comparatively easy to bring the beam into spot-on focus by
adjusting this condenser lens excitation current until the two
images are positioned identically.
FIG. 3 shows schematically the electron beam path in the vicinity
of the specimen 1 under the condition that the electron beam is
improperly focussed by a condenser lens (not shown) on a plane 18
above the specimen. The electrons which pass straight through the
specimen along the optical axis 19 are detected by a detector A
(not shown) and the electrons which pass through the specimen at
angle .alpha..sub.1 with respect to said optical axis are detected
by a second detector B (also not shown), said detectors
corresponding to detectors 12 and 13 described in FIG. 1.
Accordingly, detector A detects the electrons carrying information
pertaining to a minute area 20 of the specimen while detector B
detects the electrons carrying information pertaining to a second
minute area 21 of said specimen. As the focussed beam is scanned,
the transmitted beams move to positions as shown by the broken
lines with the result that detector B now detects the electrons
carrying information pertaining to said area 20. Thus, excepting
the time lag, shown as a positional difference D in FIG. 2, the
respective detector brightness modulation output signal is
virtually the same. Angle .alpha..sub.1, in this case, is less than
10.sup.-.sup.4 rad which is not large enough to separate elastic
and inelastic electrons in the specimen.
FIG. 4 shows another embodiment of this invention in which only one
cathode-ray tube is used to display the two images. This is made
possible by incorporating a switching circuit 23 between the output
circuit of amplifiers 16 and 17 and the control grid of the single
cathode-ray tube 22, said switching circuit being synchronized with
the scanning signal generator 11. Thus, by alternately applying
signals from detectors 12 and 13 to the control grid of the
cathode-ray tube 22 via amplifiers 16 and 17, corresponding images
are alternately displayed on the cathode-ray tube screen 22s once
per scanning frame. Accordingly, if the condenser lens system is
incorrectly adjusted, the image will vibrate by an amount D as
shown in FIG. 5. Correct adjustment, hence spot-on focus, is
obtained when the image ceases to vibrate.
FIG. 6 shows a variation of the embodiment described in FIG. 4. The
means differ, however. In this case, instead of an electrical
switching means, a mechanical vibrating means 24 is incorporated in
conjunction with an aperture plate 25. Moreover, the two detectors
26 and 27 are arranged symmetrically with respect to the microscope
optical axis. By vibrating the aperture plate 25, only one electron
beam, either EB4 or EB5 is passed through the plate aperture,
either 25a or 25b, at a given time. Accordingly, either a
stationary or vibrating image will appear on the cathode-ray tube
according to whether or not the condenser lens system is correctly
or incorrectly adjusted.
The embodiment shown in FIG. 7 achieves the same object as the
embodiment described in FIG. 6 using one wide window detector 28
instead of two smaller detectors, and an aperture plate 27 with
single aperture 27c instead of two apertures.
FIG. 9 schematically illustrates the essential part of an
embodiment designed to facilitate adjustment of the stigmator lens
as the focusing lenses. A plurality of detectors and apertures; in
this case six detectors 32, 33, 34, 35, 36 and 37 and six apertures
32a, 33a, 34a, 35a, 36a and 37a are symmetrically arranged about
the optical axis 19 below the specimen 1. The output signals of the
respective detectors, after being amplified by amplifiers 32c, 33c,
34c, 35c, 36c and 37c are applied to a switching circuit 38, the
output of which is applied to the brightness control grid of the
cathode-ray tube 22. The switching circuit 43 is synchronized with
the scanning signal generator 11.
If lens astigmatism exists, the focal length of the lens will
change as the azimuth direction with respect to the optical axis
changes. Therefore, if the stigmator power supply 8 is correctly
adjusted, D.sub.1, D.sub.2 and D.sub.3 are equal as shown in FIG.
10. Further, if the condenser lens system is also correctly
adjusted, D.sub.1, D.sub.2 and D.sub.3 are equal and zero.
It will thus be appreciated that by being able to visually monitor
the amount of image shift on the cathode-ray tube screen, stigmator
and condenser lens adjustment for optimum conditions is greatly
facilitated.
A further alternative on the embodiment shown in FIG. 7 is shown in
FIG. 8. A deflecting coil 30 energized by a deflecting current
source 31 synchronized with the scanning signal generator 11
replaces the previously described switching and vibrating means,
etc. In this embodiment, by changing the intensity of the output
current of the deflecting current source 31 in two or more steps in
turn, the transmitted electron beams having different angles with
respect to the optical axis are passed through the aperture 12a and
detected by the detector 12. Accordingly, either a stationary or
vibrating image will appear on the cathode-ray tube 22 according to
whether or not the condenser lens system is correctly or
incorrectly adjusted.
* * * * *