U.S. patent number 3,649,734 [Application Number 05/110,937] was granted by the patent office on 1972-03-14 for crucible electron beam evaporation of aluminum.
This patent grant is currently assigned to Motorola, Inc.. Invention is credited to Richard W. Wilson.
United States Patent |
3,649,734 |
Wilson |
March 14, 1972 |
CRUCIBLE ELECTRON BEAM EVAPORATION OF ALUMINUM
Abstract
A crucible liner is provided for a water-cooled copper crucible
for evaporating aluminum, the lining being electrically conductive
but having a poor thermal conductivity. Also, the lining which does
not react to a great extent with hot aluminum is and remains in
intimate contact with the copper. The inner layer 22 of the lining
is a composite of titanium diboride and boron nitride which is
cemented to the water-cooled copper body of the crucible by a
second layer operating as a cement comprising titanium or tungsten
or molybdenum or a cement such as molybdenum silicide.
Inventors: |
Wilson; Richard W. (Phoenix,
AZ) |
Assignee: |
Motorola, Inc. (Franklin Park,
IL)
|
Family
ID: |
22335747 |
Appl.
No.: |
05/110,937 |
Filed: |
January 29, 1971 |
Current U.S.
Class: |
373/11;
432/264 |
Current CPC
Class: |
C23C
14/243 (20130101); C23C 14/30 (20130101) |
Current International
Class: |
C23C
14/30 (20060101); C23C 14/28 (20060101); C23C
14/24 (20060101); H05b 007/00 () |
Field of
Search: |
;13/31 ;263/48
;266/34,39 |
References Cited
[Referenced By]
U.S. Patent Documents
Primary Examiner: Gilheany; Bernard A.
Assistant Examiner: Envall, Jr.; R. N.
Claims
What is claimed is:
1. A crucible comprising:
a body of copper having a cavity in a surface thereof,
a liner for said cavity comprising a first layer of material taken
from the group consisting of titanium, tungsten, molybdenum and a
cermet contacting the surface of said cavity and a second inner
layer of an intermetallic material comprising boron nitride and
titanium diboride whereby, said first layer adheres to said cavity
and acts as a cementing agent for holding said second inner lining
in place.
2. The invention of claim 1 in which said block is
water-cooled.
3. The invention of claim 1 in which means are provided for
vaporizing a material to be vaporized that is deposited in said
cavity.
4. The invention of claim 3 in which said vaporizing means includes
a source of a beam of electrons.
Description
BACKGROUND
In evaporation depositing of aluminum, the aluminum is usually
melted and vaporized by the application thereto of an electron
beam. The aluminum is melted and vaporized in a cavity of a
water-cooled copper crucible. When the aluminum melts, it wets the
copper whereby much of the heat provided for the evaporating of the
aluminum is actually used up in heating the copper crucible and the
cooling water for the crucible. If a crucible liner is used, the
aluminum soon wets over the lip of the liner to the crucible
whereby the copper crucible again carries away heat that was
intended for vaporizing the aluminum. The hot aluminum and the
liner may react at high temperatures of the molten aluminum. This
reaction of aluminum with the crucible can contaminate the aluminum
or the molten aluminum will stick to the hot crucible and if
aluminum is left in the crucible upon cooling, the contraction of
the residual aluminum will fracture the crucible requiring a new
one be used for each evaporation. Since the electron beam is used
for providing the heat, the liner must be electrically conductive.
To conserve heat, the liner should have low heat conductivity. The
liner should stick to the crucible and it should react very little
or not at all with hot aluminum.
It is an object of this invention to provide an improved crucible
for vaporizing aluminum.
It is another object of this invention to provide a crucible for
vaporizing aluminum in which the part that is in contact with the
hot aluminum is not very reactive therewith, is electrically
conductive but has low thermal conductivity and is not easily
separated from the body of the crucible.
SUMMARY
In accordance with this invention, a liner is provided for the
water-cooled copper crucible which has low thermal conductivity and
good electrical conductivity and which does not react to a great
extent to the hot aluminum. The liner may be of an intermetallic
composite such as titanium diboride and boron nitride. It is stuck
to the copper crucible by a cement comprising titanium or tungsten
or molybdenum or a cermet such as molybdenum silicide. The
disclosed cement will stick to the copper of the crucible. While
the cement and intermetallic composition are being applied as by
flame spraying, there will be sufficient mixing of the cement and
the composition so that the composition will be held in place in
the cavity in the copper crucible. The lining is sufficiently
conductive to act as a connection for the electron beam and is of
sufficiently low thermal conductivity so that neither it nor the
copper crucible gets very hot, whereby the efficiency of the
application of heat to the aluminum is greatly increased. Due to
the fact that the liner sticks to the crucible, molten aluminum
cannot get between the liner and the copper crucible. Since the
liner does not get too hot, the chemical interaction between the
aluminum and the liner is minimized whereby the liner lasts a long
time and the evaporated aluminum is nearly pure.
The invention will be better understood upon reading the following
description in connection with the accompanying drawing, the sole
FIGURE of which illustrates a cross section of a crucible in
accordance with this invention.
DESCRIPTION
As shown in the FIGURE, a copper crucible 10 is provided having a
cavity 11 for receiving a charge 14 to be melted and also having
water-cooling passages 12 therethrough. The cavity 11 in the
crucible 10 is provided to receive a charge of aluminum 14 to be
evaporated by an electron beam 16 projected thereon by an electron
gun 18. The aluminum 14 is shown as being in a molten state and if
the liner comprising the layers 20 and 22 (which will be described)
are not provided, the hot aluminum 14 would wet the copper 10
providing a good thermal coupling thereto, whereby a great deal of
the heat provided by the beam 16 is conducted to the copper
crucible 10 and is removed by the cooling water in the passageways
12. An inner liner 22 of an intermetallic composite such as
titanium diboride and boron nitride, which has been used for making
resistance heating evaporation boats, may be provided in the cavity
11 of the copper crucible 10. Such an inner liner however does not
make a good thermal contact with the surface of the cavity 11.
Therefore, after a short while, the molten aluminum will run over
the edge of the composite 22 because of the poor thermal
conductivity of the composite with the cavity 11 and the molten
aluminum will wet the adjacent surfaces of the liner and of the
cavity 11, whereby the aluminum is again thermally coupled to the
crucible and the heat is carried away by the cooling water as
before. Furthermore, as the lining 22 gets hot enough, the aluminum
and the inner liner 22 will interact chemically and the inner liner
22 will be damaged or destroyed and the evaporated aluminum will
not be pure. A cement 20, which may be of titanium or tungsten or
molybdenum or a cermet such as molybdenum silicide is provided to
cement the inner liner 22 in place in the cavity 11 of the copper
crucible 10. Then, the outside of the inner liner 22 sticks to the
inside of the cavity 11 and the aluminum 14 cannot get between the
inner liner 22 and the crucible 10. The inner liner 22 acts as a
poor thermal conductor between the aluminum 14 and the copper
crucible 10 and the heat provided by the beam 16 is used more
efficiently in evaporating the aluminum 14. The liner comprising
the inner liner layer 22 and including the cement 20 provides
sufficient electrical conductivity to act as an electrode for the
beam 16. The inner liner 22 does not get hot enough to react to any
great extent with the aluminum 14, whereby the inner liner 22 lasts
a long while and the vaporized aluminum is not contaminated with
material of the inner liner 22.
In providing the liner, the cement 20 is flame sprayed into the
cavity 11 and then the composite material 22 is also flame sprayed
into the cement lined cavity. It is noted that both the cement 20
and the inner lining 22 extend for a short distance over the top of
the crucible beyond the edges of the cavity 11. The cement 20 is
chosen to stick to the inside of the cavity 11 (and to the top of
the crucible) and is of one of the materials noted above. The flame
spraying of the liner 22 causes sufficient intermixing of the inner
liner material with the cement material to make the inner liner 22
stick in the cavity 11 and along the margin thereof.
* * * * *